CN116436297A - Double-current-loop controlled switch linear hybrid power conversion system - Google Patents
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- 239000004973 liquid crystal related substance Substances 0.000 description 2
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of dc power input into dc power output
- H02M3/02—Conversion of dc power input into dc power output without intermediate conversion into ac
- H02M3/04—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters
- H02M3/10—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M3/145—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M3/155—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/156—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators
- H02M3/158—Conversion of dc power input into dc power output without intermediate conversion into ac by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only with automatic control of output voltage or current, e.g. switching regulators including plural semiconductor devices as final control devices for a single load
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J7/00—Circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
- H02M1/088—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters for the simultaneous control of series or parallel connected semiconductor devices
- H02M1/092—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters for the simultaneous control of series or parallel connected semiconductor devices the control signals being transmitted optically
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
- H02J2207/00—Indexing scheme relating to details of circuit arrangements for charging or depolarising batteries or for supplying loads from batteries
- H02J2207/20—Charging or discharging characterised by the power electronics converter
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
- Y02B70/10—Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes
Abstract
The invention discloses a switching linear hybrid power conversion system controlled by double current loops, which belongs to the technical field of motor drive control and comprises: the device comprises a detection module, a current control module, a switching power conversion module, a power filtering module and a linear power conversion module which are connected in series; the current control module generates PWM signals based on the difference value between the load current and the reference current and outputs the PWM signals to the switch power conversion module, obtains reference voltage based on the difference value between the load current and the reference current, calculates the difference value between the reference voltage and the output voltage of the power filtering module, obtains control voltage and outputs the control voltage to the linear power conversion module; the invention adopts a double-current-loop control mode to control the switching power conversion module and the linear power conversion module simultaneously based on current, thereby realizing the control of output current, realizing the compensation of output voltage by a current control mode, having faster response speed, better dynamic performance, smaller current ripple and higher signal-to-noise ratio.
Description
Technical Field
The invention belongs to the technical field of motor drive control, and particularly relates to a switching linear hybrid power conversion system controlled by double current loops.
Background
With the rapid development of the integrated circuit industry, the chip manufacturing process is approaching the moore's law limit, and the lithography machine is used as a core device for generating large-scale integrated circuits, and is developed towards high speed, high precision and large stroke. The power conversion system is an important component of the motion control of the photoetching machine, and the performance of the power conversion system directly influences the precision of the motion control, wherein the switch linear hybrid power conversion system is interesting in industry due to the advantages of large voltage output range and high working efficiency.
The switch linear mixed power conversion system mainly has three forms, namely, the switch linear mixed power conversion system with a parallel structure is mainly applied to low-power occasions such as radio frequency amplification and the like; secondly, the dynamic power supply structure switch linear hybrid power conversion system has low power consumption but a control strategy is complex; the series structure switch linear hybrid power conversion system is formed by connecting a switch type power amplifier and a linear power amplifier in series, and is suitable for high-power occasions, in particular to the technical field of photoetching machines.
The traditional series structure switch linear hybrid power conversion system generally adopts the design of a current outer ring and a voltage inner ring, the current ring is adopted to control the duty ratio of the switch power converter to regulate the current, the output voltage of the switch power amplifier is compared with the reference voltage to obtain an error voltage, and the error voltage signal is amplified by the linear power amplifier and then compensated to the switch part to obtain a final output voltage; the topological linear part adopts voltage control, mainly compensates voltage, does not directly participate in current closed-loop control, has dynamic corresponding performance and bandwidth limited by the size of switching frequency, has slower response when input suddenly changes, cannot fully utilize the characteristics of high precision and high bandwidth of the linear part, and has poor dynamic performance.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides a double-current-loop controlled switching linear hybrid power conversion system, which is used for solving the technical problem of poor dynamic performance of the traditional switching linear hybrid power conversion system.
In order to achieve the above object, the present invention provides a switching linear hybrid power conversion system controlled by a dual current loop, comprising: the device comprises a detection module, a current control module, and a switching power conversion module, a power filtering module and a linear power conversion module which are connected in series;
the power filtering module is used for filtering high-frequency components in the output voltage of the switching power conversion module;
the detection module is used for detecting the load current and the output voltage of the power filtering module and feeding the load current and the output voltage back to the current control module;
the current control module is used for generating PWM signals based on the difference value between the load current and the reference current and outputting the PWM signals to the switching power conversion module; the power filter module is also used for obtaining a reference voltage based on the difference value between the load current and the reference current, calculating the difference value between the reference voltage and the output voltage of the power filter module, obtaining a control voltage and outputting the control voltage to the linear power conversion module;
the linear power conversion module amplifies the control voltage to compensate for an error voltage of the switching power conversion module.
Further preferably, the current control module includes a first current controller and a second current controller; the first current controller is used for outputting a PWM signal to the switching power conversion module, and adjusting the duty ratio of the PWM signal based on the difference value of the load current and the reference current so as to control the output voltage of the switching power conversion module;
the second current controller is used for obtaining a reference voltage in a PI control mode based on the difference value between the load current and the reference current, calculating the difference value between the reference voltage and the output voltage of the power filtering module, obtaining a control voltage, and outputting the control voltage to the linear power conversion module.
Further preferably, the detection module includes: a current sampling module and a voltage sampling module;
the current sampling module is used for sampling the current of the serial circuit where the switching power conversion module, the power filtering module and the linear power conversion module are positioned to obtain load current, and feeding the load current back to the first current controller;
the voltage sampling module is connected with the output end of the power filtering module and is used for sampling the voltage output by the power filtering module and feeding the voltage back to the second current controller.
Further preferably, the switching power conversion module includes: the bridge type inverter circuit comprises a first direct current source, a bridge type inverter circuit and an optical coupling isolation driving circuit; the first direct current source is used for providing power supply voltage for the bridge inverter circuit; the bridge type inverter circuit is of an H-bridge structure and comprises four MOSFET (metal oxide semiconductor field effect transistor) tubes;
the optical coupling isolation driving circuit is used for carrying out optical coupling isolation amplification on four paths of PWM signals generated by the current control module to obtain four paths of grid driving signals, and the four paths of grid driving signals are output to grids of the four MOSFET tubes in a one-to-one correspondence mode.
Further preferably, the linear power conversion module includes: a second direct current source, an isolation amplifier and a high voltage linear power amplifier;
the second direct current source supplies power for the high-voltage linear power amplifier;
the isolation amplifier is used for driving the high-voltage linear power amplifier to work after the reference voltage is isolated and amplified.
Further preferably, the high voltage linear power amplifier is a class ab power amplifier for further amplifying the reference voltage after isolation amplification.
Further preferably, the high voltage linear power amplifier is an integrated linear power amplifier.
Further preferably, the power filtering module includes: a filter inductance and a filter capacitance; the input of the power filtering module is connected with the output of the switching power conversion module and is used for filtering out signals lower than the cut-off frequency in the output of the switching power conversion module.
In general, through the above technical solutions conceived by the present invention, the following beneficial effects can be obtained:
1. the invention provides a switching linear hybrid power conversion system controlled by double current loops, which adopts a double current loop closed loop control mode to control a switching power conversion module and a linear power conversion module simultaneously based on current, thereby realizing the control of output current, realizing the compensation of output voltage in a current control mode, having faster response speed and better dynamic performance.
2. The switch linear hybrid power conversion system provided by the invention adopts the linear power conversion module to compensate the switch power conversion module, and has the advantages of smaller current ripple and higher signal-to-noise ratio.
3. The switching linear hybrid power conversion system provided by the invention has the advantages that the switching power conversion module provides main output capability, the linear power conversion module only needs to provide small part of output, and the overall efficiency of the system is higher.
4. The switch linear hybrid power conversion system provided by the invention is especially suitable for high-acceleration and high-precision motor drive control of a workbench of a photoetching machine.
Drawings
Fig. 1 is a schematic diagram of a dual current loop controlled switching linear hybrid power conversion system according to the present invention.
Fig. 2 is a schematic structural diagram of a current control module according to an alternative embodiment of the present invention.
Fig. 3 is a circuit diagram of a switching power conversion module according to an alternative embodiment of the present invention.
Fig. 4 is a circuit diagram of a linear power conversion module according to an alternative embodiment of the present invention.
Fig. 5 is an overall circuit diagram of a dual current loop controlled switching linear hybrid power conversion system provided in an alternative embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
The invention is described in further detail below with reference to the accompanying drawings.
As shown in FIG. 1, the switching linear hybrid power conversion system controlled by the double current loops disclosed by the invention comprises a switching power conversion module, a power filtering module, a linear power conversion module, a detection module and a current control module. The switching power conversion module, the power filtering module and the linear power conversion module are connected in series;
the switching power conversion module is used for outputting voltage; the output of the switching power conversion module is provided with high-frequency components, so that the high-frequency alternating voltage generated by the inverter circuit of the switching power conversion module is output to the power filtering module (low-pass filter), and the power filtering module filters the high-frequency components and then outputs low-frequency alternating voltage with ripples;
the detection module is used for detecting the current, namely the load current, of the serial circuit where the switch power conversion module, the power filtering module and the linear power conversion module are located, and the output voltage of the power filtering module is fed back to the current control module;
the current control module is used for generating PWM signals according to the difference between the load current fed back by the detection module and the current instruction (reference current) and outputting the PWM signals to the switching power conversion module so as to drive the switching power conversion module to work and control an inverter circuit of the switching power conversion module to generate high-frequency alternating voltage; meanwhile, a reference voltage is obtained based on the difference value between the current command and the load current, the difference value between the reference voltage and the output voltage of the power filtering module is calculated, a control voltage is obtained, and the control voltage is output to the linear power conversion module.
The linear power conversion module amplifies the control voltage to compensate for an error voltage of the switching power conversion module.
Further, the current control module comprises a current control module 1 and a current control module 2;
the current control module 1 is used for outputting PWM signals to the switching power conversion module and is based on a load current I fb With current command I ref The duty ratio of the PWM signal is adjusted by the difference value of the PWM signal, so that the output voltage of the switching power conversion module is controlled, and the output current is adjusted;
the current control module 2 is for controlling the current based on the load current I fb With current command I ref Obtain reference voltage and calculate reference voltage and output voltage U of power filter module fb The difference between the two voltages is used for obtaining a control voltage (namely, the error difference between the reference voltage and the actual voltage), outputting the control voltage to the linear power conversion module, and compensating the control voltage to the main loop after linear amplification of the linear power conversion module. Specifically, the PI parameter is set based on the characteristics of the circuit by adopting a PI control mode, and the controller is based on the load current I fb With current command I ref And (3) calculating the difference value of the reference voltage to obtain a reference voltage, calculating the difference value between the reference voltage and the output voltage of the power filtering module to obtain a control voltage, and outputting the control voltage to the linear power conversion module.
Specifically, as shown in fig. 2, in an alternative embodiment, the current controller 1 receives a command current I ref According to I ref Output four-way PWM signal S 1 、S 2 、S 3 、S 4 Driving the switching power conversion module to work to generate current, and sampling the load current by the detection module to obtain I fb The current controller 1 is according to I ref And I fb The difference adjusts the duty ratio of the PWM signal to realize closed-loop control of the current. The current controller 2 is according to I ref 、I fb Feedback voltage U fb Calculating to obtain an error value U of the actual voltage and the reference voltage e And will error value U e Output to the linear power conversion module to realize the compensation of voltage by using a current control mode.
In an alternative embodiment, the detection module includes: a current sampling module and a voltage sampling module;
the current sampling module is used for converting the switching power into the powerSampling the current of the serial circuit where the rate filtering module and the linear power conversion module are positioned to obtain a load current I fb And fed back to the current controller 1;
the voltage sampling module is connected with the output end of the power filtering module and is used for outputting voltage U to the power filtering module fb Sampling and feeding back to the current controller 2;
specifically, the current sampling module may be a precision resistor, a current transformer, a hall element, etc., and the precision resistor is preferably adopted in consideration of factors such as detection bandwidth, efficiency, precision, etc. The voltage sampling module can be one or more of a resistor voltage division, a voltage transformer and an isolation operational amplifier, and the like, and adopts a mode of combining the resistor voltage division and the isolation operational amplifier to prevent mutual interference between a digital signal and an analog signal and also can isolate strong electricity.
Further, the switching power conversion module may be divided from a switching frequency, and may be divided into a power frequency inverter, an intermediate frequency inverter, and a high frequency inverter. As shown in fig. 3, in an alternative embodiment, the switching power conversion module includes: the optical coupler is used for isolating the driving circuit, the direct current source 1 and the bridge type inverter circuit. The dc source 1 provides dc power for the bridge inverter. The bridge inverter adopts an H bridge structure, and Q of the H bridge 1 、Q 2 、Q 3 、Q 4 MOSFET tubes are used. The current control module sends 4 paths of PWM signals S 1 、S 2 、S 3 、S 4 To the optocoupler driving circuit, 4 paths of gate driving signals T are output after the optocoupler isolation amplification 1 、T 2 、T 3 、T 4 The H bridge inverts the direct current into high-frequency alternating current under the action of a driving signal. The real mode adopts the high-frequency conversion technology and has the advantages of small volume, light weight, low noise, high efficiency and the like.
Further, the linear power conversion module may be a class a power amplifier, a class b power amplifier, a class ab power amplifier, and the like. As shown in fig. 4, in an alternative embodiment, the linear power conversion module includes: a direct current source 2, an isolation amplifier and a high voltage linear power amplifier. The direct current source 2 is high-voltage linearThe power conversion module provides a supply voltage. Error voltage signal U output by current controller 2 e Amplified by the isolation amplifier and output to the high-voltage linear power amplifier. The high-voltage linear power amplifier adopts an integrated linear power amplifier, belongs to class A and class B power amplifiers, and is used for further amplifying the isolated and amplified reference voltage with high precision. Class a power amplifiers have high output currents, low distortion but low efficiency; class B power amplifiers are better than class A power amplifiers, but have the problems of cross-over distortion and the like; class A and class B power amplifiers have the advantages of class A and class B power amplifiers, and have smaller output distortion and higher efficiency. Therefore, the class ab power amplifier is preferably used in this embodiment.
Further, the power filtering module includes: a filter inductance L and a filter capacitance C; the input of the power filtering module is connected with the output of the switching power conversion module and is used for filtering out signals lower than the cut-off frequency in the output of the switching power conversion module.
The cutoff frequency is determined based on the values of the filter inductance and the filter capacitance. The specific formula is as follows:
wherein, the liquid crystal display device comprises a liquid crystal display device,
is the cut-off frequency.
Further, fig. 5 is a schematic diagram of an alternative embodiment of the present invention for a dual current loop controlled switching linear hybrid power conversion system.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (8)
1. A dual current loop controlled switching linear hybrid power conversion system comprising: the device comprises a detection module, a current control module, and a switching power conversion module, a power filtering module and a linear power conversion module which are connected in series;
the power filtering module is used for filtering high-frequency components in the output voltage of the switching power conversion module;
the detection module is used for detecting the load current and the output voltage of the power filtering module and feeding the load current and the output voltage back to the current control module;
the current control module is used for generating PWM signals based on the difference value of the load current and the reference current and outputting the PWM signals to the switching power conversion module; the power filter module is also used for obtaining a reference voltage based on the difference value between the load current and the reference current, calculating the difference value between the reference voltage and the output voltage of the power filter module, obtaining a control voltage and outputting the control voltage to the linear power conversion module;
the linear power conversion module amplifies the control voltage to compensate for an error voltage of the switching power conversion module.
2. The switching linear hybrid power conversion system of claim 1, wherein the current control module comprises a first current controller and a second current controller;
the first current controller is used for outputting a PWM signal to the switching power conversion module, and adjusting the duty ratio of the PWM signal based on the difference value of the load current and the reference current so as to control the output voltage of the switching power conversion module;
the second current controller is configured to obtain a reference voltage by PI control based on a difference between the load current and the reference current, calculate a difference between the reference voltage and an output voltage of the power filtering module, obtain a control voltage, and output the control voltage to the linear power conversion module.
3. The switching linear hybrid power conversion system of claim 2, wherein,
the detection module comprises: a current sampling module and a voltage sampling module;
the current sampling module is used for sampling the current of the serial circuit where the switching power conversion module, the power filtering module and the linear power conversion module are located, obtaining the load current, and feeding back the load current to the first current controller;
the voltage sampling module is connected with the output end of the power filtering module, and is used for sampling the voltage output by the power filtering module and feeding the voltage back to the second current controller.
4. A switched linear hybrid power conversion system according to any of claims 1-3, characterized in that the switched power conversion module comprises: the bridge type inverter circuit comprises a first direct current source, a bridge type inverter circuit and an optical coupling isolation driving circuit; the first direct current source is used for providing a power supply voltage for the bridge inverter circuit; the bridge type inverter circuit is of an H-bridge structure and comprises four MOSFET (metal oxide semiconductor field effect transistor) tubes;
the optical coupling isolation driving circuit is used for carrying out optical coupling isolation amplification on four paths of PWM signals generated by the current control module to obtain four paths of grid driving signals, and the four paths of grid driving signals are output to the grids of the four MOSFET tubes in a one-to-one correspondence mode.
5. A switched linear hybrid power conversion system according to any of claims 1-3, characterized in that the linear power conversion module comprises: a second direct current source, an isolation amplifier and a high voltage linear power amplifier;
the second direct current source is used for supplying power to the high-voltage linear power amplifier;
and the isolation amplifier is used for driving the high-voltage linear power amplifier to work after the reference voltage is isolated and amplified.
6. The switching linear hybrid power conversion system of claim 5, wherein the high voltage linear power amplifier is a class ab power amplifier for further amplifying the isolated amplified reference voltage.
7. The switching linear hybrid power conversion system of claim 6, wherein,
the high voltage linear power amplifier is an integrated linear power amplifier.
8. A switched linear hybrid power conversion system according to any of claims 1-3, characterized in that the power filtering module is arranged to filter out signals below a cut-off frequency in the output of the switched power conversion module.
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| CN116436297B (en) | 2023-11-10 |
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