CN116455357B - Active impedance matching box based on Boost circuit and adjusting method thereof - Google Patents
Active impedance matching box based on Boost circuit and adjusting method thereof Download PDFInfo
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Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H11/00—Networks using active elements
- H03H11/02—Multiple-port networks
- H03H11/28—Impedance matching networks
- H03H11/30—Automatic matching of source impedance to load impedance
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
- H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
- H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
- H02M7/06—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes without control electrode or semiconductor devices without control electrode
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Abstract
The application relates to an active impedance matching box based on a Boost circuit and an adjusting method thereof, belongs to the technical field of radio frequency power supply impedance matching, and solves the problems of low adjusting speed and the like of the existing impedance matching network. The active impedance matching box comprises a full-wave rectifying circuit and a capacitorCapacitanceInductanceSwitch tubeDiodeA control circuit; the input end of the full-wave rectifying circuit is connected with the characteristic impedance; the first output ends of the full-wave rectifying circuits are respectively connected with the capacitorsOne end of (2) an inductorIs a member of the group; inductanceThe other ends of the (B) are respectively connected with a switch tubeDrain electrode of (d) diodeIs of the formula (I)A pole; diodeCathode connection capacitor of (a)Is a member of the group; the second output ends of the full-wave rectifying circuits are respectively connected with the capacitorsIs connected with the other end of the capacitorIs arranged at the other end of the tube; switch tubeThe source electrode of the transistor is grounded; the output end of the control circuit is connected with the switching tubeTo control the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance.
Description
Technical Field
The application relates to the technical field of radio frequency power supply impedance matching, in particular to an active impedance matching box based on a Boost circuit and an adjusting method thereof.
Background
In rf power-plasma systems, the varying impedance of the plasma chamber is not equal to the constant output impedance of the rf power, and both have significant impedance matching problems, resulting in reflected power generation and hence significant energy loss.
The common solutions are: an adjustable impedance matching network is added in the radio frequency power supply and the plasma system so that the equivalent impedance of the matching network is equal to the impedance of the radio frequency power supply, thereby realizing impedance matching and achieving the maximum output power.
In designing an impedance matching network, the prior art methods include:
(1) The capacitance in the matching network is changed. For example, a servo stepping motor is used for changing the distance between the capacitor plates, but the method has low precision and low speed;
(2) The inductance in the matching network is changed. For example, the magnitude of the inductance is changed by changing the number of series connections of the inductance through a control strategy, but this method does not smooth the adjustment process.
The existing impedance matching network has the following defects:
(1) The adjusting speed is too slow to respond to the rapidly changing load;
(2) The adjustment accuracy is not enough;
(3) The adjustment process is not smooth enough.
Disclosure of Invention
In view of the above analysis, the embodiment of the application aims to provide an active impedance matching box based on a Boost circuit and an adjusting method thereof, which are used for solving the problems of low adjusting speed, insufficient adjusting precision, insufficient adjusting process and the like of the existing impedance matching network.
On one hand, the application discloses an active impedance matching box based on a Boost circuit, which comprises a full-wave rectifying circuit and a capacitorCapacitance->Inductance->Switch tube->Diode->A control circuit; wherein,
the input end of the full-wave rectifying circuit is connected with the characteristic impedance; the first output ends of the full-wave rectifying circuits are respectively connected with the capacitorsIs one end of (1) inductance->Is a member of the group; inductance->The other end of the switch tube is respectively connected with>Drain, diode->An anode of (a); diode->Cathode connection capacitance +.>Is a member of the group; the second output ends of the full-wave rectifying circuits are respectively connected with a capacitor +.>And the other end of (2) and the capacitance->Is arranged at the other end of the tube; switch tube->The source electrode of the transistor is grounded;
the output end of the control circuit is connected with the switching tubeThe control circuit is used for controlling the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance.
Based on the scheme, the application also makes the following improvements:
further, the control circuit changes the switching tubeThe duty ratio of (2) is such that the inductance is flown through in the active impedance matching box>Is>And/or capacitance->The actual capacitance of both ends>Voltage signal->Satisfy the following requirements，/>Representing the characteristic impedance so as to control the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance.
Further, the control circuit comprises a voltage loop compensation circuit, a current loop compensation circuit, a carrier generator and a PWM generator; wherein,
voltage ring compensation circuit for compensating a reference capacitanceVoltage signal->And the actual capacitance->Voltage signal->Comparing the obtained error signals to generate a reference inductor current signal +.>；
A current loop compensation circuit for compensating the current signal according to the reference inductanceAnd the actual inductor current signal->Comparing the obtained error signals to generate a reference inductor voltage signal +.>；
Carrier generator for based on actual capacitanceVoltage signal->Outputting a carrier signal with variable amplitude;
PWM generator for generating reference inductance voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is used as a switching tube +.>Modulated wave signal>And based on the modulated wave signal +.>And the carrier signal, generating a control switch tube +.>An active PWM wave.
Further, the current loop compensation circuit includes:
current compensationCompensation controller for compensating reference inductance current signal by using current loop compensation functionAnd the actual inductor current signal->Processing the error signal obtained by comparison to generate a reference inductance voltage signal +.>；
A duty cycle adjustment controller for adjusting the duty cycle according to the reference inductance voltage signalAnd the actual capacitance->Voltage signal->Comparing the resulting error signals to generate a theoretically regulated inductor current signal +.>；
Inductor current measurement delay controller for inductor current signal after theoretical adjustmentThen delay measurement is carried out to obtain an actual inductor current signal +.>Thereby forming a closed loop control of the current loop compensation circuit.
Further, the voltage loop compensation circuit includes:
a voltage compensation controller for compensating the reference capacitance by using a voltage loop compensation functionVoltage signal->And the actual capacitance->Voltage signal->Processing the error signal obtained by comparison to generate a reference inductor current signal +.>；
A proportional controller for controlling the inductance current signal after theoretical adjustmentIs scaled up +.>Doubling, generating a theoretically regulated capacitance +.>Voltage signal->；
Capacitance deviceVoltage measurement delay controller for capacitance after theoretical regulation +.>Voltage signal->Delay measurement then yields the actual capacitance +.>Voltage signal->Thereby forming a closed loop control of the voltage loop compensation circuit.
Further, the control process of the duty ratio adjustment controller is as follows:
for reference inductance voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is sequentially subjected to a feedforward compensation function +.>Zero order hold and calculate delay function>The proportionality coefficient is the adjusted capacitance +.>Voltage signalTo obtain the theoretical regulated switching tube +.>Voltage signal->The method comprises the steps of carrying out a first treatment on the surface of the Theoretically adjusted capacitance ∈ ->Voltage signal->Switch tube after theoretical regulation>Voltage signal->Is proportional amplified +.>Obtaining a theoretical regulated inductor current signal +.>；
wherein ,representing the laplace transform.
Further, the duty cycle adjusts the transfer function of the controllerExpressed as:
（1）
wherein ,representing capacitance +.>A delay function of the voltage measurement delay controller;
transfer function of current loop compensation circuitExpressed as:
（2）
wherein ,delay function representing an inductor current measurement delay controller, < >>Representing a current loop compensation function;
transfer function of voltage loop compensation circuitExpressed as:
（3）
wherein ,representing a voltage loop compensation function.
Further, the full-wave rectifying circuit includes a diodeDiode->Diode->Diode->； wherein ,
diodeCathode-connected diode->Anode, diode->Cathode-connected diode->A cathode of (a); diode->Anode-connected diode->Anode, diode->Cathode-connected diode->An anode of (a);
diode is arrangedCathode, diode->The anodes of the full-wave rectification circuit are respectively used as a first output end and a second output end of the full-wave rectification circuit; diode +.>Cathode, diode->Is connected as the input end of the full-wave rectifying circuit.
On the other hand, the application also discloses a method for adjusting the active impedance matching box based on the Boost circuit, which comprises the following steps:
collecting the flowing inductance in the active impedance matching boxIs>Capacitance->The actual capacitance of both ends>Voltage signal->；
By changing the switching tubeThe duty ratio of (2) is such that the inductance is flown through in the active impedance matching box>Is>And/or capacitance->The actual capacitance of both ends>Voltage signal->Satisfy->，/>Representing the characteristic impedance so as to control the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance.
Based on the scheme, the application also makes the following improvements:
further, the switching tube is changed by the following meansDuty cycle of (c):
according to reference capacitanceVoltage signal->And the actual capacitance->Voltage signal->Comparing the obtained error signals to generateReference inductor current signal->；
From reference inductor current signalsAnd the actual inductor current signal->Comparing the obtained error signals to generate a reference inductor voltage signal +.>；
Based on actual capacitanceVoltage signal->Outputting a carrier signal with variable amplitude;
will reference the inductor voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is used as a switching tube +.>Modulated wave signal>And based on the modulated wave signal +.>And the carrier signal, generating a control switch tube +.>PWM wave of action to change switch tube +.>Is a duty cycle of (c).
Compared with the prior art, the application has at least one of the following beneficial effects:
according to the active impedance matching box based on the Boost circuit and the adjusting method thereof, the duty ratio of the switching tube is adjusted through the proposed control strategy, so that the equivalent input impedance is the same as the characteristic impedance, and the impedance matching is realized when the load changes.
In the application, the technical schemes can be mutually combined to realize more preferable combination schemes. Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application. The objectives and other advantages of the application may be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
The drawings are only for purposes of illustrating particular embodiments and are not to be construed as limiting the application, like reference numerals being used to designate like parts throughout the drawings;
fig. 1 is a schematic structural diagram of an active impedance matching box based on a Boost circuit according to embodiment 1 of the present application;
fig. 2 is a schematic structural diagram of a control circuit according to embodiment 1 of the present application;
fig. 3 is a schematic diagram of a control circuit according to embodiment 1 of the present application using dual-loop control;
fig. 4 is a schematic structural diagram of a duty cycle adjustment controller according to embodiment 1 of the present application;
fig. 5 is a flowchart of a method for adjusting an active impedance matching box based on a Boost circuit according to embodiment 2 of the present application.
Detailed Description
The following detailed description of preferred embodiments of the application is made in connection with the accompanying drawings, which form a part hereof, and together with the description of the embodiments of the application, are used to explain the principles of the application and are not intended to limit the scope of the application.
Example 1:
in one embodiment of the application, an active impedance matching box based on a Boost circuit is disclosed, and a structural schematic diagram is shown in fig. 1.
The active impedance matching box in the embodiment comprises a full-wave rectifying circuit and a capacitorCapacitance->Inductance->Switch tube->Diode->A control circuit; the input end of the full-wave rectifying circuit is connected with the characteristic impedance; the first output ends of the full-wave rectifying circuits are respectively connected with a capacitor +.>Is one end of (1) inductance->Is a member of the group; inductance->The other end of the switch tube is respectively connected with>Drain, diode->An anode of (a); diode->Cathode connection capacitance +.>Is a member of the group; the second output ends of the full-wave rectifying circuits are respectively connected with a capacitor +.>And the other end of (2) and the capacitance->Is arranged at the other end of the tube; switch tube->The source electrode of the transistor is grounded; the first input end and the second input end of the full-wave rectifying circuit are connected; the output end of the control circuit is connected with a switch tube>The control circuit is used for controlling the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance.
In the present embodiment, the capacitanceIs used for participating in the regulation of equivalent impedance and the filtering of the full-wave rectifying circuit. Inductance->Capacitance->Diode->Switch tube->Is identical to the Boost circuit in terms of parameter design, < >>Is the characteristic impedance. This practice isIn the embodiment, the active impedance matching box is used for a Radio Frequency (RF) power supply and a cavity load, and in the implementation process, the RF power supply is connected with a characteristic impedance in series and then is connected to the input end of a full-wave rectifying circuit, and the capacitor is +.>The two ends are connected with the cavity load. />Is the equivalent input impedance seen from the RF power supply.
The full-wave rectifying circuit comprises a diodeDiode->Diode->Diode->The method comprises the steps of carrying out a first treatment on the surface of the Wherein the diode->Cathode-connected diode->Anode, diode->Cathode-connected diode->A cathode of (a); diode->Anode-connected diode->Anode, diode->Cathode-connected diode->An anode of (a); diode +.>Cathode, diode of (c)The anodes of the full-wave rectification circuit are respectively used as a first output end and a second output end of the full-wave rectification circuit; diode +.>Cathode, diode of (c)Is connected as the input end of the full-wave rectifying circuit. The full-wave rectifying circuit is used for converting alternating current into direct current.
Preferably, the control circuit is configured to control the switching tube by changing the switching tube when the plasma impedance is changedThe duty ratio of (2) is such that the inductance is flown through in the active impedance matching box>Is>And/or capacitance->The actual capacitance of both ends>Voltage signal->Satisfy->Considering the impedance of the rectifier bridge, the equivalent input impedance of the active impedance matching boxThereby controlling the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance.
Preferably, the control circuit in this embodiment has a schematic structure as shown in fig. 2, and includes a voltage loop compensation circuit, a current loop compensation circuit, a carrier generator, and a PWM generator.
Voltage ring compensation circuit for compensating a reference capacitanceVoltage signal->And the actual capacitance->Voltage signal->Comparing the obtained error signals to generate a reference inductor current signal +.>。
A current loop compensation circuit for compensating the current signal according to the reference inductanceAnd the actual inductor current signal->Comparing the obtained error signals to generate a reference inductor voltage signal +.>。
Carrier generator for based on actual capacitanceVoltage signal->Outputting a carrier signal with variable amplitude; the type of carrier signal is saw tooth wave or isosceles triangle wave.
PWM generator for generating reference inductance voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is used as a switching tube +.>Modulated wave signal>And based on the modulated wave signal +.>And the carrier signal, generating a control switch tube +.>An active PWM wave. Here, through the switching tube->Duty cycle of (2) such that +.>. Thereby achieving impedance matching.
It should be emphasized that during operation of the control circuit, the capacitance is measuredThe voltage across it is taken as the actual capacitance +.>Voltage signal->The measured capacitance +.>The voltage across it is taken as the actual capacitance +.>Voltage signal->The measured flow-through inductance is added>Is the actual inductor current signal +.>. In addition, in the control circuit, all links required to generate the error signal can be realized by an error amplifier. As in fig. 2, by means of an error amplifier +.>、/>、/>Three error signal generation is completed.
The types of the voltage loop compensation circuit and the current loop compensation circuit are not limited, and the voltage loop compensation circuit and the current loop compensation circuit can be PID regulating circuits or other forms of compensation circuits. The compensation circuit is a key part of the control circuit and determinesWhether or not it is possible to realize; in order to enable the control circuit to let +>The parameter design of the compensation circuit must be such that the control system shown in fig. 3, 4 is stable. Wherein FIG. 3 shows a control circuit employing a dual ringThe control (current inner loop, voltage outer loop) is structured schematically, and fig. 4 is a structured schematically of the duty cycle adjustment controller.
In fig. 3, the current loop compensation circuit includes a current compensation controller, a duty cycle adjustment controller, and an inductor current measurement delay controller.
A current compensation controller for compensating the reference inductance current signal by using a current loop compensation functionAnd the actual inductor current signal->Processing the error signal obtained by comparison to generate a reference inductance voltage signal +.>. In the actual implementation, the current loop compensation function +.>Depending on the type of compensation circuit. The specific parameters are determined by continuously adjusting and observing the stability of the Bode diagram.
A duty cycle adjustment controller for adjusting the duty cycle according to the reference inductance voltage signalAnd the actual capacitance->Voltage signal->Comparing the resulting error signals to generate a theoretically regulated inductor current signal +.>。
Duty cycle adjusting controllerThe control process of (2) is as follows: for reference inductance voltage signalNumber->And the actual capacitance->Voltage signal->The error signal obtained by comparison is sequentially subjected to a feedforward compensation function +.>Zero order hold and calculate delay function>The proportionality coefficient is the adjusted capacitance +.>Voltage signal->To obtain the theoretical regulated switching tube +.>Voltage signal->The method comprises the steps of carrying out a first treatment on the surface of the Theoretically adjusted capacitance ∈ ->Voltage signal->Switch tube after theoretical regulation>Voltage signal->Is proportional amplified +.>Obtaining a theoretical regulated inductor current signal +.>； wherein ,/>Representing the laplace operator.
Inductor current measurement delay controller for inductor current signal after theoretical adjustmentThen delay measurement is carried out to obtain an actual inductor current signal +.>Thereby forming a closed loop control of the current loop compensation circuit. Delay function of an inductor current measuring delay controller>Is determined by the measuring device.
In FIG. 3, the voltage loop compensation circuit includes a voltage compensation controller, a proportional controller and a capacitorA voltage measurement delay controller.
A voltage compensation controller for compensating the reference capacitance by using a voltage loop compensation functionVoltage signal->And the actual capacitance->Voltage signal->Processing the error signal obtained by comparison to generate a reference inductor current signal +.>. In practical implementation, the voltage loop compensation function +.>Also by the type of compensation circuit. The specific parameters are determined by continuously adjusting and observing the stability of the Bode diagram.
A proportional controller for controlling the inductance current signal after theoretical adjustmentIs scaled up +.>Doubling, generating a theoretically regulated capacitance +.>Voltage signal->。
Capacitance deviceVoltage measurement delay controller for capacitance after theoretical regulation +.>Voltage signal->Delay measurement then yields the actual capacitance +.>Voltage signal->Thereby forming a closed loop control of the voltage loop compensation circuit. Capacitance->Delay function of a voltage measurement delay controller>Also determined by the measuring device.
In the above control circuit, the duty ratio adjusts the transfer function of the controllerExpressed as:
（1）
wherein ,representing capacitance +.>A delay function of the voltage measurement delay controller; hold at zero order and calculate delay function +.>In, assume that the sampling time is +.>Then->。
Transfer function of current loop compensation circuitExpressed as:
（2）
wherein ,representing the delay function of the inductor current measurement delay controller.
Transfer function of voltage loop compensation circuitExpressed as:
（3）
wherein ,representing the delay function of the inductor current measurement delay controller.
In summary, according to the active impedance matching box based on the Boost circuit, the duty ratio of the switching tube is adjusted through the proposed control strategy, so that the equivalent input impedance is the same as the characteristic impedance, and the impedance matching is realized when the load changes.
Example 2:
the embodiment 2 of the application provides a method for adjusting an active impedance matching box based on a Boost circuit, the flow is shown in fig. 5, and the method comprises the following steps:
step S1: collecting the flowing inductance in the active impedance matching boxIs>Capacitance->The actual capacitance of both ends>Voltage signal->；
Step S2: by changing the switching tubeSuch that the active resistanceInductance is flowed in the anti-matching box>Is>And/or capacitance->The actual capacitance of both ends>Voltage signal->Satisfy->，/>Representing the characteristic impedance so as to control the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance.
Preferably, in the present embodiment, the switching tube is changed by the following meansDuty cycle of (c):
step S21: according to reference capacitanceVoltage signal->And the actual capacitance->Voltage signal->Comparing the obtained error signals to generate a reference inductor current signal +.>；
Step S22: from reference inductor current signalsAnd the actual inductor current signal->Comparing the obtained error signals to generate a reference inductor voltage signal +.>；
Step S23: based on actual capacitanceVoltage signal->Outputting a carrier signal with variable amplitude;
step S24: will reference the inductor voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is used as a switching tube +.>Modulated wave signal>And based on the modulated wave signal +.>And the carrier signal, generating a control switch tube +.>PWM wave of action to change switch tube +.>Is a duty cycle of (c).
In the specific implementation process of step S21, the following is performed:
step S211: reference capacitance using voltage loop compensation functionVoltage signal->And the actual capacitance->Voltage signal->Processing the error signal obtained by comparison, and generating a reference inductor current signal +_ after processing by a voltage loop compensation function>；
Step S212: for the inductance current signal after theoretical adjustmentIs scaled up +.>Generating a theoretically regulated capacitance +.>Voltage signal->；
Step S213: capacitance after theoretical adjustmentVoltage signal->After which delay is measuredActual capacitance->Voltage signal->Thereby forming a closed loop control of the voltage loop compensation circuit.
In the specific implementation process of step S22, the following is performed:
step S221: reference inductor current signal using current loop compensation functionAnd the actual inductor current signal->Processing the error signal obtained by comparison, and generating a reference inductance voltage signal +_ after processing by a current loop compensation function>；
Step S222: according to the reference inductance voltage signalAnd the actual capacitance->Voltage signal->Comparing the resulting error signals to generate a theoretically regulated inductor current signal +.>；
Step S223: inductor current signal after theoretical regulationThen delay measuring to obtain actual inductance current signalThereby forming a closed loop control of the current loop compensation circuit.
In step S222, specifically: for reference inductance voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is sequentially subjected to a feedforward compensation function +.>Zero order hold and calculate delay function>The proportionality coefficient is the capacitance after theoretical adjustment +.>Voltage signal->To obtain the theoretical regulated switching tube +.>Voltage signal->The method comprises the steps of carrying out a first treatment on the surface of the Theoretically adjusted capacitance ∈ ->Voltage signal->Switch tube after theoretical regulation>Voltage signal->Is proportional amplified +.>Obtaining a theoretical regulated inductor current signal +.>； wherein ,/>Representing the laplace transform.
The specific implementation process of the embodiment of the present application may refer to the above device embodiment, and this embodiment is not repeated here.
Since the principle of the embodiment is the same as that of the embodiment of the device, the method also has the corresponding technical effects of the embodiment of the device.
Those skilled in the art will appreciate that all or part of the flow of the methods of the embodiments described above may be accomplished by way of a computer program to instruct associated hardware, where the program may be stored on a computer readable storage medium. Wherein the computer readable storage medium is a magnetic disk, an optical disk, a read-only memory or a random access memory, etc.
The present application is not limited to the above-mentioned embodiments, and any changes or substitutions that can be easily understood by those skilled in the art within the technical scope of the present application are intended to be included in the scope of the present application.
Claims (7)
1. An active impedance matching box based on a Boost circuit is characterized by comprising a full-wave rectifying circuit and a capacitorCapacitance->Inductance->Switch tube->Diode->A control circuit; wherein,
the input end of the full-wave rectifying circuit is connected with the characteristic impedance; the first output ends of the full-wave rectifying circuits are respectively connected with the capacitorsIs one end of (1) inductance->Is a member of the group; inductance->The other end of the switch tube is respectively connected with>Drain, diode->An anode of (a); diodeCathode connection capacitance +.>Is a member of the group; the second output ends of the full-wave rectifying circuits are respectively connected with a capacitor +.>And the other end of (2) and the capacitance->Is arranged at the other end of the tube; switch tube->The source electrode of the transistor is grounded;
the output end of the control circuit is connected with the switching tubeThe control circuit is used for controlling the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance;
the control circuit changes the switching tubeThe duty ratio of (2) is such that the inductance is flown through in the active impedance matching box>Is>And/or capacitance->The actual capacitance of both ends>Voltage signal->Satisfy->，/>Representing the characteristic impedance, thereby controlling the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance;
the control circuit comprises a voltage loop compensation circuit, a current loop compensation circuit, a carrier generator and a PWM generator; wherein,
voltage ring compensation circuit for compensating a reference capacitanceVoltage signal->And the actual capacitance->Voltage signal->Comparing the obtained error signals to generate a reference inductor current signal +.>；
A current loop compensation circuit for compensating the current signal according to the reference inductanceAnd the actual inductor current signal->Comparing the obtained error signals to generate a reference inductor voltage signal +.>；
Carrier generator for based on actual capacitanceVoltage signal->Outputting a carrier signal with variable amplitude;
PWM generator for generating reference inductance voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is used as a switching tube +.>Modulated wave signal>And based on the modulated wave signal +.>And the carrier signal, generating a control switch tube +.>An active PWM wave.
2. The Boost-based active impedance-matching box of claim 1, wherein the current loop compensation circuit comprises:
a current compensation controller for compensating the reference inductance current signal by using a current loop compensation functionAnd the actual inductor current signal->Processing the error signal obtained by comparison to generate a reference inductance voltage signal +.>；
A duty cycle adjustment controller for adjusting the duty cycle according to the reference inductance voltage signalAnd the actual capacitance->Voltage signal->Comparing the resulting error signals to generate a theoretically regulated inductor current signal +.>；
Inductor current measurement delay controller for inductor current signal after theoretical adjustmentThen delay measurement is carried out to obtain an actual inductor current signal +.>Thereby forming a closed loop control of the current loop compensation circuit.
3. The Boost-based active impedance-matching box of claim 2, wherein said voltage-loop compensation circuit comprises:
a voltage compensation controller for compensating the reference capacitance by using a voltage loop compensation functionVoltage signal->And the actual capacitance->Voltage signal->Processing the error signal obtained by comparison to generate a reference inductor current signal +.>；
A proportional controller for controlling the inductance current signal after theoretical adjustmentIs scaled up +.>Doubling, generating a theoretically regulated capacitance +.>Voltage signal->；
Capacitance deviceVoltage measurement delay controller for capacitance after theoretical regulation +.>Voltage signal->Delay measurement then yields the actual capacitance +.>Voltage signal->Thereby forming a closed loop control of the voltage loop compensation circuit.
4. The Boost-based active impedance matching box of claim 3, wherein the duty cycle adjustment controller comprises:
for reference inductance voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is sequentially subjected to a feedforward compensation function +.>Zero order hold and calculate delay function>The proportionality coefficient is the adjusted capacitance +.>Voltage signal->To obtain the theoretical regulated switching tube +.>Voltage signal->The method comprises the steps of carrying out a first treatment on the surface of the Theoretically adjusted capacitance ∈ ->Voltage signal->Switch tube after theoretical regulation>Voltage signal->Is proportional amplified +.>Obtaining a theoretical regulated inductor current signal +.>；
wherein ,representing the laplace transform.
5. The Boost-based active impedance matching box of claim 4, wherein the duty cycle adjusts the transfer function of the controllerExpressed as:
（1）
wherein ,representing capacitance +.>A delay function of the voltage measurement delay controller;
transfer function of current loop compensation circuitExpressed as:
（2）
wherein ,delay function representing an inductor current measurement delay controller, < >>Representing a current loop compensation function;
transfer function of voltage loop compensation circuitExpressed as:
（3）
wherein ,representing a voltage loop compensation function.
6. The Boost-based active impedance-matching box of claim 1, wherein the full-wave rectifying circuit comprises a diodeDiode->Diode->Diode->； wherein ,
diodeCathode-connected diode->Anode, diode->Cathode-connected diode->A cathode of (a); diode->Anode-connected diode->Anode, diode->Cathode-connected diode->An anode of (a);
diode is arrangedCathode, diode->The anodes of the full-wave rectification circuit are respectively used as a first output end and a second output end of the full-wave rectification circuit; diode +.>Cathode, diode->Is connected as the input end of the full-wave rectifying circuit.
7. A method of tuning a Boost-based active impedance matching box according to any one of claims 1-6, characterized in that the method comprises:
collecting the flowing inductance in the active impedance matching boxIs>Capacitance->The actual capacitance of both ends>Voltage signal->；
By changing the switching tubeThe duty ratio of (2) is such that the inductance is flown through in the active impedance matching box>Is the actual inductor current signal of (a)And/or capacitance->The actual capacitance of both ends>Voltage signal->Satisfy->，/>Representing the characteristic impedance, thereby controlling the equivalent input impedance of the active impedance matching box to be equal to the characteristic impedance;
the switching tube is changed by the following wayDuty cycle of (c):
according to reference capacitanceVoltage signal->And the actual capacitance->Voltage signal->Comparing the obtained error signals to generate a reference inductor current signal +.>；
From reference inductor current signalsAnd the actual inductor current signal->Comparing the obtained error signals to generate a reference inductor voltage signal +.>；
Based on actual capacitanceVoltage signal->Outputting a carrier signal with variable amplitude;
will reference the inductor voltage signalAnd the actual capacitance->Voltage signal->The error signal obtained by comparison is used as a switching tube +.>Modulated wave signal>And based on the modulated wave signal +.>And the carrier signal, generating a control switch tube +.>PWM wave of action to change switch tube +.>Is a duty cycle of (c).
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Address after: 518,052 Building B, Functional Supporting Area of Taohuayuan Zhichuang Town, Tiegang Community, Xixiang Street, Bao'an District, Shenzhen, Guangdong 101,201,301 Patentee after: Shenzhen Hengyunchang Vacuum Technology Co.,Ltd. Address before: 518,052 Building B, Functional Supporting Area of Taohuayuan Zhichuang Town, Tiegang Community, Xixiang Street, Bao'an District, Shenzhen, Guangdong 101,201,301 Patentee before: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. |