CN116435208A - Method for representing laser edge cleaning effect of thin film solar cell - Google Patents
Method for representing laser edge cleaning effect of thin film solar cell Download PDFInfo
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- CN116435208A CN116435208A CN202310428662.8A CN202310428662A CN116435208A CN 116435208 A CN116435208 A CN 116435208A CN 202310428662 A CN202310428662 A CN 202310428662A CN 116435208 A CN116435208 A CN 116435208A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 68
- 238000000034 method Methods 0.000 title claims abstract description 68
- 230000000694 effects Effects 0.000 title claims abstract description 36
- 239000010409 thin film Substances 0.000 title claims abstract description 30
- 238000002834 transmittance Methods 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000011521 glass Substances 0.000 claims abstract description 31
- 230000003287 optical effect Effects 0.000 claims abstract description 15
- 230000001678 irradiating effect Effects 0.000 claims abstract description 5
- 238000001514 detection method Methods 0.000 claims description 31
- 238000009966 trimming Methods 0.000 claims description 13
- 230000035945 sensitivity Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 4
- 238000003908 quality control method Methods 0.000 abstract description 3
- 238000012512 characterization method Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 12
- 238000009413 insulation Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000012858 packaging process Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 238000005488 sandblasting Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000013064 process characterization Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a method for representing a laser edge cleaning effect of a thin film solar cell, which comprises the following steps: a light source module is arranged on one side of the glass substrate, and the edge cleaning area is irradiated; a light intensity receiving sensor is arranged on the other side of the glass substrate; detecting the transmittance of light irradiating the edge cleaning area; the light source module comprises a light source, an optical positioning camera module, a light intensity measuring sensor, a reflecting mirror, a gathering mirror and a servo motor module. The method is a scientific and effective quality control characterization mode by measuring the light transmittance, further scientifically and effectively characterizing the edge cleaning effect, avoiding unqualified products from flowing into the following working procedures, characterizing the edge cleaning effect by two indexes of average transmittance and single-point transmittance, ensuring the measurement precision and accuracy by synchronously setting the light source and the light intensity receiving sensor.
Description
Technical Field
The invention belongs to the technical field of thin-film solar cells, and particularly relates to a method for representing a laser edge cleaning effect of a thin-film solar cell.
Background
The thin film solar cell has the advantages of strong light absorption capability, low manufacturing cost, flexibility, stable power generation, environmental friendliness and the like, is one of the materials which are most likely to replace a silicon cell in the future, and has the highest conversion efficiency of more than 22% in the laboratory at present. In general, a thin film solar cell uses glass as a substrate, and three layers of films are plated on the glass substrate: the manufacturing process of the front electrode, the semiconductor layer and the back electrode of the traditional thin film solar cell comprises the steps of depositing a front electrode layer (materials comprise FTO, ITO, AZO, BZO and Mo) on a glass substrate, etching the front electrode by using laser to form a plurality of sub-cells, removing the deposited semiconductor layer, namely amorphous silicon, cadmium telluride, copper indium gallium selenide and the like, then etching by using laser, depositing the back electrode after completion, and then etching by using laser, namely three laser processes of P1, P2 and P3, so that the series-parallel connection of the sub-cells of the cell is completed, the whole coating film covers the whole cell substrate, all film layers in the peripheral area are required to be removed, and then the electrodes are led out, packaged, tested and the like. The process of cleaning all the film layers is an essential process in the production process of the solar cell, and is called edge cleaning in the industry, the edge cleaning process is also an important process before the airtight packaging of the film solar cell substrate, and the main purposes of edge cleaning are two, namely, the aim of preventing the film solar cell from being in contact with a metal frame to generate short circuit during the installation process, or moisture entering to reduce the conductivity of the film solar cell, and the aim of preventing the edge film layer from being separated to cause the failure of the airtight packaging. Therefore, in the production process of the solar cell, edge cleaning is performed along the edge of the glass substrate of the solar cell, namely, the P4 process, and the performance of the packaged solar cell is directly affected by the good effect of the edge cleaning.
At present, in the edge cleaning process of the thin film solar cell, the problems that the edge film layer is cleaned by a sand blasting method and the edge cleaning by the sand blasting method is large in pollution, poor in processing consistency and the like are solved, so that the problems are gradually eliminated by the market, the edge film layer is cleaned by the conventional laser method, namely laser edge cleaning is carried out by the laser method, the laser edge cleaning comprises the steps of carrying out edge cleaning once by near infrared laser and using a 1064nm pulse fiber laser, the edge cleaning process is carried out by adopting a vibrating mirror mode, a square laser spot is output, the edge cleaning process is carried out by setting certain light spots and pattern overlapping rate parameters in a mode that the vibrating mirror controls the laser spot to carry out the edge cleaning process in a corresponding edge cleaning area in a mode similar to scribing filling mode, no matter which laser edge cleaning process is adopted, no scientific and reasonable process is adopted for representing the edge cleaning effect after the thin film solar cell is subjected to laser edge cleaning, no quality monitoring of most of production line processes is carried out, and no off-line insulation resistance detection is adopted, and no method is adopted for completing all detection in the method, so that an online process characterization method capable of realizing all detection is needed to be found to represent the good and bad edge cleaning process, and the quality of the product can be guaranteed, and the quality of the product can not be wasted after the packaging process is required to be guaranteed, and the quality is not wasted.
Disclosure of Invention
The invention aims to provide a method for representing the laser edge cleaning effect of a thin film solar cell by utilizing the detection of the transmittance of light in an edge cleaning area to represent the good and bad edge cleaning effect, so as to solve the problems that a product is easy to discard in advance, a later packaging process is influenced, waste is caused, the quality of the edge cleaning process cannot be reasonably represented and the like.
The invention provides a method for representing a laser edge cleaning effect of a thin film solar cell, which comprises the following steps: a light source module is arranged on one side of the glass substrate, and the edge cleaning area is irradiated; a light intensity receiving sensor is arranged on the other side of the glass substrate; detecting the transmittance of light irradiating the edge cleaning area; the light source module comprises a light source, an optical positioning camera module, a light intensity measuring sensor, a reflecting mirror, a gathering mirror and a servo motor module.
The sensitivity of the light intensity measuring sensor is the same as that of the light intensity receiving sensor.
The light intensity measuring sensor measures the light intensity of the light emitted by the light source, and the light intensity measuring sensor is compared with the light intensity receiving sensor, and the transmittance is calculated through the light intensity difference.
The light source is light in any wave band of a visible light section, light rays emitted by the light source are square light with the width of the edge cleaning area and are obtained through the reflector, the collecting mirror or the photomask, and the size of the square light is obtained by controlling the position of the focusing mirror in the up-down direction through the servo motor module.
The optical positioning camera module enables the light spot position of the light source to just cover the width position of the edge cleaning area through optical positioning, and the light spot always covers the edge cleaning area in the detection process.
The optical positioning adopts a two-point positioning mode, the position accuracy of the whole glass substrate area is positioned, and the position and the angle of the edge cleaning area are calculated.
The edge cleaning area comprises four edges of the glass substrate, and all detection of the four edges is sequentially completed by moving the glass substrate or the light source module.
The light intensity receiving sensor is integrated with the light source, and the relative position of the light intensity receiving sensor and the light source is kept unchanged all the time in the detection process, so that the optimal detection is obtained.
The transmittance comprises average transmittance and single-point transmittance, and the laser edge cleaning effect of the thin film solar cell is represented by two transmittance indexes.
All operations in the detection process are performed in a darkroom environment.
According to the method for representing the laser edge cleaning effect of the thin film solar cell, disclosed by the invention, the quality of the edge cleaning effect is represented by detecting the transmittance of light in the edge cleaning area, the method is reasonable and scientific, online detection can be realized, the detection speed is high, and the bottleneck of productivity can be broken through. The edge cleaning process is to remove all edge film layers, only a glass substrate is left, the quality of the edge cleaning effect can be scientifically represented due to the fact that the measured transmittance is linear with the insulation resistance, the higher the transmittance is, the larger the insulation resistance is, the transmittance is represented by the light intensity difference, the edge cleaning effect is scientifically and effectively represented, unqualified products are prevented from flowing into the following working procedure, the edge cleaning effect is represented by two indexes of average transmittance and single-point transmittance, and the edge cleaning process is a scientific and effective quality control representation mode; the light source and the light intensity receiving sensor are kept synchronous, and the precision and the accuracy of the test can be ensured.
Drawings
Fig. 1 is a schematic diagram of the overall flow structure of a method for characterizing the laser trimming effect of a thin film solar cell.
Fig. 2 is a schematic block diagram of square light emitted by a light source in a method for characterizing a laser trimming effect of a thin film solar cell according to the present invention.
Detailed Description
Referring to fig. 1 and fig. 2, the two diagrams provide an overall flow block diagram of a method for characterizing a laser trimming effect of a thin film solar cell. The method comprises the following steps: the light source module is arranged on one side of the glass substrate and used for irradiating the edge cleaning area, the light intensity receiving sensor is arranged on the other side of the glass substrate and used for detecting the transmittance of light irradiating the edge cleaning area, and the light source module comprises a light source, an optical positioning camera module, a light intensity measuring sensor, a reflecting mirror, a gathering mirror and a servo motor module. Further, the light source is internally integrated with a light intensity measuring sensor, the sensitivity of the light intensity measuring sensor is the same as that of a light intensity receiving sensor, the light intensity measuring sensor measures the light intensity of light emitted by the light source, the light intensity measuring sensor is compared with the light intensity receiving sensor to obtain a light intensity difference, the transmittance is calculated, and the calculation formula of the transmittance is as follows: the light intensity/incident light intensity is received, so that the transmittance is measured, the higher the transmittance is, the larger the insulation resistance is, the two are in linear relation, and the insulation resistance can be represented through the transmittance. The light source and the light intensity receiving sensor are integrated on the same module, so that the relative positions of the light source and the light intensity receiving sensor are unchanged in the moving process, the middle area of the light source and the light intensity receiving sensor is hollow, the movement of the glass substrate or the light source module is not influenced, the smooth measurement can be ensured, the light source is always kept at the upper position during the measurement, and the light intensity receiving sensor is arranged at the lower position.
Further, as the light absorption of different film layers to different wavelengths is different, the light source is continuous light or quasi-continuous light of a plurality of wave bands of a visible light section, a xenon lamp mode can be adopted, the light emitted by the light source is square light with the width of a clear edge area and is obtained through a reflector, a focusing mirror or a photomask, and the focusing mirror controls the position of the upper direction and the lower direction through a servo motor module so as to control the size of the square light.
Further, in order to better realize the method, the width of the light spot position of the light source just covered in the edge cleaning area is ensured, an optical positioning camera module is integrated, and the optical positioning camera module and the light source module are integrated together to ensure the precision of equipment, wherein the optical positioning camera module can enable the light spot position of the light source to just cover the width of the edge cleaning area through optical positioning, so that the light spot always covers the edge cleaning area in the detection process.
The optical positioning adopts a two-point positioning mode to finish the position precision positioning of the whole glass substrate area, the position and the angle of the edge cleaning area are calculated, the edge cleaning area comprises four edge parts of the glass substrate, and all detection of the four edge parts is sequentially finished by moving the glass substrate or the light source module.
Further, after positioning is completed, the light source is turned on, detection is started when one edge of the glass substrate edge cleaning area just moves to the light source, and the moving speed of the glass substrate is set according to the detection control of the light source module and the precision of the measuring step, wherein the light source and the light intensity receiving sensor are kept still all the time in the moving process of the glass substrate so as to complete the detection of one edge of the glass substrate, and the moving process of the glass substrate is kept stable, so that the problems of position deviation, vibration and the like do not occur; after the detection of one side part of the glass substrate is finished, the detection of the second side part is started, the glass substrate is fixed, the light source module moves, the servo motor module drives the light source module to integrally move, and the detection of the third side part and the fourth side part of the glass substrate is finished in the same mode after the detection is finished.
The light intensity receiving sensor is integrated with the light source, and the relative position of the light intensity receiving sensor and the light source is kept unchanged all the time in the detection process, so that the optimal measurement can be realized.
The transmittance comprises average transmittance and single-point transmittance, the laser edge cleaning effect of the thin film solar cell is represented by two transmittance indexes, the transmittance index is set to 75% -85%, and when the two transmittance indexes meet the index at the same time, the product is qualified, and the packaging process can be performed later.
To ensure the accuracy of the detection, all operations of the detection process are performed in a darkroom environment.
According to the method, the transmissivity of light is measured, the transmissivity is represented by light Jiang Cha, the edge cleaning effect is further scientifically and effectively represented, unqualified products are prevented from flowing into the following working procedures, the edge cleaning effect is represented by two indexes of average transmissivity and single-point transmissivity, the method is a scientific and effective quality control representation mode, the measuring precision and accuracy are guaranteed by setting a guaranteed light source and a light intensity receiving sensor synchronously, the method is scientific and reasonable, online detection can be achieved, the detection speed is high, the detection effect is good, and the method is a good method for detecting, evaluating and representing the laser edge cleaning effect of the thin film solar cell.
Claims (10)
1. A method for representing a laser trimming effect of a thin film solar cell is characterized by comprising the following steps of: comprising the following steps: a light source module is arranged on one side of the glass substrate, and the edge cleaning area is irradiated; a light intensity receiving sensor is arranged on the other side of the glass substrate; detecting the transmittance of light irradiating the edge cleaning area; the light source module comprises a light source, an optical positioning camera module, a light intensity measuring sensor, a reflecting mirror, a gathering mirror and a servo motor module.
2. The method for characterizing a laser trimming effect of a thin film solar cell according to claim 1, wherein: the sensitivity of the light intensity measuring sensor is the same as that of the light intensity receiving sensor.
3. The method for characterizing a laser trimming effect of a thin film solar cell according to claim 1, wherein: the light intensity measuring sensor measures the light intensity of the light emitted by the light source, and the light intensity measuring sensor is compared with the light intensity receiving sensor, and the transmittance is calculated through the light intensity difference.
4. The method for characterizing a laser trimming effect of a thin film solar cell according to claim 1, wherein: the light source is light in any wave band of a visible light section, light rays emitted by the light source are square light with the width of the edge cleaning area and are obtained through the reflector, the collecting mirror or the photomask, and the size of the square light is obtained by controlling the position of the focusing mirror in the up-down direction through the servo motor module.
5. The method for characterizing a laser trimming effect of a thin film solar cell according to claim 1, wherein: the optical positioning camera module enables the light spot position of the light source to just cover the width position of the edge cleaning area through optical positioning, and the light spot always covers the edge cleaning area in the detection process.
6. The method for characterizing a thin film solar cell laser trimming effect as defined in claim 5, wherein: the optical positioning adopts a two-point positioning mode, the position accuracy of the whole glass substrate area is positioned, and the position and the angle of the edge cleaning area are calculated.
7. The method for characterizing a laser trimming effect of a thin film solar cell according to claim 1, wherein: the edge cleaning area comprises four edges of the glass substrate, and all detection of the four edges is sequentially completed by moving the glass substrate or the light source module.
8. The method for characterizing a laser trimming effect of a thin film solar cell according to claim 1, wherein: the light intensity receiving sensor is integrated with the light source, and the relative position of the light intensity receiving sensor and the light source is kept unchanged all the time in the detection process, so that the optimal detection is obtained.
9. A method of characterizing a thin film solar cell laser trimming effect as defined in claim 3, wherein: the transmittance comprises average transmittance and single-point transmittance, and the laser edge cleaning effect of the thin film solar cell is represented by two transmittance indexes.
10. The method for characterizing a thin film solar cell laser trimming effect as defined in claim 8, wherein: all operations in the detection process are performed in a darkroom environment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310428662.8A CN116435208A (en) | 2023-04-20 | 2023-04-20 | Method for representing laser edge cleaning effect of thin film solar cell |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310428662.8A CN116435208A (en) | 2023-04-20 | 2023-04-20 | Method for representing laser edge cleaning effect of thin film solar cell |
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| CN116435208A true CN116435208A (en) | 2023-07-14 |
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| CN202310428662.8A Pending CN116435208A (en) | 2023-04-20 | 2023-04-20 | Method for representing laser edge cleaning effect of thin film solar cell |
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- 2023-04-20 CN CN202310428662.8A patent/CN116435208A/en active Pending
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