CN107271407A - A kind of in situ detection device and method of growing film photoluminescence spectra - Google Patents
A kind of in situ detection device and method of growing film photoluminescence spectra Download PDFInfo
- Publication number
- CN107271407A CN107271407A CN201710433763.9A CN201710433763A CN107271407A CN 107271407 A CN107271407 A CN 107271407A CN 201710433763 A CN201710433763 A CN 201710433763A CN 107271407 A CN107271407 A CN 107271407A
- Authority
- CN
- China
- Prior art keywords
- pulse laser
- signal
- spectrometer
- light
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
Abstract
The invention belongs to semi-conducting material manufacturing equipment technical field, a kind of in situ detection device of growing film photoluminescence spectra is disclosed, the device includes film growth response room, pulse laser module, optical module, optoelectronic switch module, spectrometer, Data Computation Unit, working signal circuit；The signal output part of optoelectronic switch module and spectrometer is connected with Data Computation Unit, the output end of Data Computation Unit is connected with spectrometer and pulse laser module, start for the pulse laser in alignment substrate original position periodically luminous, and control the spectrometer and pulse laser synchronously start collection spectrum, present invention also offers a kind of method of on-line real-time measuremen substrate photoluminescence spectra.Photoluminescence spectra in the accurate online acquisition substrate growth course of energy of the invention, collecting efficiency is high, and spectroscopic data is accurate, can be widely applied to semi-conducting material on-line checking field.
Description
Technical field
The present invention relates to optical detection apparatus, more particularly to a kind of in situ detection device of growing film photoluminescence spectra
And method, belong to semi-conducting material manufacturing equipment technical field..
Background technology
Photoluminescent techniques are to study the things such as electronic state in solid, electron transition process and electron-lattice interaction
A kind of common method of reason problem, with sensitivity is high, prepared by n.s and data acquisition is simple, to the destructive small etc. of sample
Advantage.Its general principle is：When semi-conducting material is excited by light, electronics produces the transition from low-lying level to high level, production
Raw electron-hole pair, forms nonequilibrium carrier.This electronics in excitation state is moved after a period of time in the semiconductors,
Relatively low energy state is returned to again, and occurs the compound of electron-hole pair.Nonequilibrium electron can be directed across forbidden band and valency
Band hole-recombination, can also in by forbidden band localized state capture after again with hole-recombination.Compound can be that radiation recombination is sent out
Light, or non-radiative surface recombination, auger recombination and transmitting multi-phonon it is compound.In recombination process, if electron-hole pair
Unnecessary energy is discharged in the form of light is known as luminescence generated by light.
Photoluminescence spectra is the means of research material optical property and micro-structural, can meet biology, medical science pharmacy, change
The different application of the industries such as, food, Gem Studies and semiconductor.Its measuring principle is, when the illumination of short wavelength is mapped on material,
Electronics in low-lying level is excited to high level after the energy of photon is absorbed.And the electronics on high level is in low energy
Order transition simultaneously discharges photon, that is, fluorescence occurs.The photon energy of release is determined by the energy difference of high low-lying level.Therefore, pass through
The photoluminescence spectrum of analysis of material can be obtained by the distribution situation of material internal energy level.One example comes from semiconductor photovoltaic row
Industry, by the analysis to semi-conducting material photoluminescence spectrum, can obtain semiconductor intrinsic property and the property relevant with defect,
Such as measure component, the impurity energy level of the band gap, luminous efficiency, material of material, defect type, thickness of thin layer（Such as quantum well thickness）
Deng.
Although the past, association area had some important progress during the decade, the device of existing measurement luminescence generated by light leads to
Chang Wufa provides complex heterogeneous structure growth environment（Substrate rotates at a high speed, high temperature）During real time information.Luminescence generated by light is believed
Number low intensity, to improve the sensitivity of detection, it is necessary to reduce context sources to greatest extent, while improving the collection effect of signal as far as possible
Rate.
The content of the invention
In order to overcome the shortcomings of that prior art is present, the technical problems to be solved by the invention are：A kind of structure letter is provided
It is single, easy to operate, the in situ detection device of the high growing film photoluminescence spectra of sensitivity.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is：A kind of growing film photoluminescence spectra
In situ detection device, including film growth response room is provided with the stone for carrying substrates in the film growth response room
Mill, the millstone plate is arranged with rotary shaft；Also include：Pulse laser module：Comprising pulse laser and its control circuit,
For sending laser；
Optical module：For receiving the laser that pulse laser is sent, substrate surface is incident upon；And receive through substrate table
The light of face reflection, is incident upon spectrometer；
Optoelectronic switch module：Including optoelectronic switch and catch, the catch is set on the rotary shaft, and the optoelectronic switch is arranged on
Catch both sides；The optoelectronic switch module is used for when catch passes through optoelectronic switch, and generation, which is in the light, signal and is sent to data meter
Calculate unit；
Spectrometer：Light for receiving substrate surface reflection, forms spectroscopic data and is transferred to Data Computation Unit, the spectrum
Instrument spectra collection frequency is twice of pulse laser switching frequency；
Data Computation Unit：Input is electrically connected with spectrometer and optoelectronic switch module, output end and pulse laser and spectrum
Instrument is electrically connected；The signal that is in the light for receiving the transmission of optoelectronic switch module, and according to the signal that is in the light, output signal to respectively described
Pulse laser and spectrometer, control the pulse laser to start in alignment substrate original position periodically luminous, and
Control the spectrometer and pulse laser synchronously start to gather spectrum；It is additionally operable to receive the spectroscopic data of spectrometer transmission, and
Spectroscopic data is identified and handled.
A kind of in situ detection device of described growing film photoluminescence spectra, in addition to working signal circuit and AD/
DA change-over circuits, the output end of the Data Computation Unit by after AD/DA change-over circuits and working signal circuit respectively with light
Spectrometer and the electrical connection of pulse laser module, the optoelectronic switch module are calculated by the AD/DA change-over circuits and the data
Unit is connected；The control signal that the working signal circuit is used to export Data Computation Unit is separately converted to the first work letter
Number the pulse laser is sent to, and is converted into the second working signal and be sent to the spectrometer, the A/D converter circuit
Calculate single for the signal that is in the light of optoelectronic switch module to be converted into data signal and Data Computation Unit is sent to, and by data
The control signal that member is sent is converted to analog signal and is sent to working signal circuit.
First working signal is 0=T of cycle T/(n0*M), and dutycycle is 1:1 cyclic pulse signal；It is described
T is millstone plate swing circle for the signal period of being in the light, and the M is substrate quantity on millstone plate；N0 is the positive integer more than zero,
Represent the photoluminescence spectra quantity gathered on each substrate；The Data Computation Unit be additionally operable to according to be in the light the signal period and
It is in the light the moment, determines the swing circle T of millstone plate, and combine the position of catch, calculating obtains the alignment of pulse laser light-emitting window and appointed
At the time of one substrate edge, so that the initial time of the first working signal and the second working signal is pulse laser light-emitting window pair
At the time of accurate a certain substrate edge.
Being in the light for the optoelectronic switch module is directed at the edge moment of any substrate, first work for pulse laser constantly
Make the initial time of signal and the timing synchronization that is in the light of the signal that is in the light.
Data Computation Unit is identified to spectroscopic data and specifically referred to processing：
Data Computation Unit often gathers twice that spectroscopic data is a detection cycle using spectrometer, by the previous of each detection cycle
Individual spectroscopic data subtracts each other with latter spectroscopic data, and obtained spectroscopic data is designated as the photoluminescence spectra data of substrate；
Working signal and the signal that is in the light are subjected to phase-contrast, and combine the position of catch, each photoluminescence spectra is identified
The corresponding substrate of difference.
The optical module includes：Beam splitter, first collector lens, band pass filter, the second collector lens, optical fiber connect
Mouth, optical fiber, the pulse laser that pulse laser is sent incide first collector lens, first collector lens after launching through beam splitter
Substrate surface is impinged perpendicularly on after pulse laser is assembled, the light of substrate surface reflection forms directional light after first collector lens
Beam splitter is incided, band pass filter is incided after being transmitted through beam splitter, is incided after filtering out veiling glare through band pass filter
Second collector lens, optical fiber interface is incided after being assembled through the second collector lens, and inciding spectrometer by optical fiber receives.
Present invention also offers a kind of detection method of the in situ detection device of growing film photoluminescence spectra, including with
Lower step：
S01, the signal that is in the light by optoelectronic switch module measurement catch, and it is sent to the Data Computation Unit；
S02, the Data Computation Unit calculate the swing circle and the first working signal of millstone plate according to the signal that is in the light
Frequency, and catch position and substrate position are combined, control signal is sent to the working signal circuit, makes the working signal electricity
Road sends the first working signal to the pulse laser respectively, and sends the second working signal to the spectrometer；Simultaneously will
The spectra collection set of frequency of spectrometer is twice of the switching frequency of pulse laser；
S03, when pulse laser is just directed at a substrate edge position, working signal circuit is simultaneously emitted by the first working signal
The pulse laser and spectrometer are given with the second working signal；Initial time, the first working signal is high level, pulse laser
Device lights, spectrometer start recording data, after experience half period, and the first working signal is low level, and pulse laser stops
It is luminous, spectrometer start recording data again；So circulation, treats that graphite plate rotates a circle, and pulse laser undergoes all bases
After piece, stop luminous, spectrometer stopping collection spectrum, and spectrum is sent to Data Computation Unit；.
S04, Data Computation Unit, which often gather spectroscopic data twice using spectrometer, as a detection cycle, will each detect week
The previous spectroscopic data of phase subtracts each other with latter spectroscopic data, and obtained spectroscopic data is designated as the photoluminescence spectra number of substrate
According to, and the time is recorded according to spectrum, it is determined that the corresponding substrate of each spectroscopic data.
The cycle of first working signal is T0=T/M, in the step S03, each detection cycle laser experience
One substrate.
The present invention has the advantages that compared with prior art：The present invention is in the light signal simultaneously by optical-electric module collection
Data Computation Unit is transferred to, Data Computation Unit can obtain the rotary speed information and phase information of film growth response room, and
The working signal for sending synchronous different frequency by working signal circuit realizes real-time control to spectrometer and pulse laser
The purpose of detection process and data acquisition；Also, can also be to adopting by the phase information collected to optical-electric module
The photoluminescence spectra collected is identified.In addition, by carrying out Data Management Analysis to the signal that is in the light, can also be to spectrometer
It is controlled with the working frequency of pulse laser, not only makes data acquisition quantity few, the detection cycle time greatly shortens, significantly
The efficiency of photoluminescence spectra signal acquisition is improved, moreover, it is also possible to control in each collection period, pulse laser alignment
Be same substrate, improve the accuracy of data acquisition.
Brief description of the drawings
Fig. 1 is the principle schematic for the device that on-line real-time measuremen substrate provided in an embodiment of the present invention grows；
Fig. 2 is optical module and the optical principle signal for the device that on-line real-time measuremen substrate provided in an embodiment of the present invention grows
Figure；
Fig. 3 is the arrangement mode of substrate on the graphite plate of on-line real-time measuremen substrate grower provided in an embodiment of the present invention
Structural representation.
Embodiment
, below will be in the embodiment of the present invention to make the purpose, technical scheme and advantage of the embodiment of the present invention clearer
Technical scheme be clearly and completely described, it is clear that described embodiment be the present invention a part of embodiment, without
It is whole embodiments；Based on the embodiment in the present invention, those of ordinary skill in the art are not before creative work is made
The every other embodiment obtained is put, the scope of protection of the invention is belonged to.
Referring to accompanying drawing 1, what the embodiment of the present invention 1 was provided is used to produce the on-line checking dress that film of semiconductor device grows
Put, including film growth response room 1, pulse laser module 2, optical module 4, spectrometer 3, AD/DA change-over circuits 5, data meter
Unit 6, working signal circuit 7 and optoelectronic switch module 11 are calculated, pulse laser module includes pulse laser and its control
Circuit, the pulse laser that pulse laser is produced, by being incided after optical module 4 on the substrate in film growth response room 1,
Substrate is excited light irradiation, and the luminescence generated by light optical signal of generation is acquired after optical module 3 into spectrometer 4, spectrometer 4
The spectral transmissions collected are subjected to data processing to Data Computation Unit 6.The output end of Data Computation Unit 6 passes through AD/DA
Electrically connected respectively with spectrometer and pulse laser module after change-over circuit 5 and working signal circuit 7.
Specifically, in film growth response room 1 it is successively from bottom to up heater 10, graphite plate 9, substrate 8, film growth
Watch window is formed after quartz glass seals at the top of reative cell 1, and film growth response room 1 is in vacuum environment, millstone plate 9
Bottom is provided with the rotary shaft 12 of motor control, millstone plate 9 under the control of rotary shaft in film growth response room at it
In, it is the arrangement mode structural representation of substrate 8 on graphite plate 9 referring to accompanying drawing 3.Heater 10 carries out heating control to graphite plate 9
Temperature, graphite plate 9 reheats substrate 8.
Specifically, optoelectronic switch module 11 includes optoelectronic switch 14 and catch 13, wherein, the catch 13 is arranged on thin
In film growth response room in rotary shaft 12, the optoelectronic switch 14 is arranged on the both sides of catch 13；The optoelectronic switch module 11 is used
In when catch is periodically by optoelectronic switch, produces and be periodically in the light signal and be sent to AD/DA change-over circuits 5；AD/DA
This is periodically the in the light signal of change-over circuit 5 is converted into after data signal and is transferred to Data Computation Unit 6, Data Computation Unit 6
According to the signal that is periodically in the light, it can not only calculate and obtain millstone plate swing circle in film growth response room 1, can be with root
According to catch position, obtain being in the light signal starting point when, the substrate being aligned with pulse laser.6 pairs of signals that are in the light of Data Computation Unit
Carry out after analysis calculating, by AD/DA change-over circuits 5, working signal circuit 7 sends control signal to pulse laser and light
Spectrometer, controls the pulse laser to start in alignment substrate original position periodically luminous, and control the spectrometer
With pulse laser synchronously start to gather spectrum, wherein, the spectra collection frequency of spectrometer is pulse laser switching frequency
Twice；Meanwhile, Data Computation Unit 6 be additionally operable to receive spectrometer transmission spectroscopic data, and spectroscopic data is identified and
Processing.
Wherein, the control signal that the working signal circuit is used to export Data Computation Unit is separately converted to the first work
The pulse laser is sent to as signal, and is converted into the second working signal and is sent to the spectrometer, the AD conversion
Circuit is used to the signal that is in the light of optoelectronic switch module is converted into data signal and Data Computation Unit is sent to, and by data meter
The control signal that calculation unit is sent is converted to analog signal and is sent to working signal circuit.
It is transferred in addition, spectrometer 4 collects spectral signal after Data Computation Unit 6, Data Computation Unit 6, which will work, to be believed
Number entering line phase with the signal that is in the light compares, you can so that the spectroscopic data that spectrometer is recorded to be identified, that is, identify each light
The corresponding substrate of modal data.
Wherein, pulse laser is chosen as frequency tripling Nd：YAG pulse lasers, wavelength is 355nm, can be nanosecond
（ns）Level pulsewidth.The wave band of spectrometer 3 need to include LED luminescence bands, and resolution ratio is sufficiently high, it is general from response wave band be 200 ~
1100nm spectrometer.
Specifically, the signal that is in the light that Data Computation Unit is sent according to optoelectronic switch module spectroscopic data is identified with
Processing is specifically referred to：Data Computation Unit is often gathered spectroscopic data twice using spectrometer and, as a detection cycle, will each detected
The previous spectroscopic data in cycle subtracts each other with latter spectroscopic data, and obtained spectroscopic data is designated as the photoluminescence spectra of substrate
Data；Working signal and the signal that is in the light are carried out phase-contrast by Data Computation Unit, and combine the position of catch, identify N groups
Photoluminescence spectra distinguishes corresponding substrate.
Specifically, first working signal is 0=T of cycle T/(n0*M), and f=n0*M/T, dutycycle is 1:1 week
Phase property pulse signal；The T is millstone plate swing circle for the signal period of being in the light, and the M is substrate quantity on millstone plate；n0
For the positive integer more than zero, the photoluminescence spectra quantity gathered on each substrate is represented；The Data Computation Unit is additionally operable to
The signal period and it is in the light the moment according to being in the light, determines the swing circle T of millstone plate, and combine the position of catch, calculating obtains arteries and veins
At the time of impulse light light-emitting window is directed at any substrate edge, so that the initial time of the first working signal and the second working signal
At the time of a certain substrate edge being directed at for pulse laser light-emitting window.Frequency f=n0*M/T of first working signal, then can make every
Individual collection period, pulse laser will not span incident, most one substrate of experience is carried out to multiple substrates, moreover, the first work
At the time of the initial time of signal and the second working signal is that pulse laser light-emitting window is directed at a certain substrate edge, it can make each
One substrate of alignment of collection period, the then spectroscopic data collected is more accurate.
Illustrate, it is assumed that a circle is arranged with 5 substrates on graphite plate 9 in reative cell, as shown in figure 3, graphite plate rotating speed
For 240rpm, then the frequency of working signal could be arranged to 20Hz, 40Hz, or 80Hz ... etc., then accordingly, pulse laser
The switching frequency of device is 20Hz, 40Hz or 80Hz ..., and the frequency of spectrometer collection spectrum is 40Hz, 80Hz or 160Hz ...,
With pulse laser switching frequency 20Hz, exemplified by the frequency 40Hz of spectrometer collection spectrum, i.e. pulse laser switch is once all
Phase is 50ms, and the cycle of spectrometer collection data is 25ms, and millstone plate, which is often enclosed, lasts 250ms, ignores substrate gap, each substrate
Experience Laser Time is 50ms, and just each substrate gathers 2 spectroscopic datas, is once opened for laser, collection is substrate
Photoluminescence spectra adds the sum of background spectrum, is once closed for laser, collection is background spectrum, and data are subtracted each other twice, you can
To obtain the photoluminescence spectra of the substrate, the background data in measure spectrum is eliminated, photoluminescence spectra is substantially increased
Measurement sensitivity；Assuming that pulse laser switching frequency is 40Hz, the frequency 80Hz of spectrometer collection spectrum, i.e. pulse laser
Device switchs a cycle for 25ms, and the cycle of spectrometer collection data is 12.5ms, and millstone plate, which is often enclosed, lasts 250ms, ignores base
Piece gap, each substrate experience Laser Time is 50ms, and just each substrate gathers 4 spectroscopic datas, for the first time and for the third time
Opened for laser, collection is the photoluminescence spectra of substrate plus the sum of background spectrum, and second and the 4th time is that laser is closed,
Collection is background spectrum, it is adjacent go after data are subtracted each other twice it is average, you can to obtain the photoluminescence spectra of the substrate；Work
The periodicity minimum of signal is set to the detection cycle of N=5, i.e., 5（250ms）The luminescence generated by light light of all substrates can be realized
Modal data is gathered.Therefore, data acquisition is fast, and invalid data is few, substantially increases the detection efficiency of photoluminescence spectra.
Specifically set it is possible to further the position to optoelectronic switch module, make the gear of the optoelectronic switch module
Light time carves the edge moment that any substrate is directed at for pulse laser, the initial time of first working signal and the letter that is in the light
Number the timing synchronization that is in the light.Then by catch position it is recognised which the substrate for generation moment pulse laser alignment of being in the light is
A piece of, i.e., what the initial time of the first working signal or the second working signal was measured is also the spectrum of the substrate reflection, i.e. spectrum
The corresponding substrate of first group of spectrum of instrument collection can be identified, and be believed further according to signal acquisition periods and millstone plate swing circle etc.
Breath, you can so that the corresponding substrate of each group of spectrum to be identified.In addition, the initial time of the first working signal can also be with gear
Quarter light time can also be asynchronous, it is only necessary to carries out phase-contrast to two signals, equally can be to each group of spectrum correspondence substrate
It is identified.
Specifically, Data Computation Unit is identified to spectroscopic data and specifically referred to processing：Data Computation Unit is with light
It is a detection cycle that spectrometer, which often gathers spectroscopic data twice, by the previous spectroscopic data of each detection cycle and latter light
Modal data subtracts each other, and obtained spectroscopic data is designated as the photoluminescence spectra data of substrate；Then by the first working signal with being in the light
Signal carries out phase-contrast, and combines the position of catch, identifies that each photoluminescence spectra distinguishes corresponding substrate.
Specifically, as shown in Fig. 1~2, optical module includes：Beam splitter A01, first collector lens A02, band pass filter
A03, the second collector lens A04, optical fiber interface A05 and optical fiber, the pulse laser that pulse laser is sent are launched through beam splitter A01
After incide first collector lens A02, first collector lens A02 impinges perpendicularly on substrate surface, base after pulse laser is assembled
The light of piece surface reflection forms directional light after first collector lens A02 and incides beam splitter A01, after being transmitted through beam splitter A01
Band pass filter A03 is incided, the second collector lens A04 is incided after filtering out veiling glare through band pass filter A03, through second
Optically focused A04 lens incide optical fiber interface A05 after assembling, and inciding spectrometer 3 by optical fiber receives.
The embodiment of the present invention additionally provides a kind of in-situ detection method of growing film photoluminescence spectra, including following step
Suddenly：
S01, the signal that is in the light by optoelectronic switch module measurement catch, and it is sent to the Data Computation Unit；
S02, the Data Computation Unit calculate the swing circle and the first working signal of millstone plate according to the signal that is in the light
Frequency, and catch position and substrate position are combined, control signal is sent to the working signal circuit, makes the working signal electricity
Road sends the first working signal to the pulse laser respectively, and sends the second working signal to the spectrometer；Simultaneously will
The spectra collection set of frequency of spectrometer is twice of the switching frequency of pulse laser；
S03, when pulse laser is just directed at a substrate edge position, working signal circuit is simultaneously emitted by the first working signal
The pulse laser and spectrometer are given with the second working signal；Initial time, the first working signal is high level, pulse laser
Device lights, spectrometer start recording data, after experience half period, and the first working signal is low level, and pulse laser stops
It is luminous, spectrometer start recording data again；So circulation, treats that graphite plate rotates a circle, and pulse laser undergoes all bases
After piece, stop luminous, spectrometer stopping collection spectrum, and spectrum is sent to Data Computation Unit；.
S04, Data Computation Unit, which often gather spectroscopic data twice using spectrometer, as a detection cycle, will each detect week
The previous spectroscopic data of phase subtracts each other with latter spectroscopic data, and obtained spectroscopic data is designated as the photoluminescence spectra number of substrate
According to, and the time is recorded according to spectrum, it is determined that the corresponding substrate of each spectroscopic data.
Because the signal acquisition frequency of spectrometer is twice of pulse laser switching frequency, then the switch of pulse laser
Cycle is twice of collection period of spectrometer, i.e. in each switch periods of pulse laser, spectrometer collection data twice,
When being opened for the first time for pulse laser, the data of collection are photoluminescence spectra and background spectrum sum, and second sharp for pulse
Light device is closed, and the data of collection are background spectrum, and therefore, the data gathered in pulse laser each cycle are subtracted each other, can
To obtain real photoluminescence spectra.Measurement data is accurate, and precision is high.
Further, the cycle of first working signal is T0=T/M, in the step S03, each substrate experience
One detection cycle.It then just can gather one group of photoluminescence spectra for each substrate, improve the efficiency of spectra collection.
For ensure spectrometer data acquiring frequency, pulse laser laser switch frequency, film growth response room rotating speed
Consistent Deng parameter coordination, the present invention is gathered by optical-electric module to be in the light signal and is transferred to Data Computation Unit, and data calculate single
Member can obtain the rotary speed information and phase information of film growth response room, control to be used in combination using working signal circuit 4 and software
Mode, and by controlling working signal circuit to send the working signal of synchronous different frequency to spectrometer and pulse laser,
Realize control detection process in real time and the purpose of data acquisition；Also, pass through the phase collected to optical-electric module
Information, the photoluminescence spectra that collected can also be identified.In addition, by carrying out data processing point to the signal that is in the light
Analysis, can also be controlled to the working frequency of spectrometer and pulse laser, not only make data acquisition quantity few, detection cycle
Time greatly shortens, and substantially increases the efficiency of photoluminescence spectra signal acquisition, moreover, it is also possible to control each collection period
Interior, pulse laser alignment is same substrate, improves the accuracy of data acquisition.
Finally it should be noted that：Various embodiments above is merely illustrative of the technical solution of the present invention, rather than its limitations；To the greatest extent
The present invention is described in detail with reference to foregoing embodiments for pipe, it will be understood by those within the art that：Its according to
The technical scheme described in foregoing embodiments can so be modified, or which part or all technical characteristic are entered
Row equivalent substitution；And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the present invention technology
The scope of scheme.
Claims (8)
1. a kind of in situ detection device of growing film photoluminescence spectra, including film growth response room, the film growth
The millstone plate for carrying substrates is provided with reative cell, the millstone plate is arranged with rotary shaft；Characterized in that, also wrapping
Include：
Pulse laser module：Comprising pulse laser and its control circuit, for sending laser；
Optical module：For receiving the laser that pulse laser is sent, substrate surface is incident upon；And receive through substrate table
The light of face reflection, is incident upon spectrometer；
Optoelectronic switch module：Including optoelectronic switch and catch, the catch is set on the rotary shaft, and the optoelectronic switch is arranged on
Catch both sides；The optoelectronic switch module is used for when catch passes through optoelectronic switch, and generation, which is in the light, signal and is sent to data meter
Calculate unit；
Spectrometer：Light for receiving substrate surface reflection, forms spectroscopic data and is transferred to Data Computation Unit, the spectrum
Instrument spectra collection frequency is twice of pulse laser switching frequency；
Data Computation Unit：Input is electrically connected with spectrometer and optoelectronic switch module, output end and pulse laser and spectrum
Instrument is electrically connected；The signal that is in the light for receiving the transmission of optoelectronic switch module, and according to the signal that is in the light, output signal to respectively described
Pulse laser and spectrometer, control the pulse laser to start in alignment substrate original position periodically luminous, and
Control the spectrometer and pulse laser synchronously start to gather spectrum；It is additionally operable to receive the spectroscopic data of spectrometer transmission, and
Spectroscopic data is identified and handled.
2. the in situ detection device of a kind of growing film photoluminescence spectra according to claim 1, it is characterised in that also
Including working signal circuit and AD/DA change-over circuits, the output end of the Data Computation Unit passes through AD/DA change-over circuits and work
Make to electrically connect with spectrometer and pulse laser module respectively after signal circuit, the optoelectronic switch module is turned by the AD/DA
Circuit is changed to be connected with the Data Computation Unit；The working signal circuit is used for the control signal for exporting Data Computation Unit
It is separately converted to the first working signal and is sent to the pulse laser, and be converted into the second working signal to be sent to the light
Spectrometer, the A/D converter circuit is used to the signal that is in the light of optoelectronic switch module is converted into data signal and data are sent to calculate
Unit, and the control signal that Data Computation Unit is sent is converted into analog signal is sent to working signal circuit.
3. a kind of in situ detection device of growing film photoluminescence spectra according to claim 2, it is characterised in that institute
The first working signal is stated for 0=T of cycle T/(n0*M), dutycycle is 1:1 cyclic pulse signal；The T is the letter that is in the light
Number cycle is millstone plate swing circle, and the M is substrate quantity on millstone plate；N0 is the positive integer more than zero, represents each
The photoluminescence spectra quantity gathered on substrate；When the Data Computation Unit is additionally operable to according to the signal period of being in the light with being in the light
Carve, determine the swing circle T of millstone plate, and combine the position of catch, calculating obtains pulse laser light-emitting window and is directed at any substrate
At the time of edge, so that the initial time of the first working signal and the second working signal is that the alignment of pulse laser light-emitting window is a certain
At the time of substrate edge.
4. a kind of in situ detection device of growing film photoluminescence spectra according to claim 1, it is characterised in that institute
State being in the light for optoelectronic switch module and be directed at the edge moment of any substrate for pulse laser constantly, of first working signal
Begin moment and the timing synchronization that is in the light of the signal that is in the light.
5. a kind of in situ detection device of growing film photoluminescence spectra according to claim 1, it is characterised in that number
Spectroscopic data is identified according to computing unit and specifically referred to processing：
Data Computation Unit often gathers twice that spectroscopic data is a detection cycle using spectrometer, by the previous of each detection cycle
Individual spectroscopic data subtracts each other with latter spectroscopic data, and obtained spectroscopic data is designated as the photoluminescence spectra data of substrate；
Working signal and the signal that is in the light are subjected to phase-contrast, and combine the position of catch, each photoluminescence spectra is identified
The corresponding substrate of difference.
6. a kind of in situ detection device of growing film photoluminescence spectra according to claim 1, it is characterised in that institute
Stating optical module includes：Beam splitter, first collector lens, band pass filter, the second collector lens, optical fiber interface, optical fiber, pulse
The pulse laser that laser is sent incides first collector lens after launching through beam splitter, first collector lens are by pulse laser meeting
Substrate surface is impinged perpendicularly on after poly-, the light of substrate surface reflection forms directional light after first collector lens and incides beam splitting
Mirror, band pass filter is incided after being transmitted through beam splitter, the second optically focused is incided after filtering out veiling glare through band pass filter saturating
Mirror, optical fiber interface is incided after being assembled through the second collector lens, and inciding spectrometer by optical fiber receives.
7. a kind of detection method of the in situ detection device of growing film photoluminescence spectra according to claim 1, its
It is characterised by, comprises the following steps：
S01, the signal that is in the light by optoelectronic switch module measurement catch, and it is sent to the Data Computation Unit；
S02, the Data Computation Unit calculate the swing circle and the first working signal of millstone plate according to the signal that is in the light
Frequency, and catch position and substrate position are combined, control signal is sent to the working signal circuit, makes the working signal electricity
Road sends the first working signal to the pulse laser respectively, and sends the second working signal to the spectrometer；Simultaneously will
The spectra collection set of frequency of spectrometer is twice of the switching frequency of pulse laser；
S03, when pulse laser is just directed at a substrate edge position, working signal circuit is simultaneously emitted by the first working signal
The pulse laser and spectrometer are given with the second working signal；Initial time, the first working signal is high level, pulse laser
Device lights, spectrometer start recording data, after experience half period, and the first working signal is low level, and pulse laser stops
It is luminous, spectrometer start recording data again；So circulation, treats that graphite plate rotates a circle, and pulse laser undergoes all bases
After piece, stop luminous, spectrometer stopping collection spectrum, and spectrum is sent to Data Computation Unit；
S04, Data Computation Unit often gather twice that spectroscopic data is a detection cycle using spectrometer, by each detection cycle
Previous spectroscopic data subtracts each other with latter spectroscopic data, and obtained spectroscopic data is designated as the photoluminescence spectra data of substrate,
And the time is recorded according to spectrum, it is determined that the corresponding substrate of each spectroscopic data.
8. a kind of detection method of the in situ detection device of growing film photoluminescence spectra according to claim 7, its
It is characterised by, during cycle of first working signal is T0=T/M, the step S03, each detection cycle laser experience
One substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710433763.9A CN107271407B (en) | 2017-06-09 | 2017-06-09 | In-situ detection device and method for photoluminescence spectrum of grown film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710433763.9A CN107271407B (en) | 2017-06-09 | 2017-06-09 | In-situ detection device and method for photoluminescence spectrum of grown film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107271407A true CN107271407A (en) | 2017-10-20 |
| CN107271407B CN107271407B (en) | 2020-11-24 |
Family
ID=60067609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710433763.9A Active CN107271407B (en) | 2017-06-09 | 2017-06-09 | In-situ detection device and method for photoluminescence spectrum of grown film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107271407B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111307715A (en) * | 2020-03-30 | 2020-06-19 | 深圳大学 | In-situ test device for low-dimensional semiconductor interface regulation |
| WO2022042344A1 (en) * | 2020-08-31 | 2022-03-03 | 深圳市中光工业技术研究院 | Test chip and test system |
| CN114879243A (en) * | 2022-04-13 | 2022-08-09 | 中国科学院近代物理研究所 | Beam spectrum detection device and method based on photon counting |
| CN115602565A (en) * | 2022-11-03 | 2023-01-13 | 江苏中芯沃达半导体科技有限公司（Cn） | Semiconductor in-situ high-resolution visual online monitoring device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1088002A (en) * | 1992-11-16 | 1994-06-15 | 东京电子株式会社 | Make the method and apparatus of liquid crystal display substrate and evaluating semiconductor crystals |
| CN2340001Y (en) * | 1998-11-06 | 1999-09-22 | 清华大学 | Photoluminance spectral-scanning imaging instrument |
| US20100006785A1 (en) * | 2008-07-14 | 2010-01-14 | Moshe Finarov | Method and apparatus for thin film quality control |
| US20110089348A1 (en) * | 2008-07-14 | 2011-04-21 | Moshe Finarov | Method and apparatus for thin film quality control |
| CN104697972A (en) * | 2013-12-04 | 2015-06-10 | 北京智朗芯光科技有限公司 | Epitaxial wafer growth online real-time detection method |
| CN104807754A (en) * | 2014-01-24 | 2015-07-29 | 北京智朗芯光科技有限公司 | Device for monitoring characteristics of wafer growth film |
-
2017
- 2017-06-09 CN CN201710433763.9A patent/CN107271407B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1088002A (en) * | 1992-11-16 | 1994-06-15 | 东京电子株式会社 | Make the method and apparatus of liquid crystal display substrate and evaluating semiconductor crystals |
| CN2340001Y (en) * | 1998-11-06 | 1999-09-22 | 清华大学 | Photoluminance spectral-scanning imaging instrument |
| US20100006785A1 (en) * | 2008-07-14 | 2010-01-14 | Moshe Finarov | Method and apparatus for thin film quality control |
| US20110089348A1 (en) * | 2008-07-14 | 2011-04-21 | Moshe Finarov | Method and apparatus for thin film quality control |
| CN104697972A (en) * | 2013-12-04 | 2015-06-10 | 北京智朗芯光科技有限公司 | Epitaxial wafer growth online real-time detection method |
| CN104807754A (en) * | 2014-01-24 | 2015-07-29 | 北京智朗芯光科技有限公司 | Device for monitoring characteristics of wafer growth film |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111307715A (en) * | 2020-03-30 | 2020-06-19 | 深圳大学 | In-situ test device for low-dimensional semiconductor interface regulation |
| CN111307715B (en) * | 2020-03-30 | 2023-01-17 | 深圳大学 | In-situ test device for low-dimensional semiconductor interface regulation |
| WO2022042344A1 (en) * | 2020-08-31 | 2022-03-03 | 深圳市中光工业技术研究院 | Test chip and test system |
| CN114879243A (en) * | 2022-04-13 | 2022-08-09 | 中国科学院近代物理研究所 | Beam spectrum detection device and method based on photon counting |
| CN114879243B (en) * | 2022-04-13 | 2023-04-25 | 中国科学院近代物理研究所 | Beam spectrum detection device and method based on photon counting |
| CN115602565A (en) * | 2022-11-03 | 2023-01-13 | 江苏中芯沃达半导体科技有限公司（Cn） | Semiconductor in-situ high-resolution visual online monitoring device |
| CN115602565B (en) * | 2022-11-03 | 2023-06-23 | 江苏中芯沃达半导体科技有限公司 | Semiconductor in-situ high-resolution visual on-line monitoring device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107271407B (en) | 2020-11-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107271407A (en) | A kind of in situ detection device and method of growing film photoluminescence spectra | |
| CN104697972B (en) | A kind of method of on-line real-time measuremen epitaxial wafer growth | |
| CN104412098B (en) | The method for checking semiconductor wafer | |
| Ross et al. | Increased short-circuit current density of production line CdTe mini-module through luminescent down-shifting | |
| CN102778643B (en) | Equipment and method for measuring photovoltaic conversion characteristic parameters of photovoltaic solar battery | |
| CN101782432B (en) | Universal photoelectric test system for tera-hertz spectra | |
| JP2012519276A (en) | High-speed quantum efficiency measurement system using solid-state light source | |
| CN102023068A (en) | Film stress measuring equipment and film stress measuring method | |
| Probst et al. | New developments in Cu (In, Ga)(S, Se) 2 thin film modules formed by rapid thermal processing of stacked elemental layers | |
| CN102928081B (en) | Acousto-optic adjustable filtering type near-infrared spectrometer | |
| Hooper et al. | A photoelectric sensor for distinguishing between plant material and soil | |
| CN203278834U (en) | Light channel performance monitoring module capable of measuring channel central wavelength | |
| Weng et al. | Band-gap-engineered transparent perovskite solar modules to combine photovoltaics with photosynthesis | |
| Hamadani et al. | Versatile light-emitting-diode-based spectral response measurement system for photovoltaic device characterization | |
| CN102128714A (en) | Device and method for detecting focusing efficiency of optical lens | |
| Slooff et al. | The luminescent concentrator illuminated | |
| CN102419187A (en) | High-capacity parallel fiber bragg grating sensing analyzer | |
| CN106301221B (en) | Quantum efficiency of solar battery detection method and device based on Digital Micromirror Device | |
| CN108007906A (en) | A kind of long-afterglow material phosphorescence excitation spectrum measuring system and method | |
| CN202204909U (en) | Solar battery spectral character testing device | |
| US7807494B2 (en) | Method for producing a chalcogenide-semiconductor layer of the ABC2 type with optical process monitoring | |
| CN202350810U (en) | Large-capacity parallel fiber bragg grating sensing analyzer | |
| CN207570669U (en) | The beam splitting arrangement and turntable of double beam spectrophotometer | |
| TW201105949A (en) | Measurement of thin film photovoltaic solar panels | |
| CN104697974A (en) | Device for on-line real-time detection of epitaxial film growth |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |