CN116626064B - Chip appearance detection device and method based on multi-layer multicolor annular light source - Google Patents
Chip appearance detection device and method based on multi-layer multicolor annular light source Download PDFInfo
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Abstract
The invention discloses a chip appearance detection device and method based on a multi-layer multi-color annular light source, and relates to the technical field of defect detection in chip appearance optical detection. In order to solve the problems of poor quality of chip appearance images and low detection precision caused by single illumination wavelength or over-wide wave band and limited illumination angle in the existing chip appearance optical detection; the chip appearance detection device based on the multi-layer multi-color annular light source comprises a microscopic imaging system, the multi-layer multi-color annular light source, a white light source, a light source control module, an image processing analysis module, an image acquisition module, a precise adjustment table and a light splitting sheet; the multi-layer multicolor annular light source and the white light source are driven by the light source control module, so that coded light irradiation with different light intensities, different wavelengths and different angles is realized, the image acquisition module acquires data of the sample image amplified by the microscopic imaging system, and the image processing analysis module identifies and analyzes the image, so that the accuracy of chip appearance detection is improved.
Description
Technical Field
The invention relates to the technical field of defect detection in chip appearance optical detection, in particular to a chip appearance detection device and method based on a multi-layer multi-color annular light source.
Background
With the continuous development of chip manufacturing technology, the chip scale is smaller and smaller, and the detection of the chip is becoming more and more important. The chip appearance detection is used as an optical visual detection technology, has the advantages of non-contact speed and the like, and is widely applied to the fields of semiconductor chips, integrated circuits, electronic elements and the like. In chip appearance detection, a light source is an important factor affecting the detection result. The selection and use modes of the light source directly influence the quality of the chip appearance image and the accuracy of the detection result, and the safety of operators and chips. Although the existing chip detection light source solution has great development in the aspects of illumination uniformity, intensity and the like, the problems of single illumination wavelength or over wide wave band, limited illumination angle and the like exist, and the problems of poor chip appearance image quality and low detection precision are caused.
Disclosure of Invention
The invention aims to provide a chip appearance detection device and method based on multi-layer multi-color annular light sources, wherein a light source control module drives a plurality of coaxial multi-layer multi-color annular light sources in the same group to realize the modulation of the light intensity of each group of annular light sources, and the accurate control of parameters such as the illumination intensity, the illumination angle, the illumination wavelength and the like of the light sources in the illumination condition of the chip surface is realized, so that the detection precision of the chip appearance is improved, and the problems in the background technology are solved.
In order to achieve the above purpose, the present invention provides the following technical solutions:
The utility model provides a chip outward appearance detection device based on multilayer polychromatic annular light source, includes microscopic imaging system, multilayer polychromatic annular light source, white light source, light source control module, image processing analysis module, image acquisition module, accurate adjustment platform and beam split piece, image acquisition module installs on microscopic imaging system, microscopic imaging system lower extreme is provided with multilayer polychromatic annular light source, multilayer polychromatic annular light source and microscopic imaging system coaxial arrangement, white light source is installed to microscopic imaging system inner wall one side, the beam split piece is installed in microscopic imaging system to at same height with white light source, image processing analysis module is connected with image acquisition module electricity, light source control module is connected with multilayer polychromatic annular light source and white light source electricity respectively.
Further, the multi-layer multicolor annular light source is composed of at least one group of coaxial LED annular light sources, LEDs in each group of coaxial annular light sources are sequentially arranged around the circle center at the same interval, each group of LED annular light sources and the chip to be detected form different irradiation angles, and the wavelengths of the LEDs corresponding to each group of annular light sources are different.
Further, the chip to be measured is placed on the upper surface of the precise adjustment table, the distance between the precise adjustment table and the microscopic imaging system is adjustable, the microscopic imaging system images the chip, the upper surface of the precise adjustment table is set to be a chip area to be measured, light rays emitted by the multi-layer multicolor annular light source irradiate the chip area to be measured on the upper surface of the precise adjustment table, light rays emitted by the white light source irradiate one side of the light splitting sheet, and the light rays emitted by the light splitting sheet are refracted to the chip area to be measured.
Further, the image acquisition module acquires appearance images of the chip to be detected under different irradiation of the coded light, the image processing analysis module acquires the appearance images acquired by the image acquisition module, identifies and analyzes the acquired appearance images, and outputs a detection report.
Further, an LED driving module is arranged in the multi-layer multicolor annular light source and the light source control module, the LED driving module is composed of an FPGA circuit and is integrated on a Printed Circuit Board (PCB) provided with the LED light source module, the LED light source module is electrically connected with the LED driving module, the LED driving module receives external configuration parameters in real time based on a UART serial port protocol, outputs Pulse Width Modulation (PWM) waves with corresponding frequency and duty ratio, drives light sources with corresponding wavelength channels, and the LED driving module regulates and controls the light sources with different wavelengths in the LED light source module in real time.
The invention provides another technical scheme, a chip appearance detection method based on a multi-layer multi-color annular light source, which comprises the following steps:
step one: placing the chip to be tested on a precise adjustment table, and adjusting the position and the height of the precise adjustment table to precisely and three-dimensionally adjust the position of the chip to be tested;
Step two: the chip to be detected is adjusted to enable the microscopic imaging system to clearly image the chip, the chip is ensured to be positioned at the focal plane of the microscopic imaging system, and the microscopic imaging system performs optical microscopic amplification on the chip to be detected;
step three: the light source control module is used for driving the multi-layer multicolor annular light source and the white light source to illuminate, so that coded light with different light intensities, different wavelengths and different angles of the chip to be tested is illuminated;
step four: the method comprises the steps of collecting appearance images of chips under different coded light irradiation by using an image collecting module;
Step five: the image processing analysis module acquires at least one appearance image and grays the appearance image acquired by the image acquisition module;
Step six: inputting a plurality of chip surface images into a preset model of an image processing analysis module for calculation, performing image processing based on a preset algorithm, and extracting sample characteristic information;
step seven: and outputting a corresponding detection result according to the processing analysis result of the image processing analysis module, and making a corresponding alarm prompt based on the detection result so as to realize the detection and analysis of the appearance of the chip.
Further, in the fourth step, the image acquisition module acquires appearance images of the chip under different coded light irradiation, specifically:
acquiring data of a sample image amplified by a microscopic imaging system to obtain an appearance image sample of the detection chip;
Extracting feature information of a chip to be detected according to the appearance image sample of the detection chip to obtain appearance feature information of the detection chip;
Carrying out standardization processing on the appearance images of the chip under different coded light irradiation acquired by the image acquisition module based on the appearance characteristic information of the detection chip to acquire standardized images;
Acquiring a characteristic value of each pixel point in a standardized image, and constructing a matrix in an appearance image of the detection chip;
And packaging the appearance images of the detection chips under the same detection chip to generate a data set, and transmitting the data set to an image processing analysis module based on signals.
Further, in the sixth step, the image processing analysis module performs image processing to extract sample feature information, and the specific process includes:
Constructing an image analysis model, and inputting the obtained appearance images of the plurality of graying detection chips into the image analysis model for calculation;
Extracting an appearance image of one of the detection chips as a comparison sample, wherein a matrix in the appearance image of the detection chip in the comparison sample is a first matrix, and a matrix in the appearance image of the other detection chips is a second matrix;
respectively calculating the similarity between the first matrix and a plurality of second matrices;
and when the maximum similarity is determined to be larger than a preset threshold, determining the appearance image of the detection chip of the second matrix corresponding to the maximum similarity as a chip sample characteristic of the detection chip as a recognition result.
Further, in the seventh step, outputting a corresponding detection result according to the processing analysis result of the image processing analysis module, including:
Obtaining chip sample characteristics of the detection chip and comparing the chip sample characteristics with preset chip sample characteristics, and determining whether the chip sample characteristics of the detection chip are abnormal or not;
If the comparison result is confirmed to be the abnormal chip sample characteristics, the chip sample characteristics are matched with a preset abnormal chip sample control data model, and matching parameters are determined;
and determining the abnormal category of the chip sample characteristic based on the matching parameter, determining a corresponding abnormal alarm prompt according to the abnormal category of the chip sample characteristic, and carrying out abnormal alarm.
Compared with the prior art, the invention has the beneficial effects that:
1. The chip sample is subjected to optical microscopic amplification through the microscopic imaging system, the image acquisition module is used for acquiring data of the sample image amplified by the microscopic imaging system, collecting characteristic information of the chip to be detected, providing analysis data for an algorithm model, and the light source control module is used for driving the multi-layer multicolor annular light source and the white light source to realize coded light irradiation with different light intensities, different wavelengths and different angles, so that the problems of single illumination wavelength or too wide wave band and limited illumination angle in the existing chip appearance optical detection are solved, the accuracy of chip appearance detection is improved, and the chip appearance optical detection device is simple in structure and easy to integrate.
2. The light intensity of each group of annular light sources is modulated through a plurality of coaxial multi-layer multi-color annular light sources in the same group, so that the detection precision of the appearance of a chip is improved, a coding mixed illumination mode capable of being accurately regulated and controlled is added while the multi-wavelength multi-color multi-light source has multiple wavelengths and full-angle illumination, the limitations that the wavelength of a traditional illumination light source is single, the angle is not full and the parameters such as the illumination intensity, the illumination angle and the illumination wavelength of the light source cannot be accurately controlled in the illumination condition of the surface of the chip are overcome, the multi-angle multi-wavelength illumination of the chip sample can be rapidly realized, and therefore a better detection result is obtained.
3. Through carrying out standardized processing to every outward appearance image that obtains, the uniformity of size when realizing every outward appearance image matching contrast, be convenient for guarantee the correspondence of first matrix and second matrix, calculate the chip characteristic based on predetermineeing algorithm model accuracy, the accuracy of the recognition result of having improved the acquisition, and then the detection precision of chip has been improved, through carrying out the comparison judgement with the chip sample characteristic that obtains, confirm whether the chip is unusual, carry out unusual chip sample characteristic matching with the chip that has unusual, confirm unusual class based on the parameter of matching, carry out corresponding unusual alarm suggestion, make things convenient for the manager in time to make the coping scheme, in time handle unusual chip, processing efficiency has been improved, the production quality of chip has been guaranteed.
Drawings
FIG. 1 is a schematic diagram of a chip appearance inspection apparatus according to the present invention;
FIG. 2 is a top view of a multi-layer multi-color annular light source of the present invention;
FIG. 3 is a flow chart of a method for detecting the appearance of a chip based on a multi-layer multi-color ring light source according to the present invention;
FIG. 4 shows test results 1 of an embodiment of the present invention;
Fig. 5 shows test result 2 of the embodiment of the present invention.
In the figure: 1. a microscopic imaging system; 2. a multi-layer multi-color annular light source; 3. a white light source; 4. a light source control module; 5. an image processing analysis module; 6. an image acquisition module; 7. a precise adjusting table; 8. and (5) a light splitting sheet.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In order to solve the technical problems of poor quality of chip appearance images and low detection precision caused by single illumination wavelength or over-wide wave band and limited illumination angle in the existing chip appearance optical detection, referring to fig. 1-5, the present embodiment provides the following technical solutions:
The chip appearance detection device based on the multi-layer multicolor annular light source comprises a microscopic imaging system 1, a multi-layer multicolor annular light source 2, a white light source 3, a light source control module 4, an image processing analysis module 5, an image acquisition module 6, a precision adjustment table 7 and a light splitting sheet 8, wherein the image acquisition module 6 is arranged on the microscopic imaging system 1, the multi-layer multicolor annular light source 2 is arranged at the lower end of the microscopic imaging system 1, the multi-layer multicolor annular light source 2 is coaxially arranged with the microscopic imaging system 1, the white light source 3 is arranged at one side of the inner wall of the microscopic imaging system 1, the light splitting sheet 8 is arranged in the microscopic imaging system 1 and is at the same height as the white light source 3, the image processing analysis module 5 is electrically connected with the image acquisition module 6, and the light source control module 4 is respectively electrically connected with the multi-layer multicolor annular light source 2 and the white light source 3;
The chip to be measured is placed on the upper surface of a precise adjustment table 7, the distance between the precise adjustment table 7 and a microscopic imaging system 1 is adjustable, the microscopic imaging system 1 images the chip, the upper surface of the precise adjustment table 7 is set to be a chip area to be measured, light emitted by a multi-layer multicolor annular light source 2 irradiates the chip area to be measured on the upper surface of the precise adjustment table 7, light emitted by a white light source 3 irradiates one side of a light splitting sheet 8, the light splitting sheet 8 refracts the emitted light to the chip area to be measured, an image acquisition module 6 acquires appearance images of the chip to be measured under different coded light irradiation, an image processing analysis module 5 acquires the appearance images acquired by the image acquisition module 6, identifies and analyzes the acquired appearance images, and outputs a detection report.
Specifically, the microscopic imaging system 1 is used for carrying out optical microscopic amplification on a chip sample, the image acquisition module 6 is used for carrying out data acquisition on a sample image amplified by the microscopic imaging system 1, collecting characteristic information of a chip to be detected, providing analysis data for an algorithm model, the light source control module 4 is used for driving the multi-layer multi-color annular light source 2 and the white light source 3 to realize coded light irradiation with different light intensities, different wavelengths and different angles, the light source control module 4 is used for modulating the light intensity, the irradiation angle and the irradiation wavelength of the multi-layer multi-color annular light source 2, the problem that the illumination wavelength is single or the wave band is too wide and the illumination angle is limited in the existing chip appearance optical detection is solved, the accuracy of chip appearance detection is improved, and the device is simple in structure and easy to integrate.
In order to solve the technical problem that parameters such as illumination intensity, illumination angle, illumination wavelength and the like of a light source in illumination conditions in the existing chip appearance optical detection have larger control errors, referring to fig. 1-5, the present embodiment provides the following technical scheme:
The multi-layer multicolor annular light source 2 is composed of at least one group of coaxial LED annular light sources, LEDs in each group of coaxial annular light sources are sequentially arranged around the circle center at the same interval, each group of LED annular light sources and a chip to be detected form different irradiation angles, the wavelengths of the LEDs corresponding to each group of annular light sources are different, the multi-layer multicolor annular light source 2 and the light source control module 4 are provided with LED driving modules, the LED driving modules are composed of FPGA circuits and are integrated on a Printed Circuit Board (PCB) provided with the LED light source modules, the LED light source modules are electrically connected with the LED driving modules, the LED driving modules receive external configuration parameters in real time based on a UART serial port protocol and output pulse width modulation PWM waves corresponding to frequencies and duty ratios to drive light sources corresponding to wavelength channels, and the LED driving modules regulate and control the light sources with different wavelengths in the LED light source modules in real time.
Specifically, the light intensity of each group of annular light sources is modulated through a plurality of coaxial multi-layer multi-color annular light sources 2 in the same group, so that the detection precision of the appearance of a chip is improved, a coding mixed illumination mode capable of being accurately regulated and controlled is added while the multi-wavelength multi-color multi-light source has the advantages of being provided with multiple wavelengths and being provided with full-angle illumination, the defects that the wavelength of a traditional illumination light source is single, the angle is incomplete and the accurate control of each wavelength cannot be realized are overcome, the accurate control of parameters such as the illumination intensity, the illumination angle and the illumination wavelength of the light source in the illumination condition of the surface of the chip is realized, the multi-angle multi-wavelength illumination of the chip sample can be rapidly realized, and therefore, a better detection result is obtained.
In order to better embody the detection flow of a chip appearance detection device based on a multi-layer multi-color annular light source, the invention provides a chip appearance detection method based on a multi-layer multi-color annular light source, which comprises the following steps:
Step one: placing the chip to be tested on a precise adjustment table 7, and adjusting the position and the height of the precise adjustment table 7 to precisely and three-dimensionally adjust the position of the chip to be tested;
Step two: the chip to be detected is adjusted to enable the microscopic imaging system 1 to clearly image the chip, the chip is ensured to be positioned at the focal plane of the microscopic imaging system 1, and the microscopic imaging system 1 carries out optical microscopic amplification on the chip to be detected;
Step three: the light source control module 4 is utilized to drive the multi-layer multicolor annular light source 2 and the white light source 3 to illuminate, so that coded light illumination with different light intensities, different wavelengths and different angles of the chip to be tested is realized;
step four: the image acquisition module 6 is used for acquiring appearance images of chips under different coded light irradiation;
Step five: the image processing analysis module 5 acquires at least one appearance image and grays the appearance image acquired by the image acquisition module 6;
step six: inputting a plurality of chip surface images into a preset model of an image processing analysis module 5 for calculation, performing image processing based on a preset algorithm, and extracting sample characteristic information;
Step seven: and outputting a corresponding detection result according to the processing analysis result of the image processing analysis module 5, and making a corresponding alarm prompt based on the detection result so as to realize the detection and analysis of the appearance of the chip.
According to the above embodiments, the final experimental system obtained the target detection results as shown in fig. 4 and 5. The embodiment result shows that the method and the device can conveniently and rapidly realize multi-wavelength multi-angle hierarchical mixed illumination, simultaneously maintain uniform illumination and accurate control effects on a target area, finally realize better measurement results, can be widely applied to optical imaging and detection, can be applied to scenes such as biological sample illumination, object type identification illumination and the like, and provide a simple and feasible illumination method and device for improving the accuracy of detection results.
In order to solve the technical problem that abnormal results cannot be processed and measured in time in the existing chip appearance optical detection, referring to fig. 1-5, the present embodiment provides the following technical solutions:
aiming at the fourth step, the image acquisition module 6 acquires appearance images of the chip under different coded light irradiation, specifically:
Carrying out data acquisition on the sample image amplified by the microscopic imaging system 1 to obtain an appearance image sample of the detection chip;
Extracting feature information of a chip to be detected according to the appearance image sample of the detection chip to obtain appearance feature information of the detection chip;
Carrying out standardization processing on the appearance images of the chip under different coded light irradiation acquired by the image acquisition module 6 based on the appearance characteristic information of the detection chip to obtain standardized images;
Acquiring a characteristic value of each pixel point in a standardized image, and constructing a matrix in an appearance image of the detection chip;
And packaging the appearance images of the detection chips under the same detection chip to generate a data set, and transmitting the data set to the image processing analysis module 5 based on the signals.
In the sixth step, the image processing analysis module 5 performs image processing to extract sample feature information, and the specific process includes:
Constructing an image analysis model, and inputting the obtained appearance images of the plurality of graying detection chips into the image analysis model for calculation;
Extracting an appearance image of one of the detection chips as a comparison sample, wherein a matrix in the appearance image of the detection chip in the comparison sample is a first matrix, and a matrix in the appearance image of the other detection chips is a second matrix;
respectively calculating the similarity between the first matrix and a plurality of second matrices;
and when the maximum similarity is determined to be larger than a preset threshold, determining the appearance image of the detection chip of the second matrix corresponding to the maximum similarity as a chip sample characteristic of the detection chip as a recognition result.
In the seventh step, the outputting of the corresponding detection result according to the processing analysis result of the image processing analysis module 5 includes:
Obtaining chip sample characteristics of the detection chip and comparing the chip sample characteristics with preset chip sample characteristics, and determining whether the chip sample characteristics of the detection chip are abnormal or not;
If the comparison result is confirmed to be the abnormal chip sample characteristics, the chip sample characteristics are matched with a preset abnormal chip sample control data model, and matching parameters are determined;
and determining the abnormal category of the chip sample characteristic based on the matching parameter, determining a corresponding abnormal alarm prompt according to the abnormal category of the chip sample characteristic, and carrying out abnormal alarm.
Specifically, through carrying out standardized processing on each obtained appearance image based on appearance image samples to obtain standardized images, the consistency of the sizes of each appearance image during matching comparison is realized, the correspondence between a first matrix and a second matrix is conveniently ensured, the similarity between the first matrix and a plurality of second matrices is respectively calculated in sequence, when the maximum similarity is determined to be greater than a preset threshold value, the appearance image corresponding to the second matrix is determined to be the chip sample characteristic of the detection chip, the similarity is accurately calculated based on the algorithm, the accuracy of judging the similarity and the preset threshold value is further improved, the accuracy of the obtained identification result is further improved, and the detection accuracy of the chip is further improved;
The obtained chip sample characteristics are compared and judged to determine whether the chip is abnormal, the abnormal chip sample characteristics of the chip with the abnormality are matched, the abnormal category is determined based on the matched parameters, and the corresponding abnormal alarm prompt is carried out, so that a manager can conveniently and timely make a response scheme, the abnormal chip is timely processed, the processing efficiency is improved, and the production quality of the chip is guaranteed.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should be covered by the protection scope of the present invention by making equivalents and modifications to the technical solution and the inventive concept thereof.
Claims (3)
1. The utility model provides a chip outward appearance detection device based on multilayer polychromatic annular light source, includes microscopic imaging system (1), multilayer polychromatic annular light source (2), white light source (3), light source control module (4), image processing analysis module (5), image acquisition module (6), accurate adjustment platform (7) and beam split piece (8), its characterized in that: the image acquisition module (6) is arranged on the microscopic imaging system (1), the lower end of the microscopic imaging system (1) is provided with a multi-layer multi-color annular light source (2), the multi-layer multi-color annular light source (2) and the microscopic imaging system (1) are coaxially arranged, a white light source (3) is arranged on one side of the inner wall of the microscopic imaging system (1), the light splitting sheet (8) is arranged in the microscopic imaging system (1) and is at the same height with the white light source (3), the image processing analysis module (5) is electrically connected with the image acquisition module (6), and the light source control module (4) is electrically connected with the multi-layer multi-color annular light source (2) and the white light source (3) respectively;
the multi-layer multicolor annular light source (2) consists of at least one group of coaxial LED annular light sources, LEDs in each group of coaxial annular light sources are sequentially arranged around the circle center at the same interval, each group of LED annular light sources and a chip to be detected form different irradiation angles, and the wavelengths of the LEDs corresponding to each group of annular light sources are different;
The LED driving module is formed by an FPGA circuit and integrated on a Printed Circuit Board (PCB) provided with the LED light source module, the LED light source module is electrically connected with the LED driving module, the LED driving module receives external configuration parameters in real time based on a UART serial port protocol, outputs Pulse Width Modulation (PWM) waves with corresponding frequency and duty ratio, drives light sources with corresponding wavelength channels, and carries out real-time regulation and control on the light sources with different wavelengths in the LED light source module;
The chip to be measured is placed on the upper surface of a precise adjustment table (7), the distance between the precise adjustment table (7) and a microscopic imaging system (1) is adjustable, the microscopic imaging system (1) images the chip, the upper surface of the precise adjustment table (7) is set to be a chip area to be measured, light rays emitted by a multi-layer multicolor annular light source (2) irradiate the chip area to be measured on the upper surface of the precise adjustment table (7), light rays emitted by a white light source (3) irradiate one side of a light splitting sheet (8), and the light rays emitted by the light splitting sheet (8) are refracted to the chip area to be measured;
the chip appearance detection device also comprises a chip appearance detection method based on the multi-layer multicolor annular light source, and the method comprises the following steps of:
Step one: placing a chip to be tested on a precise adjustment table (7), and adjusting the position and the height of the precise adjustment table (7) to precisely and three-dimensionally adjust the position of the chip to be tested;
Step two: the chip to be detected is adjusted to enable the microscopic imaging system (1) to clearly image the chip, the chip is ensured to be positioned at the focal plane of the microscopic imaging system (1), and the microscopic imaging system (1) performs optical microscopic amplification on the chip to be detected;
Step three: the light source control module (4) is utilized to drive the multi-layer multi-color annular light source (2) and the white light source (3) to illuminate, so that the coded light with different light intensities, different wavelengths and different angles of the chip to be tested can be illuminated;
step four: the image acquisition module (6) is used for acquiring appearance images of the chip under different coded light irradiation;
step five: the image processing analysis module (5) acquires at least one appearance image and grays the appearance image acquired by the image acquisition module (6);
Step six: inputting a plurality of chip surface images into a preset model of an image processing analysis module (5) for calculation, performing image processing based on a preset algorithm, and extracting sample characteristic information;
Step seven: outputting a corresponding detection result according to the processing analysis result of the image processing analysis module (5), and making a corresponding alarm prompt based on the detection result so as to realize the detection and analysis of the appearance of the chip;
in the sixth step, the image processing analysis module (5) performs image processing to extract sample characteristic information, and the specific process includes:
Constructing an image analysis model, and inputting the obtained appearance images of the plurality of graying detection chips into the image analysis model for calculation;
Extracting an appearance image of one of the detection chips as a comparison sample, wherein a matrix in the appearance image of the detection chip in the comparison sample is a first matrix, and a matrix in the appearance image of the other detection chips is a second matrix;
respectively calculating the similarity between the first matrix and a plurality of second matrices;
When the maximum similarity is determined to be greater than a preset threshold, determining the appearance image of the detection chip of the second matrix corresponding to the maximum similarity as a chip sample characteristic of the detection chip as a recognition result;
In the seventh step, outputting a corresponding detection result according to the processing analysis result of the image processing analysis module (5), including:
Obtaining chip sample characteristics of the detection chip and comparing the chip sample characteristics with preset chip sample characteristics, and determining whether the chip sample characteristics of the detection chip are abnormal or not;
If the comparison result is confirmed to be the abnormal chip sample characteristics, the chip sample characteristics are matched with a preset abnormal chip sample control data model, and matching parameters are determined;
and determining the abnormal category of the chip sample characteristic based on the matching parameter, determining a corresponding abnormal alarm prompt according to the abnormal category of the chip sample characteristic, and carrying out abnormal alarm.
2. A chip appearance inspection device based on a multi-layer multi-color ring light source as claimed in claim 1, wherein: the image acquisition module (6) acquires appearance images of the chip to be detected under different coded light irradiation, the image processing analysis module (5) acquires the appearance images acquired by the image acquisition module (6), identifies and analyzes the acquired appearance images, and outputs a detection report.
3. A chip appearance inspection device based on a multi-layer multi-color ring light source as claimed in claim 2, wherein: in the fourth step, the image acquisition module (6) acquires appearance images of the chip under different irradiation of the coded light, specifically:
carrying out data acquisition on the sample image amplified by the microscopic imaging system (1) to obtain an appearance image sample of the detection chip;
Extracting feature information of a chip to be detected from the appearance image sample of the detection chip to obtain appearance feature information of the detection chip;
carrying out standardization processing on the appearance images of the chip under different coded light irradiation acquired by the image acquisition module (6) based on the appearance characteristic information of the detection chip to acquire standardized images;
Acquiring a characteristic value of each pixel point in a standardized image, and constructing a matrix in an appearance image of the detection chip;
And packaging the appearance images of the detection chips under the same detection chip to generate a data set, and transmitting the data set to an image processing analysis module (5) based on signals.
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