CN116671007A - 压电振动器件 - Google Patents

压电振动器件 Download PDF

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Publication number
CN116671007A
CN116671007A CN202180088703.2A CN202180088703A CN116671007A CN 116671007 A CN116671007 A CN 116671007A CN 202180088703 A CN202180088703 A CN 202180088703A CN 116671007 A CN116671007 A CN 116671007A
Authority
CN
China
Prior art keywords
crystal
heating
core
oscillation
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180088703.2A
Other languages
English (en)
Chinese (zh)
Inventor
古城琢也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Large Vacuum Of Co
Original Assignee
Large Vacuum Of Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Large Vacuum Of Co filed Critical Large Vacuum Of Co
Publication of CN116671007A publication Critical patent/CN116671007A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Vibration Prevention Devices (AREA)
CN202180088703.2A 2021-01-08 2021-12-28 压电振动器件 Pending CN116671007A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-002000 2021-01-08
JP2021002000 2021-01-08
PCT/JP2021/048747 WO2022149541A1 (ja) 2021-01-08 2021-12-28 圧電振動デバイス

Publications (1)

Publication Number Publication Date
CN116671007A true CN116671007A (zh) 2023-08-29

Family

ID=82357971

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180088703.2A Pending CN116671007A (zh) 2021-01-08 2021-12-28 压电振动器件

Country Status (5)

Country Link
US (1) US20240305269A1 (https=)
JP (1) JP7589755B2 (https=)
CN (1) CN116671007A (https=)
TW (1) TWI821840B (https=)
WO (1) WO2022149541A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025197944A1 (ja) * 2024-03-22 2025-09-25 京セラ株式会社 圧電振動素子及び圧電デバイス

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005165630A (ja) * 2003-12-02 2005-06-23 Toyo Commun Equip Co Ltd 温度制御回路とそれを用いた恒温槽型圧電発振器
JP5252221B2 (ja) * 2009-06-02 2013-07-31 オンキヨー株式会社 圧電発振器
JP5888347B2 (ja) * 2014-01-21 2016-03-22 株式会社大真空 圧電振動デバイス
WO2017110727A1 (ja) * 2015-12-25 2017-06-29 株式会社村田製作所 圧電発振器及び圧電発振デバイス
JP6825971B2 (ja) * 2016-07-07 2021-02-03 日本電波工業株式会社 恒温槽型水晶発振器
JP6965687B2 (ja) * 2017-05-18 2021-11-10 セイコーエプソン株式会社 発振器、および電子機器

Also Published As

Publication number Publication date
JP7589755B2 (ja) 2024-11-26
TWI821840B (zh) 2023-11-11
JPWO2022149541A1 (https=) 2022-07-14
WO2022149541A1 (ja) 2022-07-14
US20240305269A1 (en) 2024-09-12
TW202245407A (zh) 2022-11-16

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