CN116626882B - Small-size high stability mirror device that shakes - Google Patents
Small-size high stability mirror device that shakes Download PDFInfo
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- CN116626882B CN116626882B CN202310913270.0A CN202310913270A CN116626882B CN 116626882 B CN116626882 B CN 116626882B CN 202310913270 A CN202310913270 A CN 202310913270A CN 116626882 B CN116626882 B CN 116626882B
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- 210000004907 gland Anatomy 0.000 claims description 5
- 238000013461 design Methods 0.000 abstract description 4
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- 238000010586 diagram Methods 0.000 description 6
- 239000000523 sample Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The application relates to a small high-stability vibrating mirror device, belonging to the field of mechanical design of photoelectric platforms; the device comprises a shell and a reflector assembly arranged at the top end of the shell, wherein a driving assembly is arranged in the shell, and a sensor assembly is arranged at the bottom end of the shell; the driving assembly penetrates through the shell, one end of the driving assembly is fixedly connected with the reflector assembly, the other end of the driving assembly is fixedly connected with the positioning plate, the driving assembly is connected with the control circuit, and the control circuit is used for controlling the driving assembly to rotate in the shell and simultaneously driving the reflector assembly and the positioning plate assembly to follow to rotate; the positioning plate is rotatably arranged in the sensor assembly and reflects the motion state of the reflecting mirror assembly in real time; the sensor assembly comprises an eddy current fixing seat fixed at the bottom end of the shell and eddy current sensors arranged on the eddy current fixing seat, and the two eddy current sensors are distributed on two sides of a central shaft of the eddy current fixing seat. The application effectively reduces the overall mass and volume of the system, and has stable rotation center, high precision and high reliability.
Description
Technical Field
The application belongs to the field of mechanical design of photoelectric platforms, and particularly relates to a small high-stability galvanometer device.
Background
The galvanometer is a predictable on-the-fly invariant system provided by closed-loop servo control, has the advantages of high precision, high bandwidth, small volume and the like, and has been widely applied to the fields of laser communication, optical stability, laser processing, life science, medical diagnosis and the like.
The traditional vibrating mirror mainly adopts a photoelectric sensor to collect angles, and the photoelectric sensor has large volume, complex equipment and high maintenance difficulty.
Disclosure of Invention
The application aims to provide a small high-stability vibrating mirror device, which aims to solve the technical problems that the traditional vibrating mirror is mainly used for collecting angles by adopting photoelectric sensors, the photoelectric sensors are large in size, complex in equipment and high in maintenance difficulty.
In order to achieve the above purpose, the specific technical scheme of the small high-stability galvanometer device is as follows:
due to the gradual improvement of the application environment, the application innovates and designs the mechanical structure of the system, and mainly aims at designing the structure of the sensor part. The traditional vibrating mirror mainly adopts a photoelectric sensor to collect angles, and the photoelectric sensor has large volume, complex equipment and high maintenance difficulty. The application adopts the electric vortex sensor to collect, and the electric vortex sensor has the advantages of high frequency, high precision, large swing angle, small zero drift in the whole temperature range, strong vibration and impact resistance and the like.
By redesigning the system, the system volume is effectively reduced, the scanning angle is increased, the scanning frequency is increased, and the response time and the sensitivity of the single-axis system are improved.
A small-sized high-stability galvanometer device comprises a shell and a reflecting mirror assembly arranged at the top end of the shell, wherein a driving assembly is arranged in the shell, and a sensor assembly is arranged at the bottom end of the shell; the driving assembly penetrates through the shell, one end of the driving assembly is fixedly connected with the reflector assembly, the other end of the driving assembly is fixedly connected with the positioning plate, the driving assembly and the sensor assembly are both connected with the control circuit, and the control circuit is used for controlling the driving assembly to do rotary motion in the shell and simultaneously driving the reflector assembly and the positioning plate assembly to follow the rotary motion;
the positioning plate is rotatably arranged in the sensor assembly, and the sensor assembly is used for detecting the deflection angle of the positioning plate, so that the movement state of the reflecting mirror assembly can be reflected in real time; the sensor assembly comprises an eddy current fixing seat fixed at the bottom end of the shell and two eddy current sensors which are detachably arranged on the eddy current fixing seat, wherein the two eddy current sensors are distributed on two sides of a central shaft of the eddy current fixing seat.
Further, bearing assemblies are arranged at two ends of the driving assembly;
the bearing assembly comprises a bearing gland arranged at the top end of the shell and a bearing seat arranged at the bottom end of the shell, the bearing gland is fixed at the top end of the shell, a first deep groove ball bearing is arranged in the bearing seat, and the first deep groove ball bearing is sleeved at the upper end of the driving assembly;
the bearing assembly further comprises a second deep groove ball bearing sleeved at the top end of the shell, and the second deep groove ball bearing is sleeved at the lower end of the driving assembly.
Further, the driving assembly comprises a stator fixed in the shell and a rotor sleeved in the stator, a plurality of permanent magnets are fixed on the rotor, and a plurality of groups of coils are correspondingly arranged on the stator; one end of the rotor is provided with a reflecting mirror component, and the other end of the rotor is provided with a positioning plate.
Further, the shaft shoulders are integrally formed at two ends of the rotor and are abutted against the bearing assembly.
Further, set up the stopper between bearing assembly and the speculum subassembly, set up the spacing inslot in the stopper, the one end that the rotor is close to the speculum subassembly sets up at least one set of spacing pin, spacing pin arrangement in the spacing inslot.
Further, the positioning plate is connected with the driving assembly through the mounting seat, a groove is formed in the middle of one side of the positioning plate, and the mounting seat is clamped in the groove;
the mounting seat is fixed at the bottom end of the driving assembly through screws, and rabbets matched with the grooves are formed in two sides of the mounting seat.
The small high-stability galvanometer device has the following advantages: through the structural design and the use of the novel sensor, the application effectively reduces the overall mass and volume of the system, has stable rotation center, high precision and high reliability, reduces the assembly time and simplifies the processing process.
Drawings
Fig. 1 is a schematic diagram of a small-sized high-stability galvanometer device according to the present application.
Fig. 2 is a cross-sectional view of fig. 1 at B-B.
Fig. 3 is a cross-sectional view showing the internal structure of a small-sized high-stability galvanometer apparatus according to the present application.
Fig. 4 is a schematic diagram of a small-sized high-stability galvanometer apparatus according to the present application.
Fig. 5 is a bottom view of a small-sized high-stability vibrating mirror device according to the application, in which the stator and the rotor are matched.
Fig. 6 is an exploded view of a small high stability galvanometer apparatus of the application.
Fig. 7 is an exploded view of a part of the structure of a small-sized high-stability galvanometer apparatus according to the present application.
Fig. 8 is a schematic explosion diagram of a part of the structure of a small-sized high-stability galvanometer device according to the application.
Fig. 9 is a schematic diagram showing the cooperation of the driving assembly, the bearing assembly, the reflecting mirror assembly and other components of the small-sized high-stability vibrating mirror device.
Fig. 10 is a schematic diagram II of a driving assembly, a bearing assembly, a reflecting mirror assembly and other components of a small-sized high-stability vibrating mirror device.
Fig. 11 is a schematic diagram of a driving assembly, a bearing assembly, a mirror assembly, and other components of a small-sized high-stability galvanometer device according to the present application.
Fig. 12 is a bottom view of a small-sized high-stability galvanometer assembly of the application with the drive assembly, bearing assembly, and mirror assembly mated.
Fig. 13 is a cross-sectional view of fig. 12 in the direction A-A.
Fig. 14 is a schematic structural view of the small-sized high-stability galvanometer device with the matched components such as a shell, a rotor and a limiting block.
The figure indicates: 1. a housing; 2. a mirror assembly; 3. a drive assembly; 301. a stator; 302. a rotor; 4. a sensor assembly; 401. the electric vortex fixing seat; 402. an eddy current sensor; 5. a bearing assembly; 501. a bearing gland; 502. a bearing seat; 503. a first deep groove ball bearing; 504. a second deep groove ball bearing; 6. a shaft shoulder; 7. a limiting block; 8. a limit groove; 9. limit pins; 10. a mounting base; 11. a groove; 12. a spigot; 13. and (5) positioning the plate.
Description of the embodiments
For a better understanding of the objects, structures and functions of the present application, a small-sized high-stability galvanometer apparatus according to the present application will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, the driving assembly 3 of the present application is a swing angle motor that realizes a performance of realizing a large torque and a fast response in a small angle range through a coil process. The swing angle motor has the advantages of simple structure, good reliability, small torque fluctuation, small static friction torque and large output torque. Meanwhile, the device has the characteristic of small volume. The sensor part adopts an eddy current sensor 402, the eddy current sensor 402 is a non-contact displacement measuring sensor which is used for accurately measuring the displacement of the conductive material, the working principle of the eddy current sensor 402 is a magnetic field, a control circuit generates alternating current in a coil at the tail end of a probe of the eddy current sensor 402, thus an alternating magnetic field is generated, and small currents called eddy currents are introduced into the target material. The eddy currents produce an opposing magnetic field that resists the magnetic field produced by the sensor probe coil. The interaction of the magnetic fields depends on the distance between the sensor probe and the target. With the change of the distance, the control circuit measures the change of the interaction of the magnetic field, and generates voltage output which is proportional to the change of the distance between the probe and the target, so as to obtain the deflection angle of the whole shaft system.
By using the eddy current sensor 402 and the yaw angle motor, the performance of single axis high speed scanning is achieved. Its advantages are high frequency, large swing angle, zero drift and strong vibration and impact power. The device can be widely applied to the frame scanning mirror and the retrace mirror in vehicle-mounted, ship-mounted and vehicle-mounted infrared equipment.
A small-sized high-stability galvanometer device comprises a shell 1 and a reflecting mirror component 2 arranged at the top end of the shell 1, wherein the reflecting mirror component 2 is a working mirror body of the application and is used for providing light beam reflection, and the size and the moment of inertia of the reflecting mirror component determine the bandwidth of the device; a driving component 3 is arranged in the shell 1, and a sensor component 4 is arranged at the bottom end of the shell 1; the shell 1 is a carrier base of the application and is used for fixing a swing angle motor component, a bearing component 5 and a sensor component 4 of a driving component 3, wherein the driving component 3 penetrates through the shell 1, one end of the driving component 3 is fixedly connected with a reflector component 2, the other end of the driving component is fixedly connected with a positioning plate 13, the driving component 3 and the sensor component 4 are both connected with a control circuit, and the control circuit is used for controlling the driving component 3 to do rotary motion in the shell 1 and simultaneously driving the reflector component 2 and the positioning plate 13 to do rotary motion;
the positioning plate 13 is rotatably arranged in the sensor assembly 4, and the sensor assembly 4 is used for detecting the deflection angle of the positioning plate 13, so that the movement state of the reflector assembly 2 can be reflected in real time; the sensor assembly 4 comprises an eddy current fixing seat 401 fixed at the bottom end of the shell 1, and two eddy current sensors 402 detachably arranged on the eddy current fixing seat 401, wherein the two eddy current sensors 402 are distributed on two sides of a central shaft of the eddy current fixing seat 401, and the eddy current sensors 402 have the advantages of smaller body, high measurement precision, quick response and the like, but have smaller measurement stroke;
for measuring the rotation angle of the vibrating mirror, at least one sensor is required, but in order to eliminate the environmental influence and the measurement error caused by the translation of the mirror assembly 2, differential measurement is usually performed by using two sensors, and the measurement principle is shown in fig. 2. The two eddy current sensors 402 are arranged on two sides of the rotating shaft, when the reflector assembly 2 rotates, the displacement variation between the positioning plate 13 and the eddy current sensors 402 is measured differentially, and the deflection angle value of the reflector assembly 2 can be measured accurately by combining the distance between the eddy current sensors 402, and the specific use formula is as follows:
the distance between the positioning plate 13 and the eddy current sensor 402 is X1 and X2, respectively, and the distance between the two sets of eddy current sensors 402 is L:
the angular value of deflection of the mirror assembly 2 is: arctan ((x1+x2)/L);
by adopting a differential measurement mode, not only can the translational error of the mechanism be eliminated, but also the environmental influence can be eliminated, and the angle measurement precision can be improved.
Bearing assemblies 5 are arranged at two ends of the driving assembly 3; the bearing assembly 5 is a support of the motion mechanism of the application and is used for supporting and completing integral rotation motion, and meanwhile, the pre-tightening bearing cover 501 ensures that the mirror assembly 2 and the positioning plate 13 do not jump relative to the rotation center in the rotation process; the bearing assembly 5 comprises a bearing cover 501 arranged at the top end of the shell 1 and a bearing seat 502 arranged at the bottom end of the shell 1, wherein the bearing cover 501 is fixed at the top end of the shell 1, a first deep groove ball bearing 503 is arranged in the bearing seat 502, and the first deep groove ball bearing 503 is sleeved at the upper end of the driving assembly 3;
the bearing assembly 5 further comprises a second deep groove ball bearing 504 sleeved at the top end of the shell 1, and the second deep groove ball bearing 504 is sleeved at the lower end of the driving assembly 3;
the two ends of the rotor 302 are fixed to the housing 1 by first/second deep groove ball bearings 503, 504.
In this embodiment, the driving assembly 3 includes a stator 301 fixed in the housing 1 by screws, and a rotor 302 sleeved in the stator 301, wherein a plurality of permanent magnets are fixed on the rotor 302, a plurality of groups of coils are correspondingly arranged on the stator 301, and when the coils are electrified, the rotor 302 is rotated by electromagnetic force, and the direction of the force is determined by a left hand rule. Rotor 302 rotates clockwise as shown in fig. 3, and after turning to a certain angle, signals are output by eddy current sensor 402 to a control circuit, which changes the current direction, and rotor 302 also changes the direction of rotation and rotates counterclockwise. The forward and reverse rotation frequency is controlled by a control circuit according to the system requirement. The magnitude of the rotation moment is determined by the magnitude of the permanent magnet and the magnitude of the current; the rotor 302 is fitted with a mirror assembly 2 at one end and a locating plate 13 at the other end.
In this embodiment, the shaft shoulders 6 are integrally formed at two ends of the rotor 302, and the shaft shoulders 6 are abutted against the bearing assembly 5, so that the rotor 302 is stably fixed between the first deep groove ball bearing 503 and the second deep groove ball bearing 504.
In the embodiment, a limiting block 7 is arranged between the bearing assembly 5 and the reflecting mirror assembly 2, and a limiting groove 8 is arranged in the limiting block 7;
at least one group of limit pins 9 is arranged at one end of the rotor 302, which is close to the reflector assembly 2, the limit pins 9 are arranged in the limit grooves 8, and the maximum mechanical travel of the rotation of the reflector is limited through the cooperation between the limit grooves 8 and the limit pins 9, namely, when the rotation angle of the rotor 302 is large, the limit pins 9 can collide with the edges of the limit grooves 8 to prevent the rotation of the reflector from being continued.
In the embodiment, the positioning plate 13 is connected with the driving assembly 3 through the mounting seat 10, the middle part of one side of the positioning plate 13 is provided with the groove 11, and the mounting seat 10 is clamped in the groove 11;
the mounting seat 10 is fixed at the bottom end of the driving assembly 3 through screws, and two sides of the mounting seat 10 are provided with rabbets 12 matched with the grooves 11.
It will be understood that the application has been described in terms of several embodiments, and that various changes and equivalents may be made to these features and embodiments by those skilled in the art without departing from the spirit and scope of the application. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the application without departing from the essential scope thereof. Therefore, it is intended that the application not be limited to the particular embodiment disclosed, but that the application will include all embodiments falling within the scope of the appended claims.
Claims (6)
1. A small-sized high-stability galvanometer device comprises a shell (1) and a reflecting mirror assembly (2) arranged at the top end of the shell (1), wherein a driving assembly (3) is arranged in the shell (1), and a sensor assembly (4) is arranged at the bottom end of the shell (1); the driving component (3) penetrates through the shell (1), one end of the driving component is fixedly connected with the reflecting mirror component (2), and the other end of the driving component is fixedly connected with the positioning plate (13), and the driving component is characterized in that the driving component (3) and the sensor component (4) are both connected with a control circuit, and the control circuit is used for controlling the driving component (3) to do rotary motion in the shell (1) and simultaneously driving the reflecting mirror component (2) and the positioning plate (13) to follow the rotary motion;
the positioning plate (13) is rotatably arranged in the sensor assembly (4), and the sensor assembly (4) is used for detecting the deflection angle of the positioning plate (13), so that the movement state of the reflecting mirror assembly (2) can be reflected in real time; the sensor assembly (4) comprises an eddy current fixing seat (401) fixed at the bottom end of the shell (1), and two eddy current sensors (402) detachably arranged on the eddy current fixing seat (401), wherein the two eddy current sensors (402) are distributed on two sides of a central shaft of the eddy current fixing seat (401);
the driving assembly (3) comprises a stator (301) fixed in the shell (1) and a rotor (302) sleeved in the stator (301); the rotor (302) rotates clockwise, after the rotor rotates to a certain angle, a signal is output to a control circuit by an eddy current sensor (402), the control circuit changes the current direction, and the rotor (302) also changes the steering.
2. The small high-stability galvanometer device according to claim 1, characterized in that the two ends of the driving component (3) are provided with bearing components (5);
the bearing assembly (5) comprises a bearing gland (501) arranged at the top end of the shell (1) and a bearing seat (502) arranged at the bottom end of the shell (1), wherein the bearing gland (501) is fixed at the top end of the shell (1), a first deep groove ball bearing (503) is arranged in the bearing seat (502), and the first deep groove ball bearing (503) is sleeved at the upper end of the driving assembly (3);
the bearing assembly (5) further comprises a second deep groove ball bearing (504) sleeved at the top end of the shell (1), and the second deep groove ball bearing (504) is sleeved at the lower end of the driving assembly (3).
3. The small-sized high-stability galvanometer device according to claim 1, wherein a plurality of permanent magnets are fixed on a rotor (302), and a plurality of groups of coils are correspondingly arranged on a stator (301);
one end of the rotor (302) is provided with a reflector assembly (2), and the other end is provided with a positioning plate (13).
4. The small-sized high-stability galvanometer device according to claim 2, wherein the shaft shoulders (6) are formed at both ends of the rotor (302) in a uniform and integrated manner, and the shaft shoulders (6) are abutted against the bearing assembly (5).
5. The small high-stability galvanometer device according to claim 2, wherein a limiting block (7) is arranged between the bearing assembly (5) and the reflecting mirror assembly (2), and a limiting groove (8) is arranged in the limiting block (7);
one end of the rotor (302) close to the reflecting mirror assembly (2) is provided with at least one group of limiting pins (9), and the limiting pins (9) are arranged in the limiting grooves (8).
6. The small high-stability galvanometer device according to claim 1, wherein the positioning plate (13) is connected with the driving assembly (3) through the mounting seat (10), a groove (11) is formed in the middle of one side of the positioning plate (13), and the mounting seat (10) is clamped in the groove (11);
the mounting seat (10) is fixed at the bottom end of the driving assembly (3) through screws, and two sides of the mounting seat (10) are provided with rabbets (12) matched with the grooves (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310913270.0A CN116626882B (en) | 2023-07-25 | 2023-07-25 | Small-size high stability mirror device that shakes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310913270.0A CN116626882B (en) | 2023-07-25 | 2023-07-25 | Small-size high stability mirror device that shakes |
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| Publication Number | Publication Date |
|---|---|
| CN116626882A CN116626882A (en) | 2023-08-22 |
| CN116626882B true CN116626882B (en) | 2023-10-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202310913270.0A Active CN116626882B (en) | 2023-07-25 | 2023-07-25 | Small-size high stability mirror device that shakes |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2050627A (en) * | 1979-05-16 | 1981-01-07 | Ransome Hoffmann Pollard | Improvements in mechanical assemblies employing sensing means for sensing motion or position |
| CN208953764U (en) * | 2018-11-20 | 2019-06-07 | 北京瑞控信科技有限公司 | A kind of one-dimensional swing fast mirror |
| CN212623341U (en) * | 2020-08-17 | 2021-02-26 | 北京瑞控信科技有限公司 | Quick reflector device based on flexible rod is connected |
| WO2021037782A1 (en) * | 2019-08-23 | 2021-03-04 | name inventorCITY, UNIVERSITY OF LONDON | System for monitoring anastomoses |
| CN113534102A (en) * | 2021-09-13 | 2021-10-22 | 北京瑞控信科技有限公司 | Two-dimensional high-speed scanning reflector device |
| WO2022105146A1 (en) * | 2020-11-17 | 2022-05-27 | 深圳市镭神智能系统有限公司 | Galvanometer and multi-line laser radar |
| CN115145021A (en) * | 2022-07-01 | 2022-10-04 | 长春萨米特光电科技有限公司 | Ultra-thin type quick reflector system based on eddy current sensor |
| CN116400476A (en) * | 2023-06-08 | 2023-07-07 | 北京瑞控信科技股份有限公司 | Moving coil type quick reflector based on flexible support |
| CN116430576A (en) * | 2023-06-08 | 2023-07-14 | 北京瑞控信科技股份有限公司 | One-dimensional flexible supporting moving magnetic quick reflecting mirror |
-
2023
- 2023-07-25 CN CN202310913270.0A patent/CN116626882B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2050627A (en) * | 1979-05-16 | 1981-01-07 | Ransome Hoffmann Pollard | Improvements in mechanical assemblies employing sensing means for sensing motion or position |
| CN208953764U (en) * | 2018-11-20 | 2019-06-07 | 北京瑞控信科技有限公司 | A kind of one-dimensional swing fast mirror |
| WO2021037782A1 (en) * | 2019-08-23 | 2021-03-04 | name inventorCITY, UNIVERSITY OF LONDON | System for monitoring anastomoses |
| CN212623341U (en) * | 2020-08-17 | 2021-02-26 | 北京瑞控信科技有限公司 | Quick reflector device based on flexible rod is connected |
| WO2022105146A1 (en) * | 2020-11-17 | 2022-05-27 | 深圳市镭神智能系统有限公司 | Galvanometer and multi-line laser radar |
| CN113534102A (en) * | 2021-09-13 | 2021-10-22 | 北京瑞控信科技有限公司 | Two-dimensional high-speed scanning reflector device |
| CN115145021A (en) * | 2022-07-01 | 2022-10-04 | 长春萨米特光电科技有限公司 | Ultra-thin type quick reflector system based on eddy current sensor |
| CN116400476A (en) * | 2023-06-08 | 2023-07-07 | 北京瑞控信科技股份有限公司 | Moving coil type quick reflector based on flexible support |
| CN116430576A (en) * | 2023-06-08 | 2023-07-14 | 北京瑞控信科技股份有限公司 | One-dimensional flexible supporting moving magnetic quick reflecting mirror |
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| CN116626882A (en) | 2023-08-22 |
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