CN116660166A - Gas cavity structure for cavity-assisted gas concentration measurement - Google Patents
Gas cavity structure for cavity-assisted gas concentration measurement Download PDFInfo
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- CN116660166A CN116660166A CN202310944468.5A CN202310944468A CN116660166A CN 116660166 A CN116660166 A CN 116660166A CN 202310944468 A CN202310944468 A CN 202310944468A CN 116660166 A CN116660166 A CN 116660166A
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- 238000005259 measurement Methods 0.000 title claims abstract description 28
- 238000010521 absorption reaction Methods 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 9
- 238000005516 engineering process Methods 0.000 claims description 8
- 238000001228 spectrum Methods 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 239000000565 sealant Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract description 8
- 239000000523 sample Substances 0.000 description 20
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- -1 metallurgy Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N2021/0378—Shapes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Abstract
The invention discloses a gas cavity structure for cavity auxiliary gas concentration measurement, which comprises an air inlet valve, a flow guide part, a cavity mirror and an air outlet valve, wherein the air inlet valve and the air outlet valve are arranged on the side surface of a gas cavity; a guide component is filled in the gas cavity, and the guide component is cylindrical; sample gas enters the gas cavity through the air inlet valve, is guided to the vicinity of the surface of the cavity mirror under the guidance of the flow guide component, and then enters the pipeline component of the gas cavity through the flow guide component in a turning way, and gas absorption is carried out in the pipeline component. The gas cavity cleaning device is simple in structure and easy to use, can be used for optimizing a gas cavity only through tiny change, does not need to increase a complex high-pressure and vacuum gas loop, and can be used for realizing an efficient gas cavity cleaning function.
Description
Technical Field
The invention relates to the technical field of gas cavities, in particular to a gas cavity structure for cavity auxiliary gas concentration measurement.
Background
The existing trace gas measurement technology comprises a Tunable Diode Laser Absorption Spectrum (TDLAS), a cavity ring-down spectrum (CRDS), a noise immunity cavity enhanced optical heterodyne molecular spectrum (NICE-OHMS) and the like, and in the related technology, a gas cavity is used as a main carrier for gas enrichment, sampling and absorption in online in-situ detection, and when the trace gas measurement technology is used for low-concentration detection, the sensitivity of detection is improved by combining means of long optical path, harmonic detection, cavity enhancement and the like due to weaker absorption signals, so that the trace gas measurement technology is a gas spectrum detection technology with high sensitivity, good selectivity, high response speed, high precision and the like, and is widely applied to field detection in various places such as petrochemical industry, coal, metallurgy, chemical industry, municipal gas, environmental monitoring, agriculture and the like. The gas cavity is a core structural unit of the trace gas measurement equipment, is a sealed cavity with a precise structure, and has the characteristics of high rigidity, sealing performance, fixed flow logic and the like, and is used for providing a spectrum absorption place, increasing an absorption optical path, controlling the flow logic and the like, and the characteristics of the gas cavity directly influence the performance of an instrument. Typically, a complete set of trace gas measurement spectrometers consists of a continuously tunable laser, a gas cavity, a photoelectric probe, and an auxiliary control system. The detection process generally comprises the steps of inflating, absorbing target wavelength, measuring signals, fitting data, and finally converting to obtain the gas component and the component content. As a trace gas detection means, the trace gas has the characteristics of extremely low composition ratio and extremely low content of target gas components, so that a sample to be detected is a standard gas with higher precision to a certain extent, the accuracy of a measurement result can be directly influenced by the mixing of any different gas, and the gas filling and sample feeding process is particularly important in the whole measurement in the gas measurement process. Generally, after one detection, a part of the gas detected last time remains in a new sample injection process, the result of the next detection is interfered, the gas to be detected needs to be introduced for a long time to dilute the ratio of the residual gas as much as possible, so that the consumption of the sample gas is huge, the time for preparing the gas to be inflated is long, and the measurement precision and efficiency are reduced. In some special gas measurement applications, the consumption of large amounts of gas also presents safety and waste contamination issues.
The traditional gas cavity generally adopts the design of direct connection or return circuit, and sample air current enters the intracavity through air inlet valve, tee bend etc. and carries out gas exchange under the drive of air pump, no matter adopt multichannel return circuit design, the export that tee bend or air inlet valve correspond can appear certain blind area in the overall arrangement in the gas cavity, and the air current is because the negative pressure effect of air pump, leads to the residual gas of this part blind area hardly to be fully "washd". Therefore, the gas in the dead zone participates in a new sampling flow after the sample injection process is completed, and the new measurement result is interfered. Generally, since the size of the air inlet structure (size limitation of the valve, etc.) is basically fixed, the standard valve structure of the smaller instrument cannot be too small, and even the customized valve needs to occupy a certain volume, so that the range of the cleaning blind area of the air flow is relatively unchanged in the structures of all gas cavity instruments, the shorter the gas cavity length is, the larger the proportion of the blind area to the cavity length is, and for certain scenes with low precision and resolution requirements or strict instrument volume requirements, certain precision is maintained by reducing the cavity length and reducing the volume, however, the increase of the proportion of the blind area increases the measurement error of the instrument, the actual change also reduces the space for reducing the gas cavity length of the instrument, and the miniaturization of the instrument is hindered.
Disclosure of Invention
The invention aims to provide a gas cavity structure for cavity-assisted gas concentration measurement, which is simple and easy to use, can realize gas cavity optimization through little change, does not need to add a complex high-pressure and vacuum gas loop, and can realize an efficient gas cavity cleaning function.
The invention aims at realizing the following technical scheme:
a gas chamber structure for chamber assist gas concentration measurement, the gas chamber structure comprising an inlet valve, a flow guide member, a chamber mirror, an outlet valve, wherein:
the air inlet valve and the air outlet valve are arranged at the side surface of the air cavity and close to the cavity mirror;
the gas cavity is filled with a guide part, the guide part is cylindrical according to the shape of the gas cavity, the outer diameter of the guide part is close to the inner diameter of a pipeline assembly of the gas cavity, and a narrow annular channel is formed by the outer diameter of the guide part and the inner diameter of the pipeline assembly when the guide part is nested; the flow guide component is positioned between the air inlet valve body and the air outlet valve body and is close to the valve body and used for guiding the valve body gas to the cavity mirror;
sample gas enters the gas cavity through the air inlet valve, the sample gas is guided to the vicinity of the surface of the cavity mirror under the guidance of the flow guide component, an annular flow channel is formed by the outer diameter of the flow guide component and the inner diameter of the pipeline component of the gas cavity, and a certain sealing structure is arranged at the end part of the flow guide component, so that the sample gas flows from the air inlet to the air outlet to form a loop under the action of the air pressure of the air inlet valve body and the air outlet valve body, and meanwhile, the sample gas is absorbed in the pipeline component;
after the gas absorption is finished, the absorbed gas is discharged out of the gas cavity through the gas outlet valve by the guiding of the flow guiding component; specifically, the absorbed gas flows to the far-end endoscope, flows to the air outlet valve under the action of the flow guide component, and is discharged to finish the test;
through the gas cavity structure, the sample gas can flow through the part outside the middle of the air inlet valve and the air outlet valve, the effective absorption length d of the gas cavity is expanded, and the effective absorption length d of the gas cavity is closer to the actual cavity length L, so that the gas filling ratio R is increased L Is measured more accurately;
wherein the gas filling ratio R L Refers to the ratio between the effective absorption length d of the gas cavity and the actual cavity length L, namely the gas filling ratio R, in the laser spectrum gas detection technology of the auxiliary measurement of the gas cavity L =d/L，R L ∈(0,1)。
According to the technical scheme provided by the invention, the gas cavity is simple and easy to use, the gas cavity can be optimized through very small changes, a complex high-pressure and vacuum gas loop is not required to be added, and meanwhile, the efficient gas cavity cleaning function can be realized, so that a better hardware guarantee is provided for optimizing the precision, sensitivity and reading error of laser spectrum trace gas detection, and a certain foundation is laid for miniaturization of instrument equipment.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a gas chamber structure for chamber-assisted gas concentration measurement according to an embodiment of the present invention;
FIG. 2 is an enlarged schematic view of a portion of a gas chamber structure according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a flow guiding component according to an embodiment of the present invention.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments of the present invention, and this is not limiting to the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
Fig. 1 is a schematic diagram of a gas chamber structure for chamber auxiliary gas concentration measurement according to an embodiment of the present invention, where the gas chamber structure includes an air inlet valve 1, a flow guiding component 2, a chamber mirror 3, and an air outlet valve 4, where:
the air inlet valve 1 and the air outlet valve 4 are arranged at the side surface of the air cavity and close to the cavity mirror; in the concrete implementation, the volume and the air flow of the air inlet and outlet valve are related, the smaller the air inlet and outlet valve is, the better the air inlet and outlet valve is, the smaller the air residue is, and the integration is easy;
the gas cavity is filled with a guide part 2, the guide part 2 is cylindrical according to the shape of the gas cavity, the outer diameter of the guide part 2 is close to the inner diameter of a pipeline assembly 5 of the gas cavity, and a narrow annular channel is formed by the outer diameter of the guide part 2 and the inner diameter of the pipeline assembly 5 when the guide part 2 is nested; the flow guiding component 2 is positioned between the air inlet valve body and the air outlet valve body and is close to the valve body and used for guiding the valve body gas to the cavity mirror;
sample gas enters the gas cavity through the air inlet valve 1, the sample gas is guided to the vicinity of the surface of the cavity mirror 3 under the guidance of the flow guide part 2, an annular flow channel is formed by the outer diameter of the flow guide part 2 and the inner diameter of the pipeline assembly 5 of the gas cavity, and the end part of the flow guide part 2 is provided with a certain sealing structure, so that the sample gas flows from the air inlet to the air outlet to form a loop under the action of the air pressure of the inlet valve body and the air outlet valve body, and meanwhile, the sample gas is absorbed in the pipeline assembly 5;
wherein, because the power of the guiding airflow is the negative pressure (pressure difference between the inlet end and the outlet end) of the system, the end part of the flow guiding component 2 has a certain taper besides the sealing capability, so that the outer diameter of the end part of the flow guiding component 2 gradually approaches the inner diameter of the pipeline component, thereby reducing the gas residual proportion of the part of the space;
after the gas absorption is completed, the absorbed gas is discharged out of the gas cavity through the gas outlet valve 4 by the guiding of the flow guiding component 2; specifically, the absorbed gas flows to the far-end endoscope, flows to the air outlet valve 4 under the action of the flow guide part 2, and is discharged to finish the test.
Through the gas cavity structure, the sample gas can flow through the part outside the middle of the air inlet valve and the air outlet valve, the effective absorption length d of the gas cavity is expanded, and the effective absorption length d of the gas cavity is more approximate to the actual cavityLength L, thereby increasing the gas filling ratio R L Is measured more accurately;
wherein the gas filling ratio R L Refers to the ratio between the effective absorption length d of the gas cavity and the actual cavity length L, namely the gas filling ratio R, in the laser spectrum gas detection technology of the auxiliary measurement of the gas cavity L =d/L，R L E (0, 1), the larger the data is, the larger the effective gas absorption length is, and the smaller the data is, the shorter the effective gas absorption length is, and the larger the cleaning blind area of the gas cavity is; increasing R L The value of d is increased to be close to or equal to L, so that the reading accuracy and sensitivity of the system can be obviously improved, and the measurement error of the system can be reduced.
Fig. 2 is a schematic diagram showing a part of the structure of the gas chamber in an embodiment of the present invention, wherein a dotted line represents the direction of the gas flow, so that the gas flow can be obviously seen to pass through the surface of the chamber mirror 3, then "turn around" to enter the absorption region, and participate in the measurement of the gas concentration. This not only can raise R L Meanwhile, the dead angle of the sample in the gas cavity can be cleaned, and automatic cleaning is realized in the process of new sample gas injection.
In a specific implementation, as shown in fig. 3, a schematic structural diagram of a flow guiding component according to an embodiment of the present invention is shown, where the shape of the flow guiding component is consistent with the shape of an inner wall of a gas cavity pipeline assembly, and the outer diameter of the flow guiding component is close to the inner diameter of the pipeline assembly, so as to form a narrow annular flow channel, and a sealing flange is disposed at an end of the flow guiding component, and a sealing gasket or sealant is used to seal an outlet with other structural members, so that an effective loop is formed.
In addition, for various cavity shapes of the gas cavity, including straight (two-mirror), three-mirror, four-mirror cavities, the solution can "clean" the sample gas near each lens surface and increase the length of d by changing the flow path of the gas flow. Specifically, for a cavity shape having more than two lenses, there is a dead zone of gas flow or a dead zone that is difficult to clean in the vicinity of the lenses, so that a fluid circuit can be provided in the normal direction on the surfaces of a plurality of lenses, and the air flow can be led to the vicinity of the surfaces of the respective lenses by installing a flow guiding member.
It is noted that what is not described in detail in the embodiments of the present invention belongs to the prior art known to those skilled in the art.
In summary, the embodiment of the invention has simple and easy-to-use structure, can realize gas cavity optimization through little change, and does not need to add a complex high-pressure and vacuum gas loop; the structure can realize effective gas absorption length close to theoretical cavity length, so that R L Near 1, simultaneously, the strategy based on air flow control guides the air flow direction rapidly, effectively eliminates and updates the residual gas of the gas cavity 'cleaning blind area' in the traditional scheme, obviously reduces the gas volume, and has important value for miniaturized trace gas detection instruments.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims. The information disclosed in the background section herein is only for enhancement of understanding of the general background of the invention and is not to be taken as an admission or any form of suggestion that this information forms the prior art already known to those of ordinary skill in the art.
Claims (3)
1. A gas chamber structure for chamber assist gas concentration measurement, characterized in that the gas chamber structure comprises an air inlet valve, a flow guiding component, a chamber mirror, an air outlet valve, wherein:
the air inlet valve and the air outlet valve are arranged at the side surface of the air cavity and close to the cavity mirror;
the gas cavity is filled with a guide part, the guide part is cylindrical according to the shape of the gas cavity, the outer diameter of the guide part is close to the inner diameter of a pipeline assembly of the gas cavity, and a narrow annular channel is formed by the outer diameter of the guide part and the inner diameter of the pipeline assembly when the guide part is nested; the flow guide component is positioned between the air inlet valve body and the air outlet valve body and is close to the valve body and used for guiding the valve body gas to the cavity mirror;
sample gas enters the gas cavity through the air inlet valve, the sample gas is guided to the vicinity of the surface of the cavity mirror under the guidance of the flow guide component, an annular flow channel is formed by the outer diameter of the flow guide component and the inner diameter of the pipeline component of the gas cavity, and a certain sealing structure is arranged at the end part of the flow guide component, so that the sample gas flows from the air inlet to the air outlet to form a loop under the action of the air pressure of the air inlet valve body and the air outlet valve body, and meanwhile, the sample gas is absorbed in the pipeline component;
after the gas absorption is finished, the absorbed gas is discharged out of the gas cavity through the gas outlet valve by the guiding of the flow guiding component; specifically, the absorbed gas flows to the far-end endoscope, flows to the air outlet valve under the action of the flow guide component, and is discharged to finish the test;
through the gas cavity structure, the sample gas can flow through the part outside the middle of the air inlet valve and the air outlet valve, the effective absorption length d of the gas cavity is expanded, and the effective absorption length d of the gas cavity is closer to the actual cavity length L, so that the gas filling ratio R is increased L Is measured more accurately;
wherein the gas filling ratio R L Refers to the ratio between the effective absorption length d of the gas cavity and the actual cavity length L, namely the gas filling ratio R, in the laser spectrum gas detection technology of the auxiliary measurement of the gas cavity L =d/L，R L ∈(0,1)。
2. A gas cell structure for cell assisted gas concentration measurement according to claim 1,
the guide part is consistent with the inner wall of the gas cavity pipeline assembly in shape, and the outer diameter of the guide part is close to the inner diameter of the pipeline assembly to form a narrow annular flow channel;
the end part of the flow guiding component is provided with a sealing flange, and the outlet is sealed with other structural parts by adopting a sealing gasket or sealant, so that an effective loop is formed conveniently.
3. A gas cell structure for cell assisted gas concentration measurement according to claim 1,
for the cavity shape with more than two lenses, because of the dead zone of gas flow or the dead zone which is difficult to clean near the lenses, a fluid circuit is arranged on the surfaces of a plurality of lenses along the normal direction, and the airflow is led to the near of the surfaces of each lens by installing a flow guiding component.
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| CN202310944468.5A CN116660166B (en) | 2023-07-31 | 2023-07-31 | Gas cavity structure for cavity-assisted gas concentration measurement |
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| CN202310944468.5A CN116660166B (en) | 2023-07-31 | 2023-07-31 | Gas cavity structure for cavity-assisted gas concentration measurement |
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Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003028766A (en) * | 2001-07-13 | 2003-01-29 | Ishikawajima Harima Heavy Ind Co Ltd | Gas bleeding device |
| JP2006234568A (en) * | 2005-02-24 | 2006-09-07 | Energy Support Corp | Gas measuring device |
| CN101281129A (en) * | 2005-09-15 | 2008-10-08 | 聚光科技（杭州）有限公司 | On-position type gas analysis system with on-position calibration function |
| CN102419304A (en) * | 2010-09-25 | 2012-04-18 | 北京牡丹联友电子工程有限公司 | Optical measuring probe system for high-humidity low-concentration flue gas pollutants |
| CN102621076A (en) * | 2012-03-14 | 2012-08-01 | 中国石油大学(北京) | Device, method and system for detecting energy source gas |
| CN105698850A (en) * | 2016-01-28 | 2016-06-22 | 武汉大学 | An experiment system and an experiment method used for studying dielectric barrier discharge processing of SF[6] gases |
| CN205506673U (en) * | 2015-02-13 | 2016-08-24 | 北京仁木科技有限公司 | A continuously adjustable length test chamber that is used for optical cavity to decline swinging spectral technique |
| US20180003626A1 (en) * | 2016-06-30 | 2018-01-04 | Horiba, Ltd. | Gas concentration measurement apparatus |
| CN208187966U (en) * | 2018-03-20 | 2018-12-04 | 武汉晟诺仪器科技有限公司 | Extraction-type laser gas analysis device in situ |
| US20190212260A1 (en) * | 2016-06-25 | 2019-07-11 | Hydac Electronic Gmbh | Method and device for monitoring the quality of gaseous media |
| CN210090301U (en) * | 2018-12-27 | 2020-02-18 | 上海托福生物科技有限公司江西分公司 | Infrared detection air chamber structure of expired air |
| CN112378905A (en) * | 2020-12-02 | 2021-02-19 | 北京大学 | Accurate online monitoring method and system for ammonia content in ambient air |
| CN113203698A (en) * | 2021-06-16 | 2021-08-03 | 南京羣科来信息技术有限公司 | Laser gas analyzer for measuring n gas concentrations and operation method thereof |
| CN114910437A (en) * | 2021-02-07 | 2022-08-16 | 深圳市先亚生物科技有限公司 | Measurement method and system for eliminating interference of CO2 in gas sample on CO concentration measurement |
| CN116260040A (en) * | 2022-12-20 | 2023-06-13 | 中国原子能科学研究院 | Device and method for generating short pulse excimer laser |
-
2023
- 2023-07-31 CN CN202310944468.5A patent/CN116660166B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003028766A (en) * | 2001-07-13 | 2003-01-29 | Ishikawajima Harima Heavy Ind Co Ltd | Gas bleeding device |
| JP2006234568A (en) * | 2005-02-24 | 2006-09-07 | Energy Support Corp | Gas measuring device |
| CN101281129A (en) * | 2005-09-15 | 2008-10-08 | 聚光科技（杭州）有限公司 | On-position type gas analysis system with on-position calibration function |
| CN102419304A (en) * | 2010-09-25 | 2012-04-18 | 北京牡丹联友电子工程有限公司 | Optical measuring probe system for high-humidity low-concentration flue gas pollutants |
| CN102621076A (en) * | 2012-03-14 | 2012-08-01 | 中国石油大学(北京) | Device, method and system for detecting energy source gas |
| CN205506673U (en) * | 2015-02-13 | 2016-08-24 | 北京仁木科技有限公司 | A continuously adjustable length test chamber that is used for optical cavity to decline swinging spectral technique |
| CN105698850A (en) * | 2016-01-28 | 2016-06-22 | 武汉大学 | An experiment system and an experiment method used for studying dielectric barrier discharge processing of SF[6] gases |
| US20190212260A1 (en) * | 2016-06-25 | 2019-07-11 | Hydac Electronic Gmbh | Method and device for monitoring the quality of gaseous media |
| US20180003626A1 (en) * | 2016-06-30 | 2018-01-04 | Horiba, Ltd. | Gas concentration measurement apparatus |
| CN208187966U (en) * | 2018-03-20 | 2018-12-04 | 武汉晟诺仪器科技有限公司 | Extraction-type laser gas analysis device in situ |
| CN210090301U (en) * | 2018-12-27 | 2020-02-18 | 上海托福生物科技有限公司江西分公司 | Infrared detection air chamber structure of expired air |
| CN112378905A (en) * | 2020-12-02 | 2021-02-19 | 北京大学 | Accurate online monitoring method and system for ammonia content in ambient air |
| CN114910437A (en) * | 2021-02-07 | 2022-08-16 | 深圳市先亚生物科技有限公司 | Measurement method and system for eliminating interference of CO2 in gas sample on CO concentration measurement |
| CN113203698A (en) * | 2021-06-16 | 2021-08-03 | 南京羣科来信息技术有限公司 | Laser gas analyzer for measuring n gas concentrations and operation method thereof |
| CN116260040A (en) * | 2022-12-20 | 2023-06-13 | 中国原子能科学研究院 | Device and method for generating short pulse excimer laser |
Non-Patent Citations (2)
| Title |
|---|
| ZEQIANG MO等: "Current-Modulated Cavity Ring-Down Spectroscopy for Mobile Monitoring of Natural Gas Leaks", JOURNAL OF LIGHTWAVE TECHNOLOGY, vol. 39, no. 12, XP011858067, DOI: 10.1109/JLT.2020.3003006 * |
| 王金舵等: "单光束多组分温室气体的腔衰荡光谱同步检测", 光谱学与光谱分析, vol. 39, no. 7 * |
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