CN116558200A - Heat exchanger and method of use thereof - Google Patents

Heat exchanger and method of use thereof Download PDF

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Publication number
CN116558200A
CN116558200A CN202310339803.9A CN202310339803A CN116558200A CN 116558200 A CN116558200 A CN 116558200A CN 202310339803 A CN202310339803 A CN 202310339803A CN 116558200 A CN116558200 A CN 116558200A
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CN
China
Prior art keywords
valve
deionizer
liquid outlet
heat exchanger
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310339803.9A
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Chinese (zh)
Inventor
邰晓东
柳小敏
朱亮
张啸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Huali Microelectronics Corp
Original Assignee
Shanghai Huali Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Huali Microelectronics Corp filed Critical Shanghai Huali Microelectronics Corp
Priority to CN202310339803.9A priority Critical patent/CN116558200A/en
Publication of CN116558200A publication Critical patent/CN116558200A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F19/00—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
    • F28F19/01—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using means for separating solid materials from heat-exchange fluids, e.g. filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32522—Temperature

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Treatment Of Water By Ion Exchange (AREA)

Abstract

The invention provides a heat exchanger and a use method thereof, wherein the heat exchanger comprises a water storage tank, a first deionizer and a second deionizer; a water suction pump is arranged in the water storage tank; the outlet of the water pump is connected with a liquid outlet pipeline, and the liquid outlet pipeline comprises a first main liquid outlet pipeline and a second main liquid outlet pipeline; the second main liquid outlet pipeline comprises a first branch liquid outlet pipeline and a second branch liquid outlet pipeline; the first branch liquid outlet pipeline is connected with an inlet of the first deionizer, and the second branch liquid outlet pipeline is connected with an inlet of the second deionizer. The heat exchanger comprises the first deionizer and the second deionizer, so that when the first deionizer/the second deionizer which are working needs to be replaced, the whole machine is not required to be suspended, and the second deionizer/the first deionizer can be switched to work.

Description

Heat exchanger and method of use thereof
Technical Field
The present invention relates to the field of semiconductor integrated circuit fabrication, and more particularly, to a heat exchanger and a method of using the same.
Background
In a physical vapor deposition or chemical vapor deposition film forming process, a heat exchanger is generally used to cool a machine (such as a titanium nitride chemical vapor deposition apparatus, a nickel-platinum alloy sputtering apparatus). In addition, in the film forming process, deionized water is needed to cool the machine, and the resistance value and the temperature of the deionized water also need to meet the conditions required in the film forming process, so that the film forming of the wafer is prevented from being influenced.
Referring to fig. 1, fig. 1 is an exemplary diagram of a prior art heat exchanger. As shown in fig. 1, the heat exchanger of the prior art includes a filter 10, a water storage tank 11, a deionizer 12, and a cooler 13.
In the conventional heat exchanger, when the resistance value of deionized water is low, conductive ions in the deionized water become more, so that the purification effect of the deionizer 12 on water becomes poor, and the deionizer 12 needs to be replaced. However, when the deionizer 12 is replaced, water temperature is fluctuated, and thus the stand 14 is required to be temporarily stopped. Moreover, the deionizer 12 also needs to be replaced by suspending the entire station 14, wasting the normal operating time of the station 14.
In addition, when the staff adds deionized water into the water storage tank 11, the fluctuation of the water temperature in the water storage tank 11 is larger, so that the machine 14 can not normally operate until the water temperature in the water storage tank 11 reaches the preset temperature, and the machine 14 is required to be stopped.
Disclosure of Invention
The invention aims to provide a heat exchanger and a use method thereof, which are used for solving one or more problems that the purification effect of a deionizer is poor due to low resistance value of deionized water from a machine table in the prior art, the whole machine table is required to be stopped for replacing the deionizer, or deionized water is added into a water storage tank, so that the fluctuation of water temperature is large, the machine table is required to be stopped temporarily, and the normal operation time of the machine table is wasted.
In order to achieve the above purpose, the invention is realized by the following technical scheme: a heat exchanger for exchanging heat with a machine used in the field of semiconductor integrated circuit fabrication, the heat exchanger comprising a water reservoir, a first deionizer and a second deionizer;
a water suction pump is arranged in the water storage tank;
the outlet of the water pump is connected with a liquid outlet pipeline, and the liquid outlet pipeline comprises a first main liquid outlet pipeline and a second main liquid outlet pipeline;
the first main liquid outlet pipeline is connected with the machine;
the second main liquid outlet pipeline is provided with a first valve; wherein the second main liquid outlet pipeline comprises a first branch liquid outlet pipeline and a second branch liquid outlet pipeline; the first branch liquid outlet pipeline is provided with a second valve, and the second branch liquid outlet pipeline is provided with a third valve; the first branch liquid outlet pipeline is connected with the inlet of the first deionizer, and the second branch liquid outlet pipeline is connected with the inlet of the second deionizer;
the outlet of the first deionizing device is connected with the water storage tank, and the outlet of the second deionizing device is connected with the water storage tank.
Optionally, the first valve is provided with a controller; the controller is configured to control the first valve to be closed when the resistance value of the liquid passing through the first valve is not lower than a preset upper limit value; and when the resistance value of the liquid passing through the first valve is not higher than a preset lower limit value, the controller controls the first valve to be opened.
Optionally, the heat exchanger further comprises a first control unit configured to close the second valve/the third valve and open the third valve/the second valve when it is detected that the first deionizer/the second deionizer that is operating is not operating normally.
Optionally, the heat exchanger further comprises a water injection tank; a first heater is arranged in the water storage tank; a second heater is arranged in the water injection tank; a fourth valve is arranged on a pipeline connecting the outlet of the water filling tank and the water storage tank; the first heater and the second heater are both set at the same preset temperature.
Optionally, the water storage tank further comprises a liquid level sensor and a second control unit; the second control unit is configured to open the fourth valve when detecting that the liquid level in the water storage tank is not higher than a preset liquid level lower limit value, and to close the fourth valve when detecting that the liquid level in the water storage tank is not lower than a preset upper limit value.
Optionally, the water injection tank is also connected with an automatic water supplementing device.
Optionally, the heat exchanger further comprises a filter, and an outlet of the filter is connected with the water storage tank.
Optionally, a cooler is connected to the filter.
In order to achieve the above object, the present invention further provides a machine, which is applied in the field of semiconductor integrated circuit manufacturing; the machine comprises a heat exchanger as claimed in any one of the preceding claims.
In order to achieve the above object, the present invention further provides a method for using the heat exchanger, wherein the heat exchanger is any one of the heat exchangers, and the method for using the heat exchanger includes:
opening the second valve/the third valve, closing the third valve/the second valve, and starting the first deionizer/the second deionizer to work;
when the first control unit detects that the first deionizer/the second deionizer which is working cannot work normally, the second valve/the third valve is closed, the third valve/the second valve is opened, and the second deionizer/the first deionizer is started to work.
Compared with the prior art, the heat exchanger and the application method thereof have the following beneficial effects:
the heat exchanger is used for exchanging heat with a machine used in the field of semiconductor integrated circuit manufacturing and comprises a water storage tank, a first deionizer and a second deionizer; a water suction pump is arranged in the water storage tank; the outlet of the water pump is connected with a liquid outlet pipeline, and the liquid outlet pipeline comprises a first main liquid outlet pipeline and a second main liquid outlet pipeline; the first main liquid outlet pipeline is connected with the machine; the second main liquid outlet pipeline is provided with a first valve; wherein the second main liquid outlet pipeline comprises a first branch liquid outlet pipeline and a second branch liquid outlet pipeline; the first branch liquid outlet pipeline is provided with a second valve, and the second branch liquid outlet pipeline is provided with a third valve; the first branch liquid outlet pipeline is connected with the inlet of the first deionizer, and the second branch liquid outlet pipeline is connected with the inlet of the second deionizer; the outlet of the first deionizing device is connected with the water storage tank, and the outlet of the second deionizing device is connected with the water storage tank. Therefore, in the heat exchanger provided by the invention, as the water suction pump is arranged in the water storage tank, the outlet of the water suction pump is connected with the liquid outlet pipeline, and the liquid outlet pipeline comprises the first main liquid outlet pipeline and the second main liquid outlet pipeline, so that liquid in the water storage tank can be pumped out to the first main liquid outlet pipeline and the second main liquid outlet pipeline of the liquid outlet pipeline, the first main liquid outlet pipeline is connected with the machine table, and the liquid can flow into the machine table from the first main liquid outlet pipeline. The first valve is arranged on the second main liquid outlet pipeline, the second main liquid outlet pipeline comprises a first branch liquid outlet pipeline and a second branch liquid outlet pipeline, and liquid can flow into the first branch liquid outlet pipeline and the second branch liquid outlet pipeline by opening the first valve; the first branch liquid outlet pipeline is provided with a second valve, the second branch liquid outlet pipeline is provided with a third valve, the first branch liquid outlet pipeline is connected with an inlet of the first deionizer, the second branch liquid outlet pipeline is connected with an inlet of the second deionizer, liquid can flow into the first deionizer or the second deionizer by opening and closing the second valve and the third valve, conductive ions in the liquid can be removed by the first deionizer or the second deionizer, and then the liquid flows into the water storage tank. When the first deionizer/the second deionizer which is in operation needs to be replaced, the first deionizer and the second deionizer are arranged, so that the whole machine is not required to be suspended, and the second valve/the third valve and the third valve are closed, and the third valve/the second valve are opened, so that the second deionizer/the first deionizer can be switched to operate, and the operation efficiency of the machine is improved.
Preferably, the heat exchanger further comprises a first control unit configured to close the second valve/the third valve and open the third valve/the second valve when it is detected that the first deionizer/the second deionizer which is operating is not operating normally. Therefore, the first control unit is arranged, so that the first deionizer/second deionizer can be switched more conveniently.
Further, the heat exchanger further comprises a water injection tank connected with the water storage tank, a first heater is arranged in the water storage tank, a second heater is arranged in the water injection tank, a fourth valve is arranged on a pipeline connected with an outlet of the water injection tank, and the first heater and the second heater are all set at the same preset temperature. Thus, by providing the first heater in the water reservoir, the liquid in the water reservoir can be heated; the water filling tank is connected with the water storage tank through the arrangement, and a fourth valve is arranged on a pipeline connected with an outlet of the water filling tank, so that water can be filled into the water storage tank or water filling is suspended through opening and closing the fourth valve. And set up the second heater in annotating the water tank, the preset temperature that the second heater set up with the preset temperature that the first heater set up is the same, can be in advance with annotating the liquid heating in the water tank to preset temperature, when annotating the liquid inflow water tank in, can avoid causing the liquid temperature fluctuation in the water tank great to need not to pause whole board, can improve the operating efficiency of board.
Preferably, the water storage tank further comprises a liquid level sensor and a second control unit, wherein the second control unit is configured to open the fourth valve when detecting that the liquid level in the water storage tank is not higher than a preset liquid level lower limit value, and close the fourth valve when detecting that the liquid level in the water storage tank is not lower than a preset upper limit value. From this, can detect the liquid level change in the water storage tank through level sensor, then control opening and close of fourth valve through the second control unit, more be convenient for automatic moisturizing or the suspension moisturizing of giving the water storage tank.
Further, the water injection tank is also connected with an automatic water supplementing device. Therefore, the automatic water supplementing device is used for continuously supplementing water in the water injection tank, and a foundation is laid for supplementing water to the water storage tank by the water injection tank.
Still further, the heat exchanger further comprises a filter, an outlet of which is connected to the water reservoir, capable of filtering larger impurities in the liquid. Preferably, a cooler is connected to the filter, and the heat exchanger can be cooled by the cooler.
The machine provided by the invention comprises the heat exchanger. Therefore, the machine provided by the invention has at least all advantages of the heat exchanger, and is not described herein.
Because the heat exchanger in the use method of the heat exchanger provided by the invention is any one of the heat exchangers, the use method of the heat exchanger provided by the invention has at least all the advantages of the heat exchanger, and is not repeated here.
Drawings
FIG. 1 is an exemplary diagram of a prior art heat exchanger;
FIG. 2 is a diagram illustrating a heat exchanger according to a first embodiment of the present invention;
FIG. 3 is an exemplary diagram of another heat exchanger according to a second embodiment of the present invention;
FIG. 4 is a diagram showing another embodiment of a heat exchanger according to the second embodiment of the present invention;
FIG. 5 is a flow chart of a method of using a heat exchanger according to a fourth embodiment of the present invention;
the reference numerals in fig. 1-5 are illustrated as follows:
10-filter, 11-water storage tank, 12-deionizer, 121-first deionizer, 122-second deionizer, 13-cooler, 131-cooler inlet, 132-cooler outlet, 14-machine, 15-outlet pipe, 151-first main outlet pipe, 152-second main outlet pipe, 1521-first branch outlet pipe, 1522-second branch outlet pipe, 16-first valve, 17-inlet pipe, 18-second valve, 19-third valve, 20-water filling tank, 21-fourth valve.
Detailed Description
The heat exchanger and the method of use thereof according to the present invention will be described in further detail with reference to the accompanying drawings and examples. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention. For a better understanding of the invention with objects, features and advantages, refer to the drawings. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the present disclosure for the understanding and reading of the present disclosure, and are not intended to limit the scope of the invention, which is defined by the appended claims, and any structural modifications, proportional changes, or dimensional adjustments, which may be made by the present disclosure, should fall within the scope of the present disclosure under the same or similar circumstances as the effects and objectives attained by the present invention. Specific design features of the invention disclosed herein, including for example, specific dimensions, orientations, positions, and configurations, will be determined in part by the specific intended application and use environment. In the embodiments described below, the same reference numerals are used in common between the drawings to denote the same parts or parts having the same functions, and the repetitive description thereof may be omitted.
Example 1
The present embodiment provides a heat exchanger. Specifically, referring to fig. 2, fig. 2 is an exemplary diagram of a heat exchanger according to the present embodiment. As shown in fig. 2, the heat exchanger provided in this embodiment is used for exchanging heat with the machine 14 used in the field of semiconductor integrated circuit manufacturing, and includes a water storage tank 11, a first deionizer 121 and a second deionizer 122; a water suction pump (not shown in the figure) is arranged in the water storage tank 11; the outlet of the water pump is connected with the liquid outlet pipeline 15, and the liquid outlet pipeline 15 comprises a first main liquid outlet pipeline 151 and a second main liquid outlet pipeline 152; the first main liquid outlet pipe 151 is connected with the machine 14; the second main liquid outlet pipe 152 is provided with a first valve 16; wherein the second main outlet pipe 152 comprises a first branch outlet pipe 1521 and a second branch outlet pipe 1522; a second valve 18 is disposed on the first branch liquid outlet pipe 1521, and a third valve 19 is disposed on the second branch liquid outlet pipe 1522; the first branch liquid outlet pipe 1521 is connected with the inlet of the first deionizer 121, and the second branch liquid outlet pipe 1522 is connected with the inlet of the second deionizer 122; the outlet of the first deionizer 121 is connected to the water reservoir 11, and the outlet of the second deionizer 122 is connected to the water reservoir 11. Thus, by providing a suction pump in the water reservoir 11, the outlet of the suction pump is connected to the liquid outlet pipe 15, the liquid outlet pipe 15 comprises a first main liquid outlet pipe 151 and a second main liquid outlet pipe 152, so that liquid in the water reservoir 11 can be pumped out to the first main liquid outlet pipe 151 and the second main liquid outlet pipe 152 of the liquid outlet pipe 15, the first main liquid outlet pipe 151 is connected to the machine table 14, and liquid can flow from the first main liquid outlet pipe 151 into the machine table 14. Moreover, the second main liquid outlet pipe 152 is provided with a first valve 16, the second main liquid outlet pipe 152 includes a first branch liquid outlet pipe 1521 and a second branch liquid outlet pipe 1522, and by opening the first valve 16, liquid can flow into the first branch liquid outlet pipe 1521 and the second branch liquid outlet pipe 1522; the first branch liquid outlet pipe 1521 is provided with a second valve 18, the second branch liquid outlet pipe 1522 is provided with a third valve 19, the first branch liquid outlet pipe 1521 is connected with the inlet of the first deionizer 121, the second branch liquid outlet pipe 1522 is connected with the inlet of the second deionizer 122, the liquid can flow into the first deionizer 121 or the second deionizer 122 by opening and closing the second valve 18 and the third valve 19, the conductive ions in the liquid can be removed by the first deionizer 121 or the second deionizer 122, and then the liquid flows into the water storage tank 11. Since the first deionizer 121 and the second deionizer 122 are provided, when the first deionizer 121/the second deionizer 122 which are in operation need to be replaced, the whole machine 14 does not need to be suspended, and the second valve 18/the third valve 19 and the third valve 19/the second valve 18 are closed, so that the second deionizer 122/the first deionizer 121 can be switched to operate.
Further, the first valve 16 is provided with a controller (not shown in the figure); the controller is configured to control the first valve 16 to be closed when the resistance value of the liquid passing through the first valve 16 is not lower than a preset upper limit value; when the resistance value of the liquid passing through the first valve 16 is not higher than a preset lower limit value, the controller controls the first valve 16 to open. Thus, by setting the controller so that the controller can control the opening of the first valve 16 when the resistance value of the liquid flowing to the first valve 16 is not higher than the preset lower limit value, the liquid is caused to flow into the first deionizer 121/the second deionizer 122; when the resistance value of the liquid flowing to the first valve 16 is not lower than the preset upper limit value, the controller can control the first valve 16 to be closed, so that the liquid flows into the machine 14 from the first main liquid outlet pipe 151.
To facilitate understanding of the present invention, the opening and closing of the first valve 16 of the heat exchanger provided by the present invention will be described by way of example with a preset lower limit value of 2 megaohms and a preset upper limit value of 3 megaohms. Specifically, for example, the first valve 16 is initially closed, and when the resistance value of the liquid flowing to the first valve 16 is not higher than 2 megaohms along with the circulating flow of the liquid, the controller controls the first valve 16 to open, a part of the liquid flows to the first deionizer 121/the second deionizer 122 through the first valve 16, another part of the liquid flows into the machine 14 from the first main liquid outlet pipe 151 and then flows into the heat exchanger from the machine 14, and thus circulates, and then when the resistance value of the liquid flowing to the first valve 16 is not lower than 3 megaohms, the controller controls the first valve 16 to close, the liquid flows into the machine 14 from the first main liquid outlet pipe 151 and then flows into the heat exchanger from the machine 14, and thus the heat exchange between the heat exchanger and the machine 14 is realized by the reciprocating circulation. It should be noted that, it is understood that the foregoing preset lower limit value is 2 megaohms and the preset upper limit value is 3 megaohms are merely illustrative, and not limiting to the present invention, in implementation, the preset lower limit value may be 2 megaohms, the preset upper limit value may be 3 megaohms, the preset lower limit value may be other values than 2 megaohms, and the preset upper limit value may be other values than 3 megaohms.
Preferably, the heat exchanger further comprises a first control unit (not shown in the figure) configured to close the second valve 18/the third valve 19 and open the third valve 19/the second valve 18 when it is detected that the first deionizer 121/the second deionizer 122, which are operating, cannot operate normally. Thereby, the first deionizer 121/second deionizer 122 can be switched more conveniently.
Illustratively, in using the heat exchanger provided by the present invention, the first deionizer 121 may be used with the second valve 18 first opened and the third valve 19 closed. When the first control unit detects that the operating first deionizer 121 cannot operate normally, the second valve 18 is controlled to be closed, and the third valve 19 is opened, so that the second deionizer 122 operates. It should be noted that the foregoing is merely illustrative, and in other embodiments, the second deionizer 122 may be used first to operate, and further description is omitted herein. The opening and closing modes of the second valve 18 and the third valve 19 are not limited, and may be manual or automatic.
Still further, a first heater (not shown) and a level sensor (not shown) are provided in the water reservoir 11. Thereby, the first heater heats the liquid, so that the temperature of the liquid can reach the temperature condition required by the normal operation of the machine 14; the liquid level sensor detects the liquid level in the water storage tank 11.
Still further, the heat exchanger further comprises a filter 10, the outlet of the filter 10 being connected to the water reservoir 11. Thereby, larger impurities in the liquid can be filtered.
Preferably, a cooler 13 is connected to the filter 10, and the heat exchanger can be cooled by the cooler 13. Specifically, the cooler 13 includes a cooler inlet 131 and a cooler outlet 132, and cooling water enters from the cooler inlet 131, exchanges heat with a heat exchanger, and then flows out from the cooler outlet 132, and cools the heat exchanger through the cooler 13.
For a better understanding of the present invention, please continue to refer to fig. 2, the following exemplary description of the working flow of the heat exchanger provided by the present invention is given:
firstly, deionized water from a machine table 14 enters a filter 10 for filtering, larger impurities in the deionized water are filtered by the filter 10, then enter a water storage tank 11, and then enter a liquid outlet pipeline 15 by a water suction pump arranged in the water storage tank 11. The liquid outlet pipe 15 includes a first main liquid outlet pipe 151 and a second main liquid outlet pipe 152, and the first main liquid outlet pipe 151 is connected to the machine 14. The second main liquid outlet pipe 152 is provided with a first valve 16, wherein the second main liquid outlet pipe 152 includes a first branch liquid outlet pipe 1521 and a second branch liquid outlet pipe 1522; a second valve 18 is disposed on the first branch liquid outlet pipe 1521, and a third valve 19 is disposed on the second branch liquid outlet pipe 1522; the first branch outlet pipe 1521 is connected to the inlet of the first deionizer 121, and the second branch outlet pipe 1521 is connected to the inlet of the second deionizer 122. And, the first valve 16 is provided with a controller, and the heat exchanger further includes a first control unit. When the resistance value of the deionized water flowing to the first valve 16 is not lower than the preset upper limit value, the controller controls the first valve 16 to be closed, and the deionized water flows out from the first main liquid outlet pipeline 151 to the machine 14; when the resistance value of the deionized water flowing to the first valve 16 is not higher than the preset lower limit value, the controller controls the first valve 16 to open, a part of deionized water flows out from the first main outlet pipe 151 to the machine table 14, another part of deionized water flows into the first operating deionizer 121 from the first branch outlet pipe 1521, and when the first control unit detects that the first operating deionizer 121 cannot normally operate, the second valve 18 is controlled to close, the third valve 19 is controlled to open, and the operation is switched to the second deionizer 122. The conductive ions are removed by the first deionizer 121/the second deionizer 122, and then the deionized water flows into the water storage tank 11. The temperature of the machine 14 is reduced by the circulating flow of deionized water in the machine 14. A cooler 13 is connected to the filter 10, and the cooler 13 is provided to cool down the heat exchanger. In addition, the water storage tank 11 is provided with a first heater, and the first heater sets a preset temperature (for example, 60 degrees), so that the temperature of the deionized water is stabilized at the preset temperature in the whole process, and the machine 14 can be operated normally. When the liquid level in the water storage tank 11 is not higher than the preset liquid level lower limit value of the liquid level sensor, a worker is required to manually add deionized water with the same temperature as the preset temperature into the water storage tank 11, so that the machine 14 can work normally.
Example two
The present embodiment provides another heat exchanger. Specifically, referring to fig. 3, fig. 3 is an exemplary diagram of another heat exchanger provided in the present embodiment. As can be seen from fig. 3, unlike the above-described embodiment, the heat exchanger provided in this embodiment further includes a water injection tank 20; a first heater (not shown) is arranged in the water storage tank 11; a second heater (not shown) is arranged in the water injection tank 20; a fourth valve 21 is arranged on a pipeline connecting the outlet of the water injection tank 20 and the water storage tank 11; the first heater and the second heater are both set at the same preset temperature. Therefore, the water tank 20 is connected with the water storage tank 11, and a fourth valve 21 is arranged on a pipeline connecting the outlet of the water tank 20 and the water storage tank 11, and water can be supplied to the water storage tank 11 or water can be temporarily supplied by opening and closing the fourth valve 21. And set up the second heater in water injection tank 20, the preset temperature that the second heater set up is the same with the preset temperature that the first heater set up, can be in advance with the liquid heating in the water injection tank 20 to preset temperature, avoid when the liquid in the water injection tank 20 flows into water storage tank 11, lead to the liquid temperature fluctuation in water storage tank 11 great to need to pause whole board 14, wasted the normal operating time of board 14.
It should be noted that, the water tank 20 may be connected to the first branch liquid outlet pipe 1521 and then connected to the water tank 11 through a pipe, and when the water is needed to be replenished by the first deionizer 121/the second deionizer 122, water may be replenished through the water tank 20.
Preferably, the water storage tank 11 further comprises a liquid level sensor (not shown in the figure) and a second control unit (not shown in the figure), wherein the second control unit is configured to open the fourth valve 21 when detecting that the liquid level in the water storage tank 11 is not higher than a preset lower limit value of the liquid level, and close the fourth valve 21 when detecting that the liquid level in the water storage tank 11 is not lower than a preset upper limit value. Therefore, the liquid level sensor can detect the liquid level change in the water storage tank 11, and then the second control unit controls the fourth valve 21 to be opened or closed, so that the water storage tank 11 can be automatically filled with water or the water is stopped to be filled with water conveniently. The opening and closing manner of the fourth valve 21 is not limited to the present invention, and may be manual or automatic.
Further, an automatic water replenishing device (not shown in the figure) is further connected to the water tank 20. Therefore, water is continuously replenished into the water tank 20 through the automatic water replenishing device, and a foundation is laid for the water tank 20 to replenish water to the water storage tank 11.
In one specific implementation manner of this embodiment, only one deionizer may be disposed in the heat exchanger. Specifically, as shown in fig. 4, fig. 4 is a schematic diagram illustrating one specific example of another heat exchanger according to the present embodiment. As can be seen from fig. 4, the second main outlet pipe 152 is connected to the deionizer 12, and the water injection tank 20 is connected to the water storage tank 11. When the deionizer 12 works normally, the water tank 20 can supply the liquid with the same preset temperature to the water storage tank 11, so that the water temperature cannot fluctuate greatly, and the machine 14 does not need to be stopped at the moment; when the deionizer 12 fails to function properly, a pause stand 14 is required to replace the deionizer 12.
Example III
The embodiment provides a machine which is applied to the field of semiconductor integrated circuit manufacturing; the machine comprises the heat exchanger in any embodiment. Specifically, the machine comprises equipment such as titanium nitride chemical vapor deposition equipment, nickel-platinum alloy sputtering equipment and the like.
Because the machine provided in this embodiment includes the heat exchanger described in any of the foregoing embodiments, the machine provided in this embodiment has at least all the advantages of the heat exchanger provided in each of the foregoing embodiments, and will not be described herein again.
Example IV
The present embodiment provides a method for using a heat exchanger, where the heat exchanger is a heat exchanger according to any one of the foregoing embodiments, specifically, referring to fig. 5, fig. 5 is a flowchart of a method for using a heat exchanger provided in the present embodiment, and as can be seen from fig. 5, the method for using includes:
opening the second valve 18/the third valve 19, closing the third valve 19/the second valve 18, and starting the first deionizer 121/the second deionizer 122 to operate;
when the first control unit detects that the first deionizer 121/the second deionizer 122 which are working cannot work normally, the second valve 18/the third valve 19 is closed, the third valve 19/the second valve 18 is opened, and the second deionizer 122/the first deionizer 121 is started to work.
Since the heat exchanger in the use method of the heat exchanger provided in this embodiment is the heat exchanger described in any of the foregoing embodiments, the use method of the heat exchanger provided in this embodiment at least has all the advantages of the heat exchanger provided in each of the foregoing embodiments, and will not be described in detail herein.
In summary, the heat exchanger and the application method thereof provided by the invention have the following advantages: the heat exchanger is used for exchanging heat with a machine used in the field of manufacturing of semiconductor integrated circuits and comprises a water storage tank, a first deionizer and a second deionizer; a water suction pump is arranged in the water storage tank; the outlet of the water pump is connected with a liquid outlet pipeline, and the liquid outlet pipeline comprises a first main liquid outlet pipeline and a second main liquid outlet pipeline; the first main liquid outlet pipeline is connected with the machine; the second main liquid outlet pipeline is provided with a first valve; wherein the second main liquid outlet pipeline comprises a first branch liquid outlet pipeline and a second branch liquid outlet pipeline; the first branch liquid outlet pipeline is provided with a second valve, and the second branch liquid outlet pipeline is provided with a third valve; the first branch liquid outlet pipeline is connected with the inlet of the first deionizer, and the second branch liquid outlet pipeline is connected with the inlet of the second deionizer; the outlet of the first deionizing device is connected with the water storage tank, and the outlet of the second deionizing device is connected with the water storage tank. Therefore, in the heat exchanger provided by the invention, as the water suction pump is arranged in the water storage tank, the outlet of the water suction pump is connected with the liquid outlet pipeline, and the liquid outlet pipeline comprises the first main liquid outlet pipeline and the second main liquid outlet pipeline, so that liquid in the water storage tank can be pumped out to the first main liquid outlet pipeline and the second main liquid outlet pipeline of the liquid outlet pipeline, the first main liquid outlet pipeline is connected with the machine table, and the liquid can flow into the machine table from the first main liquid outlet pipeline. The first valve is arranged on the second main liquid outlet pipeline, the second main liquid outlet pipeline comprises a first branch liquid outlet pipeline and a second branch liquid outlet pipeline, and liquid can flow into the first branch liquid outlet pipeline and the second branch liquid outlet pipeline by opening the first valve; the first branch liquid outlet pipeline is provided with a second valve, the second branch liquid outlet pipeline is provided with a third valve, the first branch liquid outlet pipeline is connected with an inlet of the first deionizer, the second branch liquid outlet pipeline is connected with an inlet of the second deionizer, liquid can flow into the first deionizer or the second deionizer by opening and closing the second valve and the third valve, conductive ions in the liquid can be removed by the first deionizer or the second deionizer, and then the liquid flows into the water storage tank. When the first deionizer/the second deionizer which is in operation needs to be replaced, the first deionizer and the second deionizer are arranged, so that the whole machine is not required to be suspended, and the second valve/the third valve and the third valve are closed, and the third valve/the second valve are opened, so that the second deionizer/the first deionizer can be switched to operate, and the operation efficiency of the machine is improved.
Preferably, the heat exchanger further comprises a first control unit configured to close the second valve/the third valve and open the third valve/the second valve when it is detected that the first deionizer/the second deionizer which is operating is not operating normally. Therefore, the first control unit is arranged, so that the first deionizer/second deionizer can be switched more conveniently.
Further, the heat exchanger further comprises a water injection tank connected with the water storage tank, a first heater is arranged in the water storage tank, a second heater is arranged in the water injection tank, a fourth valve is arranged on a pipeline connected with an outlet of the water injection tank, and the first heater and the second heater are all set at the same preset temperature. Thus, by providing the first heater in the water reservoir, the liquid in the water reservoir can be heated; the water filling tank is connected with the water storage tank through the arrangement, and a fourth valve is arranged on a pipeline connected with an outlet of the water filling tank, so that water can be filled into the water storage tank or water filling is suspended through opening and closing the fourth valve. And set up the second heater in annotating the water tank, the preset temperature that the second heater set up with the preset temperature that the first heater set up is the same, can be in advance with annotating the liquid heating in the water tank to preset temperature, when annotating the liquid inflow water tank in, can avoid causing the liquid temperature fluctuation in the water tank great to need not to pause whole board, can improve the operating efficiency of board.
Preferably, the water storage tank further comprises a liquid level sensor and a second control unit, wherein the second control unit is configured to open the fourth valve when detecting that the liquid level in the water storage tank is not higher than a preset liquid level lower limit value, and close the fourth valve when detecting that the liquid level in the water storage tank is not lower than a preset upper limit value. From this, can detect the liquid level change in the water storage tank through level sensor, then control opening and close of fourth valve through the second control unit, more be convenient for automatic moisturizing or the suspension moisturizing of giving the water storage tank.
Further, the water injection tank is also connected with an automatic water supplementing device. Therefore, the automatic water supplementing device is used for continuously supplementing water in the water injection tank, and a foundation is laid for supplementing water to the water storage tank by the water injection tank.
Still further, the heat exchanger further comprises a filter, an outlet of which is connected to the water reservoir, capable of filtering larger impurities in the liquid. Preferably, a cooler is connected to the filter, and the heat exchanger can be cooled by the cooler.
The machine provided by the invention comprises the heat exchanger. Therefore, the machine provided by the invention has at least all advantages of the heat exchanger, and is not described herein.
Because the heat exchanger in the use method of the heat exchanger provided by the invention is any one of the heat exchangers, the use method of the heat exchanger provided by the invention has at least all the advantages of the heat exchanger, and is not repeated here.
Finally, it should be noted that the above-mentioned embodiments are merely for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that modifications and equivalents may be made to the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention.

Claims (10)

1. A heat exchanger for exchanging heat with a machine used in the field of semiconductor integrated circuit fabrication, the heat exchanger comprising a water reservoir, a first deionizer and a second deionizer;
a water suction pump is arranged in the water storage tank;
the outlet of the water pump is connected with a liquid outlet pipeline, and the liquid outlet pipeline comprises a first main liquid outlet pipeline and a second main liquid outlet pipeline;
the first main liquid outlet pipeline is connected with the machine;
the second main liquid outlet pipeline is provided with a first valve; wherein the second main liquid outlet pipeline comprises a first branch liquid outlet pipeline and a second branch liquid outlet pipeline; the first branch liquid outlet pipeline is provided with a second valve, and the second branch liquid outlet pipeline is provided with a third valve; the first branch liquid outlet pipeline is connected with the inlet of the first deionizer, and the second branch liquid outlet pipeline is connected with the inlet of the second deionizer;
the outlet of the first deionizing device is connected with the water storage tank, and the outlet of the second deionizing device is connected with the water storage tank.
2. The heat exchanger of claim 1, wherein the first valve is provided with a controller;
the controller is configured to control the first valve to be closed when the resistance value of the liquid passing through the first valve is not lower than a preset upper limit value; and when the resistance value of the liquid passing through the first valve is not higher than a preset lower limit value, the controller controls the first valve to be opened.
3. The heat exchanger of claim 1, further comprising a first control unit configured to close the second valve/the third valve and open the third valve/the second valve when it is detected that the first deionizer/the second deionizer that is operating is not operating properly.
4. The heat exchanger of claim 1, further comprising a water injection tank; a first heater is arranged in the water storage tank; a second heater is arranged in the water injection tank; a fourth valve is arranged on a pipeline connecting the outlet of the water filling tank and the water storage tank;
the first heater and the second heater are both set at the same preset temperature.
5. The heat exchanger of claim 4, wherein the water reservoir further comprises a liquid level sensor and a second control unit; the second control unit is configured to open the fourth valve when detecting that the liquid level in the water storage tank is not higher than a preset liquid level lower limit value, and to close the fourth valve when detecting that the liquid level in the water storage tank is not lower than a preset upper limit value.
6. The heat exchanger of claim 4, wherein the water injection tank is further connected with an automatic water replenishment device.
7. The heat exchanger of claim 1, further comprising a filter, an outlet of the filter being connected to the water reservoir.
8. The heat exchanger of claim 7, wherein a cooler is connected to the filter.
9. The machine is characterized by being applied to the field of semiconductor integrated circuit manufacturing; the machine comprising a heat exchanger according to any one of claims 1-8.
10. A method of using a heat exchanger according to any one of claims 1 to 9, wherein the heat exchanger comprises:
opening the second valve/the third valve, closing the third valve/the second valve, and starting the first deionizer/the second deionizer to work;
when the first control unit detects that the first deionizer/the second deionizer which is working cannot work normally, the second valve/the third valve is closed, the third valve/the second valve is opened, and the second deionizer/the first deionizer is started to work.
CN202310339803.9A 2023-03-31 2023-03-31 Heat exchanger and method of use thereof Pending CN116558200A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310339803.9A CN116558200A (en) 2023-03-31 2023-03-31 Heat exchanger and method of use thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310339803.9A CN116558200A (en) 2023-03-31 2023-03-31 Heat exchanger and method of use thereof

Publications (1)

Publication Number Publication Date
CN116558200A true CN116558200A (en) 2023-08-08

Family

ID=87497244

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310339803.9A Pending CN116558200A (en) 2023-03-31 2023-03-31 Heat exchanger and method of use thereof

Country Status (1)

Country Link
CN (1) CN116558200A (en)

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