CN216977829U

CN216977829U - Mechanical arm bearing device and bearing object parallel sensing system

Info

Publication number: CN216977829U
Application number: CN202220240046.0U
Authority: CN
Inventors: 吴腾彦; 刘家维
Original assignee: Changzhi Trade Co ltd; Microprogram Information Co ltd
Current assignee: Changzhi Trade Co ltd; Microprogram Information Co ltd; Shengquan Technology Co.,Ltd.
Priority date: 2022-01-28
Filing date: 2022-01-28
Publication date: 2022-07-15
Anticipated expiration: 2032-01-28

Abstract

A kind of mechanical arm bearing device and parallel sensing system of bearing object includes: a bearing device with a bearing surface; wherein the bearing surface is provided with a first position and a second position, and the first position and the second position are separated by a preset distance; the first sensing unit and the second sensing unit are arranged on the bearing device and used for sensing the vibration of the bearing surface so as to generate a first signal and a second signal; a processing device for receiving and analyzing the first signal and the second signal; and a warning device, the communication connects the processing unit; therefore, when the processing device judges that the first signal is different from the second signal, the processing device controls the warning device to send out a warning signal.

Description

Mechanical arm bearing device and bearing object parallel sensing system

Technical Field

The present invention relates to a robot, and more particularly, to a robot carrying device and a parallel sensing system for a carrying object capable of monitoring whether the parallel state between the robot and the carrying object is abnormal in real time.

Background

In the field of semiconductor, since the operation related to the wafer requires an accurate and error-free operation, it is common in the art to use a robot arm controlled by a computer to perform the operation of transporting the wafer during the manufacturing process. Although the robot is controlled by a computer, the robot may generate abnormal motions such as vibration or deflection due to an emergency, which may affect the precision of the wafer during the wafer transportation, may affect the wafer transportation, and may even affect the wafer during the whole process. Therefore, in order to ensure the accuracy of the robot arm, manufacturers may install a sensor on the robot arm to sense vibration or displacement, and sense whether the robot arm maintains a normal position at any time. Once the abnormal vibration or displacement generates deviation, the sensor will generate a signal to be transmitted to the host machine, so as to remind the engineer or control the problem of the soft mechanical arm, thereby reducing the uncertain factors in the wafer process.

In the past, technologies for arranging sensors on a mechanical arm have been developed, such as a device stability monitoring system, in which a detection device is mounted on the surface of a mechanical arm to monitor the vibration condition of the mechanical arm in real time, and then an alarm module sends out an alarm message when the vibration condition exceeds a range; the other sensing device and system comprises a sensing device arranged on the body, the base or the surface close to the motor of the mechanical arm, and a vibration signal of the sensing device is used for judging whether the machine or the machine table is abnormal or not; the device for pre-detecting the abnormality of the robot arm and the pump includes a plurality of sensors disposed on the surface of the linkage mechanism of the robot arm, and comparing the collected displacement or vibration information of the robot arm with the database to determine whether there is an abnormal signal, and sending back the abnormal signal to the host for warning in advance when the abnormal signal is sent out.

The conventional robot sensing system is mainly used for detecting the vibration state of the robot. However, one problem is that the robot or the wafer may not be kept horizontal for some reason (e.g., tilting or rotating in the previous process), and the conventional robot sensing system can only determine whether the robot is vibrating and cannot detect that the robot or the wafer is not horizontal, which may cause the robot to be unstable and affect the process in the next process. Therefore, there is a need in the art to detect whether the wafer is parallel to the robot in real time when the wafer is carried or transported by the robot.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a parallel sensing system for a robot arm supporting device and a load-bearing object, which can monitor whether the parallel state between the robot arm supporting device and the load-bearing object is abnormal or not.

To achieve the above object, the present invention provides a robot carrying device and a parallel sensing system for a carried object, comprising: a bearing device with a bearing surface; the bearing surface is provided with a first position and a second position, and the first position and the second position are separated by a preset distance; the first sensing unit is arranged at the first position of the bearing device and used for sensing the vibration of the bearing surface so as to generate a first signal; the second sensing unit is arranged at the second position of the bearing device and used for sensing the vibration of the bearing surface so as to generate a second signal; a processing device, which is connected to the first sensing unit and the second sensing unit in a communication manner and is used for receiving and analyzing the first signal and the second signal; and a warning device, the communication connects the processing unit; therefore, when the processing device judges that the first signal is different from the second signal, the processing device controls the warning device to send out a warning signal.

In one embodiment, the processing device analyzes the first signal to generate a first signal generation time, and the processing device analyzes the second signal to generate a second signal generation time; if the time difference between the first signal generation time and the second signal generation time is greater than a predetermined time, the processing device determines that the first signal is different from the second signal.

In one embodiment, the carrying device has a first sensing accommodation space and a second sensing accommodation space inside; the first sensing accommodation space is located at the first position, the second sensing accommodation space is located at the second position, the first sensing unit is accommodated in the first sensing accommodation space of the bearing device, and the second sensing unit is accommodated in the second sensing accommodation space of the bearing device.

In one embodiment, the carrying device has a transmission line accommodating space therein, which is respectively connected to the first sensing accommodating space and the second sensing accommodating space; one end of the first transmission line is electrically connected to the first sensing unit, and the other end of the first transmission line is electrically connected to the processing device; the second transmission line is arranged in the transmission line accommodating space, one end of the second transmission line is electrically connected to the second sensing unit, and the other end of the second transmission line is electrically connected to the processing device.

In one embodiment, the processing device further comprises a control unit, one end of which is electrically connected to the first transmission line and the second transmission line, and the other end of which is connected to the processing device by signals; the control unit is used for performing signal conversion and processing on the first signal and the second signal.

In an embodiment, the sensor device further includes a cover disposed on top surfaces of the first sensing accommodation space and the second sensing accommodation space of the carrying device for preventing foreign objects from entering and exiting the first sensing accommodation space and the second sensing accommodation space.

In an embodiment, the sensor device further includes a cover disposed on the top surfaces of the first sensing accommodation space, the second sensing accommodation space and the transmission line accommodation space of the carrying device for preventing foreign objects from entering and exiting the first sensing accommodation space, the second sensing accommodation space and the transmission line accommodation space.

In one embodiment, the carrying device is fork-shaped, and is provided with a handle part and a two-fork part; the two fork parts extend from two opposite sides of one end of the handle part; the first position is located at one end of the two fork parts far away from the handle part, and the second position is located at the other end of the two fork parts far away from the handle part.

The utility model has the following effects: the time difference between the signals generated when the carrying device contacts the object determines whether the carrying device and the object are parallel. Therefore, when the carrying device or the object is in a non-parallel state, a user can find and process the object in real time, the carrying device is prevented from carrying or transporting the unstable object in an unstable state, and the stability and the reliability of the whole process are further improved.

Drawings

FIG. 1 is an exploded view of a preferred embodiment of the present invention.

Fig. 2 is a perspective view of a preferred embodiment of the present invention.

Fig. 3 is a schematic view of a first state of the carrier device according to a preferred embodiment of the utility model, showing the sensing situation of the object contacted when the carrier device is tilted to one side.

Fig. 4 is a schematic diagram of a second state of the carrier device according to a preferred embodiment of the utility model, showing the sensing situation of the object contacted when the carrier device is tilted to the other side.

Reference numerals

10: a carrying device; 11: a bearing surface; 13: a handle; 14: a fork portion; 15: covering the accommodating space; 16: a first sensing accommodation space; 17: a second sensing accommodation space; 18: a transmission line accommodating space; 19: perforating; 20: a first sensing unit; 22: a first transmission line; 30: a second sensing unit; 32: a second transmission line; 40: a processing device; 42: a control unit; 50: a warning device; 60: sealing the cover; 62: a lock hole; 64: a locking member; 70: an object; t: a predetermined time; Δ t: the time difference.

Detailed Description

The preferred embodiments are described below in order to explain the present invention by referring to the figures.

Referring to fig. 1 and fig. 2, a robot carrying device and a parallel sensing system for carrying objects provided by a first preferred embodiment of the present invention mainly include: a carrying device 10, a first sensing unit 20, a second sensing unit 30, a processing device 40, a warning device 50 and a cover 60.

The carrying device 10 is disposed on a robot arm, and has a carrying surface 11 for carrying and transporting an object. The carrying surface 11 has a first position and a second position, and the first position and the second position are separated by a predetermined distance and are respectively the mounting positions of the first sensing unit 20 and the second sensing unit 30. In the present embodiment, the carrying device 10 is a fork of a robot arm, and has a handle portion 13 and two fork portions 14 integrally formed. Wherein the width of the handle portion 13 gradually becomes wider from the center toward one end, and the two fork portions 14 extend from opposite sides of the wider end of the handle portion 13 in a direction away from the handle portion 13. The carrying device 10 has a cover accommodating space 15, a first sensing accommodating space 16, a second sensing accommodating space 17 and a transmission line accommodating space 18 therein. The cap receiving space 15 is generally Y-shaped and penetrates the top surface of the carrying device 10. The first sensing accommodation space 16, the second sensing accommodation space 17 and the transmission line accommodation space 18 are communicated with the bottom surface of the cover accommodation space 15. The first sensing accommodation space 16 and the second sensing accommodation space 17 are substantially circular and are respectively disposed at one end of the two fork portions 14. Specifically, the first position is the position of the first sensing accommodation space 16, and the second position is the position of the second sensing accommodation space 17. The transmission line accommodating space 18 is generally Y-shaped, wherein two ends of the transmission line accommodating space are respectively connected to the first sensing accommodating space 15 and the second sensing accommodating space 16, and the other end of the transmission line accommodating space is disposed at one end of the handle 13 away from the two fork portions 14 and is generally open. The carrying device 10 further has a plurality of through holes 19 penetrating the cover accommodating space 15.

The first sensing unit 20 is an extremely thin electronic component, and is disposed at the first position of the carrying device 10. Specifically, in the present embodiment, the first sensing unit 20 is accommodated in the first sensing accommodating space 16, and the thickness of the first sensing unit 20 is smaller than or equal to the depth of the first sensing accommodating space 16, so that when the first sensing unit 20 is accommodated in the first sensing accommodating space 16, the height of the first sensing unit 20 does not exceed the height of the carrying device 10, and the thickness of the carrying device 10 can maintain the original thickness. In the present embodiment, the first sensing unit 20 is a Micro Electro Mechanical Systems (MEMS) for sensing when an object contacts the first position of the carrying surface 11 of the carrying device 10, and generating a first signal by vibration of the contacting. The first sensing unit 20 transmits the first signal in a wired or wireless manner. In the present embodiment, the first sensing unit 20 performs transmission in a wired manner, wherein a first transmission line 22 is accommodated in the transmission line accommodating space 18, and the thickness of the first transmission line does not exceed the depth of the transmission line accommodating space 18. One end of the first transmission line 22 is electrically connected to the first sensing unit 20 for transmitting the first signal generated by the first sensing unit 20. In other embodiments, the first sensing unit 20 can also be used with a wireless transmission device such as bluetooth or far infrared to transmit the first signal.

The second sensing unit 30 is also a very thin electronic device, and is accommodated in the second sensing accommodation space 17 for sensing when an object contacts the second position of the bearing surface 11, and generating a second signal by vibration during the contact. In the present embodiment, the second sensing unit 20 performs transmission in a wired manner. A second transmission line 32 is accommodated in the transmission line accommodating space 18, and one end of the second transmission line is electrically connected to the second sensing unit 30 for transmitting the second signal generated by the second sensing unit 30. The other structures of the second sensing unit 30 are the same as the first sensing unit 20, and the details thereof are not repeated herein.

The processing device 40 is communicatively connected to the first sensing unit 20 and the second sensing unit 30, and is configured to receive the first signal and the second signal and compare the first signal and the second signal for determining whether the first signal and the second signal are the same. The processing device 40 may be a computer, a tablet, a smart phone, or other equivalent electronic device. In the embodiment, the processing device 40 further has a control unit 42, one end of which is electrically connected to the first transmission line 22 and the second transmission line 32 of the carrying device 10, and the other end of which is signal-connected to the processing device 40 in a wired or wireless manner. The control unit 42 is used for performing signal conversion processing on the first signal and the second signal transmitted to the processing device 40. In the present embodiment, the control unit 42 is a Micro Controller (MCU). In other embodiments, the processing device 40 can be directly connected to the first sensing unit 20 and the second sensing unit 30 by signals to receive the first signal and the second signal for comparison and analysis.

The warning device 50 is communicatively connected to the processing device 40, so that when the processing device 40 determines that the first signal is different from the second signal, the processing device 40 can control the warning device 50 to send a warning signal to remind the user that the carrying device 10 or the object is in a non-parallel state. In the present embodiment, the warning device 50 is a warning pattern (as shown in fig. 3) displayed on the processing device 40; in other embodiments, the warning device may be a warning light, a warning voice, or other devices with warning effects.

The cover 60 is a thin sheet disposed on the surface of the carrier 10 corresponding to the cover accommodating space 15. In this embodiment, the cover 60 is made of aluminum sheet. The shape of the first sensing unit corresponds to the shape of the sealing cover accommodating space 15, so that the first sensing unit 20, the second sensing unit 30, the first transmission line 22 and the second transmission line 32 are detachably fixed in the sealing cover accommodating space 15 to completely seal the first sensing accommodating space 16, the second sensing accommodating space 17 and the transmission line accommodating space 18, and are isolated from the outside. Regarding the fixing manner of the cover 60 and the carrying device 10, in this embodiment, the cover 60 has a plurality of locking holes 62 corresponding to the through holes 19 of the carrying device 10, so that the cover 60 can pass through the locking holes 62 and the through holes 19 by a plurality of locking members 64 and be locked in the cover accommodating space 15 of the carrying device 10. In other embodiments, the cover 60 can be fixed to the carrier 10 by welding, tenon or other equivalent fixing means; or the carrying device 10 and the cover 60 are integrated.

According to the above structural configuration, the present embodiment provides a method for detecting whether a robot arm carrying device and a carrying object generate parallel vibration, comprising the following steps:

a) the carrying device 10 is driven to carry an object 70, so that the object 70 contacts the carrying surface 11 of the carrying device 10. At this time, the first position or the second position of the carrying device 10 contacts the object 70 sequentially, or contacts the object 70 simultaneously.

b) When the object 70 contacts the first position, the first sensing unit 20 can detect a vibration and generate a first signal accordingly; when the object 70 contacts the second position, the second sensing unit 30 can detect a vibration and generate a second signal accordingly.

c) Then, the first signal and the second signal are transmitted to the control unit 42 through the first transmission line 22 and the second transmission line 32 for signal processing, and then transmitted to the processing device 40. In the present embodiment, the first signal and the second signal are presented in a waveform diagram when displayed by the processing device 40, wherein the X-axis is time, and the Y-axis is amplitude, or variation of acceleration. The processing device 40 analyzes the first signal to obtain a first signal generation time and analyzes the second signal to obtain a second signal generation time. The first signal generation time is the time point when the amplitude of the first signal changes significantly, which represents the time point at the instant when the object 70 contacts the first position; the second signal generation time is the time point at which the second signal amplitude changes significantly, i.e. the time point representing the instant the object 70 touches the second position. The difference between the first signal generation time and the second signal generation time is called a time difference Δ t. The processing device 40 analyzes whether the time difference Δ t is greater than the predetermined time t, and if the time difference Δ t is less than or equal to the predetermined time t, it determines that the first signal is the same as the second signal, which means that the carrying device 10 and the object 70 are in a parallel state; however, if the time difference Δ t is greater than the predetermined time t, it is determined that the first signal is different from the second signal, which indicates that the carrying device 10 and the object 70 are in a non-parallel state. In the present embodiment, the predetermined time t is set to 0.1 second.

Then, if the first signal is different from the second signal, the processing device 40 controls the warning device 50 to send the warning signal to remind the user that the carrying device 10 and the object 70 are not parallel to each other. In the present embodiment, the warning device 50 is a warning pattern displayed in the processing device 40. Therefore, a user can immediately find that the carrying device 10 and the object 70 are in a non-parallel state for real-time processing, and the carrying device 70 is prevented from being in a non-parallel state during carrying or transporting due to the non-parallel state between the carrying device 10 and the object 70 so as to prevent the processing from being influenced.

Fig. 3 shows the carrying device 10 in a tilted state towards one side, so that when the carrying device 10 contacts the object 70, the object 70 contacts the first position of the carrying surface 11 first, and then contacts the second position. Therefore, a first signal generation time of the first signal detected by the first sensing unit 20 may be different from a second signal generation time of the second signal detected by the second sensing unit. If the time difference Δ t0.2 seconds between the first signal generation time and the second signal generation time is greater than the predetermined time t0.1 seconds, the processing device 40 determines that the first signal is different from the second signal, and controls the warning device 50 to send a warning signal. Similarly, fig. 4 shows the carrying device 10 being tilted to the other side, so that when the carrying device 10 contacts the object 70, the object 70 contacts the second position of the carrying surface 11 first, and then contacts the first position. The rest of the determination process is the same as that in fig. 3, and the details thereof are not repeated herein.

From the foregoing examples, it can be seen that whether the carrying device 10 is parallel to the object 70 can be determined by comparing the time difference Δ t with the predetermined time t no matter the carrying device 10 is tilted to the left or to the right. On the contrary, if the carrying device 10 is in the horizontal state and the object 70 is in the inclined state, since the first position and the second position of the carrying device 10 contact the object 70 for different time periods, the present invention can determine that the carrying device 10 and the object 70 are in the non-parallel state by comparing the time difference Δ t with the predetermined time period t.

It should be noted that when the position of the sensing unit changes, the inclination in different directions can be detected. Or the number of the sensing units is increased so as to detect the inclination in multiple directions.

In another preferred embodiment, the predetermined time is an average contact time derived from the time difference data of signals generated by a plurality of carrying devices contacting the object. Therefore, the preset time can form a floating numerical value along with the data amount and the accumulated time of the user, so that the user can monitor whether the time difference of the signals generated by the object contacted by the bearing device is maintained within the preset time for a long time so as to judge whether the mechanical arm bearing device needs to be maintained.

In summary, the robot carrying device and the parallel sensing system of the carrying object provided by the utility model generate the plurality of sensing signals when the carrying device contacts the object through the plurality of sensing units arranged on the carrying device; and comparing the difference between the time generated by each signal with the preset time to judge whether the bearing device and the object are in a parallel state. Therefore, when the carrying device and the object are in a non-parallel state, a user can find and process the object in real time, the carrying device is prevented from carrying or conveying the unstable object in an unstable state, and the stability and the reliability of the whole process are further improved.

The above description is that of the preferred embodiment and the design drawings, which are only for illustration and not for the purpose of limiting the technical scope of the present invention, and the preferred embodiment and the design drawings are only for the purpose of implementing equivalent technical means or the scope of the claims covered by the following "claims" and are not the scope of the applicant's right without departing from the scope of the present invention.

Claims

1. The utility model provides a manipulator bears device and bears parallel sensing system of thing which characterized in that includes:

a bearing device with a bearing surface; the bearing surface is provided with a first position and a second position, and the first position and the second position are separated by a preset distance;

the first sensing unit is arranged at the first position of the bearing device and used for sensing the vibration of the bearing surface so as to generate a first signal;

the second sensing unit is arranged at the second position of the bearing device and used for sensing the vibration of the bearing surface so as to generate a second signal;

a processing device, which is connected to the first sensing unit and the second sensing unit in a communication manner and is used for receiving and analyzing the first signal and the second signal;

and a warning device, the communication connects the processing unit;

therefore, when the processing device judges that the first signal is different from the second signal, the processing device controls the warning device to send out a warning signal.

2. The system of claim 1, wherein the processing device analyzes the first signal to generate a first signal generation time, and the processing device analyzes the second signal to generate a second signal generation time; if a time difference between the first signal generation time and the second signal generation time is greater than a predetermined time, the processing device determines that the first signal is different from the second signal.

3. The system of claim 1, wherein the carrying device has a first sensing accommodation space and a second sensing accommodation space inside; the first sensing accommodation space is located at the first position, the second sensing accommodation space is located at the second position, the first sensing unit is accommodated in the first sensing accommodation space of the bearing device, and the second sensing unit is accommodated in the second sensing accommodation space of the bearing device.

4. The system of claim 3, wherein the carrying device has a transmission line receiving space therein, and the transmission line receiving space is connected to the first sensing receiving space and the second sensing receiving space respectively; wherein, a first transmission line is arranged in the transmission line containing space, one end of the first transmission line is electrically connected with the first sensing unit, and the other end of the first transmission line is electrically connected with the processing device; a second transmission line is disposed in the transmission line accommodating space, one end of the second transmission line is electrically connected to the second sensing unit, and the other end of the second transmission line is electrically connected to the processing device.

5. The system of claim 4, wherein the processing device further comprises a control unit having one end electrically connected to the first transmission line and the second transmission line and the other end signal-connected to the processing device; the control unit is used for performing signal conversion and processing on the first signal and the second signal.

6. The system of claim 3, further comprising a cover disposed on top of the first and second sensing accommodation spaces for preventing foreign objects from entering and exiting the first and second sensing accommodation spaces.

7. The system of claim 4, further comprising a cover disposed on the top of the first sensing accommodation space, the second sensing accommodation space and the transmission line accommodation space for preventing foreign objects from entering and exiting the first sensing accommodation space, the second sensing accommodation space and the transmission line accommodation space.

8. The system of claim 1, wherein the carrier is fork-shaped having a handle portion and two fork portions; the two fork parts extend from two opposite sides of one end of the handle part; the first position is located at one end of the two fork parts far away from the handle part, and the second position is located at the other end of the two fork parts far away from the handle part.