CN116457157A - Material handling robot with magnetically guided end effector - Google Patents

Abstract

An apparatus comprising: a driving unit; and an arm assembly connected to the drive unit, wherein the arm assembly includes a traversing platform having an end effector configured to carry a payload thereon; a linear actuation system configured to drive the traversing platform in a linear direction; and a magnetic support system including at least one guide attached to the frame of the arm assembly, a plurality of vertical actuators attached to the traversing platform, and a plurality of horizontal actuators attached to the traversing platform, the plurality of vertical actuators configured to move the traversing platform in a vertical direction with the at least one guide relative to the linear direction, and the plurality of horizontal actuators configured to move the traversing platform in a horizontal direction with the at least one guide relative to the linear direction.

Description

Material handling robot with magnetically guided end effector

Background

The exemplary and non-limiting embodiments relate generally to a materials handling robot and, more particularly, to a materials handling robot that manipulates and transfers payloads such as semiconductor wafers in a semiconductor processing system, for example, using one or more magnetically guided end effectors.

Disclosure of Invention

According to one aspect, an apparatus comprises: a driving unit; and an arm assembly connected to the drive unit, wherein the arm assembly includes a traversing platform having an end effector configured to carry a payload thereon; a linear actuation system configured to drive the traversing platform in a linear direction; and a magnetic support system including at least one guide attached to the frame of the arm assembly, a plurality of vertical actuators attached to the traversing platform, and a plurality of horizontal actuators attached to the traversing platform, the plurality of vertical actuators configured to move the traversing platform with the at least one guide in a vertical direction relative to the linear direction, and the plurality of horizontal actuators configured to move the traversing platform with the at least one guide in a horizontal direction relative to the linear direction.

According to another aspect, an apparatus comprises: at least one processor; and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus at least to: actuating three vertical actuators to control a first degree of freedom, a second degree of freedom, and a third degree of freedom related to a vertical position of a traversing platform of the robot; actuating three horizontal actuators to control a fourth degree of freedom and a fifth degree of freedom related to a horizontal position of a traversing platform of the robot; and actuating the linear actuator to control a sixth degree of freedom associated with the linear movement of the traversing platform of the robot.

In another aspect, a method of adjusting a position of a traversing platform of a robot includes: actuating three vertical actuators to control a first degree of freedom, a second degree of freedom, and a third degree of freedom associated with a vertical position of the traversing platform; actuating three horizontal actuators to control a fourth degree of freedom and a fifth degree of freedom associated with a horizontal position of the traversing platform; and actuating the linear actuator to control a sixth degree of freedom associated with the linear movement of the traversing platform.

In another aspect, an apparatus includes: a driving unit; and an arm assembly connected to the driving unit. The arm assembly includes: a first traversing platform having a first end effector configured to carry a first payload thereon; a first linear actuation system configured to drive the first traversing platform in a first direction; and a first magnetic support system comprising at least one first guide attached to the frame of the arm assembly, a first plurality of vertical actuators attached to the first traversing platform, and a first plurality of horizontal actuators attached to the first traversing platform, the first plurality of vertical actuators configured to move the first traversing platform in a vertical direction with the at least one first guide, and the first plurality of horizontal actuators configured to move the first traversing platform in a horizontal direction with the at least one first guide; and at least one second traversing platform having a second end effector configured to carry a second payload thereon; a second linear actuation system configured to drive a second traversing platform in the first direction; and a second magnetic support system including at least one second guide attached to the frame of the arm assembly, a second plurality of vertical actuators attached to the second traversing platform, and a second plurality of horizontal actuators attached to the second traversing platform, the second plurality of vertical actuators configured to move the second traversing platform in a vertical direction with the at least one second guide, and the second plurality of horizontal actuators configured to move the second traversing platform in a horizontal direction with the at least one second guide.

Drawings

The foregoing aspects and other features are explained in the following description, taken in connection with the accompanying drawings, wherein:

FIGS. 1A, 1B and 1C are schematic descriptions of views of one example of a robot;

FIGS. 2A, 2B and 2C are schematic illustrations of internal components of a robotic arm of a robot;

FIG. 2D is a schematic depiction of a traversing platform and linear actuation system within a robotic frame;

FIG. 2E is a schematic depiction of a traversing platform and actuators and sensors located on the traversing platform;

fig. 3A and 3B are schematic illustrations of top and side views, respectively, of a unidirectional actuator of a robot;

fig. 4A and 4B are schematic illustrations of top and side views, respectively, of a bi-directional actuator of a robot;

5 (a), 5 (b), 5 (c), 5 (d), 5 (e), 5 (f), 5 (g), and 5 (h) are schematic illustrations of the extension of various end effectors;

6A, 6B, 6C, 6D and 6E are schematic illustrations of the movement of various traversing platforms of a robot; and

fig. 7A, 7B, 8, 9 and 10 are graphical representations of movement of the traversing platform and end effector of the robot.

Detailed Description

Although these features will be described with reference to the example embodiments shown in the drawings, it should be understood that these features may be embodied in many alternate forms of embodiments. In addition, any suitable size, shape or type of elements or materials could be used.

Referring to fig. 1A-1C, one example embodiment of a robot is schematically depicted at 100. The robot 100 may include a drive unit 110, an arm assembly including at least one robot arm 120, and a main control system 130 including a processor 20 and a memory 22. In fig. 1A-1C, a robot 100 is shown with an end effector in a retracted position. The following U.S. patents (incorporated herein by reference in their entirety) disclose various robotic arms and substrate handling and transport devices: 9,149,936; 10,224,232; 10,363,665; 10,538,000; 10,543,596; 10,580,682; 10,596,710; 10,742,070; 10,269,604 and U.S. patent publication 2020/0262060A 1.

In the particular example of fig. 1A-1C, the robot 100 includes four end effectors, each end effector configured to carry a payload S. Referring to fig. 1B, the end effector includes a pair of upper end effectors, such as an upper left end effector 140 and an upper right end effector 142, arranged in a side-by-side fashion. The end effector also includes a pair of lower end effectors, such as a lower left end effector 144 and a lower right end effector 146, which are also arranged in a side-by-side fashion. The two pairs of end effectors, e.g., upper and lower pairs, are arranged in a stacked configuration.

The drive unit 110 of the robot 100 may include a spindle assembly configured to rotate the robot arm 120 or portions of the robot arm 120 about the pivot point P. The spindle assembly may include a spindle housing, one or more motors, and one or more drive shafts. If desired, the drive unit 110 may also include a vertical lifting mechanism (e.g., including one or more linear track bearing arrangements and a motor-driven ball screw) configured to lift the spindle assembly vertically up or down.

Considering that the robotic arm 100 may operate in a vacuum environment, the spindle assembly of the drive unit 110 may include seals and other features that may allow the drive shaft(s) or upper portion of the drive shaft(s) to be in a vacuum environment. As an example, a substantially cylindrical isolation barrier between the rotor(s) of the motor(s) and the stator(s) of the motor(s) may be used to contain the external atmosphere environment on the stator side (outside) of the isolation barrier and the vacuum environment on the rotor side (inside) of the isolation barrier, in which case the drive shaft(s) may be in the vacuum environment as a whole. As another example, a rotary seal (such as a ferrofluid seal) may be used to allow the upper portion of the drive shaft to protrude from the atmosphere to the vacuum environment.

Referring to fig. 2A-2C, the robotic arm 120 may include a frame 200, one or more traversing platforms 210, and one or more end effectors 140, 142, 144, 146, each attached to a respective traversing platform 210. As shown in fig. 2A-2C, which provide simplified partial cross-sectional views of an example internal arrangement of the robotic arm 120 of fig. 1A-1C, each of the traversing platforms 210 can be driven by the linear actuation system 220 and guided by the magnetic support system 248. In cross section A-A of fig. 2B, the internal components of the linear actuation system 220 and the traversing platform 210 are not shown for clarity of illustration.

Referring now to fig. 2D, a linear actuation system 220 may include at least one linear actuator 222, at least one Position Sensor (PS) 228, and at least one position control system 230 having a processor 16 and a memory 18. The position control system 230 may be incorporated into the main control system 130.

The linear actuator 222 may include a movable portion 236 that may be connected to the traversing platform 210 and a fixed portion 226 that may be attached to the frame 200 of the robotic arm 120. For example, the linear actuator 222 may include a linear motor (M), such as a permanent magnet linear motor. In this example, movable portion 236 may be an applicator having a coil 238 and fixed portion 226 may be a magnetic track 240. Linear actuator 222 may be configured to generate a force (e.g., via force applicator and coil 238) between movable portion 236 and fixed portion 226 substantially in the desired lateral movement direction of traversing platform 210 (e.g., along track 240).

The position sensor 228 of the linear actuation system 220 may be configured to measure the position of the traverse platform 210 in a desired direction of traverse motion. By way of example, the position sensor 228 may be a position encoder, such as an optical, magnetic, inductive, or capacitive position encoder, a laser interferometer, or any other suitable device capable of measuring the position of the traversing platform 210 along a desired direction of traversing motion.

Using measurements from the position sensor 228, the force generated by the linear actuator 222 may be used to control the position of the traversing platform 210 along the direction of its desired traversing motion.

The magnetic support system 248 may be configured to support and guide the traversing platform 210 in the direction of its desired traversing motion. The magnetic support system 248 may include one or more fixed guides 250 attached to the frame 200 of the robotic arm 120 and arranged substantially parallel to the desired traversing motion of the traversing platform 210.

In the exemplary embodiment shown in fig. 2D, the fixed guide 250 may be two substantially parallel guides, each featuring a C-shaped cross-section. Each C-shaped section may be defined by two parallel soft magnetic sections 250a, 250b attached to a non-magnetic vertical structure 250C.

As shown in fig. 2E, the magnetic support system 248 may also include a plurality of bi-directional electromagnetic actuators 260a, 260b, 260c attached to the traversing platform 210 and configured to generate a force between the traversing platform 210 and the fixed guides 250 (only one of which is partially shown in fig. 2E). The magnetic support system 248 may also include a sensor 262 that may determine the position of the traversing platform 210 relative to the fixed guide 250 and a platform control system 270 that may control the position of the traversing platform 210 relative to the fixed guide 250. The platform control system 270 of the magnetic support system 248 may be coupled to the main control system 130. In fig. 2E, traversing platform 210 is shown with flat upper and lower surfaces for purposes of clearly depicting the components located thereon.

Still referring to fig. 2E, a first one of the bi-directional electromagnetic actuators 260a may be attached to the traversing platform 210 on or near a side surface of the traversing platform 210 (such as on a side of the traversing platform 210) such that a bi-directional vertical force perpendicular to the surface of the fixed guide 250 may be generated between the traversing platform 210 and the corresponding fixed guide 250. The second bi-directional electromagnetic actuator 260b may be attached near the front of the traversing platform 210 on the other side such that a bi-directional vertical force perpendicular to the surface of the fixed guide 250 may be generated between the traversing platform 210 and the other fixed guide 250. The third bi-directional electromagnetic actuator 260c may be attached near the rear of the traversing platform 210 on the same side as the second bi-directional actuator 260b such that a bi-directional vertical force perpendicular to the surface of the fixed guide 250 may be generated between the traversing platform 210 and the fixed guide 250. The three bi-directional electromagnetic actuators 260a, 260b, 260c described above are referred to herein as vertical actuators of the magnetic support system 248.

As also shown in fig. 2E, the magnetic support system 248 may also include a plurality of unidirectional electromagnetic actuators 280a, 280b, 280c attached to the traversing platform and configured to generate a force between the traversing platform 210 and the fixed guide 250. The first unidirectional electromagnetic actuator 280a may be attached to the traversing platform 210 proximate to the first vertical actuator 260a such that the first unidirectional electromagnetic actuator 280a may generate a unidirectional horizontal force between the traversing platform 210 and the corresponding fixed guide 250 in a direction perpendicular to the surface of the fixed guide 250. The second unidirectional electromagnetic actuator 280b may be attached to the traversing platform 210 proximate to the second vertical actuator 260b such that the second unidirectional electromagnetic actuator 280b may generate a unidirectional horizontal force between the traversing platform 210 and the other fixed guide 250 that is perpendicular to the surface of the fixed guide 250. The third unidirectional electromagnetic actuator 280c may be attached to the traversing platform 210 proximate to the third vertical actuator 260c such that the third vertical actuator 260c may generate a unidirectional horizontal force between the traversing platform 210 and the fixed guide 250 perpendicular to the surface of the fixed guide 250. The three unidirectional actuators 280a, 280b, 280c described above are referred to as horizontal actuators of the magnetic support system 248.

The first vertical sensor 290a may be located at or near the position of the first vertical actuator 260a configured to measure the position of the traversing platform 210 in the vertical direction relative to one of the fixed guides 250. Similarly, a second vertical sensor 290b that may measure the position of the traversing platform 210 in the vertical direction relative to another fixed guide 250 may be located at or near the position of the second vertical actuator 260b, and a third vertical sensor 290c that may measure the position of the traversing platform 210 in the vertical direction relative to the same fixed guide 250 may be located at or near the position of the third vertical actuator 260 c.

The first level sensor 300a, which may be located at or near the position of the second level actuator 280b, is configured to measure the position of the traversing platform 210 in a horizontal direction relative to one of the fixed guides 250. Similarly, a second level sensor 300b, which may measure the position of the traversing platform 210 in the horizontal direction relative to another fixed guide 250, may be located at or near the position of the third level actuator 280 c.

As an example, the above-described sensor that may measure the position of the traversing stage 210 in the vertical direction and in the horizontal direction relative to the fixed guide 250 may be a gap sensor, such as an optical, magnetic, inductive, or capacitive gap sensor.

Traversing platform 210 can be considered a single rigid body in space and thus has six degrees of freedom. For example, six degrees of freedom may be represented by three Cartesian coordinates (e.g., x, y, and z coordinates) and three angular coordinates (e.g., representing rotations about the x, y, and z axes) of a reference point on traversing stage 210. Conveniently, the angle indicative of rotation about the x-axis may be referred to as the roll angle, the angle indicative of rotation about the y-axis may be referred to as the pitch angle, and the angle indicative of rotation about the z-axis may be referred to as the yaw angle of traversing platform 210.

Based on measurements from the sensors, three bi-directional vertical actuators 260a, 260b, 260c may be used to control three degrees of freedom of the traversing platform 210, namely vertical position, pitch angle, and roll angle, as represented by the z-axis coordinates of the traversing platform 210. Three unidirectional horizontal actuators 280a, 280b, 280c may be used to control the other two degrees of freedom of the traversing platform 210, namely the lateral position represented by y-axis coordinates and the yaw angle of the traversing platform 210. The linear actuator 222 may be used to control the remaining degrees of freedom, i.e., the position of the traversing platform 210 along the desired direction of traversing motion represented by the x-axis coordinates.

Referring to fig. 3A and 3B, examples of unidirectional electromagnetic actuators that may be used as horizontal actuators in a magnetic support system are schematically illustrated. Although unidirectional horizontal actuator 280a is shown, other unidirectional horizontal actuators (e.g., 280b and 280 c) are similar. Unidirectional horizontal actuator 280a may include an E-shaped iron core 310 and a winding 312 mounted to iron core 310 and configured to generate a magnetic flux through iron core 310, which in turn may generate an attractive force between iron core 310 and fixed guide 250 of the magnetic support system. As shown, the path of the magnetic flux is illustrated by the dashed line; the arrows indicate the forces generated by and acting on the actuator 280 a.

Referring to fig. 4A and 4B, an example of a bi-directional electromagnetic actuator arrangement that may be used as a vertical actuator in a magnetic support system is schematically shown. Although a bi-directional electromagnetic actuator 260a is shown, other bi-directional electromagnetic actuators (e.g., 260b and 260 c) are similar. In this example, the two unidirectional actuators may be combined into a single mechanical assembly having two windings 412 and a shared core 410 configured to interact with the surface defining the C-shaped guide 250. Because the center section of the core 410 is shared by the two windings 412, this arrangement may provide a desirably smaller and lighter actuator assembly (since the two windings 412 are not energized at the same time, the center section of the core 410 may be shared) than two unidirectional actuators.

Referring back to fig. 2B, a contactless linear power coupler 500 may be utilized to deliver power from the frame 200 of the robotic arm 120 to the traversing platform 210. The linear power coupler 500 may operate, for example, based on the inductive principle and as shown in fig. 2A-2C, may feature one or more primary modules 510 coupled to the frame 200 of the robotic arm 120 and corresponding interacting secondary modules integrated into the traversing platform 210. The frame 200 of the robotic arm 120 may receive power from the drive unit 110 using a contactless rotary power coupler. The rotary power coupler may operate, for example, based on the principle of inductance and may feature a main module coupled to the drive unit 110 and an auxiliary module attached to the frame 200 of the robotic arm 120. As another example, the linear power coupler 500 and the rotary power coupler may utilize a capacitive operating principle. Alternatively, linear power coupler 500 and rotary power coupler may utilize any suitable operating principles.

Communication with the traversing platform 210 can include communication between the traversing platform 210 and the frame 200 of the robotic arm 120 and communication between the frame 200 of the robotic arm 120 and the drive unit 110, which can be accomplished in a non-contact manner (e.g., using inductive, capacitive, optical, or radio frequency principles, or any suitable combination of physical principles).

The facing surfaces of the traversing platform 210 and the frame 200 of the robotic arm 120 can be configured to facilitate heat transfer from the traversing platform 210 to the frame 200 of the robotic arm 120. As an example, the traversing platform 210 and the frame 200 of the robotic arm 120 can feature staggered features (e.g., fins) to increase the effective area of heat transfer while allowing for traversing movement of the traversing platform relative to the frame 200 of the robotic arm 120. Furthermore, the active surfaces may be treated to increase their thermal emissivity. For example, the component may be made of aluminum and the active surface may be anodized.

In order to remove heat from the frame 200 of the robotic arm 120, a rotary thermal coupler may be used between the frame 200 of the robotic arm 120 and the housing of the spindle assembly of the drive unit. An exemplary rotary thermal coupler may include two portions, each featuring one or more substantially cylindrical surfaces coaxially aligned with a corresponding rotary joint and arranged such that a cylindrical surface on one portion of the thermal coupler faces an opposing cylindrical surface on the other portion of the thermal coupler. The opposing cylindrical surfaces may be configured to transfer heat via radiation across a gap between the opposing substantially cylindrical surfaces of the rotary thermal coupler. If residual gas is present in the vacuum environment, the radiation mechanism may be supplemented by convection/conduction of the environment between the opposing substantially cylindrical surfaces of the rotary thermocouple.

To increase the effective area and minimize the volume occupied by the exemplary rotary thermal coupler, an array of substantially cylindrical features may be provided on each of the two portions of the rotary thermal coupler, and the two arrays may be arranged in an interleaved manner.

Alternatively, the two portions of the rotary thermal coupler may provide opposing disk-shaped features configured for contactless heat transfer across a gap therebetween. As another alternative, any other suitable shape of the effective features of the rotary thermal coupler may be utilized, including, but not limited to, conical and spherical, and combinations thereof.

Also, the active surfaces of the rotary thermal couplers may be treated to increase their thermal emissivity. For example, the two parts of the rotary thermal coupler may be made of aluminum and the active surface may be anodized.

The housing of the spindle assembly of the drive unit (spindle housing) can be cooled passively or actively (liquid, forced air). Alternatively, in particular if the drive unit features a lifting mechanism, the surfaces of the spindle housing and the frame of the drive unit facing each other may be configured to facilitate the transfer of heat from the spindle housing to the frame of the drive unit. For example, the headstock and the frame of the drive unit may feature staggered features (e.g., fins) to increase the effective area of heat transfer while allowing vertical movement of the spindle assembly relative to the frame of the drive unit. Also, the active surfaces may be treated to increase their thermal emissivity. For example, the component may be made of aluminum and the active surface may be anodized.

Referring back to fig. 1A-2C, the control system of the robot 100 according to the present invention may include a main control system 130 that may be supplemented by various control modules responsible for controlling one or more axes of the robot 100. The main control system 130 may coordinate the various control modules (if applicable) and control system(s) of the linear actuation system(s) 220 of the traversing platform(s) 210 and control system(s) of the magnetic support system(s) 248 of the traversing platform(s) 210. The main control system 130 may include one or more processors 20 and one or more memories 22 storing code or programs for controlling a system that operates the driving unit 110. The master control system 130 may also control one or more sensors for sensing, for example, the position of the substrate on the components of the drive unit 110, the components of the robotic arms, and/or the end effectors 140, 142, 144, 146.

Fig. 5 illustrates the operation of the robot of fig. 1A to 1C. Figure (a) shows all end effectors in a retracted position. Fig. (b), fig. (c), fig. (e) and fig. (f) show extended end effectors 140, 142, 144, 146, respectively. Fig. (d) shows end effectors 140 and 142 extending simultaneously. Figure (g) shows end effectors 144 and 146 extending simultaneously. Figure (h) shows all end effectors, such as end effectors 140, 142, 144, 146, extending simultaneously.

As shown in fig. 6A-6E (which illustrate robot 100 with one end effector 140 for clarity of illustration), magnetic support system 248 may be used to adjust the vertical position, lateral position, pitch angle, roll angle, and yaw angle of each of the traversing platforms (and thus, the vertical position, lateral position, pitch angle, roll angle, and yaw angle of the end effector carried by the respective traversing platform) independently of the other traversing platforms. In fig. 6A, arrow 600 depicts vertical position adjustment, fig. 6A shows end effector 140 in a neutral position and in upper and lower positions in phantom; in fig. 6B, pitch angle adjustment is depicted by arrow 610; in fig. 6C, lateral position adjustment of the end effectors 140, 142 is depicted by arrow 620; in fig. 6D, yaw angle adjustment is depicted by arrow 630; in fig. 6E, the roll angle adjustment of the end effectors 140, 142 is depicted by arrow 640.

With further reference to fig. 7-10, the following terms may be introduced in order to describe the above capabilities in more detail:

CEE end effector center

CTP sideslip platform center

Effective length (m) of L traversing platform

Longitudinal offset (m) of X-end effector center from traversing stage center

Lateral offset (m) of the Y-end effector center from the traversing stage center

Vertical offset of Z end effector center from traversing stage center (m)

Effective width (m) of W traversing platform

x _EE X-coordinate (m) of end effector center

x _TP Center x coordinate of transverse moving platformm)

z _EE Z-coordinate (m) of end effector center

y _1F Y-coordinate (m) of front sensor of traversing platform

y _1R Y-coordinate (m) of rear sensor of traversing stage

y _TP Center y coordinate (m) of traversing platform

y _TP0 Y-coordinate (m) of center of traversing platform at nominal position

z _1F Z-coordinate (m) of front sensor of first side of traversing platform

z _1R Z coordinate (m) of rear sensor of first side of traversing platform

z _2C Z-coordinate (m) of center sensor on second side of traversing stage

z _TP Center z coordinate (m) of traversing platform

z _Tp0 The nominal position traversing the z-coordinate (m) of the platform center

D _VR Vertical adjustment (m) of vertical lift of robot drive unit

q _P Pitch angle (rad) of traversing stage and end effector

q _R Roll angle (rad) of traversing stage and end effector

q _Y Yaw angle (rad) of traversing stage and end effector

The above-mentioned x, y and z coordinates are defined in a coordinate system of the frame 200 rigidly connected to the robotic arm 120. Thus, the coordinate system may rotate with the drive shaft of the drive unit 110 and move vertically with the vertical lifting mechanism of the drive unit 110.

For simplicity, as shown in fig. 7-10, it is assumed that the position sensor 228 of the linear actuation system 220 is located at the center of the traversing stage 210, and that the sensor of the magnetic support system 248 and the position sensor 228 of the linear actuation system 220 are located in the same plane on the traversing stage 210.

Using pure translational movement of the traversing platform 210 relative to the frame 200 of the robotic arm 120, the vertical position of the end effector 142 (or any other end effector 140, 144, 146) can be adjusted by positioning the traversing platform as follows:

z _1F ＝z _EE –Z (1)

z _1R ＝z _EE –Z (2)

z _2C ＝z _EE –Z (3)

referring to fig. 8, the pitch angle of the traversing platform 210 can be adjusted by controlling its z-coordinate according to the following expression:

z _1F ＝z _TP0 +(L/2)sinθ _P (4)

z _1R ＝z _TP0 –(L/2)sinθ _P (5)

z _2C ＝z _TP0 (6)

when the traversing platform 210 is repositioned from an initial position (such as its nominal position) to a new position according to equations (4) through (6), it can be rotated relative to the center of the traversing platform 210, or more precisely, about an axis passing through the center of the traversing platform 210 and parallel to the y-axis of the coordinate system.

The pitch angle of traversing stage 210 can be conveniently used to adjust the vertical position of end effector 142 beyond that achievable with pure translational motion. To adjust the vertical position of the end effector 142 by changing the pitch angle of the traversing platform 210, the following pitch angle can be used in equations (4) to (6):

θ _P ＝acos[(z _EE –z _TP0 )/sqrt(X ² +Z ² )]+atan(X/Z) (7)

On the other hand, if desired, the pitch angle of the end effector 142 may be adjusted independently (e.g., without any effect) of its vertical position by positioning the traversing platform 210 according to the following expression:

z _1F ＝z _EE –(X–L/2)sinθ _P –Z cosθ _P (8)

z _1R ＝z _EE –(X+L/2)sinθ _P –Z cosθ _P (9)

z _2C ＝z _EE –X sinθ _P –Z cosθ _P (10)

according to equations (8) through (10), when traversing platform 210 is repositioned from an initial position (such as its nominal position) to a new position, traversing platform 210 and end effector 142 can be rotated relative to the end effector center, or more precisely, about an axis passing through the end effector center and parallel to the y-axis of the coordinate system.

For large pitch angle adjustments, the desired position of traversing platform 210 calculated according to equations (8) through (10) may be outside the range of magnetic support system 248. This may occur due to the effect of the longitudinal offset of the end effector center from the traversing platform center. In such cases, the vertical lifting mechanism of the robotic drive unit may be conveniently utilized to maintain the traversing platform 210 within the confines of the magnetic support system 248. The following expressions may be used to determine the position of the traversing platform 210 (represented in the coordinate system of the frame 200 rigidly connected to the robotic arm 120, as defined above) and the adjustment of the vertical position of the vertical lifting mechanism of the drive unit 110:

z _1F ＝z _EE +(L/2)sinθ _P –Z cosθ _P (11)

z _1R ＝z _EE –(L/2)sinθ _P –Z cosθ _P (12)

z _2C ＝z _EE –Z cosθ _P (13)

Δ _VR ＝–X sinθ _P (14)

In practice, adjustment of the vertical position of the vertical lifting mechanism of the drive unit 110 may compensate for factors common to multiple end effectors of the robot 100, such as structural deflection associated with the drive unit 110, and positioning of the traversing platform 210 relative to the frame 200 of the robotic arm 120 may be used for adjustment specific to the respective end effector (e.g., misalignment of the end effector relative to a particular workstation).

To maintain the desired position of the end effector in the x-axis direction regardless of pitch angle, traversing platform 210 can be positioned (using linear actuation system 220) as follows:

x _TP ＝x _EE –X cosθ _P +Z sinθ _P (15)

similarly, referring now to fig. 9, using pure translational motion, the lateral position of the end effector can be adjusted by positioning the traversing platform 210 as follows:

y _1F ＝y _EE –(W/2+Y) (16)

y _1R ＝y _EE –(W/2+Y) (17)

the yaw angle of traversing platform 210 can be adjusted by controlling its y-coordinate according to the following expression:

y _1F ＝y _TP0 –(W/2)cosθ _Y +(L/2)sinθ _Y (18)

y _1R ＝y _TP0 –(W/2)cosθ _Y –(L/2)sinθ _Y (19)

according to equations (18) and (19), when traversing platform 210 is repositioned from an initial position (such as its nominal position) to a new position, traversing platform 210 can be rotated relative to the traversing platform center, or more precisely, about an axis passing through the traversing platform center and parallel to the z-axis of the coordinate system.

The yaw angle of traversing stage 210 can be conveniently used to adjust the lateral position of the end effector beyond what can be achieved with pure translational motion. To adjust the lateral position of the end effector by changing the yaw angle of the traversing platform 210, the following yaw angles can be used in equations (18) and (19):

θ _Y ＝acos{(y _EE –y _TP0 )/sqrt[X ² +(W/2+Y) ² ]}+atan[X/(W/2+Y)] (20)

in another aspect, if desired, the yaw angle of the end effector can be adjusted independently (e.g., without any effect on) its lateral position by positioning the traversing platform 210 according to the following expression:

y _1F ＝y _EE –(X–L/2)sinθ _Y –(W/2+Y)cosθ _Y (21)

y _1R ＝y _EE –(X+L/2)sinθ _Y –(W/2+Y)cosθ _Y (22)

according to equations (21) and (22), when traversing stage 210 is repositioned from an initial position (such as its nominal position) to a new position, traversing stage 210 and end effector can be rotated relative to the end effector center, or more precisely, about an axis passing through the end effector center and parallel to the z-axis of the coordinate system.

To maintain the desired position of the end effector in the x-axis direction regardless of yaw angle, traversing stage 210 can be positioned (using linear actuation system 220) as follows:

x _TP ＝x _EE z–X cosθ _Y +Y sinθ _Y (23)

finally, referring to fig. 10, the roll angle of the traversing stage 210 and the end effector can be adjusted by controlling the z-coordinate of the traversing stage 210 according to the following expression:

z _1F ＝z _TF0 –(L/2)sinθ _R (24)

z _1R ＝z _TF0 –(L/2)sinθ _R (25)

z _2C ＝z _TF0 +(L/2)sinθ _R (26)

According to equations (24) through (26), as the traversing platform 210 is repositioned from an initial position (such as its nominal position) to a new position, it can be rotated relative to the traversing platform center, or more precisely, about an axis passing through the traversing platform center and parallel to the x-axis of the coordinate system.

Adjustment of the roll angle according to equations (24) through (26) above may change the vertical and lateral positions of the end effector. To adjust the roll angle independently of (e.g., without any effect on) the vertical and lateral positions of the end effector, the traversing platform 210 can be positioned according to the following expression:

y _1F ＝y _EE –(Y+W/2)cosθ _R +Z sinθ _R (27)

y _1R ＝y _EE –(Y+W/2)cosθ _R +Z sinθ _R (28)

z _1F ＝z _EE –(Y+W/2)sinθ _R –Z cosθ _R (29)

z _1R ＝z _EE –(Y+W/2)sinθ _R –Z cosθ _R (30)

z _2C ＝z _EE –(X–W/2)sinθ _R –Z cosθ _R (31)

according to equations (29) through (31), when traversing stage 210 is repositioned from an initial position (such as its nominal position) to a new position, traversing stage 210 and end effector can be rotated relative to the end effector center, or more precisely, about an axis passing through the end effector center and parallel to the x-axis of the coordinate system.

The ability to adjust the vertical position, lateral position, pitch angle, roll angle, and yaw angle of each of the traversing platforms 210 (and thus the vertical position, lateral position, pitch angle, roll angle, and yaw angle of the end effector carried by traversing platform 210) may be advantageously used for, for example, the following functions and combinations thereof: (a) Compensating for misalignment of the payload on the end effector as the payload is transferred to the workstation; (b) Compensating for structural deflection of the robot 100 (e.g., the drive unit 110, the frame 200 of the robotic arm 120, or the end effector and its support structure); (c) Active leveling of the end effector, e.g., to keep the end effector horizontal; and (d) active alignment of the end effector with, for example, a workstation.

It should be noted that adjustments may be made when the axis of motion of the robot 100, such as the rotational and vertical lift axes associated with the drive unit 110 or the linear axis of motion associated with the robot arm 120, is stationary, or coordinated with one or more axes of motion of the robot 100 (e.g., during rotational movement, vertical movement, and/or linear extension/retraction movement) during movement of the robot 100 and if desired.

In the particular example embodiment described above, the robot 100 features four end effectors A, B, C, D. They are configured in two pairs, side-by-side end effectors, e.g., an upper pair and a lower pair, and the two pairs are arranged in a stacked configuration. Alternatively, robot 100 may feature a single end effector, two or more stacked end effectors, two or more side-by-side end effectors, or any suitable combination of stacked and side-by-side end effector arrangements.

In another exemplary embodiment, the left and right end effectors may be coupled to the same traversing platform 210. As an example, upper end effectors a and B may be coupled to one traversing stage 210 and lower end effectors C and D may be coupled to another traversing stage.

In another exemplary embodiment, the robotic arm 120 may be configured such that the left end effector (e.g., end effectors a and C) and the right end effector (e.g., end effectors B and D) may translate (move) in lateral directions (left and right) relative to each other.

In another example embodiment, the frame 200 of the robotic arm 120 may include two portions that may be configured to rotate relative to one another, for example, within a limited range. As an example, one portion of the frame 200 may carry left end effectors (e.g., end effectors 140 and 144) and another portion of the frame may carry right end effectors (e.g., end effectors 142 and 146). As another example, one portion of frame 200 may carry upper end effectors (e.g., end effectors 140 and 142) and another portion may carry lower end effectors (e.g., end effectors 144 and 146).

It should also be noted that the drive unit 110 may include more than one spindle assembly and more than one vertical lift mechanism. For example, one spindle assembly with a dedicated vertical lift mechanism may be used in each of the portions of the frame 200 of the robotic arm 120 described above.

Although the description of the example embodiment shown in fig. 1A-2E suggests that the stationary portion of the linear actuator 222 may be passive (e.g., track 240) and the moving portion of the linear actuator 222 may be active (e.g., an forcer with coil 238), the stationary portion of the linear actuator 222 may be active (e.g., a track of coil 238) and the moving portion of the linear actuator 222 may be passive (e.g., a magnetic plate).

Similarly, although the description of the exemplary embodiment shown in fig. 1A-2E shows that vertical and horizontal actuators and horizontal sensors of the magnetic support system may be attached to traversing platform 210, vertical and horizontal actuators and horizontal sensors may be attached to frame 200 of robotic arm 120 and distributed along a desired range of motion of traversing platform 210.

Alternatively, any suitable combination of active and passive portions of the linear actuator 222, vertical and horizontal actuators, and positions of vertical and horizontal sensors may be used.

The features described herein may be used to provide a robot that is capable of picking and placing payloads from/to workstations in cleaning and vacuum environment applications while eliminating contamination associated with mechanical bearings of conventional robotic mechanisms. The features described herein may be used to provide the following capabilities: (a) carrying multiple payloads simultaneously; (b) simultaneously picking, placing and exchanging multiple payloads; and (c) independently picking, placing, and exchanging individual payloads. The above-described capability increases throughput by reducing contamination of payloads and increases productivity by processing multiple payloads simultaneously, while also providing flexibility in sequentially processing individual payloads (e.g., for workstation maintenance reasons).

In one example, an apparatus includes: a driving unit; and an arm assembly connected to the drive unit, wherein the arm assembly includes a traversing platform having an end effector configured to carry a payload thereon; a linear actuation system configured to drive the traversing platform in a linear direction; and a magnetic support system including at least one guide attached to the frame of the arm assembly, a plurality of vertical actuators attached to the traversing platform, and a plurality of horizontal actuators attached to the traversing platform, the plurality of vertical actuators configured to move the traversing platform with the at least one guide in a vertical direction relative to the linear direction, and the plurality of horizontal actuators configured to move the traversing platform with the at least one guide in a horizontal direction relative to the linear direction.

The linear actuation system may include at least one linear actuator, at least one position sensor, and at least one position control system. The plurality of vertical actuators may include three bi-directional electromagnetic actuators, each bi-directional electromagnetic actuator attached to the traversing platform and configured to generate an electromagnetic force between the traversing platform and the at least one guide. A first one of the three bi-directional electromagnetic actuators may be attached proximate one side of the traversing platform, a second one of the three bi-directional electromagnetic actuators may be attached proximate a front of the traversing platform, and a third one of the three bi-directional electromagnetic actuators may be attached proximate a rear of the traversing platform. The plurality of horizontal actuators may include three unidirectional electromagnetic actuators, each unidirectional electromagnetic actuator attached to the traversing platform and configured to generate an electromagnetic force between the traversing platform and the at least one guide. A first one of the three unidirectional electromagnetic actuators may be attached proximate one side of the traversing platform, a second one of the three unidirectional electromagnetic actuators may be attached proximate a front of the traversing platform, and a third one of the three unidirectional electromagnetic actuators may be attached proximate a rear of the traversing platform. The apparatus may further include a plurality of vertical sensors each configured to measure a position of the traversing platform when the traversing platform moves in a vertical direction, and a plurality of horizontal sensors each configured to measure a position of the traversing platform when the traversing platform moves in a horizontal direction. The plurality of vertical sensors may include three vertical sensors and the plurality of vertical actuators may include three vertical actuators, each of the three vertical sensors positioned proximate a corresponding one of the plurality of vertical actuators. The plurality of level sensors may include two level sensors, a first of the two level sensors being positioned proximate the first level actuator and a second of the two level sensors being positioned proximate the second level actuator. The vertical sensor and the horizontal sensor may be optical sensors, magnetic sensors, inductive sensors or capacitive sensors. The apparatus may also include a control system coupled to one or more of the drive unit or the arm assembly, the control system including at least one processor and at least one non-transitory memory including computer program code.

In another example, an apparatus includes: at least one processor; and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus at least to: actuating three vertical actuators to control a first degree of freedom, a second degree of freedom, and a third degree of freedom related to a vertical position of a traversing platform of the robot; actuating three horizontal actuators to control a fourth degree of freedom and a fifth degree of freedom related to a horizontal position of a traversing platform of the robot; and actuating the linear actuator to control a sixth degree of freedom associated with the linear movement of the traversing platform of the robot.

Actuating the device to control the first, second, and third degrees of freedom may include controlling a z-axis coordinate, a pitch angle, and a roll angle of the traversing platform. The pitch angle of the traversing platform can be changed to adjust the vertical position of the traversing platform. The pitch angle of the traversing platform can be varied independently of the vertical position of the traversing platform. Actuating the device to control the fourth degree of freedom and the fifth degree of freedom may include controlling a y-axis coordinate and a yaw angle of the traversing platform. The yaw angle of the traversing platform can be changed to adjust the horizontal position of the traversing platform. The yaw angle of the traversing platform can be changed independently of the horizontal position of the traversing platform. Causing the device to actuate the linear actuator to control the sixth degree of freedom may include controlling an x-axis coordinate of the traversing platform. The roll angle of the traversing platform can be varied to adjust the position of the traversing platform along the z-axis. The roll angle of the traversing platform can be varied independently of the vertical position of the traversing platform and the horizontal position of the traversing platform.

In another example, a method of adjusting a position of a traversing platform of a robot includes: actuating three vertical actuators to control a first degree of freedom, a second degree of freedom, and a third degree of freedom associated with a vertical position of the traversing platform; actuating three horizontal actuators to control a fourth degree of freedom and a fifth degree of freedom associated with a horizontal position of the traversing platform; and actuating the linear actuator to control a sixth degree of freedom associated with the linear movement of the traversing platform.

Actuating the three vertical actuators to control the first degree of freedom, the second degree of freedom, and the third degree of freedom may include controlling a z-axis coordinate, a pitch angle, and a roll angle of the traversing platform. The vertical position of the traversing platform can be adjusted by controlling the pitch angle of the traversing platform. The vertical position of the traversing platform can not be changed by controlling the pitch angle of the traversing platform. Actuating the three horizontal actuators to control the fourth degree of freedom and the fifth degree of freedom may include controlling a y-axis coordinate and a yaw angle of the traversing platform. The horizontal position of the traversing platform can be adjusted by controlling the yaw angle of the traversing platform. The yaw angle of the traversing platform can be controlled without changing the horizontal position of the traversing platform. Actuating the linear actuator to control the sixth degree of freedom may include controlling an x-axis coordinate of the traversing platform.

In another example, an apparatus includes: a driving unit; and an arm assembly connected to the driving unit. The arm assembly includes: a first traversing platform having a first end effector configured to carry a first payload thereon; a first linear actuation system configured to drive the first traversing platform in a first direction; and a first magnetic support system comprising at least one first guide attached to the frame of the arm assembly, a first plurality of vertical actuators attached to the first traversing platform, and a first plurality of horizontal actuators attached to the first traversing platform, the first plurality of vertical actuators configured to move the first traversing platform in a vertical direction with the at least one first guide, and the first plurality of horizontal actuators configured to move the first traversing platform in a horizontal direction with the at least one first guide; and at least one second traversing platform having a second end effector configured to carry a second payload thereon; a second linear actuation system configured to drive a second traversing platform in the first direction; and a second magnetic support system including at least one second guide attached to the frame of the arm assembly, a second plurality of vertical actuators attached to the second traversing platform, and a second plurality of horizontal actuators attached to the second traversing platform, the second plurality of vertical actuators configured to move the second traversing platform in a vertical direction with the at least one second guide, and the second plurality of horizontal actuators configured to move the second traversing platform in a horizontal direction with the at least one second guide.

The first end effector and the second end effector may be arranged side-by-side. The first end effector and the second end effector may be arranged in a stacked configuration. The first plurality of vertical actuators may include three bi-directional electromagnetic actuators, each bi-directional electromagnetic actuator attached to the first traversing platform and configured to generate an electromagnetic force between the first traversing platform and the at least one first guide; and the second plurality of vertical actuators may include three bi-directional electromagnetic actuators, each bi-directional electromagnetic actuator attached to the second traversing platform and configured to generate an electromagnetic force between the second traversing platform and at least the second first guide. The first plurality of horizontal actuators may include three unidirectional electromagnetic actuators, each unidirectional electromagnetic actuator attached to the first traversing stage and configured to generate an electromagnetic force between the first traversing stage and the at least one first guide, and the second plurality of horizontal actuators may include three unidirectional electromagnetic actuators, each unidirectional electromagnetic actuator attached to the second traversing stage and configured to generate an electromagnetic force between the second traversing stage and the at least one second guide. The apparatus may further include a first plurality of vertical sensors and a first plurality of horizontal sensors, each configured to measure a position of the first traversing stage in a vertical direction, and each configured to measure a position of the first traversing stage in a horizontal direction, and a second plurality of vertical sensors and a second plurality of horizontal sensors, each configured to measure a position of the second traversing stage in a vertical direction, and each configured to measure a position of the second traversing stage in a horizontal direction. The apparatus may also include a control system coupled to one or more of the drive unit or the arm assembly, the control system including at least one processor and at least one non-transitory memory including computer program code.

It should be understood that the foregoing description is only exemplary. Various alternatives and modifications can be devised by those skilled in the art. For example, features from different embodiments described above may be selectively combined into new embodiments. Accordingly, the description is intended to embrace all such alternatives, modifications and variances which fall within the scope of the appended claims.

Claims (36)

1. An apparatus, comprising:

a driving unit; and

an arm assembly connected to the drive unit, wherein the arm assembly comprises:

a traversing platform having an end effector configured to carry a payload located on the traversing platform;

a linear actuation system configured to actuate the traversing platform in a linear direction; and

a magnetic support system comprising at least one guide attached to a frame of the arm assembly, a plurality of vertical actuators attached to the traversing platform, and a plurality of horizontal actuators attached to the traversing platform, the plurality of vertical actuators configured to move the traversing platform with the at least one guide in a vertical direction relative to the linear direction, and the plurality of horizontal actuators configured to move the traversing platform with the at least one guide in a horizontal direction relative to the linear direction.

2. The apparatus of claim 1, wherein the linear actuation system comprises at least one linear actuator, at least one position sensor, and at least one position control system.

3. The apparatus of claim 1, wherein the plurality of vertical actuators comprises three bi-directional electromagnetic actuators, each bi-directional electromagnetic actuator attached to the traversing platform and configured to generate an electromagnetic force between the traversing platform and the at least one guide.

4. The apparatus of claim 3, wherein a first one of the three bi-directional electromagnetic actuators is attached proximate a side of the traversing platform, a second one of the three bi-directional electromagnetic actuators is attached proximate a front of the traversing platform, and a third one of the three bi-directional electromagnetic actuators is attached proximate a rear of the traversing platform.

5. The apparatus of claim 1, wherein the plurality of horizontal actuators comprises three unidirectional electromagnetic actuators, each unidirectional electromagnetic actuator attached to the traversing platform and configured to generate an electromagnetic force between the traversing platform and the at least one guide.

6. The apparatus of claim 5, wherein a first one of the three unidirectional electromagnetic actuators is attached proximate a side of the traversing platform, a second one of the three unidirectional electromagnetic actuators is attached proximate a front of the traversing platform, and a third one of the three unidirectional electromagnetic actuators is attached proximate a rear of the traversing platform.

7. The apparatus of claim 1, further comprising a plurality of vertical sensors and a plurality of horizontal sensors, each of the vertical sensors configured to measure a position of the traversing platform when the traversing platform moves in a vertical direction, and each of the horizontal sensors configured to measure a position of the traversing platform when the traversing platform moves in the horizontal direction.

8. The apparatus of claim 7, wherein the plurality of vertical sensors comprises three vertical sensors and the plurality of vertical actuators comprises three vertical actuators, each of the three vertical sensors being positioned proximate to a corresponding one of the plurality of vertical actuators.

9. The apparatus of claim 7, wherein the plurality of level sensors comprises two level sensors, a first level sensor of the two level sensors being positioned proximate the first level actuator and a second level sensor of the two level sensors being positioned proximate the second level actuator.

10. The device of claim 7, wherein the vertical sensor and the horizontal sensor are optical sensors, magnetic sensors, inductive sensors, or capacitive sensors.

11. The device of claim 1, further comprising a control system coupled to one or more of the drive unit or the arm assembly, the control system comprising at least one processor and at least one non-transitory memory including computer program code.

12. An apparatus, comprising:

at least one processor; and

at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus at least to:

actuating three vertical actuators to control a first degree of freedom, a second degree of freedom, and a third degree of freedom related to a vertical position of a traversing platform of the robot;

Actuating three horizontal actuators to control a fourth degree of freedom and a fifth degree of freedom related to a horizontal position of the traversing platform of the robot; and

a linear actuator is actuated to control a sixth degree of freedom associated with linear movement of the traversing platform of the robot.

13. The apparatus of claim 12, wherein causing the apparatus to actuate the three vertical actuators to control the first, second, and third degrees of freedom comprises controlling a z-axis coordinate, a pitch angle, and a roll angle of the traversing platform.

14. The apparatus of claim 13, wherein the pitch angle of the traversing platform is changed to adjust the vertical position of the traversing platform.

15. The apparatus of claim 13, wherein the pitch angle of the traversing platform varies independently of the vertical position of the traversing platform.

16. The apparatus of claim 12, wherein causing the apparatus to actuate the three horizontal actuators to control the fourth and fifth degrees of freedom comprises controlling y-axis coordinates and a yaw angle of the traversing platform.

17. The apparatus of claim 16, wherein the yaw angle of the traversing platform is changed to adjust the horizontal position of the traversing platform.

18. The apparatus of claim 16, wherein the yaw angle of the traversing platform varies independently of the horizontal position of the traversing platform.

19. The apparatus of claim 12, wherein causing the apparatus to actuate the linear actuator to control the sixth degree of freedom comprises controlling an x-axis coordinate of the traversing platform.

20. The apparatus of claim 13, wherein the roll angle of the traversing platform is changed to adjust a position of the traversing platform along a z-axis.

21. The device of claim 13, wherein the roll angle of the traversing platform varies independently of the vertical position of the traversing platform and the horizontal position of the traversing platform.

22. A method of adjusting a position of a traversing platform of a robot, the method comprising:

actuating three vertical actuators to control a first degree of freedom, a second degree of freedom, and a third degree of freedom associated with a vertical position of the traversing platform;

actuating three horizontal actuators to control a fourth degree of freedom and a fifth degree of freedom associated with a horizontal position of the traversing platform; and

a linear actuator is actuated to control a sixth degree of freedom associated with the linear movement of the traversing platform.

23. The method of claim 22, wherein actuating the three vertical actuators to control the first degree of freedom, the second degree of freedom, and the third degree of freedom comprises controlling a z-axis coordinate, a pitch angle, and a roll angle of the traversing platform.

24. The method of claim 23, wherein controlling the pitch angle of the traversing platform adjusts the vertical position of the traversing platform.

25. The method of claim 23, wherein controlling the pitch angle of the traversing platform does not change the vertical position of the traversing platform.

26. The method of claim 22, wherein actuating the three horizontal actuators to control the fourth degree of freedom and the fifth degree of freedom comprises controlling a y-axis coordinate and a yaw angle of the traversing platform.

27. The method of claim 26, wherein controlling the yaw angle of the traversing platform adjusts the horizontal position of the traversing platform.

28. The method of claim 26, wherein controlling the yaw angle of the traversing platform does not change the horizontal position of the traversing platform.

29. The method of claim 22, wherein actuating the linear actuator to control the sixth degree of freedom comprises controlling x-axis coordinates of the traversing platform.

30. An apparatus, comprising:

a driving unit; and

an arm assembly connected to the drive unit, wherein the arm assembly comprises:

a first traversing platform having a first end effector configured to carry a first payload thereon; a first linear actuation system configured to actuate the first traversing platform in a first direction; and a first magnetic support system comprising at least one first guide attached to the frame of the arm assembly, a first plurality of vertical actuators attached to the first traversing platform and a first plurality of horizontal actuators attached to the first traversing platform, the first plurality of vertical actuators configured to move the first traversing platform in a vertical direction with the at least one first guide, and the first plurality of horizontal actuators configured to move the first traversing platform in a horizontal direction with the at least one first guide; and

at least one second traversing platform having a second end effector configured to carry a second payload thereon; a second linear actuation system configured to actuate the second traversing platform in a first direction; and a second magnetic support system including at least one second guide attached to the frame of the arm assembly, a second plurality of vertical actuators attached to the second traversing platform, and a second plurality of horizontal actuators attached to the second traversing platform, the second plurality of vertical actuators configured to move the second traversing platform in a vertical direction with the at least one second guide, and the second plurality of horizontal actuators configured to move the second traversing platform in a horizontal direction with the at least one second guide.

31. The device of claim 30, wherein the first end effector and the second end effector are arranged side-by-side.

32. The device of claim 30, wherein the first end effector and the second end effector are arranged in a stacked configuration.

33. The apparatus of claim 30, wherein the first plurality of vertical actuators comprises three bi-directional electromagnetic actuators, each bi-directional electromagnetic actuator attached to the first traversing platform and configured to generate an electromagnetic force between the first traversing platform and the at least one first guide; and

wherein the second plurality of vertical actuators includes three bi-directional electromagnetic actuators, each bi-directional electromagnetic actuator attached to the second traversing platform and configured to generate an electromagnetic force between the second traversing platform and the at least second first guide.

34. The apparatus of claim 33, wherein the first plurality of horizontal actuators comprises three unidirectional electromagnetic actuators, each unidirectional electromagnetic actuator attached to the first traversing stage and configured to generate an electromagnetic force between the first traversing stage and the at least one first guide, and wherein the second plurality of horizontal actuators comprises three unidirectional electromagnetic actuators, each unidirectional electromagnetic actuator attached to the second traversing stage and configured to generate an electromagnetic force between the second traversing stage and the at least one second guide.

35. The apparatus of claim 30, further comprising a first plurality of vertical sensors and a first plurality of horizontal sensors, and a second plurality of vertical sensors and a second plurality of horizontal sensors, each of the first vertical sensors configured to measure a position of the first traversing stage in a vertical direction, and each of the first horizontal sensors configured to measure a position of the first traversing stage in a horizontal direction, each of the second vertical sensors configured to measure a position of the second traversing stage in a vertical direction, and each of the second horizontal sensors configured to measure a position of the second traversing stage in a horizontal direction.

36. The apparatus of claim 30, further comprising a control system coupled to one or more of the drive unit or the arm assembly, the control system comprising at least one processor and at least one non-transitory memory including computer program code.