CN116441119A - Perovskite film coating equipment - Google Patents

Perovskite film coating equipment Download PDF

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Publication number
CN116441119A
CN116441119A CN202310392609.7A CN202310392609A CN116441119A CN 116441119 A CN116441119 A CN 116441119A CN 202310392609 A CN202310392609 A CN 202310392609A CN 116441119 A CN116441119 A CN 116441119A
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CN
China
Prior art keywords
fixedly connected
film coating
carrier
inner cavity
plunger
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Granted
Application number
CN202310392609.7A
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Chinese (zh)
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CN116441119B (en
Inventor
贺一亮
宋天乐
肖城
李恒扬
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Shenzhen Freshen Technology Co ltd
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Shenzhen Freshen Technology Co ltd
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Priority to CN202310392609.7A priority Critical patent/CN116441119B/en
Publication of CN116441119A publication Critical patent/CN116441119A/en
Application granted granted Critical
Publication of CN116441119B publication Critical patent/CN116441119B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

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  • Coating Apparatus (AREA)

Abstract

The invention discloses perovskite film coating equipment which comprises a base and is characterized in that a bracket is fixedly connected to the middle of the upper end of the base, a linear motor is arranged in the middle of the upper end of the base, a carrier is arranged on one side of the upper end of the linear motor, a mounting plate is connected to the outer wall of the bracket in a sliding mode, a film coating head is fixedly connected to one side of the mounting plate, a 3D displacement sensor is arranged between the film coating head and the mounting plate, the 3D displacement sensor is fixedly connected with the mounting plate, a feeding assembly for accurately feeding the film coating head is arranged in the middle of the upper end of the bracket, and accurate fine adjustment assemblies for accurately adjusting the height of the film coating head are arranged on two sides of the upper end of the bracket. According to the invention, the lifting assembly is arranged, so that the product can be lifted up to separate the product from the carrier after the film coating operation is finished, thereby facilitating the staff to stably pick up the product with both hands without other tools, simplifying the operation steps of the staff and avoiding the occurrence of scratch of the film.

Description

Perovskite film coating equipment
Technical Field
The invention relates to the technical field of coating equipment, in particular to perovskite coating equipment.
Background
A slit coater using a slit coating method is generally known, in which a liquid such as a resist, a special film material, or an adhesive is discharged from a slit nozzle onto a work to form a coating film. Such a slit coater using a slit coating method has characteristics such as higher coating accuracy, faster coating speed, and higher liquid (liquid agent) use efficiency than a slit coater using a spin coating method, and therefore, is widely used as a coating film forming apparatus.
As disclosed in patent publication No. CN216459827U, an air knife device and a slit coater, the air knife device comprises a slide rail mechanism, a heating device, a pulling frame and an air knife, the slide rail mechanism is provided with a dial; the slide rail mechanism comprises a z-axis slide rail mechanism and a y-axis slide rail mechanism, the y-axis slide rail mechanism comprises a first slide block and a first bottom plate, and the z-axis slide rail mechanism comprises a second slide block and a second bottom plate; one end of the first sliding block is fixed on the first bottom plate, the other end of the first sliding block is fixed on the second bottom plate, and the z-axis sliding rail mechanism and the y-axis sliding rail mechanism are mutually and vertically connected; the heating device is fixed on a second sliding block of the z-axis sliding rail mechanism; the heating device is connected with the air knife based on the pulling frame, and an angle scale is arranged at the joint of the air knife and the pulling frame.
When the device is used for coating a product, the product is attached to the workbench, after the coating operation is finished, the product tightly attached to the workbench is difficult to directly pick up by hands, one hand is required to tilt one side of the product by means of tools such as a thin iron sheet, the other hand is required to stabilize and pick up the product, the operation is complicated, the situation of unstable holding exists, and the risk of scratching the film exists in the process of tilting the product by the iron sheet.
Disclosure of Invention
The invention aims to provide perovskite film coating equipment which solves the problems in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the perovskite film coating equipment comprises a base, base upper end middle part fixedly connected with support, base upper end middle part is provided with linear electric motor, linear electric motor upper end one side is provided with the carrier, support outer wall sliding connection has the mounting panel, mounting panel one side fixedly connected with film head, be provided with 3D displacement sensor between film head and the mounting panel, 3D displacement sensor and mounting panel fixed connection, support upper end middle part is provided with the feed subassembly that is used for carrying out accurate feed to film head, support upper end both sides are provided with the accurate fine setting subassembly that is used for accurate regulation to film head height.
As a further scheme of the invention: the precision fine adjustment assembly comprises a KK module, the KK module is fixedly connected with two sides of the upper end of the support, a precision pressure regulating valve is symmetrically arranged between the KK module, two ends of the lower side of the mounting plate are fixedly connected with cylinders, one end, close to the cylinders, of the outer wall of the mounting plate is provided with an eccentric cam bearing follower, the feeding assembly comprises a high-precision microinjection pump and a feed cylinder positioning and clamping mechanism, and the precision microinjection pump and the feed cylinder positioning and clamping mechanism are fixedly connected with the middle part of the upper end of the support.
As a further scheme of the invention: the utility model discloses a product and precoat, including carrier upper end laminating, carrier upper end fixedly connected with locating plate, the locating plate is a T template, one side that the support was kept away from to the locating plate is used for the location precoat, one side that the locating plate is close to the support is used for the location product, a plurality of gas pockets have been seted up to the carrier upper end, a plurality of removal holes have been seted up at carrier upper end middle part, the position of gas pocket corresponds with the position of product and precoat, the carrier inner chamber is provided with when the product needs to take for lift up the product and make its lifting subassembly with carrier up end separation.
As a further scheme of the invention: the lifting assembly comprises a hard tube, the hard tube is in sliding connection with the inner cavity of the carrier, one side of the lower end of the hard tube is fixedly connected with an electric telescopic push rod for driving the hard tube to ascend, the upper end of the hard tube is fixedly connected with a corrugated tube, the upper end of the corrugated tube is fixedly connected with a circular ring, the bottom of the inner cavity of the hard tube is in sliding connection with a fixing column, the lower end of the fixing column is fixedly connected with the inner cavity of the carrier, and the upper end of the fixing column is provided with a fixing piece.
As a further scheme of the invention: the fixing piece comprises a disc, the disc is in sliding connection with the inner wall of the hard tube, the lower end of the disc is fixedly connected with symmetrical supporting rods, two groups of four trigger keys are symmetrically arranged at the lower end of the disc, the vertical plane where the trigger piece is located is mutually perpendicular to the vertical plane where the supporting rods are located, a first inclined plane is arranged at the lower end of each trigger key, the lower end of each supporting rod is fixedly connected with the connecting plate, and a moving piece is arranged at the middle part of an inner cavity of the disc.
As a further scheme of the invention: the movable piece comprises a cross key, the outer wall of the cross key is fixedly connected with the inner cavity of the circular ring, a movable rod is fixedly connected with the middle part of the lower end of the cross key, the movable rod is in sliding connection with the middle part of the upper end of the circular disc, the diameter of the movable rod is smaller than the distance between the supporting rods, the lower part of the inner cavity of the movable rod is in sliding connection with a plunger, vent holes are symmetrically formed in the outer wall of the lower part of the movable rod, and the vent holes and the trigger key are located on the same vertical plane.
As a further scheme of the invention: the plunger lower extreme sets up the third inclined plane of symmetry, plunger upper end middle part fixedly connected with limiting plate, the spacing spout that cooperation limiting plate used has been seted up to the carriage release lever inner chamber, the first spring of limiting plate upper end middle part fixedly connected with, the one end and the carriage release lever inner chamber top fixed connection of plunger are kept away from to first spring, plunger lower extreme fixedly connected with symmetrical extension board, the length of extension board is less than the diameter of plunger, be equipped with the breach between plunger and the extension board, breach and ventilation hole are located same vertical plane, the plunger below is provided with the follower.
As a further scheme of the invention: the driven piece comprises a shell, shell one side and hard tube inner chamber fixed connection, the shell sets up between fixed column and extension board, shell inner chamber sliding connection has L type key, L type key comprises horizontal part and perpendicular part, one side fixedly connected with driven piece of perpendicular part is kept away from to horizontal part upper end, the one end fixedly connected with second spring of perpendicular part is kept away from to horizontal part, the one end and hard tube inner chamber fixed connection of perpendicular part are kept away from to the second spring, the fourth inclined plane has been seted up to perpendicular part upper end.
As a further scheme of the invention: the length of the driven block is greater than the width of the outer wall of the shell, the distance between the trigger keys in the same group is greater than the width of the outer wall of the shell and less than the length of the driven block, and the distance between the support plates is greater than the width of the shell.
Compared with the prior art, the invention has the beneficial effects that:
through setting up linear electric motor and come accurate control film speed, through setting up accurate fine setting subassembly can be accurate and accurate control film head's height, the control film thickness that can both be stable in the face of not unidimensional product to the accurate microinjection pump cooperates the slit to film the supply and the blowout of the control material that the head can be accurate.
Can be after the operation of film is finished through setting up the lifting subassembly, jack-up the product makes product and carrier separation to make things convenient for the staff to take up the product that both hands are stable, need not with the help of other instruments, both simplified the operating procedure of staff and avoided the condition emergence of membrane by the fish tail simultaneously.
Through setting up the mutually supporting use of mounting, moving part and follower, at the in-process that the product was lifted, the movable rod takes place relative motion with the disc and forms the negative pressure and come the firm absorption of product on the ring to when the product reaches the highest department, carry out the pressure release to the hard tube inner chamber, make the product can easily take, ensured the stability of product in-process that rises promptly, also made things convenient for the staff to take the product simultaneously.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic side view of the present invention.
Fig. 3 is a schematic structural diagram of the whole carrier in the present invention.
Fig. 4 is a schematic structural diagram of an upper end surface of a carrier according to the present invention.
FIG. 5 is a schematic view of a lifting assembly according to the present invention.
Figure 6 is a schematic cross-sectional view of a lift assembly according to the present invention.
FIG. 7 is a schematic view of the internal structure of a rigid tube according to the present invention.
Fig. 8 is a schematic structural view of a fixing member in the present invention.
Fig. 9 is a schematic structural view of a moving member in the present invention.
Fig. 10 is a schematic structural view of a driven member in the present invention.
Fig. 11 is a schematic view of the structure of the plunger according to the present invention.
In the figure: 1. a base; 2. a linear motor; 3. a carrier; 4. a mounting plate; 5. a 3D displacement sensor; 6. a cylinder; 7. a KK module; 8. an eccentric cam bearing follower; 9. a precise pressure regulating valve; 10. a high-precision microinjection pump; 11. a coating head; 12. a positioning plate; 13. pre-smearing; 14. a product; 15. an air suction hole; 16. a moving hole; 17. a lifting assembly; 171. a circular ring; 172. fixing the column; 173. a bellows; 174. a hard tube; 18. a fixing member; 181. a disc; 182. a support rod; 183. triggering a key; 184. a first inclined surface; 19. a moving member; 191. a moving rod; 192. cross keys; 193. a first spring; 194. a vent hole; 195. a plunger; 196. a support plate; 197. a third inclined surface; 20. a follower; 201. a housing; 202. an L-type bond; 203. a driven block; 204. a second inclined surface; 205. a second spring; 206. a fourth inclined surface; 21. a bracket; 22. an electric telescopic push rod.
Detailed Description
Referring to fig. 1-2, in an embodiment of the present invention, a perovskite film coating apparatus includes a base 1, the base 1 is made of marble, a support 21 is fixedly connected to a middle portion of an upper end of the base 1, a linear motor 2 is disposed in a middle portion of an upper end of the base 1, projections of the support 21 and the linear motor 2 on an upper end surface of the base 1 are perpendicular to each other, a carrier 3 is disposed on one side of an upper end of the linear motor 2, an installation plate 4 is slidably connected to an outer wall of the support 21, a film coating head 11 is fixedly connected to one side of the installation plate 4, a slit is disposed between the film coating heads 11 to achieve slit film coating, a thickness of the slit is 0.05mm, an output of a material can be accurately controlled, a 3D displacement sensor 5 is disposed between the film coating head 11 and the installation plate 4, the 3D displacement sensor 5 is fixedly connected to the installation plate 4, a feeding component for accurately feeding the film coating head 11 is disposed in a middle portion of an upper end of the support 21, and fine tuning components for accurately feeding the film coating head 11 are disposed on two sides of an upper end of the support 21.
The precision fine adjustment assembly comprises KK modules 7, the KK modules 7 are fixedly connected with two sides of the upper end of a support 21, precision pressure regulating valves 9 are symmetrically arranged between the two KK modules 7, two ends of the lower side of a mounting plate 4 are fixedly connected with air cylinders 6, one ends, close to the air cylinders 6, of the outer walls of the mounting plate 4 are provided with eccentric cam bearing followers 8, the air cylinders 6 drive the mounting plate 4 to move to roughly adjust the height of a coating head 11, the precision fine adjustment is carried out on the height of the coating head 11 through the KK modules 7 and the precision pressure regulating valves 9, so that the thickness of a coating film is ensured, the feeding assembly comprises a high-precision microinjection pump 10 and a feed cylinder positioning and clamping mechanism, the feed cylinder positioning and clamping mechanism clamps and fixes a storage cylinder and accurately supplies perovskite materials to the coating head 11 through the high-precision microinjection pump 10, so that the coating film is uniform and waste of materials is avoided, and the speed of the coating film can be changed through changing the moving speed of a linear motor 2 is quite convenient.
Referring to fig. 3-4, a product 14 and a precoat 13 are attached to the upper end of a carrier 3, a positioning plate 12 is fixedly connected to the upper end of the carrier 3, the positioning plate 12 is a T-shaped plate, two vertical corners are arranged on the inner side of the positioning plate 12, the product 14 and the precoat 13 are positioned by aligning the corners of the product 14 and the precoat 13 with the corners, one side, far away from a bracket 21, is used for positioning the precoat 13, one side, close to the bracket 21, is used for positioning the product 14, a plurality of air suction holes 15 are formed in the upper end of the carrier 3, a moving hole 16 is formed in the middle of the upper end of the carrier 3, the positions of the air suction holes 15 correspond to the positions of the product 14 and the precoat 13, the product 14 and the precoat 13 are adsorbed and fixed through a micro vacuum pump and the air suction holes 15, and a plurality of groups of lifting assemblies 17 for lifting the product 14 to separate from the upper end surface of the carrier 3 are arranged in an inner cavity of the carrier 3 when the product 14 needs to be taken.
Referring to fig. 5-7, the lifting assembly 17 includes a rigid tube 174, the rigid tube 174 is slidably connected with an inner cavity of the carrier 3, one side of a lower end of the rigid tube 174 is fixedly connected with an electric telescopic push rod 22 for driving the rigid tube 174 to lift, an upper end of the rigid tube 174 is fixedly connected with a bellows 173, an upper end of the bellows 173 is fixedly connected with a ring 171, when the electric telescopic push rod 22 is not started, an upper end face of the ring 171 and an upper end face of the carrier 3 are located on the same horizontal plane, that is, the ring 171 is attached to a lower end face of the product 14, and a sealing gasket is fixedly connected with an upper end face of the ring 171, so that a space above the rigid tube 174 can form negative pressure in a lifting process, a fixing column 172 is slidably connected with a bottom of the inner cavity of the rigid tube 174, a lower end of the fixing column 172 is fixedly connected with the inner cavity of the carrier 3, a fixing member 18 is arranged at an upper end of the fixing column 172, a moving member 19 is arranged in the inner cavity of the ring 171, a driven member 20 is arranged below the inner cavity of the rigid tube 174, and the driven member 20 is located above the connecting plate 173.
Referring to fig. 8, the fixing member 18 includes a disc 181, the disc 181 is slidably connected with the inner wall of the rigid pipe 174, the lower end of the disc 181 is fixedly connected with a symmetrical supporting rod 182, two sets of four trigger keys 183 are symmetrically disposed at the lower end of the disc 181, the vertical plane where the trigger member is located is perpendicular to the vertical plane where the supporting rod 182 is located, the lower end of the trigger key 183 is provided with a first inclined plane 184, the first inclined plane 184 is inclined towards the outer wall of the rigid pipe 174, the lower end of the supporting rod 182 is fixedly connected with the fixing column 172, the position of the disc 181 is fixed through the fixing column 172, that is, when the electric telescopic push rod 22 pushes the rigid pipe 174 to rise, the corrugated pipe 173 is folded and contracted, the disc 181 is kept fixed so as to form a negative pressure to fix the product 14 in the space where the inner cavity of the rigid pipe 174 is located above the rigid pipe 174.
Referring to fig. 9, the moving member 19 includes a cross key 192, the outer wall of the cross key 192 is fixedly connected with the inner cavity of the circular ring 171, the middle part of the lower end of the cross key 192 is fixedly connected with a moving rod 191, the moving rod 191 and the middle part of the upper end of the circular disk 181 are connected in a penetrating and sliding manner, the diameter of the moving rod 191 is smaller than the distance between the struts 182, the lower part of the inner cavity of the moving rod 191 is connected with a plunger 195 in a sliding manner, the lower end of the plunger 195 is provided with a symmetrical third inclined plane 197, the third inclined plane 197 is an inclined plane inclined to the central position of the moving rod 191, the middle part of the upper end of the plunger 195 is fixedly connected with a limiting plate, the inner cavity of the moving rod 191 is provided with a limiting chute matched with the limiting plate, the middle part of the upper end of the limiting plate is fixedly connected with a first spring 193, one end of the first spring 193 far away from the plunger 195 is fixedly connected with the top of the inner cavity of the moving rod 191, the outer wall of the lower part of the moving rod 191 is symmetrically provided with a vent 194, the vent 194 and the trigger key 183 is located on the same vertical plane, the lower end of the plunger 195 is fixedly connected with a symmetrical support plate 196, the length of the support plate 196 is smaller than the diameter of the plunger 195, namely the plunger 195 is located on the same vertical plane, a gap is located between the support plate 196 and the vent hole and the support plate 196, and the vent hole is located on the vertical plane.
Referring to fig. 10-11, the follower 20 includes a housing 201, one side of the housing 201 is fixedly connected with an inner cavity of the rigid tube 174, the housing 201 is disposed between the connecting plate 173 and the support plate 196, the inner cavity of the housing 201 is slidably connected with an L-shaped key 202, the L-shaped key 202 is composed of a horizontal portion and a vertical portion, one side of an upper end of the horizontal portion far away from the vertical portion is fixedly connected with a follower block 203, the length of the follower block 203 is greater than the width of an outer wall of the housing 201, the interval between the same group of trigger keys 183 is greater than the width of the outer wall of the housing 201 but less than the length of the follower block 203, one end of the horizontal portion far away from the vertical portion is fixedly connected with a second spring 205, one end of the second spring 205 far away from the vertical portion is fixedly connected with the inner cavity of the rigid tube 174, a fourth inclined surface 206 is opened at an upper end of the vertical portion, the fourth inclined surface 206 is an inclined surface inclined towards the direction of the follower block 203, and the interval between the support plates 196 is greater than the width of the housing 201, when the rigid pipe 174 starts to move upwards, the corrugated pipe 173 is folded from bottom to top, the moving rod 191 and the shell 201 move relatively in the process, namely, the support plate 196 is not contacted with the shell 201 in the process of moving the plunger 195 and the shell 201 relatively, namely, the vertical movement of the plunger 195 is not triggered by the shell 201, the stability of the device in operation is ensured, as the rigid pipe 174 rises, the shell 201 moves upwards along with the rigid pipe 174 until the driven block 203 contacts with the trigger key 183, at the moment, under the action of the first inclined plane 184 and the second inclined plane 204, the driven block 203 moves relatively with the trigger key 183, so that the L-shaped key 202 is pushed towards the direction of the plunger 195, at the moment, the third inclined plane 197 and the fourth inclined plane 206 approach gradually and contact, so that the L-shaped key 202 pushes the plunger 195 to move vertically upwards, thereby communicating the notch with the vent hole 194, thereby reaching the aim of pressure relief to the space at the upper end of the circular disc 181, and being convenient for a worker to stably and easily take the product 14 at the upper end of the circular ring 171 by using two hands.
The device drives the product to move horizontally through the linear motor 2, controls the height of the film coating head 11 through the air cylinder 6 and the 3D sensor, controls the spraying of materials through the high-precision micro metering pump 10, and controls a plurality of groups of electric telescopic push rods 22 through plc so as to enable the electric telescopic push rods to be synchronously started or closed, wherein the prior art comprises the electric control technology, and the electric control technology is not excessively described herein.

Claims (9)

1. The perovskite film coating equipment comprises a base and is characterized in that a bracket is fixedly connected to the middle of the upper end of the base, a linear motor is arranged in the middle of the upper end of the base, a carrier is arranged on one side of the upper end of the linear motor, a mounting plate is slidably connected to the outer wall of the bracket, a film coating head is fixedly connected to one side of the mounting plate, a 3D displacement sensor is arranged between the film coating head and the mounting plate, the 3D displacement sensor is fixedly connected with the mounting plate, a feeding assembly for accurately feeding the film coating head is arranged in the middle of the upper end of the bracket, and accurate fine adjustment assemblies for accurately adjusting the height of the film coating head are arranged on two sides of the upper end of the bracket.
2. The perovskite film coating equipment according to claim 1, wherein the precise fine adjustment assembly comprises a KK module, the KK module is fixedly connected with two sides of the upper end of the support, precise pressure regulating valves are symmetrically arranged between the two KK modules, two ends of the lower side of the mounting plate are fixedly connected with cylinders, one end, close to the cylinders, of the outer wall of the mounting plate is provided with an eccentric cam bearing follower, and the feeding assembly comprises a high-precision microinjection pump and a feed cylinder positioning and clamping mechanism, and the precision microinjection pump and the feed cylinder positioning and clamping mechanism are fixedly connected with the middle part of the upper end of the support.
3. The perovskite film coating equipment according to claim 1, wherein the upper end of the carrier is provided with a product and a pre-coating film in a fitting manner, the upper end of the carrier is fixedly connected with a positioning plate, the positioning plate is a T-shaped plate, one side of the positioning plate, which is far away from the bracket, is used for positioning the pre-coating film, one side of the positioning plate, which is close to the bracket, is used for positioning the product, a plurality of air suction holes are formed in the upper end of the carrier, a plurality of moving holes are formed in the middle of the upper end of the carrier, the positions of the air suction holes correspond to the positions of the product and the pre-coating film, and a plurality of groups of lifting assemblies used for lifting the product to separate the product from the upper end surface of the carrier when the product needs to be taken are arranged in the inner cavity of the carrier.
4. The perovskite film coating equipment according to claim 3, wherein the lifting component comprises a hard tube, the hard tube is in sliding connection with the inner cavity of the carrier, one side of the lower end of the hard tube is fixedly connected with an electric telescopic push rod for driving the hard tube to ascend, the upper end of the hard tube is fixedly connected with a corrugated tube, the upper end of the corrugated tube is fixedly connected with a circular ring, the bottom of the inner cavity of the hard tube is in sliding connection with a fixing column, the lower end of the fixing column is fixedly connected with the inner cavity of the carrier, and the upper end of the fixing column is provided with a fixing piece.
5. The perovskite film coating device according to claim 4, wherein the fixing piece comprises a disc, the disc is in sliding connection with the inner wall of the hard tube, the lower end of the disc is fixedly connected with a symmetrical supporting rod, two groups of four trigger keys are symmetrically arranged at the lower end of the disc, the vertical plane where the trigger piece is located is mutually perpendicular to the vertical plane where the supporting rod is located, a first inclined plane is formed at the lower end of the trigger key, the lower end of the supporting rod is fixedly connected with the connecting plate, and a moving piece is arranged in the middle of the inner cavity of the disc.
6. The perovskite film coating device according to claim 5, wherein the moving member comprises a cross key, the outer wall of the cross key is fixedly connected with the inner cavity of the circular ring, a moving rod is fixedly connected with the middle part of the lower end of the cross key, the moving rod is in penetrating sliding connection with the middle part of the upper end of the circular disc, the diameter of the moving rod is smaller than the distance between the supporting rods, the lower part of the inner cavity of the moving rod is in sliding connection with a plunger, vent holes are symmetrically formed in the outer wall of the lower part of the moving rod, and the vent holes and the trigger key are located on the same vertical plane.
7. The perovskite film coating device according to claim 6, wherein the lower end of the plunger is provided with a symmetrical third inclined plane, the middle part of the upper end of the plunger is fixedly connected with a limiting plate, the inner cavity of the moving rod is provided with a limiting chute matched with the limiting plate, the middle part of the upper end of the limiting plate is fixedly connected with a first spring, one end of the first spring, which is far away from the plunger, is fixedly connected with the top of the inner cavity of the moving rod, the lower end of the plunger is fixedly connected with a symmetrical support plate, the length of the support plate is smaller than the diameter of the plunger, a gap is arranged between the plunger and the support plate, the gap and the vent hole are located on the same vertical plane, and a driven piece is arranged below the plunger.
8. The perovskite film coating apparatus as recited in claim 4 or 7, wherein the follower comprises a housing, one side of the housing is fixedly connected with the lumen of the rigid tube, the housing is disposed between the fixed column and the support plate, the lumen of the housing is slidably connected with an L-shaped key, the L-shaped key is composed of a horizontal portion and a vertical portion, one side of the upper end of the horizontal portion, which is far away from the vertical portion, is fixedly connected with a follower block, one end of the horizontal portion, which is far away from the vertical portion, is fixedly connected with a second spring, one end of the second spring, which is far away from the vertical portion, is fixedly connected with the lumen of the rigid tube, and a fourth inclined plane is provided at the upper end of the vertical portion.
9. A perovskite film coating apparatus as claimed in claim 5 or 8, wherein the length of the driven block is greater than the width of the outer wall of the housing, the spacing between the trigger keys of the same set is greater than the width of the outer wall of the housing and less than the length of the driven block, and the spacing between the support plates is greater than the width of the housing.
CN202310392609.7A 2023-04-04 2023-04-04 Perovskite film coating equipment Active CN116441119B (en)

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Application Number Priority Date Filing Date Title
CN202310392609.7A CN116441119B (en) 2023-04-04 2023-04-04 Perovskite film coating equipment

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Application Number Priority Date Filing Date Title
CN202310392609.7A CN116441119B (en) 2023-04-04 2023-04-04 Perovskite film coating equipment

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CN116441119A true CN116441119A (en) 2023-07-18
CN116441119B CN116441119B (en) 2024-01-23

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CN112808497A (en) * 2021-02-24 2021-05-18 新疆八钢钢管有限责任公司 Coating film thickness control device for workpiece surface coating film
CN113062896A (en) * 2021-03-18 2021-07-02 营口金辰太阳能设备有限公司秦皇岛分公司 Driving method of ejector pin rod and negative pressure jacking type photovoltaic assembly laminating machine
CN215843762U (en) * 2021-09-16 2022-02-18 武汉鑫誉金天科技有限公司 Perovskite coating device that film forming uniformity is high
CN114082012A (en) * 2021-11-19 2022-02-25 安徽省立医院(中国科学技术大学附属第一医院) Portable multistage negative pressure suction device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE7702375L (en) * 1976-03-04 1977-09-05 Wolfgang Wagner SET AND DEVICE FOR INJECTION
WO2020130045A1 (en) * 2018-12-18 2020-06-25 株式会社飯沼ゲージ製作所 Slit coater
WO2020232846A1 (en) * 2019-05-23 2020-11-26 福建省中科生物股份有限公司 Auxiliary root placement apparatus for hydroponic separate planting
TW202111853A (en) * 2019-09-04 2021-03-16 大陸商中微半導體設備(上海)股份有限公司 Plasma processor, wafer lifting device and lifting method thereof in which the high of the top ends of a plurality of lift pins are flush with each other, and the height of the lift pins in the reactor can be adjusted directly
CN112808497A (en) * 2021-02-24 2021-05-18 新疆八钢钢管有限责任公司 Coating film thickness control device for workpiece surface coating film
CN113062896A (en) * 2021-03-18 2021-07-02 营口金辰太阳能设备有限公司秦皇岛分公司 Driving method of ejector pin rod and negative pressure jacking type photovoltaic assembly laminating machine
CN215843762U (en) * 2021-09-16 2022-02-18 武汉鑫誉金天科技有限公司 Perovskite coating device that film forming uniformity is high
CN114082012A (en) * 2021-11-19 2022-02-25 安徽省立医院(中国科学技术大学附属第一医院) Portable multistage negative pressure suction device

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