CN116487879A - Low-frequency miniaturized electromagnetic-acoustic radiator and preparation method thereof - Google Patents
Low-frequency miniaturized electromagnetic-acoustic radiator and preparation method thereof Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title abstract description 7
- 239000000758 substrate Substances 0.000 claims description 10
- 230000010287 polarization Effects 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000003466 welding Methods 0.000 claims description 4
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 3
- 238000004891 communication Methods 0.000 abstract description 19
- 230000005855 radiation Effects 0.000 abstract description 16
- 230000005284 excitation Effects 0.000 abstract description 5
- 239000002131 composite material Substances 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 54
- 230000005690 magnetoelectric effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229910001329 Terfenol-D Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q5/00—Arrangements for simultaneous operation of antennas on two or more different wavebands, e.g. dual-band or multi-band arrangements
- H01Q5/20—Arrangements for simultaneous operation of antennas on two or more different wavebands, e.g. dual-band or multi-band arrangements characterised by the operating wavebands
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
Abstract
The invention discloses a low-frequency miniaturized electromagnetic-acoustic radiator and a preparation method thereof, and belongs to the technical field of communication. The upper layer electrode and the lower layer electrode are both interdigital electrodes, and the upper layer magnet and the lower layer magnet are used for clamping the magnetostriction sheet-piezoelectric layer composite layer, so as to improve the stress transmission coefficient. Excitation signals are input from the interdigital electrodes, the piezoelectric layer is excited to vibrate, sound wave radiation is generated, meanwhile, the vibration of the piezoelectric layer is transmitted to the magnetostriction sheet, and the magnetostriction sheet magnetizes oscillation radiation electromagnetic waves. The invention has the characteristics of double modes, small volume, low power consumption and strong signals, can obviously reduce the size of a low-frequency communication system, and is particularly suitable for emergency communication scenes such as mine communication and the like.
Description
Technical Field
The invention relates to the technical field of communication, in particular to a low-frequency miniaturized electromagnetic-acoustic radiator and a preparation method thereof.
Background
The low-frequency electromagnetic wave has strong penetrating power and has great potential in cross-domain communication. However, due to the matching relationship between the antenna aperture and the wavelength, the low-frequency antenna has a huge size, and particularly at the transmitting end, the radiation performance of the antenna is significantly reduced when the antenna aperture is smaller than one tenth of the wavelength of the electromagnetic field. The aperture of low frequency communication antennas in developed countries such as the united states is often tens of kilometers. The magneto-electric effect based on the magnetostriction material and the piezoelectric material provides a new working mechanism for the antenna. The mechanism realizes the interconversion of the electromagnetic field and the oscillating current through the magneto-electric effect and the mechanical resonance, and does not need the resonance between the antenna size and the wavelength of the specific electromagnetic wave. The size of the antenna will no longer be limited by the wavelength of the electromagnetic wave, which provides an excellent solution for manufacturing miniaturized low frequency antennas.
The physical size of the antenna based on the magneto-electric effect can be reduced to one thousandth of the working wavelength, and the size of the antenna can be reduced by 1-2 orders of magnitude compared with the most advanced traditional integrated antenna on the premise of the same performance. And it is worth mentioning that the antenna based on magneto-electric effect does not require a complex impedance matching network, which can support the implementation of miniaturized cross-domain communication systems.
The patent application document of the invention with the application number of 202111308829.4 discloses a preparation method, a detection method and a magnetoelectric antenna with a cantilever structure, and the magnetoelectric antenna has the function of receiving electromagnetic waves, but cannot radiate low-frequency electromagnetic waves.
In addition, paper "A Low Frequency Mechanical Transmitter Based on Magnetoelectric Heterostructures Operated at Their Resonance Frequency" reported by the university of virginia university study on magneto-electric antennas, while also being a radiation antenna based on magneto-electric effect, has a low signal radiation capability.
Disclosure of Invention
Aiming at the problems, the invention aims to provide a low-frequency miniaturized electromagnetic-acoustic radiator for cross-domain communication and a preparation method thereof, wherein the electromagnetic-acoustic radiator can radiate low-frequency electromagnetic waves and acoustic waves, and has the advantages of strong signal radiation capability, low energy consumption, simple structure, small volume and portability.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
a low frequency miniaturized electromagnetic-acoustic radiator characterized by: the upper magnetostrictive electrode, the upper electrode, the piezoelectric layer, the lower electrode and the lower magnetostrictive electrode are arranged in sequence from top to bottom, the widths of the upper magnetostrictive electrode, the upper electrode, the piezoelectric layer, the lower electrode and the lower magnetostrictive electrode are the same, the geometric centers are positioned on the same vertical line, and the lengths of the upper magnetostrictive electrode and the lower magnetostrictive electrode are larger than those of the upper electrode, the piezoelectric layer and the lower electrode.
Further, an upper magnet is arranged at the top of the upper magnetostrictive plate, a lower magnet is arranged at the bottom of the lower magnetostrictive plate, and the geometric centers of the upper magnet and the lower magnet are also positioned on the same vertical line with the centers of the upper magnetostrictive plate and the lower magnetostrictive plate.
Further, the polarization directions of the upper magnetostrictive sheet and the lower magnetostrictive sheet are horizontal, and the polarization direction of the piezoelectric layer is the thickness direction.
Furthermore, the upper electrode and the lower electrode are both interdigital electrodes, and the interdigital electrodes are tightly attached to the piezoelectric layer.
Further, the piezoelectric layer is made of AlN, znO, PZT, liNbO 3 、LiTaO 3 And combinations of one or more of the doped products thereof.
Further, the upper electrode and the lower electrode are made of any one of Au, cu and red copper; and the thickness of the upper electrode and the lower electrode is 20 um-100 um.
Furthermore, the upper layer magnet and the lower layer magnet are made of neodymium iron boron.
Further, a method for manufacturing a low-frequency miniaturized electromagnetic-acoustic radiator is characterized by comprising the steps of,
s1: preparing materials;
s2: the upper electrode and the lower electrode are respectively adhered and fixed at the top and the bottom of the piezoelectric layer;
s3: the top of the upper electrode is fixedly adhered with an upper magnetostrictive sheet, and the bottom of the lower electrode is fixedly adhered with a lower magnetostrictive sheet;
s4: the upper layer magnet and the lower layer magnet are respectively clamped and fixed outside the upper layer magnetostriction sheet and the lower layer magnetostriction sheet correspondingly;
s5: and welding leads on the upper electrode and the lower electrode respectively to lead out a circuit interface.
Further, the specific operation of step S1 includes the steps of,
s101: cutting a piezoelectric sheet with C-axis polarization as a piezoelectric layer;
s102: cutting two magnetostrictive sheets with the same size to respectively serve as an upper magnetostrictive sheet and a lower magnetostrictive sheet;
s103: preparing a pair of PI substrate interdigital electrodes as an upper electrode and a lower electrode respectively;
s104: magnet blocks are prepared and used as an upper layer magnet and a lower layer magnet respectively for standby.
The beneficial effects of the invention are as follows:
1. the electromagnetic-acoustic radiator has the function of electromagnetic wave-acoustic wave double-channel communication, widens the cross-domain communication path, and has wider application range and stronger guarantee; the preparation difficulty is low, the volume is small (10 mm is 80mm is 5 mm), the signal radiation is strong (the electromagnetic wave intensity can reach uT level when the radiation distance is 1 m), and the energy consumption is low (1 w);
2. the electromagnetic-acoustic radiator has the antenna size far smaller than the wavelength of electromagnetic waves matched with each other, and the signals of a plurality of radiators are overlapped in an array mode, so that the radiation signal intensity of the electromagnetic-acoustic radiator can be obviously enhanced while the small volume is ensured.
3. The electromagnetic-acoustic radiator has electromagnetic and acoustic double-working modes, has the capability of radiating electromagnetic-acoustic signals, also has the capability of receiving low-frequency electromagnetic signals and acoustic signals, can determine the communication distance through the attenuation degree of electromagnetic waves when in emergency communication conditions such as cross-domain communication and the like, and improves the detection rate of weak communication information through acoustic signals and electromagnetic signals. The electromagnetic signal and the acoustic signal operate at the same frequency and are specifically designed to achieve (3 kHz-100 kHz) electromagnetic-acoustic signal radiation.
Drawings
Fig. 1 is a schematic view of the structure of an electromagnetic-acoustic radiator according to the present invention.
Fig. 2 shows the structure of the interdigital electrode of the upper electrode and the lower electrode of the present invention.
Fig. 3 is a schematic diagram of the vibration mode of the piezoelectric layer radiating sound waves according to the present invention.
Fig. 4 is a vibration mode of the magnetostrictive sheet according to the present invention radiating electromagnetic waves.
Fig. 5 is a schematic diagram showing electromagnetic wave signal output of the electromagnetic-acoustic radiator of the present invention.
Wherein, the magnetic field sensor comprises a 1-upper magnetostrictive sheet, a 2-upper electrode, a 3-piezoelectric layer, a 4-lower electrode, a 5-lower magnetostrictive sheet, a 6-upper magnet and a 7-lower magnet.
Detailed Description
In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is further described below with reference to the accompanying drawings and examples.
Embodiment one:
the structure of the low-frequency miniaturized electromagnetic-acoustic radiator is shown in the accompanying figure 1, the low-frequency miniaturized electromagnetic-acoustic radiator sequentially comprises an upper magnet 6, an upper magnetostrictive sheet 1, an upper electrode 2, a piezoelectric layer 3, a lower electrode 4, a lower magnetostrictive sheet 5 and a lower magnet 7 from top to bottom, and the core structure comprises the upper magnetostrictive sheet 1, the upper electrode 2, the piezoelectric layer 3, the lower electrode 4 and the lower magnetostrictive sheet 5, wherein the upper magnet 6 and the lower magnet 7 can provide a bias magnetic field besides the clamping capability, so that the magneto-electric coupling coefficient is improved, and the stress transfer efficiency is improved, thereby being used for enhancing radiation signals;
the widths of the upper magnetostrictive sheet 1, the upper electrode 2, the piezoelectric layer 3, the lower electrode 4 and the lower magnetostrictive sheet 5 are the same, the upper electrode 2 is completely covered on the upper surface of the piezoelectric layer 3, the lower electrode 4 is completely covered on the lower surface of the piezoelectric layer 3, and the lengths of the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5 are larger than those of the upper electrode 2, the piezoelectric layer 3 and the lower electrode 4; the number of the upper magnet 6 and the lower magnet 7 may be 1 or more, when the number of the upper magnet 6 and the lower magnet 7 is 1, the lengths and the widths of the upper magnet 6, the lower magnet 7 and the piezoelectric layer 3 are the same, and the geometric centers of the upper magnet 6, the lower magnet 7, the upper magnetostrictive sheet 1, the upper electrode 2, the piezoelectric layer 3, the lower electrode 4 and the lower magnetostrictive sheet 5 are positioned on the same vertical line.
When the number of the upper layer magnets 6 and the lower layer magnets 7 is multiple, the widths of the upper layer magnets 6 and the lower layer magnets 7 are the same as the width of the piezoelectric layer 3, the two side edges of the upper layer magnets 6 arranged in parallel are flush with the two side edges of the piezoelectric layer 3, and the two side edges of the lower layer magnets 7 arranged in parallel are also flush with the two side edges of the piezoelectric layer 3; the geometric center formed by the plurality of upper layer magnets 6 and the geometric center formed by the plurality of lower layer magnets 7 are also on the same vertical line as the geometric center of the piezoelectric layer 3.
Further, the polarization direction of the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5 is the horizontal direction, and the polarization direction of the piezoelectric layer 3 is the thickness direction, i.e., the C-axis direction.
The upper electrode 2 and the lower electrode 4 are both interdigital electrodes, and the interdigital electrodes are tightly attached to the piezoelectric layer 3; in order to ensure the shape retention of the interdigital electrode structures of the upper electrode 2 and the lower electrode 4, interdigital electrodes are printed on a PI substrate, wherein specific dimensional parameters of the interdigital electrodes are shown in figure 2. Excitation signals are input through interdigital electrodes to excite the piezoelectric layer 3 to vibrate, so that sound waves are generated; at the same time, the vibration of the piezoelectric layer 3 is transmitted to the magnetostrictive sheets (including the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5), and the magnetostrictive sheets vibrate to radiate electromagnetic waves.
Preferably, the piezoelectric layer 3 is made of AlN, znO, PZT, liNbO 3 、LiTaO 3 And doped products thereof (doped products herein refer to AlN, znO, PZT, liNbO 3 、LiTaO 3 Doped product of either) orCombinations of the plurality.
Preferably, the upper electrode 2 and the lower electrode 4 are made of Au, cu and red copper; and the thickness of the upper electrode 2 and the lower electrode 4 is 20 um-100 um.
Preferably, the upper magnet 6 and the lower magnet 7 are made of neodymium iron boron.
The working principle of the electromagnetic-acoustic radiator in the invention is as follows: an external ac excitation voltage is applied to the piezoelectric layer 3 through the upper electrode 2 and the lower electrode 4, the piezoelectric layer 3 generates vibration due to the piezoelectric effect, the vibration is transmitted to the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5, the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5 are magnetized and oscillated, an electromagnetic wave signal is radiated, and the electromagnetic wave signal is at the same frequency as the excitation voltage. Meanwhile, the mechanical vibration of the piezoelectric layer 3 drives air to vibrate so as to excite the same-frequency sound wave radiation.
Because the electromagnetic-acoustic radiator has electromagnetic and acoustic double-working modes, when in emergent communication conditions such as cross-domain communication and the like, the communication distance can be determined through the attenuation degree of the electromagnetic wave, and the detection rate of weak communication information is improved through acoustic signals and electromagnetic signals. The electromagnetic signal and the acoustic signal work at the same frequency, and electromagnetic-acoustic signal radiation in the range of 3kHz-100kHz can be realized by adjusting the sizes of the piezoelectric layer 3, the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5.
Embodiment two:
in a second embodiment, a method for manufacturing a low frequency miniaturized electromagnetic-acoustic radiator as described in embodiment one is provided, comprising in particular the steps of,
s1: preparing materials;
specifically, a 30mm x 10mm x 0.2mm C-axis polarized PZT-5A piezoelectric sheet was cut as the piezoelectric layer 3;
cutting two Terfenol-D magnetostrictive sheets 80mm 10mm 0.2mm to obtain an upper magnetostrictive sheet 1 and a lower magnetostrictive sheet 5 respectively;
preparing a pair of PI substrate interdigital electrodes, wherein the electrode strip width is 500um, the interval is 500um, the electrode pair number is 16 pairs, the thickness of red copper electrodes is 20um, the total effective width of the interdigital electrodes is 10mm, the effective length is 30mm, and the interdigital electrodes are printed on the PI substrate on one side and serve as an upper electrode 2 and a lower electrode 4 respectively;
two 30mm x 10mm x 2mm magnet blocks were prepared and used as the upper magnet 6 and the lower magnet 7, respectively, for standby.
S2: the upper electrode 2 and the lower electrode 4 are respectively adhered and fixed on the top and the bottom of the piezoelectric layer 3;
specifically, a piezoelectric sheet and two PI substrate interdigital electrodes are bonded. And (3) uniformly mixing and smearing the epoxy resin AB glue in a ratio of 1:1 on the surface of the printed electrode of one PI substrate interdigital electrode upwards, placing the piezoelectric sheet in the center of the interdigital electrode, smearing the epoxy resin glue on the upper side of the piezoelectric sheet, and adhering the printed electrode surface of the other PI substrate interdigital electrode downwards to the piezoelectric sheet. Applying proper pressure on the die bonder to ensure the bonding effect of the PI substrate and the piezoelectric plate, standing for 3 hours, and waiting for the epoxy resin adhesive to be completely cured;
s3: the upper magnetostrictive sheet 1 is adhered and fixed on the top of the upper electrode 2, and the lower magnetostrictive sheet 5 is adhered and fixed on the bottom of the lower electrode 4;
specifically, the structure bonded in the step S2 is taken out from a sheet bonding machine, a Terfenol-D magnetostriction sheet is respectively bonded on the non-printing electrode surfaces of the PI substrate interdigital electrodes on the two sides of the piezoelectric sheet, and the piezoelectric sheet is pressurized and stands for complete solidification.
S4: the upper magnet 6 and the lower magnet 7 are respectively and correspondingly clamped and fixed outside the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5;
s5: welding leads on the upper electrode 2 and the lower electrode 4 respectively to lead out a circuit interface;
specifically, the magnet blocks are clamped at the middle parts of the two sides of the piezoelectric sheet-interdigital electrode-magnetostriction sheet composite structure. And then welding a lead on the interdigital electrode, and leading out a circuit interface.
When a signal is emitted, the upper electrode 2 and the lower electrode 4 excite surface waves to generate vibrations of the piezoelectric layer 3, and the vibrations of the piezoelectric layer 3 are transmitted to the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5. On the one hand, the vibration of the piezoelectric layer 3 radiates sound waves as shown in fig. 3; on the other hand, the vibration of the upper magnetostrictive sheet 1 and the lower magnetostrictive sheet 5 radiates electromagnetic waves, as shown in fig. 4, realizing electromagnetic-acoustic dual-mode signal radiation of the radiator. Wherein, the upper layer magnet 6 and the lower layer magnet 7 function as: the interlayer stress transfer efficiency is improved, and the electromagnetic-acoustic radiation signal is enhanced.
In this embodiment, the magneto-electric antenna has an operating frequency of 3k to 100kHz, and an electromagnetic wavelength at this frequency is 3000 to 10000m. The dimensions of the example antenna are 80mm by 10mm by 5mm, at least 5 orders of magnitude smaller than the dimensions of a conventional electrical resonant antenna.
Further, the ability of the electromagnetic-acoustic radiator to emit electromagnetic waves was also verified in the present invention. The test method is that a standard sinusoidal signal of 44.75kHz is generated by using a signal generator and is applied to a radiator, an electromagnetic wave signal is received by a receiving coil at a distance of 50cm from the radiator and is characterized by an oscilloscope, the test result is shown in fig. 5, and as can be seen in fig. 5, the radiator can realize electromagnetic wave radiation with the same frequency as an excitation source signal and can maintain the integrity of waveforms.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (9)
1. A low frequency miniaturized electromagnetic-acoustic radiator characterized by: the upper magnetostrictive electrode, the upper electrode, the piezoelectric layer, the lower electrode and the lower magnetostrictive electrode are arranged in sequence from top to bottom, the widths of the upper magnetostrictive electrode, the upper electrode, the piezoelectric layer, the lower electrode and the lower magnetostrictive electrode are the same, the geometric centers are positioned on the same vertical line, and the lengths of the upper magnetostrictive electrode and the lower magnetostrictive electrode are larger than those of the upper electrode, the piezoelectric layer and the lower electrode.
2. A low frequency miniaturized electro-magnetic-acoustic radiator according to claim 1 wherein: the top of upper magnetostrictive sheet is equipped with upper magnet, the bottom of lower magnetostrictive sheet is equipped with lower magnet, upper magnet and lower magnet's geometric center also lie in same vertical line with upper magnetostrictive sheet and lower magnetostrictive sheet's center.
3. A low frequency miniaturized electro-magnetic-acoustic radiator according to claim 2 characterized in that: the polarization directions of the upper magnetostrictive sheet and the lower magnetostrictive sheet are horizontal, and the polarization direction of the piezoelectric layer is the thickness direction.
4. A low frequency miniaturized electro-magnetic-acoustic radiator according to claim 2 characterized in that: the upper electrode and the lower electrode are both interdigital electrodes, and the interdigital electrodes are tightly attached to the piezoelectric layer.
5. A low frequency miniaturized electro-magnetic-acoustic radiator according to claim 2 characterized in that: the piezoelectric layer is made of AlN, znO, PZT, liNbO 3 、LiTaO 3 And combinations of one or more of the doped products thereof.
6. A low frequency miniaturized electro-magnetic-acoustic radiator according to claim 2 characterized in that: the upper electrode and the lower electrode are made of any one of Au, cu and red copper; and the thickness of the upper electrode and the lower electrode is 20 um-100 um.
7. A low frequency miniaturized electro-magnetic-acoustic radiator according to claim 2 characterized in that: the upper layer magnet and the lower layer magnet are made of neodymium iron boron.
8. A method of manufacturing a low frequency miniaturized electromagnetic-acoustic radiator as set forth in any of claims 2-7, comprising the steps of,
s1: preparing materials;
s2: the upper electrode and the lower electrode are respectively adhered and fixed at the top and the bottom of the piezoelectric layer;
s3: the top of the upper electrode is fixedly adhered with an upper magnetostrictive sheet, and the bottom of the lower electrode is fixedly adhered with a lower magnetostrictive sheet;
s4: the upper layer magnet and the lower layer magnet are respectively clamped and fixed outside the upper layer magnetostriction sheet and the lower layer magnetostriction sheet correspondingly;
s5: and welding leads on the upper electrode and the lower electrode respectively to lead out a circuit interface.
9. The method for manufacturing a low frequency miniaturized electromagnetic-acoustic radiator according to claim 8, wherein the specific operation of step S1 comprises the steps of,
s101: cutting a piezoelectric sheet with C-axis polarization as a piezoelectric layer;
s102: cutting two magnetostrictive sheets with the same size to respectively serve as an upper magnetostrictive sheet and a lower magnetostrictive sheet;
s103: preparing a pair of PI substrate interdigital electrodes as an upper electrode and a lower electrode respectively;
s104: magnet blocks are prepared and used as an upper layer magnet and a lower layer magnet respectively for standby.
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| CN202310406436.XA CN116487879A (en) | 2023-04-17 | 2023-04-17 | Low-frequency miniaturized electromagnetic-acoustic radiator and preparation method thereof |
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