CN116428963A - Air-floating rotary table device for roundness measuring instrument, calibration method and measurement method thereof - Google Patents
Air-floating rotary table device for roundness measuring instrument, calibration method and measurement method thereof Download PDFInfo
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- CN116428963A CN116428963A CN202310333189.5A CN202310333189A CN116428963A CN 116428963 A CN116428963 A CN 116428963A CN 202310333189 A CN202310333189 A CN 202310333189A CN 116428963 A CN116428963 A CN 116428963A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
- G01B7/282—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures for measuring roundness
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention discloses an air-floating rotary table device for roundness measuring equipment, which comprises: a base; the air-floating turntable comprises a fixed seat, a turntable rotor rotatably arranged in the fixed seat and a turntable table top rotating along with the turntable rotor, and the fixed seat is arranged on the base; the sensor seat is arranged on the outer circumferential surface of the fixed seat in a circumferential direction, and a first capacitance sensor, a second capacitance sensor and a third capacitance sensor are arranged on the sensor seat at intervals along the circumferential direction, and face to the outer circle of the table top of the turntable; the motion mechanism comprises a vertical Z axis, a Z axis motion shaft sleeve arranged on the vertical Z axis and an X axis motion cross beam arranged on the Z axis motion shaft sleeve, and the vertical Z axis is arranged on the base; and the detection probe is arranged on the X-axis moving cross beam. The invention also discloses a calibration method and a measurement method. The invention improves the overall measurement precision of the roundness measuring instrument by measuring the axis precision in real time, and has the standard roundness calibration function.
Description
Technical Field
The invention relates to roundness detection equipment, in particular to an air floatation turntable device for a roundness measuring instrument, a calibration method and a measurement method thereof.
Background
The high-precision roundness measuring instrument is used as a special instrument for roundness detection and is widely applied to various industries. The testing principle is that a high-precision rotary platform is adopted, a probe with a capacitive/inductive displacement sensor is added to a detection mechanism capable of being contacted and separated to measure, and finally, the detected result is subjected to data processing to obtain roundness measurement data. Error data for roundness measuring equipment test includes: a. an axis error of the rotary platform; b. roundness error of the workpiece. The roundness error of the workpiece is the error required to be obtained by the roundness measuring instrument.
In a conventional roundness measuring apparatus, in order to measure roundness errors of a workpiece, firstly, for an axis error of a rotary platform, a rotary platform with high level precision is generally selected, and the precision is generally at least 1/10 of the calibration test precision, so that the axis error of the rotary platform can be regarded as 0. Therefore, the high-precision rotary platform is a core component of the traditional roundness measuring instrument, and the search for the higher-precision rotary platform is a main method for improving the measurement precision.
The air-floating turntable uses an air-floating bearing as a supporting component and is provided with an electromechanical system for high-precision control, feedback and driving. Due to the homogenization effect of the air bearing, the high rotation precision can be achieved, and the high precision can be achieved generally, and the maximum precision can be up to 20nm, so that the air bearing is widely applied to a rotation platform of a roundness measuring instrument. In addition, because the air-float turntable is sensitive to the environment, the bearing and the rigidity are relatively low, and the axis error can also change due to the change of the installation load, the traditional scheme generally needs to be checked for accuracy by manufacturers after being used for a period of time; and it is difficult to verify after loading. In the practical use process, the consistency of measurement precision and calibration is difficult to ensure.
The current roundness measuring instrument uses a calibrated hemisphere as a measuring tool for detecting and checking an air-float turntable, and has the following defects: (1) In the prior art, in order to improve the roundness testing precision, the precision of the air-floating turntable needs to be always improved, so that the axis precision of the air-floating turntable is far greater than the measuring precision, and generally more than 10 times, namely, a roundness measuring instrument for testing the roundness of 200nm needs to be manufactured, and the air-floating turntable with the precision of below 20nm needs to be adopted. However, the hardware accuracy cannot be improved infinitely, and this scheme is particularly limited to the method for improving the accuracy. (2) In order to test the precision of the air-float turntable, the traditional method adopts a scheme of calibrating a hemisphere, namely, a high-precision hemisphere is used as a reference, a detection probe is used for detecting the reference hemisphere, and if the test result accords with the machining precision of the standard hemisphere, the standard hemisphere is considered to be qualified. The calibration accuracy of this calibration method is substantially dependent on standard hemispherical accuracy. Generally, the highest sphericity of the calibrating hemisphere can be 50nm, if the precision of the air-floating turntable is 20nm, the reliable calibrating precision of more than 50nm can still be achieved, and the waste of the precision of the air-floating turntable is caused. (3) The calibrated hemisphere is to reach the 50nm level, and the processing difficulty is extremely high and the price is high. (4) The axis precision of the air-float turntable can be changed according to the influences of the weight and the placement position of the workpiece, and the calibrated precision can be changed in the actual test, so that errors are generated.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide an air floatation turntable device for a roundness measuring instrument, and a calibration method and a measurement method thereof.
In order to achieve the above object, an embodiment of the present invention provides the following technical solution:
an air-floating turntable device for roundness measuring equipment, comprising:
a base;
the air-floating turntable comprises a fixed seat, a turntable rotor rotatably arranged in the fixed seat and a turntable table top rotating along with the turntable rotor, and the fixed seat is arranged on the base;
the sensor seat is arranged on the outer peripheral surface of the fixed seat in a circumferential direction, a first capacitance sensor, a second capacitance sensor and a third capacitance sensor are arranged on the sensor seat at intervals along the circumferential direction, and the first capacitance sensor, the second capacitance sensor and the third capacitance sensor face the outer circle of the turntable table top;
the motion mechanism comprises a vertical Z axis, a Z axis motion shaft sleeve arranged on the vertical Z axis and an X axis motion cross beam arranged on the Z axis motion shaft sleeve, and the vertical Z axis is arranged on the base;
and the detection probe is arranged on the X-axis moving cross beam.
The invention further comprises a data acquisition card and a controller, wherein the data acquisition card is respectively connected with the first capacitive sensor, the second capacitive sensor, the third capacitive sensor and the detection probe, and the controller is connected with the data acquisition card.
As a further improvement of the invention, gaps are arranged between the first capacitance sensor, the second capacitance sensor and the third capacitance sensor and the outer circle of the turntable table top.
As a further development of the invention, the first capacitive sensor, the second capacitive sensor and the third capacitive sensor are all located in the same plane.
As a further improvement of the invention, the sensor seat comprises a disc seat and a cylindrical part integrally connected with the disc seat, the disc seat is annularly arranged on the outer peripheral surface of the fixed seat, and the first capacitance sensor, the second capacitance sensor and the third capacitance sensor are all arranged on the cylindrical part.
As a further improvement of the invention, the roundness of the outer circle of the table top of the turntable is less than 0.2um.
The calibrating method of the air-float turntable device for the roundness measuring instrument, which uses the air-float turntable device for the roundness measuring instrument, comprises the following steps:
(1) Placing the part to be tested on the table top of the turntable;
(2) Controlling the Z-axis moving shaft sleeve and the X-axis moving beam to move, and driving the detection probe to move so that the detection probe contacts with the outer circle of the table top of the turntable;
(3) The table top of the turntable rotates at a constant speed;
(4) The first, second and third capacitance sensors respectively obtain data S1 (θ) 、S2 (θ) 、S3 (θ) Obtaining the axis error A of the turntable table top by utilizing a three-point method error separation algorithm (θ) Component u1 in the X-axis direction (θ) Roundness R of turntable mesa (θ) ；
(5) The detection probe obtains data T1 (θ) Through roundness measuring algorithm T1 (θ) ＝u1 (θ) +R’ (θ) I.e. R' (θ) ＝T1 (θ) -u1 (θ) Obtaining the roundness R 'of the table top of the turntable' (θ) ；
(6) Comparison of R' (θ) And R is R (θ) The difference δ, δ=r 'is obtained' (θ) -R (θ) If delta is smaller than or equal to the standard value, the method can be used continuously; if delta is larger than the standard value, R is used as (θ) Calibrating R 'as a reference roundness' (θ) 。
As a further improvement of the present invention, the central axis of the first capacitive sensor, the central axis of the second capacitive sensor, the central axis of the third capacitive sensor and the center of the head of the detection probe are on the same plane.
The measuring method of the air-float rotary table device for the roundness measuring instrument, which is used, comprises the following steps:
(1) Placing the part to be tested on the table top of the turntable;
(2) Controlling the Z-axis moving shaft sleeve and the X-axis moving beam to move, and driving the detection probe to move so that the detection probe contacts the outer circle of the part to be detected;
(3) The table top of the turntable rotates at a constant speed;
(4) The first, second and third capacitance sensors respectively obtain data S1 (θ) 、S2 (θ) 、S3 (θ) Axis error A of turntable table top is measured by using three-point method error separation algorithm (θ) Component u1 in the X-axis direction (θ) ；
(5) The detection probe obtains data T2 (θ) Through roundness measuring algorithm T2 (θ) ＝u1 (θ) +Rc (θ) Rc is then (θ) ＝T2 (θ) -u1 (θ) Thereby obtaining the roundness Rc of the measured part (θ) 。
As a further improvement of the present invention, in the step (3), the rotation speed of the turntable surface is 6rpm.
The beneficial effects of the invention are as follows:
(1) Compared with the traditional hemispherical calibration method, the roundness calibration standard is obtained by the method, namely, the excircle roundness of the table surface of the turntable is obtained through a three-point method error separation algorithm to serve as the standard roundness calibration function, so that whether the precision of a roundness measurement system is changed is calibrated, and the problem that the traditional roundness instrument cannot calibrate in real time is solved.
(2) The method is based on an algorithm of three-point method error separation, and the roundness of the measured part can be directly calculated by the algorithm through real-time test of the axis precision, and the precision is extremely high and can reach 1nm level due to the fact that the precision depends on the precision of each capacitive sensor, so that the whole test precision is improved in magnitude.
(3) The structure for realizing three-point error separation is integrated on the air floatation turntable, can be used for measuring according to working conditions in real time, and the measured data are used for calibration and testing in real time, so that the obtained data are more in line with actual use conditions, and the air floatation turntable has the characteristics of instantaneity and in-situ detection, and is high in testing precision and more accurate and more reliable in data.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present invention, and other drawings may be obtained according to the drawings without inventive effort to those skilled in the art.
Fig. 1 is a schematic structural view of an air-floating turntable device according to a preferred embodiment of the present invention;
FIG. 2 is a top view of a preferred embodiment of the present invention;
FIG. 3 is a simplified schematic diagram of FIG. 2;
FIG. 4 is a cross-sectional view of an air bearing turret apparatus for real-time reference roundness calibration in accordance with a preferred embodiment of the present invention;
FIG. 5 is a cross-sectional view of an air bearing turret apparatus for roundness measurement of a part under test in accordance with a preferred embodiment of the present invention;
in the figure: 1. the device comprises a base, 2, an air floatation turntable, 21, a fixed seat, 22, a turntable rotor, 23, a turntable table top, 231, an outer circle, 24, a turntable motor, 25, a turntable grating, 26, a turntable bearing, 3, a sensor seat, 31, a first capacitance sensor, 32, a second capacitance sensor, 33, a third capacitance sensor, 34, a disc seat, 35, a cylindrical part, 4, a movement mechanism, 41, a vertical Z axis, 42, a Z axis movement shaft sleeve, 43, an X axis movement beam, 5, a detection probe, 51, a head, 6, a data acquisition card, 7, a controller, 8 and a measured part.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
Referring to fig. 1, an embodiment of the present application discloses an air-floating turntable device for roundness measuring equipment, including: a base 1; the air-floating rotary table 2, the air-floating rotary table 2 comprises a fixed seat 21, a rotary table rotor 22 rotatably arranged in the fixed seat 21 and a rotary table top 23 rotating along with the rotary table rotor 22, and the fixed seat 21 is arranged on the base 1; the sensor seat 3 is circumferentially arranged on the outer peripheral surface of the fixed seat 21, and a first capacitance sensor 31, a second capacitance sensor 32 and a third capacitance sensor 33 are circumferentially arranged on the sensor seat 3 at intervals, and the first capacitance sensor 31, the second capacitance sensor 32 and the third capacitance sensor 33 face the outer circle 231 of the turntable table top 23; the motion mechanism 4, the motion mechanism 4 comprises a vertical Z axis 41, a Z axis motion shaft sleeve 42 arranged on the vertical Z axis 41 and an X axis motion cross beam 43 arranged on the Z axis motion shaft sleeve 42, and the vertical Z axis 41 is arranged on the base 1; the detection probe 5. The detection probe 5 is mounted on the X-axis moving beam 43.
The fixed seat 21 is fixed, a turntable motor 24, a turntable grating 25 and a turntable bearing 26 are arranged in the fixed seat 21, the turntable motor 24 is used for driving the turntable rotor 22 to rotate so as to drive the turntable table surface 23 to rotate, the turntable grating 25 is used for collecting rotation position and angle information of the turntable table surface 23, and the turntable bearing 26 ensures stable rotation of the turntable rotor 22.
In order to facilitate data acquisition and processing, the device further comprises a data acquisition card 6 and a controller 7, wherein the data acquisition card 6 is respectively connected with the first capacitive sensor 31, the second capacitive sensor 32, the third capacitive sensor 33 and the detection probe 5, and the controller 7 is connected with the data acquisition card 6.
Preferably, gaps are formed between the first capacitive sensor 31, the second capacitive sensor 32 and the third capacitive sensor 33 and the outer circle 231 of the turntable table top 23, so that the first capacitive sensor 31, the second capacitive sensor 32 and the third capacitive sensor 33 can collect data conveniently, and the accuracy of the data is improved.
Preferably, the first capacitive sensor 31, the second capacitive sensor 32 and the third capacitive sensor 33 are all located on the same plane, so that the same outer circle of the turntable table surface 23 detected by the first capacitive sensor 31, the second capacitive sensor 32 and the third capacitive sensor 33 is ensured, and the accuracy of detection data is improved.
The sensor seat 3 includes a disc seat 34 and a cylindrical portion 35 integrally connected to the disc seat 34, the disc seat 34 is circumferentially disposed on the outer peripheral surface of the fixing seat 21, and the first capacitive sensor 31, the second capacitive sensor 32, and the third capacitive sensor 33 are all disposed on the cylindrical portion 35.
In order to secure the relevant detection accuracy, it is preferable that the roundness of the outer circle 231 of the turntable mesa 23 is less than or equal to 0.2um.
Preferably, the detection probe 5 is a contact type inductive sensor.
As shown in fig. 2, which is a top view of the present embodiment, the first capacitive sensor 31, the second capacitive sensor 32, and the third capacitive sensor 33 are arranged around the turntable surface 23 of the air-floating turntable 2 at three points. The angle between the first capacitive sensor 31 and the second capacitive sensor 32 is α, and the angle between the first capacitive sensor 31 and the third capacitive sensor 33 is β. The projection of the detection probe 5 on the X-axis is located on the line connecting the first capacitive sensor 31 and the center of the turntable mesa 23.
During operation, the part 8 to be measured is placed on the turntable table surface 23 of the air flotation turntable 2, the turntable motor 24 drives the turntable rotor 22 to rotate, the turntable rotor 22 drives the turntable table surface 23 to rotate, the first capacitance sensor 31 collects position information of the first capacitance sensor 31 and the outer circle 231 of the turntable table surface 23 of the air flotation turntable 2, the second capacitance sensor 32 collects position information of the second capacitance sensor 32 and the outer circle 231 of the turntable table surface 23 of the air flotation turntable 2, the third capacitance sensor 33 collects position information of the third capacitance sensor 33 and the outer circle 231 of the turntable table surface 23 of the air flotation turntable 2, the information is transmitted to the data acquisition card 6 in real time, the data acquisition card 6 receives the information and transmits the information to the controller 7, and data processing is performed in the controller 7. When the detection probe 5 works, the Z-axis moving shaft sleeve 42 can move along the vertical Z-axis 41, the X-axis moving beam 43 can move along the Z-axis moving shaft sleeve 42, then the X-axis moving beam 43 drives the detection probe 5 to move along the X-axis direction, the detection probe 5 is sent to a working position through the cooperation of the movement along the Z-axis direction and the X-axis direction, the working position is the outer circle 231 of the turntable table surface 23 or the outer circle of the part 8 to be detected, the detection probe 5 collects the position information of the detection probe 5 and the outer circle 231 of the turntable table surface 23 or the outer circle of the part 8 to be detected, the collected information is also transmitted to the controller 7 through the data collection card 6, and the controller 7 carries out data processing according to a related algorithm.
Fig. 3 is a simplified version of the structure of fig. 2, with the outer circle 231 of the turret table 23 being shown as an oval (actually a complex curve) for ease of illustration.
As shown in fig. 3, O is an ideal axis, a standard pitch circle is drawn by taking O as a center of a circle as a reference, the coordinates of the center of the circle O and X, Y form a basic coordinate system, and θ is the rotation angle of the turntable surface 23. The first capacitive sensor 31 and the detection probe 5 are both on the X-axis.
The distance between the description with O as the center of a circle and the outer circle 231 of the turntable surface 23 is R (θ) R as θ changes (θ) The formed curve is marked as a roundness curve; o (O) 1 Is the instantaneous rotation center, O 1 The connection line relative to O is A (θ) . As θ changes, A (θ) The resulting curve is noted as an axis error curve, A (θ) Projection on X-axis is u1 (θ) ，A (θ) Projection on Y-axis as u2 (θ) The method comprises the steps of carrying out a first treatment on the surface of the The data obtained by the first capacitive sensor 31 is denoted as S1 (θ) The second capacitive sensor 32 obtains a data record S2 (θ) The data obtained by the third capacitive sensor 33 is denoted S3 (θ) The angle between the first capacitive sensor 31 and the second capacitive sensor is α, and the angle between the first capacitive sensor 31 and the third capacitive sensor 33 is β.
According to the theory of error separation, when the roundness is error, u1 (θ) 、u2 (θ) When the error is small, the method accords with the small deviation theory, and the specific definition is shown in the technology of precise ultra-precise in-situ detection and error separation. When the rotation angle of the turntable tabletop 23 is θ, the data collected by the first capacitive sensor 31, the second capacitive sensor 32, and the third capacitive sensor 33 at the same time can be described as:
S1 (θ) ＝ R (θ) + u1 (θ) the method comprises the steps of carrying out a first treatment on the surface of the 1 (1)
S2 (θ) ＝ R (θ+α) + u1 (θ) cosα+u2 (θ) sin alpha; 2, 2
S3 (θ) ＝ R (θ-β) + u1 (θ) cosβ-u2 (θ) sin beta; 3
The three equations of equations 1, 2 and 3 are weighted and added to obtain:
S (θ) ＝S1 (θ) +C 1 *S2 (θ) +C 2 *S3 (θ) ＝R (θ) +C 1 *R (θ+α) +C 2 *R (θ-β) ；
the weighting coefficient is C 1 ＝-sinβ/sin(α+β)，C 2 ＝-sinα/sin(α+β)；
Sampling interval is delta theta, and sampling point number per week is N=2 n ＝2π/△θ；
The sensor angle α is: m1=α/Δθ;
the sensor angle beta is: m2=β/Δθ;
the method can be obtained after discretizing the above steps:
S (n) ＝R (n) +C 1 *R (n+m1) +C 2 *R (n-m2) ；
writing the above equation into a linear equation set form:
ar=s; wherein A is a coefficient matrix, R is roundness R (n) In the form of a matrix, S is S (n) Is a matrix form of (a);
by matrix operation, r=a + S, S; 4. The method is to
Thereby obtaining R (n) The specific calculation process is not described in detail.
Then u1 can be obtained according to equation 1 (n) ＝S (n) -R (n) The method comprises the steps of carrying out a first treatment on the surface of the 5. The method is to
Thus, by algebraic transformation, u1 (θ) 、R (θ) 、A (θ) Wherein due to u1 (θ) Is the axis error A (θ) Projection on X-axis can be obtained by inverse trigonometric relation by u1 (θ) Obtaining A (θ) 。
It can be seen that the measurement principle of the three-point error separation algorithm is that the axis error A of the turntable table 23 can be obtained by three capacitance sensors (θ) Component u1 in the X-axis direction (θ) Roundness R of outer circle 231 of turntable tabletop 23 (θ) 。
As shown in fig. 4, a cross-sectional view of the roundness calibration of the roundness measuring apparatus by the air-floating turntable device is shown. The invention also provides a method for calibrating the real-time reference roundness by using the air-floating turntable device. Since the outer circle 231 of the turntable table surface 23 can be used for measuring the roundness R by adopting a three-point method error separation algorithm (θ) The air-floating turntable device is provided with a roundness reference, so that the air-floating turntable device can be used for calibrating whether the roundness value measured by the detection probe 5 is accurate or not. The calibration method comprises the following steps:
(1) The part 8 to be tested is placed on the turret table top 23. Therefore, real-time measurement can be performed, and measurement accuracy is improved.
Specifically, the part 8 to be measured may be clamped and fixed to the center portion of the turntable tabletop 23.
(2) The Z-axis moving shaft sleeve 42 and the X-axis moving cross beam 43 are controlled to move to drive the detection probe 5 to move, so that the detection probe 5 contacts the outer circle 231 of the turntable table 23.
Specifically, the controller 7 controls the Z-axis moving shaft sleeve 42 to move along the Z-axis direction, and the X-axis moving beam 43 moves along the X-axis direction relative to the Z-axis moving shaft sleeve 42, so as to drive the detection probe 5 to move, so that the central axis of the first capacitive sensor 31, the central axis of the second capacitive sensor 32, the central axis of the third capacitive sensor 33, and the center of the head 51 of the detection probe 5 are on the same plane, and measurement accuracy is further improved.
(3) The turntable tabletop 23 rotates at a constant speed.
Specifically, the turntable motor 24 rotates to drive the turntable rotor 22 to rotate, and the turntable rotor 22 drives the turntable table top 23 to rotate at a constant speed, and the rotating speed is 6rpm.
(4) The first, second, third, and third capacitance sensors 31, 32, 33 respectively obtain data S1 (θ) 、S2 (θ) 、S3 (θ) Obtaining the axis error A of the turntable table surface 23 by using a three-point method error separation algorithm (θ) Component u1 in the X-axis direction (θ) Roundness R of turntable mesa 23 (θ) 。
(5) The detection probe 5 obtains data T1 (θ) Through roundness measuring algorithm T1 (θ) ＝u1 (θ) +R’ (θ) I.e. R' (θ) ＝T1 (θ) -u1 (θ) Obtaining the roundness R 'of the turntable mesa 23' (θ) 。
When the roundness of the detection probe 5 is measured, the roundness of the turntable surface 23 and the axis of the turntable surface 23 change to change the displacement value of the detection probe 5, and the measuring direction is in the X-axis direction, so that the data T1 obtained by the detection probe 5 (θ) Including axis error a of turntable tabletop 23 (θ) Component u1 in the X-axis direction (θ) Roundness R 'of turret table top 23' (θ) T1 is (θ) ＝u1 (θ) +R’ (θ) Whereas the above-mentioned demonstration uses a three-point method error separation algorithm to measure the axis error A (θ) Component u1 in the X-axis direction (θ) Roundness R 'of the turntable mesa 23' (θ) ＝T1 (θ) -u1 (θ) The roundness R 'of the turntable mesa 23 is obtained precisely by numerical calculation' (θ) 。
(6) Comparison of R' (θ) And R is R (θ) The difference δ, δ=r 'is obtained' (θ) -R (θ) If delta is smaller than or equal to the standard value, the method can be used continuously; if delta is larger than the standard value, R is used as (θ) Calibrating R 'as a reference roundness' (θ) 。
Because the accuracy of the measurement of the capacitance sensor and the three-point method error separation algorithm is higher, R is used (θ) Calibration R' (θ) . When δ is less than or equal to a standard value, which is set according to measurement requirements, such as 20nm, it is indicated that the roundness value measured by the detection probe 5 is accurate, and the relevant parameters can be used in the subsequent measurement process. When delta is larger than the standard value, R is used in the roundness measuring instrument (θ) Calibrating R 'as a reference roundness' (θ) To the measured R (θ) The data is true, and the values in the roundness measuring instrument are used for compensation, such as difference compensation or spline fitting.
As shown in fig. 5, a sectional view of roundness measurement by the air-floating turntable device for roundness measuring equipment is shown. The invention also provides a measuring method for measuring the roundness of the high-precision part by using the air-floating turntable device, which comprises the following steps:
(1) The part 8 to be tested is placed on the turret table top 23. Therefore, real-time measurement can be performed, and measurement accuracy is improved.
Specifically, the part 8 to be measured may be clamped and fixed to the center portion of the turntable tabletop 23.
(2) The Z-axis moving shaft sleeve 42 and the X-axis moving cross beam 43 are controlled to move to drive the detection probe 5 to move, so that the detection probe 5 contacts with the outer circle of the part 8 to be detected.
Specifically, the controller 7 controls the Z-axis moving shaft sleeve 42 to move in the Z-axis direction, and the X-axis moving beam 43 moves in the X-axis direction relative to the Z-axis moving shaft sleeve 42, thereby driving the detection probe 5 to move so that the detection probe 5 contacts the outer circumference of the part 8 to be detected.
(3) The turntable tabletop 23 rotates at a constant speed.
Specifically, the turntable motor 24 rotates to drive the turntable rotor 22 to rotate, and the turntable rotor 22 drives the turntable table top 23 to rotate at a constant speed, and the rotating speed is 6rpm.
(4) The first capacitance sensor 31, the second capacitance sensor 32, and the third capacitance sensor 33 are respectively obtainedData S1 (θ) 、S2 (θ) 、S3 (θ) The axis error A of the turntable table surface 23 is measured by using a three-point method error separation algorithm (θ) Component u1 in the X-axis direction (θ) ；
(5) The detection probe 5 obtains data T2 (θ) Through roundness measuring algorithm T2 (θ) ＝u1 (θ) +Rc (θ) Rc is then (θ) ＝T2 (θ) -u1 (θ) Thereby obtaining the roundness Rc of the measured part (θ) 。
When the roundness measurement is performed by the detection probe 5, the roundness of the measured part 8 and the axis of the turntable table 23 change to cause the displacement value of the detection probe 5 to change, and the measurement direction is in the X-axis direction, so that the data T2 obtained by the detection probe 5 (θ) Including axis error a of turntable tabletop 23 (θ) Component u1 in the X-axis direction (θ) Roundness Rc of measured part 8 (θ) T2, i.e (θ) ＝u1 (θ) +Rc (θ) Whereas the above-mentioned demonstration uses a three-point method error separation algorithm to measure the axis error A (θ) Component u1 in the X-axis direction (θ) Roundness Rc of the measured part 8 (θ) ＝T2 (θ) -u1 (θ) Therefore, the roundness Rc of the measured part 8 can be obtained accurately by numerical calculation (θ) . Rather than the conventional method, u1 is difficult to be used (θ) Separation and solving, so u1 needs to be made (θ) Far smaller than Rc (θ) To give u1 (θ) Neglecting, the traditional roundness measuring instrument has very high precision requirements on the air floatation turntable.
According to the invention, through the combination of the air-floating turntable device for the roundness measuring instrument and the three-point method error separation algorithm, two scenes of loss precision of a common roundness measuring instrument are optimized, and the first scene is as follows: calibrating the rotation center of the air-float turntable; the second scene, because the air supporting revolving stage precision that does not have accurate axis information to lead to when the air supporting revolving stage is measured is extravagant, have following advantage:
1. compared with the traditional hemispherical calibration method, the roundness calibration standard is provided, namely, the excircle roundness of the table surface of the turntable is obtained through a three-point method error separation algorithm to serve as the standard, and whether the precision of the roundness measuring instrument system is changed is calibrated.
2. The method is based on a three-point method error separation algorithm, the roundness of the measured part can be directly calculated by the algorithm, and the precision is extremely high and can reach the level of 1 nm.
3. The three-point error separation algorithm structure is integrated on the air floatation turntable, the measurement can be performed in real time according to working conditions, the measured data are used for calibration and testing in real time, and compared with a traditional roundness measuring instrument, the obtained data are more in line with actual use conditions, and the three-point error separation algorithm structure has the characteristics of real-time performance and in-situ detection.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (10)
1. An air-floating rotary table device for roundness measuring equipment, comprising:
a base;
the air-floating turntable comprises a fixed seat, a turntable rotor rotatably arranged in the fixed seat and a turntable table top rotating along with the turntable rotor, and the fixed seat is arranged on the base;
the sensor seat is arranged on the outer peripheral surface of the fixed seat in a circumferential direction, a first capacitance sensor, a second capacitance sensor and a third capacitance sensor are arranged on the sensor seat at intervals along the circumferential direction, and the first capacitance sensor, the second capacitance sensor and the third capacitance sensor face the outer circle of the turntable table top;
the motion mechanism comprises a vertical Z axis, a Z axis motion shaft sleeve arranged on the vertical Z axis and an X axis motion cross beam arranged on the Z axis motion shaft sleeve, and the vertical Z axis is arranged on the base;
and the detection probe is arranged on the X-axis moving cross beam.
2. The air-floating turntable device for roundness measuring equipment according to claim 1, further comprising a data acquisition card and a controller, wherein the data acquisition card is respectively connected with the first capacitance sensor, the second capacitance sensor, the third capacitance sensor and the detection probe, and the controller is connected with the data acquisition card.
3. The air-floating turntable device for roundness measuring equipment according to claim 1, wherein gaps are formed between the first capacitance sensor, the second capacitance sensor and the third capacitance sensor and the outer circle of the turntable surface.
4. The air-floating turntable device for roundness measuring equipment according to claim 1, wherein the first capacitance sensor, the second capacitance sensor, and the third capacitance sensor are all located on the same plane.
5. The air-floating turntable device for roundness measuring equipment according to claim 1, wherein the sensor base includes a disk base and a cylindrical portion integrally formed with the disk base, the disk base is circumferentially provided on an outer peripheral surface of the fixing base, and the first capacitance sensor, the second capacitance sensor, and the third capacitance sensor are all provided on the cylindrical portion.
6. The air-floating turntable device for roundness measuring equipment according to claim 1, wherein the roundness of the outer circle of the turntable surface is less than 0.2um.
7. A method for calibrating an air-floating turntable device for roundness measuring equipment, characterized by using the air-floating turntable device for roundness measuring equipment according to any one of claims 1 to 6, comprising the steps of:
(1) Placing the part to be tested on the table top of the turntable;
(2) Controlling the Z-axis moving shaft sleeve and the X-axis moving beam to move, and driving the detection probe to move so that the detection probe contacts with the outer circle of the table top of the turntable;
(3) The table top of the turntable rotates at a constant speed;
(4) The first, second and third capacitance sensors respectively obtain data S1 (θ) 、S2 (θ) 、S3 (θ) Obtaining the axis error A of the turntable table top by utilizing a three-point method error separation algorithm (θ) Component u1 in the X-axis direction (θ) Roundness R of turntable mesa (θ) ；
(5) The detection probe obtains data T1 (θ) Through roundness measuring algorithm T1 (θ) ＝u1 (θ) +R’ (θ) I.e. R' (θ) ＝T1 (θ) -u1 (θ) Obtaining the roundness R 'of the table top of the turntable' (θ) ；
(6) Comparison of R' (θ) And R is R (θ) The difference δ, δ=r 'is obtained' (θ) -R (θ) If delta is smaller than or equal to the standard value, the method can be used continuously; if delta is larger than the standard value, R is used as (θ) Calibrating R 'as a reference roundness' (θ) 。
8. The method for calibrating an air-floating turret device for a roundness measuring apparatus according to claim 7, wherein the center axes of the first, second, third, and detection probes are on the same plane.
9. A measurement method of an air-floating turntable device for roundness measuring equipment, characterized by using the air-floating turntable device for roundness measuring equipment according to any one of claims 1 to 6, comprising the steps of:
(1) Placing the part to be tested on the table top of the turntable;
(2) Controlling the Z-axis moving shaft sleeve and the X-axis moving beam to move, and driving the detection probe to move so that the detection probe contacts the outer circle of the part to be detected;
(3) The table top of the turntable rotates at a constant speed;
(4) The first, second and third capacitance sensors respectively obtain data S1 (θ) 、S2 (θ) 、S3 (θ) Axis error A of turntable table top is measured by using three-point method error separation algorithm (θ) Component u1 in the X-axis direction (θ) ；
(5) The detection probe obtains data T2 (θ) Through roundness measuring algorithm T2 (θ) ＝u1 (θ) +Rc (θ) Rc is then (θ) ＝T2 (θ) -u1 (θ) Thereby obtaining the roundness Rc of the measured part (θ) 。
10. The method for measuring an air-floating turret device for roundness measuring equipment according to claim 9, wherein in the step (3), the rotation speed of the turret table top is 6rpm.
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| CN202310333189.5A CN116428963A (en) | 2023-03-31 | 2023-03-31 | Air-floating rotary table device for roundness measuring instrument, calibration method and measurement method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310333189.5A CN116428963A (en) | 2023-03-31 | 2023-03-31 | Air-floating rotary table device for roundness measuring instrument, calibration method and measurement method thereof |
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