CN116558450A - Parallel sensing system and sensing method for mechanical arm bearing device and bearing object - Google Patents
Parallel sensing system and sensing method for mechanical arm bearing device and bearing object Download PDFInfo
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- CN116558450A CN116558450A CN202210107744.8A CN202210107744A CN116558450A CN 116558450 A CN116558450 A CN 116558450A CN 202210107744 A CN202210107744 A CN 202210107744A CN 116558450 A CN116558450 A CN 116558450A
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 238000012545 processing Methods 0.000 claims abstract description 48
- 238000004891 communication Methods 0.000 claims abstract description 5
- 230000005540 biological transmission Effects 0.000 claims description 37
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 23
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 11
- 230000008569 process Effects 0.000 description 9
- 230000002159 abnormal effect Effects 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
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- 238000000465 moulding Methods 0.000 description 1
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- 230000032258 transport Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
A parallel sensing system and a sensing method for a mechanical arm bearing device and a bearing object comprise: a bearing device with a bearing surface; the bearing surface is provided with a first position and a second position, and the first position and the second position are separated by a preset distance; the first sensing unit and the second sensing unit are arranged on the bearing device and are used for sensing the vibration of the bearing surface so as to generate a first signal and a second signal; a processing device for receiving and analyzing the first signal and the second signal; and a warning device, which is connected with the processing device in a communication way; therefore, when the processing device judges that the first signal is different from the second signal, the warning device is controlled to send out a warning signal.
Description
Technical Field
The present invention relates to a robot, and more particularly, to a robot carrying device and a system and a method for sensing parallelism of a carrier.
Background
In the field of semiconductors, since operations involving wafers require precise error-free operation, it is common in the industry to use computer-controlled robots to perform wafer handling operations during processing. Although the robot is controlled by a computer, abnormal actions such as vibration or deflection of the robot may be generated due to an emergency, and these abnormal actions may affect the accuracy of the wafer handling, and the handling of the wafer may be affected by the light weight, or even the wafer in the whole process. Therefore, in order to ensure the accuracy of the mechanical arm, operators can install a sensor capable of sensing vibration or displacement on the mechanical arm, and sense whether the mechanical arm keeps a normal position at any time. Once abnormal vibration or displacement generates deviation, the sensor generates a signal to be transmitted to the host, thereby prompting the engineer or controlling the problem of the soft mechanical arm and reducing the uncertainty factor in the wafer manufacturing process.
In the past, the technology of arranging a sensor on a mechanical arm has been developed, such as a device stability monitoring system, in which a detecting device is installed on the surface of a mechanical arm to monitor the vibration condition of the mechanical arm in real time, and then an alarm message is sent out when the vibration condition exceeds the range through an alarm module; the other sensing device and sensing system comprises a sensing device which is arranged on the machine body, the base or the surface close to the motor of the mechanical arm, and whether the machine or the machine platform is abnormal is judged by utilizing the vibration signal of the sensing device; the device comprises a plurality of sensors arranged on the surface of a linkage mechanism of the mechanical arm, and is used for comparing displacement or vibration information of the mechanical arm with a database to judge whether an abnormal signal exists or not and transmitting the abnormal signal back to a host machine to warn in advance.
The conventional mechanical arm sensing system is mainly used for detecting the vibration state of the mechanical arm. However, one problem is that the robot or wafer may not be kept horizontal for some reason (e.g., tilting or rotating during the previous process), and the conventional robot sensing system only can determine whether the robot vibrates, but cannot detect that the robot or wafer is not horizontal, which easily results in that the robot cannot be kept stable during the next process when carrying the wafer, and thus the process is affected. Therefore, how to sense whether the robot arm is parallel to the wafer or not in real time when the robot arm carries or transports the wafer is a problem in the related industry.
Disclosure of Invention
The main object of the present invention is to provide a parallel sensing system and a parallel sensing method for a mechanical arm carrying device and a carrying object, which can monitor whether the parallel state between the mechanical arm carrying device and the carrying object is abnormal in real time.
In order to achieve the above object, the present invention provides a parallel sensing system for a mechanical arm carrying device and a carrying object, comprising: a bearing device with a bearing surface; the bearing surface is provided with a first position and a second position, and the first position and the second position are separated by a preset distance; the first sensing unit is arranged at the first position of the bearing device and is used for sensing the vibration of the bearing surface so as to generate a first signal; the second sensing unit is arranged at the second position of the bearing device and is used for sensing the vibration of the bearing surface so as to generate a second signal; the processing device is connected with the first sensing unit and the second sensing unit in a communication way and is used for receiving and analyzing the first signal and the second signal; and a warning device, which is connected with the processing device in a communication way; therefore, when the processing device judges that the first signal is different from the second signal, the warning device is controlled to send out a warning signal.
In one embodiment, the processing device analyzes the first signal to generate a first signal generation time, and the processing device analyzes the second signal to generate a second signal generation time; if a time difference between the first signal generation time and the second signal generation time is greater than a predetermined time, the processing device determines that the first signal is different from the second signal.
In an embodiment, the carrying device has a first sensing accommodating space and a second sensing accommodating space inside; the first sensing accommodating space is located at the first position, the second sensing accommodating space is located at the second position, the first sensing unit is accommodated in the first sensing accommodating space of the bearing device, and the second sensing unit is accommodated in the second sensing accommodating space of the bearing device.
In an embodiment, the carrying device has a transmission line accommodating space therein, which is respectively connected to the first sensing accommodating space and the second sensing accommodating space; one end of the first transmission line is electrically connected with the first sensing unit, and the other end of the first transmission line is electrically connected with the processing device; one end of the second transmission line is electrically connected with the second sensing unit, and the other end is electrically connected with the processing device.
In an embodiment, the processing device further has a control unit, one end of which is electrically connected to the first transmission line and the second transmission line, and the other end of which is in signal connection with the processing device; the control unit is used for performing signal conversion and processing on the first signal and the second signal.
In an embodiment, the device further includes a cover disposed on top surfaces of the first sensing space and the second sensing space of the carrying device for preventing foreign objects from entering and exiting the first sensing space and the second sensing space.
In an embodiment, the device further includes a cover disposed on top of the first sensing space, the second sensing space and the transmission line space of the carrying device for preventing foreign objects from entering and exiting the first sensing space, the second sensing space and the transmission line space.
In one embodiment, the carrying device is fork-shaped and is provided with a handle part and a binary part; the binary part extends from two opposite sides of one end of the handle part; the first position is located at one end of the fork part away from the handle part, and the second position is located at the other end of the fork part away from the handle part.
In one embodiment, a method for sensing parallelism of a robot carrying device and a carrier includes the steps of: a) Driving a bearing device to bear an object, so that the object contacts a bearing surface of the bearing device; wherein the bearing surface has a first position and a second position; the first position and the second position are separated by a preset distance; b) Detecting the vibration of the first position of the bearing surface of the bearing device, so as to generate a first signal; detecting the vibration of the second position of the bearing surface of the bearing device, so as to generate a second signal; and c) analyzing the first signal and the second signal; if the first signal is different from the second signal, a warning signal is sent.
In one embodiment, in step c), the first signal is analyzed to generate a first signal generation time, and the second signal is analyzed to generate a second signal generation time; if a time difference between the first signal generation time and the second signal generation time is greater than a predetermined time, the first signal and the second signal are judged to be different.
The invention has the following effects: the time difference between the plurality of signals generated when the carrying device contacts the object judges whether the carrying device and the object are in a parallel state or not. Therefore, when the bearing device or the object is in a non-parallel state, a user can find and process the non-parallel state in real time, so that the bearing device is prevented from bearing or conveying the unstable object in an unstable state, and the stability and the reliability of the whole manufacturing process are further improved.
Drawings
FIG. 1 is an exploded view of a preferred embodiment of the present invention.
Fig. 2 is a perspective view of a preferred embodiment of the present invention.
FIG. 3 is a schematic view of a first state of a preferred embodiment of the present invention, showing the sensing condition of the contact object when the carrying device is tilted to one side.
FIG. 4 is a schematic view of a second state of a preferred embodiment of the present invention, showing the sensing condition of the contact object when the carrying device is tilted toward the other side.
Reference numerals
10: a carrying device; 11: a bearing surface; 13: a handle; 14: a fork portion; 15: sealing the accommodating space; 16: a first sensing accommodation space; 17: a second sensing accommodation space; 18: a transmission line accommodating space; 19: perforating; 20: a first sensing unit; 22: a first transmission line; 30: a second sensing unit; 32: a second transmission line; 40: a processing device; 42: a control unit; 50: a warning device; 60: a cover; 62: a lock hole; 64: a locking piece; 70: an article; t: a predetermined time; Δt: time difference.
Detailed Description
The following description of the preferred embodiments will be presented in terms of objects, effects and structural configurations of the present invention, and is provided in conjunction with the accompanying drawings.
Referring to fig. 1 and 2, a parallel sensing system for a robot carrying device and a carrier according to a first preferred embodiment of the present invention mainly includes: a carrying device 10, a first sensing unit 20, a second sensing unit 30, a processing device 40, a warning device 50 and a cover 60.
The carrying device 10 is disposed on a robot arm, and has a carrying surface 11 for carrying and transporting an object. The carrying surface 11 has a first position and a second position, which are separated by a predetermined distance, and are respectively the mounting positions of the first sensing unit 20 and the second sensing unit 30. In this embodiment, the carrying device 10 is a fork of a mechanical arm, and has a handle 13 and a fork 14 integrally formed. Wherein the width of the shank 13 gradually widens from the center toward one end, and the binary portion 14 extends from opposite sides of the wider end of the shank 13 in a direction away from the shank 13. The carrier 10 has a cover accommodating space 15, a first sensing accommodating space 16, a second sensing accommodating space 17 and a transmission line accommodating space 18. The cover accommodating space 15 is approximately Y-shaped and penetrates through the top surface of the carrying device 10. The first sensing accommodating space 16, the second sensing accommodating space 17 and the transmission line accommodating space 18 are communicated with the bottom surface of the cover accommodating space 15. The first sensing accommodating space 16 and the second sensing accommodating space 17 are approximately circular, and are respectively disposed at one end of the binary part 14. Specifically, the first position is the position of the first sensing accommodating space 16, and the second position is the position of the second sensing accommodating space 17. The transmission line accommodating space 18 is approximately Y-shaped, wherein two ends thereof are respectively connected to the first sensing accommodating space 15 and the second sensing accommodating space 16, and the other end thereof is disposed at one end of the handle 13 away from the binary portion 14 and is approximately open. The carrying device 10 is further provided with a plurality of through holes 19 penetrating the cover accommodating space 15.
The first sensing unit 20 is an extremely thin electronic device, and is disposed at the first position of the carrying device 10. Specifically, in the present embodiment, the first sensing unit 20 is accommodated in the first sensing accommodating space 16, and the thickness thereof is less than or equal to the depth of the first sensing accommodating space 16, so that when the first sensing unit 20 is accommodated in the first sensing accommodating space 16, the height of the first sensing unit 20 does not exceed the height of the carrying device 10, so that the thickness of the carrying device 10 can maintain the original thickness. In this embodiment, the first sensing unit 20 is a micro-electromechanical accelerometer (Microelectromechanical Systems, MEMS) for sensing when an object contacts the first position of the carrying surface 11 of the carrying device 10, and generating a first signal by vibration during contact. The first sensing unit 20 transmits the first signal through a wired or wireless mode. In the present embodiment, the first sensing unit 20 performs transmission in a wired manner, wherein a first transmission line 22 is accommodated in the transmission line accommodating space 18, and the thickness thereof does not exceed the depth of the transmission line accommodating space 18. One end of the first transmission line 22 is electrically connected to the first sensing unit 20, and is used for transmitting the first signal generated by the first sensing unit 20. In other embodiments, the first sensing unit 20 can also be matched with a wireless transmission device such as bluetooth or far infrared ray to transmit the first signal.
The second sensing unit 30 is also an extremely thin electronic device, and is accommodated in the second sensing accommodating space 17 for sensing when an object contacts the second position of the supporting surface 11, and generating a second signal by vibration during contact. In the present embodiment, the second sensing unit 20 is transmitted in a wired manner. One end of a second transmission line 32 is electrically connected to the second sensing unit 30 and is configured to transmit the second signal generated by the second sensing unit 30. The other structures of the second sensing unit 30 are the same as those of the first sensing unit 20, and the details thereof are omitted herein.
The processing device 40 is communicatively connected to the first sensing unit 20 and the second sensing unit 30, and is configured to receive the first signal and the second signal, and then compare the first signal and the second signal to determine whether the first signal and the second signal are identical. The processing device 40 may be a computer, a tablet, a smart phone, or other equivalent electronic device. In this embodiment, the processing device 40 further has a control unit 42, one end of which is electrically connected to the first transmission line 22 and the second transmission line 32 of the carrying device 10, and the other end of which is connected to the processing device 40 by a wired or wireless signal. The control unit 42 is configured to perform signal conversion processing on the first signal and the second signal, and then transmit the signals to the processing device 40. In this embodiment, the control unit 42 is a Micro Controller (MCU). In other embodiments, the processing device 40 can be directly connected to the first sensing unit 20 and the second sensing unit 30 to receive the first signal and the second signal for comparison and analysis.
The warning device 50 is communicatively connected to the processing device 40, and when the processing device 40 determines that the first signal is different from the second signal, the processing device 40 can control the warning device 50 to send a warning signal to remind the user that the carrying device 10 or the object is in a non-parallel state. In this embodiment, the warning device 50 is a warning pattern (as shown in fig. 3) displayed on the processing device 40; in other embodiments, the warning device may be a warning light, a warning voice or other warning device.
The cover 60 is a sheet disposed on the surface of the carrying device 10 and corresponding to the cover accommodating space 15. In this embodiment, the cover 60 is made of aluminum sheet. The shape of the cover corresponds to the shape of the cover accommodating space 15, so that the cover accommodating space 15 is detachably fixed to the cover accommodating space 15, thereby completely sealing the first sensing accommodating space 16, the second sensing accommodating space 17 and the transmission line accommodating space 18, and isolating the first sensing unit 20, the second sensing unit 30, the first transmission line 22 and the second transmission line 32 from the outside. For the fixing manner of the cover 60 and the carrier 10, in this embodiment, the cover 60 has a plurality of lock holes 62 corresponding to the through holes 19 of the carrier 10, so that the cover 60 can penetrate the lock holes 62 and the through holes 19 through a plurality of locking members 64 and be locked in the cover accommodating space 15 of the carrier 10. In other embodiments, the cover 60 may be fixed to the carrier 10 by welding, clamping, or other equivalent fixing methods; or the carrying device 10 and the cover 60 are combined in an integral molding manner.
According to the above configuration, the present embodiment provides a method for detecting whether a parallel vibration is generated between a robot carrying device and a carrier, comprising the following steps:
a) The carrier 10 is driven to carry an object 70, so that the object 70 contacts the carrying surface 11 of the carrier 10. At this time, the first position or the second position of the carrying device 10 may contact the object 70 sequentially or contact the object 70 simultaneously.
b) When the object 70 contacts the first position, the first sensing unit 20 detects a vibration and generates a first signal accordingly; when the object 70 contacts the second position, the second sensing unit 30 can detect a vibration and generate a second signal accordingly.
c) Then, the first signal and the second signal are transmitted to the control unit 42 through the first transmission line 22 and the second transmission line 32 for signal processing, and then transmitted to the processing device 40. In this embodiment, the first signal and the second signal are displayed in the form of a waveform diagram, wherein the X-axis is time, and the Y-axis is amplitude, or the variation of acceleration, when the processing device 40 displays the signals. The processing device 40 analyzes the first signal to obtain a first signal generation time, and analyzes the second signal to obtain a second signal generation time. The first signal generation time, i.e. the time point when the first signal amplitude changes significantly, represents the time point when the object 70 contacts the first position; the second signal generation time, i.e., the time point when the second signal amplitude changes significantly, represents the time point when the object 70 contacts the second position instant. The difference between the first signal generation time and the second signal generation time is called a time difference Δt. The processing device 40 analyzes whether the time difference Δt is greater than the predetermined time t, and if the time difference Δt is less than or equal to the predetermined time t, determines that the first signal is identical to the second signal, that is, the carrying device 10 is parallel to the object 70; however, if the time difference Δt is greater than the predetermined time t, it is determined that the first signal is different from the second signal, which means that the carrier 10 and the object 70 are in a non-parallel state. In the present embodiment, the predetermined time t is set to 0.1 seconds.
Then, if the first signal is different from the second signal, the processing device 40 controls the warning device 50 to send out the warning signal, so as to remind the user that the carrying device 10 and the object 70 are in a non-parallel state. In this embodiment, the warning device 50 is a warning pattern displayed in the processing device 40. Therefore, the user can immediately find the non-parallel state between the carrying device 10 and the object 70 to perform the processing in real time, and the carrying device 70 is prevented from being in the non-parallel state after the carrying device 10 and the object 70 are in the non-parallel state, so that the process is prevented from being influenced.
Fig. 3 shows the carrier 10 being tilted to one side, so that when the carrier 10 contacts the object 70, the object 70 contacts the first position of the carrying surface 11 before contacting the second position. Therefore, the first signal generating time of the first signal detected by the first sensing unit 20 is different from the second signal generating time of the second signal detected by the second sensing unit. If the time difference Δt0.2 seconds between the first signal generating time and the second signal generating time is greater than the predetermined time t0.1 seconds, the processing device 40 determines that the first signal is different from the second signal, and controls the warning device 50 to send a warning signal. Similarly, fig. 4 shows the carrier 10 being inclined toward the other side, so that when the carrier 10 contacts the object 70, the object 70 contacts the second position of the carrying surface 11 before contacting the first position. The rest of the judging process is the same as that of fig. 3, and the detailed description thereof is omitted here.
From the above examples, it can be known whether the carrier 10 is tilted left or right, and whether the carrier 10 is parallel to the object 70 can be determined by comparing the time difference Δt with the predetermined time t. On the contrary, if the carrying device 10 is in a horizontal state and the object 70 is in an inclined state, the present invention can determine that the carrying device 10 is in a non-parallel state with the object 70 by comparing the time difference Δt with the predetermined time t due to the difference between the time when the first position of the carrying device 10 contacts the object 70 and the time when the second position contacts the object 70.
It should be noted that when the position of the sensing unit is changed, the inclination in different directions can be detected. Or the number of the sensing units is increased so as to detect the inclination of a plurality of directions.
In another preferred embodiment, the predetermined time is a generalized average contact time of signal time difference data generated by the plurality of carriers contacting the object. Therefore, the preset time forms a floating value along with the data quantity and the accumulated time of the user, so that the user can monitor whether the time difference of the signals generated by the contact of the bearing device with the object is maintained within the preset time for a long time so as to judge whether the maintenance of the mechanical arm bearing device is required.
In summary, the parallel sensing system and sensing method for the mechanical arm carrying device and the carrying object provided by the invention enable the carrying device to generate the plurality of sensing signals when contacting the object through the plurality of sensing units arranged on the carrying device; and comparing the difference between the time of each signal generation with the preset time to judge whether the carrying device and the object are in parallel state. Therefore, when the carrying device and the object are in a non-parallel state, a user can find and process the non-parallel state in real time, so that the carrying device is prevented from carrying or transporting the unstable object in an unstable state, and the stability and the reliability of the whole process are further improved.
The above embodiments are merely illustrative of the technology of the present invention and its effects, and are not intended to limit the present invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and principles of the invention, and it is intended to claim as hereinafter claimed.
Claims (10)
1. A parallel sensing system of a mechanical arm bearing device and a bearing object is characterized by comprising the following components:
a bearing device with a bearing surface; the bearing surface is provided with a first position and a second position, and the first position and the second position are separated by a preset distance;
the first sensing unit is arranged at the first position of the bearing device and is used for sensing the vibration of the bearing surface so as to generate a first signal;
the second sensing unit is arranged at the second position of the bearing device and is used for sensing the vibration of the bearing surface so as to generate a second signal;
the processing device is connected with the first sensing unit and the second sensing unit in a communication way and is used for receiving and analyzing the first signal and the second signal;
and a warning device, which is connected with the processing device in a communication way;
therefore, when the processing device judges that the first signal is different from the second signal, the warning device is controlled to send out a warning signal.
2. The system of claim 1, wherein the processing device analyzes the first signal to generate a first signal generation time, and the processing device analyzes the second signal to generate a second signal generation time; if a time difference between the first signal generation time and the second signal generation time is greater than a predetermined time, the processing device determines that the first signal is different from the second signal.
3. The parallel sensing system of claim 1, wherein the carrying device has a first sensing space and a second sensing space; the first sensing accommodating space is located at the first position, the second sensing accommodating space is located at the second position, the first sensing unit is accommodated in the first sensing accommodating space of the bearing device, and the second sensing unit is accommodated in the second sensing accommodating space of the bearing device.
4. The parallel sensing system of claim 3, wherein the carrying device has a transmission line accommodating space therein, and the transmission line accommodating space is respectively connected to the first sensing accommodating space and the second sensing accommodating space; one end of the first transmission line is electrically connected with the first sensing unit, and the other end of the first transmission line is electrically connected with the processing device; one end of the second transmission line is electrically connected with the second sensing unit, and the other end is electrically connected with the processing device.
5. The parallel sensing system of claim 4, wherein the processing device further comprises a control unit, one end of the control unit is electrically connected to the first transmission line and the second transmission line, and the other end of the control unit is signal-connected to the processing device; the control unit is used for performing signal conversion and processing on the first signal and the second signal.
6. The parallel sensing system of claim 3, further comprising a cover disposed on top of the first and second sensing chambers of the carrier for preventing foreign objects from entering and exiting the first and second sensing chambers.
7. The parallel sensing system of claim 4, further comprising a cover disposed over the first sensing space, the second sensing space and the transmission line space of the carrier for preventing foreign objects from entering and exiting the first sensing space, the second sensing space and the transmission line space.
8. The parallel sensing system of claim 1, wherein the carrier is fork-shaped and has a handle and a fork; the binary part extends from two opposite sides of one end of the handle part; the first position is located at one end of the fork part away from the handle part, and the second position is located at the other end of the fork part away from the handle part.
9. The parallel sensing method for the mechanical arm bearing device and the bearing object is characterized by comprising the following steps:
a) Driving a bearing device to bear an object, so that the object contacts a bearing surface of the bearing device; wherein the bearing surface has a first position and a second position; the first position and the second position are separated by a preset distance;
b) Detecting the vibration of the first position of the bearing surface of the bearing device, so as to generate a first signal; detecting the vibration of the second position of the bearing surface of the bearing device, so as to generate a second signal; and
c) Analyzing the first signal and the second signal; if the first signal is different from the second signal, a warning signal is sent.
10. The method of claim 9, wherein in step c), the first signal is analyzed to generate a first signal generation time, and the second signal is analyzed to generate a second signal generation time; if a time difference between the first signal generation time and the second signal generation time is greater than a predetermined time, the first signal and the second signal are judged to be different.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210107744.8A CN116558450A (en) | 2022-01-28 | 2022-01-28 | Parallel sensing system and sensing method for mechanical arm bearing device and bearing object |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210107744.8A CN116558450A (en) | 2022-01-28 | 2022-01-28 | Parallel sensing system and sensing method for mechanical arm bearing device and bearing object |
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| CN116558450A true CN116558450A (en) | 2023-08-08 |
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| CN202210107744.8A Pending CN116558450A (en) | 2022-01-28 | 2022-01-28 | Parallel sensing system and sensing method for mechanical arm bearing device and bearing object |
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