CN116643226A - Integrated circuit ATE equipment calibration method - Google Patents
Integrated circuit ATE equipment calibration method Download PDFInfo
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- CN116643226A CN116643226A CN202310598102.7A CN202310598102A CN116643226A CN 116643226 A CN116643226 A CN 116643226A CN 202310598102 A CN202310598102 A CN 202310598102A CN 116643226 A CN116643226 A CN 116643226A
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- 238000012360 testing method Methods 0.000 claims abstract description 131
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
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Abstract
The invention discloses a calibration method of integrated circuit ATE equipment, and belongs to the field of integrated circuit test equipment. Firstly, selecting a calibration ball and generating a calibration ball program; the calibration sphere program was then used to verify ATE device stability. The invention further provides ATE equipment calibration based on calibration ball program generation, combines the use of the calibration balls with test equipment, test varieties, test personnel and test data, and comprehensively, accurately and rapidly judges the stability of the test equipment and the accuracy of test results. In the manual small-batch test and the large-batch automatic manipulator test of the integrated circuit, the method is an important method for analyzing the stability of the ATE equipment by manufacturing the test calibration balls and calibrating the ATE equipment by utilizing the calibration balls, so that the problem of judging the stability of the ATE equipment of the integrated circuit can be more comprehensively, accurately and quickly solved, and the problem of production quality caused by the abnormality of an ATE equipment system is avoided.
Description
Technical Field
The invention relates to the technical field of integrated circuit test equipment, in particular to an integrated circuit ATE equipment calibration method.
Background
Integrated circuit testing occupies an important place in the integrated circuit industry chain. The integrated circuit test is mainly a batch test; in batch test, small batch test relies on manual circuit handling for test, and large batch test relies on automated mechanical arm test. Integrated circuit testing relies heavily on ATE equipment, and whether the test equipment is stable directly affects the correctness of the test data. The test stability of ATE equipment may be affected when the test variety is changed, the human tester is changed, the ATE equipment is powered off and restarted, the test resources in the ATE equipment are changed, and the like. The instability of ATE equipment and test equipment is not found before testing, which can seriously affect the product test results and cause serious production quality problems.
The test efficiency of integrated circuits is severely dependent on ATE equipment and test equipment, so that stability confirmation of ATE equipment before testing needs to be fast and accurate, otherwise, the test production efficiency is seriously affected.
Disclosure of Invention
The invention aims to provide a calibration method of integrated circuit ATE equipment, which is used for solving the problem of ATE equipment stability judgment in integrated circuit testing.
In order to solve the technical problems, the invention provides a calibration method of integrated circuit (ATE) equipment, which comprises the following steps:
selecting a calibration ball and generating a calibration ball program;
ATE equipment stability was verified using a calibration sphere program.
In one embodiment, the selecting the calibration sphere and generating the calibration sphere program includes:
a batch of circuits extracted from the circuits which are qualified for testing are used as calibration balls;
determining one-to-one correspondence between the calibration sphere, the ATE equipment, the test program, and the test temperature environment;
repeating the test for more than 30 times on the calibration ball respectively, and storing test data;
selecting a key parameter ai, and judging the distribution situation of the key parameter by using a 3 sigma criterion;
calculating upper and lower limit values of each key parameter ai, and changing corresponding judgment limits in the test program; the program after the judgment limit is changed is the calibration ball program, and the calibration ball program can not be modified once being confirmed.
In one embodiment, the ATE equipment is test equipment for acceptable circuits; the test program is copied from the program used for testing the qualified circuit and named respectively, so that one calibration ball corresponds to one test program; the test temperature environment is selected from normal temperature, low temperature and high temperature, so that the whole coverage in the aspect of temperature environment is ensured.
In one embodiment, the selection of the key parameter ai includes the key dc parameter index of the working current and the driving, and the key parameter does not adopt the current parameter below the measured value 1uA or the parameter using the step-by-step test method.
In one embodiment, the data mean distribution of the critical parameters should all be in (u-3σ, u+3σ), where σ is the standard deviation and u is the test reference value of the calibration sphere critical parameters.
In one embodiment, the calculation method of the upper and lower limits of the key parameter ai is: and calculating the average value of each calibration sphere at each test environment temperature through actual measurement data, taking the average value as a test reference value u, and taking [ u-0.05 x u, u+0.05 x u ] as the upper limit and the lower limit of key parameters according to the judging requirement of +/-5% for the upper limit and the lower limit of the test reference value u.
In one embodiment, the verifying ATE device stability using the calibration sphere program comprises:
selecting a calibration ball and testing in a correct testing environment by using a corresponding calibration ball program;
selecting key parameters of the calibration ball for the test data, and observing whether the test results of the key parameters are all within a judgment limit;
it is determined whether the current ATE equipment meets the test requirements.
In one embodiment, when a test environment change occurs, 1 calibration ball and its corresponding calibration ball program are used to perform a verification test on the corresponding ATE equipment with the calibration ball; when 2 calibration balls fail, another 2 calibration balls are adopted to conduct test result comparison so as to determine whether the calibration balls are abnormal or ATE equipment is abnormal.
In one embodiment, the test environment includes one or more of test variety change, restarting after system power failure in the test process, change of test resources, transfer from manual test to automated manipulator test, and transfer of automated manipulator to manual test.
The invention provides an integrated circuit ATE equipment calibration method, which further provides ATE equipment calibration on the basis of calibration ball program generation, combines the use of a calibration ball with test equipment, test varieties, test personnel and test data, and comprehensively, accurately and rapidly judges the stability of the test equipment and the accuracy of test results. In the manual small-batch test and the large-batch automatic manipulator test of the integrated circuit, the method is an important method for analyzing the stability of the ATE equipment by manufacturing the test calibration balls and calibrating the ATE equipment by utilizing the calibration balls, so that the problem of judging the stability of the ATE equipment of the integrated circuit can be more comprehensively, accurately and quickly solved, and the problem of production quality caused by the abnormality of an ATE equipment system is avoided.
Drawings
Fig. 1 is a schematic flow chart of a calibration sphere program generating method provided by the invention.
Fig. 2 is a schematic diagram of the 3 sigma criterion judgment key parameter distribution.
FIG. 3 is a flow chart of a method for verifying ATE device stability using a calibration sphere program.
Detailed Description
The following describes in further detail an integrated circuit ATE device calibration method according to the present invention with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
The invention provides an integrated circuit ATE equipment calibration method, which is used for confirming the stability of ATE equipment and mainly comprises the steps of generating an integrated circuit calibration ball program and verifying the stability of ATE equipment by the calibration ball program.
The calibration sphere program generation method is shown in fig. 1, and comprises the following steps:
a one-to-one correspondence between the calibration sphere (i.e., sample circuit), the ATE equipment, the test program, the test temperature environment is determined, wherein,
the calibration ball is selected from the qualified test circuits; the ATE device should be a test device for acceptable circuits; copying test programs from programs used for testing qualified circuits and naming the test programs respectively to ensure that one calibration ball corresponds to one test program; the test temperature environment is selected from normal temperature, low temperature and high temperature, so that the full coverage in the aspect of temperature environment is ensured.
After the calibration ball, the ATE equipment, the test program and the test temperature environment are confirmed, the corresponding calibration ball, the ATE equipment, the test program and the test temperature environment are used for carrying out the circuit circulation test of the calibration ball, the test data are saved,
and selecting a key parameter ai, and judging the distribution condition of the key parameter by using a Laida criterion (3 sigma criterion).
Calculating the upper limit value and the lower limit value of each key parameter according to a calculation method of the upper limit and the lower limit of the key parameter ai, and changing the corresponding judgment limit in the test program; the program after the judgment limit is changed is the calibration ball program, and the calibration ball program can not be modified once being confirmed.
The key parameters ai are selected to include the key DC parameter indexes such as working current, driving and the like, and the key parameters do not adopt the current parameters with the actual measurement value below 1uA or the parameters by a stepping test method.
The 3 sigma (sigma) criterion judges that the distribution situation of the key parameters is shown in fig. 2, and the distribution situation of the data average value of the key parameters should be all located in (u-3 sigma, u+3 sigma), wherein sigma is the standard deviation, and u is the standard value, namely the average value, of the test reference value of the key parameters of the calibration sphere.
The calculation method of the upper limit and the lower limit of the key parameter ai is that firstly, the average value of each calibration sphere circuit under each test environment temperature is calculated through actual measurement data and is used as a test reference value u, the upper limit and the lower limit are judged according to +/-5%, and [ u-0.05 x u, u+0.05 x u ] are used as the upper limit and the lower limit of a key parameter test stability program.
The calibration ball program using method is implemented after the calibration ball program is generated, when any one or more of the following conditions occur simultaneously, the calibration ball and the corresponding calibration ball program are required to be used for checking and testing corresponding ATE equipment, (1) the test variety is changed; (2) restarting the system after power-off in the test process; (3) The test resources (test sockets, test boards, etc.) are changed; (4) The manual test is carried over to the automatic manipulator test, or the automatic manipulator is carried over to the manual test. The method for verifying ATE equipment stability using a calibration sphere program is shown in fig. 3 and comprises the following steps:
checking the calibration ball selecting and calibration ball program generating method, and ensuring that the calibration ball selecting and calibration ball program generating method is correct.
Checking whether the test environment has changed, including: (1) test variety change; (2) restarting the system after power-off in the test process; (3) The test resources (test sockets, test boards, etc.) are changed; (4) The manual test is carried over to the automatic manipulator test, or the automatic manipulator is carried over to the manual test.
The calibration balls are selected and tested in the correct test environment using the corresponding calibration ball program.
And selecting the key parameters of the calibration sphere for the test data, and observing whether the test results of the key parameters are all within the judgment limit.
It is determined whether the current ATE equipment meets the test requirements.
The above description is only illustrative of the preferred embodiments of the present invention and is not intended to limit the scope of the present invention, and any alterations and modifications made by those skilled in the art based on the above disclosure shall fall within the scope of the appended claims.
Claims (9)
1. A method for calibrating integrated circuit ATE equipment, comprising:
selecting a calibration ball and generating a calibration ball program;
ATE equipment stability was verified using a calibration sphere program.
2. The method of calibrating an integrated circuit ATE device of claim 2, wherein the selecting and generating a calibration sphere program comprises:
a batch of circuits extracted from the circuits which are qualified for testing are used as calibration balls;
determining one-to-one correspondence between the calibration sphere, the ATE equipment, the test program, and the test temperature environment;
repeating the test for more than 30 times on the calibration ball respectively, and storing test data;
selecting a key parameter ai, and judging the distribution situation of the key parameter by using a 3 sigma criterion;
calculating upper and lower limit values of each key parameter ai, and changing corresponding judgment limits in the test program; the program after the judgment limit is changed is the calibration ball program, and the calibration ball program can not be modified once being confirmed.
3. The integrated circuit ATE device calibration method of claim 2, wherein the ATE device is a test device for a qualified circuit; the test program is copied from the program used for testing the qualified circuit and named respectively, so that one calibration ball corresponds to one test program; the test temperature environment is selected from normal temperature, low temperature and high temperature, so that the whole coverage in the aspect of temperature environment is ensured.
4. The method for calibrating an ATE device of claim 2, wherein the key parameters ai are selected from the key dc parameter indicators including an operating current and a driving current, and the key parameters do not adopt the current parameters below 1uA measured or the parameters using a step-wise test method.
5. The method of calibrating an integrated circuit ATE device according to claim 2, wherein the data mean distribution of the critical parameters is all located in (u-3σ, u+3σ), where σ is the standard deviation and u is the test reference value of the calibration sphere critical parameters.
6. The method for calibrating an integrated circuit ATE device according to claim 2, wherein the method for calculating the upper and lower limits of the key parameter ai is as follows: and calculating the average value of each calibration sphere at each test environment temperature through actual measurement data, taking the average value as a test reference value u, and taking [ u-0.05 x u, u+0.05 x u ] as the upper limit and the lower limit of key parameters according to the judging requirement of +/-5% for the upper limit and the lower limit of the test reference value u.
7. The integrated circuit ATE device calibration method of claim 1, wherein the verifying ATE device stability using a calibration sphere program comprises:
selecting a calibration ball and testing in a correct testing environment by using a corresponding calibration ball program;
selecting key parameters of the calibration ball for the test data, and observing whether the test results of the key parameters are all within a judgment limit;
it is determined whether the current ATE equipment meets the test requirements.
8. The method of calibrating an integrated circuit ATE device according to claim 7, wherein when a change in the test environment occurs, 1 calibration ball and its corresponding calibration ball program are used to perform a verification test on the corresponding ATE device calibration ball; when 2 calibration balls fail, another 2 calibration balls are adopted to conduct test result comparison so as to determine whether the calibration balls are abnormal or ATE equipment is abnormal.
9. The method of calibrating integrated circuit ATE equipment of claim 7, wherein the test environment comprises one or more of a change in test varieties, a restart after a system power failure during a test, a change in test resources, a transfer from manual testing to automated robotic testing, and a transfer from automated robotic to manual testing.
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| CN202310598102.7A CN116643226A (en) | 2023-05-25 | 2023-05-25 | Integrated circuit ATE equipment calibration method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117872093A (en) * | 2024-01-09 | 2024-04-12 | 珠海芯试界半导体科技有限公司 | Method and system for online detection by using ATE |
| CN118095384A (en) * | 2024-03-11 | 2024-05-28 | 南京宏泰半导体科技股份有限公司 | Hardware circuit calibration method and device based on machine learning |
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2023
- 2023-05-25 CN CN202310598102.7A patent/CN116643226A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117872093A (en) * | 2024-01-09 | 2024-04-12 | 珠海芯试界半导体科技有限公司 | Method and system for online detection by using ATE |
| CN118095384A (en) * | 2024-03-11 | 2024-05-28 | 南京宏泰半导体科技股份有限公司 | Hardware circuit calibration method and device based on machine learning |
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