CN116619252A - Polishing equipment for quartz boat groove rod - Google Patents
Polishing equipment for quartz boat groove rod Download PDFInfo
- Publication number
- CN116619252A CN116619252A CN202310425683.4A CN202310425683A CN116619252A CN 116619252 A CN116619252 A CN 116619252A CN 202310425683 A CN202310425683 A CN 202310425683A CN 116619252 A CN116619252 A CN 116619252A
- Authority
- CN
- China
- Prior art keywords
- supporting
- polishing
- spray gun
- grooved
- clamping mechanisms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 67
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 239000010453 quartz Substances 0.000 title claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims abstract description 86
- 239000007921 spray Substances 0.000 claims abstract description 49
- 230000005540 biological transmission Effects 0.000 claims description 30
- 238000005507 spraying Methods 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/08—Abrasive blasting machines or devices; Plants essentially adapted for abrasive blasting of travelling stock or travelling workpieces
- B24C3/10—Abrasive blasting machines or devices; Plants essentially adapted for abrasive blasting of travelling stock or travelling workpieces for treating external surfaces
- B24C3/12—Apparatus using nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C5/00—Devices or accessories for generating abrasive blasts
- B24C5/02—Blast guns, e.g. for generating high velocity abrasive fluid jets for cutting materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention relates to polishing equipment for a quartz boat grooved bar, which comprises a workbench, an X-axis sliding mechanism, two clamping mechanisms, a rotary driving mechanism, a polishing spray gun and a grooved bar supporting and supporting group, wherein two corresponding supporting tables and the grooved bar supporting and supporting group are arranged on the workbench along the X-axis direction; the rotary driving mechanism is arranged on the workbench and is respectively connected with the rotating shafts of the two mounting clamping mechanisms, and any rotating shaft is connected with the driving motor; the X-axis sliding mechanism is arranged on the workbench, the spray gun moving mechanism is provided with a spray gun supporting structure, the polishing spray gun is arranged on the spray gun supporting structure through a manual rotary table, and the polishing spray gun corresponds to the groove rod. The clamping mechanism can drive the rotary driving mechanism of the clamping mechanism to rotate, so that the purpose of rotating the grooved bars is achieved, and the polishing spray gun on the X-axis sliding mechanism is matched to finish the polishing of the surface axial direction and the circumferential surface of the grooved bars at one time.
Description
Technical Field
The invention relates to the technical field of quartz boat processing, in particular to polishing equipment for quartz boat grooved bars.
Background
The quartz boat is a silicon dioxide-containing substance, is widely applied to the aspects of electric light sources, semiconductors, optical new technologies and the like, and the groove bars are important components of quartz boat products, and each groove bar needs to be polished before the quartz boat products are assembled. The traditional groove bar polishing technology is to manually turn over and polish the groove bar continuously by using a spray gun, so that a great deal of labor and time cost are consumed, and in order to avoid the defect of manual polishing, the polishing track of the groove bar is manually simulated by using a triaxial linkage device or a mechanical arm to polish the groove bar. Because the groove rod polishes 360 degrees to the surface of the groove rod cylinder, and no matter the three-axis linkage equipment or the mechanical arm adopted by the existing polishing equipment is used for installing an oxyhydrogen flame gun, the whole groove rod cylinder cannot be polished at one time, the polishing range is about 180 degrees, the groove rod and the groove rod supporting surface cannot be polished all the time, so after the half cylindrical surface of the groove rod is polished each time, the groove rod is turned 180 degrees and then the other half surface is polished, however, a polishing blind spot or a blind area exists at the junction of the two polishing half surfaces in the mode, the polishing degree is not very perfect, if the junction of the two plate surfaces is polished, a new two-time polishing plate surface junction blind area always occurs, and the polishing degree of the same groove rod cannot be guaranteed all the time.
Disclosure of Invention
Aiming at the problems, the invention provides polishing equipment for quartz boat grooved bars, which adopts a mode that a spray gun is relatively fixed and the grooved bars are turned over to polish the quartz boat grooved bars in one-time manner without dead angles.
In order to achieve the above purpose, the following technical scheme is adopted: the polishing equipment for the quartz boat groove rod comprises a workbench, an X-axis sliding mechanism, two clamping mechanisms, a rotary driving mechanism, a polishing spray gun and a groove rod supporting support group, wherein two corresponding supporting tables and the groove rod supporting support group are arranged on the workbench along the X-axis direction, the groove rod supporting support group is positioned between the two supporting tables, the two clamping mechanisms are respectively arranged on the two supporting tables through rotating shafts, and the two clamping mechanisms correspond to each other; the rotary driving mechanism is arranged on the workbench and is respectively connected with the rotating shafts of the two mounting clamping mechanisms, and any rotating shaft is connected with the driving motor; the X-axis sliding mechanism is arranged on the workbench, the spray gun moving mechanism is provided with a spray gun supporting structure, the polishing spray gun is arranged on the spray gun supporting structure through a manual rotary table, and the polishing spray gun corresponds to the central connecting line of the two clamping mechanisms.
Further, the clamping mechanism is a pneumatic three-jaw chuck.
Further, the groove bar support bracket group is composed of a plurality of groove bar support brackets so as to reduce the contact surface of the groove bar and the groove bar support brackets, the plurality of groove bar support brackets are uniformly arranged on the workbench along the X-axis direction, the center of the two clamping mechanisms is 0.5-1mm higher than the center of the workpiece, and when the clamping mechanisms clamp the groove bar, the contact surface of the groove bar and the groove bar support brackets is provided with a gap.
Further, the support surface of the grooved bar support is a V-shaped grooved surface.
Further, the spray gun supporting structure comprises a supporting column and a supporting beam, the polishing spray gun is arranged on the supporting beam through a manual rotary disc, the polishing spray gun is guaranteed to be positioned at the polishing position of the groove rod, and the manual rotary disc is used for adjusting the polishing angle of the polishing spray gun.
Further, the spraying direction of the polishing spray gun is perpendicular to the central connecting line of the two clamping mechanisms, so that the flame of the polishing spray gun can uniformly polish the grooved bars.
Further, a Z-axis sliding mechanism is arranged on the support column, and the support beam is arranged on the Z-axis sliding mechanism and used for adjusting the height of the polishing spray gun.
Further, the rotary driving mechanism comprises a transmission shaft and a transmission assembly, wherein the transmission shaft is arranged on the workbench along the X-axis direction through a bearing seat, and the transmission shaft is connected with the rotating shafts of the two mounting clamping mechanisms through two groups of transmission assemblies respectively.
Further, the transmission assembly comprises a transmission belt and a belt pulley, the transmission shaft and the rotating shafts of the two mounting clamping mechanisms are both provided with the belt pulley, and the transmission shaft and the rotating shafts of the two mounting clamping mechanisms are connected with the belt pulley through the transmission belt.
The invention has the beneficial effects that: according to the invention, a group of clamping mechanisms for the grooved bars are designed on two sides of the grooved bar support, and a rotary driving mechanism capable of driving the clamping mechanisms to rotate is designed, so that the purpose of rotating the grooved bars is achieved, and the polishing of the axial direction and the circumferential surface of the grooved bars is completed at one time by matching with a polishing spray gun on an X-axis sliding mechanism. And the manual turntable is designed for adjusting the polishing spray angle, and the Z-axis sliding mechanism is designed in the height direction for adjusting the height of the polishing spray gun, so that the purpose of controlling the polishing precision is achieved.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
fig. 2 is a schematic structural view of another view of the present invention.
As shown in the figure: 1. a work table; 2. an X-axis sliding mechanism; 3. a Z-axis sliding mechanism; 4. a clamping mechanism; 5. polishing a spray gun; 6. a transmission shaft; 7. a drive belt; 8. a belt pulley; 9. a support column; 10. a support beam; 11. a grooved bar support bracket; 12. a support table; 13. a bearing seat; 14. a manual turntable; 15. a grooved bar.
Detailed Description
Example 1
1-2 are schematic views of the present example, and a polishing apparatus for a quartz boat grooved bar as shown in the figures comprises a workbench 1, an X-axis sliding mechanism 2, a Z-axis sliding mechanism 3, two clamping mechanisms 4, a rotary driving mechanism, a polishing spray gun 5, a spray gun supporting structure and a grooved bar supporting bracket group,
the X-axis sliding mechanism 2 and the Z-axis sliding mechanism 3 both adopt electric linear guide rail devices;
the clamping mechanism 4 adopts a pneumatic three-jaw chuck;
the rotary driving mechanism realizes rotary driving of the clamping mechanism 4 by a transmission shaft 6 and a transmission assembly, and the transmission assembly adopts a combined transmission mode of a transmission belt 7 and a belt pulley 8;
the polishing spray gun 5 adopts an oxyhydrogen flame spray gun;
the spray gun supporting structure consists of a supporting column 9 and a supporting beam 10;
the groove bar supporting bracket group is composed of a plurality of groove bar supporting brackets 11 with V-shaped bracket surfaces;
two corresponding supporting tables 12 and a grooved bar supporting support group are arranged on the workbench 1 along the X-axis direction, the grooved bar supporting support group is positioned between the two supporting tables 12, and a plurality of grooved bar supporting supports 11 of the grooved bar supporting support group are uniformly arranged on the workbench 1 along the X-axis direction. The two clamping mechanisms 4 are respectively arranged on the two supporting tables 12 through rotating shafts, the two clamping mechanisms 4 correspond to each other, and the center of each clamping mechanism 4 is 0.5-1mm higher than the center of the grooved bar 15. The rotary driving mechanism is installed on the workbench 1, wherein the transmission shaft 6 is installed on the workbench 1 along the X-axis direction through the bearing seat 13, the belt pulleys 8 are installed on the transmission shaft 6 and the rotating shafts of the two mounting clamping mechanisms 4, the transmission shaft 6 and the rotating shafts of the two mounting clamping mechanisms 4 are connected through the transmission belt 7 and the belt pulleys 8, any rotating shaft is connected with the driving motor, the driving motor and the rotating shaft are all arranged inside the supporting table 12, and therefore no marks are given on the driving motor, the rotating shaft and the belt pulleys installed on the rotating shaft in the view 1-2.
The X-axis sliding mechanism 2 is arranged on the workbench 1, a support column 9 of a supporting structure is arranged on the X-axis sliding mechanism 2, a Z-axis sliding mechanism 3 is arranged on the support column 9, a support beam 10 is arranged on the Z-axis sliding mechanism 3, a polishing spray gun 5 is arranged on the support beam 10 through a manual rotary table 14, and the spraying direction of the polishing spray gun 5 is perpendicular to the central connecting line of the two clamping mechanisms 4, namely the position of a grooved bar 15.
Example 2
According to the polishing equipment based on the quartz boat grooved bars of the embodiment 1, a servo motor is adopted as a driving motor, an electric linear sliding table is adopted as an X-axis sliding mechanism 2 and a Z-axis sliding mechanism 3, a pneumatic three-jaw chuck is adopted as a clamping mechanism 4, an oxyhydrogen flame spray gun is adopted as a polishing spray gun 5, a Burner module is integrated on the oxyhydrogen flame spray gun, and the servo motor, the pneumatic three-jaw chuck, the electric linear sliding table and the Burner module are all connected to a control center, so that numerical control is realized, and polishing parameters are input in advance before polishing.
Working principle: the groove bar 15 is placed on the groove bar support 11, the clamping mechanism 4 receives a control system instruction to clamp two ends of the groove bar 15, the groove bar 15 is spaced from the support surface of the groove bar support 11 due to the fact that the clamping mechanism 4 has a height difference of 0.5-1mm from the groove bar 15, the X-axis sliding mechanism 2 controls an oxyhydrogen flame spray gun to polish the groove bar 15 axially, the Z-axis sliding mechanism 3 controls the polishing height of the oxyhydrogen flame spray gun, the Burner module controls polishing flame parameters of the oxyhydrogen flame spray gun, the servo motor controls the clamping mechanism 4 to drive the groove bar 15 to rotate, polishing circumferential surfaces are formed by polishing points, and axial polishing of the surface 15 of the groove bar is completed through axial movement of the oxyhydrogen flame spray gun X. The device polishes the surface of the grooved bars 15 at one time, has no polishing blind area and does not need to turn over the grooved bars.
The present invention is not limited to the present embodiment, and any equivalent concept or modification within the technical scope of the present invention is listed as the protection scope of the present invention.
Claims (9)
1. The polishing equipment for the quartz boat groove bars comprises a workbench (1), an X-axis sliding mechanism (2), two clamping mechanisms (4), a rotary driving mechanism, a polishing spray gun (5) and a groove bar supporting and supporting group, and is characterized in that two corresponding supporting tables (12) and the groove bar supporting and supporting group are arranged on the workbench (1) along the X-axis direction, the groove bar supporting and supporting group is positioned between the two supporting tables (12), the two clamping mechanisms (4) are respectively arranged on the two supporting tables (12) through rotating shafts, and the two clamping mechanisms (4) are corresponding; the rotary driving mechanism is arranged on the workbench (1), and is respectively connected with the rotating shafts of the two mounting clamping mechanisms (4), and any rotating shaft is connected with the driving motor; the X-axis sliding mechanism (2) is arranged on the workbench (1), the spray gun moving mechanism is provided with a spray gun supporting structure, the polishing spray gun (5) is arranged on the spray gun supporting structure through a manual rotary table (14), and the polishing spray gun (5) corresponds to the central connecting line of the two clamping mechanisms (4).
2. The polishing apparatus for quartz boat grooved bars according to claim 1, characterized in that the clamping mechanism (4) is a pneumatic three-jaw chuck.
3. The quartz boat grooved bar polishing apparatus according to claim 1, wherein the grooved bar support holder group is composed of a plurality of grooved bar support holders (11) for holding grooved bars (15), the plurality of grooved bar support holders (11) are uniformly mounted on the table (1) along the X-axis direction, and the centers of the two clamping mechanisms (4) are 0.5-1mm higher than the center of the grooved bars (15).
4. A polishing apparatus for a quartz boat grooved bar according to claim 3, characterized in that the supporting surface of the grooved bar supporting bracket (11) is a V-shaped grooved surface.
5. The polishing equipment for quartz boat grooved bars according to claim 1, characterized in that the spray gun supporting structure comprises a supporting column (9) and a supporting beam (10), and the polishing spray gun (5) is mounted on the supporting beam (10) through a manual turntable (14).
6. The polishing apparatus for quartz boat grooved bars according to claim 5, characterized in that the spraying direction of the polishing spray gun (5) is perpendicular to the center line of the two clamping mechanisms (4).
7. The polishing equipment for the quartz boat grooved bars according to claim 5, wherein the support column (9) is provided with a Z-axis sliding mechanism (3), and the support beam (10) is arranged on the Z-axis sliding mechanism (3).
8. The polishing equipment for the quartz boat grooved bars according to claim 1, wherein the rotary driving mechanism comprises a transmission shaft (6) and transmission components, the transmission shaft (6) is arranged on the workbench (1) along the X-axis direction through a bearing seat (13), and the transmission shaft (6) is respectively connected with the rotating shafts of the two mounting clamping mechanisms (4) through two groups of transmission components.
9. The polishing equipment for the quartz boat grooved bars according to claim 8, wherein the transmission assembly comprises a transmission belt (7) and a belt pulley (8), the belt pulley (8) is arranged on the transmission shaft (6) and the rotating shafts of the two mounting clamping mechanisms (4), and the transmission shaft (6) and the rotating shafts of the two mounting clamping mechanisms (4) are connected with the belt pulley (8) through the transmission belt (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310425683.4A CN116619252A (en) | 2023-04-20 | 2023-04-20 | Polishing equipment for quartz boat groove rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310425683.4A CN116619252A (en) | 2023-04-20 | 2023-04-20 | Polishing equipment for quartz boat groove rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116619252A true CN116619252A (en) | 2023-08-22 |
Family
ID=87608954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310425683.4A Pending CN116619252A (en) | 2023-04-20 | 2023-04-20 | Polishing equipment for quartz boat groove rod |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116619252A (en) |
-
2023
- 2023-04-20 CN CN202310425683.4A patent/CN116619252A/en active Pending
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| PB01 | Publication | ||
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