CN116481311A - Quick servicing device for electronic component heating and pressurizing treatment furnace - Google Patents
Quick servicing device for electronic component heating and pressurizing treatment furnace Download PDFInfo
- Publication number
- CN116481311A CN116481311A CN202211425057.7A CN202211425057A CN116481311A CN 116481311 A CN116481311 A CN 116481311A CN 202211425057 A CN202211425057 A CN 202211425057A CN 116481311 A CN116481311 A CN 116481311A
- Authority
- CN
- China
- Prior art keywords
- heat insulation
- accommodating space
- pressurizing
- electronic component
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 74
- 238000009413 insulation Methods 0.000 claims abstract description 110
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 238000002360 preparation method Methods 0.000 claims description 34
- 239000000126 substance Substances 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 238000012423 maintenance Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 8
- 239000003344 environmental pollutant Substances 0.000 description 5
- 231100000719 pollutant Toxicity 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002708 enhancing effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/10—Monolithic linings; Supports therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Tunnel Furnaces (AREA)
Abstract
The invention provides a quick-acting device of an electronic component heating and pressurizing treatment furnace, which comprises a containing space arranged in the furnace; at least one heating device arranged in the accommodating space for modulating the temperature in the accommodating space to a preset temperature; at least one pressurizing device for modulating the pressure in the accommodating space to a predetermined pressure greater than 1 atm; at least one replaceable insulating liner comprising an outer layer and an inner layer; and a fan arranged in the accommodating space and connected to a driving motor through a transmission shaft protruding out of the cavity, thereby the polluted and clean replacement heat insulation lining room can be quickly replaced, and a plurality of radial expansion structures and a plurality of C-shaped rings are used for being tightly pressed in the furnace, so that the servicing work can be quickly completed, the shutdown maintenance time is greatly shortened, and the production efficiency and the productivity are effectively increased.
Description
Technical Field
The invention relates to the technical field of electronic element treatment furnaces, in particular to a quick preparation device of an electronic element heating and pressurizing treatment furnace, which is capable of quickly replacing a polluted and clean replacement type heat insulation lining room.
Background
In the process of manufacturing electronic devices, a processing furnace with heating and pressurizing functions is often used, and in the conventional processing furnace with heating and pressurizing functions, part of processing chemicals in the heating process are volatilized or evaporated and spread in a processing chamber, when the processing chamber is cooled, gaseous processing chemicals scattered in the processing chamber are condensed to form pollutants attached to the inner wall of the chamber, so that a machine is stopped for cleaning and maintaining after a period of time, thus the cleaning and maintaining cost in the furnace is high and time-consuming, the producible time is compressed, the productivity is reduced, however, in the case that the whole production line cannot be smoothly operated because the processing of electronic devices is not allowed to stop for too long, besides the efficiency is low, the productivity is severely affected, so that the conventional cleaning and maintaining is stopped for too long, and improvement is necessary.
Therefore, in order to solve the above-mentioned problems of the conventional structure, how to develop an innovative structure with more ideal practicability is a great desire of consumers, and related industries should strive to develop the breakthrough goal and direction.
In view of this, the inventors have conducted years of manufacturing development and design experience of related products, and have aimed at the above-mentioned objects, and have devised detailed designs and judicious evaluations, so as to obtain the invention with practical applicability.
Disclosure of Invention
The main purpose of the invention is to provide a quick preparation device of an electronic element heating and pressurizing treatment furnace, wherein pollutants are attached in the production process in the furnace, and the heat insulation lining on the peripheral surface of the accommodating space is provided with a replacement heat insulation lining, so that when the pollutants are attached to enable the accommodating space to be the polluted replacement heat insulation lining, the production operation can be continued only by replacing the clean replacement heat insulation lining, and the downtime is compressed to be extremely short, thereby the production efficiency and the productivity can be increased.
In order to achieve the above object, the present invention provides a rapid backup device for an electronic component heating and pressurizing treatment furnace, which is characterized by comprising:
the cavity comprises a door and a cylinder body, and a containing space is formed in the cylinder body;
at least one heating device, which is arranged in the accommodating space and is used for modulating the temperature in the accommodating space to a preset temperature;
the heat insulation lining comprises an outer layer and an inner layer, wherein the outer layer is arranged on the inner wall of the cylinder body, the inner layer is arranged towards the inside of the accommodating space relative to the outer layer so as to form a closed heat insulation space between the outer layer and the inner layer, the thickness of the inner layer is smaller than that of the cylinder body part corresponding to the heat insulation lining, a plurality of radial expansion structures are axially arranged in a slot of the heat insulation lining, and the heat insulation lining is provided with radial expansion force support and can be fixed in the cylinder body or reversely detached from the inner wall of the cylinder body;
a first pressurizing means for modulating the pressure in the accommodating space to a predetermined pressure greater than 1 atm; and
the fan is arranged in the accommodating space, is connected to a driving motor through a transmission shaft protruding out of the cylinder body, and is driven to rotate by the driving motor so as to promote the temperature modulation efficiency of the heating device on the accommodating space.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the enclosed heat insulation space is arranged in a non-sealing way, and the pressure in the enclosed heat insulation space of the replacement heat insulation lining is modulated to be substantially the same as the pressure in the accommodating space by the first pressurizing device, so that the replacement heat insulation lining is prevented from deforming when the pressure in the accommodating space is changed.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the device also comprises a second pressurizing device, wherein the enclosed heat insulation space is arranged in a sealing way, and the second pressurizing device is operated in a mode that the pressure in the accommodating space and the pressure in the enclosed heat insulation space are modulated to the preset pressure at the same time.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the inner layer is axially arranged with a plurality of C-shaped rings towards the accommodating space, and two ends of the C-shaped rings are locked with a stretching structure for stretching and fixing the replacement heat insulation lining or reversely detaching the C-shaped rings from the replacement heat insulation lining.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: one end of the stretching structure is provided with a right-handed thread, and the other end is provided with a left-handed thread, and the C-shaped ring is locked or loosened rapidly.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the C-shaped rings are uniformly arranged, so that the C-shaped rings uniformly apply force to the replacement heat insulation lining, and the replacement heat insulation lining is fastened on the surface of the inner layer.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: at least one partition member is provided for dividing the enclosed heat insulation space into a plurality of areas.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the separator is made of metal.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the particle detector is connected to the enclosed heat insulation space to detect the particle content discharged from the enclosed heat insulation space.
The utility model provides an electronic component heats quick preparation device of pressurization treatment furnace which characterized in that includes:
the cavity comprises a door and a cylinder body, and a containing space is formed in the cylinder body;
at least one heating device, which is arranged in the accommodating space and is used for modulating the temperature in the accommodating space to a preset temperature;
the heat insulation lining comprises at least one replaceable heat insulation lining, wherein the replaceable heat insulation lining is arranged in a C shape in cross section and comprises an outer layer and an inner layer, the outer layer is arranged on the inner wall of the cylinder body, the inner layer is arranged towards the inside of the accommodating space relative to the outer layer so as to form a closed heat insulation space between the outer layer and the inner layer, the thickness of the inner layer is smaller than that of the cylinder body part corresponding to the replaceable heat insulation lining, a plate group protruding towards the accommodating space is arranged at a slot position disconnected at two ends of the replaceable heat insulation lining, and the plate group is combined with a plurality of radial expansion structures, so that the replaceable heat insulation lining is supported by radial expansion force and can be fixed on the inner wall of the cylinder body, or the replaceable heat insulation lining is reversely detached from the inner wall of the cylinder body;
a first pressurizing means for modulating the pressure in the accommodating space to a predetermined pressure greater than 1 atm; and
the fan is arranged in the accommodating space, is connected to a driving motor through a transmission shaft protruding out of the cylinder body, and is driven to rotate by the driving motor so as to promote the temperature modulation efficiency of the heating device on the accommodating space.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the enclosed heat insulation space is arranged in a non-sealing way, and the pressure in the enclosed heat insulation space of the replacement heat insulation lining is modulated to be substantially the same as the pressure in the accommodating space by the first pressurizing device, so that the replacement heat insulation lining is prevented from deforming when the pressure in the accommodating space is changed.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the inner layer is axially arranged with a plurality of C-shaped rings towards the accommodating space, and two ends of the C-shaped rings are locked with a stretching structure for stretching and fixing the replacement heat insulation lining or reversely detaching the C-shaped rings from the replacement heat insulation lining.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the first pressurizing device is operated in such a manner that the pressure in the accommodating space and the pressure in the enclosed heat-insulating space are substantially simultaneously modulated to the predetermined pressure.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the enclosed heat-insulating space is filled with a substance having a heat conductivity coefficient lower than 16W/mK.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the substance is a gas.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the gas is air or nitrogen.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the substance is carbon, glass, teflon or water.
The electronic component heating and pressurizing treatment furnace rapid preparation device comprises the following components: the replacement insulating bush is made of metal.
Accordingly, the polluted and clean replacement type heat insulation lining room can be quickly replaced, and a plurality of radial expansion structures and a plurality of C-shaped rings can be used for being tightly pressed in the furnace, so that the servicing work can be quickly completed, the shutdown maintenance time is greatly shortened, and the production efficiency and the productivity are effectively increased.
With respect to the techniques, means and functions employed in the present invention, a detailed description of a preferred embodiment will be presented together with a detailed description of the drawings, along with the belief that the above objects, configurations and features of the invention should be taken in a thorough and detailed manner.
Drawings
Fig. 1 is a schematic perspective view of an embodiment of the present invention.
Fig. 2 is a schematic front plan view of an embodiment of the present invention.
Fig. 3A is a schematic view of section A-A of fig. 2.
Fig. 3B is a partial enlarged view at 3B in fig. 3A.
FIG. 4 is a schematic illustration of the replacement of a replacement insulating bushing according to an embodiment of the present invention.
Fig. 5 is a schematic perspective view of an alternative insulating bushing according to an embodiment of the present invention.
FIG. 6 is a schematic side cross-sectional view of an alternative insulating bushing according to one embodiment of the present invention.
Fig. 7A is a schematic side cross-sectional view of another embodiment of the present invention.
Fig. 7B is a partial enlarged view at 7B in fig. 7A.
Fig. 8 is a schematic perspective view of an alternative insulating bushing according to another embodiment of the present invention.
FIG. 9 is a schematic side cross-sectional view of an alternative insulating bushing according to another embodiment of the invention.
Fig. 10 is a schematic side cross-sectional view of a further embodiment of the present invention.
FIG. 11 is a schematic side cross-sectional view of a further embodiment of the present invention.
Reference numerals illustrate: 10 cavities; 11 doors; 12 barrels; 13 accommodating spaces; 14 a transmission shaft; 15 driving a motor; 20 heating means; 30 replacement insulation bushing; 31 an outer layer; 32 inner layers; 33 enclosing the heat insulation space; 35 slots; 351 radially expanding the structure; a 36C-shaped loop; 37 stretching structure; 30a replacement insulation sleeve; 31a outer layer; 32a inner layer; 33a enclose a heat insulation space; 35a slots; 351a radially expanded configuration; a 36 aC-type loop; 37a stretching structure; 38a plate set; 41 first pressurizing means; a second pressurizing means 42; a 50-fan; 60 particle detector; 70 separator.
Detailed Description
The invention provides a design of a quick-acting device of an electronic element heating and pressurizing treatment furnace.
So that the manner in which the objects, features and advantages of the invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to the embodiments, some of which are illustrated in the appended drawings, in which:
referring to fig. 1 to 6, an embodiment of the invention provides a rapid backup device for an electronic component heating and pressurizing furnace, which comprises:
a cavity 10, wherein the cavity 10 comprises a door 11 and a barrel 12, and a containing space 13 is formed inside the barrel 12;
at least one heating device 20 disposed in the accommodating space 13 for modulating the temperature in the accommodating space 13 to a predetermined temperature;
at least one replaceable heat insulation lining 30 having a C-shaped cross section and comprising an outer layer 31 and an inner layer 32, wherein the outer layer 31 is disposed on the inner wall of the barrel 12, and the inner layer 32 is disposed toward the inside of the accommodating space 13 relative to the outer layer 31 to form a closed heat insulation space 33 between the outer layer 31 and the inner layer 32, and wherein the distance between the outer layer 31 and the inner layer 32 is greater than 1 μm, the thickness of the inner layer 32 is smaller than the thickness of the portion of the barrel 12 corresponding to the replaceable heat insulation lining 30, and a plurality of radial expansion structures 351 are disposed in an axial arrangement in a slot 35 of the replaceable heat insulation lining 30, such that the replaceable heat insulation lining 30 has radial expansion force support and is fixed in the barrel 12, or the replaceable heat insulation lining 30 is reversely detached from the inner wall of the barrel 12;
a first pressurizing means 41 for modulating the pressure in the accommodating space 13 to a predetermined pressure greater than 1 atm; and
a fan 50 disposed in the accommodating space 13 and connected to a driving motor 15 via a transmission shaft 14 protruding from the barrel 12, wherein the fan 50 is driven by the driving motor 15 to rotate, so as to promote the temperature modulation efficiency of the heating device 20 on the accommodating space 13.
Referring to fig. 1 and fig. 7A to 9, another embodiment of the present invention provides a rapid-backup device for an electronic device heating and pressurizing furnace, comprising:
a cavity 10, wherein the cavity 10 comprises a door 11 and a barrel 12, and a containing space 13 is formed inside the barrel 12;
at least one heating device 20 disposed in the accommodating space 13 for modulating the temperature in the accommodating space 13 to a predetermined temperature;
at least one replaceable heat insulating liner 30a having a C-shaped cross section and comprising an outer layer 31a and an inner layer 32a, wherein the outer layer 31a is disposed on the inner wall of the barrel 12, and the inner layer 32a is disposed inside the accommodating space 13 relative to the outer layer 31a to form a closed heat insulating space 33a between the outer layer 31a and the inner layer 32a, and wherein the distance between the outer layer 31a and the inner layer 32a is greater than 1 μm, and the thickness of the inner layer 32a is smaller than the thickness of the portion of the barrel 12 corresponding to the replaceable heat insulating liner 30a; a plate group 38a protruding towards the accommodating space 13 is arranged at the position of the slot 35a broken at the two ends of the replacement heat insulation lining 30a, and the plate group 38a is combined with a plurality of radial expansion structures 351a, so that the replacement heat insulation lining 30a is supported by radial expansion force and can be fixed on the inner wall of the cylinder body 12, or the replacement heat insulation lining 30a is reversely detached from the inner wall of the cylinder body 12;
a first pressurizing means 41 for modulating the pressure in the accommodating space 13 to a predetermined pressure greater than 1 atm; and
a fan 50 disposed in the accommodating space 13 and connected to a driving motor 15 via a transmission shaft 14 protruding from the barrel 12, wherein the fan 50 is driven by the driving motor 15 to rotate, so as to promote the temperature modulation efficiency of the heating device 20 on the accommodating space 13.
Referring to fig. 1 to 6, in the rapid-backup device of the electronic component heating and pressurizing furnace, the enclosed heat-insulating space 33 is non-hermetically disposed, and the pressure in the enclosed heat-insulating space 33 of the replacement heat-insulating lining 30 is modulated to be substantially the same as the pressure in the accommodating space 13 by the first pressurizing device 41, so as to prevent the replacement heat-insulating lining 30 from deforming when the pressure in the accommodating space 13 is changed.
Referring to fig. 1 to 6, in the rapid-repair device for an electronic component heating and pressurizing furnace, a plurality of C-shaped rings 36 are axially arranged in the inner layer 32 toward the accommodating space 13, and a stretching structure 37 is locked at two ends of the C-shaped rings 36 to stretch and fix the replacement heat insulation lining 30 or reversely detach the C-shaped rings 36 from the replacement heat insulation lining 30, wherein the stretching structure 37 can adjust stretching and fixing force according to the compressive strength of the replacement heat insulation lining 30, so that the C-shaped rings 36 fasten the replacement heat insulation lining 30 on the surface of the inner layer 32, thereby enhancing the fixing effect of the replacement heat insulation lining 30.
Referring to fig. 1 to 6, the rapid-backup device for the heating and pressurizing furnace for electronic components is provided, wherein one end of the stretching structure 37 is provided with a right-handed thread, and the other end is provided with a left-handed thread, so that the C-shaped ring 36 can be locked or released rapidly.
Referring to fig. 1 to 6, in the rapid-repair device for an electronic component heating and pressurizing furnace, the C-shaped rings 36 are uniformly arranged, so that each C-shaped ring 36 uniformly applies force to the replacement heat insulation lining 30, and the replacement heat insulation lining 30 is fastened on the surface of the inner layer 32, thereby enhancing the fixing effect of the replacement heat insulation lining 30.
Referring to fig. 7A to 9, in the rapid-repair device for an electronic component heating and pressurizing furnace, the enclosed heat-insulating space 33a is non-hermetically disposed, and the pressure in the enclosed heat-insulating space 33a of the replacement heat-insulating lining 30a is modulated to be substantially the same as the pressure in the accommodating space 13 by the first pressurizing device 41, so as to prevent the replacement heat-insulating lining 30a from deforming when the pressure in the accommodating space 13 is changed.
Referring to fig. 7A to 9, in the rapid-repair device for an electronic component heating and pressurizing furnace, a plurality of C-shaped rings 36a are axially arranged in the inner layer 32a toward the accommodating space 13, and a stretching structure 37A is locked at two ends of the C-shaped rings 36a to stretch and fix the replacement heat insulation lining 30a or reversely detach the C-shaped rings 36a from the replacement heat insulation lining 30a, wherein the stretching structure 37A can adjust stretching and fixing force according to the compressive strength of the replacement heat insulation lining 30a, so that the C-shaped rings 36a fasten the replacement heat insulation lining 30a on the surface of the inner layer 32a, thereby enhancing the fixing effect of the replacement heat insulation lining 30 a.
Referring to fig. 3A, 3B, 7A and 7B, the rapid-action device for heating and pressurizing an electronic component, wherein the first pressurizing device 41 is operated in such a way that the pressure in the accommodating space 13 and the pressure in the enclosed heat-insulating spaces 33, 33A are modulated to the predetermined pressure substantially simultaneously.
Referring to fig. 1 to 6 and 11, the rapid-backup device for an electronic device heating and pressurizing furnace further comprises a second pressurizing device 42, wherein the enclosed heat-insulation space 33 is provided in a sealing manner, and the second pressurizing device 42 is operated in such a way that the pressure in the accommodating space 13 and the pressure in the enclosed heat-insulation space 33 are substantially simultaneously modulated to the predetermined pressure.
Referring to fig. 3A, 3B, 10 and 11, the rapid-repair device for an electronic component heating and pressurizing furnace further comprises a particle detector 60 connected to the enclosed heat insulation space 33 to detect the particle content of the enclosed heat insulation space 33, so as to determine whether the filling material in the enclosed heat insulation space 33 needs to be replenished or replaced for rapid replacement of the replacement heat insulation lining 30.
Referring to fig. 6 and 9, the rapid equipment for heating and pressurizing treatment furnace for electronic components is provided, wherein a material having a thermal conductivity lower than 16W/mK is filled in the enclosed heat insulation spaces 33, 33 a.
The electronic element heating and pressurizing treatment furnace rapid preparation device is characterized in that the substance is gas.
The electronic component heating and pressurizing treatment furnace rapid preparation device is characterized in that the gas is air or nitrogen.
The electronic element heating and pressurizing treatment furnace rapid preparation device is characterized in that the substance is carbon, glass, teflon or water.
Referring to fig. 5 to 9, the electronic component heating and pressurizing furnace rapid tooling apparatus is shown in which the replacement insulating bushings 30, 30a are made of metal.
Referring to fig. 3A, 4, 6, 10 and 11, the rapid-repair device for an electronic device heating and pressurizing furnace further comprises at least one partition 70 for partitioning the enclosed heat-insulation space 33 into a plurality of areas.
Referring to fig. 3A, 4, 6, 10 and 11, the separator 70 is made of metal.
As can be seen from the above, the rapid preparation device for an electronic component heating and pressurizing treatment furnace of the present invention is a novel element which meets the invention patent for the first time in the industry, and the comprehensive innovative design meets the advancing element of the invention patent, wherein the pollutant is attached in the production process in the furnace, and the heat insulation lining on the peripheral surface of the accommodating space is provided with the replacement heat insulation lining, so that when the pollutant is attached to the heat insulation lining to cause the heat insulation lining to be polluted, the clean replacement heat insulation lining is only needed to replace, the production operation can be continued, and the downtime is compressed to a very short time, thereby the production efficiency and the productivity can be increased, and the better industrial applicability is met.
The above description is illustrative of the invention and is not to be construed as limiting, and it will be understood by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (18)
1. The utility model provides an electronic component heats quick preparation device of pressurization treatment furnace which characterized in that includes:
the cavity comprises a door and a cylinder body, and a containing space is formed in the cylinder body;
at least one heating device, which is arranged in the accommodating space and is used for modulating the temperature in the accommodating space to a preset temperature;
the heat insulation lining comprises an outer layer and an inner layer, wherein the outer layer is arranged on the inner wall of the cylinder body, the inner layer is arranged towards the inside of the accommodating space relative to the outer layer so as to form a closed heat insulation space between the outer layer and the inner layer, the thickness of the inner layer is smaller than that of the cylinder body part corresponding to the heat insulation lining, a plurality of radial expansion structures are axially arranged in a slot of the heat insulation lining, and the heat insulation lining is provided with radial expansion force support and can be fixed in the cylinder body or reversely detached from the inner wall of the cylinder body;
a first pressurizing means for modulating the pressure in the accommodating space to a predetermined pressure greater than 1 atm; and
the fan is arranged in the accommodating space, is connected to a driving motor through a transmission shaft protruding out of the cylinder body, and is driven to rotate by the driving motor so as to promote the temperature modulation efficiency of the heating device on the accommodating space.
2. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 1, wherein: the enclosed heat insulation space is arranged in a non-sealing way, and the pressure in the enclosed heat insulation space of the replacement heat insulation lining is modulated to be substantially the same as the pressure in the accommodating space by the first pressurizing device, so that the replacement heat insulation lining is prevented from deforming when the pressure in the accommodating space is changed.
3. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 1, wherein: the device also comprises a second pressurizing device, wherein the enclosed heat insulation space is arranged in a sealing way, and the second pressurizing device is operated in a mode that the pressure in the accommodating space and the pressure in the enclosed heat insulation space are modulated to the preset pressure at the same time.
4. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 1, wherein: the inner layer is axially arranged with a plurality of C-shaped rings towards the accommodating space, and two ends of the C-shaped rings are locked with a stretching structure for stretching and fixing the replacement heat insulation lining or reversely detaching the C-shaped rings from the replacement heat insulation lining.
5. The rapid equipment for heating and pressurizing electronic component treating furnace according to claim 4, wherein: one end of the stretching structure is provided with a right-handed thread, and the other end is provided with a left-handed thread, and the C-shaped ring is locked or loosened rapidly.
6. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 4 or 5, wherein: the C-shaped rings are uniformly arranged, so that the C-shaped rings uniformly apply force to the replacement heat insulation lining, and the replacement heat insulation lining is fastened on the surface of the inner layer.
7. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 1, wherein: at least one partition member is provided for dividing the enclosed heat insulation space into a plurality of areas.
8. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 7, wherein: the separator is made of metal.
9. A rapid retooling device for an electronic component heating and pressurizing furnace as claimed in claim 2 or 3, characterized in that: the particle detector is connected to the enclosed heat insulation space to detect the particle content discharged from the enclosed heat insulation space.
10. The utility model provides an electronic component heats quick preparation device of pressurization treatment furnace which characterized in that includes:
the cavity comprises a door and a cylinder body, and a containing space is formed in the cylinder body;
at least one heating device, which is arranged in the accommodating space and is used for modulating the temperature in the accommodating space to a preset temperature;
the heat insulation lining comprises at least one replaceable heat insulation lining, wherein the replaceable heat insulation lining is arranged in a C shape in cross section and comprises an outer layer and an inner layer, the outer layer is arranged on the inner wall of the cylinder body, the inner layer is arranged towards the inside of the accommodating space relative to the outer layer so as to form a closed heat insulation space between the outer layer and the inner layer, the thickness of the inner layer is smaller than that of the cylinder body part corresponding to the replaceable heat insulation lining, a plate group protruding towards the accommodating space is arranged at a slot position disconnected at two ends of the replaceable heat insulation lining, and the plate group is combined with a plurality of radial expansion structures, so that the replaceable heat insulation lining is supported by radial expansion force and can be fixed on the inner wall of the cylinder body, or the replaceable heat insulation lining is reversely detached from the inner wall of the cylinder body;
a first pressurizing means for modulating the pressure in the accommodating space to a predetermined pressure greater than 1 atm; and
the fan is arranged in the accommodating space, is connected to a driving motor through a transmission shaft protruding out of the cylinder body, and is driven to rotate by the driving motor so as to promote the temperature modulation efficiency of the heating device on the accommodating space.
11. The electronic component heating and pressurizing furnace rapid-backup apparatus according to claim 10, wherein: the enclosed heat insulation space is arranged in a non-sealing way, and the pressure in the enclosed heat insulation space of the replacement heat insulation lining is modulated to be substantially the same as the pressure in the accommodating space by the first pressurizing device, so that the replacement heat insulation lining is prevented from deforming when the pressure in the accommodating space is changed.
12. The electronic component heating and pressurizing furnace rapid-backup apparatus according to claim 10, wherein: the inner layer is axially arranged with a plurality of C-shaped rings towards the accommodating space, and two ends of the C-shaped rings are locked with a stretching structure for stretching and fixing the replacement heat insulation lining or reversely detaching the C-shaped rings from the replacement heat insulation lining.
13. The electronic component heating and pressurizing furnace rapid-backup apparatus according to claim 10, wherein: the first pressurizing device is operated in such a manner that the pressure in the accommodating space and the pressure in the enclosed heat-insulating space are substantially simultaneously modulated to the predetermined pressure.
14. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 1 or 10, wherein: the enclosed heat-insulating space is filled with a substance having a heat conductivity coefficient lower than 16W/mK.
15. The electronic component heating and pressurizing furnace rapid-backup apparatus according to claim 14, wherein: the substance is a gas.
16. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 15, wherein: the gas is air or nitrogen.
17. The electronic component heating and pressurizing furnace rapid-backup apparatus according to claim 14, wherein: the substance is carbon, glass, teflon or water.
18. The electronic component heating and pressurizing furnace rapid-preparation device according to claim 1 or 10, wherein: the replacement insulating bush is made of metal.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111102886 | 2022-01-24 | ||
| TW111102886A TWI788202B (en) | 2022-01-24 | 2022-01-24 | Electronic component heating and pressure treatment furnace rapid preparation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116481311A true CN116481311A (en) | 2023-07-25 |
Family
ID=85795231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211425057.7A Pending CN116481311A (en) | 2022-01-24 | 2022-11-14 | Quick servicing device for electronic component heating and pressurizing treatment furnace |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN116481311A (en) |
| TW (1) | TWI788202B (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3120035B2 (en) * | 1996-04-16 | 2000-12-25 | 新日本製鐵株式会社 | Construction method of refractory lining of rotary kiln |
| JP2001208478A (en) * | 2000-01-31 | 2001-08-03 | Tokyo Electron Ltd | Thermal processor |
| TWI524045B (en) * | 2013-11-11 | 2016-03-01 | 印鋐科技有限公司 | Heating and pressurizing treatment oven for manufacturing electronic devices |
| CN107990725A (en) * | 2017-11-29 | 2018-05-04 | 慈溪市舒润卫浴实业有限公司 | A kind of new electromagnetic induction furnace |
-
2022
- 2022-01-24 TW TW111102886A patent/TWI788202B/en active
- 2022-11-14 CN CN202211425057.7A patent/CN116481311A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| TWI788202B (en) | 2022-12-21 |
| TW202331177A (en) | 2023-08-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8939646B2 (en) | Shaft support and lubrication assembly | |
| KR101207091B1 (en) | Autoclave device and the operation way | |
| CN103256224A (en) | Screw rotor for screw vacuum pump | |
| JPH0523900A (en) | Variable heat conducting type device | |
| CN116481311A (en) | Quick servicing device for electronic component heating and pressurizing treatment furnace | |
| CN106183220A (en) | A kind of composite bimetal pipe Thermal expansion shrinkage combines production method | |
| US10267337B2 (en) | Vacuum pump and method of manufacturing vacuum pump | |
| JPH10270452A (en) | Heating and pressurizing device | |
| US9897102B2 (en) | Structure improvement of pump casing with PFA liner | |
| EP3183522B1 (en) | Support and compression assemblies for curvilinear molten metal transfer device | |
| US9283696B2 (en) | Molding device | |
| US3173522A (en) | Joints | |
| CN111349768B (en) | High-pressure torsion device and method for changing material property of workpiece by using same | |
| CN105319311A (en) | Method and system for decoupling capillary column from gas chromatography-mass spectrometry (GC-MS) system | |
| JP6113071B2 (en) | Vacuum pump | |
| CN203738334U (en) | Device for disassembling and assembling roller sleeve in cold state | |
| EA022131B9 (en) | Device and method for transporting heat | |
| JP6735259B2 (en) | Fluid machine and its sleeve removal method | |
| US20180080714A1 (en) | High temperature vacuum furnace hot zone with improved thermal efficiency | |
| KR101273425B1 (en) | A sealing apparatus for a high-temperature rotary kiln | |
| CN111349767A (en) | High-pressure torsion device and method for changing material properties of workpiece by using same | |
| Santo et al. | Manufacturing of a shape memory polymer actuator | |
| JP5442146B2 (en) | Hermetic compressor | |
| CN219477735U (en) | Integrated shaft type vacuum pump motor stator assembly | |
| CN105508600B (en) | Heated pressure container in a kind of low temperature prestressing force internal pressure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |