JP2013020509A - Temperature control device, temperature control system and temperature control system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a temperature control device which does not require large cooling capacity or heating capacity for cooling means or heating means and can control a temperature of a device to be controlled at a high speed and with high accuracy when the temperature is changed.SOLUTION: A temperature control device 50 is provided between a device 12 to be controlled and a supply device 20 including first and second supply sections 30 and 40. The device includes: a storage section 51 in which fluid is stored; and a connection switching section 55 which connects the device 12 to be controlled to one of the first and second supply sections 30 and 40 and switches the connection so that the storage section 51 is connected to the other of the first and second supply sections 30 and 40 or the device 12 to be controlled and the storage section 51 are connected to each other.

Description

  The present invention relates to a temperature control device, a temperature control method, and a temperature control system for controlling the temperature of a fluid supplied to a controlled device whose temperature is controlled.

  In the manufacturing process of a semiconductor wafer, it is necessary to control the semiconductor wafer in a wide temperature range from a low temperature such as −60 ° C. to 30 ° C. to a high temperature.

  Normally, such temperature control is performed by holding a semiconductor wafer in a cage in which a cooling liquid flow path is formed to allow the cooling liquid to flow inside, and flowing the cooling liquid cooled by a refrigerator in the cooling liquid flow path. Thus, the temperature of the cage itself is controlled. As such an apparatus, an example of a temperature control apparatus capable of lowering the temperature of a semiconductor wafer held by a chuck is disclosed (for example, see Patent Document 1).

  A conventional temperature control device includes a low-temperature tank for storing a coolant for flowing into a coolant flow path provided in the chuck, and a pump for sending the coolant in the low-temperature tank to the coolant flow path of the chuck. I have. Further, the conventional temperature control device includes a heat exchanger for exchanging heat between the coolant in the low temperature tank and the refrigerant flowing inside, a refrigerator for flowing the refrigerant in the heat exchanger, a chuck And a heater for heating the coolant in the tank.

JP 2003-148852 A

  However, the temperature control device described above has the following problems.

  For example, when the controlled device is cooled and heated in a wide temperature range from a low temperature to a high temperature such as −60 to 30 ° C., a large cooling rate or a large heating rate may be required. In order to increase the cooling rate, the temperature control device may be provided with a cooling means such as a refrigerator having a large refrigerating capacity. Or the like.

  However, when the temperature control device is provided with a cooling means having a large refrigerating capacity or a heating means having a large heating capacity, there are problems that the apparatus cost increases and the installation area of the apparatus increases. In addition, while controlling the temperature at a constant level, it is often not necessary to have a very large refrigeration / heating capacity, and the capacity of the cooling means and heating means must be increased only for cooling / heating. This wastes.

  Furthermore, if the location where the temperature control device is installed cannot be used in an air-cooled or water-cooled refrigerator such as in a clean room or a vacuum device, or if there is a restriction on the installation area, A temperature controller may not be installed nearby. In such a case, since the temperature control device is installed at a location away from the controlled device, the flow path through which the fluid flows from the temperature control device to the controlled device becomes long, and the temperature of the controlled device is changed. The temperature cannot be controlled at high speed, or the temperature cannot be controlled with high accuracy.

  Moreover, the above-mentioned problem is not limited to the case of cooling by a refrigerator as a cooling means, but is a problem common to the case of cooling by cooling water or a blower. Further, the present invention is not limited to the case where the controlled device is cooled to a temperature lower than normal temperature, but is a common problem when heating to a temperature higher than normal temperature.

  The present invention has been made in view of the above points, and does not require a large cooling capacity or heating capacity for the cooling means or the heating means, and performs temperature control with high speed and high accuracy when changing the temperature of the controlled device. A temperature control device and a temperature control method are provided.

  In order to solve the above problems, the present invention is characterized by the following measures.

  The present invention relates between a controlled device whose temperature is controlled by a supplied fluid and a supply device including a first supply unit and a second supply unit that supply the temperature-controlled fluid to the controlled device. A temperature control device for controlling a temperature of a fluid supplied to the controlled device, wherein the storage device stores a fluid, and the controlled device includes the first supply unit and the second supply. And switching the connection so that the storage unit is connected to the other of the first supply unit and the second supply unit, or the controlled device is connected to the storage unit. And a connection switching unit.

  The present invention further includes a control unit that controls the operation of the connection switching unit, the operation of the first adjustment unit, and the operation of the second adjustment unit in the temperature control device described above, and the control unit When the temperature of the fluid supplied to the controlled device is changed from the first temperature to the second temperature, the controlled device is connected to the first supplying unit by the connection switching unit. When the temperature of the fluid supplied to the controlled device is controlled to be the first temperature by the first adjusting unit, the storage switching unit is configured to be the second supply unit by the connection switching unit. And the second adjusting unit controls the temperature of the fluid stored in the storage unit to be a preliminary temperature, and the connection switching unit controls the second controlled device via the storage unit. The fluid stored in the storage unit is connected to the supply unit of Control to be supplied to the controlled device, and then connect the controlled device to the second supply unit without passing through the storage unit by the connection switching unit and the first adjustment unit. The temperature of the fluid supplied to the controlled device is controlled to be the second temperature.

  In addition, the present invention provides a controlled device whose temperature is controlled by a supplied fluid, and a supply device including a first supply unit and a second supply unit that supply a temperature-controlled fluid to the controlled device. And a temperature control method for controlling a temperature of a fluid supplied to the controlled device, wherein the temperature of the fluid supplied to the controlled device is changed from a first temperature to a second temperature. The temperature of the fluid supplied to the controlled device by the first adjusting unit in a state where the controlled device is connected to the first supplying unit by the connection switching unit. The temperature of the fluid stored in the storage unit by the second adjustment unit while connecting the storage unit storing the fluid to the second supply unit by the connection switching unit when controlling to be a temperature Control so that the preliminary temperature is The replacement unit connects the controlled device to the second supply unit via the storage unit, and controls the fluid stored in the storage unit to be supplied to the controlled device. The connection switching unit connects the controlled device to the second supply unit without going through the storage unit, and the temperature of the fluid supplied to the controlled device by the first adjustment unit is the second Control to reach temperature.

    In addition, the present invention provides a controlled device whose temperature is controlled by a supplied fluid, and a supply device including a first supply unit and a second supply unit that supply a temperature-controlled fluid to the controlled device. A temperature control device that is provided between the controlled device and the supply device and controls the temperature of the fluid supplied to the controlled device, wherein the temperature control device stores a fluid. And connecting the controlled device with one of the first supply unit and the second supply unit and connecting the storage unit with the other of the first supply unit and the second supply unit, Or it is a temperature control system which has a connection switching part which switches a connection so that the said to-be-controlled apparatus may be connected with the said storage part.

  According to the present invention, the cooling means or the heating means does not require a large cooling capacity or heating capacity, and the temperature can be controlled at high speed and with high accuracy when the temperature of the controlled device is changed.

It is a figure which shows the structure of the temperature control system containing the temperature control apparatus which concerns on 1st Embodiment. It is FIG. (1) which shows the state of a temperature control apparatus at the time of performing temperature control of a to-be-controlled device with the temperature control method which concerns on 1st Embodiment. It is a graph (the 1) which shows the time change of the temperature of a 1st supply part, a 2nd supply part, a tank, preset temperature, and a to-be-controlled device. It is FIG. (2) which shows the state of a temperature control apparatus at the time of performing temperature control of a to-be-controlled apparatus with the temperature control method which concerns on 1st Embodiment. It is a graph (the 2) which shows the time change of the temperature of a 1st supply part, a 2nd supply part, a tank, preset temperature, and a to-be-controlled device. It is FIG. (3) which shows the state of a temperature control apparatus at the time of performing temperature control of a to-be-controlled device with the temperature control method which concerns on 1st Embodiment. It is a graph (the 3) which shows the time change of the temperature of a 1st supply part, a 2nd supply part, a tank, preset temperature, and a to-be-controlled device. It is FIG. (4) which shows the state of a temperature control apparatus at the time of performing temperature control of a to-be-controlled apparatus with the temperature control method which concerns on 1st Embodiment. It is a graph (the 4) which shows the time change of the temperature of a 1st supply part, a 2nd supply part, a tank, preset temperature, and a to-be-controlled device. It is FIG. (5) which shows the state of a temperature control apparatus at the time of performing temperature control of a to-be-controlled apparatus by the temperature control method which concerns on 1st Embodiment. It is a graph (the 5) which shows the time change of the temperature of a 1st supply part, a 2nd supply part, a tank, preset temperature, and a to-be-controlled device. It is a graph (the 6) which shows the time change of the temperature of a 1st supply part, a 2nd supply part, a tank, preset temperature, and a to-be-controlled device. It is a graph (the 7) which shows the time change of the temperature of a 1st supply part, a 2nd supply part, a tank, preset temperature, and a to-be-controlled device. It is a graph (the 8) which shows the time change of the temperature of a 1st supply part, a 2nd supply part, a tank, preset temperature, and a to-be-controlled device. It is a figure which shows the structure of the temperature control system containing the temperature control apparatus which concerns on 2nd Embodiment.

Next, a mode for carrying out the present invention will be described with reference to the drawings.
(First embodiment)
A temperature control system including the temperature control device according to the first embodiment will be described with reference to FIG.

  FIG. 1 is a diagram showing a configuration of a temperature control system 10 including a temperature control device 50 according to the present embodiment.

  The temperature control system 10 includes a controlled device 12, a supply device 20, a temperature control device 50, and a control unit 60. The temperature of the controlled device 12 is controlled by the flow of fluid. The supply device 20 includes a first supply unit 30 and a second supply unit 40 that adjust the temperature of the fluid and supply the fluid to the controlled device 12. The temperature control device 50 is provided between the controlled device 12 and the supply device 20, and connects the controlled device 12 with the first supply unit 30 or the second supply unit 40 while switching the controlled device 12. Control the temperature of the flowing fluid. The controller 60 controls the operation of the supply device 20 and the operation of the temperature control device 50.

  The control unit 60 may be provided inside the temperature control device 50. Thereby, the temperature control of the entire temperature control system 10 including the controlled device 12, the supply device 20, and the temperature control device 50 when the temperature control device 50 is provided can be controlled by the temperature control device 50 alone. it can. Hereinafter, an example in which the control unit 60 is included in the temperature control device 50 will be described.

  In the present embodiment, a semiconductor inspection apparatus that holds a semiconductor wafer and performs electrical inspection on the held semiconductor wafer, for example, in a low temperature region will be described as an example of the controlled apparatus 12.

  The controlled device 12 includes a chuck 13 that holds the semiconductor wafer W. A channel 14 through which a fluid flows is formed inside the chuck 13. A supply port of the supply device 20 is connected to the inlet 15 of the flow path 14 via a temperature control device 50. The fluid supplied from the supply port of the supply device 20 is supplied to the inlet 15 of the flow path 14 of the controlled device 12 via the temperature control device 50. A recovery port of the supply device 20 is connected to the outlet 16 of the flow path 14 of the controlled device 12 via a temperature control device 50. The fluid discharged from the outlet 16 of the flow path 14 of the controlled device 12 is returned to the recovery port of the supply device 20 via the temperature control device 50.

  The supply device 20 includes a first supply unit 30 and a second supply unit 40 that adjust the temperature of the fluid and supply the fluid to the controlled device 12.

  The first supply unit 30 includes a pump 31, a refrigerator 32, a heater 33, and a temperature sensor 34. The suction side of the pump 31 is connected to a recovery port 35 connected to the outlet 16 of the flow path 14 of the controlled apparatus 12 via the temperature control apparatus 50 and a return flow path 36. The discharge side of the pump 31 is connected via a supply flow path 38 and a supply port 37 connected to the inlet 15 of the flow path 14 of the controlled apparatus 12 via the temperature control apparatus 50. The refrigerator 32 and the heater 33 are provided on the return flow path 36 and between the recovery port 35 and the pump 31. In the example shown in FIG. 1, the refrigerator 32 and the heater 33 are provided in the order of the refrigerator 32 and the heater 33 in the direction of fluid flow between the recovery port 35 and the pump 31. The temperature sensor 34 is for measuring the temperature of the fluid whose temperature is adjusted by the heater 33, and is provided in the supply flow path 38.

  In the first supply unit 30, the fluid recovered from the recovery port 35 and flowing through the return flow path 36 is cooled by the refrigerator 32. The temperature of the cooled fluid is adjusted by the heater 33 as necessary. The fluid whose temperature is adjusted by the heater 33 is sucked from the suction side of the pump 31 and then discharged from the discharge side of the pump 31. The fluid discharged from the discharge side of the pump 31 flows through the supply flow path 38 and is then supplied from the supply port 37.

  The second supply unit 40 includes a pump 41, a refrigerator 42, a heater 43, and a temperature sensor 44. The suction side of the pump 41 is connected via a return channel 46 and a recovery port 45 connected to the outlet 16 of the channel 14 of the controlled device 12 via the temperature controller 50. The discharge side of the pump 41 is connected to a supply port 47 connected to the inlet 15 of the flow path 14 of the controlled apparatus 12 via the temperature control apparatus 50 and a supply flow path 48. The refrigerator 42 and the heater 43 are provided on the return flow path 46 and between the recovery port 45 and the pump 41. In the example illustrated in FIG. 1, the refrigerator 42 and the heater 43 are provided between the recovery port 45 and the pump 41 in the order of the refrigerator 42 and the heater 43 in the direction of fluid flow. The temperature sensor 44 is for measuring the temperature of the fluid whose temperature is adjusted by the heater 43, and is provided in the supply channel 48.

  In the second supply unit 40 as well, the fluid recovered from the recovery port 45 and flowing through the return flow path 46 is cooled by the refrigerator 42 as in the first supply unit 30. The temperature of the cooled fluid is adjusted by the heater 43 as necessary. The fluid whose temperature is adjusted by the heater 43 is sucked from the suction side of the pump 41 and then discharged from the discharge side of the pump 41. The fluid discharged from the discharge side of the pump 41 flows through the supply flow channel 48 and then is supplied from the supply port 47.

  Further, the supply device 20 may have a reserve tank 21. The reserve tank 21 is connected to the return flow paths 36 and 46, and the return flow paths 36 and 46 can be additionally supplemented with fluid as necessary.

  When the heaters 33 and 43 can be controlled independently, the refrigerators 32 and 42 may not be provided independently, and the fluid flowing through the return flow paths 36 and 46 using the same refrigerator. May be cooled.

  Further, instead of the refrigerator and the heater, for example, a heat exchanger that exchanges heat with cooling water in the factory or cold air blown by a blower is used, and the fluid returned from the controlled device is cooled by cooling water and cooled. A fluid may be supplied. Alternatively, instead of the refrigerator and the heater, the fluid that has only the heater and is returned from the controlled device may be heated by the heater, and the heated fluid may be supplied.

  The temperature control device 50 includes a tank 51, heaters 53 and 54, a connection switching unit 55, and a control unit 60. The tank 51 corresponds to the storage unit in the present invention, and the heaters 53 and 54 correspond to the first adjustment unit and the second adjustment unit in the present invention, respectively.

  The tank 51 stores a fluid. At a certain timing, the connection switching unit 55 connects one of the first supply unit 30 and the second supply unit 40 and one of the controlled device 12 and the tank 51, and also connects the first supply unit 30 and the first supply unit 30. The other of the two supply units 40 is connected to the other of the controlled device 12 and the tank 51. Further, the connection switching unit 55 connects one of the first supply unit 30 and the second supply unit 40, the controlled device 12, and the tank 51 at some other timing. The heater 53 is provided in the middle of the flow path through which the fluid flows from the connection switching unit 55 to the controlled device 12, and adjusts the temperature of the fluid flowing to the controlled device 12. The heater 54 is provided in the middle of the flow path through which the fluid flows from the connection switching unit 55 to the tank 51, and adjusts the temperature of the fluid flowing to the tank 51.

  The connection switching unit 55 includes a first supply port side connection port G1 connected to the supply port 37 of the first supply unit 30, and a first recovery port connected to the recovery port 35 of the first supply unit 30. Side connection port G3. The connection switching unit 55 includes a second supply port side connection port G2 connected to the supply port 47 of the second supply unit 40 and a second connection port connected to the recovery port 45 of the second supply unit 40. And a recovery port side connection port G4. The connection switching unit 55 is connected to the controlled device inlet side connection port G5 connected to the inlet 15 of the flow channel 14 of the controlled device 12 and the controlled port connected to the outlet 16 of the flow channel 14 of the controlled device 12. And an apparatus outlet side connection port G6. Further, the connection switching unit 55 includes a tank inlet side connection port G7 connected to the inlet of the tank 51 and a tank outlet side connection port G8 connected to the outlet of the tank 51.

  The first supply port side connection port G1 is connected to the controlled device inlet side connection port G5 by the supply flow path R1. The second supply port side connection port G2 is connected to the controlled device inlet side connection port G5 by a supply channel R2 that merges with the supply channel R1 at a position P1 in the middle of the supply channel R1. The controlled device outlet side connection port G6 is connected to the first recovery port side connection port G3 by the return flow path R3. The controlled device outlet side connection port G6 is connected to the second recovery port connection port G4 by a return channel R4 branched from the return channel R3 at a position P2 in the middle of the return channel R3.

  The first supply port side connection port G1 is connected to the tank inlet side connection port G7 by a supply channel R5 branched from the supply channel R1 at a position P3 in the middle of the supply channel R1. The second supply port side connection port G2 is connected to the tank inlet side connection port G7 by a supply channel R6 branched from the supply channel R2 at a position P4 in the middle of the supply channel R2. The tank outlet side connection port G8 is connected to the first recovery port side connection port G3 by a return channel R7 that merges with the return channel R3 at a position P5 in the middle of the return channel R3. The tank outlet side connection port G8 is connected to the second recovery port side connection port G4 by a return channel R8 that merges with the return channel R4 at a position P6 in the middle of the return channel R4.

  The tank outlet side connection port G8 is connected to the controlled device inlet side connection port G5 by a connection channel R9 that merges with the supply channel R2 at a position P7 in the middle of the supply channel R2.

  Between the position P1 and the position P3 of the supply flow path R1, a valve V1 for communicating or blocking the flow path is provided. Between the position P1 and the position P4 of the supply flow path R2, a valve V2 for communicating or blocking the flow path is provided. Between the position P2 and the position P5 of the return flow path R3, a valve V3 that communicates or blocks the flow path is provided. Between the position P2 and the position P6 of the return flow path R4, a valve V4 that communicates or blocks the flow path is provided. In the middle of the supply flow path R5, a valve V5 for communicating or blocking the flow path is provided. In the middle of the supply flow path R6, a valve V6 for communicating or blocking the flow path is provided. In the middle of the return flow path R7, a valve V7 for communicating or blocking the flow path is provided. In the middle of the return flow path R8, a valve V8 for communicating or blocking the flow path is provided.

  The heater 53 is provided on the controlled device 12 side of the controlled device inlet side connection port G5. That is, the heater 53 is provided in the middle of the flow path through which the fluid flows from the connection switching unit 55 to the controlled device 12, and adjusts the temperature of the fluid flowing from the connection switching unit 55 to the controlled device 12. is there. A temperature sensor 57 for measuring the temperature of the fluid whose temperature is adjusted by the heater 53 is provided on the controlled device 12 side of the heater 53.

  The heater 54 is provided on the tank 51 side of the tank inlet side connection port G7. That is, the heater 54 is provided in the middle of the flow path through which the fluid flows from the connection switching unit 55 to the tank 51, and is for adjusting the temperature of the fluid flowing from the connection switching unit 55 to the tank 51. Further, a temperature sensor 58 for measuring the temperature of the fluid whose temperature is adjusted by the heater 54 is provided on the tank 51 side of the heater 54.

  The control unit 60 has a controller 61 composed of a microprocessor (computer). The controller 61 controls the operation of each component of the temperature control system 10 including the operations of the heaters 53 and 54 and the connection switching unit 55. In addition, the controller 61 visualizes and displays the operation status of each component of the temperature control system 10 and the keyboard on which the process manager manages the input of commands in order to manage each component of the temperature control system 10. A user interface 62 composed of a display or the like is connected. Further, the controller 61 is connected to a storage unit 63 that stores a control program for realizing various processes executed by the temperature control system 10 under the control of the controller 61. The control program is stored in a storage medium (recording medium) in the storage unit 63. The storage medium may be a hard disk or a semiconductor memory. Moreover, you may make it transmit a recipe suitably from another apparatus via a dedicated line, for example.

  Next, a temperature control method in the temperature control system including the temperature control device according to the present embodiment will be described.

  2, 4, 6, 8, and 10 are diagrams illustrating a state of the temperature control device 50 when the temperature control of the controlled device 12 is performed by the temperature control method according to the present embodiment. 3, 5, 7, and 9 show the first supply unit 30 (temperature sensor 34), the second supply unit 40 (temperature sensor 44), the tank 51 (temperature sensor 58), the set temperature, It is a graph which shows the time change of the temperature of the to-be-controlled device 12 in the time domain corresponding to FIG.2, FIG.4, FIG.6 and FIG. 8, respectively.

  2, 4, 6, 8, and 10, the white valve is closed and the black valve is open. FIG. 9 shows a time domain corresponding to FIG. 10 in addition to FIG.

  Hereinafter, a state (FIGS. 4 and 5) while the controlled device 12 is changed to a temperature T2 lower than the temperature T1 from a state where the controlled device 12 is controlled to the temperature T1 (FIGS. 3 and 4). ), The controlled device 12 is controlled to a temperature T2 (FIGS. 6 and 7), and then the controlled device 12 is being changed to a temperature T3 higher than the temperature T2 (FIG. 8). 9), the temperature control method when the controlled device 12 is controlled to the temperature T3 (FIGS. 9 and 10) will be described.

  First, in a state where the controlled device 12 is connected to the first supply unit 30 by the connection switching unit 55, the temperature of the fluid flowing through the controlled device 12 is controlled by the heater 53 so as to become the temperature T1. It is assumed that the device 12 is controlled to reach the temperature T1. At this time, the tank 51 is connected to the second supply unit 40 by the connection switching unit 55 and the temperature of the fluid stored in the tank 51 is controlled by the heater 54 so as to become the preliminary temperature T21. Note that the preliminary temperature T21 can be a temperature obtained by adding a temperature variation to the temperature T2, or a temperature closer to the temperature T2 than the temperature T1.

  As shown in FIG. 2, the valves V1 and V3 are opened while the valves V2, V4, V5, V7, and V9 of the connection switching unit 55 are closed. Accordingly, the controlled device 12 is connected to the supply port 37 of the first supply unit 30 via the first supply port side connection port G1, the supply flow path R1, and the controlled device inlet side connection port G5 of the connection switching unit 55. Connected to the inlet 15 of the flow path 14. Further, the outlet 16 of the flow channel 14 of the controlled device 12 is supplied to the first through the controlled device outlet side connection port G6, the return flow channel R3, and the first recovery port side connection port G3 of the connection switching unit 55. Connected to the recovery port 35 of the unit 30.

  As shown in FIG. 3, the set temperature of the fluid supplied to the controlled device 12 is set to a temperature T1. And in order to supply the fluid of the temperature T1 to the to-be-controlled device 12, the control part 60 adds the temperature fluctuation part by the heat exchange etc. in the flow path in the middle to the 1st supply part 30, for example. Request to supply. Then, the temperature T11 of the fluid supplied from the first supply unit 30 is adjusted to the temperature T1 by the heater 53, and the fluid whose temperature is adjusted to T1 is supplied to the controlled device 12.

  At the same time, the control unit 60 receives information about the next set temperature from the controlled device 12. As described above, it is assumed that the next set temperature is a temperature T2 lower than the temperature T1.

  As shown in FIG. 2, the valves V6, V8 are opened with the valves V2, V4, V5, V7, V9 of the connection switching unit 55 closed and the valves V1, V3 opened. As a result, the supply port 47 of the second supply unit 40 is connected to the inlet of the tank 51 via the second supply port side connection port G2, the supply flow paths R2, R6, and the tank inlet side connection port G7 of the connection switching unit 55. Connect to. Further, the outlet of the tank 51 is connected to the recovery port 45 of the second supply unit 40 via the tank outlet side connection port G8 of the connection switching unit 55, the return flow paths R8 and R4, and the second recovery port side connection port G4. Connecting.

  As shown in FIG. 3, in order to supply the fluid having the temperature T2 to the controlled device 12 later, the fluid having the preliminary temperature T21 is stored in the tank 51. And in order to supply the fluid of the preliminary temperature T21 to the tank 51, the control part 60 requests | requires supplying the fluid of the temperature T22 which added the temperature fluctuation part to the 2nd supply part 40. FIG. Then, the temperature T22 of the fluid supplied from the second supply unit 40 is adjusted to the temperature T21 by the heater 54, and the fluid whose temperature is adjusted to T21 is stored in the tank 51.

  In FIG. 3, an example in which T1 is 25 ° C., T11 is 20 ° C., T2 is −50 ° C. (see FIG. 5), T21 is −55 ° C., and T22 is −60 ° C. Show.

  Next, the controlled device 12 is connected to the second supply unit 40 via the tank 51 by the connection switching unit 55, and the fluid stored in the tank 51 is controlled to be supplied to the controlled device 12.

  As shown in FIG. 4, with the valves V2, V5, V7 of the connection switching unit 55 closed and V6 open, the valves V1, V3, V8 are closed and the valves V4, V9 are opened. At this time, the supply port 47 of the second supply unit 40 is connected to the inlet of the tank 51 via the second supply port side connection port G2, the supply flow paths R2, R6, and the tank inlet side connection port G7 of the connection switching unit 55. Is still connected. Further, the outlet of the tank 51 is connected to the flow path of the controlled device 12 via the tank outlet side connection port G8, the connection flow channel R9, the supply flow channels R2, R1, and the controlled device inlet side connection port G5 of the connection switching unit 55. 14 inlets 15 are connected. Then, the outlet 16 of the flow channel 14 of the controlled device 12 is supplied to the second through the controlled device outlet side connection port G6, the return flow channel R4, and the second recovery port side connection port G4 of the connection switching unit 55. Connected to the recovery port 45 of the unit 40.

  As shown in FIG. 5, in order to supply the fluid having the temperature T2 to the controlled device 12, the control unit 60 adds the temperature variation to the temperature T2 to the second supply unit 40 (see FIG. 7). ) To supply fluid. Then, the temperature of the fluid in the tank 51 gradually increases from the temperature T21 to the temperature T2, and the temperature of the controlled device 12 gradually decreases from the temperature T1 to the temperature T2. Further, at first, when the fluid returns from the controlled device 12, the temperature of the fluid supplied from the second supply unit 40 temporarily rises from the temperature T22 and exceeds the temperature T23, but thereafter the controlled device. As the temperature of 12 decreases, the temperature decreases so as to converge to the temperature T23.

  FIG. 5 shows an example in which T23 is −55 ° C. (see FIG. 7).

  The first supply unit 30 may be stopped, or the supply port 37 and the recovery port 35 of the first supply unit 30 are short-circuited by a bypass channel (not shown), and the first supply is performed at a temperature T11, for example. The operation of the unit 30 may be continued.

  Next, the controlled device 12 is connected to the second supply unit 40 via the connection switching unit 55 without going through the tank 51, and the temperature of the fluid flowing through the controlled device 12 is controlled to the temperature T2 by the heater 53. To do.

  As shown in FIG. 6, with the valves V1, V3, and V8 of the connection switching unit 55 closed and the valve V4 opened, the valves V6 and V9 are closed and the valve V2 is opened. Thus, the supply port 47 of the second supply unit 40 is controlled via the second supply port side connection port G2, the supply flow paths R2, R1, and the controlled device inlet side connection port G5 of the connection switching unit 55. Connect to the inlet 15 of the flow path 14 of the device 12. Further, the outlet 16 of the flow channel 14 of the controlled device 12 is supplied to the second via the controlled device outlet side connection port G6, the return flow channel R4, and the second recovery port side connection port G4 of the connection switching unit 55. It remains connected to the recovery port 45 of the unit 40.

  As shown in FIG. 7, the set temperature of the controlled device 12 remains set at the temperature T2. Then, the temperature T23 of the fluid supplied from the second supply unit 40 is adjusted to the temperature T2 by the heater 53, and the fluid whose temperature is adjusted to T2 is supplied to the controlled device 12.

  At the same time, the control unit 60 receives further information on the next set temperature from the controlled device 12. As described above, it is assumed that the next set temperature is a temperature T3 higher than the temperature T2.

  As shown in FIG. 6, the valves V5, V7 are opened with the valves V1, V3, V6, V8, V9 of the connection switching unit 55 closed and the valves V2, V4 opened. Thereby, the supply port 37 of the first supply unit 30 is connected to the inlet of the tank 51 via the first supply port side connection port G1, the supply flow paths R1, R5, and the tank inlet side connection port G7 of the connection switching unit 55. Connect to. Further, the outlet of the tank 51 is connected to the recovery port 35 of the first supply unit 30 via the tank outlet side connection port G8 of the connection switching unit 55, the return flow paths R7 and R3, and the first recovery port side connection port G3. Connecting.

  As shown in FIG. 7, in order to supply the fluid having the temperature T3 to the controlled device 12 later, the fluid having the preliminary temperature T31 is stored in the tank 51. And in order to supply the fluid of the preliminary temperature T31 to the tank 51, the control part 60 requests | requires supplying the fluid of the temperature T32 which added the temperature fluctuation part to the 1st supply part 30. FIG. Then, the temperature T32 of the fluid supplied from the first supply unit 30 is adjusted to the temperature T31 by the heater 54, and the fluid whose temperature is adjusted to T31 is stored in the tank 51.

  FIG. 7 shows an example in which T3 is −5 ° C. (see FIG. 9), T31 is 0 ° C., and T32 is −5 ° C.

  Next, the controlled device 12 is connected to the first supply unit 30 via the tank 51 by the connection switching unit 55, and the fluid stored in the tank 51 is controlled to be supplied to the controlled device 12.

  As shown in FIG. 8, with the valves V1, V6, V8 of the connection switching unit 55 closed and V5 open, the valves V2, V4, V7 are closed and the valves V3, V9 are opened. At this time, the supply port 37 of the first supply unit 30 is connected to the inlet of the tank 51 via the first supply port side connection port G1, the supply flow paths R1, R5, and the tank inlet side connection port G7 of the connection switching unit 55. Is still connected. Further, the outlet of the tank 51 is connected to the flow path of the controlled device 12 via the tank outlet side connection port G8, the connection flow channel R9, the supply flow channels R2, R1, and the controlled device inlet side connection port G5 of the connection switching unit 55. 14 inlets 15 are connected. Then, the outlet 16 of the flow channel 14 of the controlled device 12 is supplied to the first through the controlled device outlet side connection port G6, the return flow channel R3, and the first recovery port side connection port G3 of the connection switching unit 55. Connected to the recovery port 35 of the unit 30.

  As shown in FIG. 9, in order to supply the fluid having the temperature T3 to the controlled device 12, the control unit 60 supplies the fluid having the temperature T33 obtained by adding the temperature variation to the temperature T3 to the first supply unit 30. Request to do. Then, the temperature of the fluid in the tank 51 gradually decreases from the temperature T31 to the temperature T3, and the temperature of the controlled device 12 gradually increases from the temperature T2 to the temperature T3. In addition, at first, when the fluid returns from the controlled device 12, the temperature of the fluid supplied from the first supply unit 30 once decreases from the temperature T32 and falls below the temperature T33, but thereafter the controlled device. As the temperature of 12 rises, it rises so as to converge to the temperature T33.

  FIG. 9 shows an example in which T33 is −10 ° C.

  The second supply unit 40 may be stopped, or the supply port 47 and the recovery port 45 of the second supply unit 40 are short-circuited by a bypass channel (not shown), and the second supply is performed at a temperature T23, for example. The operation of the unit 40 may be continued.

  Next, the controlled device 12 is connected to the first supply unit 30 without going through the tank 51 by the connection switching unit 55, and the temperature of the fluid flowing through the controlled device 12 is controlled to the temperature T3 by the heater 53. To do.

  As shown in FIG. 10, with the valves V2, V4, V6, V7, V8 of the connection switching unit 55 closed and the valve V3 opened, the valves V5, V9 are closed and the valve V1 is opened. Accordingly, the controlled device 12 is connected to the supply port 37 of the first supply unit 30 via the first supply port side connection port G1, the supply flow path R1, and the controlled device inlet side connection port G5 of the connection switching unit 55. Connected to the inlet 15 of the flow path 14. Further, the outlet 16 of the flow channel 14 of the controlled device 12 is supplied through the controlled device outlet side connection port G6 of the connection switching unit 55, the return flow channel R3, and the first recovery port side connection port G3. It remains connected to the recovery port 35 of the unit 30.

  As shown in FIG. 9, the set temperature of the controlled device 12 remains set at the temperature T3. Then, the temperature T33 of the fluid supplied from the first supply unit 30 is adjusted to the temperature T3 by the heater 53, and the fluid whose temperature is adjusted to T3 is supplied to the controlled device 12.

  As described above, according to the temperature control method according to the present embodiment, the fluid having the preliminary temperature is stored in the tank in advance before the temperature of the fluid flowing through the controlled device is changed. In the change, first, the fluid stored in the tank is supplied to the controlled device. Thereby, a large cooling capacity or heating capacity is not required for the cooling means or the heating means, and the temperature can be controlled with high speed and high accuracy when the temperature of the controlled device is changed.

  In the present embodiment, the temperature control method in which the fluid having the preliminary temperature is stored in the tank 51 in advance before changing the temperature of the fluid flowing through the controlled device 12 has been described. However, as shown in FIG. 10, in a steady operation state in which the temperature of the fluid flowing through the controlled device 12 is not changed, the supply device 20 and the controlled device 12 are connected via the temperature control device 50 according to the present embodiment. Thus, the temperature of the fluid can be controlled with high accuracy by the heater 53 immediately before the fluid is supplied to the controlled device 12.

Therefore, since the supply device can be installed at a location away from the controlled device, the installation area of the controlled device can be reduced. Alternatively, when the controlled device is installed inside the clean room, the supply device can be installed outside the clean room, so even if the temperature is controlled by a refrigerator having a sliding member, for example, Can be kept clean. Furthermore, since it is not necessary to precisely control the temperature of the fluid supplied from the supply device, the temperature of the controlled device can be controlled with high accuracy, and the cost of the supply device can be reduced.
(Modification of the first embodiment)
Next, a temperature control method in a temperature control system including a temperature control device according to a modification of the first embodiment of the present invention will be described.

  The temperature control method in the temperature control system including the temperature control device according to the present modification is the first implementation in that the temperature of the fluid stored in the tank is determined using the predetermined high temperature side preliminary temperature and the low temperature side preliminary temperature. This is different from the temperature control method in the temperature control system including the temperature control device according to the embodiment. Therefore, since the temperature control system in this modification has the same structure as the temperature control system in the first embodiment, the description thereof is omitted.

  11, 12, 13, and 14 show the first supply unit 30 (temperature sensor 34), the second supply unit 40 (temperature sensor 44), the tank 51 (temperature sensor 58), the set temperature, and the controlled object. It is a graph which shows the time change of the temperature of the apparatus 12 in the time domain corresponding to FIG.2, FIG.4, FIG.6 and FIG. 8, respectively. 14 shows the time domain corresponding to FIG. 10 in addition to FIG.

  Hereinafter, a state (FIGS. 4 and 12) while the controlled device 12 is being changed to a temperature T2 lower than the temperature T1 from a state where the controlled device 12 is controlled to the temperature T1 (FIGS. 2 and 11). ), The controlled device 12 is controlled to a temperature T2 (FIGS. 6 and 13), and then the controlled device 12 is being changed to a temperature T3 higher than the temperature T2 (FIG. 8). 14), a temperature control method for controlling the controlled device 12 to the temperature T3 (FIGS. 10 and 14) will be described.

  First, it is assumed that the temperature of the fluid flowing to the controlled device 12 is controlled by the heater 53 so as to become the temperature T1 in a state where the controlled device 12 is connected to the first supply unit 30 by the connection switching unit 55. .

  Here, in the present modification, it is assumed that the next set temperature T2 is not determined. In this case, when the temperature T1 is relatively high, the temperature of the fluid stored in the tank 51 is controlled to be relatively low. Further, when the temperature T1 is relatively low, the temperature of the fluid stored in the tank 51 is controlled to be a relatively high temperature.

  In this modification, a predetermined threshold temperature Tth may be set. At this time, when the temperature T1 is higher than the threshold temperature Tth, the temperature of the fluid stored in the tank 51 is controlled to be the low temperature side preliminary temperature Tpl that is lower than the threshold temperature Tth. When the temperature T1 is lower than the threshold temperature Tth, control is performed so that the temperature of the fluid stored in the tank 51 becomes the high temperature side preliminary temperature Tph that is higher than the threshold temperature Tth.

  Hereinafter, it is assumed that the temperature T1 is higher than the threshold temperature Tth. At this time, the tank 51 is connected to the second supply unit 40 by the connection switching unit 55, and the temperature of the fluid stored in the tank 51 is controlled by the heater 54 so as to become the low temperature side preliminary temperature Tpl. The switching state of the valve at this time is the same as the switching state of the valve in FIG.

  As shown in FIG. 11, a fluid having a temperature Tpl is stored in the tank 51. And in order to supply the fluid of temperature Tpl to the tank 51, the control part 60 requests | requires supplying the fluid of the temperature T22 which added the temperature fluctuation part to the 2nd supply part 40. FIG. Then, the temperature T22 of the fluid supplied from the second supply unit 40 is adjusted to the temperature Tpl by the heater 54, and the fluid whose temperature is adjusted to Tpl is stored in the tank 51.

  FIG. 11 shows an example in which T1 is 20 ° C., Tth is 0 ° C., Tph is 30 ° C., Tpl is −60 ° C., and T22 is −65 ° C.

  Thereafter, when the next temperature T2 is determined, the controlled device 12 is connected to the second supply unit 40 via the tank 51 by the connection switching unit 55, and the fluid stored in the tank 51 is supplied to the controlled device 12. To be controlled. The switching state of the valve at this time is the same as the switching state of the valve in FIG.

  As shown in FIG. 12, in order to supply the fluid having the temperature T2 to the controlled device 12, the control unit 60 adds the temperature variation to the temperature T2 to the second supply unit 40 (see FIG. 13). ) To supply fluid. Then, the temperature of the fluid in the tank 51 gradually increases from the temperature Tpl to the temperature T2, and the temperature of the controlled device 12 gradually decreases from the temperature T1 to the temperature T2. Further, at first, when the fluid returns from the controlled device 12, the temperature of the fluid supplied from the second supply unit 40 temporarily rises from the temperature T22 and exceeds the temperature T23, but thereafter the controlled device. As the temperature of 12 decreases, the temperature decreases so as to converge to the temperature T23.

  FIG. 12 shows an example in which T23 is −35 ° C. (see FIG. 13).

  Next, the controlled device 12 is connected to the second supply unit 40 via the connection switching unit 55 without going through the tank 51, and the temperature of the fluid flowing through the controlled device 12 is controlled to the temperature T2 by the heater 53. To do. The switching state of the valve at this time is the same as the switching state of the valve in FIG.

  As shown in FIG. 13, the set temperature of the controlled device 12 remains set at the temperature T2. Then, the temperature T23 of the fluid supplied from the second supply unit 40 is adjusted to the temperature T2 by the heater 53, and the fluid whose temperature is adjusted to T2 is supplied to the controlled device 12.

  At this time, it is assumed that the next set temperature T3 has not been determined. Further, the temperature T2 is lower than the threshold temperature Tth. Accordingly, the tank 51 is connected to the first supply unit 30 by the connection switching unit 55, and the temperature of the fluid stored in the tank 51 is controlled by the heater 54 so as to become the high temperature side preliminary temperature Tph. The switching state of the valve at this time is the same as the switching state of the valve in FIG.

  As shown in FIG. 13, a fluid having a temperature Tph is stored in the tank 51. And in order to supply the fluid of temperature Tph to the tank 51, the control part 60 requests | requires supplying the fluid of the temperature T32 which added the temperature fluctuation part to the 1st supply part 30. FIG. Then, the temperature T32 of the fluid supplied from the first supply unit 30 is adjusted to the temperature Tph by the heater 54, and the fluid whose temperature is adjusted to Tph is stored in the tank 51.

  FIG. 13 shows an example in which T32 is 25 ° C.

  After that, when the next temperature T3 is determined, the controlled device 12 is connected to the first supply unit 30 via the tank 51 by the connection switching unit 55, and the fluid stored in the tank 51 is supplied to the controlled device 12. To be controlled. The switching state of the valve at this time is the same as the switching state of the valve in FIG.

  As shown in FIG. 14, in order to supply the fluid having the temperature T3 to the controlled device 12, the control unit 60 supplies the fluid having the temperature T33 obtained by adding the temperature variation to the temperature T3 to the first supply unit 30. Request to do. Then, the temperature of the fluid in the tank 51 gradually decreases from the temperature Tph to the temperature T3, and the temperature of the controlled device 12 gradually increases from the temperature T2 to the temperature T3. In addition, at first, when the fluid returns from the controlled device 12, the temperature of the fluid supplied from the first supply unit 30 once decreases from the temperature T32 and falls below the temperature T33, but thereafter the controlled device. As the temperature of 12 rises, it rises so as to converge to the temperature T33.

  FIG. 14 shows an example in which T3 is 15 ° C. and T33 is 10 ° C.

  Next, the controlled device 12 is connected to the first supply unit 30 without going through the tank 51 by the connection switching unit 55, and the temperature of the fluid flowing through the controlled device 12 is controlled to the temperature T3 by the heater 53. To do. The switching state of the valve at this time is the same as the switching state of the valve in FIG.

  As shown in FIG. 14, the set temperature of the controlled device 12 remains set at the temperature T3. Then, the temperature T33 of the fluid supplied from the first supply unit 30 is adjusted to the temperature T3 by the heater 53, and the fluid whose temperature is adjusted to T3 is supplied to the controlled device 12.

  Also in this modified example, before changing the temperature of the fluid flowing through the controlled device, the fluid having the preliminary temperature is stored in the tank in advance. In the change, first, the fluid stored in the tank is supplied to the controlled device. Thereby, a large cooling capacity or heating capacity is not required for the cooling means or the heating means, and the temperature can be controlled with high speed and high accuracy when the temperature of the controlled device is changed.

Moreover, in this modification, the temperature of the fluid stored in a tank is determined using predetermined high temperature side preliminary temperature and low temperature side preliminary temperature. As a result, even when the next set temperature has not been determined, a fluid having a temperature different from the current temperature can be stored in the tank in advance, so that the temperature of the controlled device can be changed quickly and accurately. The temperature can be controlled.
(Second Embodiment)
Next, a temperature control system including a temperature control device according to the second embodiment of the present invention will be described.

  In the temperature control system 10a including the temperature control device 50a according to the present embodiment, the position where the heaters 53 and 54 are provided in the temperature control device 50a is the temperature including the temperature control device 50 according to the first embodiment. Different from the control system 10. Therefore, portions of the temperature control system 10a in the present embodiment other than the heaters 53 and 54 of the temperature control device 50a are the same as the heater 53 of the temperature control device 50 in the temperature control system 10 in the first embodiment. Since it has the same structure as that of parts other than 54, description is abbreviate | omitted.

  FIG. 15 is a diagram showing a configuration of a temperature control system 10a including a temperature control device 50a according to the present embodiment.

  As shown in FIG. 15, the heater 53 is provided on the first supply unit 30 side of the first supply port side connection port G1. That is, the heater 53 is provided in the middle of the flow path where the fluid flows from the first supply unit 30 to the connection switching unit 55a, and adjusts the temperature of the fluid flowing from the first supply unit 30 to the connection switching unit 55a. Is for.

  The temperature sensor 57 is provided on the controlled device 12 side of the controlled device inlet side connection port G5, as in the first embodiment.

  The heater 54 is provided on the second supply unit 40 side of the second supply port side connection port G2. That is, the heater 54 is provided in the middle of the flow path through which the fluid flows from the second supply unit 40 to the connection switching unit 55a, and adjusts the temperature of the fluid flowing from the second supply unit 40 to the connection switching unit 55a. Is for.

  The temperature sensor 58 is provided on the tank 51 side of the tank inlet side connection port G7, as in the first embodiment.

  The temperature control method in the temperature control system including the temperature control device according to the present embodiment is a temperature including the temperature control device according to the first embodiment except that the positions where the heaters 53 and 54 are provided are different. The temperature control method in the control system can be the same.

  That is, the temperature control method for changing the temperature of the fluid flowing through the controlled device 12 from the temperature T1 to the temperature T2 lower than the temperature T1, and then changing from the temperature T2 to the temperature T3 higher than the temperature T2 is shown in FIG. It is the same as that of the temperature control method demonstrated using FIGS.

  However, in the process described with reference to FIGS. 6 and 7, the temperature T <b> 23 of the fluid supplied from the second supply unit 40 is adjusted to the temperature T <b> 2 by the heater 54 instead of the heater 53. Further, the temperature T32 of the fluid supplied from the first supply unit 30 is adjusted to the temperature T31 by the heater 53 instead of the heater 54.

  Also in this embodiment, before changing the temperature of the fluid flowing through the controlled device, the fluid having the preliminary temperature is stored in the tank in advance. In the change, first, the fluid stored in the tank is supplied to the controlled device. Thereby, a large cooling capacity or heating capacity is not required for the cooling means or the heating means, and the temperature can be controlled with high speed and high accuracy when the temperature of the controlled device is changed.

  In the present embodiment, heaters 53 and 54 are provided on the supply flow paths R1 and R2, respectively. Therefore, even when a malfunction occurs in one of the heaters 53 and 54, the temperature of the fluid flowing through the controlled device can be controlled with high accuracy using the other heater.

  The preferred embodiments of the present invention have been described above, but the present invention is not limited to such specific embodiments, and various modifications can be made within the scope of the gist of the present invention described in the claims. Can be modified or changed.

  In the embodiment, the case where the controlled apparatus 12 is a semiconductor inspection apparatus that performs an electrical inspection of a semiconductor wafer has been described. However, the present invention is not limited to this. For example, it can be used for temperature control of a semiconductor wafer in a semiconductor wafer manufacturing process. In such a process, the place where the temperature control device is installed is often an environment where an air-cooled or water-cooled refrigerator such as a clean room or a vacuum device cannot be used, and is particularly suitable.

  In the embodiment, the adjusting unit (heater) in the temperature control device is provided in two places in the middle of the flow path where the fluid flows from the connection switching section to the tank and in the middle of the flow path where the fluid flows from the connection switching section to the controlled device. The case and the case where the first supply port side connection port G1 is provided at two locations on the first supply unit 30 side and the second supply port side connection port G2 on the second supply unit 40 side have been described. It is not restricted to this, You may provide in the flow path in a connection switching part. For example, a flow path that flows from the first supply section in the connection switching section to the controlled apparatus, a flow path that flows from the second supply section to the controlled apparatus, a flow path that flows from the first supply section to the tank, and a second supply You may provide an adjustment part (heater) in four places of the flow path which flows into a tank from a part.

  In the embodiment, an example in which a pump is provided in each of the first supply unit and the second supply unit has been described. However, the present invention is not limited to this. For example, you may provide a pump in the flow path connected with the supply port of the 1st supply part of a temperature control apparatus, and the flow path connected with the supply port of a 2nd supply part.

  In the embodiment, the case where the controlled device is connected via the first supply unit or the second supply unit and the storage unit when the controlled device and the storage unit are connected has been described. I can't. For example, when the controlled device and the storage unit are connected, the fluid is circulated between the controlled device and the storage unit without passing the controlled device through either the first supply unit or the second supply unit. The switching unit may be configured to do so.

  In the embodiment, the case where the controlled device 12 is controlled to be the set temperature by controlling the temperature of the fluid flowing through the controlled device by the heater to be the set temperature has been described. However, the present invention is not limited to this. Absent. For example, the heater may be directly controlled based on the temperature of the controlled device 12. Further, the heater may be controlled based on the temperature of the fluid entering the controlled device 12 and the temperature of the fluid exiting from the controlled device 12.

DESCRIPTION OF SYMBOLS 10 Temperature control system 12 Controlled apparatus 20 Supply apparatus 30 1st supply part 31 Pump 32 Refrigerator 33 Heater 34 Temperature sensor 40 2nd supply part 41 Pump 42 Refrigerator 43 Heater 44 Temperature sensor 50 Temperature control apparatus 51 Tank 53 , 54 heater 55 connection switching unit 57, 58 temperature sensor 60 control unit

Claims (10)

Provided between a controlled device whose temperature is controlled by the supplied fluid and a supply device including a first supply unit and a second supply unit that supply the temperature-controlled fluid to the controlled device; A temperature control device for controlling the temperature of a fluid supplied to the controlled device,
A reservoir for storing fluid;
Connecting the controlled device with one of the first supply unit and the second supply unit and connecting the storage unit with the other of the first supply unit and the second supply unit, or A connection switching unit that switches a connection so as to connect the controlled device to the storage unit;
Having a temperature control device.   The connection between the controlled device and the storage unit is characterized in that the controlled device is connected to the first supply unit or the second supply unit via the storage unit. Temperature control device. A first adjusting unit that adjusts the temperature of the fluid flowing from the connection switching unit to the controlled device;
A second adjustment unit for adjusting the temperature of the fluid flowing from the connection switching unit to the storage unit;
The temperature control device according to claim 1, comprising: A first adjusting unit for adjusting a temperature of a fluid flowing from the first supply unit to the connection switching unit;
The temperature control device according to claim 1, further comprising: a second adjustment unit that adjusts a temperature of a fluid flowing from the second supply unit to the connection switching unit. A control unit for controlling the operation of the connection switching unit, the operation of the first adjustment unit, and the operation of the second adjustment unit;
The controller is
When changing the temperature of the fluid supplied to the controlled device from the first temperature to the second temperature,
Controlling so that the temperature of the fluid supplied to the controlled device by the first adjusting unit becomes the first temperature while the controlled device is connected to the first supplying unit by the connection switching unit. The connection switching unit connects the storage unit to the second supply unit, and the second adjustment unit controls the temperature of the fluid stored in the storage unit to be a preliminary temperature. And
The connection switching unit connects the controlled device to the second supply unit via the storage unit, and controls the fluid stored in the storage unit to be supplied to the controlled device. In addition,
The connection switching unit connects the controlled device to the second supply unit without going through the storage unit, and the temperature of the fluid supplied to the controlled device by the first adjustment unit is the second The temperature control device according to claim 3, wherein the temperature control device is controlled so as to reach a temperature. The controller is
A threshold temperature, a high temperature side preliminary temperature higher than the threshold temperature, and a low temperature side preliminary temperature lower than the threshold temperature are determined in advance,
When controlling the temperature of the fluid supplied to the controlled device to be the first temperature,
If the first temperature is higher than the threshold temperature, the temperature of the fluid stored in the storage unit is controlled to be the low temperature side preliminary temperature,
If the first temperature is lower than the threshold temperature, the temperature of the fluid stored in the storage unit is controlled to be the high temperature side preliminary temperature. The temperature control device described.   The temperature control device according to any one of claims 1 to 6, wherein the first supply unit or the second supply unit includes a refrigerator for cooling a supplied fluid. Provided between a controlled device whose temperature is controlled by the supplied fluid and a supply device including a first supply unit and a second supply unit that supply the temperature-controlled fluid to the controlled device; A temperature control method in a temperature control device for controlling the temperature of a fluid supplied to the controlled device,
When changing the temperature of the fluid supplied to the controlled device from the first temperature to the second temperature,
In a state where the controlled device is connected to the first supply unit by the connection switching unit, the temperature of the fluid supplied to the controlled device by the first adjusting unit is controlled to be the first temperature. A storage unit for storing fluid is connected to the second supply unit by the connection switching unit and the temperature of the fluid stored in the storage unit is controlled to be a preliminary temperature by the second adjustment unit. And
The connection switching unit connects the controlled device to the second supply unit via the storage unit, and controls the fluid stored in the storage unit to be supplied to the controlled device. In addition,
The connection switching unit connects the controlled device to the second supply unit without going through the storage unit, and the temperature of the fluid supplied to the controlled device by the first adjustment unit is the second A temperature control method that controls the temperature. A threshold temperature, a high temperature side preliminary temperature higher than the threshold temperature, and a low temperature side preliminary temperature lower than the threshold temperature are determined in advance,
When controlling the temperature of the fluid supplied to the controlled device to be the first temperature,
If the first temperature is higher than the threshold temperature, the temperature of the fluid stored in the storage unit is controlled to be the low temperature side preliminary temperature,
The control unit according to claim 8, wherein if the first temperature is lower than the threshold temperature, the temperature of the fluid stored in the storage unit is controlled to be the high temperature side preliminary temperature. The temperature control method described. A controlled device whose temperature is controlled by the supplied fluid;
A supply device including a first supply unit and a second supply unit for supplying a temperature-controlled fluid to the controlled device;
A temperature control device that is provided between the controlled device and the supply device and controls the temperature of the fluid supplied to the controlled device;
The temperature control device
A reservoir for storing fluid;
Connecting the controlled device with one of the first supply unit and the second supply unit and connecting the storage unit with the other of the first supply unit and the second supply unit, or A connection switching unit that switches a connection so as to connect the controlled device to the storage unit;
Having a temperature control system.

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