CN116592757A - Two-dimensional precision compensation method of measurement system - Google Patents
Two-dimensional precision compensation method of measurement system Download PDFInfo
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- CN116592757A CN116592757A CN202210713323.XA CN202210713323A CN116592757A CN 116592757 A CN116592757 A CN 116592757A CN 202210713323 A CN202210713323 A CN 202210713323A CN 116592757 A CN116592757 A CN 116592757A
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- 238000005259 measurement Methods 0.000 title claims abstract description 44
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000001514 detection method Methods 0.000 claims abstract description 31
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
Abstract
A two-dimensional precision compensation method of a measurement system comprises at least one image acquisition device and a motion platform, wherein one image acquisition device of the measurement system is taken as a reference image acquisition device, a world coordinate system is determined based on the reference image acquisition device and the motion platform, a detection world coordinate set of a calibration point in a calibration plate is acquired by the reference image acquisition device, an inclination angle of the calibration plate relative to the world coordinate system is obtained according to the detection world coordinate set, the position deviation of the calibration point in the detection world coordinate set and the standard world coordinate set is corrected based on the inclination angle of the calibration plate, and a compensation value is obtained based on a comparison value of the corrected detection world coordinate set and the standard world coordinate set. The measuring error caused by the YAW value of the moving platform and the straightness of the moving platform is solved.
Description
Technical Field
The invention relates to a two-dimensional precision compensation method, in particular to a two-dimensional precision compensation method applied to a measurement system.
Background
For the field of workpiece processing with higher and higher precision, it is particularly important to accurately obtain the relative position relationship between processing equipment and a workpiece, and the precision of a detection system of the processing equipment directly influences the accuracy of position detection. For example, in a direct-writing exposure system applied to processing planar workpieces such as semiconductors and printed circuit boards, the workpiece is required to be placed on a motion platform, and exposure operation of circuit patterns on the workpiece is realized through relative motion of the workpiece and an exposure lens. In a conventional manner, an exposure lens is usually adopted for fixing, and a workpiece is driven to move relative to the exposure lens through a moving platform. And the precision measurement of the moving platform region is carried out by adopting an image acquisition device to acquire detection coordinates of the calibration points one by one and comparing and calculating compensation values with theoretical coordinates of the calibration points to obtain compensation values of different points on the moving platform along with the position movement of the image acquisition device and the position movement of the moving platform, and two-dimensional precision compensation is carried out. The two-dimensional precision compensation mode has no obvious disadvantage when the motion platform with smaller size or the motion platform deflection (YAW) value has little influence. As shown in fig. 1-2, when the size of the moving platform increases to 49×30 inches, the deflection (YAW) value of the moving platform and the straightness of the guide rail have great influence on the precision on the moving platform, and a great error is introduced in a point-by-point calculation manner, and the influence caused by the deflection (YAW) value and the straightness of the guide rail cannot be eliminated.
Disclosure of Invention
The invention aims to solve the technical problem of providing a two-dimensional precision compensation method of a measurement system for eliminating errors introduced by a deflection value of a motion platform and the straightness of a guide rail.
In order to solve the above problems, the present invention provides a two-dimensional accuracy compensation method of a measurement system, the measurement system includes at least one image acquisition device and a motion platform, one of the image acquisition devices of the measurement system is taken as a reference image acquisition device, a world coordinate system is determined based on the reference image acquisition device and the motion platform, a detected world coordinate set of a calibration point in a calibration plate is acquired by the reference image acquisition device, an inclination angle of the calibration plate relative to the world coordinate system is obtained according to the detected world coordinate set, a position deviation of the calibration point in the detected world coordinate set and the standard world coordinate set is corrected based on the inclination angle of the calibration plate, and a compensation value is obtained based on a comparison value of the corrected detected world coordinate set and the standard world coordinate set.
Further, the world coordinate system determines an origin of the world coordinate system by a certain position point of the reference image acquisition device; the Y axis of the motion platform is taken as the Y axis of the world coordinate, the X axis of the world coordinate is perpendicular to the Y axis of the world coordinate, the X-direction motion of the measurement system is taken as the X axis of the world coordinate, and the Y axis of the world coordinate is perpendicular to the X axis of the world coordinate.
Further, when the inclination angle of the calibration plate relative to the world coordinate system is obtained according to the detected world coordinate set, firstly, a reference point and a motion axis of a motion platform of the world coordinate are determined, when a Y axis of the motion platform is taken as a Y axis of the world coordinate, the inclination angle theta of the calibration plate is calculated according to an included angle between a column where the reference point is located and the Y axis, and when the X-direction motion of the measurement system is taken as an X axis of the world coordinate, the inclination angle theta of the calibration plate is calculated according to an included angle between the line where the reference point is located and the X axis.
Further, when the Y axis of the motion platform is taken as the Y axis of world coordinates, fitting a linear equation y=kx+a according to the coordinates of all the calibration points in the column of the reference points, and calculating the included angle theta between the column of the reference points and the Y axis according to the slope k, wherein the included angle theta is the inclination angle of the calibration plate; when the X-direction motion of the measuring system is taken as the X-axis of the world coordinate, a linear equation y=kx+a is fitted according to the coordinates of all the standard points of the line where the standard points are located, the angle theta between the line where the standard points are located and the X-axis is obtained according to the slope k,
further, when the Y axis of the motion platform is taken as the Y axis of world coordinates, two calibration points of the column where the reference points are located are selected, and the included angle theta between the column where the reference points are located and the Y axis is calculated based on the coordinate values of the selected calibration points, so that the inclination angle theta of the calibration plate is obtained; when the X-direction motion of the operation and measurement system is taken as the X-axis of the world coordinate, two calibration points of the row where the reference point is located are selected, and the included angle theta between the row where the reference point is located and the X-axis is calculated based on the coordinate value of the selected calibration point, so that the inclination angle theta of the calibration plate is obtained.
Further, the two selected calibration points are the two calibration points with the farthest column or row distance of the reference point.
Further, the X-axis of world coordinates established by the X-direction motion of the measurement system is the X-axis of world coordinates established by the X-direction motion of the image acquisition device or the X-axis of world coordinates established by the X-direction motion of the motion platform.
Further, the rest detected world coordinates except the datum point in the obtained detected world coordinate set are rotated according to the inclination angles of the datum point and the calibration plate, and the rotation detected world coordinates are obtained.
Further, the detected world coordinates of the reference point are (x 0 ，y 0 ) The detected world coordinates of any one of the reference points except the reference point are (x 1 ，y 1 ) The radius of the calibration point from the rotation center reference point a is r=sqrt ((x) 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ) The angle α=atan ((y) of the radius of rotation to the world coordinate X-axis 1 -y 0 )/(x 1 -x 0 ) Rotation of the calibration point after the angle θ is rotated detects world coordinates (x) 1 ’，y 1 ') x 1 ’=R*cos(α-θ), y 1 ’=R*sin(α-θ)。
Further, the world coordinate value of any position is obtained according to the compensation value of the measurement system, the world coordinate value is obtained through the current position information of the motion platform, the position relation between the camera and the origin of the world coordinate and the two-dimensional compensation value of the measurement system, and a specific formula is that the world coordinate value = the current position coordinate of the motion platform + the position relation between the image acquisition device and the origin of the world coordinate + the two-dimensional compensation value of the measurement system.
Further, the detected world coordinates of the datum point are standard world coordinates of the datum point, and according to the standard world coordinates of the datum point, the standard world coordinates of the rest of the calibration points on the calibration plate are calculated according to the calibration plate which is accurately placed on the motion platform.
Further, when the reference image acquisition device acquires the world coordinates of the calibration points, the reference image acquisition device performs X-direction movement, and the motion platform performs Y-direction movement, so that the reference image acquisition device can acquire the world coordinates of the calibration points of different rows and columns.
Compared with the prior art, the method corrects the position deviation of the detection world coordinate set and the standard world coordinate set of the calibration point based on the inclination angle of the calibration plate, and obtains the compensation value based on the corrected comparison value of the detection world coordinate set and the standard world coordinate set. The measuring error caused by the YAW value of the moving platform and the straightness of the moving platform is solved.
Drawings
FIG. 1 is an illustration of the effect of motion platform Y-axis straightness on motion platform measurements.
FIG. 2 is the effect of motion platform Y-axis YAW (YAW) on measurements.
Fig. 3 is a schematic diagram of a world coordinate system.
Fig. 4 is a rotation diagram when processing data.
Fig. 5 is a schematic diagram of errors caused by Y-axis YAW and straightness. (the thick dotted line is the measurement result, and the thin solid line is the world coordinate standard data).
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the present invention is described below by means of specific embodiments shown in the accompanying drawings.
The invention provides a two-dimensional precision compensation method applied to a measuring system, which comprises at least one image acquisition device and a motion platform, wherein the image acquisition device is used for acquiring position information of a measured object placed on the motion platform, and the motion platform is responsible for transporting the object to be measured to the position below the image acquisition device and recording the moving distance of the object by utilizing the motion platform. The measuring system obtains a detection world coordinate set of the calibration point by using the calibration plate, and obtains a compensation value of the measuring system according to the corresponding relation between the detection world coordinate set and the standard world coordinate set based on the standard world coordinate set obtained by the position relation of the calibration point in the calibration plate. Preferably, the calibration plate is provided with calibration points arranged in a matrix, and the same interval is reserved between two adjacent calibration points, so that measurement and calculation are facilitated. The calibration plate is placed on the motion platform, and the motion platform drives the calibration plate to move, so that the calibration point is located in the field of view range of the image acquisition device. And the standard world coordinate set takes the detected world coordinate acquired by a certain calibration point as the standard world coordinate, and calculates the standard world coordinate of the rest calibration points of the calibration plate based on the standard world coordinate of the calibration point and the intervals between the rest calibration points of the calibration plate and the calibration point.
When the measuring system acquires the world coordinate set of the standard point, one of the image acquisition devices of the measuring system is taken as a reference image acquisition device to determine the world coordinate system. As shown in fig. 3, the origin O of the world coordinate system is determined by taking a certain position point of the reference image capturing device, and taking the middle camera centering point as an example, as the world coordinate origin, it should be understood that the above manner is only one of many embodiments, and is only one example for convenience of description. Preferably, the reference image acquisition device is close to the central axis of the equipment or a position point positioned on the central axis of the equipment is taken as an origin of a world coordinate system, and the calibration plate is correspondingly placed at the position of the central axis of the equipment; the Y-axis of the motion platform is taken as the Y-axis of world coordinates, and the Y-axis of the motion platform is the motion axis of the motion platform in the scanning direction; the X-axis of the world coordinates is perpendicular to the Y-axis of the world coordinates.
Preferably, when the reference image acquisition device acquires the position information of the calibration point, the reference image acquisition device performs X-direction movement, and the motion platform performs Y-direction movement, so that the reference image acquisition device can acquire the detection world coordinates of the calibration point of different rows and columns. Obtaining the X-direction value of the world coordinate detected by the calibration point according to the moving distance of the reference image acquisition device relative to the world coordinate origin, determining the sign of the X-direction value of the world coordinate detected by the calibration point according to the left and right positions of the reference image acquisition device relative to the world coordinate origin, such as negative sign when the reference image acquisition device is positioned on the left side of the world coordinate origin and positive sign when the reference image acquisition device is positioned on the right side of the world coordinate origin, and obtaining the X coordinate of the world coordinate detected by the calibration point according to the X-direction value and the sign. When the reference image acquisition device acquires the position information of the calibration point, the moving distance of the moving platform relative to the Y direction of the origin of the world coordinates is used for acquiring the Y-direction numerical value of the world coordinates detected by the calibration point, and the sign of the Y-direction numerical value of the world coordinates detected by the calibration point is determined according to the moving direction of the moving platform in the Y direction, if the moving platform moves forwards to enable the corresponding calibration point to move to the field of view of the reference image acquisition device to be a negative sign, the moving platform moves backwards to enable the corresponding calibration point to move to the market of the reference image acquisition device to be a positive sign, and the Y-direction numerical value and the sign are used for acquiring the Y coordinates of the world coordinates detected by the calibration point. The detected world coordinates are obtained based on the travel accuracy of the motion platform and the travel accuracy of the image acquisition device. The detected world coordinates of all the calibration points acquired by the reference image acquisition means constitute a detected world coordinate set.
The X-direction movement may be performed by a non-reference image acquisition device other than the reference image acquisition device to acquire an X-direction value of the detected world coordinate, and it is necessary to acquire the X-direction movement distance of the non-reference image acquisition device performing the X-direction movement with respect to the origin of coordinates based on the relative positional relationship between the non-reference image acquisition device performing the X-direction movement and the reference image acquisition device when acquiring the X-direction value.
The calibration plate can be driven to move through the motion platform, so that the reference image acquisition device can acquire the position information of calibration points in different rows and columns, and the image acquisition device and the motion platform are usually matched with each other, so that the acquisition of numerical values is more complicated compared with the process of directly utilizing the image acquisition device to perform X-direction movement.
As shown in fig. 4-5, since the calibration plate is placed on the motion platform, it is difficult to fully correspond to the X-axis and the Y-axis of the world coordinates, and the calibration plate is inclined with respect to the X-axis or the Y-axis of the world coordinates, so that the row of calibration points on the calibration plate has an inclination angle with respect to the X-axis of the world coordinates, and the column of calibration points has an inclination angle with respect to the Y-axis of the world coordinates, it is inconvenient to obtain a standard world coordinate set of the calibration plate, and it is inconvenient to detect the world coordinate set and compare with the standard world coordinate set. In order to solve the above problem, the acquired data of the detected world coordinate set is rotated such that the line of the rotated detected world coordinate data set is parallel to the X-axis and the Y-axis of the world coordinates.
Specifically, firstly, a datum point is determined, one datum point is selected from the datum points of the acquired position information to be used as a datum point A, and the detected world coordinates of the selected datum point are also standard world coordinates of the datum point. And according to the standard world coordinates of the datum points, accurately placing the datum points on the motion platform according to the calibration plate, and calculating the standard world coordinates of the rest calibration points on the calibration plate. The accurate placement of the calibration plate on the motion platform means that the connecting lines of each row of calibration points on the calibration plate are parallel to the X axis, and the connecting lines of each column of calibration points are parallel to the Y axis. At this time, the standard world coordinates of the remaining calibration points can be calculated based on the distances of the remaining calibration points in the X direction and the Y direction from the reference point. Preferably, a standard point of the middle area of the motion platform is selected as a standard point, and the standard point of the area is relatively stable in position and is not easily influenced by deflection of the motion platform and straightness of the guide rail.
And obtaining the inclination angle of the calibration plate. And calculating the inclination angle of the calibration plate according to the included angle between the column where the datum point is located and the Y axis. The included angle can be calculated by fitting a slope of a linear equation, namely, according to coordinates of all calibration points in a column where the reference points are located, fitting a linear equation y=kx+a, and calculating the included angle theta between the column where the reference points are located and the Y-axis according to the slope k, namely, calculating the rotation angle theta of the calibration plate. Besides adopting a form of fitting a linear equation, two calibration points of a column where the reference points are located can be selected, and the rotation angle theta of the calibration plate can be calculated by calculating the clamping angle theta between the column where the two selected calibration points are located and the Y-axis based on the coordinates of the two selected calibration points. Preferably, the two selected calibration points are the two calibration points with the farthest column distance of the reference points.
Rotation detection world coordinates are obtained. And rotating the rest detected world coordinates except the datum point in the detected world coordinate set according to the inclination angles of the datum point and the calibration plate to obtain the rotation detected world coordinates. If the detected world coordinates (i.e., standard world coordinates) of the reference point A are (x) 0 ，y 0 ) The detected world coordinates of any one of the reference points B except the reference point are (x 1 ，y 1 ) The world coordinate of the rotation detection of the calibration point B is (x) 1 ’，y 1 '), the radius of the marked point B from the rotation center datum point A is R, and the included angle is alpha. According to the mark point BThe world coordinates and standard world coordinates of the reference point a are detected to obtain a radius r=sqrt ((x) 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ) Included angle α=atan ((y) 1 -y 0 )/(x 1 -x 0 ) The world coordinate B' (x) is detected by rotating the calibration point B by the angle θ 1 ’，y 1 ') x 1 ’=R*cos(α-θ), y 1 ' r=sin (α - θ). Based on the calculation mode, the rotation detection world coordinates of any one of the standard points outside the standard point can be obtained, and then the rotation detection world coordinate set is obtained.
Comparing the rotation detection world coordinate set with the standard world coordinate set, namely comparing the rotation detection world coordinate corresponding to the same standard point with the standard world coordinate set, calculating the difference value of the rotation detection world coordinate corresponding to the same standard point and the standard world coordinate, obtaining the difference value of the grid of the detection world coordinate and the standard world coordinate of the current measurement system, obtaining the compensation value of the measurement system, and obtaining the compensation value of any position of the measurement system through linear calculation.
As shown in fig. 4, the rotated calibration point coordinates are the coordinates obtained before the uncompensated when the calibration plate is measured, and have certain YAW value and straightness difference, and the grid is uneven. By the mode, the compensation value comprises error compensation caused by the motion platform deflection (YAW) and the motion platform straightness, and measurement errors caused by the YAW value and the motion platform straightness of the motion platform are solved.
According to the compensation value of the measurement system, the world coordinate value of any position can be obtained, wherein the world coordinate value is obtained through the current position information of the motion platform, the position relationship between the camera and the origin of the world coordinate and the two-dimensional compensation value of the measurement system, and the specific formula is that the world coordinate value = the current position coordinate of the motion platform + the position relationship between the image acquisition device and the origin of the world coordinate + the two-dimensional compensation value of the measurement system. The method comprises the steps that the current position coordinates of a moving platform are obtained by obtaining the moving distance of an X direction and a Y direction through a position detection device of the moving platform, namely the position coordinates fed back by the position detection device of the moving platform; the method comprises the steps that the position relation between an image acquisition device and a world coordinate origin is obtained by acquiring the moving distance and the moving direction relative to the world coordinate origin through a position detection device of the image acquisition device, and for a non-reference image acquisition device, the relative position relation between the non-reference image acquisition device and the reference image acquisition device is calibrated firstly, and the position relation between the non-reference image acquisition device and the world coordinate origin is converted based on the relative position relation; the two-dimensional compensation value of the measuring system is obtained through the two-dimensional precision compensation method.
In the above embodiment, the world coordinate Y axis is established by the Y axis of the motion platform, and the rotation detection world coordinate of the calibration point is obtained based on the inclination angle of the placed calibration plate relative to the world coordinate Y axis, so as to eliminate the included angle of the calibration plate relative to the world coordinate Y axis. The X axis of world coordinates can be established by X-direction movement of the measuring system, including the X axis of world coordinates established by X-direction movement of the image acquisition device and the X axis of world coordinates established by X-direction movement of the moving platform, and preferably, the X axis of world coordinates established by X-direction movement of the image acquisition device with larger X-direction travel is selected, so that larger angle errors are avoided; the Y axis of the world coordinate is perpendicular to the X axis, and then when the rotation detection world coordinate is obtained, the included angle of the calibration plate relative to the X axis of the world coordinate is eliminated based on the inclination angle of the calibration plate relative to the X axis of the world coordinate. A better world coordinate establishment method is selected based on the integration scheme of the system.
For the direct-writing exposure equipment, the positions of other devices, such as the world coordinate positions of an exposure lens, can be calibrated rapidly based on world coordinates, the relative position relation of each device can be obtained based on absolute world coordinates, and the relative position relation of the related devices of the direct-writing exposure equipment is synthesized to obtain an exposure compensation value.
When the world coordinate position of the exposure lens is obtained, the exposure lens exposes the marking point to a calibration ruler arranged on the motion platform, and the world coordinate position of the exposure lens can be obtained by detecting the world coordinate position of the marking point through the measuring system. Based on the world coordinate position of the exposure lenses, the relative position relation between the exposure lenses can be obtained.
Claims (12)
1. A two-dimensional precision compensation method of a measurement system is characterized in that: the measuring system comprises at least one image acquisition device and a motion platform, wherein one image acquisition device of the measuring system is taken as a reference image acquisition device, a world coordinate system is determined based on the reference image acquisition device and the motion platform, a detection world coordinate set of a marked point in a calibration plate is acquired by the reference image acquisition device, the inclination angle of the calibration plate relative to the world coordinate system is acquired according to the detection world coordinate set, the position deviation of the marked point in the detection world coordinate set and the standard world coordinate set is corrected based on the inclination angle of the calibration plate, and a compensation value is obtained based on the comparison value of the corrected detection world coordinate set and the standard world coordinate set.
2. The two-dimensional accuracy compensation method of a measurement system according to claim 1, wherein: the world coordinate system determines the origin of the world coordinate system by a certain position point of the reference image acquisition device; the Y axis of the motion platform is taken as the Y axis of the world coordinate, the X axis of the world coordinate is perpendicular to the Y axis of the world coordinate, or the X axis of the world coordinate is taken as the X axis of the world coordinate by the X-direction motion of the measuring system, and the Y axis of the world coordinate is perpendicular to the X axis of the world coordinate.
3. The two-dimensional accuracy compensation method of a measurement system according to claim 2, characterized in that: when the inclination angle of the calibration plate relative to the world coordinate system is obtained according to the detection world coordinate set, firstly, a datum point and a motion axis of a motion platform of the world coordinate are determined, when a Y axis of the motion platform is taken as a Y axis of the world coordinate, the inclination angle theta of the calibration plate is calculated according to an included angle between a column where the datum point is located and the Y axis, and when the X-direction motion of the measurement system is taken as an X axis of the world coordinate, the inclination angle theta of the calibration plate is calculated according to an included angle between the datum point and the X axis.
4. A two-dimensional accuracy compensation method of a measurement system according to claim 3, characterized in that: when the Y axis of the motion platform is taken as the Y axis of world coordinates, fitting a linear equation y=kx+a according to the coordinates of all calibration points in the column of the reference points, and calculating the included angle theta between the column of the reference points and the Y axis according to the slope k, wherein the included angle theta is the inclination angle of the calibration plate; when the X-direction motion of the measuring system is taken as the X axis of the world coordinate, a linear equation y=kx+a is fitted according to the coordinates of all the standard points of the line where the standard points are located, and the included angle theta between the line where the standard points are located and the X axis is obtained according to the slope k.
5. The two-dimensional accuracy compensation method of a measurement system according to claim 4, wherein: when the Y axis of the motion platform is taken as the Y axis of world coordinates, two calibration points of the column where the reference points are located are selected, and the included angle theta between the column where the reference points are located and the Y axis is calculated based on the coordinate values of the selected calibration points, so that the inclination angle theta of the calibration plate is obtained; when the X-direction motion of the measuring system is taken as the X axis of the world coordinate, two calibration points of the row where the reference point is located are selected, and the included angle theta between the row where the reference point is located and the X axis is calculated based on the coordinate value of the selected calibration point, so that the inclination angle theta of the calibration plate is obtained.
6. The two-dimensional accuracy compensation method of a measurement system according to claim 5, wherein: the two selected calibration points are the two calibration points with the farthest column or row distance of the reference point.
7. A two-dimensional accuracy compensation method of a measurement system according to any of claims 2-5, characterized in that: the X-axis of world coordinates established by X-direction movement of the measuring system is the X-axis of world coordinates established by X-direction movement of the image acquisition device or the X-axis of world coordinates established by X-direction movement of the moving platform.
8. The two-dimensional accuracy compensation method of a measurement system according to claim 4, wherein: and rotating the rest detected world coordinates except the datum point in the obtained detected world coordinate set according to the inclination angles of the datum point and the calibration plate to obtain the rotation detected world coordinates.
9. Two-dimensional accuracy compensation of a measurement system according to claim 8The compensation method is characterized in that: the detected world coordinates of the reference point are (x) 0 ，y 0 ) The detected world coordinates of any one of the reference points except the reference point are (x 1 ，y 1 ) The radius of the calibration point from the rotation center reference point a is r=sqrt ((x) 1 -x 0 ) 2 +(y 1 -y 0 ) 2 ) The angle α=atan ((y) of the radius of rotation to the world coordinate X-axis 1 -y 0 )/(x 1 -x 0 ) Rotation of the calibration point after the angle θ is rotated detects world coordinates (x) 1 ’，y 1 ') x 1 ’=R*cos(α-θ), y 1 ’=R*sin(α-θ)。
10. The two-dimensional accuracy compensation method of a measurement system according to claim 8, wherein: the method comprises the steps of obtaining world coordinate values of any position according to the compensation value of a measurement system, wherein the world coordinate values are obtained through the current position information of a motion platform, the position relation between a camera and the origin of the world coordinate and the two-dimensional compensation value of the measurement system, and a specific formula is that the world coordinate values = the current position coordinate of the motion platform + the position relation between an image acquisition device and the origin of the world coordinate + the two-dimensional compensation value of the measurement system.
11. A two-dimensional accuracy compensation method of a measurement system according to claim 3, characterized in that: the detection world coordinates of the datum points are standard world coordinates of the datum points, and according to the standard world coordinates of the datum points, the standard world coordinates of the rest calibration points on the calibration plate are calculated according to the calibration plate which is accurately placed on the motion platform.
12. The two-dimensional accuracy compensation method of a measurement system according to claim 1, wherein: when the reference image acquisition device acquires the world coordinates of the calibration points, the reference image acquisition device moves in the X direction, and the motion platform moves in the Y direction, so that the reference image acquisition device can acquire the world coordinates of the calibration points of different rows and columns.
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| CN117161550B (en) * | 2023-11-02 | 2024-01-26 | 珠海市申科谱工业科技有限公司 | 2D platform compensation method and device and laser processing equipment |
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