CN116615971A - 压电驱动元件 - Google Patents

压电驱动元件 Download PDF

Info

Publication number
CN116615971A
CN116615971A CN202180080805.XA CN202180080805A CN116615971A CN 116615971 A CN116615971 A CN 116615971A CN 202180080805 A CN202180080805 A CN 202180080805A CN 116615971 A CN116615971 A CN 116615971A
Authority
CN
China
Prior art keywords
piezoelectric
free end
bodies
piezoelectric body
piezoelectric bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180080805.XA
Other languages
English (en)
Chinese (zh)
Inventor
小牧一树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN116615971A publication Critical patent/CN116615971A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/101—Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN202180080805.XA 2020-12-18 2021-11-22 压电驱动元件 Pending CN116615971A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-209955 2020-12-18
JP2020209955 2020-12-18
PCT/JP2021/042775 WO2022130911A1 (ja) 2020-12-18 2021-11-22 圧電駆動素子

Publications (1)

Publication Number Publication Date
CN116615971A true CN116615971A (zh) 2023-08-18

Family

ID=82059073

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180080805.XA Pending CN116615971A (zh) 2020-12-18 2021-11-22 压电驱动元件

Country Status (4)

Country Link
US (1) US20230329118A1 (https=)
JP (1) JPWO2022130911A1 (https=)
CN (1) CN116615971A (https=)
WO (1) WO2022130911A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120604400A (zh) * 2023-01-31 2025-09-05 富士胶片株式会社 电磁波控制用元件

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208880A (ja) * 1984-04-03 1985-10-21 Sumitomo Special Metals Co Ltd 圧電バイモルフ振動子
JPH04162784A (ja) * 1990-10-26 1992-06-08 Mitsui Petrochem Ind Ltd 屈曲変位型アクチュエータ
JP4834443B2 (ja) * 2006-03-31 2011-12-14 株式会社東芝 圧電駆動型ｍｅｍｓアクチュエータ
JP5800144B2 (ja) * 2011-10-03 2015-10-28 セイコーエプソン株式会社 発電装置、電子機器、移動手段および発電装置の制御方法
JP2016096257A (ja) * 2014-11-14 2016-05-26 パナソニックＩｐマネジメント株式会社 圧電アクチュエータ

Also Published As

Publication number Publication date
WO2022130911A1 (ja) 2022-06-23
US20230329118A1 (en) 2023-10-12
JPWO2022130911A1 (https=) 2022-06-23

Similar Documents

Publication Publication Date Title
CN110095859B (zh) 光扫描装置以及光扫描装置的制造方法
CN101093966B (zh) 压电驱动mems装置
US6684469B2 (en) Method for forming an actuator array device
US8049394B2 (en) Micro oscillating comb tooth element with two interesecting oscillation axes
JP5234008B2 (ja) 積層型圧電素子及び圧電ポンプ
CN101284642A (zh) 具有倾斜电极的微机械器件
US7420318B1 (en) Lateral piezoelectric microelectromechanical system (MEMS) actuation and sensing device
CN1479964A (zh) 静电设备
JP2014033478A (ja) 圧電発電装置
KR102142526B1 (ko) 압전 소자 및 그 제조방법
CN101488723B (zh) 致动器以及使用其的电子设备
US20170005257A1 (en) Drive apparatus
US10770641B2 (en) Piezoelectric element
CN116615971A (zh) 压电驱动元件
US20060050421A1 (en) Adaptive mirror system
US20150082884A1 (en) Piezoelectric actuator module, method of manufacturing the same, and mems sensor having the same
CN103036471B (zh) 致动器和光扫描装置
JP5499620B2 (ja) アクチュエータ及びアクチュエータを製造する方法
CN116058110A (zh) 压电元件
JP4231062B2 (ja) Ｍｅｍｓ素子
US20150143914A1 (en) Piezoelectric actuator module and mems sensor having the same
JPH04167580A (ja) 積層圧電アクチュエータ素子
US20170003500A1 (en) Drive apparatus
US20200081243A1 (en) Mirror driving apparatus and method for manufacturing thereof
JP2022186216A (ja) 音響デバイス

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination