CN116631920A - Large-capacity assembled loading boat support for assembling horizontal vertical boat - Google Patents
Large-capacity assembled loading boat support for assembling horizontal vertical boat Download PDFInfo
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- CN116631920A CN116631920A CN202310540063.5A CN202310540063A CN116631920A CN 116631920 A CN116631920 A CN 116631920A CN 202310540063 A CN202310540063 A CN 202310540063A CN 116631920 A CN116631920 A CN 116631920A
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- 230000007246 mechanism Effects 0.000 claims description 33
- 229910000831 Steel Inorganic materials 0.000 claims description 14
- 239000010959 steel Substances 0.000 claims description 14
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 239000010453 quartz Substances 0.000 abstract description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 10
- 230000009471 action Effects 0.000 description 8
- 230000033001 locomotion Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mutual Connection Of Rods And Tubes (AREA)
Abstract
The application relates to the technical field of quartz boat loading boat supports, in particular to a high-capacity assembled loading boat support for assembling a horizontal vertical boat, which comprises two baffle plates, wherein side plates are fixed on two sides of the two baffle plates, the four side plates are detachably connected, two ends of the side plates are provided with side openings, the side plates are provided with a plurality of mounting openings at equal intervals, and a plurality of mounting openings on the same side plate are positioned between the two side openings on the side plate. According to the application, through the functions of the fixed connecting piece and the connecting frame, the whole length can be quickly adjusted as required, the capacity of the boat support equipment can be conveniently controlled as required, the upper limit of the capacity is improved, the whole stability can be effectively ensured, and through the cooperation of corresponding parts, the whole linkage operation is realized, the horizontal vertical boat can be conveniently and quickly fixed, and the operation stability of the horizontal vertical boat is ensured.
Description
Technical Field
The application relates to the technical field of quartz boat loading boat holders, in particular to a high-capacity assemblable loading boat holder for assembling a horizontal vertical boat.
Background
At present, in the manufacturing process of semiconductor chips, a work clamp for entering and exiting a furnace or storing a quartz boat or a silicon carbide boat in the related diffusion process is generally used as a storage place of the quartz boat or the silicon carbide boat, and a boat support used in the transmission process of the quartz boat or the silicon carbide boat is made of stainless steel, so that the metal ions of the quartz boat or the silicon carbide boat are contaminated in the transmission process of the quartz boat or the silicon carbide boat, thereby causing contamination of a system, affecting the electrical parameters of manufactured products, and having the problem of difficulty in taking.
The quartz boat support of the prior art with the Chinese patent publication number of CN102543805A is arranged through a reasonable structure, has strong practicability and operability and wide application range, is made of homogeneous quartz, is convenient to clean, and can reduce contamination caused by the quartz boat or the silicon carbide boat in the transferring or storing process to the greatest extent.
However, the bearing capacity of the boat support in the above technology and the prior art is limited, and the boat support cannot be well adjusted according to actual production requirements, so that the insertion pieces on two sides of the horizontal vertical boat cannot be quickly inserted into corresponding openings and fixed, and meanwhile, the horizontal vertical boat cannot be effectively clamped, so that the stability in operation is not fully ensured, and improvement is needed.
Disclosure of Invention
The application aims to solve the defects in the prior art and provides a high-capacity assemblable loading boat support for assembling a horizontal vertical boat.
In order to achieve the above purpose, the present application adopts the following technical scheme:
the utility model provides a loading boat holds in palm that large capacity can be assembled for assembling horizontal vertical boat, includes two baffle pieces, and the both sides of two baffle pieces all are fixed with the side plate piece, can dismantle between four side plate pieces and be connected, the side opening has all been seted up at the both ends of side plate piece, equidistant a plurality of installing ports of having seted up on the side plate piece, a plurality of installing ports on the same side plate piece all are located between two side openings on this side plate piece.
Compared with the prior art, the application can realize the rapid adjustment of the whole length according to the needs by the action of the fixed connecting piece and the connecting frame, is convenient for controlling the capacity of the boat support equipment according to the needs, improves the upper limit of the capacity, and can effectively ensure the whole stability.
Preferably, the connecting frame is arranged between the four side plate pieces together, the two side plate pieces on the same side are a group, the two groups of side plate pieces are detachably connected with the two ends of the connecting frame respectively, three fixed connecting pieces are arranged on the two side plate pieces on the same side at equal intervals, the fixed connecting piece positioned in the middle is connected with the two side plate pieces on the same side, and the fixed connecting piece positioned in the middle is connected with one end of the connecting frame.
Through adopting above-mentioned technical scheme, can fully guarantee the detachable connection of part, realize the assembly as required of part, promote the efficiency and the quality of equipment.
Preferably, the reels are all installed in the four corners of installing port, twine together on the reels of same installing port outside four corners has the wire rope ring, be equipped with fixture on the wire rope ring, be connected with the gangway jointly on a plurality of wire rope rings of same curb plate spare one side, be connected with synchro mechanism jointly between two gangways of same side, be connected with regulation and control mechanism on the gangway, regulation and control mechanism connects on the curb plate spare with gangway sliding connection.
Through adopting above-mentioned technical scheme, can effectively make a plurality of wire rope rings synchronous operation of same one side through the cooperation effect of regulation and control mechanism and corresponding mechanism, can effectively carry out the centre gripping in step fixedly, guarantee the fastness of horizontal vertical boat centre gripping.
Preferably, the lower end of the steel wire rope ring is fixedly provided with a fixing frame, and a plurality of fixing frames positioned on one side of the same side plate are fixedly connected with a linkage pipe which is slidably arranged on one side of the side plate.
Through adopting above-mentioned technical scheme, can help guaranteeing a plurality of wire rope rings synchronous operation on the same sideboard piece through the mount on the linkage pipe.
Preferably, the fixture is including rotating six push rods of connecting on the wire rope ring, and wherein two push rods set up respectively at the both ends of installing port, and four remaining push rods are two liang a set of, and two sets of push rods set up respectively at the upper end and the lower extreme of installing port, the one end rotation of push rod is connected with conflict member, slidable mounting has the carriage on the conflict member, the carriage is installed on the sideboard piece, the one end of conflict member and the inner wall parallel and level setting of installing port.
Through adopting above-mentioned technical scheme, can make the push rod drive conflict member through the operation of wire rope ring and remove, be convenient for effectively making the peripheral conflict member of same installing port remove towards the installing port, can effectively contradict the centre gripping to horizontal vertical boat.
Preferably, the synchronous mechanism comprises two diagonal rods which are detachably connected to two linkage pipes on the same side, one end of each diagonal rod is detachably connected with the linkage pipe close to the diagonal rod, sleeve parts are jointly penetrated and arranged on opposite sides of the two diagonal rods, baffle parts are fixed in the middle of the sleeve parts, spring parts are fixed at two ends of the baffle parts, the two spring parts are respectively fixed at one ends of the two diagonal rods, which are located in the sleeve parts, fastening bolts are respectively screwed at two ends of the sleeve parts, and the fastening bolts are in conflict with the diagonal rods corresponding to the fastening bolts.
Through adopting above-mentioned technical scheme, can make two push rods in the same sleeve pipe spare reverse movement through the effect of spring spare, be convenient for fully with the distance between two adjacent linkage pipes of adaptation, can effectively fix through fastening bolt simultaneously, guarantee the fastness after the connection.
Preferably, the diagonal rod is fixed with the inserted bar on the outer one end of sleeve spare, the opening has been seted up to the one end of inserted bar, the linkage pipe is close to the one end inside of inserted bar and is fixed with the picture peg, the jack has been seted up on the picture peg, the picture peg is pegged graft into rather than in the opening that corresponds, be equipped with positioning mechanism on the one end lateral wall in the opening, positioning mechanism is connected with the jack.
Through adopting above-mentioned technical scheme, through the setting at linkage pipe both ends, can effectively accomplish the connection between two linkage pipes of same one side and fix to fully guarantee the fastness of connection, be convenient for carry out the transmission simultaneously, drive corresponding part and function in step.
Preferably, the regulating mechanism comprises a shaft sleeve part fixed on the linkage pipe, one end of the shaft sleeve part is rotationally connected with a screw rod part, a threaded sleeve ring is screwed on the screw rod part, the threaded sleeve ring is rotationally connected to one side of the side plate part, two nut parts are screwed on the screw rod part, and the two nut parts on the same screw rod part are respectively positioned on two sides of the threaded sleeve ring.
Through adopting above-mentioned technical scheme, make the screw rod spare rotate, enable corresponding gangbar and remove to the position relation of screw rod spare and screw thread lantern ring is fully fixed through the effect of two nut pieces, so that fully with guaranteeing the stability of gangbar position, guarantee the fastness of centre gripping.
Preferably, the positioning mechanism comprises a mounting hole formed in the side wall of one end in the opening, the mounting hole is provided with an inserting rod in a sliding mode, one end of the inserting rod extending into the opening is hemispherical, and a reset spring piece is fixed on one end of the inserting rod located in the mounting hole and one end side wall of the inserting rod located in the mounting hole together.
Through adopting above-mentioned technical scheme, can make the inserted bar spare adapt to the removal of picture peg through reset spring spare, be convenient for make the inserted bar spare run through the picture peg to make corresponding part realize synchronous motion, guarantee power transmission's stability.
Preferably, the outer diameter of the plunger is smaller than the inner diameter of the linkage tube.
By adopting the technical scheme, the plugging rod and the linkage tube are convenient to plug.
The beneficial effects of the application are as follows:
1. the corresponding side plate pieces can be effectively assembled through the cooperation of the baffle pieces, the connecting frames and the fixed connecting pieces, the purpose of controlling the length of the boat support according to the needs can be achieved, the length of the boat support can be conveniently adjusted according to equipment conditions, the capacity of the boat support can be conveniently enlarged and reduced according to the needs, rapid assembly and disassembly between the parts are facilitated, and the convenience of use is improved;
2. through the cooperation of the screw rod and the threaded lantern ring, the position relation between the screw rod and the threaded lantern ring can be effectively adjusted, and the shaft sleeve piece can push the linkage pipe to move through the screw rod, so that power is conveniently provided for the operation of the corresponding connecting mechanism, and the clamping of the horizontal vertical boat and the linkage operation of the components are realized;
3. when the linkage pipe moves, the corresponding steel wire rope ring can be driven to move through the fixing frame, the steel wire rope ring can conveniently drive the push rod connected with the steel wire rope ring to move, the push rod can conveniently push the rod piece to move, the assembling position of the horizontal vertical boat and the side plate piece can be conveniently pushed, the clamping firmness can be improved, meanwhile, the stability of the position of the linkage pipe can be effectively ensured through the two nut pieces, and the loosening of parts is avoided;
4. the inserted rod and the corresponding linkage pipe can be spliced through the cooperation of the sleeve pipe piece and the push rod, and the two ends of the linkage pipe are respectively provided with the plugboards during actual production, so that the connection of a plurality of groups of sleeve pipe pieces and the push rod can be well realized, the quick assembly and disassembly of parts are realized, the suitability is ensured as required, and the fixation can be realized through the fastening bolts, so that the stable transmission is realized;
5. the inserted link and the plugboard can be connected and fixed by the cooperation of the inserted link piece and the reset spring piece so as to carry out transmission.
Drawings
FIG. 1 is a block diagram of a high capacity assemblable loading boat support for assembling a horizontal vertical boat in accordance with the present application;
FIG. 2 is a side view of a high capacity assemblable loading boat support for assembling a horizontal vertical boat in accordance with the present application;
FIG. 3 is a block diagram of a high capacity assemblable loading boat support for assembling a horizontal vertical boat in accordance with the present application;
FIG. 4 is a block diagram of a high capacity assemblable loading boat support for assembling a horizontal vertical boat in accordance with the present application;
FIG. 5 is a front view of a high capacity assemblable loading boat support for assembling a horizontal vertical boat in accordance with the present application;
FIG. 6 is an enlarged view at A of FIG. 5 of a high capacity assemblable loading boat support for assembling a horizontal vertical boat in accordance with the present application;
FIG. 7 is a block diagram of a screw member for assembling a high capacity assemblable loading boat support for a horizontal vertical boat in accordance with the present application;
FIG. 8 is a block diagram of a high capacity assemblable loading boat support for assembling a horizontal vertical boat according to the present application;
FIG. 9 is a cross-sectional view of a high capacity assemblable loading boat support for assembling a horizontal vertical boat in accordance with the present application;
in the figure: the device comprises a side plate member 1, a baffle member 2, a connecting frame 3, a fixed connecting member 4, a mounting port 5, a side opening 6, a reel 7, a sliding frame 8, a contact rod member 9, a linkage tube 10, a fixed frame 11, a shaft sleeve member 12, a screw member 13, a screw collar 14, a nut member 15, a sleeve member 16, a plugboard 17, a plugboard 18, an inserting rod 19, an opening 20, a diagonal rod 21, a spring member 22, a baffle member 23, a plughole 24, a mounting hole 25, a return spring member 26, a fastening bolt 27 and a push rod 28.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments.
Referring to fig. 1-4, a high-capacity assembled loading boat support for assembling a horizontal vertical boat comprises two baffle members 2, wherein side plate members 1 are fixed on two sides of the two baffle members 2, the side plate members 1 and the baffle members 2 can be effectively connected and fixed through bolt assemblies or plug-in components, the baffle members 2 and the side plate members 1 are fixedly connected through the cooperation of corresponding components, and the four side plate members 1 are convenient to detach, so that the possibility of lengthening the components can be realized, the length of the boat support can be prolonged as required, capacity adjustment is realized, side openings 6 are formed in two ends of the side plate members 1, a plurality of mounting openings 5 are formed in the side plate members 1 at equal intervals, a plurality of mounting openings 5 in the same side plate member 1 are all positioned between the two side openings 6 in the side plate member 1, the plug-in board structures on two sides of the horizontal vertical boat can be connected through the mounting openings 5, the plug-in board support can be effectively realized, and meanwhile, the stability of the horizontal vertical installation can be ensured through the two side plate members 1, so that the operation can be performed.
Referring to fig. 1-4, a connecting frame 3 is commonly arranged between four side plate pieces 1, two side plate pieces 1 on the same side are a group, two groups of side plate pieces 1 are detachably connected with two ends of the connecting frame 3 respectively, three fixed connecting pieces 4 are arranged on the two side plate pieces 1 on the same side at equal intervals, the fixed connecting pieces 4 positioned in the middle are connected with the two side plate pieces 1 on the same side, the fixed connecting pieces 4 positioned in the middle are connected with one end of the connecting frame 3, the possibility of completing connection by adopting a bolt component or a corresponding inserting component can be realized through the fixed connecting pieces 4, the connection firmness of a plurality of side plate pieces 1 on the same side can be conveniently realized, meanwhile, the side plate pieces 1 on the same side can be effectively prolonged through the fixed connecting pieces 4, and the assembly quantity of a horizontal vertical boat can be better lifted.
Referring to fig. 5-9, reel 7 is all installed at the four corners of installing port 5, twine jointly on the reel 7 of same installing port 5 outside four corners, be equipped with fixture on the wire rope ring, fixture is including rotating six push rods 28 of connecting on the wire rope ring, wherein two push rods 28 set up respectively at the both ends of installing port 5, four remaining push rods 28 are two by two a set of, two sets of push rods 28 set up respectively in the upper end and the lower extreme of installing port 5, the one end rotation of push rod 28 is connected with conflict member 9, slidable mounting has carriage 8 on the conflict member 9, carriage 8 installs on sideboard piece 1, the one end of conflict member 9 and the inner wall parallel and level setting of installing port 5, can drive the push rod 28 through the motion of wire rope ring, make push rod 28 step by step and wire rope ring parallel arrangement, along with the motion of push rod 28 make the one end of conflict member 9 can extend to in the installing port 5, enable conflict member 9 and horizontal vertical conflict, the centre gripping to horizontal vertical boat can be realized through a plurality of member 9 peripheral of same installing port 5, promote horizontal vertical stability.
Referring to fig. 5, 6 and 8, a plurality of steel wire rope rings on one side of the same side plate member 1 are connected with a linkage pipe 10 together, a synchronization mechanism is connected between two linkage pipes 10 on the same side together, the synchronization mechanism comprises two diagonal rods 20 detachably connected to two linkage pipes 10 on the same side, one end of each diagonal rod 20 is detachably connected with the adjacent linkage pipe 10, sleeve members 16 are arranged on opposite sides of the two diagonal rods 20 in a penetrating mode, a baffle member 22 is fixed in the middle of the sleeve member 16, spring members 21 are fixed at two ends of the baffle member 22, the two spring members 21 are respectively fixed at one ends of the two diagonal rods 20 in the sleeve member 16, the diagonal rods 20 can be pushed through the action of the spring members 21, the lengths of the two diagonal rods 20 and the sleeve member 16 are the same as the distance between the adjacent two linkage pipes 10, fastening bolts 27 are screwed at two ends of the sleeve member 16, the fastening bolts 27 are in contact with the diagonal rods 20 corresponding to each other, and the position relation between the fastening bolts 27 and the diagonal rods 20 can be effectively adjusted through the action of the fastening bolts 27 so that the positions of the diagonal rods 20 can be fixed.
Referring to fig. 5 and 7, a regulating mechanism is connected to the linkage tube 10, the regulating mechanism is connected to the side plate 1 slidably connected with the linkage tube 10, the linkage tube 10 can be effectively operated through the action of the regulating mechanism, and a plurality of wire rope rings on the same side connected with the wire rope rings are synchronously operated through the operation of the linkage tube 10, so that the wire rope rings can drive a clamping mechanism connected with the wire rope rings to operate, the clamping of a plugboard assembly penetrating through a horizontal vertical boat in the mounting port 5 can be effectively realized, the firmness of clamping is improved, looseness is avoided, the stability of components during the operation of equipment is ensured, the regulating mechanism comprises a shaft sleeve piece 12 fixed to the linkage tube 10, one end of the shaft sleeve piece 12 is rotationally connected with a screw rod piece 13, a threaded sleeve piece 14 is screwed on the screw rod piece 13, the threaded sleeve piece 14 is rotationally connected to one side of the side plate 1, two nut pieces 15 are screwed on the screw rod piece 13, the two nut pieces 15 are respectively positioned on two sides of the threaded sleeve piece 14, and in practical use, a worker can separate the two nut pieces from the threaded sleeve piece 14 through rotating the nut piece 15, so that the screw rod piece 13 can stably move, and the moving the screw rod piece 13 can move the wire rope ring 10 through the moving sleeve piece 10.
Referring to fig. 5-6, a fixing frame 11 is fixed at the lower end of the steel wire rope ring, a plurality of fixing frames 11 positioned at one side of the same side plate member 1 are fixedly connected with a linkage pipe 10 slidably installed at one side of the side plate member 1, the linkage pipe 10 can drive the steel wire rope ring to rotate through the action of the fixing frames 11, and a clamping mechanism is driven to operate through the steel wire rope ring, so that clamping of the horizontal vertical boat part is realized.
Referring to fig. 6, 8 and 9, the diagonal rod 20 is fixed with the inserted link 18 on the one end outside the sleeve member 16, the opening 19 has been seted up to the one end of inserted link 18, the opening 19 corresponds with picture peg 17, can accurate grafting, the inside picture peg 17 that is fixed with in one end that the linkage pipe 10 is close to inserted link 18, the outside diameter of inserted link 18 is less than the inside diameter of linkage pipe 10, the accurate grafting of being convenient for has seted up jack 23 on the picture peg 17, picture peg 17 peg graft in the opening 19 rather than corresponding, be equipped with positioning mechanism on the one end lateral wall in the opening 19, positioning mechanism is connected with jack 23, can effectively realize through positioning mechanism the fastness of jack 23 and picture peg 17 connection, the synchronous movement of the assurance part of being convenient for.
Referring to fig. 6, 8 and 9, the positioning mechanism comprises a mounting hole 24 formed in a side wall of one end in the opening 19, a rod inserting piece 26 is slidably mounted in the mounting hole 24, one end of the rod inserting piece 26 extending into the opening 19 is hemispherical, a return spring piece 25 is fixed on one end of the rod inserting piece 26 in the mounting hole 24 and on a side wall of one end in the mounting hole 24, the rod inserting piece 26 can be pushed to move through the return spring piece 25, meanwhile, the rod inserting piece 26 can be moved through the action of the inserting plate 17, the rod inserting piece 26 can conveniently abut against the edge of the inserting plate 17 to move, and meanwhile, when the rod inserting piece 26 corresponds to the inserting hole 23, connection can be completed so as to synchronously move with the linkage pipe 10.
In the application, when in use, a worker can connect one end of the connecting frame 3 with the opposite ends of the two side plate pieces 1 on the same side, can improve the connection firmness through the fixed connecting piece 4, can effectively plug the two ends through the baffle piece 2, can further improve the connection firmness, after the splicing is finished, the worker inserts the plug connectors on the two sides of the horizontal vertical boat into the mounting openings 5, can be connected with the plug board structures on the two sides of the horizontal vertical boat through the mounting openings 5, can effectively realize the support of the plug connectors, can simultaneously ensure the mounting stability of the horizontal vertical boat through the two side plate pieces 1 so as to operate, can realize the possibility of completing the connection through the fixed connecting piece 4 by adopting a bolt component or a corresponding plug connector, can conveniently realize the connection of the plurality of side plate pieces 1 on the same side, can effectively ensure the connection firmness, meanwhile, the side plate piece 1 on the same side can be effectively prolonged through the fixed connecting piece 4, the assembly quantity of the horizontal vertical boat can be better promoted, a worker can separate the horizontal vertical boat from the threaded lantern ring 14 by rotating the nut piece 15, so that the screw piece 13 can stably move, the screw piece 13 can push the movable shaft sleeve piece 12 to move the linkage pipe 10, the linkage pipe 10 can drive the steel wire rope ring to rotate through the action of the fixing frame 11, the steel wire rope ring drives the clamping mechanism to operate, the clamping of the horizontal vertical boat part is realized, the push rod 28 can be driven to move through the movement of the steel wire rope ring, the push rod 28 is gradually arranged in parallel with the steel wire rope ring, one end of the push rod 9 can extend into the mounting opening 5 along with the movement of the push rod 28, the push rod 9 can be in contact with the horizontal vertical boat, the clamping of the horizontal vertical boat can be realized through a plurality of the push rod 9 on the periphery of the same mounting opening 5, the stability of the horizontal vertical boat is improved, the insert rod piece 26 can be pushed to move through the reset spring piece 25, meanwhile, the insert rod piece 26 can be moved through the action of the insert plate 17, the insert rod piece 26 can abut against the edge of the insert plate 17 to move, and meanwhile, when the insert rod piece 26 corresponds to the insert hole 23, connection can be completed, so that the insert rod piece and the linkage tube 10 on the same side can synchronously move.
The foregoing is only a preferred embodiment of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art, who is within the scope of the present application, should make equivalent substitutions or modifications according to the technical scheme of the present application and the inventive concept thereof, and should be covered by the scope of the present application.
Claims (10)
1. A high capacity assemblable loading boat support for assembling a horizontal vertical boat comprising two baffle members (2), characterized in that: both sides of two baffle pieces (2) are all fixed with curb plate piece (1), can dismantle between four curb plate pieces (1) and be connected, side opening (6) have all been seted up at the both ends of curb plate piece (1), equidistant a plurality of installing ports (5) have been seted up on curb plate piece (1), and a plurality of installing ports (5) on same curb plate piece (1) all are located between two side openings (6) on this curb plate piece (1).
2. A high capacity assemblable loading boat support for assembling a horizontal vertical boat as set forth in claim 1, wherein: the connecting frame (3) is arranged between the four side plate pieces (1) together, the two side plate pieces (1) on the same side are in a group, the two groups of side plate pieces (1) are respectively and detachably connected with the two ends of the connecting frame (3), three fixed connecting pieces (4) are arranged on the two side plate pieces (1) on the same side at equal intervals, the fixed connecting pieces (4) located in the middle are connected with the two side plate pieces (1) on the same side, and the fixed connecting pieces (4) located in the middle are connected with one end of the connecting frame (3).
3. A high capacity assemblable loading boat support for assembling a horizontal vertical boat as set forth in claim 1, wherein: reel (7) are all installed in the four corners of installing port (5), twine jointly on reel (7) of same installing port (5) outside four corners has wire rope ring, be equipped with fixture on the wire rope ring, be connected with coordinated pipe (10) jointly on a plurality of wire rope rings of same curb plate spare (1) one side, be connected with synchro mechanism jointly between two coordinated pipes (10) of same side, be connected with regulation and control mechanism on coordinated pipe (10), regulation and control mechanism connects on curb plate spare (1) with coordinated pipe (10) sliding connection.
4. A high capacity assemblable loading boat support for assembling a horizontal vertical boat according to claim 3, wherein: the lower end of the steel wire rope ring is fixedly provided with a fixing frame (11), and a plurality of fixing frames (11) positioned on one side of the same side plate (1) are fixedly connected with a linkage pipe (10) which is slidably arranged on one side of the side plate (1).
5. A high capacity assemblable loading boat support for assembling a horizontal vertical boat according to claim 3, wherein: the clamping mechanism comprises six push rods (28) which are rotationally connected to the steel wire rope ring, wherein two push rods (28) are respectively arranged at two ends of the mounting port (5), the remaining four push rods (28) are arranged in pairs, the two groups of push rods (28) are respectively arranged at the upper end and the lower end of the mounting port (5), one end of each push rod (28) is rotationally connected with a collision rod piece (9), a sliding frame (8) is slidably arranged on each collision rod piece (9), the sliding frame (8) is arranged on the side plate piece (1), and one end of each collision rod piece (9) is arranged flush with the inner wall of the mounting port (5).
6. A high capacity assemblable loading boat support for assembling a horizontal vertical boat according to claim 3, wherein: the synchronous mechanism comprises two inclined rods (20) which are detachably connected to two linkage pipes (10) on the same side, one end of each inclined rod (20) is detachably connected with the corresponding linkage pipe (10) close to the inclined rods, sleeve parts (16) are jointly penetrated through opposite sides of the two inclined rods (20), baffle parts (22) are fixed in the middle of each sleeve part (16), spring parts (21) are fixed at two ends of each baffle part (22), the two spring parts (21) are respectively fixed at one ends of the two inclined rods (20) located the corresponding sleeve parts (16), and fastening bolts (27) are respectively screwed at two ends of each sleeve part (16), and the fastening bolts (27) are in contact with the corresponding inclined rods (20).
7. A high capacity assemblable loading boat support for assembling a horizontal vertical boat as set forth in claim 6, wherein: the utility model discloses a socket, including socket, sleeve pipe spare (16), connecting rod (20), link pipe (10), inserted bar (18) are fixed with on the one end that is located outside sleeve pipe spare (16), opening (19) have been seted up to one end of inserted bar (18), link pipe (10) are close to the one end inside of inserted bar (18) and are fixed with picture peg (17), jack (23) have been seted up on picture peg (17), picture peg (17) are pegged graft in rather than opening (19) that correspond, be equipped with positioning mechanism on the one end lateral wall in opening (19), positioning mechanism is connected with jack (23).
8. A high capacity assemblable loading boat support for assembling a horizontal vertical boat as set forth in claim 6, wherein: the regulating mechanism comprises a shaft sleeve piece (12) fixed on a linkage tube (10), one end of the shaft sleeve piece (12) is rotationally connected with a screw rod piece (13), a threaded sleeve ring (14) is screwed on the screw rod piece (13), the threaded sleeve ring (14) is rotationally connected to one side of the side plate piece (1), two nut pieces (15) are screwed on the screw rod piece (13), and the two nut pieces (15) on the same screw rod piece (13) are respectively located on two sides of the threaded sleeve ring (14).
9. A high capacity assemblable loading boat support for assembling a horizontal vertical boat as set forth in claim 7, wherein: the positioning mechanism comprises a mounting hole (24) formed in the side wall of one end in the opening (19), a plug rod piece (26) is slidably mounted in the mounting hole (24), one end, extending into the opening (19), of the plug rod piece (26) is hemispherical, and a reset spring piece (25) is fixed on one end, located in the mounting hole (24), of the plug rod piece (26) and one end side wall, located in the mounting hole (24), of the plug rod piece.
10. A high capacity assemblable loading boat support for assembling a horizontal vertical boat as set forth in claim 7, wherein: the outer diameter of the inserted link (18) is smaller than the inner diameter of the linkage tube (10).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310540063.5A CN116631920B (en) | 2023-05-15 | 2023-05-15 | Large-capacity assembled loading boat support for assembling horizontal vertical boat |
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| CN202310540063.5A CN116631920B (en) | 2023-05-15 | 2023-05-15 | Large-capacity assembled loading boat support for assembling horizontal vertical boat |
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| CN116631920B CN116631920B (en) | 2023-12-15 |
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Citations (6)
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|---|---|---|---|---|
| JPH08107079A (en) * | 1994-09-30 | 1996-04-23 | Toshiba Ceramics Co Ltd | Vertical wafer boat and vertical heat treatment furnace |
| JPH11204628A (en) * | 1997-12-29 | 1999-07-30 | Samsung Electron Co Ltd | Semiconductor wafer port |
| JP2004327776A (en) * | 2003-04-25 | 2004-11-18 | Sumitomo Mitsubishi Silicon Corp | Wafer boat for vertical heat treatment furnace |
| KR20070091845A (en) * | 2006-03-07 | 2007-09-12 | 주식회사 하이닉스반도체 | Apparatus for fabricating semiconductor device |
| KR100872775B1 (en) * | 2007-08-02 | 2008-12-09 | 한국전자통신연구원 | Horizontal diffusion furnace for manufacturing semiconductor wafer |
| CN210722974U (en) * | 2019-11-25 | 2020-06-09 | 潍坊华光光电子有限公司 | Quartz boat for placing silicon wafers |
-
2023
- 2023-05-15 CN CN202310540063.5A patent/CN116631920B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08107079A (en) * | 1994-09-30 | 1996-04-23 | Toshiba Ceramics Co Ltd | Vertical wafer boat and vertical heat treatment furnace |
| JPH11204628A (en) * | 1997-12-29 | 1999-07-30 | Samsung Electron Co Ltd | Semiconductor wafer port |
| JP2004327776A (en) * | 2003-04-25 | 2004-11-18 | Sumitomo Mitsubishi Silicon Corp | Wafer boat for vertical heat treatment furnace |
| KR20070091845A (en) * | 2006-03-07 | 2007-09-12 | 주식회사 하이닉스반도체 | Apparatus for fabricating semiconductor device |
| KR100872775B1 (en) * | 2007-08-02 | 2008-12-09 | 한국전자통신연구원 | Horizontal diffusion furnace for manufacturing semiconductor wafer |
| CN210722974U (en) * | 2019-11-25 | 2020-06-09 | 潍坊华光光电子有限公司 | Quartz boat for placing silicon wafers |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116631920B (en) | 2023-12-15 |
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