CN116449166B - GIS partial discharge on-line monitoring system and device thereof - Google Patents

GIS partial discharge on-line monitoring system and device thereof Download PDF

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Publication number
CN116449166B
CN116449166B CN202310712031.9A CN202310712031A CN116449166B CN 116449166 B CN116449166 B CN 116449166B CN 202310712031 A CN202310712031 A CN 202310712031A CN 116449166 B CN116449166 B CN 116449166B
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Prior art keywords
gis
flexible substrate
partial discharge
winding rod
line monitoring
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CN116449166A (en
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胡栩焜
李诩钰
胡珮琪
谢雨晴
成景宇
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Hubei University of Technology
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Hubei University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/1227Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
    • G01R31/1254Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of gas-insulated power appliances or vacuum gaps
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Relating To Insulation (AREA)

Abstract

The invention relates to the technical field of GIS detection, and discloses a GIS partial discharge on-line monitoring system and a device thereof, wherein the GIS partial discharge on-line monitoring device comprises a flexible built-in ultrahigh frequency sensor for detecting electromagnetic wave signals which are transmitted outwards at a partial discharge position in a GIS shell, the flexible built-in ultrahigh frequency sensor comprises a flexible substrate and a spiral antenna assembly attached to the flexible substrate, and one end of the flexible substrate is connected with the GIS shell; the winding rod is used for winding the flexible substrate into a curled state, the output end of the winding rod is connected to the other end of the flexible substrate, and the input end of the winding rod penetrates through the GIS shell and extends to the outside; the invention adopts the flexible substrate and SF for reducing the flexible built-in ultrahigh frequency sensor 6 The surface area of the gas contact mode can reduce the surface charge accumulated on the flexible substrate of the built-in sensor, so that the antenna assembly is prevented from being damaged, and the detection result of the built-in sensor is prevented from being influenced by partial discharge in the GIS equipment.

Description

GIS partial discharge on-line monitoring system and device thereof
Technical Field
The invention relates to the field of GIS detection, in particular to a GIS partial discharge on-line monitoring system and a device thereof.
Background
The GIS equipment is characterized in that a circuit breaker, an isolating switch, a grounding switch, a current transformer, a voltage transformer, a lightning arrester, a bus, a wire inlet and outlet sleeve or a cable terminal and other elements are combined and sealed in a grounding metal shell, and SF with a certain pressure is charged 6 The gas is used as a complete set of switch equipment consisting of an insulating medium and an arc extinguishing medium.
The sensor is an important device for detecting partial discharge of insulation defects of GIS equipment. The sensors can be divided into an internal sensor and an external sensor according to the installation positions; the built-in UHF method (partial discharge detection ultra-high frequency method) is to install an antenna sensor inside a GIS, and no electromagnetic wave outward propagation attenuation and external electromagnetic interference signal influence exist, so that the sensitivity and the anti-interference capability of the built-in UHF method are superior to those of the built-out UHF method.
In the transient process of transition from an electrostatic field to a constant electric field, surface charges can be accumulated on the interface of the insulating flexible substrate and gas in the GIS equipment, so that a large amount of surface charges can be accumulated on the surface of the insulating flexible substrate of the flexible built-in ultrahigh frequency sensor under direct-current high voltage, partial discharge and even surface flashover can be possibly caused after long-time operation, short circuit is formed after the flexible substrate breaks down, an antenna assembly is burnt out, and the detection result of the GIS equipment on the detection equipment is affected.
Disclosure of Invention
The invention provides a GIS partial discharge on-line monitoring system and a device thereof, which solve the technical problem that the detection result of a flexible built-in ultrahigh frequency sensor in the related art is influenced by partial discharge of a large amount of surface charges on a flexible substrate.
The invention provides a GIS partial discharge on-line monitoring device, which comprises a flexible built-in ultrahigh frequency sensor, a sensor module and a control module, wherein the flexible built-in ultrahigh frequency sensor is used for detecting electromagnetic wave signals which are transmitted outwards at a partial discharge position in a GIS shell; the winding rod is used for winding the flexible substrate into a curled state, the output end of the winding rod is connected to the other end of the flexible substrate, and the input end of the winding rod penetrates through the GIS shell and extends to the outside; the output end of the driving mechanism is connected with the input end of the winding rod in a separated mode; a reset mechanism for returning the flexible substrate from the curled state to the unfolded state; the flexible built-in ultrahigh frequency sensor comprises an unfolding state and a curling state; the unfolding state is a state that the flexible substrate is attached to the GIS shell; the curled state is a state in which the flexible substrate is rolled into a cylindrical shape, and the surface area of the interface of the flexible substrate in contact with the gas is not more than 80% of the surface area of the interface of the flexible substrate in contact with the gas in the unfolded state; when the flexible built-in ultrahigh frequency sensor detects, the reset mechanism returns the flexible substrate from the curled state to the unfolded state; when the flexible built-in ultrahigh frequency sensor is not detected, the flexible substrate is rolled into a curled state by the rolling rod.
In a preferred embodiment, the input end of the winding rod is provided with a clamping groove, the driving mechanism comprises a rotary driving unit, the rotary driving unit comprises a second motor, the output end of the second motor is connected with a clamping shaft, and the clamping shaft is matched with the clamping groove.
In a preferred embodiment, the driving mechanism further comprises a first linear driving unit, the first linear driving unit comprises a first motor, the output end of the first motor is connected with a screw rod, the screw rod is sleeved with a sliding block, the bottom of the first motor is provided with a transverse plate, the transverse plate is provided with a guide groove parallel to the screw rod, the sliding block is arranged in the guide groove in a sliding mode, and the rotary driving unit is arranged on the sliding block.
In a preferred embodiment, the driving mechanism further comprises a second linear driving unit, an output end of the second linear driving unit is connected with the second motor, the rotary driving unit further comprises a frame body, the second linear driving unit is mounted on the frame body, one side of the frame body is provided with a mounting block, and the mounting block is mounted on the sliding block.
In a preferred embodiment, a sliding groove is formed in the GIS shell, a winding rod is movably arranged in the sliding groove, an elastic corrugated sleeve is sleeved on the rod wall of the sliding groove, and the elastic corrugated sleeve is connected with the inner wall of the sliding groove.
In a preferred embodiment, the inner side and the outer side of the sliding groove are respectively provided with a baffle plate for sealing the sliding groove, and the baffle plates are sleeved on the rod wall of the winding rod.
In a preferred embodiment, the reset mechanism comprises a coil spring, and two ends of the coil spring are respectively connected with the inner wall of the chute and the winding rod.
In a preferred embodiment, a ratchet wheel is fixedly connected to the end of the winding rod located outside the GIS shell, and a positioning locking mechanism is mounted on the GIS shell, and after the winding rod moves from the unfolded state to the curled state, the ratchet wheel is matched with the positioning locking mechanism, so that the winding rod is kept in the curled state.
In a preferred embodiment, the positioning locking mechanism comprises a locking claw, a limiting plate and a spring, wherein the locking claw is rotatably arranged on the GIS shell, the limiting plate is also arranged on the GIS shell, two ends of the spring are respectively connected with the locking claw and the limiting plate, and the locking claw is matched with the ratchet wheel.
The GIS partial discharge on-line monitoring system comprises the GIS partial discharge on-line monitoring device.
The invention has the beneficial effects that: the invention adopts the flexible substrate and SF for reducing the flexible built-in ultrahigh frequency sensor 6 The surface area of the gas contact mode can reduce the surface charge accumulated on the flexible substrate of the built-in sensor, so that the antenna assembly is prevented from being damaged, and the detection result of the built-in sensor is prevented from being influenced by partial discharge in the GIS equipment.
Drawings
Fig. 1 is a schematic diagram of the basic unit in the GIS housing detected by the present invention.
Fig. 2 is a schematic diagram of the structure of the present invention from the top view of fig. 1.
Fig. 3 is an enlarged schematic view of the structure of fig. 2 a in accordance with the present invention.
Fig. 4 is a schematic structural view of the driving mechanism of the present invention.
Fig. 5 is a schematic structural view of the rotary driving unit and the second linear driving unit of the present invention.
FIG. 6 is a schematic view of the configuration of the combination of the wrap spring and winding bar of the present invention.
FIG. 7 is a schematic view of the ratchet mechanism of the present invention mated with a detent mechanism.
Fig. 8 is a schematic structural view of the flexible built-in ultrahigh frequency sensor of the invention.
In the figure: 1. a GIS shell; 11. an external UHF sensor; 12. a chute; 121. a baffle; 122. an elastic bellows; 2. a flexible built-in ultrahigh frequency sensor; 21. a flexible substrate; 22. a helical antenna assembly; 3. rolling a rod; 31. a clamping groove; 32. a ratchet wheel; 4. a first linear driving unit; 41. a first motor; 42. a screw rod; 43. a slide block; 44. a guide groove; 45. a coupling; 5. a rotation driving unit; 51. a second motor; 52. a clamping shaft; 53. a frame body; 54. a mounting block; 6. a second linear driving unit; 7. a positioning locking mechanism; 71. a locking claw; 72. a limiting plate; 73. a spring; 8. a spiral spring.
Description of the embodiments
The subject matter described herein will now be discussed with reference to example embodiments. It is to be understood that these embodiments are merely discussed so that those skilled in the art may better understand and implement the subject matter described herein and that changes may be made in the function and arrangement of the elements discussed without departing from the scope of the disclosure herein. Various examples may omit, replace, or add various procedures or components as desired. In addition, features described with respect to some examples may be combined in other examples as well.
As shown in fig. 1-8, a GIS partial discharge on-line monitoring device includes a flexible built-in ultrahigh frequency sensor 2 for detecting electromagnetic wave signals propagated outwards at a partial discharge position in a GIS housing 1, the flexible built-in ultrahigh frequency sensor 2 includes a flexible substrate 21 and a spiral antenna assembly 22 attached to the flexible substrate 21, one end of the flexible substrate 21 is connected with the GIS housing 1, wherein the flexible substrate 21 is made of Thermosetting Polyimide (TPI) material;
the winding rod 3 is used for winding the flexible substrate 21 into a curled state, the output end of the winding rod 3 is connected to the other end of the flexible substrate 21, and the input end of the winding rod 3 penetrates through the GIS shell 1 and extends to the outside;
the output end of the driving mechanism is connected with the input end of the winding rod 3 in a separated mode;
a reset mechanism for returning the flexible substrate 21 from the curled state to the unfolded state;
the flexible built-in ultrahigh frequency sensor 2 comprises an unfolding state and a curling state;
the unfolded state is a state in which the flexible substrate 21 is attached to the GIS housing 1;
the curled state is a state in which the flexible substrate 21 is rolled into a cylindrical shape, and the surface area of the interface of the flexible substrate 21 with the gas is not more than 80% of the surface area of the interface of the flexible substrate 21 with the gas in the unfolded state;
when the flexible built-in ultrahigh frequency sensor 2 detects, the reset mechanism returns the flexible substrate 21 from the curled state to the unfolded state; when the flexible built-in ultrahigh frequency sensor 2 does not detect, the winding rod 3 winds the flexible substrate 21 into a curled state;
an external UHF sensor 11 is arranged outside the GIS shell 1.
In this embodiment, the implementation scenario specifically includes: when the flexible built-in ultrahigh frequency sensor 2 detects, the flexible substrate 21 is in an unfolding state and is attached to the inner wall of the GIS shell 1, the signal acquisition range of the sensor is enlarged, after the detection is completed, the driving mechanism drives the winding rod 3 to wind the flexible substrate 21 into a cylinder shape from the unfolding state, and the surface area of the interface of the flexible substrate 21 and gas contact is reduced, so that the surface charge accumulated on the flexible substrate 21 of the built-in sensor is reduced, the spiral antenna assembly 22 is prevented from being damaged, and the detection result of the built-in sensor is prevented from being influenced by partial discharge.
In one embodiment of the present invention, the input end of the winding rod 3 is provided with a clamping groove 31, the driving mechanism comprises a rotary driving unit 5, the rotary driving unit 5 comprises a second motor 51, the output end of the second motor 51 is connected with a clamping shaft 52, and the clamping shaft 52 is matched with the clamping groove 31.
In one embodiment of the present invention, the driving mechanism further includes a first linear driving unit 4, the first linear driving unit 4 includes a first motor 41, an output end of the first motor 41 is connected with a screw rod 42, a sliding block 43 is sleeved on the screw rod 42, a transverse plate is installed at the bottom of the first motor 41, a guide groove 44 parallel to the screw rod 42 is provided on the transverse plate, the sliding block 43 is slidably disposed in the guide groove 44, and the rotary driving unit 5 is installed on the sliding block 43.
In an embodiment of the present invention, the driving mechanism further includes a second linear driving unit 6, configured to insert the clamping shaft 52 and the clamping slot 31, where the second linear driving unit 6 may be a cylinder driving unit or an electric sliding rail driving unit, an output end of the second linear driving unit 6 is connected to the second motor 51, the rotary driving unit 5 further includes a frame 53, the second linear driving unit 6 is mounted on the frame 53, a mounting block 54 is mounted on one side of the frame 53, and the mounting block 54 is mounted on the slider 43.
In this embodiment, the implementation scenario specifically includes: the driving mechanism is placed at a designated position, the first motor 41 is connected with the screw rod 42 through the coupler 45, the sliding block 43 drives the rotary driving unit 5 and the second linear driving unit 6 to axially move along the high-voltage conductor, the winding rod 3 is driven to horizontally move, the situation that the joint of the flexible built-in ultrahigh frequency sensor 2 and the GIS shell 1 is broken when the winding rod 3 winds the flexible substrate 21 is avoided, the clamping shaft 52 is matched with the clamping groove 31 conveniently, and after the clamping shaft and the winding rod are matched with each other in an inserting mode, the second motor 51 drives the clamping shaft 52 to rotate, so that the winding rod 3 winds the flexible substrate 21, and the flexible built-in ultrahigh frequency sensor 2 is wound into a curled state.
In one embodiment of the present invention, a sliding groove 12 is formed on the GIS housing 1, a winding rod 3 is movably disposed in the sliding groove 12, an elastic corrugated sleeve 122 is sleeved on a rod wall of the winding rod 3 located in the sliding groove 12, and the elastic corrugated sleeve 122 is connected with an inner wall of the sliding groove 12.
In one embodiment of the invention, the inner side and the outer side of the chute 12 are respectively provided with a baffle plate 121 for sealing the chute 12, and the baffle plates 121 are sleeved on the rod wall of the winding rod 3.
In one embodiment of the invention, the return mechanism comprises a wrap spring 8, and two ends of the wrap spring 8 are respectively connected with the inner wall of the chute 12 and the winding rod 3.
In one embodiment of the invention, the end of the winding rod 3 outside the GIS shell 1 is fixedly connected with a ratchet wheel 32, the GIS shell 1 is provided with a positioning locking mechanism 7, and when the winding rod 3 moves from the unfolding state to the curling state, the ratchet wheel 32 is matched with the positioning locking mechanism 7, so that the winding rod 3 is kept in the curling state.
In one embodiment of the present invention, the positioning locking mechanism 7 includes a locking claw 71, a limiting plate 72 and a spring 73, wherein the locking claw 71 is rotatably mounted on the GIS housing 1, the limiting plate 72 is also mounted on the GIS housing 1, two ends of the spring 73 are respectively connected with the locking claw 71 and the limiting plate 72, and the locking claw 71 is matched with the ratchet 32.
In this embodiment, the implementation scenario specifically includes: after the flexible built-in ultrahigh frequency sensor 2 is rolled into a curled state by the winding rod 3, the locking claw 71 is matched with the ratchet wheel 32, at the moment, the coil spring 8 is stretched to store elastic potential energy, and when the flexible built-in ultrahigh frequency sensor 2 needs to be restored to an unfolding state, the locking claw 71 is manually pulled out, or the locking claw 71 is designed into a magnet in an electromagnetic adsorption mode, and the restoring state of the flexible built-in ultrahigh frequency sensor 2 is automatically controlled through magnetism.
In one embodiment of the present invention, the position information module is used for recording the position of the flexible built-in ultrahigh frequency sensor 2; and the automatic conveying equipment is controlled to drive the driving mechanism to move to a designated position to be matched with the winding rod 3 at the position through the position data recorded by the position information module.
The GIS partial discharge on-line monitoring system comprises the GIS partial discharge on-line monitoring device.
The antenna of the sensor designed by the invention has a whole structure of a semi-closed planar spiral antenna, other surfaces except a receiving surface are shielded by adopting a metal shielding cavity, a reflecting cavity is added, and then a wave absorbing material is filled to keep the broadband characteristic of the spiral antenna.
The embodiment has been described above with reference to the embodiment, but the embodiment is not limited to the above-described specific implementation, which is only illustrative and not restrictive, and many forms can be made by those of ordinary skill in the art, given the benefit of this disclosure, are within the scope of this embodiment.

Claims (10)

1. The GIS partial discharge on-line monitoring device is characterized by comprising a flexible built-in ultrahigh frequency sensor (2) for detecting electromagnetic wave signals which are transmitted outwards at a partial discharge position in a GIS shell (1), wherein the flexible built-in ultrahigh frequency sensor (2) comprises a flexible substrate (21) and a spiral antenna assembly attached to the flexible substrate (21), and one end of the flexible substrate (21) is connected with the GIS shell (1);
the winding rod (3) is used for winding the flexible substrate (21) into a curled state, the output end of the winding rod (3) is connected to the other end of the flexible substrate (21), and the input end of the winding rod (3) penetrates through the GIS shell (1) and extends to the outside;
the output end of the driving mechanism is detachably connected with the input end of the winding rod (3);
a reset mechanism for returning the flexible substrate (21) from the curled state to the unfolded state;
the flexible built-in ultrahigh frequency sensor (2) comprises an unfolding state and a curling state;
the unfolding state is a state that the flexible substrate (21) is attached to the GIS shell (1);
the curled state is that the flexible substrate (21) is rolled into a cylindrical shape, and the surface area of the interface of the flexible substrate (21) in contact with the gas is not more than 80% of the surface area of the interface of the flexible substrate (21) in the unfolded state in contact with the gas;
when the flexible built-in ultrahigh frequency sensor (2) detects, the reset mechanism returns the flexible substrate (21) from a curled state to an unfolded state; when the flexible built-in ultrahigh frequency sensor (2) does not detect, the winding rod (3) winds the flexible substrate (21) into a curled state.
2. The GIS partial discharge on-line monitoring device according to claim 1, wherein the input end of the winding rod (3) is provided with a clamping groove (31), the driving mechanism comprises a rotary driving unit (5), the rotary driving unit (5) comprises a second motor (51), the output end of the second motor (51) is connected with a clamping shaft (52), and the clamping shaft (52) is matched with the clamping groove (31).
3. The GIS partial discharge on-line monitoring device according to claim 2, wherein the driving mechanism further comprises a first linear driving unit (4), the first linear driving unit (4) comprises a first motor (41), the output end of the first motor (41) is connected with a screw rod (42), a sliding block (43) is sleeved on the screw rod (42), a transverse plate is arranged at the bottom of the first motor (41), a guide groove (44) parallel to the screw rod (42) is formed in the transverse plate, the sliding block (43) is arranged in the guide groove (44) in a sliding mode, and the rotary driving unit (5) is arranged on the sliding block (43); the sliding block (43) moves along the axial direction of the high-voltage conductor to drive the winding rod (3) to move horizontally.
4. A GIS partial discharge on-line monitoring device according to claim 3, characterized in that the driving mechanism further comprises a second linear driving unit (6), an output end of the second linear driving unit (6) is connected with the second motor (51), the second linear driving unit (6) is used for driving a clamping shaft (52) to be matched with the clamping groove (31), the rotary driving unit (5) further comprises a frame body (53), the second linear driving unit (6) is mounted on the frame body (53), a mounting block (54) is mounted on one side of the frame body (53), and the mounting block (54) is mounted on the sliding block (43).
5. The GIS partial discharge on-line monitoring device according to claim 4, wherein the GIS shell (1) is provided with a chute (12), the winding rod (3) is movably arranged in the chute (12), the winding rod (3) is positioned on the rod wall of the chute (12) and sleeved with an elastic corrugated sleeve (122), and the elastic corrugated sleeve (122) is connected with the inner wall of the chute (12).
6. The GIS partial discharge on-line monitoring device according to claim 5, wherein the inner side and the outer side of the chute (12) are respectively provided with a baffle (121) for sealing the chute (12), and the baffles (121) are sleeved on the rod wall of the winding rod (3).
7. The GIS partial discharge on-line monitoring device according to claim 6, wherein the reset mechanism comprises a coil spring (8), and two ends of the coil spring (8) are respectively connected with the inner wall of the chute (12) and the winding rod (3).
8. The GIS partial discharge on-line monitoring device according to claim 7, wherein a ratchet wheel (32) is fixedly connected to the end part of the winding rod (3) located outside the GIS shell (1), the positioning locking mechanism (7) is installed on the GIS shell (1), and after the winding rod (3) moves from an unfolding state to a curling state, the ratchet wheel (32) is matched with the positioning locking mechanism (7) so that the winding rod (3) is kept in the curling state.
9. The GIS partial discharge on-line monitoring device according to claim 8, wherein the positioning locking mechanism (7) comprises a locking claw (71), a limiting plate (72) and a spring (73), the locking claw (71) is rotatably installed on the GIS shell (1), the limiting plate (72) is also installed on the GIS shell (1), two ends of the spring (73) are respectively connected with the locking claw (71) and the limiting plate (72), and the locking claw (71) is matched with the ratchet wheel (32).
10. A GIS partial discharge on-line monitoring system, characterized by comprising a GIS partial discharge on-line monitoring device according to any one of claims 1-9.
CN202310712031.9A 2023-06-15 2023-06-15 GIS partial discharge on-line monitoring system and device thereof Active CN116449166B (en)

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CN214427562U (en) * 2021-02-05 2021-10-19 青岛华电高压电气有限公司 Built-in ultrahigh frequency flexible sensor for high-voltage cable
CN113533919A (en) * 2021-09-07 2021-10-22 湖北工业大学 Miniaturized built-in flexible antenna sensor for partial discharge detection of power equipment
CN114966329A (en) * 2022-02-16 2022-08-30 湖北工业大学 Partial discharge insulation defect integrated detection sensor
CN115436856A (en) * 2022-08-29 2022-12-06 湖北工业大学 Partial discharge ultrasonic and ultrahigh frequency integrated sensor performance test method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000111604A (en) * 1998-10-07 2000-04-21 Mitsubishi Electric Corp Partial discharge detecting device of gas insulation electric equipment
KR20050064305A (en) * 2003-12-23 2005-06-29 주식회사 하이닉스반도체 Method for fabricating semiconductor device
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CN214427562U (en) * 2021-02-05 2021-10-19 青岛华电高压电气有限公司 Built-in ultrahigh frequency flexible sensor for high-voltage cable
CN113533919A (en) * 2021-09-07 2021-10-22 湖北工业大学 Miniaturized built-in flexible antenna sensor for partial discharge detection of power equipment
CN114966329A (en) * 2022-02-16 2022-08-30 湖北工业大学 Partial discharge insulation defect integrated detection sensor
CN115436856A (en) * 2022-08-29 2022-12-06 湖北工业大学 Partial discharge ultrasonic and ultrahigh frequency integrated sensor performance test method

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