CN115356850A - Moving-coil type flexible support galvanometer - Google Patents
Moving-coil type flexible support galvanometer Download PDFInfo
- Publication number
- CN115356850A CN115356850A CN202211280716.2A CN202211280716A CN115356850A CN 115356850 A CN115356850 A CN 115356850A CN 202211280716 A CN202211280716 A CN 202211280716A CN 115356850 A CN115356850 A CN 115356850A
- Authority
- CN
- China
- Prior art keywords
- coil
- assembly
- magnetic conduction
- eddy current
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003825 pressing Methods 0.000 claims description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 13
- 230000009977 dual effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000004907 flux Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000006698 induction Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010330 laser marking Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Abstract
The invention relates to the field of laser detection galvanometer manufacturing, in particular to a moving-coil type flexible support galvanometer, which comprises: the device comprises a shell assembly, a coil assembly, a magnetic conduction assembly and an eddy current sensor assembly; the coil assembly, the magnetic conduction assembly and the eddy current sensor assembly are all arranged in the shell assembly; the top and the bottom of the coil assembly are respectively in flexible rotary connection with the top and the bottom of the inner wall of the shell assembly; the eddy current sensor assembly is arranged at the position below the coil assembly to acquire the horizontal rotation angle value of the coil assembly; the coil assembly is arranged in the middle of the magnetic conduction assembly, and is driven by the magnetic conduction assembly to rotate in a reciprocating mode along a horizontal plane by a preset angle with the vertical direction as an axis. Through the coil structure who adopts flexible support, compare in traditional ball bearing structure and have longer life, improved the life cycle of galvanometer, promoted system reliability.
Description
Technical Field
The invention relates to the field of laser detection galvanometer manufacturing, in particular to a moving-coil flexible support galvanometer.
Background
The galvanometer system is a high-precision and high-speed servo control system consisting of a driving plate and a high-speed swing motor, and is mainly used for laser marking, laser inner carving, laser detection, laser punching and the like. The laser galvanometer consists of an X-Y optical scanning head, an electronic driving amplifier and an optical reflecting mirror. The signal provided by the computer controller drives the optical scanning head through the drive amplifier circuit, thereby controlling the deflection of the laser beam in the X-Y plane.
The traditional galvanometer adopts a pair of voice coil motors to push and pull so as to realize one-dimensional scanning, and higher scanning speed cannot be realized because the rotational inertia of a rotating part is larger. However, for scan compensation applications, the long, small range of high speed reciprocation can result in low bearing life and wear that occurs quickly, thereby reducing the accuracy of the system. The bearing has poor high and low temperature resistance. In addition, the coil of the traditional vibrating mirror is difficult to wind, the process is complex, the efficiency is low, and the filling rate is low.
Disclosure of Invention
The embodiment of the invention aims to provide a moving-coil type flexible support galvanometer, and by adopting a flexible support coil structure, compared with the traditional ball bearing structure, the moving-coil type flexible support galvanometer has longer service life, improves the service cycle of the galvanometer and improves the reliability of a system.
In order to solve the above technical problem, an embodiment of the present invention provides a moving-coil flexible support galvanometer, including: the device comprises a shell assembly, a coil assembly, a magnetic conduction assembly and an eddy current sensor assembly;
the coil assembly, the magnetic conducting assembly and the eddy current sensor assembly are all arranged inside the shell assembly;
the top and the bottom of the coil assembly are respectively in flexible rotating connection with the top and the bottom of the inner wall of the shell assembly;
the eddy current sensor assembly is arranged at the position below the coil assembly, and the horizontal rotation angle value of the coil assembly is obtained;
the coil assembly is arranged in the middle of the magnetic conduction assembly, and is driven by the magnetic conduction assembly to rotate in a reciprocating mode along a horizontal plane by a preset angle with the vertical direction as an axis.
Further, the housing assembly includes: the magnetic shield comprises a U-shaped magnetic conduction wall, a front shell, an upper cover plate and a lower cover plate;
the horizontal cross section of the U-shaped magnetic conduction wall is U-shaped, and the top and the bottom of the U-shaped magnetic conduction wall are provided with open through structures;
the front shell is fixedly connected with the U-shaped opening square of the U-shaped magnetic conductive wall;
the upper cover plate is fixedly connected with the top opening of the U-shaped magnetic conducting wall;
the lower cover plate is fixedly connected with the bottom opening of the U-shaped magnetic conduction wall.
Furthermore, the front shell, the lower cover plate and the upper cover plate are of hollow structures.
Further, the magnetic conductive assembly includes: the magnetic conduction device comprises a first magnet, a second magnet, a magnetic conduction block and a connecting block;
the first magnet and the second magnet are arranged on opposite side walls in the shell assembly and are respectively abutted against the side walls of the shell assembly;
the magnetic conduction block passes through the connecting block with the casing subassembly with first magnet with the lateral wall that the lateral wall is adjacent is connected to the second magnet, the magnetic conduction block is located the intermediate position of first magnet with the second magnet, and respectively with first magnet with the second magnet interval is predetermine the distance.
Further, the magnetic conduction subassembly includes: the magnetic iron comprises a magnet, a magnetic conduction block and a supporting block;
the magnet is positioned in the coil assembly, one side of the magnet is abutted against the side wall of the magnetic conduction block, and the magnet and the side wall of the magnetic conduction block are positioned in the center of the opening of the magnetic conduction wall;
one side of the supporting block is fixedly connected with one side of the magnetic conduction block opposite to the abutting side of the magnet, and the opposite side of the supporting block is fixedly connected with the bottom of the U-shaped structure of the magnetic conduction wall.
Further, the coil assembly includes: a coil former, a coil, a mirror, a first flexible hinge, and a second flexible hinge;
the coil and the reflector are respectively arranged on two opposite sides of the coil rack;
the coil is positioned in the middle of the magnetic conduction assembly and is driven by the magnetic conduction assembly to horizontally rotate in a reciprocating manner by a preset angle by taking the vertical direction as an axis;
the first flexible hinge and the second flexible hinge are arranged at the upper end and the lower end of the coil rack;
the coil rack is respectively connected with the top and the bottom of the shell component in a rotating mode through the first flexible hinge and the second flexible hinge.
Furthermore, flexible hinge through holes are respectively formed in the top and the bottom of the coil frame;
the first flexible hinge is positioned in the flexible hinge through hole at the top of the coil frame and is in clearance fit with the flexible hinge through hole;
the second flexible hinge is located in the flexible hinge through hole in the coil former bottom and is in clearance fit.
Further, the coil assembly further includes: the first reflector pressing block and the second reflector pressing block;
the first reflector pressing block and the second reflector pressing block are respectively arranged at the positions of the coil frame corresponding to the top of the reflector and the bottom of the reflector, and are used for fixing the reflector.
Further, the first reflector pressing block and the second reflector pressing block are of circular arc structures.
Further, the eddy current sensor assembly includes: the eddy current sensor unit, the eddy current drive plate and the rear cover;
the eddy current sensor unit is arranged at a corresponding position below the magnetic conduction assembly;
the bottom of the rear cover is fixedly connected with the upper surface of the bottom of the shell assembly, and the top of the rear cover is fixedly connected with the eddy current driving plate;
the eddy current drive plate is arranged at a corresponding position below the eddy current sensor unit and is electrically connected with the eddy current sensor unit.
Further, the eddy current sensor unit includes: a first eddy current sensor and a second eddy current sensor;
the first eddy current sensor and the second eddy current sensor respectively measure distances from the coil assembly and perform differential measurement on a rotation angle of the coil assembly.
The technical scheme of the embodiment of the invention has the following beneficial technical effects:
1. by adopting the flexible support, compared with a ball bearing, the bearing has longer service life and better high and low temperature resistance;
2. by adopting a back-push type structural design and a high-efficiency electromagnetic driving component design, when two magnets are symmetrically arranged in the electromagnetic driving component, although the magnetic flux density is higher due to a slightly larger occupied space, higher force and higher speed can be realized under the same condition, and in addition, the rotary inertia of a moving part is low, so that higher scanning speed can be realized;
3. when a single magnet is placed in the center, the occupied space of the electromagnetic driving assembly is saved, the structure is light, and the wire outlet is convenient; the method is suitable for the application of a fast reflecting mirror for scanning compensation and can be suitable for occasions with restricted height space;
4. two eddy current sensors are adopted to carry out differential measurement in the same direction through the eddy current sensor assembly, so that the measurement precision is improved, and the influence of temperature drift and the like on the measurement result is reduced. The method is suitable for the application of a fast reflecting mirror for scanning compensation and can be suitable for occasions with restricted height space.
Drawings
FIG. 1 is a schematic perspective view of a moving-coil flexible support galvanometer disclosed in the present invention;
fig. 2 is an exploded view of a 45 ° sub-assembly on the oblique axis side of a moving-coil flexible support galvanometer (dual magnet) according to the present invention;
FIG. 3 is an exploded view of an oblique 45-degree structure of a moving-coil flexible support galvanometer (dual magnet) according to the present invention;
FIG. 4 is a schematic side sectional view of a moving-coil flexible support galvanometer (dual-magnet) according to the present disclosure;
FIG. 5 is a schematic top cross-sectional structural view of a moving-coil flexible support galvanometer (dual magnets) disclosed in the present invention;
FIG. 6 is an elevational cross-sectional structural view of a moving-coil flexible support galvanometer (dual magnets) disclosed in the present invention;
fig. 7 is a schematic diagram of an oblique-axis 45-degree overall structure explosion structure of a moving-coil flexible support galvanometer (single magnet) disclosed by the invention;
FIG. 8 is an exploded view of a sub-assembly of a moving coil type flexible support galvanometer (single magnet) according to the present disclosure;
FIG. 9 is a schematic side sectional view of a moving-coil flexible support galvanometer (single magnet) according to the present disclosure;
FIG. 10 is a schematic top cross-sectional view of a moving-coil flexible support galvanometer (single magnet) according to the present disclosure;
FIG. 11 is an elevational cross-sectional structural view of a moving-coil flexible support galvanometer (single magnet) according to the present disclosure;
FIG. 12 is a top view magnetic circuit schematic diagram (dual magnet) of the disclosed electromagnetic drive assembly;
fig. 13 is a schematic top view of a magnetic circuit (single magnet) of the disclosed electromagnetic drive assembly.
Reference numerals are as follows:
1. the electromagnetic induction type eddy current sensor comprises a front shell, 21, a first flexible hinge, 22, a second flexible hinge, 3, a coil frame, 4, a reflector, 51, a first reflector pressing block, 52, a second reflector pressing block, 61, a first magnet, 62, a second magnet, 63, a magnet, 7, a magnetic conduction block, 8, a coil, 9, a connecting block, 10, an eddy current sensor unit, 11, an eddy current driving plate, 12, a lower cover plate, 13, a rear cover, 14, an upper cover plate, 15 and a magnetic conduction wall;
501a, a first magnet N pole, 501b, a first magnet S pole, 502a, a second magnet N pole, 502b, a second magnet S pole, 503a, a current inflow direction, 503b, a current outflow direction;
601a, N pole of magnet, 601b, S pole of magnet, 602a, current flowing direction, 602b, current flowing direction.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings in conjunction with the following detailed description. It is to be understood that these descriptions are only illustrative and are not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
Referring to fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, fig. 6, fig. 7, fig. 8, fig. 9, fig. 10, and fig. 11, an embodiment of the present invention provides a moving-coil flexible support galvanometer, including: the device comprises a shell assembly, a coil assembly, a magnetic conduction assembly and an eddy current sensor assembly; the coil assembly, the magnetic conduction assembly and the eddy current sensor assembly are all arranged in the shell assembly; the top and the bottom of the coil assembly are respectively in flexible rotary connection with the top and the bottom of the inner wall of the shell assembly; the eddy current sensor assembly is arranged at a position below the coil assembly to acquire a horizontal rotation angle value of the coil assembly; the coil assembly is arranged in the middle of the magnetic conduction assembly, and is driven by the magnetic conduction assembly to rotate in a reciprocating mode along a horizontal plane by a preset angle with the vertical direction as an axis.
Through the coil structure who adopts flexible support among the above-mentioned technical scheme, compare in traditional ball bearing structure and have longer life, improved the life cycle of mirror that shakes, promoted system reliability.
In a particular implementation of an embodiment of the invention, a housing assembly includes: the magnetic shield comprises a U-shaped magnetic conduction wall 15, a front shell 1, an upper cover plate 14 and a lower cover plate 12; the horizontal cross section of the U-shaped magnetic conduction wall 15 is U-shaped, and the top and the bottom of the U-shaped magnetic conduction wall are open through structures; the front shell 1 is fixedly connected with the U-shaped opening square of the U-shaped magnetic conduction wall 15; the upper cover plate 14 is fixedly connected with the top opening of the U-shaped magnetic conduction wall 15; the lower cover plate 12 is fixedly connected with the bottom opening of the U-shaped magnetic conduction wall 15.
The front shell 1 is used for embedding and fixing a coil assembly and is fixedly connected with the U-shaped magnetic conduction wall 15 through bolts, and the lower cover plate 12 is used as a base of the whole back-push type high-performance moving-coil flexible support galvanometer to play a role of sealing; the upper cover plate 14 is used as a top cover of the whole moving-coil flexible support galvanometer to play a role in sealing; the magnetic conduction wall 15 is used for enveloping the first magnet 61, the second magnet 62, the magnetic conduction block 7, the coil 8 and the connecting block 9 to enlarge the magnetic attraction force.
Optionally, the front shell 1, the lower cover plate 12 and the upper cover plate 14 are hollow structures. By adopting the design of a back-push type and a hollow-out type structure, the whole structure of the galvanometer is more compact and light, and the rotational inertia of a moving part is low.
Optionally, referring to fig. 2, fig. 3, fig. 4, fig. 5, and fig. 6, in a specific implementation manner of the embodiment of the present invention, the magnetic conducting assembly includes: the magnetic-conductive connecting device comprises a first magnet 61, a second magnet 62, a magnetic-conductive block 7 and a connecting block 9; the first magnet 61 and the second magnet 62 are arranged on opposite side walls in the shell assembly and are respectively abutted against the side walls of the shell assembly; the magnetic conduction block 7 is connected with the side wall adjacent to the side wall of the first magnet 61 and the second magnet 62 through the connecting block 9 and the shell component, and the magnetic conduction block 7 is located in the middle of the first magnet 61 and the second magnet 62 and is spaced from the first magnet 61 and the second magnet 62 by a preset distance.
Two magnets are symmetrically arranged along the centers of the magnetic conduction blocks 7 and the magnetic conduction wall 15 in pairs, and the magnetic conduction blocks 7 are fixedly connected with the magnetic conduction wall 15 through the connecting blocks 9 in a bolt mode, so that the magnetic flux density of the whole electromagnetic driving structure is higher, and higher output and speed can be realized under the same condition.
The first magnet 61 and the second magnet 62 are symmetrically arranged along the magnetic conduction block 7 and are fixedly connected with two sides of the inner wall of the magnetic conduction wall 15; the magnetic conduction block 7 is arranged at the central positions of the first magnet 61 and the second magnet 62 on the inner side of the magnetic conduction wall 15 and is fixedly connected through a connecting block 9 by bolts and used for expanding the attraction force of the magnets: one surface of the connecting block 9, which is provided with a threaded hole, is fixedly connected with the magnetic conduction block 7, and the other surface of the connecting block is fixedly connected with the magnetic conduction wall 15.
Optionally, referring to fig. 7, fig. 8, fig. 9, fig. 10 and fig. 11, in another specific implementation manner of the embodiment of the present invention, the magnetic conducting assembly includes: the magnet 63, the magnetic conduction block 7 and the connecting block 9; the magnet 63 is positioned in the coil component, one side of the magnet is abutted against the side wall of the magnetic conduction block 7, and the magnet and the side wall are positioned at the central position of the opening of the magnetic conduction wall 15; one side of the connecting block 9 is fixedly connected with the side opposite to the abutting side of the magnetic conduction block 7 and the magnet 63, and the opposite side is fixedly connected with the bottom of the U-shaped structure of the magnetic conduction wall 15.
The magnetic conduction block 7 and the magnetic conduction wall 15 are made of rare earth permanent magnetic materials, and the connection block 9 and the upper cover plate 14 are made of non-magnetic materials. Through adopting above design, the magnetic conduction subassembly has high magnetic energy, high remanence performance, and the casing is not magnetic conduction, makes the quick reflection mirror motor have light structure and less torque, can show the response speed who improves the quick reflection mirror motor.
In a particular implementation of an embodiment of the invention, a coil assembly includes: coil former 3, coil 8, mirror 4, first flexible hinge 21 and second flexible hinge 22; the coil 8 and the reflector 4 are respectively arranged at two opposite sides of the coil rack 3; the coil 8 is positioned in the middle of the magnetic conduction assembly and is driven by the magnetic conduction assembly to horizontally rotate in a reciprocating manner by a preset angle by taking the vertical direction as an axis; the flexible hinge units are arranged at the upper end and the lower end of the coil rack 3; the coil former 3 is pivotally connected to the top and bottom of the housing assembly by first and second flexible hinges 21 and 22 respectively.
Optionally, the top and the bottom of the coil rack 3 are respectively provided with a flexible hinge through hole; the first flexible hinge 21 is positioned in the flexible hinge through hole at the top of the coil frame 3 and is in clearance fit with the flexible hinge through hole; the second flexible hinge 22 is located in the flexible hinge through hole at the bottom of the coil former 3 and is in clearance fit with the flexible hinge through bolt connection and is screwed and fixed, so that the positions of the first flexible hinge 21 and the second flexible hinge 22 are convenient to fix, and the assembly is easy.
Preferably, the flexible hinge adopts a crisscross flexible hinge, has a longer service life compared with a ball bearing, has better high and low temperature resistance, does not need a lubricant, can be used for vacuum, and has a sufficiently large rotation angle range.
The crisscross flexible hinge is used as a flexible support of electromagnetic drive, the combination of two crisscross flexible supports is used as the flexible support of the fast reflecting mirror, the maximum rotation angle range of a single crisscross flexible hinge is +/-15 degrees, and the maximum rotation angle range of the integrated flexible support design is +/-10 degrees.
Optionally, the coil assembly further includes: a first mirror press block 51 and a second mirror press block 52; the first reflector block 51 and the second reflector block 52 are respectively disposed at positions of the coil frame 3 corresponding to the top of the reflector 4 and the bottom of the reflector 4, and fix the reflector 4.
Preferably, the first reflector block 51 and the second reflector block 52 have a circular arc structure and are installed in pairs in the grooves of the reflector 4 of the bobbin 3 to limit the axial shaking of the reflector 4.
The first flexible hinge 21 and the second flexible hinge 22 are arranged in the flexible hinge through holes at the upper end and the lower end of the coil rack 3, and are rotated around a central shaft by adopting mutually vertical elastic sheets and are connected, screwed and fixed by bolts; the coil rack 3 is fixedly connected with the supporting reflector 4 and the two reflector press blocks by bolts, the flexible hinge holes at the upper end and the lower end are used for fixing the positions of the crisscross flexible hinges, and the back of the crisscross flexible hinge holes is used for supporting and fixing the coil 8.
Optionally, the coil 8 can be wound by a machine, and has the advantages of high winding efficiency, high filling rate and the like.
In one particular implementation of an embodiment of the invention, an eddy current sensor assembly includes: an eddy current sensor unit 10, an eddy current drive board 11, and a rear cover 13; the eddy current sensor unit 10 is arranged at a corresponding position below the magnetic conduction assembly; the bottom of the rear cover 13 is fixedly connected with the upper surface of the bottom of the shell assembly, and the top of the rear cover is fixedly connected with the eddy current drive plate 11; the eddy current drive board 11 is disposed at a position corresponding to a lower portion of the eddy current sensor unit 10, and is electrically connected to the eddy current sensor unit 10.
Alternatively, the eddy current sensor unit 10 includes: a first eddy current sensor and a second eddy current sensor; the first eddy current sensor and the second eddy current sensor respectively measure the distance from the coil assembly and perform differential measurement on the rotation angle of the coil assembly.
Specifically, the first eddy current sensor and the second eddy current sensor respectively measure the relative distance between the probe end face of the eddy current sensor and the coil assembly coil rack.
By adopting 2 eddy current sensors to perform differential measurement in the same direction, the measurement precision is improved, and the influence of temperature drift and the like on the measurement result is reduced.
Specifically, the differential measurement specifically is that two identical eddy current sensors are adopted in the same axial direction, sensed signal polarities are opposite, two metal sheets are arranged on the lower surface of the reflector bracket corresponding to the sensors, certain magnetic field changes are generated by the two sensor probes through induction through the angle change of the reflector plane and the eddy current effect, voltage signals generated by the two sensors through magnetic induction are subjected to differential calculation, and the measurement accuracy of the deflection angle of the reflector can be improved.
Referring to fig. 12, when two magnets are used as the magnets, the magnetic circuit is shown in a top view of the electromagnetic assembly, the first magnet 61 and the second magnet 62 are symmetrically arranged, the N pole is located at 501a, the S pole is located at 501b, the N pole is located at 502a, and the S pole is located at 502b of the second magnet 62, when the current flowing into the coil 8 flows in the direction 503a and flows out the coil 8 flows out, based on the lorentz force principle, it is determined according to the left-hand rule that the force direction of the coil 8 is the direction of the thick arrow in fig. 6, that is, the movable portion of the motor and the crisscross flexible hinge drive the mirror 4 to deflect and move along the left and right directions of the center of the coil frame 3 together, and the magnetic flux density is higher, and higher force and higher speed can be achieved under the same conditions.
Referring to fig. 13, when the magnet is a single magnet, the magnetic circuit diagram shows a top cross-sectional view of the electromagnetic assembly, the single magnet 63, the magnetic block 7 and the connecting block 9 are connected to the central axis of the magnetic wall 15, 601a of the magnet 63 is an N pole, 601b of the magnet 63 is an S pole, when the current flowing through the coil 8 flows in 602a direction and flows out 602b, based on the lorentz force principle, the force applied to the coil 8 is determined according to the left hand rule to be in the direction of the thick arrow in the figure, that is, the force applied to the coil 8 causes the movable portion of the motor to form a deflection moment, and the movable portion and the two crossed flexible hinges drive the reflector 5 to deflect along the left and right directions of the center of the coil frame 3 together, so that the overall electromagnetic drive assembly occupies a small space, is light in structure and is convenient for outgoing lines, and the drive the reflector 5 to deflect at a predetermined angle.
The embodiment of the invention aims to protect a moving-coil type flexible support galvanometer, which comprises the following components: the device comprises a shell assembly, a coil assembly, a magnetic conduction assembly and an eddy current sensor assembly; the coil assembly, the magnetic conduction assembly and the eddy current sensor assembly are all arranged in the shell assembly; the top and the bottom of the coil assembly are respectively in flexible rotating connection with the top and the bottom of the inner wall of the shell assembly; the eddy current sensor assembly is arranged at the position below the coil assembly to acquire the horizontal rotation angle value of the coil assembly; the coil assembly is arranged in the middle of the magnetic conduction assembly, and is driven by the magnetic conduction assembly to rotate in a reciprocating mode along a horizontal plane by a preset angle with the vertical direction as an axis. The technical scheme has the following effects:
1. by adopting the flexible support, compared with a ball bearing, the bearing has longer service life and better high and low temperature resistance;
2. by adopting a back-push type structural design and a high-efficiency electromagnetic driving component design, two magnets in the electromagnetic driving component are symmetrically arranged, so that higher output and higher speed can be realized under the same condition although the occupied space is larger, the magnetic flux density is higher, and in addition, the rotary inertia of a moving part is low, so that higher scanning speed can be realized;
3. two eddy current sensors are adopted to carry out differential measurement in the same direction through the eddy current sensor assembly, so that the measurement precision is improved, and the influence of temperature drift and the like on the measurement result is reduced. The method is suitable for the application of a fast reflecting mirror for scanning compensation and can be suitable for occasions with restricted height space.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.
Claims (11)
1. A moving-coil flexible support galvanometer, comprising: the device comprises a shell assembly, a coil assembly, a magnetic conduction assembly and an eddy current sensor assembly;
the coil assembly, the magnetic conducting assembly and the eddy current sensor assembly are all arranged inside the shell assembly;
the top and the bottom of the coil assembly are respectively in flexible rotating connection with the top and the bottom of the inner wall of the shell assembly;
the eddy current sensor assembly is arranged at the position below the coil assembly, and the horizontal rotation angle value of the coil assembly is obtained;
the coil assembly is arranged in the middle of the magnetic conduction assembly, and is driven by the magnetic conduction assembly to rotate in a reciprocating mode along a horizontal plane by a preset angle with the vertical direction as an axis.
2. The moving-coil flexible support galvanometer of claim 1,
the housing assembly includes: the magnetic conduction device comprises a magnetic conduction wall (15), a front shell (1), an upper cover plate (14) and a lower cover plate (12);
the horizontal cross section of the magnetic conduction wall (15) is U-shaped, and the top and the bottom of the magnetic conduction wall are open through structures;
the front shell (1) is fixedly connected with the U-shaped opening square of the magnetic guide wall (15);
the upper cover plate (14) is fixedly connected with the top opening of the magnetic guide wall (15);
the lower cover plate (12) is fixedly connected with the bottom opening of the magnetic guide wall (15).
3. Moving coil flexible supported galvanometer according to claim 2,
the front shell (1), the lower cover plate (12) and the upper cover plate (14) are of hollow structures.
4. Moving coil flexible supported galvanometer according to claim 1,
the magnetic conduction subassembly includes: the magnetic conduction device comprises a first magnet (61), a second magnet (62), a magnetic conduction block (7) and a connecting block (9);
the first magnet (61) and the second magnet (62) are arranged on opposite side walls in the shell assembly and are respectively abutted against the side walls of the shell assembly;
magnetic conduction piece (7) pass through connecting block (9) with housing assembly with first magnet (61) with the lateral wall that the lateral wall is adjacent is connected to second magnet (62), magnetic conduction piece (7) are located first magnet (61) with the intermediate position of second magnet (62), and respectively with first magnet (61) with second magnet (62) interval default distance.
5. The moving-coil flexible support galvanometer of claim 2,
the magnetic conduction subassembly includes: the magnetic iron comprises a magnet (63), a magnetic conduction block (7) and a connecting block (9);
the magnet (63) is positioned in the coil component, one side of the magnet is abutted against the side wall of the magnetic conduction block (7), and the magnet and the side wall are positioned in the center of the opening of the magnetic conduction wall (15);
one side of the connecting block (9) is fixedly connected with one side of the magnetic conduction block (7) opposite to the abutting side of the magnet (63), and the opposite side of the connecting block is fixedly connected with the bottom of the U-shaped structure of the magnetic conduction wall (15).
6. Moving coil flexible supported galvanometer according to claim 1,
the coil component includes: a coil former (3), a coil (8), a reflector (4), a first flexible hinge (21) and a second flexible hinge (22);
the coil (8) and the reflector (4) are respectively arranged on two opposite sides of the coil rack (3);
the coil (8) is positioned in the middle of the magnetic conduction assembly and is driven by the magnetic conduction assembly to horizontally rotate in a reciprocating manner by a preset angle by taking the vertical direction as an axis;
the first flexible hinge (21) and the second flexible hinge (22) are arranged at the upper end and the lower end of the coil rack (3);
the coil rack (3) is respectively connected with the top and the bottom of the shell component in a rotating way through the first flexible hinge (21) and the second flexible hinge (22).
7. Moving coil flexible supported galvanometer according to claim 6,
the top and the bottom of the coil rack (3) are respectively provided with a flexible hinge through hole;
the first flexible hinge (21) is positioned in the flexible hinge through hole at the top of the coil rack (3) and is in clearance fit with the flexible hinge through hole;
the second flexible hinge (22) is positioned in the flexible hinge through hole at the bottom of the coil rack (3) and is in clearance fit.
8. Moving coil flexible supported galvanometer according to claim 6,
the coil assembly further includes: a first reflector block (51) and a second reflector block (52);
the first reflector pressing block (51) and the second reflector pressing block (52) are respectively arranged at the positions, corresponding to the top of the reflector (4) and the bottom of the reflector (4), of the coil rack (3) and are used for fixing the reflector (4).
9. Moving coil flexible supported galvanometer according to claim 8,
the first reflector pressing block (51) and the second reflector pressing block (52) are of circular arc structures.
10. The moving-coil flexible support galvanometer of claim 1,
the eddy current sensor assembly includes: the eddy current sensor comprises an eddy current sensor unit (10), an eddy current driving plate (11) and a rear cover (13);
the eddy current sensor unit (10) is arranged at a corresponding position below the magnetic conduction assembly;
the bottom of the rear cover (13) is fixedly connected with the upper surface of the bottom of the shell assembly, and the top of the rear cover is fixedly connected with the eddy current driving plate (11);
the eddy current driving plate (11) is arranged at a corresponding position below the eddy current sensor unit (10) and is electrically connected with the eddy current sensor unit (10).
11. The moving-coil flexible support galvanometer of claim 10,
the eddy current sensor unit includes: a first eddy current sensor and a second eddy current sensor;
the first eddy current sensor and the second eddy current sensor respectively measure distances to the coil assembly and differentially measure a rotation angle of the coil assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211280716.2A CN115356850A (en) | 2022-10-19 | 2022-10-19 | Moving-coil type flexible support galvanometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211280716.2A CN115356850A (en) | 2022-10-19 | 2022-10-19 | Moving-coil type flexible support galvanometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115356850A true CN115356850A (en) | 2022-11-18 |
Family
ID=84008468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211280716.2A Pending CN115356850A (en) | 2022-10-19 | 2022-10-19 | Moving-coil type flexible support galvanometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115356850A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116400476A (en) * | 2023-06-08 | 2023-07-07 | 北京瑞控信科技股份有限公司 | Moving coil type quick reflector based on flexible support |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110310452A1 (en) * | 2010-06-17 | 2011-12-22 | Touch Micro-System Technology Corp. | Biaxial scanning mirror for image forming apparatus |
| CN115097624A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | Flexible support galvanometer based on overhead type moving coil |
| CN115097593A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | One-dimensional high-speed moving magnetic type flexible support quick reflector |
| CN115113363A (en) * | 2022-08-26 | 2022-09-27 | 北京瑞控信科技股份有限公司 | High-performance moving-coil type flexible support galvanometer |
-
2022
- 2022-10-19 CN CN202211280716.2A patent/CN115356850A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110310452A1 (en) * | 2010-06-17 | 2011-12-22 | Touch Micro-System Technology Corp. | Biaxial scanning mirror for image forming apparatus |
| CN115097624A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | Flexible support galvanometer based on overhead type moving coil |
| CN115097593A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | One-dimensional high-speed moving magnetic type flexible support quick reflector |
| CN115113363A (en) * | 2022-08-26 | 2022-09-27 | 北京瑞控信科技股份有限公司 | High-performance moving-coil type flexible support galvanometer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116400476A (en) * | 2023-06-08 | 2023-07-07 | 北京瑞控信科技股份有限公司 | Moving coil type quick reflector based on flexible support |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN115097624B (en) | Flexible support galvanometer based on overhead type moving coil | |
| US4196456A (en) | Magnetic head pivotal support with compact drive means | |
| CN115113363B (en) | Moving-coil flexible support galvanometer | |
| US5243241A (en) | Totally magnetic fine tracking miniature galvanometer actuator | |
| CN115097593B (en) | One-dimensional high-speed moving magnetic type flexible support quick reflector | |
| CN116400476A (en) | Moving coil type quick reflector based on flexible support | |
| CN112346240A (en) | Two-dimensional moving magnetic type quick reflector device | |
| KR900004619B1 (en) | Operating apparatus of objective lens | |
| EP0574565B1 (en) | Bearing for a moving mirror of a michelson interferometer | |
| CN115356850A (en) | Moving-coil type flexible support galvanometer | |
| US7476999B2 (en) | Torque producing device | |
| US3896319A (en) | Linear motor | |
| KR100377090B1 (en) | Inclination sensor | |
| CN115097594A (en) | Large-caliber large-corner high-bandwidth voice coil motor fast-reflection mirror device | |
| CN116430576A (en) | One-dimensional flexible supporting moving magnetic quick reflecting mirror | |
| JPS63503254A (en) | Flexible supported read/write head | |
| CN115343825B (en) | High-bandwidth moving-iron type voice coil motor fast-reflection mirror device | |
| CN113422493B (en) | High-performance limited rotation actuator | |
| JP3809239B2 (en) | Dimension measuring device | |
| CN116719145B (en) | Two-dimensional non-frame large-angle quick reflector | |
| CN110645890A (en) | Corner measuring device based on electric eddy current | |
| CN116626882B (en) | Small-size high stability mirror device that shakes | |
| CN117784398B (en) | Two-dimensional large-angle moving-magnet type quick reflection mirror | |
| JP2619874B2 (en) | Scanner for light beam scanning | |
| US4779254A (en) | Read head adjusting motor assembly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20221118 |