CN116557716A - Plane three-degree-of-freedom macro-micro positioning platform and control method thereof - Google Patents
Plane three-degree-of-freedom macro-micro positioning platform and control method thereof Download PDFInfo
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
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- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
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Abstract
A plane three-degree-of-freedom macro-micro positioning platform comprises a base and: the macro-moving assembly is arranged on the base and comprises a macro-moving platform, four macro-moving branched chains and four macro-linear driving pieces, wherein the macro-moving branched chains are connected to the base in a sliding manner, and the four macro-moving branched chains are connected to four corners of the macro-moving platform through macro-spring pieces respectively; the four macro linear driving parts respectively act on the four macro branched chains; the micro-motion assembly is arranged on the macro-motion platform and comprises a micro-motion platform, four micro-motion branched chains and four micro-linear driving pieces, wherein the micro-motion branched chains are connected to the macro-motion platform in a sliding manner, and the four micro-motion branched chains are connected to four corners of the micro-motion platform through micro-spring pieces respectively; the four micro linear driving parts act on the four micro branched chains respectively, so that the micro platform can move transversely and rotate transversely, has multiple degrees of freedom, and simultaneously meets the performance requirements of large stroke and high precision. The disclosure also provides a control method of the planar three-degree-of-freedom macro-micro positioning platform.
Description
Technical Field
The invention relates to the technical field of precision positioning equipment, in particular to a plane three-degree-of-freedom macro-micro positioning platform and a control method of the plane three-degree-of-freedom macro-micro positioning platform.
Background
At present, the motion precision of high-end equipment gradually develops to nanometer level, and an ultra-precise motion platform plays an important role in the fields of semiconductor processing, a photoetching machine, an atomic force microscope, a micro-electromechanical system, biomedical engineering and the like. The compliant mechanism transmits force and motion through flexible deformation, so that the flexible mechanism has the advantages of no clearance, no friction, high precision and the like. Along with the continuous expansion of the application field, the flexible precision positioning platform is forcefully pushed to develop towards higher precision.
At present, most of three-freedom precision platforms in a plane adopt voice coil motor driving or piezoelectric ceramic driving, and although the voice coil motor driving obtains larger stroke, the mechanism has low rigidity, is easily influenced by external environment and cannot realize nano-scale positioning. The flexible mechanism driven by the piezoelectric ceramic has high precision, but can only reach a hundred-micrometer-scale stroke, thereby severely limiting the application range of the precision motion platform.
In order to solve the problem, chinese patent CN211343699U discloses a three-degree-of-freedom positioning platform for a voice coil motor and a flexible guide mechanism, which can reach a millimeter-scale stroke, but because of the small thrust of the voice coil motor, such precision motion platform has low rigidity, low bandwidth and poor repeated positioning accuracy, which results in difficulty in realizing nanoscale positioning of the mechanism.
Chinese patent CN202448118U discloses a two-degree-of-freedom long-stroke macro-micro positioning platform, which comprises a large-stroke macro platform driven by a voice coil motor and a micro platform driven by piezoelectric ceramics. The positioning platform realizes millimeter-scale travel and nanoscale positioning of the precise movement mechanism, but the mechanism adopts non-redundant driving, and the driving mechanism can generate serious heat after long-time working. In addition, the mechanism has only two degrees of freedom, and the rotation adjustment of the tail end platform cannot be realized.
Therefore, how to design a precision motion platform with a large stroke and high precision is a problem to be solved.
Disclosure of Invention
The invention aims to provide a precise motion platform which can move transversely and rotate transversely, has a plurality of degrees of freedom and simultaneously meets the performance requirements of large stroke and high precision.
In order to solve the above problems, the present invention provides a planar three-degree-of-freedom macro-micro positioning platform, which comprises a base, and:
the macro-moving assembly is arranged on the base and comprises a macro-moving platform, four macro-moving branched chains and four macro-linear driving pieces, wherein the macro-moving branched chains are connected to the base in a sliding manner and have X-axis freedom degree and Y-axis freedom degree, the four macro-moving branched chains are distributed in a central symmetry manner by taking the macro-moving platform as a center, and output ends of the four macro-moving branched chains are connected to four corners of the macro-moving platform through macro spring pieces respectively; the four macro linear driving parts respectively act on the input ends of the four macro movable branched chains to drive the macro movable platform to move along the X axis or move along the Y axis or rotate around the Z axis;
the micro-motion assembly is arranged on the macro-motion platform and comprises a micro-motion platform, four micro-motion branched chains and four micro-linear driving pieces, wherein the micro-motion branched chains are connected to the macro-motion platform in a sliding manner and have X-axis freedom degree and Y-axis freedom degree, the four micro-motion branched chains are symmetrically distributed in a center by taking the micro-motion platform as a center, and output ends of the four micro-motion branched chains are connected to four corners of the micro-motion platform through micro-spring pieces respectively; the four micro linear driving parts respectively act on the input ends of the four micro branched chains to drive the micro platform to move along the X axis or move along the Y axis or rotate around the Z axis;
the driving precision of the micro linear driving piece to the micro moving platform is higher than that of the macro linear driving piece to the macro moving platform.
According to the scheme, the output ends of the macro-moving branched chains are connected to four corners of the macro-moving platform, and the macro-driving part acts on the input ends of the macro-moving branched chains, so that the macro-moving branched chains have the X-axis freedom degree and the Y-axis freedom degree, the macro-moving platform can be driven to move along the X-axis or move along the Y-axis or rotate around the Z-axis under the action of the macro-driving part, and the performance requirement of the macro-moving platform on a large stroke is realized; secondly, through connecting the output of micro-motion branched chain to the four corners of micro-motion platform, act on micro-drive spare on the input of micro-motion branched chain, because micro-motion branched chain has X axial degree of freedom and Y axial degree of freedom, consequently can drive micro-motion platform along X axial movement or along Y axial movement or rotate around Z axle under micro-drive spare's effect, realize micro-motion platform's high accuracy performance requirement. Compared with the prior art, the scheme solves the contradiction between the motion range and the motion precision of the flexible mechanism, the macro-motion platform can realize large-range motion, and the micro-motion platform can realize high-precision displacement control, so that the positioning error of the macro-motion platform is effectively compensated; in addition, the translational decoupling is realized by adopting a redundant driving mode, so that the motion coupling is effectively reduced, and the motion control is easier.
Preferably, the four macro linear driving parts are connected to the base and correspond to the four macro branched chains one by one, wherein two macro linear driving parts which are distributed diagonally are arranged along the X axis, and the other two macro linear driving parts which are distributed diagonally are arranged along the Y axis; the four micro-linear driving pieces are connected to the macro-moving platform and correspond to the four micro-moving branched chains one by one in position, wherein two micro-linear driving pieces which are distributed diagonally are arranged along the X axial direction, and the other two micro-linear driving pieces which are distributed diagonally are arranged along the Y axial direction, so that when the two macro-linear driving pieces which are arranged along the X axial direction stretch, the macro-moving branched chains drive the macro-moving platform to move along the X axial direction; when two macro linear driving pieces arranged along the X axis extend and retract, the macro branched chain drives the macro platform to move along the X axis; when the four macro linear driving pieces stretch out and draw back at the same time, the macro movable platform can be driven to rotate around the X axis; the micro linear driving piece drives the micro platform in the same way.
Preferably, the four macro linear driving members are a first voice coil motor and a third voice coil motor arranged along the X axis direction, and a second voice coil motor and a fourth voice coil motor arranged along the Y axis direction; the stators of the four macro linear driving elements are respectively and fixedly connected to the base, and the movers of the four macro linear driving elements are respectively connected to the input ends of the corresponding macro movable branched chains; the four micro-linear driving parts are respectively fixedly connected to the macro-motion platform, and the deformation parts of the four micro-linear driving parts are respectively connected to the input ends of corresponding micro-motion branched chains. The voice coil motor has a larger stroke, and can meet the requirement of a macro-moving platform on a large stroke; the piezoelectric ceramic has nano-scale precision, and can meet the high-precision requirement of the micro-motion platform.
Preferably, the macro-moving branched chain comprises a first sliding table and a second sliding table, the first sliding table is connected with the base in a sliding manner in the transverse direction, the second sliding table is connected with the first sliding table in a sliding manner in the transverse direction, and the sliding directions of the first sliding table and the second sliding table are mutually perpendicular; the macro linear driving piece is connected with and acts on the first sliding table, and the second sliding table is connected with the macro spring piece, so that each macro movable branched chain has X-axis freedom degree and Y-axis freedom degree relative to the base.
Preferably, the micro-motion branched chain comprises a first sliding joint and a second sliding joint, the first sliding joint is movably connected with the macro-motion platform along the transverse direction, the second sliding joint is movably connected with the first sliding joint along the transverse direction, and the moving directions of the first sliding joint and the second sliding joint are mutually perpendicular; the micro linear driving piece is connected with and acts on the first sliding joint, and the second sliding joint is connected with the micro spring piece, so that each micro branched chain has X-axis freedom degree and Y-axis freedom degree relative to the macro moving platform.
Preferably, the front side, the left side and the right side of the micro-motion platform are respectively provided with a reflecting mirror, the front side, the left side and the right side of the base are respectively provided with a laser displacement sensor, the laser displacement sensor on the front side of the base is arranged towards the reflecting mirror on the front side of the micro-motion platform, the laser displacement sensor on the left side of the base is arranged towards the reflecting mirror on the left side of the micro-motion platform, and the laser displacement sensor on the right side of the base is arranged towards the reflecting mirror on the right side of the micro-motion platform, so that the displacement or rotation states of the three reflecting mirrors are respectively detected in real time through the three laser displacement sensors.
Preferably, the above solution further comprises a controller electrically connected to the macro linear driving member, the micro linear driving member, and the laser displacement sensor.
The invention also provides a control method of the plane three-degree-of-freedom macro-micro positioning platform, which is applied to the positioning platform and comprises the following steps:
the X-axis displacement of the macro-motion platform is realized by controlling the first voice coil motor and the third voice coil motor, and then the X-axis displacement of the micro-motion platform is realized by controlling the first piezoelectric ceramic and the third piezoelectric ceramic; or alternatively
The Y-axis displacement of the macro-motion platform is realized by controlling the second voice coil motor and the fourth voice coil motor, and the left-right displacement of the micro-motion platform is realized by controlling the second piezoelectric ceramic and the fourth piezoelectric ceramic; or alternatively
The method comprises the steps of firstly controlling a first voice coil motor, a second voice coil motor, a third voice coil motor and a fourth voice coil motor to stretch simultaneously so as to realize the rotation of a macro motion platform around a Z axis, and then controlling a first piezoelectric ceramic, a second piezoelectric ceramic, a third piezoelectric ceramic and a fourth piezoelectric ceramic so as to realize the rotation of a micro motion platform around the Z axis;
preferably, the controller performs feedback adjustment on the operation states of the first voice coil motor, the second voice coil motor, the third voice coil motor, the fourth voice coil motor, the first piezoelectric ceramic, the second piezoelectric ceramic, the third piezoelectric ceramic and the fourth piezoelectric ceramic based on PID control according to the received feedback signals of the three laser displacement sensors.
Drawings
FIG. 1 is an overall isometric view of a planar three degree of freedom macro-micro positioning platform;
FIG. 2 is a schematic diagram of a macro-motion assembly of a planar three degree of freedom macro-micro positioning platform;
FIG. 3 is a schematic diagram of a micro-motion assembly of a planar three degree of freedom macro-micro positioning platform.
The reference numerals are used to describe the components,
1. a base; 11. a slide; 2. a macro platform; 21. a macro leaf spring; 3. macro-branched chains; 31. a first sliding table; 32. a second sliding table; 4. a macro linear drive; 5. a micro-motion platform; 51. a micro-spring piece; 52. a reflecting mirror; 6. micro branched chain; 61. a first sliding joint; 62. a second sliding joint; 7. a micro linear driving member; 8. a laser displacement sensor.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. It should be further noted that, in the embodiments of the present invention, all directional indications (such as up, down, left, right, front, back, inner, and outer) are merely used to explain the relative positional relationship, movement conditions, etc. between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indication is correspondingly changed.
Example 1
Referring to fig. 1-3, a planar three-degree-of-freedom macro-micro positioning platform provided in embodiment 1 of the present invention includes a base 1, and:
the macro-moving assembly is arranged on the base 1 and comprises a macro-moving platform 2, four macro-moving branched chains 3 and four macro-linear driving pieces 4, wherein the macro-moving branched chains 3 are connected to the base 1 in a sliding manner and have X-axis freedom and Y-axis freedom, the four macro-moving branched chains 3 are distributed in a central symmetry manner by taking the macro-moving platform 2 as a center, and output ends of the four macro-moving branched chains 3 are respectively connected to four corners of the macro-moving platform 2 through macro spring pieces 21; the four macro linear driving parts 4 respectively act on the input ends of the four macro movable branched chains 3 to drive the macro movable platform 2 to move along the X axis or move along the Y axis or rotate around the Z axis;
the micro-motion assembly is arranged on the macro-motion platform 2 and comprises a micro-motion platform 5, four micro-motion branched chains 6 and four micro-linear driving pieces 7, wherein the micro-motion branched chains 6 are connected to the macro-motion platform 2 in a sliding manner and have X-axis freedom degree and Y-axis freedom degree, the four micro-motion branched chains 6 are distributed in a central symmetry manner by taking the micro-motion platform 5 as a center, and output ends of the four micro-motion branched chains 6 are connected to four corners of the micro-motion platform 5 through micro-spring pieces 51 respectively; the four micro linear driving pieces 7 respectively act on the input ends of the four micro branched chains 6 to drive the micro platform 5 to move along the X axis or move along the Y axis or rotate around the Z axis;
the driving precision of the micro linear driving piece 7 to the micro motion platform 5 is higher than that of the macro linear driving piece 4 to the macro motion platform 2.
According to the scheme, the output end of the macro-moving branched chain 3 is connected to four corners of the macro-moving platform 2, and the macro-driving part acts on the input end of the macro-moving branched chain 3, so that the macro-moving branched chain 3 has the X-axis freedom degree and the Y-axis freedom degree, the macro-moving platform 2 can be driven to move along the X-axis or move along the Y-axis or rotate around the Z-axis under the action of the macro-driving part, and the performance requirement of a large stroke of the macro-moving platform 2 is realized; secondly, through connecting the output end of the micro-motion branched chain 6 to four corners of the micro-motion platform 5, a micro-driving piece acts on the input end of the micro-motion branched chain 6, and the micro-motion branched chain 6 has an X-axis freedom degree and a Y-axis freedom degree, so that the micro-motion platform 5 can be driven to move along the X-axis or move along the Y-axis or rotate around the Z-axis under the action of the micro-driving piece, and the high-precision performance requirement of the micro-motion platform 5 is realized. Compared with the prior art, the scheme solves the contradiction between the motion range and the motion precision of the flexible mechanism, the macro motion platform 2 can realize large-range motion, and the micro motion platform 5 can realize high-precision displacement control, so that the positioning error of the macro motion platform 2 is effectively compensated; in addition, the translational decoupling is realized by adopting a redundant driving mode, so that the motion coupling is effectively reduced, and the motion control is easier.
For better explanation of the present embodiment, the left-right direction in fig. 1 is taken as the X axis, the front-rear direction in fig. 1 is taken as the Y axis, and the vertical direction in fig. 1 is taken as the Z axis.
The macro motion platform 2 is square and is positioned in the middle of the upper part of the base 1, and the macro motion platform 2 and the base 1 are mutually independent; the micro-motion platform 5 is square and is positioned in the middle of the upper part of the macro-motion platform 2, and the micro-motion platform 5 and the macro-motion platform 2 are mutually independent. It should be understood that the shapes of the macro platform 2 and the micro platform 5 may be changed as required, so long as the output ends of the macro branched chains 3 are guaranteed to be connected to the four corners of the macro platform 2 through the macro spring pieces 21, and the output ends of the micro branched chains 6 are guaranteed to be connected to the four corners of the micro platform 5 through the micro spring pieces 51. Four groups of sliding seats 11 which are arranged symmetrically with the macro-motion platform 2 as a center are arranged on the upper side surface of the base 1, and the sliding seats 11 and the macro-motion branched chains 3 are respectively corresponding to each other; four groups of sliding rails which are distributed symmetrically with the micro-motion platform 5 as a center are arranged on the upper side surface of the macro-motion platform 2, and the sliding rails correspond to the micro-motion branched chains 6 one by one. The macro spring piece 21 and the micro spring piece 51 are leaf springs, wherein the macro spring piece 21 is vertically arranged at four corners of the macro platform 2, and the micro spring piece 51 is vertically arranged at four corners of the micro platform 5.
In this embodiment, the macro-moving branched chain 3 includes a first sliding table 31 and a second sliding table 32, the first sliding table 31 is connected to the corresponding sliding seat 11 of the base 1 in a sliding manner along a transverse direction, a sliding direction of the first sliding table 31 relative to the sliding seat 11 is perpendicular to a corresponding side edge of the macro-moving platform 2, the second sliding table 32 is connected to the first sliding table 31 in a sliding manner along a transverse direction, and sliding directions of the first sliding table 31 and the second sliding table 32 are perpendicular to each other; the macro linear driving member 4 is connected to and acts on the first sliding table 31, and the second sliding table 32 is connected to the macro spring piece 21, so that each macro branched 3 has an X-axis freedom and a Y-axis freedom with respect to the base 1.
The micro-motion branched chain 6 comprises a first sliding joint 61 and a second sliding joint 62, the first sliding joint 61 is movably connected with a corresponding sliding rail of the macro motion platform 2 along the transverse direction, the sliding direction of the first sliding joint 61 relative to the sliding rail is perpendicular to the corresponding side edge of the micro motion platform 5, the second sliding joint 62 is movably connected with the first sliding joint 61 along the transverse direction, and the moving directions of the first sliding joint 61 and the second sliding joint 62 are perpendicular to each other; the micro linear driving element 7 is connected to and acts on the first sliding joint 61, and the second sliding joint 62 is connected to the micro spring piece 51, so that each micro branched chain 6 has an X-axis freedom and a Y-axis freedom relative to the macro moving platform 2.
The four macro linear driving members 4 are connected to the base 1 and are positioned to correspond to the four macro branched chains 3 one by one. Specifically, four macro linear drives 4 are respectively located at the front, left, rear and right of the base 1, wherein the macro linear drives 4 located at the left and right are arranged along the X axis, and the macro linear drives 4 located at the front and rear are arranged along the Y axis; so that two diagonally arranged macro linear drives 4 are arranged in the X-axis direction and two other diagonally arranged macro linear drives 4 are arranged in the Y-axis direction. When the left macro linear driving element 4 stretches out leftwards and the right macro linear driving element 4 retracts rightwards, the macro movable branched chain 3 drives the macro movable platform 2 to move leftwards, and vice versa, so that the macro movable platform 2 moves along the X axis; when the front macro linear driving element 4 extends backwards and the rear macro linear driving element 4 retracts backwards, the macro movable branched chain 3 drives the macro movable platform 2 to move backwards, and the same is true, so that the macro movable platform 2 moves along the Y axis; when the four macro linear driving pieces 4 extend out simultaneously, the macro movable branched chain 3 drives the macro movable platform 2 to rotate clockwise around the X axis by taking the figure 3 as a reference; when the four macro linear driving members 4 retract simultaneously, the macro branched 3 drives the macro platform 2 to rotate anticlockwise around the X axis by taking figure 3 as a reference.
The four micro linear driving pieces 7 are connected to the base 1 and correspond to the four micro branched chains 6 one by one. Specifically, four micro-linear driving members 7 are respectively located at the front, left, rear and right parts of the macro motion platform 2, wherein the micro-linear driving members 7 located at the left and right parts are arranged along the X-axis direction, and the micro-linear driving members 7 located at the front and rear parts are arranged along the Y-axis direction; so that two diagonally distributed micro-linear driving members 7 are arranged in the X-axis direction and the other two diagonally distributed micro-linear driving members 7 are arranged in the Y-axis direction. The micro linear driving piece 7 drives the micro platform 5 in the same way as the macro linear driving piece 4 drives the macro platform 2.
More specifically, the four macro linear drivers 4 are provided with a first voice coil motor and a third voice coil motor along the X axis direction, and a second voice coil motor and a fourth voice coil motor along the Y axis direction; the stators of the four macro linear driving elements 4 are respectively and fixedly connected to the base 1, and the movers of the four macro linear driving elements 4 are respectively connected to the input ends of the corresponding macro movable branched chains 3; the four micro-linear driving pieces 7 are arranged along the X axis and are first piezoelectric ceramics and third piezoelectric ceramics, the four micro-linear driving pieces 7 are arranged along the Y axis and are second piezoelectric ceramics and fourth piezoelectric ceramics, the four micro-linear driving pieces 7 are respectively and fixedly connected to the macro-moving platform 2, and deformation parts of the four micro-linear driving pieces 7 are respectively connected to input ends of corresponding micro-moving branched chains 6. The voice coil motor has a larger stroke, and can meet the requirement of a large stroke of the macro-moving platform 2; the piezoelectric ceramic has nano-scale precision, and can meet the high-precision requirement of the micro-motion platform 5.
As an optimization to the above embodiment, the front side of the micro-motion platform 5 is provided with a first reflecting mirror 52, the left side is provided with a second reflecting mirror 52, and the right side is provided with a third reflecting mirror 52; the front side of the base 1 is provided with a first laser displacement sensor 8, the left side is provided with a second laser displacement sensor 8, and the right side is provided with a third laser displacement sensor 8; wherein the first laser displacement sensor 8 is arranged towards the first reflecting mirror 52, the second laser displacement sensor 8 is arranged towards the second reflecting mirror 52, and the third laser displacement sensor 8 is arranged towards the third reflecting mirror 52, thereby realizing real-time detection of the displacement or rotation state of the micro-motion platform 5 through the first laser displacement sensor 8, the second laser displacement sensor 8 and the third laser displacement sensor 8.
In this embodiment, the motor driving device further comprises a controller (not shown in the figure), wherein four motor drivers corresponding to the four macro linear driving pieces 4 and four voltage amplifiers corresponding to the four micro linear driving pieces 7 are arranged on the controller, and the controller is electrically connected to the four macro linear driving pieces 4 through the motor drivers, so that accurate control of the first voice coil motor, the second voice coil motor, the third voice coil motor and the fourth voice coil motor is realized; the controller is electrically connected to the four micro-linear driving members 7 through the voltage amplifier, thereby realizing the accurate control of the first piezoelectric ceramic, the second piezoelectric ceramic, the third piezoelectric ceramic and the fourth piezoelectric ceramic. In addition, the controller also realizes communication connection with the first laser displacement sensor 8, the second laser displacement sensor 8 and the third laser displacement sensor 8 through RS 232.
Example 2
The embodiment 2 of the invention provides a control method of a plane three-degree-of-freedom macro-micro positioning platform, which is applied to the embodiment 1 and comprises the following steps:
firstly, the first voice coil motor and the third voice coil motor are controlled to realize the displacement of the X-axis of the macro motion platform 2, and then the first piezoelectric ceramic and the third piezoelectric ceramic are controlled to realize the displacement of the X-axis of the micro motion platform 5; or alternatively
Firstly, the displacement of the Y-axis direction of the macro platform 2 is realized by controlling the second voice coil motor and the fourth voice coil motor, and then the displacement of the left and right directions of the micro platform 5 is realized by controlling the second piezoelectric ceramic and the fourth piezoelectric ceramic; or alternatively
Firstly, the first voice coil motor, the second voice coil motor, the third voice coil motor and the fourth voice coil motor are controlled to extend simultaneously so as to realize forward rotation of the macro motion platform 2 around the Z axis, and then the first piezoelectric ceramic, the second piezoelectric ceramic, the third piezoelectric ceramic and the fourth piezoelectric ceramic are controlled to extend simultaneously so as to realize forward rotation of the micro motion platform 5 around the Z axis; or alternatively
The first voice coil motor, the second voice coil motor, the third voice coil motor and the fourth voice coil motor are controlled to retract simultaneously so as to realize reverse rotation of the macro motion platform 2 around the Z axis, and the first piezoelectric ceramic, the second piezoelectric ceramic, the third piezoelectric ceramic and the fourth piezoelectric ceramic are controlled to shorten simultaneously so as to realize reverse rotation of the micro motion platform 5 around the Z axis.
As an optimization of the present embodiment, the controller performs feedback adjustment on the operation states of the first voice coil motor, the second voice coil motor, the third voice coil motor, the fourth voice coil motor, the first piezoelectric ceramic, the second piezoelectric ceramic, the third piezoelectric ceramic, and the fourth piezoelectric ceramic based on PID control according to the received feedback signals of the first laser displacement sensor 8, the second laser displacement sensor 8, and the third laser displacement sensor 8.
Although the present disclosure is described above, the scope of protection of the present disclosure is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the disclosure, and these changes and modifications will fall within the scope of the invention.
Claims (9)
1. A planar three-degree-of-freedom macro-micro positioning platform, which is characterized by comprising a base (1) and:
the macro-moving assembly is arranged on the base (1) and comprises a macro-moving platform (2), four macro-moving branched chains (3) and four macro-linear driving pieces (4), wherein the macro-moving branched chains (3) are connected to the base (1) in a sliding manner and have X-axis freedom degree and Y-axis freedom degree, the four macro-moving branched chains (3) are symmetrically distributed in a central mode with the macro-moving platform (2) as a center, and output ends of the four macro-moving branched chains (3) are connected to four corners of the macro-moving platform (2) through macro-spring pieces (21) respectively; the four macro linear driving pieces (4) respectively act on the input ends of the four macro movable branched chains (3) to drive the macro movable platform (2) to move along the X axis or move along the Y axis or rotate around the Z axis;
the micro-motion assembly is arranged on the macro-motion platform (2) and comprises a micro-motion platform (5), four micro-motion branched chains (6) and four micro-linear driving pieces (7), wherein the micro-motion branched chains (6) are connected to the macro-motion platform (2) in a sliding manner and have X-axis freedom degree and Y-axis freedom degree, the four micro-motion branched chains (6) are symmetrically distributed in a central mode with the micro-motion platform (5) as a center, and output ends of the four micro-motion branched chains (6) are connected to four corners of the micro-motion platform (5) through micro-spring pieces (51) respectively; the four micro linear driving pieces (7) respectively act on the input ends of the four micro branched chains (6) to drive the micro platform (5) to move along the X axis or move along the Y axis or rotate around the Z axis;
the driving precision of the micro linear driving piece (7) to the micro moving platform (5) is higher than the driving precision of the macro linear driving piece (4) to the macro moving platform (2).
2. The planar three-degree-of-freedom macro-micro positioning platform according to claim 1, wherein four macro-linear driving members (4) are connected to the base (1) and are positioned to correspond to the four macro-movable branched chains (3) one by one, wherein two macro-linear driving members (4) which are diagonally distributed are arranged along the X axis, and the other two macro-linear driving members (4) which are diagonally distributed are arranged along the Y axis; four micro-linear driving pieces (7) are connected to the macro-moving platform (2) and correspond to the four micro-moving branched chains (6) one by one, wherein two micro-linear driving pieces (7) which are distributed diagonally are arranged along the X axis, and the other two micro-linear driving pieces (7) which are distributed diagonally are arranged along the Y axis.
3. The planar three-degree-of-freedom macro-micro positioning platform according to claim 2, wherein the four macro linear driving members (4) are a first voice coil motor and a third voice coil motor arranged along the X axis direction, and a second voice coil motor and a fourth voice coil motor arranged along the Y axis direction; the stators of the four macro linear driving elements (4) are respectively and fixedly connected to the base (1), and the movers of the four macro linear driving elements (4) are respectively connected to the input ends of the corresponding macro movable branched chains (3); the four micro-linear driving pieces (7) are arranged along the X axis and are first piezoelectric ceramic and third piezoelectric ceramic, the four micro-linear driving pieces (7) are arranged along the Y axis and are second piezoelectric ceramic and fourth piezoelectric ceramic, the four micro-linear driving pieces (7) are respectively and fixedly connected to the macro-moving platform (2), and deformation parts of the four micro-linear driving pieces (7) are respectively connected to input ends of corresponding micro-moving branched chains (6).
4. A planar three-degree-of-freedom macro-micro positioning platform according to any one of claims 1-3, wherein the macro-moving branched chain (3) comprises a first sliding table (31) and a second sliding table (32), the first sliding table (31) is connected to the base (1) in a sliding manner in the transverse direction, the second sliding table (32) is connected to the first sliding table (31) in a sliding manner in the transverse direction, and the sliding directions of the first sliding table (31) and the second sliding table (32) are perpendicular to each other; the macro linear driving piece (4) is connected with and acts on the first sliding table (31), and the second sliding table (32) is connected with the macro spring piece (21).
5. A planar three-degree-of-freedom macro-micro positioning platform according to any of claims 1-3, wherein the micro-branched chain (6) comprises a first sliding joint (61) and a second sliding joint (62), the first sliding joint (61) is movably connected to the macro-movement platform (2) along the transverse direction, the second sliding joint (62) is movably connected to the first sliding joint (61) along the transverse direction, and the moving directions of the first sliding joint (61) and the second sliding joint (62) are mutually perpendicular; the micro linear driving piece (7) is connected with and acts on the first sliding joint (61), and the second sliding joint (62) is connected with the micro spring piece (51).
6. The planar three-degree-of-freedom macro-micro positioning platform according to claim 1, wherein the front side, the left side and the right side of the micro-motion platform (5) are respectively provided with a reflecting mirror (52), the front side, the left side and the right side of the base (1) are respectively provided with a laser displacement sensor (8), the laser displacement sensor (8) on the front side of the base (1) is arranged towards the reflecting mirror (52) on the front side of the micro-motion platform (5), the laser displacement sensor (8) on the left side of the base (1) is arranged towards the reflecting mirror (52) on the left side of the micro-motion platform (5), and the laser displacement sensor (8) on the right side of the base (1) is arranged towards the reflecting mirror (52) on the right side of the micro-motion platform (5).
7. The planar three degree of freedom macro-micro positioning stage of claim 5 further comprising a controller electrically connected to the macro linear drive (4), micro linear drive (7), laser displacement sensor (8).
8. The control method of the plane three-degree-of-freedom macro-micro positioning platform is applied to the positioning platform and is characterized by comprising the following steps:
firstly, the first voice coil motor and the third voice coil motor are controlled to realize the displacement of the X-axis of the macro-motion platform (2), and then the first piezoelectric ceramic and the third piezoelectric ceramic are controlled to realize the displacement of the X-axis of the micro-motion platform (5); or alternatively
Firstly, the displacement of the Y-axis direction of the macro-motion platform (2) is realized by controlling the second voice coil motor and the fourth voice coil motor, and then the displacement of the micro-motion platform (5) in the left-right direction is realized by controlling the second piezoelectric ceramic and the fourth piezoelectric ceramic; or alternatively
The first voice coil motor, the second voice coil motor, the third voice coil motor and the fourth voice coil motor are controlled to stretch simultaneously so as to realize the rotation of the macro motion platform (2) around the Z axis, and the first piezoelectric ceramic, the second piezoelectric ceramic, the third piezoelectric ceramic and the fourth piezoelectric ceramic are controlled so as to realize the rotation of the micro motion platform (5) around the Z axis.
9. The control method of the planar three-degree-of-freedom macro-micro positioning platform according to claim 8, wherein the controller performs feedback adjustment on the operation states of the first voice coil motor, the second voice coil motor, the third voice coil motor, the fourth voice coil motor, the first piezoelectric ceramic, the second piezoelectric ceramic, the third piezoelectric ceramic and the fourth piezoelectric ceramic based on PID control according to the received feedback signals of the three laser displacement sensors (8).
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