CN116625989A - Detector for quartz tube rod and application method thereof - Google Patents

Detector for quartz tube rod and application method thereof Download PDF

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Publication number
CN116625989A
CN116625989A CN202310650209.1A CN202310650209A CN116625989A CN 116625989 A CN116625989 A CN 116625989A CN 202310650209 A CN202310650209 A CN 202310650209A CN 116625989 A CN116625989 A CN 116625989A
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China
Prior art keywords
measuring
measuring unit
sample
rod
unit
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Pending
Application number
CN202310650209.1A
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Chinese (zh)
Inventor
黄宏琪
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Nanjing Zhichun Hongyuan Technology Co ltd
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Nanjing Zhichun Hongyuan Technology Co ltd
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Priority to CN202310650209.1A priority Critical patent/CN116625989A/en
Publication of CN116625989A publication Critical patent/CN116625989A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N2021/4173Phase distribution
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854Grading and classifying of flaws
    • G01N2021/8874Taking dimensions of defect into account
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides a detector for a quartz tube rod and a use method thereof, wherein the detector is used for measuring the bow degree and the roundness of the quartz tube and the quartz rod through a dial indicator; and detecting the change of the refractive index to obtain physical parameters such as bubbles, impurities, bright spots, stress, refractive index distribution and the like of the quartz tube rod. It is based on the following principle: generally, the quartz tube or the quartz preform is an isotropic medium, and the various physical parameters of the quartz tube and the quartz rod can be obtained by measuring the parameters of anisotropy because the non-uniformity of refractive index caused by different deposition layers or defects is equivalent to becoming an anisotropic medium. The invention can measure various parameters of the quartz tube rod on line, has stable and compact structure, low price, powerful function and simple operation, can measure the quartz tube and the quartz rod with the length of 50-5000mm and the diameter of 5-1000mm, and can well guide experiments and production.

Description

Detector for quartz tube rod and application method thereof
Technical Field
The invention belongs to the field of detection of quartz tubes and quartz rods, and particularly relates to a detector for detecting physical parameters including bubbles, impurities, bright spots, stress, refractive index distribution and the like of the quartz tubes and the quartz rods and a use method thereof.
Background
The high-quality quartz substrate tube is an indispensable raw material for preparing the optical fiber preform, and the defects of the substrate tube such as roundness, bow degree parameters, bright spots, bright lines, bubbles and the like directly determine the performance of preparing the optical fiber preform. At present, defects such as bright spots, bright lines and bubbles are tested by irradiating end surfaces through a strong light flashlight and then observing the conditions of the bright spots, the bright lines and the bubbles. Because the length of the quartz base tube is generally more than 1 meter, the method can also be used for observing the defect that the diameter is larger (generally a few tenths of a millimeter) and is close to a strong light flashlight, and once the defect is at the far end of strong light or tiny (in the order of 10 microns), the defect is unaddressed, and in addition, the test method is low in efficiency and easy to miss.
In addition, the deposited optical fiber preform also needs to detect parameters such as distribution of a deposited layer, DIP width, bow degree, roundness, bright spots, bright lines, bubbles, stress and the like. At present, PK equipment is adopted for measuring the distribution of the deposition layer, the DIP width and the roundness parameters, the equipment is high in price, the distribution of the deposition layer and the DIP width are all approximately fitted, and the real situation can not be reflected well in some cases. Parameters such as a bright spot, a bright line and bubbles of the preform are observed by irradiating the end face of the preform with strong light containing ultraviolet rays, and the conditions of the bright spot, the bright line and the bubbles are not detected by the fine (10-200 microns) defects, and the defects directly affect the performance of the subsequent optical fibers; secondly, the eyes of the measuring personnel are greatly damaged by ultraviolet rays.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides the detector for the quartz tube rod and the use method thereof, and the detector can measure physical parameters including bubbles, impurities, bright spots, stress, refractive index distribution and the like of the quartz tube and the quartz rod, and has the characteristics of high measurement precision, quick response, simplicity, convenience, reliability and low price.
In order to achieve the above object, according to one aspect of the present invention, there is provided a detector for a quartz tube rod, the detector comprising a bed base, a measuring unit, an electric control system, a data processing recording unit, and the like.
The bed base is used for supporting and fixing a sample to be detected, a measuring unit and the like and consists of a bed frame, a guide rail, a measuring unit sliding block, a movable end sliding block, a screw rod, a chuck, a bearing roller and the like.
The lathe bed frame is used for fixing and installing each unit of the lathe bed base and is the basis of the whole lathe bed base, and the lathe bed frame can be manufactured by cast iron, steel, aluminum alloy plates and the like, and is preferably manufactured by adopting the aluminum alloy plates;
the guide rail is used for installing and positioning the sliding blocks of the measuring unit, the sliding blocks of the moving end and the like, is arranged on the bed body frame and can be selected from a linear guide rail, a cylindrical sliding rail and the like;
the measuring unit sliding block is arranged above the guide rail and comprises a sliding block and a measuring unit mounting plate, wherein the measuring mounting plate is used for mounting a measuring unit and is formed by processing a steel plate, an aluminum plate and the like;
the movable end sliding block is arranged above the guide rail and used for fixing a sample to be tested, the movable end sliding block consists of a sliding block and a movable end supporting plate, and the movable end supporting plate is formed by processing steel plates, aluminum plates and the like;
the screw rod is used for moving the measuring unit, the screw rod tooth sleeve is arranged on the mounting plate of the measuring unit, and the screw rod can be a Huadong screw rod, a rolling screw rod, a static pressure screw rod and the like, and the ball screw rod is preferably adopted because the friction force of the ball screw rod is small and the precision is high;
the chuck is used for clamping and rotating a sample to be tested, and is generally a three-jaw or multi-jaw light chuck, and is arranged on the bed frame, preferably a three-jaw light chuck;
the bearing roller is used for supporting and fixing a sample to be detected, the bearing roller is installed on the bed body frame and the movable end plate, the bearing roller is generally a stainless steel bearing inside, and a Teflon roller outside is used for preventing the sample to be detected from being polluted.
The measuring unit consists of a lower measuring unit, a measuring rod, a dial indicator unit, an upper measuring unit, a CCD unit and the like, and is arranged on a measuring unit sliding block.
The lower measuring unit comprises a light source, a measuring lens, a mounting seat and the like, wherein the light source can adopt a halogen lamp, an incandescent lamp, an LED lamp and the like, and the mounting seat is used for mounting the light source and the lens;
the measuring rod is arranged on the measuring unit mounting plate and is used for mounting a dial indicator unit, an upper measuring unit, a CCD unit and the like;
the dial indicator unit is arranged on the measuring rod and is used for measuring the roundness and bow degree of a sample to be measured, and the dial indicator can be mechanical or electronic;
the upper measuring unit is arranged on the measuring rod and is positioned right above the sample to be measured, and the upper measuring unit comprises a lens mounting seat and a measuring lens, wherein the lens is arranged in the measuring seat and can rotate for 360 degrees;
the measuring lens consists of a polaroid, a wave plate, an antireflection film, a waterproof film and the like and is used for detecting various physical parameters of a sample to be measured;
the CCD unit comprises a CCD camera, a measuring lens and the like and is used for shooting a sample to be measured and acquiring image information.
The electric control system comprises a motor, an encoder, a PLC component, a cable, a tank chain and the like. The motor can adopt a stepping motor or a servo motor, and the motor is mainly used for driving the screw rod or the chuck to rotate. The encoder is used for recording the rotation of the motor and controlling the rotation speed of the motor in a feedback way through a PID algorithm. The PLC component is the core of the control system and is a carrier of algorithms and the like. The cable includes a power line, a signal line, and the like. The tank chain is used for installation of cables.
The data processing and recording unit comprises a computer, a control interface, a control system, a storage unit and the like, wherein the control interface is used for controlling and displaying the running speed, the rotating speed of the chuck, the bow curvature and the roundness of the measuring unit in real time, the real-time image of a sample to be measured and the like, and the control system comprises control of a motor, control of a CCD (charge coupled device) module and real-time information of the record sample and outputs measurement parameters and reports after measurement is completed.
In order to achieve the above object, according to another aspect of the present invention, there is provided a method of using a detector for a quartz tube rod. The method is based on the following principle:
(1) The bow curvature measurement of the sample to be measured is based on the fact that the dial indicator can acquire the jumping parameters of the sample to be measured (namely the bow curvature of the sample to be measured) when the measuring unit slides along the guide rail, and the measurement of the roundness of the outer surface of the sample to be measured is based on the fact that the dial indicator can acquire the jumping parameters of the sample rotating for one circle when the chuck rotates (namely the roundness of the sample can be calculated);
(2) The bright spots, bright lines, bubbles, peeling, pits, impurities, stress and the like in the quartz tube can locally change the refractive index of the quartz tube, so that the refractive index distribution of the quartz tube is uneven at the defective position;
(3) The refractive indexes of different deposition layers of the deposited optical fiber preform are different, and the refractive indexes of DIP in the core are also different due to the fact that components change; meanwhile, the refractive index of the quartz tube can be locally changed by bright spots, bright lines, bubbles, peeling, pits, impurities, stress and the like in the preform;
(4) Generally, a quartz tube or a quartz preform is an isotropic medium, and because the refractive index non-uniformity caused by different deposition layers or defects is equivalent to an anisotropic medium, when a beam of light passes through a sample to be measured, the O light and the E light can generate a certain phase difference at a position where the refractive index changes, so that the above-mentioned various physical parameters of the quartz tube and the quartz rod can be obtained by measuring the parameters.
Based on the above principle, based on the difference of the refractive indexes, the optical field distribution caused by the change of the refractive index can be obtained by adjusting the optical field parameters (lens angle and wave plate parameters), then the physical parameters such as the size of the defect, the boundary line of the deposition layer, the DIP width, the stress distribution and the like can be obtained by shooting with a CCD camera and processing data, and in addition, the roundness of the deposition layer can be calculated by the obtained boundary line of the deposition layer.
The invention has the following beneficial effects:
(1) The light source adopted by the invention is an LED visible light source, and has the characteristics of low cost, safety, reliability, stability and no harm to human eyes;
(2) The detector can carry out online synchronous measurement on defects such as quartz tubes, quartz rod bright spots, bright lines, bubbles, skinning, pits, impurities, stress and the like, distribution of a deposition layer and bow curvature and roundness, has high measurement precision and can output reports;
(3) The detector has stable and compact structure, low price, powerful function and simple operation, and can measure quartz tube and quartz rod with the length of 50-5000mm and the diameter of 5-1000 mm.
Drawings
FIG. 1 is a schematic view of a bed base and a measuring unit according to an embodiment of the present invention;
the same reference numbers are used throughout the drawings to reference like elements or structures, wherein:
1-a bed body frame 2-a guide rail 3-a sliding block 4-a measuring unit mounting plate 5-a moving end supporting plate 6-a bearing roller 7-a measuring rod 8-a lower measuring unit 9-an upper measuring unit 10-a rotatable device 11-a measuring lens 12-a magnifying glass 13-a CCD unit 14-a tank chain mounting position 15-a line box 16-a dial gauge 17-a sample to be measured
Description of the embodiments
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
As shown in FIG. 1, the invention provides a detector for a quartz tube rod and a use method thereof. The guide rail 2 is arranged on the lathe bed frame, each guide rail is provided with two to four sliding blocks, the installation of the lathe bed frame and the guide rails is regulated during the assembly, the parallelism between the two guide rails is better than 0.02mm/m, the levelness of the guide rails is better than 0.1mm/m, the lathe bed is formed by processing an aluminum plate, and the guide rails are cylindrical guide rails; the measuring unit mounting plate 4 is mounted on the sliding block 3; the measuring rod 7 is a hollow stainless steel tube and is arranged on the measuring unit mounting plate 4; the lower measuring unit 8 comprises a mounting seat, an LED light source, a measuring lens and the like, and is directly mounted on a measuring unit mounting plate; the dial indicator is arranged on the measuring rod through a fixing frame, the dial indicator is positioned on the side surface of the sample 17 to be measured, and the dial indicator fixing frame can move back and forth and be fixed; the upper measuring unit 9 comprises a lens seat, a measuring lens and the like, is arranged on a measuring rod and is positioned right above the sample 17 to be measured; rotatable means 10 are located inside 9 for measuring the rotation and fixation of the lens 11; the bearing roller 6 is respectively arranged on the fixed end and the movable end supporting plate of the lathe frame and is used for fixing and rotating a sample 17 to be tested; the magnifying lens 12 is fixed on the measuring rod 7 and is positioned right above the upper measuring unit 9 and used for magnifying the measured image; the CCD unit 13 is wrapped with a CCD camera and a lens, is arranged on the measuring rod 7 and is positioned right above the magnifier 12 and is used for recording measured images in real time; wherein the lower measuring unit 8, the upper measuring unit 9, the magnifying glass 12 and the CCD unit 13 are positioned on the same optical axis; the tank chain installation position 14 is used for installing a power line and a signal line; the wire box 15 is used for centralized control of power wires and signal wires.
When the sample 17 to be measured is placed on the bearing roller 6, the dial indicator and the measuring light path are adjusted, and measurement can be started. The bow or roundness of the sheet 17 can be measured by moving the measuring unit or rotating the bearing roller 6. The light source is turned on, different refractive index distribution in the quartz tube or the quartz rod can be seen by rotating the light source for 10 degrees, clear images of defects such as a deposition layer or a bright spot, a bright line, bubbles, peeling, pits, impurities, stress and the like can be observed by fine adjustment of the light source 10, the measured images are shot by the CCD, and the physical parameters of a sample to be measured can be obtained by displaying and recording the images by the upper computer.
The method specifically comprises the following steps:
s1, placing a sample to be measured on a bearing roller, and adjusting a dial indicator and a measuring light path;
s2, moving the measuring unit, reading the reading change of the dial indicator, obtaining the bow degree of the sample to be measured, driving the chuck to rotate, and reading the dial indicator to obtain the roundness of the sample to be measured;
s3, turning on the light source, rotating the rotatable device to enable the measuring lens to rotate, obtaining different refractive index distribution in the quartz rod under different angles, shooting quartz rod images under different refractive indexes by adopting the CCD, displaying and recording through the upper computer, and obtaining the physical parameters of the sample to be measured, and obtaining different defects of the sample to be measured through the data processing and recording unit.
According to the invention, by measuring the bow degree and roundness of the quartz tube and the quartz rod and the uneven refractive index distribution caused by various reasons, the physical parameters of the bow degree and roundness of the quartz tube and the quartz rod, the boundary line of a deposition layer, defects and the like are obtained, and the device is simple, reliable, quick in response, low in price and high in measurement precision. There is great monitoring and guiding significance to the incoming inspection of quartz tubes and the production of preforms.
Those skilled in the art will readily appreciate that any modification, equivalent replacement, improvement, etc. that comes within the spirit and principles of the present invention are included within the scope of the present invention.

Claims (6)

1. The detector for the quartz tube rod is characterized by comprising a bed base, a measuring unit, an electric control system and a data processing and recording unit, wherein the bed base is used for supporting and fixing a sample to be detected and the measuring unit, and comprises a bed frame, a guide rail, a measuring unit sliding block, a movable end sliding block, a rotatable device, a screw rod, a chuck and a bearing roller;
the guide rail is used for installing and positioning the sliding block of the measuring unit and the sliding block of the moving end, and is installed on the bed body frame;
the measuring unit sliding block is arranged on the guide rail, the measuring unit comprises a sliding block and a measuring unit mounting plate, and the measuring mounting plate is used for mounting the measuring unit;
the movable end sliding block is arranged on the guide rail and used for fixing a sample to be tested, and consists of a sliding block and a movable end supporting plate;
the screw rod is used for moving the measuring unit, and the screw rod tooth sleeve is arranged on the measuring unit mounting plate; the chuck is used for clamping and rotating a sample to be tested;
the bearing roller is used for supporting and fixing a sample to be tested and is arranged on the bed body frame and the movable end plate;
the measuring unit comprises a lower measuring unit, a measuring rod, a dial indicator unit, an upper measuring unit and a CCD unit, and is arranged on a sliding block of the measuring unit;
the lower measuring unit comprises a light source, a measuring lens and a mounting seat, wherein the mounting seat is used for mounting the light source and the lens;
the measuring rod is arranged on the measuring unit mounting plate and is used for mounting a dial indicator unit, an upper measuring unit and a CCD unit;
the dial indicator unit is arranged on the measuring rod and is used for measuring the roundness and bow degree of the sample to be measured;
the upper measuring unit is arranged on the measuring rod and is positioned right above the sample to be measured, the upper measuring unit comprises a lens mounting seat and a measuring lens, the lens is arranged in the measuring seat, and the lens can rotate by 360 degrees.
2. The detector for quartz tube rods according to claim 1, wherein the measuring lens comprises a polarizer, a wave plate, an antireflection film and a waterproof film.
3. The detector for quartz tube rods according to claim 1, wherein the CCD unit comprises a CCD camera and a measuring lens for photographing a sample to be detected to obtain image information.
4. The detector for quartz tube rods according to claim 1, wherein the electric control system comprises a motor, an encoder, a PLC assembly, a cable and a tank chain, and the encoder is used for recording the rotation of the motor and controlling the rotation speed of the motor in a feedback manner through a PID algorithm.
5. The detector for quartz tube rods according to claim 1, wherein the data processing and recording unit comprises a computer, a control interface, a control system and a storage unit, wherein the control interface is used for controlling and displaying the running speed, the rotating speed of a chuck, the bow degree and the roundness of the measuring unit in real time and the change of the roundness and the real-time image of a sample to be detected, and the control system comprises the control of the motor, the control of the CCD and the real-time information of the recorded sample and outputs measurement parameters and reports after the measurement is completed.
6. A method for detecting a quartz rod using the detector for a quartz tube rod according to any of claims 1 to 5, comprising the steps of:
s1, placing a sample to be measured on a bearing roller, and adjusting a dial indicator and a measuring light path;
s2, moving the measuring unit, reading the reading change of the dial indicator, obtaining the bow degree of the sample to be measured, driving the chuck to rotate, and reading the dial indicator to obtain the roundness of the sample to be measured;
s3, turning on the light source, rotating the rotatable device to enable the measuring lens to rotate, obtaining different refractive index distribution in the quartz rod under different angles, shooting quartz rod images under different refractive indexes by adopting the CCD, displaying and recording through the upper computer, and obtaining the physical parameters of the sample to be measured, and obtaining different defects of the sample to be measured through the data processing and recording unit. .
CN202310650209.1A 2023-06-02 2023-06-02 Detector for quartz tube rod and application method thereof Pending CN116625989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310650209.1A CN116625989A (en) 2023-06-02 2023-06-02 Detector for quartz tube rod and application method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310650209.1A CN116625989A (en) 2023-06-02 2023-06-02 Detector for quartz tube rod and application method thereof

Publications (1)

Publication Number Publication Date
CN116625989A true CN116625989A (en) 2023-08-22

Family

ID=87636449

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310650209.1A Pending CN116625989A (en) 2023-06-02 2023-06-02 Detector for quartz tube rod and application method thereof

Country Status (1)

Country Link
CN (1) CN116625989A (en)

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