CN116436335A - Inchworm resonant piezoelectric motor based on cantilever beam structure synthesized motion - Google Patents

Inchworm resonant piezoelectric motor based on cantilever beam structure synthesized motion Download PDF

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Publication number
CN116436335A
CN116436335A CN202310523369.XA CN202310523369A CN116436335A CN 116436335 A CN116436335 A CN 116436335A CN 202310523369 A CN202310523369 A CN 202310523369A CN 116436335 A CN116436335 A CN 116436335A
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China
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pair
connecting plate
driving
elastic vibrator
tightening
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贺良国
田海涛
李新宇
窦浩天
岳旭康
钱安
万志凯
刘丰羽
黄正
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Hefei University of Technology
Intelligent Manufacturing Institute of Hefei University Technology
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Hefei University of Technology
Intelligent Manufacturing Institute of Hefei University Technology
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Priority to CN202310523369.XA priority Critical patent/CN116436335A/en
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023—Inchworm motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/16—Mechanical energy storage, e.g. flywheels or pressurised fluids

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention belongs to the technical field of precise driving and positioning, and particularly relates to an inchworm resonant piezoelectric motor based on cantilever structure synthetic motion, which comprises a motor base, a flexible stator mechanism, a clamping elastic vibrator, a driving elastic vibrator, a pre-tightening mechanism, a linear slide rail and a pair of slide blocks; because the substrate overhanging end of the clamping elastic vibrator is flexibly connected with the stator base through the first connecting plate, the substrate of the driving elastic vibrator is flexibly connected with the first connecting plate through the second connecting plate, when a harmonic excitation signal with the phase difference of 90 degrees is input, the clamping elastic vibrator is close to or far away from the linear slide rail in one vibration period, the linear slide rail is linearly moved in a pair of slide grooves, and the reverse linear movement of the motor can be realized by changing the phase difference of input harmonic signals; therefore, the invention realizes the integration of the driving and clamping of the piezoelectric motor, adopts single harmonic driving, has better energy conversion efficiency when working in a resonance state, has no sliding friction in the running process, and has stable running and long service life.

Description

Inchworm resonant piezoelectric motor based on cantilever beam structure synthesized motion
Technical Field
The invention belongs to the technical field of precise driving and positioning, and particularly relates to an inchworm resonant piezoelectric motor based on cantilever structure synthetic motion.
Background
Piezoelectric motors have evolved rapidly over the last decades as the demand for actuators in engineering applications has increased. Compared with the traditional electromagnetic motor, the piezoelectric motor has the advantages of small volume, quick response, no electromagnetic interference and the like, and has wide application in the fields of micro robots, aerospace equipment, biomedical treatment, optical measurement and the like.
At present, the piezoelectric motor has a plurality of structural types and mainly can be divided into an ultrasonic motor, an inchworm motor and an inertial impact motor according to the working principle, wherein the ultrasonic motor has the advantages of high frequency, high torque, low noise and the like, but the ultrasonic motor generates motion by utilizing friction between a stator and a rotor, so that the motor is accompanied with the problem of friction and abrasion during working, and the motor is not suitable for long-time working; the inertial impact motor has the advantages of large stroke, simple structure, high resolution, small volume, microminiaturization and the like. However, the motor of the type uses the inertia impact of the stator to make the rotor generate micro displacement difference to perform linear or rotary motion, so that the backspacing step of each period is different, and the running stability of the motor of the type is affected.
In 2015, qu Jianjun et al designed a passive clamping inchworm type piezoelectric motor, the stator structure of which consists of a driving clamping body, a holding clamping body and a driving body, under the control of a certain signal time sequence, the transverse movement of a piezoelectric stack in the driving body is realized to drive the vertical movement of the clamping body, and the transverse movement of the piezoelectric stack and the orderly clamping and loosening of the clamping body and a linear sliding rail form an inchworm process, so that the linear driving of the motor is realized. The lateral movement part of the piezoelectric stack is converted into the vertical movement of the clamping body in the working process, so that the driving force is smaller, when the working frequency is 70 Hz, the maximum speed of the no-load operation is 0.43 mm/s, the maximum output force is 2.1N, the working frequency is lower than that of other types of motors, the output speed is lower, and the piezoelectric stack driving is used in the structure, so that the cost is higher.
Disclosure of Invention
Aiming at the problems, the inchworm resonant piezoelectric motor based on the cantilever beam structure synthesized motion is simple in structure, single harmonic driving is adopted, energy conversion efficiency is good when the motor works in a resonant state, and compared with other motors of the same type, the inchworm resonant piezoelectric motor has the characteristics of no backspacing, convenience in power supply control and the like, the working efficiency of the motor can be remarkably improved when the motor works in the resonant state, the structure of a stator can be simplified by piezoelectric bimorphs, and the cost of the motor is reduced.
The specific technical scheme of the invention is as follows: an inchworm resonant piezoelectric motor based on cantilever beam structure synthetic motion comprises a motor base 1, a flexible stator mechanism 2, a clamping elastic vibrator 3, a driving elastic vibrator 4, a pre-tightening mechanism 5, a linear slide rail 6 and a pair of sliding blocks 7;
the motor base 1 is an L-shaped plate, the pre-tightening mechanism 5 comprises an upright pre-tightening plate 51 and a pair of pre-tightening bolts 52, the pre-tightening plate 51 is longitudinally arranged at the extending end of the horizontal part of the motor base 1, so that the pre-tightening plate 51 and the vertical part of the motor base 1 are oppositely arranged and pre-tightened and fixed through the pair of pre-tightening bolts 52;
the pair of sliding blocks 7 are fixedly arranged on the inner side surface of the pre-tightening plate 51, and the linear sliding rail 6 is in sliding fit in a pair of sliding grooves of the pair of sliding blocks 7, so that the linear sliding rail 6 is longitudinally arranged;
the flexible stator mechanism 2 comprises a stator base 21, a first connecting plate 22 and a second connecting plate 23, wherein the stator base 21 is arranged on the inner side of the vertical part of the motor base 1 through a mounting frame 24, the first connecting plate 22 is vertically arranged, one longitudinal end of the first connecting plate 22 is flexibly connected with one longitudinal end of the stator base 21, the second connecting plate 23 is in an inverted L shape, the horizontal part of the second connecting plate 23 is flexibly connected with the vertical part, and the horizontal part of the second connecting plate 23 is fixedly connected with the first connecting plate 22, so that the vertical part of the second connecting plate 23 is longitudinally arranged;
the clamping elastic vibrator 3 and the driving elastic vibrator 4 have the same structure and comprise a substrate 31, a pair of piezoelectric sheets 32 and a pair of mass blocks 33, wherein the substrate 31 is an upright rectangular sheet, the pair of piezoelectric sheets 32 are correspondingly arranged on two side surfaces of the substrate 31, and the pair of mass blocks 33 are correspondingly arranged on two side surfaces of the overhanging end of the substrate 31;
one end of a substrate 31 of the clamping elastic vibrator 3 is inserted into a slot of the first connecting plate 22, so that the clamping elastic vibrator 3 is longitudinally and overhung, one end of a substrate 31 of the driving elastic vibrator 4 is inserted into a slot of a vertical part of the second connecting plate 23, so that the driving elastic vibrator 4 is transversely and overhangs the linear sliding rail 6,
a driving foot 34 is arranged on the substrate 31 of the driving elastic vibrator 4, so that the driving foot 34 is correspondingly attached to the inner side surface of the linear slide rail 6;
when the clamping elastic vibrator 3 swings in a direction close to the linear slide rail 6, the inner side surfaces of the driving foot 34 and the linear slide rail 6 are in tight contact, at the moment, the driving foot 34 moves to drive the linear slide rail 6 to slide in a pair of slide grooves, and the phase difference of the input harmonic excitation signals is adjusted to enable the linear slide rail 6 to slide in the opposite direction in the pair of slide grooves; and the excitation signal is circulated, so that the bidirectional linear motion of the linear slide rail 6 is realized.
Further, the mounting frame 24 includes a pair of mounting plates 242 having a horizontal mounting block 241 and an L-shape, a pair of horizontal portions of the pair of mounting plates 242 are longitudinally disposed inside the vertical portion of the motor base 1, the mounting block 241 is located between the pair of mounting plates 242 and fixedly coupled to the pair of mounting plates 242, and the stator base 21 is fixedly mounted on an upper end of the mounting block 241.
Further, one longitudinal end of the first connecting plate 22 is a single-axis straight round flexible hinge, so as to realize flexible connection between the first connecting plate 22 and one longitudinal end of the stator base 21; the lower end of the vertical part of the second connecting plate 23 is a single-shaft straight round flexible hinge, so that the flexible connection between the horizontal part and the vertical part of the second connecting plate 23 is realized, a pair of U-shaped grooves are arranged on the vertical part of the second connecting plate 23 in parallel, and a pair of bolts horizontally penetrate through the first connecting plate 22 and a pair of U-shaped mounting grooves of the second connecting plate 23 to be fixed, so that the horizontal part of the second connecting plate 23 is fixedly connected with the first connecting plate 22.
Further, each sliding block is in an inverted U shape, the bottom plate of the sliding block is fixedly connected with the inner side of the pre-tightening plate 51, and the linear sliding rail 6 is in sliding fit in a pair of sliding grooves of the U shape of the pair of sliding blocks 7;
each pre-tightening bolt horizontally passes through the pre-tightening plate 51 and a corresponding end of the vertical part of the motor base 1 through the pre-tightening spring 53, and the overhanging end of the pre-tightening bolt is locked and fixed through the butterfly nut 54, so that the inner side surface of the linear slide rail 6 is in close contact with the driving foot 34.
Further, the driving foot 34 is in a rectangular block shape, and an end surface of the driving foot 34, which abuts against the inner side surface of the linear slide rail 6, is an arc surface.
Further, the lower end of the pre-tightening plate 51 is bent inwards to form a lower side plate, two ends of the lower side plate are respectively provided with an inserting strip 511 and an inverted U-shaped inserting plate 512, the inserting strips 511 and the inverted U-shaped inserting plates 512 are transversely arranged, two ends of the horizontal part of the motor base 1 are respectively provided with a slot, the inserting strips 511 are matched and inserted into the slots, and are locked and fixed through the matching of bolts and the U-shaped inserting plates 512, so that the pre-tightening plate 51 is longitudinally arranged and fixed at the extending end of the horizontal part of the motor base 1.
Further, the material of each piezoelectric plate is piezoelectric ceramic PZT-4.
Further, when the operating frequency of the piezoelectric motor is 80 Hz, the maximum speed of the no-load operation is 7.8mm/s, and the maximum output force is 2.4N.
The beneficial technical effects of the invention are as follows:
(1) The inchworm resonant piezoelectric motor based on the cantilever beam structure synthesis motion comprises a driving elastic vibrator and a clamping elastic vibrator, wherein the clamping elastic vibrator and a linear sliding rail are longitudinally arranged in parallel, as the substrate overhanging end of the clamping elastic vibrator is flexibly connected with a stator base through a first connecting plate,
when harmonic excitation signals with the phase difference of 90 degrees are input, the clamping elastic vibrator is close to or far away from the linear slide rail in one vibration period, so that the driving foot is close to or separated from the inner side surface of the linear slide rail, linear movement of the linear slide rail in a pair of slide grooves is realized, and reverse linear movement of the motor can be realized by changing the phase difference of input harmonic signals;
therefore, the piezoelectric motor driving and clamping integrated structure is simple, single harmonic driving is adopted, and the piezoelectric motor driving and clamping integrated structure works in a resonance state, so that the energy conversion efficiency is good. Compared with other motors of the same type, the motor has no sliding friction phenomenon in the running process, so that the abrasion of the motor in the working process is greatly reduced, the motor is stable in running, and the service life of the motor is prolonged.
(2) According to the inchworm resonant piezoelectric motor based on cantilever structure synthetic motion, the driving elastic vibrator and the clamping elastic vibrator are adopted, the driving elastic vibrator directly provides driving force, and the clamping elastic vibrator indirectly provides driving force, so that under the action of double driving forces, not only can the theoretical stroke extend infinitely under the condition that the linear slide rail and the slide block are long enough, but also the inchworm resonant piezoelectric motor has higher tensile strength compared with a traditional piezoelectric stack, can be connected with a larger mass block, has the advantage of low cost compared with the piezoelectric stack, can save 80% of cost theoretically, and can be applied to conventional daily working voltage (220 v).
(3) According to the inchworm resonant piezoelectric motor based on cantilever beam structure synthetic motion, the harmonic signals are adopted, the driving elastic vibrator and the clamping elastic vibrator are driven to realize driving and controlling separation, the control of the piezoelectric motor is better realized, the accuracy of the system is improved, in the motion, the clamping-loosening state of the driving foot is avoided by 90% of harmful friction, and the efficiency of the motor is improved. At an operating frequency of 80 Hz, the maximum idle speed was 7.8mm/s and the maximum output force was 2.4N.
Drawings
FIG. 1 is a schematic diagram of an inchworm resonant piezoelectric motor based on cantilever structure synthesized motion.
Fig. 2 is a schematic installation view of the flexible stator mechanism of the present invention.
Fig. 3 is an exploded view of fig. 2.
Fig. 4 is a schematic view of the flexible connection of the stator base and the first connection plate of the present invention.
Fig. 5 is a schematic structural view of a second connecting plate according to the present invention.
Fig. 6 is a schematic view of the installation of the motor base and the pretensioning plate of the present invention.
Fig. 7 is a graph of the piezoelectric motor excitation electrical signal of the present invention.
Fig. 8 is a schematic diagram of the operation of the piezoelectric motor of the present invention at t0-t1 in fig. 7.
Fig. 9 is a schematic diagram of the operation of the piezoelectric motor of the present invention at t1-t2 in fig. 7.
Fig. 10 is a schematic diagram of the operation of the piezoelectric motor of the present invention at t2-t3 in fig. 7.
Fig. 11 is a schematic diagram of the operation of the piezoelectric motor of the present invention at t3-t4 in fig. 7.
Wherein: the motor base 1, the flexible stator mechanism 2, the stator base 21, the first connection plate 22, the second connection plate 23, the mounting frame 24, the mounting block 241, the pair of mounting plates 242, the clamp elastic vibrator 3, the driving elastic vibrator 4, the substrate 31, the pair of piezoelectric sheets 32, the pair of masses 33, the driving foot 34, the pre-tightening mechanism 5, the pre-tightening plate 51, the cutting 511, the insertion plate 512, the pair of pre-tightening bolts 52, the pre-tightening springs 53, the butterfly nuts 54, the linear slide rails 6, and the pair of sliders 7.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the detailed description is presented by way of example only and is not intended to limit the invention.
Examples
Referring to fig. 1, an inchworm resonant piezoelectric motor based on cantilever beam structure synthetic motion comprises a motor base 1, a flexible stator mechanism 2, a clamping elastic vibrator 3, a driving elastic vibrator 4, a pre-tightening mechanism 5, a linear slide rail 6 and a pair of sliding blocks 7;
the motor base 1 is an L-shaped plate, the pre-tightening mechanism 5 comprises an upright pre-tightening plate 51 and a pair of pre-tightening bolts 52, the pre-tightening plate 51 is longitudinally arranged at the extending end of the horizontal part of the motor base 1, so that the pre-tightening plate 51 and the vertical part of the motor base 1 are oppositely arranged and pre-tightened and fixed through the pair of pre-tightening bolts 52;
the pair of sliding blocks 7 are fixedly arranged on the inner side surface of the pre-tightening plate 51, and the linear sliding rail 6 is in sliding fit in a pair of sliding grooves of the pair of sliding blocks 7, so that the linear sliding rail 6 is longitudinally arranged;
further, each sliding block is in an inverted U shape, the bottom plate of the sliding block is fixedly connected with the inner side of the pre-tightening plate 51, and the linear sliding rail 6 is in sliding fit in a pair of sliding grooves of the U shape of the pair of sliding blocks 7;
each pre-tightening bolt horizontally passes through the pre-tightening plate 51 and a corresponding end of the vertical part of the motor base 1 through the pre-tightening spring 53, and the overhanging end of the pre-tightening bolt is locked and fixed through the butterfly nut 54, so that the inner side surface of the linear slide rail 6 is in close contact with the driving foot 34.
Referring to fig. 2-5, the flexible stator mechanism 2 includes a stator base 21, a first connecting plate 22 and a second connecting plate 23, the stator base 21 is disposed inside a vertical portion of the motor base 1 through a mounting frame 24, the first connecting plate 22 is disposed vertically, one end of the first connecting plate 22 in a longitudinal direction is flexibly connected with one end of the stator base 21 in a longitudinal direction, the second connecting plate 23 is in an inverted L shape, a horizontal portion and a vertical portion of the second connecting plate 23 are flexibly connected, and the horizontal portion of the second connecting plate 23 is fixedly connected with the first connecting plate 22, so that the vertical portion of the second connecting plate 23 is disposed longitudinally;
the clamping elastic vibrator 3 and the driving elastic vibrator 4 have the same structure and comprise a substrate 31, a pair of piezoelectric sheets 32 and a pair of mass blocks 33, wherein the substrate 31 is an upright rectangular sheet, the pair of piezoelectric sheets 32 are correspondingly arranged on two side surfaces of the substrate 31, and the pair of mass blocks 33 are correspondingly arranged on two side surfaces of the overhanging end of the substrate 31;
one end of a substrate 31 of the clamping elastic vibrator 3 is inserted into a slot of the first connecting plate 22, so that the clamping elastic vibrator 3 is longitudinally and overhung, one end of a substrate 31 of the driving elastic vibrator 4 is inserted into a slot of a vertical part of the second connecting plate 23, so that the driving elastic vibrator 4 is transversely and overhangs the linear sliding rail 6,
the substrate 31 of the driving elastic vibrator 4 is provided with a driving foot 34, so that the driving foot 34 is correspondingly attached to the inner side surface of the linear slide rail 6.
Further, the mounting frame 24 includes a pair of mounting plates 242 having a horizontal mounting block 241 and an L-shape, a pair of horizontal portions of the pair of mounting plates 242 are longitudinally disposed inside the vertical portion of the motor base 1, the mounting block 241 is located between the pair of mounting plates 242 and fixedly coupled to the pair of mounting plates 242, and the stator base 21 is fixedly mounted on an upper end of the mounting block 241.
Further, one longitudinal end of the first connecting plate 22 is a single-axis straight round flexible hinge, so as to realize flexible connection between the first connecting plate 22 and one longitudinal end of the stator base 21; the lower end of the vertical part of the second connecting plate 23 is a single-shaft straight round flexible hinge, so that the flexible connection between the horizontal part and the vertical part of the second connecting plate 23 is realized, a pair of U-shaped grooves are arranged on the vertical part of the second connecting plate 23 in parallel, and a pair of bolts horizontally penetrate through the first connecting plate 22 and a pair of U-shaped mounting grooves of the second connecting plate 23 to be fixed, so that the horizontal part of the second connecting plate 23 is fixedly connected with the first connecting plate 22.
Further, the driving foot 34 is in a rectangular block shape, and an end surface of the driving foot 34, which abuts against the inner side surface of the linear slide rail 6, is an arc surface.
Referring to fig. 6, the lower end of the pre-tightening plate 51 is bent inwards to form a lower side plate, two ends of the lower side plate are respectively provided with an inserting strip 511 and an inverted U-shaped inserting plate 512, the inserting strips 511 and the inverted U-shaped inserting plates 512 are transversely arranged, two ends of the horizontal part of the motor base 1 are respectively provided with a slot, the inserting strips 511 are matched and inserted into the slots, and are locked and fixed through the matching of bolts and the U-shaped inserting plates 512, so that the pre-tightening plate 51 is longitudinally arranged and fixed at the extending end of the horizontal part of the motor base 1.
Further, the material of each piezoelectric plate is piezoelectric ceramic PZT-4. The maximum speed of the no-load operation is 7.8mm/s and the maximum output force is 2.4N when the working frequency of the piezoelectric motor is 80 Hz.
When the clamping elastic vibrator 3 swings in a direction close to the linear slide rail 6, the inner side surfaces of the driving foot 34 and the linear slide rail 6 are in tight contact, at the moment, the driving foot 34 moves to drive the linear slide rail 6 to slide in a pair of slide grooves, and the phase difference of the input harmonic excitation signals is adjusted to enable the linear slide rail 6 to slide in the opposite direction in the pair of slide grooves; and the excitation signal is circulated, so that the bidirectional linear motion of the linear slide rail 6 is realized.
The working principle of the invention is described in detail as follows:
referring to fig. 7, harmonic excitation signals are input to the pair of piezoelectric plates 32 of the clamp elastic vibrator 3, and harmonic signals having a phase difference of 90 ° are input to the pair of piezoelectric plates 32 of the drive elastic vibrator 4, so that the clamp elastic vibrator 3 and the drive elastic vibrator 4 reciprocate in one cycle.
At t 0 The moment clamping elastic vibrator 3 is at the initial position, and the driving elastic vibrator 4 is at the counterclockwise maximum position.
See FIG. 8, from t 0 To t 1 In the time period, the voltage of the pair of piezoelectric plates 32 of the clamping elastic vibrator 3 is gradually increased to enable the clamping elastic vibrator 3 to move anticlockwise from the initial position to the maximum bias position, and meanwhile, the voltage of the pair of piezoelectric plates 32 of the driving elastic vibrator 4 is gradually reduced to enable the piezoelectric plates to be the leftmostThe large bias position moves clockwise to the initial position, in the process, the driving foot 34 swings around the axis under the action of the driving elastic vibrator 4, but the clamping elastic vibrator 3 is far away from the linear slide rail 6, and the linear slide rail 6 is static;
see FIG. 9, at t 1 To t 2 In the time period, the voltage of the pair of piezoelectric plates 32 of the clamping elastic vibrator 3 is gradually reduced, so that the clamping elastic vibrator 3 moves to an initial position from the maximum offset position at the lower side, the voltage of the pair of piezoelectric plates 32 on the driving elastic vibrator 4 gradually increases to the maximum reverse direction, the pair of piezoelectric plates moves to the maximum offset position at the right side from the initial position, in the process, the driving foot 34 is separated from the linear slide rail 6, and the linear slide rail 6 is stationary;
see FIG. 10, at t 2 To t 3 In a time period, the voltage of the pair of piezoelectric plates 32 on the clamping elastic vibrator 3 is reversely increased to the maximum, so that the clamping elastic vibrator 3 moves from the initial position to the upper maximum offset position, the driving foot 34 clamps the linear slide block in the process, the driving elastic vibrator 4 drives the driving foot 34 to move from the right maximum offset position to the initial position, and in the process, the linear slide rail 6 moves along the direction X of the linear slide rail 4 1 A distance;
see FIG. 11, at t 3 To t 4 In a time period, the voltage of the pair of piezoelectric sheets 32 on the clamping elastic vibrator 3 gradually decreases to zero, so that the clamping elastic vibrator 3 swings back to the initial position from the upper side maximum offset position, and in the process, the driving foot and the linear slide rail 6 keep a clamping state, so that the driving foot moves from the initial position to the left side maximum offset position under the driving of the driving elastic vibrator 4, and in the process, the linear slide rail 6 moves along the direction X of the linear slide rail 4 2 A distance;
piezoelectric motor generates X in whole period 1 + X 2 Macroscopic displacement of (c). Thus, the use of a continuous harmonic excitation signal will cause the piezoelectric motor to move continuously, while the reverse motion of the linear slide 6 can be achieved by varying the phase difference of the signals.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (8)

1. An inchworm resonant piezoelectric motor based on cantilever structure synthetic motion, which is characterized in that: the motor comprises a motor base (1), a flexible stator mechanism (2), a clamping elastic vibrator (3), a driving elastic vibrator (4), a pre-tightening mechanism (5), a linear sliding rail (6) and a pair of sliding blocks (7);
the motor base (1) is an L-shaped plate, the pre-tightening mechanism (5) comprises an upright pre-tightening plate (51) and a pair of pre-tightening bolts (52), the pre-tightening plate (51) is longitudinally arranged at the extending end of the horizontal part of the motor base (1), so that the pre-tightening plate (51) and the vertical part of the motor base (1) are oppositely arranged and pre-tightened and fixed through the pair of pre-tightening bolts (52);
the pair of sliding blocks (7) are fixedly arranged on the inner side surface of the pre-tightening plate (51), and the linear sliding rail (6) is in sliding fit in a pair of sliding grooves of the pair of sliding blocks (7) so that the linear sliding rail (6) is longitudinally arranged;
the flexible stator mechanism (2) comprises a stator base (21), a first connecting plate (22) and a second connecting plate (23), wherein the stator base (21) is arranged on the inner side of the vertical part of the motor base (1) through a mounting frame (24), the first connecting plate (22) is vertically arranged, one longitudinal end of the first connecting plate (22) is flexibly connected with one longitudinal end of the stator base (21), the second connecting plate (23) is in an inverted L shape, the horizontal part and the vertical part of the second connecting plate (23) are flexibly connected, and the horizontal part and the first connecting plate (22) of the second connecting plate (23) are fixedly connected, so that the vertical part of the second connecting plate (23) is longitudinally arranged;
the clamping elastic vibrator (3) and the driving elastic vibrator (4) have the same structure and comprise a substrate (31), a pair of piezoelectric sheets (32) and a pair of mass blocks (33), wherein the substrate (31) is an upright rectangular sheet, the pair of piezoelectric sheets (32) are correspondingly arranged on two side surfaces of the substrate (31), and the pair of mass blocks (33) are correspondingly arranged on two side surfaces of the overhanging end of the substrate (31);
one end of a substrate (31) of the clamping elastic vibrator (3) is inserted into a slot of the first connecting plate (22) so that the clamping elastic vibrator (3) is longitudinally and overhung, one end of the substrate (31) of the driving elastic vibrator (4) is inserted into a vertical slot of the second connecting plate (23) so that the driving elastic vibrator (4) transversely overhangs the linear sliding rail (6),
a substrate (31) of the driving elastic vibrator (4) is provided with a driving foot (34), so that the driving foot (34) is correspondingly attached to the inner side of the linear sliding rail (6);
when the device works, harmonic excitation signals with the phase difference of 90 degrees are respectively input to a pair of piezoelectric sheets (32) of the clamping elastic vibrator (3) and a pair of piezoelectric sheets (32) of the driving elastic vibrator (4), so that the clamping elastic vibrator (3) and the driving elastic vibrator (4) swing reciprocally in one period, when the clamping elastic vibrator (3) swings towards a direction close to the linear sliding rail (6), the inner side surfaces of the driving foot (34) and the linear sliding rail (6) are in abutting contact, at the moment, the driving foot (34) moves to drive the linear sliding rail (6) to slide in the pair of sliding grooves, and the phase difference of the input harmonic excitation signals is adjusted, so that the linear sliding rail (6) slides in the opposite direction in the pair of sliding grooves; and the excitation signal is circulated, so that the bidirectional linear motion of the linear slide rail (6) is realized.
2. The inchworm resonant piezoelectric motor based on the synthesized motion of the cantilever beam structure according to claim 1, wherein: the mounting frame (24) comprises a horizontal mounting block (241) and a pair of L-shaped mounting plates (242), a pair of horizontal parts of the pair of mounting plates (242) are longitudinally arranged on the inner side of the vertical part of the motor base (1), the mounting block (241) is positioned between the pair of mounting plates (242) and fixedly connected with the pair of mounting plates (242), and the stator base (21) is fixedly arranged at the upper end of the mounting block (241).
3. The inchworm resonant piezoelectric motor based on the synthesized motion of the cantilever beam structure according to claim 1, wherein: one longitudinal end of the first connecting plate (22) is a single-shaft straight round flexible hinge, so that the first connecting plate (22) is flexibly connected with one longitudinal end of the stator base (21); the lower end of the vertical part of the second connecting plate (23) is a single-shaft straight round flexible hinge, so that the flexible connection between the horizontal part and the vertical part of the second connecting plate (23) is realized, and a pair of U-shaped grooves are arranged on the vertical part of the second connecting plate (23) in parallel.
4. The inchworm resonant piezoelectric motor based on the synthesized motion of the cantilever beam structure according to claim 1, wherein: each sliding block is in an inverted U shape, the bottom plate of each sliding block is fixedly connected with the inner side of the pre-tightening plate (51), and the linear sliding rail (6) is in sliding fit in a pair of sliding grooves of the U shape of the pair of sliding blocks (7);
each pre-tightening bolt horizontally penetrates through the corresponding ends of the pre-tightening plate (51) and the vertical part of the motor base (1) through a pre-tightening spring (53), and the overhanging ends of the pre-tightening bolts are locked and fixed through butterfly nuts (54), so that the inner side faces of the linear sliding rails (6) are in close contact with the driving feet (34).
5. The inchworm resonant piezoelectric motor based on the synthesized motion of the cantilever structure according to claim 4, wherein: the driving foot (34) is in a vertical rectangular block shape, and the end surface of the driving foot (34) close to the inner side surface of the linear sliding rail (6) is an arc surface.
6. The inchworm resonant piezoelectric motor based on the synthesized motion of the cantilever beam structure according to claim 1, wherein: the lower extreme of pretension board (51) inwards buckles and forms the downside, and the both ends of downside are equipped with cutting (511) and reverse U-shaped picture peg (512) respectively, and cutting (511) and reverse U-shaped picture peg (512) all transversely arrange, the horizontal part both ends of motor base (1) are equipped with the slot respectively, cutting (511) cooperation is inserted in the slot, and is fixed through the cooperation locking of bolt and U-shaped picture peg (512) for pretension board (51) longitudinal arrangement and fixed are stretched out the end at the horizontal part of motor base (1).
7. The inchworm resonant piezoelectric motor based on the synthesized motion of the cantilever beam structure according to claim 1, wherein: the material of each piezoelectric plate is piezoelectric ceramic PZT-4.
8. The inchworm resonant piezoelectric motor based on the synthesized motion of the cantilever beam structure according to claim 1, wherein: the maximum speed of the no-load operation is 7.8mm/s and the maximum output force is 2.4N when the working frequency of the piezoelectric motor is 80 Hz.
CN202310523369.XA 2023-05-10 2023-05-10 Inchworm resonant piezoelectric motor based on cantilever beam structure synthesized motion Pending CN116436335A (en)

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