CN116604057B - Composite coating cutter and preparation method and application thereof - Google Patents

Composite coating cutter and preparation method and application thereof Download PDF

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Publication number
CN116604057B
CN116604057B CN202310873638.5A CN202310873638A CN116604057B CN 116604057 B CN116604057 B CN 116604057B CN 202310873638 A CN202310873638 A CN 202310873638A CN 116604057 B CN116604057 B CN 116604057B
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coating
layer
sub
tib
composite
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CN116604057A (en
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谢标明
邱联昌
成伟
廖星文
高阳
朱骥飞
谭卓鹏
殷磊
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Ganzhou Achteck Tool Technology Co ltd
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Ganzhou Achteck Tool Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/38Borides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2228/00Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10Coatings
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

The invention belongs to the technical field of machining tools, and particularly relates to a composite coating tool, a preparation method and application thereof, wherein the tool comprises a matrix made of hard alloy, ceramic or steel and a composite coating on the matrix; the composite coating comprises a first sub-coating and a second sub-coating, and a Ti-B-N transition layer with the boron content changing from low to high in a gradient is arranged between the first sub-coating and the second sub-coating, and the Ti-B-N transition layer can well improve TiB 2 Bonding force between the layer and the rest coating layer, solving the problem of preparing TiB by CVD 2 The coating is difficult to use.

Description

Composite coating cutter and preparation method and application thereof
Technical Field
The invention belongs to the technical field of machining tools, and particularly relates to a composite coating tool, a preparation method and application thereof.
Background
Materials such as titanium alloy, superalloy, heat-resistant stainless steel and the like are widely applied to high-end equipment parts in the fields of aerospace, energy and the like, and modern cutting processing requires high efficiency and pursues high-speed cutting; environment-friendly, little or no cooling liquid is advocated, and green dry cutting is pursued. The local temperature of the contact with the cutter when the materials such as titanium alloy, superalloy, heat-resistant stainless steel and the like are cut can reach more than 1000 ℃, the materials still have high strength at high temperature, broken chip type cuttings are generated during cutting, intermittent high cutting impact force is generated on the cutter, and the hard and tough requirements are set on the cutter by the material characteristics such as high strength, work hardening, adhesion hardening and the like. Most tools have low machining accuracy and tool damage due to the affinity of the material to the tool (the interpenetration and reaction of elements between the tool and the material to be cut) when cutting nonferrous metals, stainless steel and other materials. In order to meet the processing requirements, the cutter coating is required to have low friction coefficient, high coating bonding strength, good wear resistance, low affinity, good high-temperature oxidation resistance and hardness and toughness.
The research and application of the coating cutters at home and abroad have been mainly focused on binary coating materials such as metal oxides, nitrides, carbides and the like. However, the nature of strong covalent bonding results in such coatings being either less tough or less resistant to oxidation. In recent years, in order to effectively solve the above-mentioned drawbacks, a multi-component metal coating having a composite structure has been the main stream of research.
An important indicator for evaluating the performance of a multilayer coating having a composite structure, the composite coating, is the bonding force of the coating. The coating binding force refers to the mutual adhesion capability between the coating layers and the substrate, namely the difficulty of stripping the single-layer coating from the rest of the coating layers or the substrate. The harder the coating is stripped, the better the binding force of the coating is, the more the characteristics of each coating can be exerted when the coated blade is used, and the service life is longer. The problem of coating binding force is also the primary problem of composite coating.
Beginning in the 80 s of the last century, the study of doping traditional coatings with boron elements has begun, and some accepted results of the study are obtained: the boron element has good fine crystal strengthening effect, and can refine the coating crystal grains so as to improve the hardness of the coating; the boron element reacts with metals such as titanium, nickel, aluminum and the like, so that the boron-doped coating is beneficial to the processing of nonferrous metals. TiB (TiB) 2 The coating has nano-scale grains with hardness exceeding 4600HV; the alloy has low affinity with high-temperature alloy materials such as iron base, nickel base, titanium base and the like, and is not easy to cause adhesion to damage a cutter; low friction coefficient, utensilHas self-lubricity and is very suitable for dry cutting without using lubricating liquid. However, tiB 2 The coating is hard and brittle, has low toughness and is difficult to combine with other coatings, thereby limiting TiB 2 Application of the coating.
The method of patent CN103060653a using magnetron sputtering uses TiB 2 The target and the Cu target are used for preparing the titanium diboride-copper tough hard coating, and the coating has the characteristics of high hardness and high toughness, but can cause cutter sticking to damage cutters when nonferrous metal materials are processed. TiB is simultaneously deposited by utilizing methods of magnetron sputtering and radio frequency sputtering in patent CN107740043A 2 And CaF 2 The method improves TiB 2 The toughness of the coating is such that CaF is doped 2 TiB of (C) 2 The coating is well combined with the matrix, but TiB is inevitably reduced 2 The hardness of the coating itself. And the methods all use physical vapor deposition technology, and do not have the characteristics of high hardness and high coating binding force of the chemical vapor deposition technology coating.
Thus, there is a need for a solution to the technical problems of the prior art.
Disclosure of Invention
In order to solve the problems in the prior art, the main purpose of the invention is to provide a composite coating cutter, and a preparation method and application thereof.
In order to solve the technical problems, according to one aspect of the present invention, the following technical solutions are provided:
the composite coating cutter prepared by adopting the chemical vapor deposition technology comprises a matrix and composite coatings sequentially arranged on the surface of the matrix; the composite coating sequentially comprises a first sub-coating, a Ti-B-N transition layer and a second sub-coating TiB from the substrate to the outside 2 The boron content in the Ti-B-N transition layer is increased in a gradient manner from the first sub-coating layer to the second sub-coating layer, the boron content is changed between 0 and 50 at%, and the boron content of the surface layer of the Ti-B-N transition layer is not higher than that of the TiB of the second sub-coating layer 2 The boron content of the layer, the hardness of the Ti-B-N transition layer is changed between 2500 and 5000HV; the fcc-TiN phase of the face-centered cubic structure in the Ti-B-N transition layer is oriented from the first sub-coating to the second sub-coatingGradually decreasing from more than 85vol.% to 0, closely packed hexagonal hcp-TiB 2 The phase is gradually increased from 0 content to more than 50 vol%; the second sub-coating TiB 2 The phase composition of the layer comprises closely packed hexagonal structure hcp-TiB 2 And an amorphous phase a-TiB, wherein hcp-TiB 2 The volume fraction of the alpha-TiB is not less than 85 percent, and the volume fraction of the alpha-TiB is 5-15 percent.
As a preferable scheme of the composite coating cutter prepared by adopting the chemical vapor deposition technology, the invention comprises the following steps: the first subcoat is selected from TiN, tiC, tiCN, ti 1-x Al x N、Al 2 O 3 One or more of the following.
As a preferable scheme of the composite coating cutter prepared by adopting the chemical vapor deposition technology, the invention comprises the following steps: the first sub-coating is Ti 1-x Al x N,x≥0.7,Ti 1-x Al x The phase composition of N comprises fcc-TiN with a face-centered cubic structure, fcc-AlN with a face-centered cubic structure and hcp-AlN with a close-packed hexagonal structure, the volume fraction of fcc-AlN is not less than 80%, and the nano hardness of the first sub-coating is 2600-3000 HV.
As a preferable scheme of the composite coating cutter prepared by adopting the chemical vapor deposition technology, the invention comprises the following steps: the nano hardness of the second sub-coating is 4000-5000 HV.
As a preferable scheme of the composite coating cutter prepared by adopting the chemical vapor deposition technology, the invention comprises the following steps: the total thickness of the composite coating is 5.0-20.0 mu m, preferably 10-15.0 mu m;
the thickness of the first sub-coating layer is 3.0-10.0 mu m, preferably 5.0-8.0 mu m;
the thickness of the Ti-B-N transition layer is 0.50-4.0 mu m, preferably 1.0-3.0 mu m;
the second sub-coating TiB 2 The thickness of the layer is 1.0 to 10.0 μm, preferably 2.0 to 5.0 μm.
As a preferable scheme of the composite coating cutter prepared by adopting the chemical vapor deposition technology, the invention comprises the following steps: the composite coating further comprises a bonding layer deposited between the surface of the substrate and the first sub-coating, wherein the bonding layer is one or more of TiN, tiC, tiCN, preferably TiN, and the thickness of the bonding layer is 0.1-1.0 mu m.
As a preferable scheme of the composite coating cutter prepared by adopting the chemical vapor deposition technology, the invention comprises the following steps: the material of the matrix is one of hard alloy, high-speed steel, metal ceramic, polycrystalline diamond and cubic boron nitride.
The preparation method of the composite coating cutter comprises the step of forming a bonding layer by adopting a chemical vapor deposition technology under the conditions of 750-1000 ℃ and 50-200 mbar to comprise TiCl 4 、N 2 、H 2 Is obtained by chemical reaction on the surface of the matrix as a raw material;
and/or the first sub-coating is prepared by adopting a chemical vapor deposition technology under the conditions of 700-900 ℃ and 4-30 mbar to comprise H 2 、TiCl 4 、AlCl 3 、NH 3 、N 2 Ar is used as a raw material, and the surface of the bonding layer is subjected to chemical reaction to obtain the bonding layer;
and/or the Ti-B-N transition layer is deposited by chemical vapor deposition technology at 700-900 ℃ and 4-30 mbar to comprise H 2 、TiCl 4 、BCl 3 、N 2 Ar is used as raw material, and gradually increases BCl 3 Is obtained by chemical reaction at the surface of the first sub-coating layer;
and/or the second sub-coating TiB 2 The layer is deposited by chemical vapor deposition at 700-900 ℃ and 4-30 mbar to contain H 2 、TiCl 4 、BCl 3 Ar is used as a raw material, and chemical reaction is carried out on the surface of the transition layer to obtain the high-strength high-heat-resistant alloy.
The composite coating cutter is applied to high-speed cutting or/and dry cutting of any one material of titanium alloy, nickel-based superalloy and heat-resistant stainless steel.
The beneficial effects of the invention are as follows:
1. the composite coating of the composite coating cutter is prepared by adopting a chemical vapor deposition technology, when the aluminum content of the first subcoat Ti-Al-N coating in the composite coating reaches 80%, the hcp-AlN phase still cannot appear in the coating, and the prepared Ti-Al-N coating has excellent comprehensive performance, in particular high-temperature oxidation resistance.
2. The invention has TiB 2 Coated cutting tool with high binding force and TiB prepared by adopting the method 2 Coating, adopting a gradient transition layer to enable TiB 2 The coating is effectively combined with other coatings to effectively use TiB 2 The coating provides a method. Improving the bonding force between the coating layers and solving the problem of TiB 2 The coating has the characteristics of high hardness and high brittleness, and is difficult to combine with other coatings.
3. The invention gradually increases BCl by controlling the flow ratio of the reaction gas when depositing and forming the transition layer Ti-B-N 3 The content of boron element in the transition layer can be flexibly adjusted, so that the boron content of the transition layer is changed in a gradient manner. The Ti-B-N coating with gradient change of boron content, the grain size of Ti-B-N gradually becomes smaller along with the increase of boron content, the hardness gradually increases along with the increase of boron content, and the coarse grain of Ti-Al-N, low hardness to TiB are well completed 2 Fine grain, high hardness transitions. In addition, the Ti-B-N coating gradually changes from fcc-TiN crystal phase to hcp-TiB with increasing boron content 2 Crystalline phase dominant, from coating structure to TiB, ti-Al-N coating is well completed 2 And (3) coating transition. The transition layer with gradient change of boron content can realize gradient change of grain size, crystal phase and hardness, can effectively connect two sub-coatings, and improves the binding force of the coatings. Meanwhile, when the material is processed, the high impact force of high frequency interruption can be buffered, and the service life of the coating is prolonged.
4. Preparation of Ti-B-N, tiB by the inventive method 2 The coating temperature is higher, generally higher than 700 ℃, the boron atom radius is small, and the boron atom in the Ti-B-N coating is easy to diffuse into the hard alloy matrix such as WC-Co base and the like to form W 3 CoB 3 And the brittleness phase is equal, and the toughness of the cutter is reduced. Therefore, the invention deposits other compact non-boron-containing coating (such as the first sub-coating) before depositing the boron-containing coating by adopting the CVD method, thereby obviously reducing the boron element to the baseAnd (5) bulk diffusion.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic cross-sectional view of a composite coated cutting tool according to the present invention.
Reference numerals illustrate:
10. the composite coating comprises a substrate, 20, a composite coating, 21, a bonding layer, 22, a first sub-coating, 23, a Ti-B-N transition layer, 24 and a second sub-coating.
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
The following description will be made clearly and fully with reference to the technical solutions in the embodiments, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention provides a coated cutting tool and a preparation method thereof, wherein a multi-element coating system is formed by doping a plurality of alloy elements, so that the hardness, self-lubrication and high-temperature oxidation resistance of the tool are improved, and the coating binding force is also improved.
As shown in fig. 1, a composite coating cutter prepared by adopting a chemical vapor deposition technology comprises a substrate 10 and a composite coating 20 sequentially arranged on the surface of the substrate; the composite coating 20 sequentially comprises a first sub-coating 22, a Ti-B-N transition layer 23 and a second sub-coating 24 from the substrate to the outside, wherein the second sub-coating 24 is TiB 2 A layer, the boron content in the Ti-B-N transition layer from the first sub-coating layer to the second sub-coating layerThe direction gradient is increased, the boron content is changed between 0 and 50at percent, and the boron content of the surface layer of the Ti-B-N transition layer is not higher than that of the second sub-coating TiB 2 The boron content of the layer, the hardness of the Ti-B-N transition layer is changed between 2500 and 5000HV; the fcc-TiN phase of the face-centered cubic structure in the Ti-B-N transition layer is gradually reduced from more than 85vol.% content to 0 from the first subcoat to the second subcoat, and the hcp-TiB phase of the close-packed hexagonal structure 2 The phase is gradually increased from 0 content to more than 50 vol%; the second sub-coating TiB 2 The phase composition of the layer comprises closely packed hexagonal structure hcp-TiB 2 And an amorphous phase a-TiB, wherein hcp-TiB 2 Not less than 85vol.% and a-TiB volume fraction of 5 to 15vol.%.
Preferably, the first subcoat is selected from TiN, tiC, tiCN, ti 1-x Al x N、Al 2 O 3 One or more of the following.
Preferably, the first sub-coating is Ti 1-x Al x N,x≥0.7,Ti 1-x Al x The phase composition of N comprises fcc-TiN with a face-centered cubic structure, fcc-AlN with a face-centered cubic structure and hcp-AlN with a close-packed hexagonal structure, the volume fraction of fcc-AlN is not lower than 80vol.%, and the nano hardness of the first sub-coating is 2600-3000 HV.
Preferably, the nano hardness of the second sub-coating is 4000-5000 HV.
Preferably, the total thickness of the composite coating is 5.0-20.0 μm, preferably 10-15.0 μm.
Preferably, the thickness of the first sub-coating layer is 3.0-10.0 μm, preferably 5.0-8.0 μm.
Preferably, the thickness of the Ti-B-N transition layer is 0.50-4.0 μm, preferably 1.0-3.0 μm.
Preferably, the second sub-coating TiB 2 The thickness of the layer is 1.0 to 10.0 μm, preferably 2.0 to 5.0 μm.
Preferably, the composite coating further comprises a bonding layer deposited between the surface of the substrate and the first sub-coating, wherein the bonding layer is one or more of TiN, tiC, tiCN, preferably TiN, and the thickness of the bonding layer is 0.1-1.0 μm.
Preferably, the material of the matrix is one of hard alloy, high-speed steel, metal ceramic, polycrystalline diamond and cubic boron nitride.
The preparation method of the composite coating cutter comprises the step of forming a bonding layer by adopting a chemical vapor deposition technology under the conditions of 750-1000 ℃ and 50-200 mbar to comprise TiCl 4 、N 2 、H 2 Is obtained by chemical reaction on the surface of the matrix as a raw material;
and/or the first sub-coating is prepared by adopting a chemical vapor deposition technology under the conditions of 700-900 ℃ and 4-30 mbar to comprise H 2 、TiCl 4 、AlCl 3 、NH 3 、N 2 Ar is used as a raw material, and the surface of the bonding layer is subjected to chemical reaction to obtain the bonding layer;
and/or the Ti-B-N transition layer is deposited by chemical vapor deposition technology at 700-900 ℃ and 4-30 mbar to comprise H 2 、TiCl 4 、BCl 3 、N 2 Ar is used as raw material, and gradually increases BCl 3 Is obtained by chemical reaction at the surface of the first sub-coating layer;
and/or the second sub-coating TiB 2 The layer is deposited by chemical vapor deposition at 700-900 ℃ and 4-30 mbar to contain H 2 、TiCl 4 、BCl 3 Ar is used as a raw material, and chemical reaction is carried out on the surface of the transition layer to obtain the high-strength high-heat-resistant alloy.
The composite coating cutter is applied to high-speed cutting or/and dry cutting of any one material of titanium alloy, nickel-based superalloy and heat-resistant stainless steel.
The technical scheme of the invention is further described below by combining specific embodiments.
Example 1
The matrix adopts WC-Co-based hard alloy, the bonding layer is TiN, and the first sub-coating is Ti 0.17 Al 0.83 The transition layer is a Ti-B-N coating, the boron content is 0-50at%, and the second sub-coating is TiB 2 . The structure of the composite coating is as follows: tiN+Ti 0.17 Al 0.83 N+Ti-B-N+TiB 2 . The composite coating cutter is manufactured by the following steps S1-S4The following coatings were prepared using Chemical Vapor Deposition (CVD):
s1: preparing a bonding layer of TiN, wherein the deposition temperature is 850 ℃, the deposition pressure is 90mbar, and the reaction material comprises TiCl 4 、N 2 、H 2 The purity of each reaction material is more than 99 percent, the deposition time is 100 minutes, and the thickness of the coating is 0.6 mu m;
s2: preparation of first subcoat Ti 0.17 Al 0.83 N, deposition temperature 800 ℃, deposition pressure 10mbar, reaction material including H 2 、TiCl 4 、AlCl 3 、NH 3 、N 2 Ar, the purity of each reaction material is more than 99%, the deposition time is 150min, and the thickness of the coating is 5 mu m;
s3: preparing a transition layer Ti-B-N layer, wherein the deposition temperature is 850 ℃, the deposition pressure is 60mbar, and the reaction materials comprise H 2 、TiCl 4 、BCl 3 、NH 3 、N 2 Ar, purity of each reaction material is more than 99%, BCl 3 The flow rate is gradually increased, and BCl 3 The maximum flow is less than BCl when preparing the second sub-coating 3 The deposition time is 100min, and the thickness of the coating is 1.2 mu m;
s4: preparation of the second subcoat TiB 2 The deposition temperature is 850 ℃, the deposition pressure is 60mbar, and the reaction materials comprise H 2 、TiCl 4 、BCl 3 Ar, the purity of each reaction material is more than 99 percent, the deposition time is 200 minutes, and the thickness of the coating is 3.0 mu m.
Example 2
The matrix adopts WC-Co-based hard alloy, and the coating structure is as follows: tiN+Ti-B-N+TiB 2 . The bonding layer TiN is implemented with reference to step S1 in example 1; the Ti-B-N layer is carried out with reference to step S3 in example 1; tiB (TiB) 2 The layer is carried out with reference to step S4 in example 1.
Comparative example 1
The matrix adopts WC-Co-based hard alloy, and the coating structure is as follows: tiN+Ti 0.17 Al 0.83 N+TiB 2 . The bonding layer TiN is implemented with reference to step S1 in example 1; ti (Ti) 0.17 Al 0.83 N layers are carried out with reference to step S2 in example 1; tiB (TiB) 2 The layer is carried out with reference to step S4 in example 1.
Comparative example 2
The matrix adopts WC-Co-based hard alloy, and the coating structure is as follows: tiN+TiB 2 . The bonding layer TiN is implemented with reference to step S1 in example 1; tiB (TiB) 2 The layer is carried out with reference to step S4 in example 1.
The coatings prepared in examples 1-2 of the present invention and the coatings prepared in comparative examples 1-2 were subjected to detection comparison, and the detection modes and detection results are shown below.
The hardness detection method comprises the following steps: after the coating is deposited, a bearing steel ball with the diameter of 20mm is used for facing the surface of the coating for 20 seconds, and diamond grinding agent is added during grinding, so that the surface of the substrate is polished to a mirror surface. Then, the hardness (100 times of amplification) of the coating at the abrasion mark is tested by using a TTX-NHT2 nanoindenter (Austrian An Dongpa company), the pressing needle is a diamond Borschner head (Berkovich), the maximum load is 20mN, the loading rate is 40mN/min, the unloading rate is 40mN/min, the dwell time is 5 seconds, and the pressing depth is less than 1/10 of the total thickness of the coating in order to eliminate the influence of the matrix on the hardness. The hardness of 20 different points was measured in total and averaged as the hardness of the coating.
The method for detecting the bonding strength comprises the following steps: the bonding strength of the coating to the substrate was measured using a REVETEST scratch tester manufactured by Swiss CSM company. The scratch test method is to slide a hemispherical diamond pressure head with the diameter of about 200 micrometers on the surface of the coating, continuously increasing vertical load L through an automatic loading mechanism in the process, and when L reaches critical load Lc, starting to peel off the coating from a substrate, wherein the interface critical load Lc between the coating and the substrate is the minimum load required by the pressure head to completely scratch the coating and continuously peel off the coating from the substrate; meanwhile, the friction force F between the pressure head and the coating and the substrate correspondingly changes. At this time, the coating generates acoustic emission, the acoustic emission signal, the load variation and the tangential force variation are obtained by the sensor, the acoustic emission signal, the load variation and the tangential force variation are amplified, the amplified acoustic emission signal, the load variation and the tangential force variation are input into a computer to draw the measurement result into a graph through A/D conversion, the acoustic emission peak is correspondingly obtained at the critical load value Lc on the acoustic emission signal-load curve, and the critical load Lc is the criterion of the bonding strength of the coating and the matrix. The test parameters are as follows: and (3) carrying out linear loading, loading 200N, loading speed 99N/min, scratch speed 5mm/min and scratch length 5mm.
The test method for the oxidative weight gain is as follows: the sample was heated to 1000 ℃ in a muffle furnace under air atmosphere, incubated for 1h, and then taken out of the atmosphere and cooled to room temperature. And weighing the weight of the sample before and after oxidization by adopting a high-precision electronic balance with the precision of 0.1mg, and calculating the oxidization weight gain of the sample.
Coefficient of friction testing is tested against international standard ASTM G99-2017.
TABLE 1
As can be seen from the test results in Table 1, the Ti-B-N layer with gradient change of boron content is used as the transition layer, and the bonding strength of the composite coating exceeds 100N, which indicates that TiB in the composite coating 2 The combination between the layer and each other sub-coating is good, effectively solving the problem of preparing TiB by CVD 2 The use of the coating is problematic; the composite coating contains a Ti-Al-N layer, and the weight gain of the composite coating is little when the composite coating is oxidized for 1h at 1000 ℃, which indicates that the composite coating has good high-temperature oxidation resistance.
The cutting properties of the cutting tools prepared by inventive examples 1-2 and comparative examples 1-2 were tested in the following, and both life and wear amount were tested, respectively.
Wherein, the test conditions are as follows:
cutting tool: WC-Co cemented carbide indexable milling cutter (model: XNMU 070508-MM 4)
Processing materials: stainless steel 316L
Cutting parameters:
cutting speed: vc=220 m/min
Feeding: fz=0.25 mm/z
Cutting depth: ap=1.0 mm
Cutting width: ae = 80% cutterhead diameter
The cutting mode is as follows: dry cutting
The measurement results of the wear amount VB (unit mm) of the rear cutter surface of the blade after cutting for different times are shown in Table 2, and the wear amount of the rear cutter surface of the blade is measured by using an OLYMPUS SZ61 optical super-depth-of-field microscope with a graduated scale.
TABLE 2
From the comparison of Table 2, the Ti-B-N layer with gradient change of boron content is taken as the transition layer, the service life of the composite coating is more than 2 times that of the Ti-B-N-free transition layer, and no coating is peeled off in the cutting process, so that the cutting tool provided by the invention has obvious advantages in wear resistance and service life of the tool.
The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the content of the present invention or direct/indirect application in other related technical fields are included in the scope of the present invention.

Claims (7)

1. The composite coating cutter prepared by adopting the chemical vapor deposition technology is characterized by comprising a substrate and a composite coating sequentially arranged on the surface of the substrate; the composite coating sequentially comprises a first sub-coating, a Ti-B-N transition layer and a second sub-coating TiB from the substrate to the outside 2 The boron content in the Ti-B-N transition layer is increased in a gradient manner from the first sub-coating layer to the second sub-coating layer, the boron content is changed between 0 and 50 at%, and the boron content of the surface layer of the Ti-B-N transition layer is not higher than that of the TiB of the second sub-coating layer 2 The boron content of the layer, the hardness of the Ti-B-N transition layer is changed between 2500 and 5000HV; the fcc-TiN phase of the face-centered cubic structure in the Ti-B-N transition layer is gradually reduced from more than 85vol.% content to 0 from the first subcoat to the second subcoat, and the hcp-TiB phase of the close-packed hexagonal structure 2 The phase is gradually increased from 0 content to more than 50 vol%; the second sub-coating TiB 2 The phase composition of the layer comprises closely packed hexagonal structure hcp-TiB 2 And an amorphous phase a-TiB, wherein hcp-TiB 2 Not less than 85vol.% of a-TiB, 5-15 vol.%;
the first sub-coating is Ti 1-x Al x N, wherein x is greater than or equal to 0.7, ti 1-x Al x The phase composition of N comprises fcc-TiN with a face-centered cubic structure, fcc-AlN with a face-centered cubic structure and hcp-AlN with a close-packed hexagonal structure, the volume fraction of fcc-AlN is not lower than 80 vol%, and the nano hardness of the first sub-coating is 2600-3000 HV;
the nano hardness of the second sub-coating is 4000-5000 HV;
the total thickness of the composite coating is 5.0-20.0 mu m, the thickness of the first sub-coating is 3.0-10.0 mu m, the thickness of the Ti-B-N transition layer is 0.50-4.0 mu m, and the thickness of the second sub-coating TiB 2 The thickness of the layer is 1.0-10.0 mu m.
2. The composite coated tool of claim 1, wherein the composite coating has a total thickness of 10-15.0 μm, the first subcoat has a thickness of 5.0-8.0 μm, the Ti-B-N transition layer has a thickness of 1.0-3.0 μm, and the second subcoat TiB 2 The thickness of the layer is 2.0-5.0 μm.
3. The composite coated cutting tool of claim 2, wherein the composite coating further comprises a bond layer deposited between the substrate surface and the first subcoat, the bond layer being one or more of TiN, tiC, tiCN and having a bond layer thickness of 0.1-1.0 μm.
4. The composite coated cutting tool of claim 1, wherein the substrate is one of cemented carbide, high speed steel, cermet, polycrystalline diamond, cubic boron nitride.
5. A method for producing a composite coated tool according to any one of claims 1-2, 4, wherein the first sub-coating is produced by chemical vapor deposition at 700-900 ℃ and 4-30 mbar to comprise H 2 、TiCl 4 、AlCl 3 、NH 3 、N 2 Ar is used as a raw material, and the Ar is obtained by chemical reaction on the surface of the matrix; and/or the Ti-B-N transition layer is chemically treatedVapor deposition technique at 700-900 ℃ and 4-30 mbar to include H 2 、TiCl 4 、BCl 3 、N 2 Ar is used as raw material, and gradually increases BCl 3 Is obtained by chemical reaction at the surface of the first sub-coating layer; and/or the second sub-coating TiB 2 The layer is deposited by chemical vapor deposition at 700-900 ℃ and 4-30 mbar to contain H 2 、TiCl 4 、BCl 3 Ar is used as a raw material, and chemical reaction is carried out on the surface of the transition layer to obtain the high-strength high-heat-resistant alloy.
6. A method of producing a composite coated tool as claimed in claim 3, wherein the bonding layer is deposited by chemical vapor deposition at 750-1000 ℃ and 50-200 mbar to include TiCl 4 、N 2 、H 2 Is obtained by chemical reaction on the surface of the matrix as a raw material; and/or the first sub-coating is prepared by adopting a chemical vapor deposition technology under the conditions of 700-900 ℃ and 4-30 mbar to comprise H 2 、TiCl 4 、AlCl 3 、NH 3 、N 2 Ar is used as a raw material, and the surface of the bonding layer is subjected to chemical reaction to obtain the bonding layer; and/or the Ti-B-N transition layer is deposited by chemical vapor deposition technology at 700-900 ℃ and 4-30 mbar to comprise H 2 、TiCl 4 、BCl 3 、N 2 Ar is used as raw material, and gradually increases BCl 3 Is obtained by chemical reaction at the surface of the first sub-coating layer; and/or the second sub-coating TiB 2 The layer is deposited by chemical vapor deposition at 700-900 ℃ and 4-30 mbar to contain H 2 、TiCl 4 、BCl 3 Ar is used as a raw material, and chemical reaction is carried out on the surface of the transition layer to obtain the high-strength high-heat-resistant alloy.
7. Use of the composite coated tool of any one of claims 1-4 for high speed cutting or/and dry cutting of any one of titanium alloys, nickel-based superalloys, heat resistant stainless steels.
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