CN116695058A - 一种适用于高光铝合金加工铣刀的硼化钛涂层 - Google Patents
一种适用于高光铝合金加工铣刀的硼化钛涂层 Download PDFInfo
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- 239000010936 titanium Substances 0.000 title claims abstract description 29
- 229910000838 Al alloy Inorganic materials 0.000 title claims abstract description 15
- 239000011248 coating agent Substances 0.000 title claims abstract description 15
- 238000000576 coating method Methods 0.000 title claims abstract description 15
- 238000003801 milling Methods 0.000 title claims abstract description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims abstract description 9
- 229910052719 titanium Inorganic materials 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 12
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 10
- 230000007704 transition Effects 0.000 claims abstract description 9
- 238000000151 deposition Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 15
- 239000000463 material Substances 0.000 description 6
- 230000008021 deposition Effects 0.000 description 3
- 230000004913 activation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
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- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/34—Sputtering
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Abstract
本发明公开了一种适用于高光铝合金加工铣刀的硼化钛涂层，在所述高光铝合金加工铣刀基体的表面依次沉积Ti底层、TiN过渡层和BTi支撑层；其中Ti底层的厚度0.3～0.5μm，TiN过渡层的厚度为0.5～1.2μm，BTi支撑层的厚度为0.8～1.2μm；该涂层表面光滑细腻、高硬度、结合好、抗冲击性强，极低的摩擦系数。
Description
技术领域
本发明属于刀具保护涂层技术领域，具体涉及一种适用于高光铝合金加工铣刀的硼化钛涂层。
背景技术
加工高光铝合金产品必备条件，高精度、高质量刀具和加工时冷却条件。提高刀具的使用寿命成为影响高光加工出现有刀纹的因素：1、高光的效果需要极小的迟到进给，排屑被干扰，刀瘤一旦干扰加工面就会破坏光洁度，需要使用高压的冷却液。2、切削热过大和切削速度过低。
由于表面涂层材料具有很高的硬度和耐磨性，且耐高温。故与未涂层的刀具(刀片)相比，涂层刀具允许采用较高的切削速度，从而提高了切削加工效率；或能在相同的切削速度下，提高刀具寿命。由于涂层材料与被加工材料之间的摩擦系数较小，故涂层刀具的切削力小于未涂层刀具，用涂层刀具加工，零件的已加工表面质量较好。由于涂层刀具的综合性能良好，故涂层硬质合金刀片有较好的通用性，但是并不适用于高光铝合金加工刀具。
发明内容
本发明的目的在于提供一种适用于高光铝合金加工铣刀的硼化钛涂层，该涂层不仅适用于硬质合金，还适用于高光铝合金加工刀具，并且具有硬度高、高温宏韧性、摩擦系数等特点。
为实现上述目的，本发明采用如下技术方案：
一种适用于高光铝合金加工铣刀的硼化钛涂层，在所述高光铝合金加工铣刀基体的表面依次沉积Ti底层、TiN过渡层和BTi支撑层；其中Ti底层的厚度0.3～0.5μm，TiN过渡层的厚度为0.5～1.2μm，BTi支撑层的厚度为0.8～1.2μm。
进一步地，采用如下步骤制备复合涂层：
(1)辉光清洗：通入Ar气，炉腔真空度为0.01～0.5Pa，基体加负偏压400～1000V，辉光清洗10～35min；
(2)调整基体负偏压至400～600V，通入Ar气，气体流量50～100sccm，开启两个Ti靶，调整靶材电流为100～250A，以Ti离子高能轰击基体1～10min形成Ti底层；
(3)以气体流量为500sccm～600sccm通入N气，控制炉内气压在1～2Pa，脉冲偏压为100～200V，占空比80％～90％，开启两个磁控Ti靶，靶材电流都为20～30A沉积40～60min获得TiN过渡层；
(4)以气体流量为500sccm～600sccm通入Ar气；控制炉内气压在1～2Pa，脉冲偏压为100～200V，占空比80％～90％，开启两个BTi磁控靶，靶材电流都为30～40A沉积60～90min获得BTi支撑层。
本发明以Ti打底，Ti层具别极好的结合材料，保证超高硬度表面层结构与模具/冲头基底材料良好的结合力，在金属机械加工中的垂直冲击力和剪切力都能够被很好地吸收，避免基底材质和表面超高硬度复合结构脱层。再覆盖TiN作为过度层，以BTi该表面涂层，具有表面光滑细腻、高硬度、结合好、抗冲击性强，极低的摩擦系数。
具体实施方式
本实施例提供的一种适用于高光铝合金加工铣刀的硼化钛涂层包括如下步骤：待加工的模具/冲头需要具备良好的表面光洁度，进行彻底清洗干燥后置于PVD真空腔室内。
(1)进行辉光清洗时，通入气体为Ar气，炉腔真空度为0.01～0.5Pa，基体加负偏压400～1000V，进行辉光清洗10～35min；
(2)调整基体负偏压至400～600V，通入气体为Ar气，气体流量50～100sccm，开启两个Ti靶，调整靶材电流为100～250A，以Ti离子高能轰击基体1～10min以活化基体表面形成0.3～0.5μm的Ti底层，同时生长200nm以内的表面活化层；
(3)通入N，气体流量为500sccm～600sccm，控制炉内气压在1～2Pa，脉冲偏压为100～200V，占空比80％～90％，开启两个磁控Ti靶，靶材电流为20～30A，得到TiN过渡层，沉积时间根据厚度根据冲击强度要求相应调整，冲击强度越大，厚度适当提高，通常厚度为0.5～1.2μm，沉积大约40～60分钟左右。
(4)通入Ar气，气体流量为500sccm～600sccm；控制炉内气压在1～2Pa，脉冲偏压为100～200V，占空比80％～90％，开启两个BTi磁控靶，靶材电流为30～40A，得到BTi支撑层，通常厚为0.8～1.2μm，沉积时间约60～90分钟左右。
以上所述仅是本发明优选的实施方式，但本发明的保护范围并不局限于此，任何基于本发明所提供的技术方案和发明构思进行的改造和替换都应涵盖在本发明的保护范围内。
Claims (2)
1.一种适用于高光铝合金加工铣刀的硼化钛涂层，其特征在于，在所述高光铝合金加工铣刀基体的表面依次沉积Ti底层、TiN过渡层和BTi支撑层；其中Ti底层的厚度0.3～0.5μm，TiN过渡层的厚度为0.5～1.2μm，BTi支撑层的厚度为0.8～1.2μm。
2.根据权利要求1所述的一种适用于高光铝合金加工铣刀的硼化钛涂层，其特征在于，采用如下步骤制备复合涂层：
(1)辉光清洗：通入Ar气，炉腔真空度为0.01～0.5Pa，基体加负偏压400～1000V，辉光清洗10～35min；
(2)调整基体负偏压至400～600V，通入Ar气，气体流量50～100sccm，开启两个Ti靶，调整靶材电流为100～250A，以Ti离子高能轰击基体1～10min形成Ti底层；
(3)以气体流量为500sccm～600sccm通入N气，控制炉内气压在1～2Pa，脉冲偏压为100～200V，占空比80％～90％，开启两个磁控Ti靶，靶材电流都为20～30A沉积40～60min获得TiN过渡层；
(4)以气体流量为500sccm～600sccm通入Ar气；控制炉内气压在1～2Pa，脉冲偏压为100～200V，占空比80％～90％，开启两个BTi磁控靶，靶材电流都为30～40A沉积60～90min获得BTi支撑层。
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