CN116573939A - Tungsten carbide material for high-performance wedge welding chopper and production method thereof - Google Patents
Tungsten carbide material for high-performance wedge welding chopper and production method thereof Download PDFInfo
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- CN116573939A CN116573939A CN202310829938.3A CN202310829938A CN116573939A CN 116573939 A CN116573939 A CN 116573939A CN 202310829938 A CN202310829938 A CN 202310829938A CN 116573939 A CN116573939 A CN 116573939A
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- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 title claims abstract description 74
- 239000000463 material Substances 0.000 title claims abstract description 45
- 238000003466 welding Methods 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000000203 mixture Substances 0.000 claims abstract description 23
- 239000006104 solid solution Substances 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 11
- WHJFNYXPKGDKBB-UHFFFAOYSA-N hafnium;methane Chemical compound C.[Hf] WHJFNYXPKGDKBB-UHFFFAOYSA-N 0.000 claims abstract description 5
- UNASZPQZIFZUSI-UHFFFAOYSA-N methylidyneniobium Chemical compound [Nb]#C UNASZPQZIFZUSI-UHFFFAOYSA-N 0.000 claims abstract description 5
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims abstract description 5
- RHDUVDHGVHBHCL-UHFFFAOYSA-N niobium tantalum Chemical compound [Nb].[Ta] RHDUVDHGVHBHCL-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910052702 rhenium Inorganic materials 0.000 claims abstract description 5
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910003468 tantalcarbide Inorganic materials 0.000 claims abstract description 5
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000000843 powder Substances 0.000 claims description 62
- 238000005238 degreasing Methods 0.000 claims description 32
- 238000002156 mixing Methods 0.000 claims description 19
- 238000005245 sintering Methods 0.000 claims description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- 238000007873 sieving Methods 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 9
- 238000003756 stirring Methods 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- 229910039444 MoC Inorganic materials 0.000 claims description 8
- 229910002804 graphite Inorganic materials 0.000 claims description 8
- 239000010439 graphite Substances 0.000 claims description 8
- 238000000498 ball milling Methods 0.000 claims description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 5
- 238000013461 design Methods 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims description 5
- 239000012188 paraffin wax Substances 0.000 claims description 5
- 238000004321 preservation Methods 0.000 claims description 5
- 238000005096 rolling process Methods 0.000 claims description 5
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 5
- INZDTEICWPZYJM-UHFFFAOYSA-N 1-(chloromethyl)-4-[4-(chloromethyl)phenyl]benzene Chemical compound C1=CC(CCl)=CC=C1C1=CC=C(CCl)C=C1 INZDTEICWPZYJM-UHFFFAOYSA-N 0.000 claims description 4
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 claims description 4
- UFGZSIPAQKLCGR-UHFFFAOYSA-N chromium carbide Chemical compound [Cr]#C[Cr]C#[Cr] UFGZSIPAQKLCGR-UHFFFAOYSA-N 0.000 claims description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 4
- 229910003470 tongbaite Inorganic materials 0.000 claims description 4
- 238000001291 vacuum drying Methods 0.000 claims description 3
- 239000002202 Polyethylene glycol Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000007723 die pressing method Methods 0.000 claims description 2
- 239000011812 mixed powder Substances 0.000 claims description 2
- 229920001223 polyethylene glycol Polymers 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 abstract description 6
- 238000005516 engineering process Methods 0.000 abstract description 6
- 238000003754 machining Methods 0.000 abstract description 6
- 229910052759 nickel Inorganic materials 0.000 abstract description 6
- 238000005299 abrasion Methods 0.000 abstract description 4
- 238000003825 pressing Methods 0.000 abstract description 4
- 238000007731 hot pressing Methods 0.000 abstract description 3
- 239000011651 chromium Substances 0.000 description 5
- 238000005452 bending Methods 0.000 description 4
- 235000014820 Galium aparine Nutrition 0.000 description 3
- 240000005702 Galium aparine Species 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 239000011363 dried mixture Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000012795 verification Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/5607—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on refractory metal carbides
- C04B35/5626—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on refractory metal carbides based on tungsten carbides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
- B22F1/108—Mixtures obtained by warm mixing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/02—Compacting only
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/1017—Multiple heating or additional steps
- B22F3/1021—Removal of binder or filler
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- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B3/00—Producing shaped articles from the material by using presses; Presses specially adapted therefor
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
- C22C1/051—Making hard metals based on borides, carbides, nitrides, oxides or silicides; Preparation of the powder mixture used as the starting material therefor
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- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/02—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
- C22C29/06—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
- C22C29/08—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds based on tungsten carbide
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Abstract
The tungsten carbide material for the high-performance wedge welding chopper comprises the following components in percentage by weightThe composition comprises the following components: 66-84.5% WC, 10-20% TiC, 2-10% Co, 2-10% Ni and Cr 2 C 3 0.2-0.4%, VC 0.2-0.4%, moC 0.5-5%, K0.5-10%, wherein K is at least one of tantalum carbide, hafnium carbide, niobium carbide, rhenium carbide, tantalum niobium carbide solid solution, tungsten titanium carbide solid solution; the production method of the tungsten carbide material adopts the near-net mould pressing technology of the vertical lead hole, improves the ultrasonic bonding efficiency and bonding abrasion performance of the tungsten carbide wedge bonding chopper, is further suitable for the hot-pressing ultrasonic working condition of wedge bonding, greatly prolongs the service life of the wedge bonding chopper, develops the near-net mould pressing technology of the vertical lead hole for the tungsten carbide material, realizes the blank production of the 0.1-1.0mm inner hole type tungsten carbide wedge bonding chopper, reduces part of precision machining procedures, shortens the production flow, and greatly reduces the production cost of the wedge bonding chopper.
Description
Technical Field
The invention belongs to the field of integrated circuit tool materials, and particularly relates to a tungsten carbide material for a high-performance wedge welding chopper and a production method thereof.
Background
With the continuous development of microelectronic technology, the complexity of integrated circuits is continuously increased, and the electronic complete machine is developed towards the directions of integrated light weight, multifunction, high reliability, low cost and the like, in particular to the requirements of on-board, carrier-based, missile-borne, satellite-borne electronic equipment, super-huge computer systems and civil handheld and portable electronic products on volume, weight and performance ratio are more and more strict. The wire bonding is a key packaging process of chip-level interconnection, meets the requirement of system integration, and becomes one of main ways of system integration.
Wedge bonding is an important component in wire bonding, and mainly comprises 45-degree horizontal bonding, 90-degree deep cavity bonding and the like in terms of wire feeding. With the continuous development of integrated circuits, the size of bonding pads and the spacing between bonding pads are continuously reduced, the bonding density is increasingly greater, the size specifications of bonding wires and strips are increasingly smaller, the bonding space of a wedge bonding chopper is increasingly narrower, and the requirements on the size and the surface roughness of a lead hole of the wedge bonding chopper are higher, that is, the wedge bonding provides increasingly higher requirements on the wedge bonding chopper, particularly for wedge bonding with narrow spacing, high density and deep cavity and multiple cavities, the 90-degree lead hole wedge bonding chopper with a vertical wire feeding structure exerts unique advantages. However, the tungsten carbide wedge bonding chopper is generally suitable for bonding aluminum wires and aluminum silicon wires, and the service life of gold wire bonding is insufficient; meanwhile, the 90-degree lead hole of the wedge bonding chopper with the vertical wire feeding structure is usually realized by adopting machining ways such as electric machining, wire cutting and the like, and the machining cost is higher.
Disclosure of Invention
Aiming at the problems of insufficient material applicability, insufficient bonding service life, high processing cost and the like of the tungsten carbide wedge welding chopper, the invention improves the formability of the material, increases the applicability of the tungsten carbide chopper and further reduces the production cost of the tungsten carbide wedge welding chopper through the composition design of the tungsten carbide material and the near-net molding technology development of the vertical lead hole. Therefore, the invention provides a tungsten carbide material for a high-performance wedge welding chopper and a production method thereof.
The invention provides a tungsten carbide material for a high-performance wedge welding chopper, which is characterized by comprising the following components in percentage by weight: 66-84.5% WC, 10-20% TiC, 2-10% Co, 2-10% Ni and Cr 2 C 3 0.2-0.4%, VC 0.2-0.4%, moC 0.5-5% and K0.5-10%, wherein K is at least one of tantalum carbide, hafnium carbide, niobium carbide, rhenium carbide, tantalum niobium carbide solid solution and tungsten titanium carbide solid solution.
Preferably, the tungsten carbide material of the invention comprises the following components in percentage by weight: 65-70% of WC, 10-15% of TiC, 2-6% of Co, 2-6% of Ni and Cr 2 C 3 0.2-0.4%, VC 0.2-0.4%, moC 0.5-1.5%, K0.5-2%, wherein K is selected from at least two of HfC, nbC, taC, reC.
Preferably, the hardness of the tungsten carbide material is 84.5-97.5HRA, and the bending strength is more than 1320MPa; the bonding times of the manual wedge welding chopper prepared from the tungsten carbide material are more than 12 ten thousand times, and the bonding times of the automatic wedge welding chopper are more than 20 ten thousand times.
In a second aspect, the present invention provides a method for producing a tungsten carbide material for a high performance wedge bonding cleaver according to the first aspect of the present invention, comprising the steps of:
according to the design composition, tungsten carbide powder, titanium carbide powder, cobalt powder, nickel powder, chromium carbide powder, vanadium carbide powder, molybdenum carbide powder and K powder are taken; the K powder is at least one selected from tantalum carbide, hafnium carbide, niobium carbide, rhenium carbide, tantalum niobium carbide solid solution and tungsten titanium carbide solid solution;
sequentially placing the prepared powder into a rolling ball mill and an inclined wet mill for wet mixing ball milling, drying the mixture by a vacuum drying oven or a vacuum stirring dryer after ball milling, and sieving the dried mixed powder under a 200-mesh sieve for later use;
mixing the spare powder and the forming agent in a vacuum stirring dryer in a proportion, wherein the addition amount of the forming agent is 2.5-4.5% of that of the powder, the mixing time is 60-90min, the mixing temperature is 75-95 ℃, and preferably, the forming agent adopts hard alloy paraffin or polyethylene glycol; after cooling, sieving the mixed material under a 80-mesh sieve for standby;
molding the spare mixture on a hydraulic press to form a tungsten carbide wedge welding chopper pressed compact;
and degreasing and sintering the pressed compact formed by the die pressing by adopting a vacuum degreasing and sintering integrated furnace.
Preferably, in the step 5), the degreasing sintering treatment is vacuum negative pressure degreasing, and the flow of inert gas in the furnace is 0.5-1.8m 3 /h; the degreasing and heat preserving temperature is 300-400 ℃ and the degreasing time is 90-180min; the sintering temperature is 1420-1520 ℃, and the heat preservation time is 60-120min.
Preferably, in step 1), the tungsten carbide powder has an average particle size of 0.2 to 2.5 μm, the titanium carbide powder and the molybdenum carbide powder have an average particle size of 0.2 to 3.0 μm, the cobalt powder, the nickel powder, the chromium carbide powder, the vanadium carbide powder have an average particle size of 0.2 to 1.0 μm, and the K powder has an average particle size of 0.2 to 2.0 μm.
Preferably, in the step), the tungsten carbide wedge bonding chopper blank is a rod blank with a straight-through inner hole; the outer diameter dimension phi 1 of the rod blank is 2-4.5mm, the length L is 25-50mm, and the inner hole dimension phi 2 is 0.1-1.0mm.
Preferably, in step 5), the tungsten carbide wedge bond chopper compact is placed obliquely on a graphite boat coated with an alumina, zirconia or graphite/alumina release coating during the degreasing sintering process.
The invention has the advantages and positive effects that:
according to the invention, through the design of the tungsten carbide material components, the morphology and the components of the tungsten carbide solid solution are regulated and controlled, so that the ultrasonic bonding efficiency and the bonding wear performance of the tungsten carbide composite material are further improved, the method is further suitable for the hot-pressing ultrasonic working condition of wedge bonding, and the service life of the wedge bonding chopper is greatly prolonged, wherein the bonding times of the manual wedge bonding chopper are more than 12 ten thousand times, and the bonding times of the automatic wedge bonding chopper are more than 20 ten thousand times. Meanwhile, aiming at the tungsten carbide material, the near-net mould pressing technology of the vertical lead hole is developed, so that the production of 0.1-1.0mm inner hole type tungsten carbide wedge welding chopper blanks is realized, partial precision machining procedures are reduced, the production flow is shortened, and the production cost of the wedge welding chopper is greatly reduced.
Drawings
Fig. 1 is a microscopic topography of the tungsten carbide material of example 1.
Fig. 2 is a graph of the micropore morphology of the tungsten carbide material of example 1.
Fig. 3 is a microscopic topography of the bonding surface after 10 ten thousand points of the tungsten carbide wedge bond of example 1.
Detailed Description
The present invention provides a tungsten carbide material for a high performance wedge and a method of producing the same, and in order that the contents of the present invention may be more clearly understood, the present invention will be described in further detail with reference to specific examples.
The materials used in the examples below were all commercial products and devices as provided in the prior art.
Example 1
The material components comprise 70% WC powder (FSSS 0.6 μm), 15% TiC powder (FSSS 1.5 μm), 6% Co powder (FSSS 1 μm), 6% Ni powder (FSSS 1 μm) and 0.3% Cr 2 C 3 Powder (FSSS 1 μm), 0.2% VC powder (FSSS 1 μm), 1% MoC powder (FSSS 2 μm), 1.5% HfC powder (FSSS 2 μm), totaling 100%. After the ingredients are prepared, placing the mixture into a rolling ball mill to perform wet mixing ball milling, drying the mixture through a vacuum stirring dryer, sieving the dried mixture under a 200-mesh sieve, adding the sieved powder and a forming agent into the vacuum stirring dryer in proportion to perform mixing, adding hard alloy paraffin (3.0% of the powder), mixing for 75min at 80 ℃, cooling, and sieving the mixed mixture under a 80-mesh sieve; the prepared mixture is pressed and formed into a tungsten carbide wedge welding chopper compact (the external diameter size phi) on a hydraulic press 1 3.0mm, length L of 30mm, and bore size phi 2 0.5 mm); the tungsten carbide pressed compact is obliquely placed on a graphite boat coated with alumina, and degreasing sintering is carried out by adopting a vacuum degreasing sintering integrated furnace: the degreasing treatment is vacuum negative pressure degreasing, and the flow of inert gas in the furnace is 1m 3 /h; the degreasing and heat preserving temperature is 350 ℃ and the degreasing time is 120min; sintering temperature is 1440 ℃ and heat preservation time is 60min. The hardness of the prepared tungsten carbide wedge welding chopper is 92HRA, the bending strength is 2790MPa, the porosity is A02B00C00, and the grain size of the tungsten carbide is 0.3 mu m. The tungsten carbide material is prepared into a manual wedge welding chopper (model YWBTS 2025-3/4-1/16-4-CG-45), a Westbond 7476E bonding machine is adopted to carry out 25-micrometer gold wire bonding service life verification on a ceramic gold substrate, and the number of continuous complete welding points is 12.48 ten thousand points.
FIG. 1 is a diagram showing the microscopic morphology of a tungsten carbide wedge bonded cleaver material. In the figure 1, the white phase is tungsten carbide particles, the gray and black large particle phases are (Ti, mo and Hf) multi-element solid solutions mainly containing titanium carbide, nickel-cobalt bonding phases are filled between the phases, the multi-element solid solutions are distributed, the multi-element solid solutions and the bonding phases have good wetting phases, the high hardness and high wear resistance of the multi-element solid solutions are achieved, the wear resistance of the material is effectively improved, and finally the beneficial effects of the invention are achieved.
FIG. 2 is a diagram showing the micropore morphology of a tungsten carbide wedge bonded cleaver material. FIG. 2 is a sintered tungsten carbide bar having an outside dimension Φ produced by a near net shape molding technique using a vertical lead hole 1 2.3mm, length L of 24mm, and bore size phi 2 The thickness of the wedge bonding cutter is 0.4mm, and the wedge bonding cutter can be used for the manual wedge bonding cutter material for vertical wire feeding, so that the inner hole processing procedure of the wedge bonding cutter is reduced, the production flow is shortened, and the production cost of the wedge bonding cutter is greatly reduced.
FIG. 3 shows the microscopic morphology of the bonding surface after 10 ten thousand points of the tungsten carbide wedge bonding. In FIG. 3, the middle groove is a bonding surface CG groove structure, the box type groove is at the lead outlet, and the planes on two sides of the CG groove are bonding surfaces; after 10 ten thousand welding spots are bonded, a certain abrasion phenomenon appears at the middle part of the bonding surface of the wedge-shaped bonding cutter, which is consistent with a failure mechanism in the bonding process of the tungsten carbide material, so that the tungsten carbide material has excellent ultrasonic bonding efficiency and bonding abrasion performance under the bonding working condition, and the service life of the wedge-shaped bonding cutter is greatly prolonged.
Example 2
The material components comprise 66% WC powder (FSSS 2.5 μm), 20% TiC powder (FSSS 1.0 μm), 2% Co powder (FSSS 1 μm), 6% Ni powder (FSSS 1 μm) and 0.2% Cr 2 C 3 Powder (FSSS 1 μm), 0.3% VC powder (FSSS 1 μm), 0.5% MoC powder (FSSS 2 μm), 5% ReC powder (FSSS 2 μm), totaling 100%. After the ingredients are prepared, placing the mixture into a rolling ball mill to perform wet mixing ball milling, drying the mixture through a vacuum stirring dryer, sieving the dried mixture under a 200-mesh sieve, adding the sieved powder and a forming agent into the vacuum stirring dryer in proportion to perform mixing, adding hard alloy paraffin (2.5% of the powder), mixing for 60min, mixing at 95 ℃, cooling, and sieving the mixed mixture under a 80-mesh sieve; placing the prepared mixture on a hydraulic pressCompression molding tungsten carbide wedge welding chopper pressed compact (outer diameter size phi) 1 4.5mm, length L of 50mm, and bore size phi 2 1.0 mm); the tungsten carbide pressed compact is obliquely placed on a graphite boat coated with zirconia, and degreasing sintering is carried out by adopting a vacuum degreasing sintering integrated furnace: the degreasing treatment is vacuum negative pressure degreasing, and the flow of inert gas in the furnace is 1.8m 3 /h; the degreasing and heat preserving temperature is 380 ℃ and the degreasing time is 90min; the sintering temperature is 1520 ℃, and the heat preservation time is 90min. The hardness of the prepared tungsten carbide wedge welding chopper is 91.5HRA, the bending strength is 2550MPa, the porosity is A02B00C00, and the grain size of the tungsten carbide is 0.8 mu m. The tungsten carbide material is prepared into an automatic wedge welding chopper (model YWBTS 1515-1/16-4-CG-45), and a Hesse BJ855 bonding machine is adopted to carry out 25-micrometer gold wire bonding service life verification on a ceramic gold substrate, wherein the number of continuous and complete welding points is 21.62 ten thousand points.
Example 3
The material components comprise 84.5% WC powder (FSSS 0.2 μm), 10% TiC powder (FSSS 3.0 μm), 2% Co powder (FSSS 1 μm), 2% Ni powder (FSSS 1 μm) and 0.2% Cr 2 C 3 Powder (FSSS 1 μm), 0.3% VC powder (FSSS 1 μm), 0.5% MoC powder (FSSS 2 μm), 0.5% (Ta, nb) C powder (FSSS 0.5 μm), totaling 100%. After the ingredients are prepared, placing the mixture into a rolling ball mill to perform wet mixing ball milling, drying the mixture through a vacuum drying oven, sieving the dried mixture under a 200-mesh sieve, adding the sieved powder and a forming agent into a vacuum stirring dryer in proportion to perform mixing, adding hard alloy paraffin (4.5% of the powder), mixing for 90min at the mixing temperature of 75 ℃, and sieving the mixed mixture under a 80-mesh sieve after cooling; the prepared mixture is pressed and formed into a tungsten carbide wedge welding chopper compact (the external diameter size phi) on a hydraulic press 1 2.0mm, a length L of 25mm, and an inner hole size phi 2 0.1 mm); the tungsten carbide pressed compact is obliquely placed on a graphite boat coated with graphite/alumina, and degreasing and sintering are carried out by adopting a vacuum degreasing and sintering integrated furnace: the degreasing treatment is vacuum negative pressure degreasing, and the flow of inert gas in the furnace is 0.5m 3 /h; the saidThe degreasing temperature is 300 ℃ and the degreasing time is 180min; the sintering temperature is 1480 ℃ and the heat preservation time is 90min. The hardness of the prepared tungsten carbide wedge welding chopper is 97.5HRA, the bending strength is 2490MPa, the porosity is A02B00C00, and the grain size of the tungsten carbide is 0.12 mu m. The tungsten carbide material is prepared into an automatic wedge welding chopper (model YWBTS 1515-1/16-4-CG-45), and a Hesse BJ855 bonding machine is adopted to carry out 25-micrometer gold wire bonding service life verification on a ceramic gold substrate, wherein the number of continuous and complete welding points is 21.22 ten thousand points.
From the results of the above embodiments, it can be seen that the present invention adjusts and controls the morphology and the composition of the tungsten carbide solid solution through the composition design of the tungsten carbide material, thereby improving the ultrasonic bonding efficiency and the bonding abrasion performance of the tungsten carbide composite material, further adapting to the hot-pressing ultrasonic working condition of wedge bonding, greatly improving the service life of the wedge bonding chopper, and the hardness of the prepared tungsten carbide wedge bonding chopper is 91.5HRA or more, the flexural strength can reach 2490MPa or more, the porosity is A02B00C00, and the grain size of the tungsten carbide can be 0.12 μm.
Through the performance experiment of the prepared tungsten carbide material, the bonding times of the manual wedge welding chopper are more than 12 ten thousand times, and the bonding times of the automatic wedge welding chopper are more than 20 ten thousand times. Meanwhile, aiming at the tungsten carbide material, the near-net mould pressing technology of the vertical lead hole is developed, so that the production of 0.1-1.0mm inner hole type tungsten carbide wedge welding chopper blanks is realized, partial precision machining procedures are reduced, the production flow is shortened, and the production cost of the wedge welding chopper is greatly reduced.
The above examples merely illustrate specific embodiments of the invention, which are described in more detail and are not to be construed as limiting the scope of the invention, it should be noted that modifications and adaptations to those skilled in the art can be made without departing from the concept of the invention.
Claims (8)
1. The tungsten carbide material for the high-performance wedge welding chopper is characterized by comprising the following components in percentage by weight: WC 66-84.5%, tiC 10-20%, co 2-10%, ni 2-10%, cr2C3 0.2-0.4%, VC 0.2-0.4%, moC 0.5-5%, K0.5-10%, wherein K is at least one of tantalum carbide, hafnium carbide, niobium carbide, rhenium carbide, tantalum niobium carbide solid solution and tungsten titanium carbide solid solution.
2. The tungsten carbide material as claimed in claim 1, wherein the composition, in weight percent, consists of: 65-70% of WC, 10-15% of TiC, 2-6% of Co, 2-6% of Ni, 0.2-0.4% of Cr2C3, 0.2-0.4% of VC, 0.5-1.5% of MoC and 0.5-2% of K, wherein the K is selected from at least two of HfC, nbC, taC, reC.
3. The tungsten carbide material as claimed in claim 1, wherein the hardness of the tungsten carbide material is 84.5-97.5HRA, flexural strength >1320MPa; the bonding times of the manual wedge welding chopper prepared from the tungsten carbide material are more than 12 ten thousand times, and the bonding times of the automatic wedge welding chopper are more than 20 ten thousand times.
4. A method of producing a tungsten carbide material as claimed in any one of claims 1 to 3, comprising the steps of:
1) According to the design composition, tungsten carbide powder, titanium carbide powder, cobalt powder, nickel powder, chromium carbide powder, vanadium carbide powder, molybdenum carbide powder and K powder are taken; the K powder is at least one selected from tantalum carbide, hafnium carbide, niobium carbide, rhenium carbide, tantalum niobium carbide solid solution and tungsten titanium carbide solid solution;
2) Sequentially placing the prepared powder into a rolling ball mill and an inclined wet mill for wet mixing ball milling, drying the mixture by a vacuum drying oven or a vacuum stirring dryer after ball milling, and sieving the dried mixed powder under a 200-mesh sieve for later use;
3) Mixing the spare powder and the forming agent in a vacuum stirring dryer in a proportion, wherein the addition amount of the forming agent is 2.5-4.5% of that of the powder, the mixing time is 60-90min, the mixing temperature is 75-95 ℃, and preferably, the forming agent adopts hard alloy paraffin or polyethylene glycol; after cooling, sieving the mixed material under a 80-mesh sieve for standby;
4) Molding the spare mixture on a hydraulic press to form a tungsten carbide wedge welding chopper pressed compact;
5) And degreasing and sintering the pressed compact formed by the die pressing by adopting a vacuum degreasing and sintering integrated furnace.
5. The production method according to claim 4, wherein in step 1), the average particle size of the tungsten carbide powder is 0.2 to 2.5. Mu.m, the average particle sizes of the titanium carbide powder and the molybdenum carbide powder are 0.2 to 3.0. Mu.m, the average particle sizes of the cobalt powder, the nickel powder, the chromium carbide powder and the vanadium carbide powder are 0.2 to 1.0. Mu.m, and the average particle size of the K powder is 0.2 to 2.0. Mu.m.
6. The method according to claim 4, wherein in step 4), the tungsten carbide wedge bonding chopper compact is a rod compact with a straight-through inner hole; the outer diameter dimension phi 1 of the rod blank is 2-4.5mm, the length L is 25-50mm, and the inner hole dimension phi 2 is 0.1-1.0mm.
7. The production method according to claim 4, wherein in step 5), the tungsten carbide wedge bond chopper compact is obliquely placed on a graphite boat coated with an alumina, zirconia or graphite/alumina release coating during degreasing and sintering.
8. The production method according to claim 4, wherein in the step 5), the degreasing sintering treatment is vacuum negative pressure degreasing, and the flow rate of inert gas in the furnace is 0.5-1.8m3/h; the degreasing and heat preserving temperature is 300-400 ℃ and the degreasing time is 90-180min; the sintering temperature is 1420-1520 ℃, and the heat preservation time is 60-120min.
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