CN116418309A - Impedance matching method of impedance matching circuit - Google Patents
Impedance matching method of impedance matching circuit Download PDFInfo
- Publication number
- CN116418309A CN116418309A CN202111681685.7A CN202111681685A CN116418309A CN 116418309 A CN116418309 A CN 116418309A CN 202111681685 A CN202111681685 A CN 202111681685A CN 116418309 A CN116418309 A CN 116418309A
- Authority
- CN
- China
- Prior art keywords
- impedance
- capacitance
- path
- impedance matching
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 59
- 238000001514 detection method Methods 0.000 claims abstract description 54
- 239000003990 capacitor Substances 0.000 claims description 93
- 238000010586 diagram Methods 0.000 description 10
- 230000001225 therapeutic effect Effects 0.000 description 7
- 230000003071 parasitic effect Effects 0.000 description 4
- 230000001939 inductive effect Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 2
- 238000002560 therapeutic procedure Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
- Y02D30/00—Reducing energy consumption in communication networks
- Y02D30/70—Reducing energy consumption in communication networks in wireless communication networks
Landscapes
- Networks Using Active Elements (AREA)
Abstract
The invention provides an impedance matching method of an impedance matching circuit, which is characterized in that a control module adjusts the impedance of an adjustable impedance matching module to an initial value, an impedance detection module performs impedance detection, the difference between the detection result of the impedance detection module and the initial value is used as the impedance of a load, the required impedance of the adjustable impedance matching module can be calculated according to the preset system impedance and the impedance of the load, and the control module adjusts the impedance of the adjustable impedance matching module to the required impedance, so that the impedance between a radio frequency output module and the load is matched, and even if the impedance of the load is changed, the impedance of the adjustable impedance matching module can be readjusted, the radio frequency reflected power can be effectively reduced, the radio frequency energy is kept to be maximized, and meanwhile, the service life and the safety of the circuit are ensured.
Description
Technical Field
The present invention relates to the field of electronic circuits, and in particular, to an impedance matching method for an impedance matching circuit.
Background
The impedance matching circuit is generally connected between the radio frequency power supply and the load, and if the impedance between the radio frequency power supply and the load is not matched in the process of transmitting the radio frequency signal to the load, part of energy is reflected, so that the radio frequency energy cannot be utilized to the maximum extent, and the efficiency of the circuit is reduced; in addition, the larger reflected power may also cause damage to the circuit. Therefore, reducing the radio frequency reflected power through the impedance matching network is important in the impedance matching circuit.
Currently, when the impedance matching network is used for matching, the impedance of the load is generally considered to be fixed, and the impedance of the impedance matching network is adjusted by the fixed load impedance, so that the impedance of the impedance matching network is also fixed. However, in some situations, for example, when the impedance matching circuit is applied to the rf therapeutic apparatus, the load is a human body, during the treatment using the rf therapeutic apparatus, the impedance of the load changes due to different patients or different treatment sites, even the impedance of the load changes due to heat generated by the same treatment site of the same patient during the treatment, so that the impedance matching network with fixed impedance cannot effectively reduce the rf reflected power when the impedance of the load changes, and thus cannot keep the rf energy to be maximized, and the life and safety of the circuit are also or threatened.
Disclosure of Invention
The invention aims to provide an impedance matching method of an impedance matching circuit, which aims to solve the problems that the existing impedance matching circuit cannot keep the maximum radio frequency energy when the impedance of a load changes, the service life of the circuit is short, the safety is low and the like.
In order to achieve the above object, the present invention provides an impedance matching method of an impedance matching circuit, where the impedance matching circuit is connected between a radio frequency output module and a load, and includes a control module, an impedance detection module, and an adjustable impedance matching module, where the radio frequency output module, the impedance detection module, the adjustable impedance matching module, and the load are sequentially connected, and the method includes:
The control module adjusts the impedance of the adjustable impedance matching module to an initial value, and the impedance detection module detects the impedance;
taking the difference value between the detection result of the impedance detection module and the initial value as the impedance of the load;
calculating according to a preset system impedance and the impedance of the load to obtain the required impedance of the adjustable impedance matching module; the method comprises the steps of,
the control module adjusts the impedance of the adjustable impedance matching module to the required impedance to match the impedance between the radio frequency output module and the load.
Optionally, the imaginary part of the system impedance is 0.
Optionally, the adjustable impedance matching module includes a first impedance adjustment path, a second impedance adjustment path i, and a second impedance adjustment path ii;
two ends of the first impedance adjustment path are respectively connected with the impedance detection module and the load;
one end of the second impedance adjustment path I is connected between the first impedance adjustment path and the impedance detection module, and the other end of the second impedance adjustment path I is grounded; the method comprises the steps of,
one end of the second impedance adjusting path II is connected between the first impedance adjusting path and the load, and the other end of the second impedance adjusting path II is grounded.
Optionally, when the real part of the impedance of the load is greater than the real part of the system impedance, the step of calculating the required impedance of the adjustable impedance matching module according to the system impedance and the impedance of the load includes:
setting the reactance of the second impedance adjustment path I to infinity; the method comprises the steps of,
and calculating the reactance of the first impedance adjustment path and the reactance of the second impedance adjustment path II according to the system impedance and the impedance of the load.
Optionally, the reactance of the first impedance adjustment path and the reactance of the second impedance adjustment path ii are calculated according to the system impedance and the impedance of the load by using the following method:
wherein X is c Adjusting the reactance of path ii for said second impedance; x is X a Adjusting the reactance of the path for said first impedance; z is Z N -providing said system impedance; r is R Negative pole Is the real part of the impedance of the load; x is X Negative pole An imaginary part of an impedance of the load; delta 1 And delta 2 Is a reactance correction coefficient.
Optionally, the first impedance adjustment path includes a capacitor unit and an inductor unit connected in series, the second impedance adjustment path i and the second impedance adjustment path ii each include a capacitor unit, and capacitance values of the capacitor units in the first impedance adjustment path, the second impedance adjustment path i and the second impedance adjustment path ii are adjustable;
After the required impedance of the adjustable impedance matching module is obtained according to the system impedance and the impedance of the load, the required capacitance of all the capacitance units is obtained according to the required impedance of the adjustable impedance matching module and the frequency of the radio frequency output module; the method comprises the steps of,
the control module adjusts the capacitance values of all the capacitance units to the corresponding required capacitance values so as to adjust the impedance of the adjustable impedance matching module to the required impedance.
Optionally, the required capacitance values of all the capacitor units are calculated according to the required impedance of the adjustable impedance matching module and the frequency of the radio frequency output module by using the following method:
C b ＝0；
wherein ω is the frequency of the rf output module; c (C) a Adjusting a required capacitance value of a capacitance unit in the first impedance path; c (C) b The required capacitance value of the capacitor unit in the path I is adjusted for the second impedance; c (C) c The required capacitance value of the capacitor unit in the path I is adjusted for the second impedance; l (L) a And adjusting the inductance value of the inductance unit in the path for the first impedance.
Optionally, when the real part of the impedance of the load is smaller than the real part of the system impedance, the step of calculating the required impedance of the adjustable impedance matching module according to the system impedance and the impedance of the load includes:
Setting the reactance of the second impedance adjustment path II to infinity; the method comprises the steps of,
and calculating the reactance of the first impedance adjustment path and the reactance of the second impedance adjustment path I according to the system impedance and the impedance of the load.
Optionally, the reactance of the first impedance adjustment path and the reactance of the second impedance adjustment path i are calculated according to the system impedance and the impedance of the load by the following method:
wherein X is b Adjusting the reactance of path i for said second impedance; x is X a Adjusting the reactance of the path for said first impedance; z is Z N -providing said system impedance; r is R Negative pole Is the real part of the impedance of the load; x is X Negative pole An imaginary part of an impedance of the load; delta 3 And delta 4 Is a reactance correction coefficient.
Optionally, the first impedance adjustment path includes a capacitor unit and an inductor unit connected in series, the second impedance adjustment path i and the second impedance adjustment path ii each include a capacitor unit, and capacitance values of the capacitor units in the first impedance adjustment path, the second impedance adjustment path i and the second impedance adjustment path ii are adjustable;
after the required impedance of the adjustable impedance matching module is obtained according to the system impedance and the impedance of the load, the required capacitance of all the capacitance units is obtained according to the required impedance of the adjustable impedance matching module and the frequency of the radio frequency output module; the method comprises the steps of,
The control module adjusts the capacitance values of all the capacitance units to the corresponding required capacitance values so as to adjust the impedance of the adjustable impedance matching module to the required impedance.
Optionally, the required capacitance values of all the capacitor units are calculated according to the required impedance of the adjustable impedance matching module and the frequency of the radio frequency output module by using the following method:
C c ＝0；
wherein ω is the frequency of the rf output module; c (C) a Adjusting a required capacitance value of a capacitance unit in the first impedance path; c (C) b The required capacitance value of the capacitor unit in the path I is adjusted for the second impedance; c (C) c The required capacitance value of the capacitor unit in the second impedance adjusting path II is adjusted; l (L) a And adjusting the inductance value of the inductance unit in the path for the first impedance.
Optionally, when the required capacitance value of the capacitor unit is greater than the corresponding maximum capacitance value, the control module adjusts the capacitance value of the capacitor unit to the corresponding maximum capacitance value.
Optionally, the capacitor unit is an adjustable vacuum motor capacitor.
Optionally, the capacitance unit includes at least two parallel capacitance adjustment paths, each capacitance adjustment path includes a second switch unit and a capacitance connected in series, and the control module adjusts the capacitance value of the capacitance unit by controlling the opening and closing of each second switch unit.
Optionally, the capacitance adjustment paths have n, the capacitance value of the capacitance in the j+1th capacitance adjustment path is 2 times the capacitance value of the capacitance in the j th capacitance adjustment path, j is 1-n-1, and the step of adjusting the capacitance values of all the capacitance units to the corresponding required capacitance values by the control module includes:
dividing the required capacitance value of the capacitor unit by the capacitance value of the capacitor in the first capacitor adjustment path to obtain a control word; the method comprises the steps of,
and converting the control word into binary numbers, wherein the control module outputs n level signals to control the opening and closing of the second switch units of the n capacitance adjustment paths respectively, and the level values of the level signals corresponding to the first to n-th capacitance adjustment paths are binary values corresponding to the low bits to the high bits of the binary numbers respectively.
The impedance matching method of the impedance matching circuit provided by the invention has the following beneficial effects:
1) The control module adjusts the impedance of the adjustable impedance matching module to an initial value, the impedance detection module detects the impedance, the difference between the detection result of the impedance detection module and the initial value is used as the impedance of the load, the required impedance of the adjustable impedance matching module can be calculated according to the preset system impedance and the impedance of the load, the control module adjusts the impedance of the adjustable impedance matching module to the required impedance, the impedance between the radio frequency output module and the load is enabled to be matched, even if the impedance of the load is changed, the impedance of the adjustable impedance matching module can be readjusted, radio frequency reflected power can be effectively reduced, radio frequency energy is kept to be maximized, and meanwhile the service life and the safety of the circuit are guaranteed.
2) The imaginary part of the system impedance is 0, and only the reactance part of the impedance of the adjustable impedance matching module is required to be adjusted, so that the adjustment method is simpler and more flexible.
3) The adjustable impedance matching module comprises a first impedance adjusting passage, a second impedance adjusting passage I and a second impedance adjusting passage II, one end of the second impedance adjusting passage I is connected between the first impedance adjusting passage and the impedance detecting module, the other end of the second impedance adjusting passage II is grounded, one end of the second impedance adjusting passage II is connected between the first impedance adjusting passage and the load, the other end of the second impedance adjusting passage II is grounded, the first impedance adjusting passage, the second impedance adjusting passage I and the second impedance adjusting passage II form a pi-shaped structure, the form is more flexible, and the situation that the real part impedance is larger than the system impedance (such as 50 omega) or smaller than the system impedance can be matched.
4) All the capacitance units can be adjustable vacuum motor capacitances; the control module can continuously adjust the capacitance value of the capacitor unit, and has higher adjustment precision, wider range and simpler structure.
5) The capacitance unit can comprise at least two capacitance adjusting paths which are connected in parallel, each capacitance adjusting path comprises a switch unit and a capacitance which are connected in series, and the control module can adjust the capacitance value of the capacitance unit by controlling the opening and closing of each second switch unit; the cost is lower than when using an adjustable vacuum motor capacitor.
6) The capacitance value of the capacitance in the (j+1) th capacitance adjustment passage is 2 times of the capacitance value of the capacitance in the (j) th capacitance adjustment passage, so that the capacitance value adjustment range of the capacitance unit is wider, and meanwhile, the second switch unit is easier to control, and the capacitance value adjustment is more accurate.
Drawings
Fig. 1 is a block diagram of an impedance matching circuit according to a first embodiment of the present invention;
fig. 2 is a block diagram of an adjustable impedance matching module according to a first embodiment of the present invention;
fig. 3 is a circuit diagram of an adjustable impedance matching module according to a first embodiment of the present invention;
fig. 4 is a flowchart of an impedance matching method of an impedance matching circuit according to a first embodiment of the present invention;
fig. 5a is a circuit diagram of an inductance unit according to a second embodiment of the present invention;
fig. 5b is a circuit diagram of a capacitor unit according to a second embodiment of the present invention;
wherein, the reference numerals are as follows:
100-a control module; 200-a radio frequency output module; 300-an impedance detection module; 400-an adjustable impedance matching module; 401-a first impedance adjustment path; 402 a-a second impedance adjustment path i; 402 b-a second impedance adjustment path ii; 500-load;
c1, C2, C3, C11, C12, C1 n-capacitance; l1, L11, L12, L1 m-inductance; k11, K12 … K1 m-first switching unit; k21, K22 … K2 m-second switching unit.
Detailed Description
Specific embodiments of the present invention will be described in more detail below with reference to the drawings. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the invention.
Example 1
Fig. 1 is a block diagram of an impedance matching circuit according to the present embodiment. As shown in fig. 1, the impedance matching circuit is connected between the rf output module 200 and the load 500. The impedance matching circuit includes a control module 100, an impedance detection module 300, and an adjustable impedance matching module 400. The radio frequency output module 200, the impedance detection module 300, the adjustable impedance matching module 400 and the load 500 are sequentially connected, and the control module 100 is connected with the impedance detection module 300 and the adjustable impedance matching module 400. The rf output module 200 is configured to output an rf signal, the impedance detecting module 300 is configured to detect an impedance of the load 500, and the control module 100 may adjust the impedance of the adjustable impedance matching module 400 according to a detection result of the impedance detecting module 300, so as to match the impedance between the rf output module 200 and the load 500.
In this embodiment, the impedance matching circuit is applied to a radio frequency therapeutic apparatus, the load 500 is a human body, and in the therapeutic process using the radio frequency therapeutic apparatus, the impedance of the load 500 can be changed by different patients or different therapeutic parts, and even the impedance of the load 500 can be changed due to heating of the same therapeutic part of the same patient in the therapeutic process. Therefore, the impedance detection module 300 may detect the impedance of the load 500, and the control module 100 may adjust the impedance of the adjustable impedance matching module 400 according to the detection result of the impedance detection module 300, and even if the impedance of the load 500 changes, the impedance of the adjustable impedance matching module 400 may be readjusted, so that the rf reflected power may be effectively reduced, the rf energy may be kept to be maximized, and the life and safety of the circuit may be ensured.
It should be appreciated that the impedance matching circuit is not limited to use in the rf therapeutic apparatus, but may be used in any other possible application.
Alternatively, the impedance detection module 300 may be any existing circuit or device capable of impedance detection, and will not be explained here.
Fig. 2 is a block diagram of an adjustable impedance matching module 400 according to the present embodiment. As shown in fig. 2, the adjustable impedance matching module 400 includes a first impedance adjustment path 401 and two second impedance adjustment paths i and ii, which are a second impedance adjustment path i 402a and a second impedance adjustment path ii 402b, respectively. Wherein, two ends of the first impedance adjustment path 401 are respectively connected to the impedance detection module 300 and the load 500; one end of the second impedance adjustment path i 402a is connected between the first impedance adjustment path 401 and the impedance detection module 300, and the other end is grounded; one end of the second impedance adjusting path ii 402b is connected between the first impedance adjusting path 401 and the load 500, and the other end is grounded.
Further, the first impedance adjustment path 401 includes a capacitance unit and an inductance unit connected in series, and the capacitance value of the capacitance unit and/or the inductance value of the inductance unit in the first impedance adjustment path 401 are/is adjustable. The second impedance adjustment path i 402a and the second impedance adjustment path ii 402b include a capacitance unit or an inductance unit, and when the second impedance adjustment path i 402a and the second impedance adjustment path ii 402b include a capacitance unit, the capacitance values of the capacitance units in the second impedance adjustment path i 402a and the second impedance adjustment path ii 402b are adjustable; when the second impedance adjustment path i 402a and the second impedance adjustment path ii 402b include an inductance unit, inductance values of the inductance unit in the second impedance adjustment path i 402a and the second impedance adjustment path ii 402b are adjustable. The control module 100 may adjust the impedance of the adjustable impedance matching module 400 by adjusting the capacitance of the capacitive element or the inductance of the inductive element in the first impedance adjustment path 401 and by adjusting the capacitance of the capacitive element or the inductance of the capacitive element in the second impedance adjustment path i 402a and the second impedance adjustment path ii 402b, such that the sum of the impedance of the adjustable impedance matching module 400 and the impedance of the load 500 detected by the impedance detection module 300 matches the output impedance of the radio frequency output module 200.
Fig. 3 is a circuit diagram of an adjustable impedance matching module 400 according to the present embodiment. As shown in fig. 3, in this embodiment, the capacitance unit of the first impedance adjustment path 401 is a capacitance C1, the inductance unit of the first impedance adjustment path 401 is an inductance L1, the capacitance C1 and the inductance L1 are connected in series, the capacitance C1 is an adjustable vacuum motor capacitance, and the inductance L1 is a constant value inductance. The second impedance adjustment path i 402a and the second impedance adjustment path ii 402b each include a capacitor unit, the capacitor unit of the second impedance adjustment path i 402a is a capacitor C2, the capacitor unit of the second impedance adjustment path ii 402b is a capacitor C3, and the capacitor C2 and the capacitor C3 are both adjustable vacuum motor capacitors.
Further, since the capacitor C1, the capacitor C2 and the capacitor C3 are all adjustable vacuum motor capacitors, the control module 100 can continuously adjust the capacitance values of the capacitor C1, the capacitor C2 and the capacitor C3, so as to change the impedance of the adjustable impedance matching module 400, and the adjustable impedance matching module has higher adjustment precision, wider range and simpler structure. The first impedance adjustment path 401, the second impedance adjustment path i 402a, and the second impedance adjustment path ii 402b form a pi-type structure, which is more flexible and can match a case where the real impedance is greater than a predetermined system impedance (e.g., 50Ω) or less than a predetermined system impedance.
As an alternative embodiment, the inductance L1 may be a mechanically sliding adjustable inductance, the capacitance C1 is a constant capacitance, and the control module 100 may adjust the impedance of the adjustable impedance matching module 400 by adjusting the inductance value of the inductance L1, the capacitance values of the capacitance C2 and the capacitance C3.
As an alternative embodiment, the inductance L1 may be a mechanically sliding adjustable inductance, the capacitance C1 may also be an adjustable vacuum motor capacitance, and the control module 100 may adjust the impedance of the adjustable impedance matching module 400 by adjusting the inductance value of the inductance L1, the capacitance values of the capacitance C1, the capacitance C2 and the capacitance C3.
As an alternative embodiment, the capacitance units of the second impedance adjustment path i 402a and the second impedance adjustment path ii 402b may be replaced by inductance units, for example: the inductance units of the second impedance adjustment path i 402a and the second impedance adjustment path ii 402b may be mechanically sliding adjustable inductances, and the control module 100 adjusts the impedance of the adjustable impedance matching module 400 by adjusting the capacitance value of the capacitor C1 and the inductance value of the mechanically sliding adjustable inductances in the second impedance adjustment path i 402a and the second impedance adjustment path ii 402 b.
As an alternative embodiment, the second impedance adjustment path i 402a and the second impedance adjustment path ii 402b may also include a capacitance unit and an inductance unit, which are not described herein.
Based on this, the embodiment also provides an impedance matching method of the impedance matching circuit. The impedance matching circuit is described in detail above and will not be described in detail here. Fig. 4 is a flowchart of an impedance matching method of the impedance matching circuit according to the present embodiment, as shown in fig. 4, where the impedance matching method of the impedance matching circuit includes:
step S100: the control module adjusts the impedance of the adjustable impedance matching module to an initial value, and the impedance detection module detects the impedance;
step S200: taking the difference between the detection result of the impedance detection module and the initial value as the impedance of the load 500;
step S300: calculating according to a preset system impedance and the impedance of the load to obtain the required impedance of the adjustable impedance matching module; the method comprises the steps of,
step S400: the control module adjusts the impedance of the adjustable impedance matching module to the required impedance to match the impedance between the radio frequency output module and the load.
Specifically, referring to fig. 1 and 2, step S100 is first performed, where the control module 100 adjusts the impedance of the adjustable impedance matching module 400 to an initial value, where the initial value may be 0 or not 0, which is not limited in this embodiment.
Next, the impedance detection module 300 performs impedance detection, where the impedance detection module 300 may extract an incident signal and a reflected signal in a radio frequency loop, calculate an amplitude ratio and a phase difference of the incident signal and the reflected signal, and calculate a detection result according to the amplitude ratio and the phase difference of the incident signal and the reflected signal. It should be noted that the detection result of the impedance detection circuit 300 is actually the sum of the impedance of the adjustable impedance matching module 400 and the impedance of the load 500.
In this embodiment, the inverse of the amplitude ratio detected by the impedance detection module 300 may be compared with a threshold, and if the inverse of the amplitude ratio is smaller than the threshold, it indicates that the reflectivity in the rf loop is small, and impedance matching is not required; otherwise, if the reciprocal of the amplitude ratio is greater than or equal to the threshold, it indicates that the reflectivity in the radio frequency loop is greater and impedance matching is required.
When it is determined that impedance matching is required, step S200 is performed, and a difference between the detection result of the impedance detection module 300 and the initial value is used as the impedance of the load 500. If the initial value is 0, the detection result of the impedance detection module 300 may be regarded as the impedance of the load 500, and if the initial value is not equal to 0, the impedance of the load 500 may be obtained by subtracting the initial value from the detection result of the impedance detection module 300.
Next, step S300 is performed to calculate the required impedance of the adjustable impedance matching module 400 according to the system impedance and the impedance of the load 500. In this embodiment, the imaginary part of the system impedance is 0, so that only the reactance part of the impedance of the adjustable impedance matching module 400 needs to be adjusted, and the adjustment method is simpler and more flexible. For example, the system impedance may be 40 Ω to 60 Ω, preferably 50 Ω.
Further, when the real part of the impedance of the load 500 is greater than the real part of the system impedance, the reactance of the second impedance adjustment path i 402a is set to infinity when the required impedance of the adjustable impedance matching module 400 is calculated according to the system impedance and the impedance of the load 500, and then the reactance of the first impedance adjustment path 401 and the reactance of the second impedance adjustment path ii 402b are calculated according to the system impedance and the impedance of the load 500.
Specifically, the reactance of the first impedance adjustment path 401 and the second impedance adjustment path ii 402b is calculated according to the system impedance and the impedance of the load 500 by the following method:
wherein X is c Adjusting the reactance of path ii 402b for said second impedance; x is X a Adjusting the reactance of the path 401 for the first impedance; z is Z N -providing said system impedance; r is R Negative pole Is the real part of the impedance of the load 500; x is X Negative pole Is the imaginary part of the impedance of the load 500; delta 1 And delta 2 Delta as reactance correction factor (influence of resistance, parasitic inductance and parasitic capacitance in circuit) 1 And delta 2 Can be obtained by a practical calibration mode.
As a result, the reactance X of the first impedance adjustment path 401 a And reactance X of the second impedance adjustment path ii 402b c I.e., the required impedance of the adjustable impedance matching module 400.
Further, the reactance X of the first impedance adjustment path 401 is calculated according to the system impedance and the impedance of the load 500 a And reactance X of the second impedance adjustment path ii 402b c Then, the reactance X of the path 401 is also adjusted according to the first impedance a And reactance X of the second impedance adjustment path ii 402b c And the frequency of the rf output module 200 is calculated to obtain the reactance X of the first impedance adjustment path 401 a And the required capacitance of the capacitive element in the second impedance adjustment path ii 402 b. Specifically, the reactance X of the first impedance adjustment path 401 a Reactance X of the second impedance adjustment path ii 402b c And the frequency of the rf output module 200 is calculated by the following method to obtain the required capacitance values of the capacitive units in the first impedance adjustment path 401 and the second impedance adjustment path ii 402 b:
wherein ω is the frequency of the rf output module 200; c (C) a A required capacitance value for the capacitor unit in the first impedance adjustment path 401; c (C) c Adjusting the required capacitance of the capacitor unit in the second impedance adjustment path ii 402 b; l (L) a The inductance of the inductive element in the path 401 is adjusted for the first impedance.
Since the reactance of the second impedance adjustment path I402 a is set to infinity, the required capacitance C of the capacitive element of the second impedance adjustment path I402 a b ＝0。
Next, the control module 100 adjusts the capacitance values of all the capacitor units to the corresponding required capacitance values, so that the impedance of the adjustable impedance matching module 400 is adjusted to the required impedance. As shown in fig. 3, due to the capacitance in the first impedance adjustment path 401 The unit is a capacitor C1, and the inductance unit in the first impedance adjusting path 401 is an inductance L1 (L a The inductance value of the inductance L1), the capacitance unit of the second impedance adjustment path i 402a is a capacitance C2, the capacitance unit of the second impedance adjustment path ii 402b is a capacitance C3, the capacitance C1, the capacitance C2 and the capacitance C3 are all adjustable vacuum motor capacitances, and the control module 100 can directly adjust the capacitance value of the capacitance C1 to be C a The control module 100 adjusts the capacitance of the capacitor C2 to 0, and the control module 100 adjusts the capacitance of the capacitor C3 to C c 。
It can be appreciated that, when the required capacitance value of the capacitor unit is greater than the corresponding maximum capacitance value, the control module 100 adjusts the capacitance value of the capacitor unit to the corresponding maximum capacitance value. Specifically, when C a When the capacitance value of the capacitor C1 is larger than the maximum value of the capacitance value of the capacitor C1, the capacitance value of the capacitor C1 cannot be made equal to C no matter how the capacitance value of the capacitor C1 is adjusted a Therefore, the control module 100 can adjust the capacitance of the capacitor C1 to its maximum value, so as to make the capacitance of the capacitor C1 and the capacitance of C as much as possible a Proximity.
Further, when the real part of the impedance of the load 500 is smaller than the real part of the system impedance, the reactance of the second impedance adjustment path ii 402b is set to infinity when the required impedance of the adjustable impedance matching module 400 is calculated according to the system impedance and the impedance of the load 500, and then the reactance of the first impedance adjustment path 401 and the reactance of the second impedance adjustment path i 402a are calculated according to the system impedance and the impedance of the load 500.
Specifically, the reactance of the first impedance adjustment path 401 and the second impedance adjustment path i 402a is calculated from the system impedance and the impedance of the load 500 by the following method:
wherein X is b Adjusting the reactance of path i 402a for said second impedance; x is X a Adjusting the reactance of the path 401 for the first impedance; z is Z N -providing said system impedance; r is R Negative pole Is the real part of the impedance of the load 500; x is X Negative pole Is the imaginary part of the impedance of the load 500; delta 3 And delta 4 Delta as reactance correction factor (influence of resistance, parasitic inductance and parasitic capacitance in circuit) 3 And delta 4 Can be obtained by a practical calibration mode.
As a result, the reactance X of the first impedance adjustment path 401 a And reactance X of the second impedance adjustment path I402 a b I.e., the required impedance of the adjustable impedance matching module 400.
Further, the reactance X of the first impedance adjustment path 401 is calculated according to the system impedance and the impedance of the load 500 a And reactance X of the second impedance adjustment path I402 a b Then, the reactance X of the path 401 is also adjusted according to the first impedance a And reactance X of the second impedance adjustment path I402 a b And the frequency of the rf output module 200 is calculated to obtain the reactance X of the first impedance adjustment path 401 a And the required capacitance of the capacitive element in the second impedance adjustment path i 402 a. Specifically, the reactance X of the first impedance adjustment path 401 a Reactance X of the second impedance adjustment path i 402a b And the frequency of the rf output module 200 is calculated by the following method to obtain the required capacitance values of the capacitive units in the first impedance adjustment path 401 and the second impedance adjustment path i 402 a:
wherein ω is the frequency of the rf output module 200; c (C) a A required capacitance value for the capacitor unit in the first impedance adjustment path 401; c (C) b Adjusting a required capacitance of the capacitor unit in the path I402 a for the second impedance; l (L) a The inductance of the inductive element in the path 401 is adjusted for the first impedance.
Since the reactance of the second impedance adjustment path ii 402b is set to infinity, the required capacitance C of the capacitor unit of the second impedance adjustment path ii 402b c ＝0。
Next, the control module 100 adjusts the capacitance values of all the capacitor units to the corresponding required capacitance values, so that the impedance of the adjustable impedance matching module 400 is adjusted to the required impedance. As shown in fig. 3, since the capacitance unit in the first impedance adjustment path 401 is a capacitance C1, the inductance unit in the first impedance adjustment path 401 is an inductance L1 (L a The inductance value of the inductance L1), the capacitance unit of the second impedance adjustment path i 402a is a capacitance C2, the capacitance unit of the second impedance adjustment path ii 402b is a capacitance C3, the capacitance C1, the capacitance C2 and the capacitance C3 are all adjustable vacuum motor capacitances, and the control module 100 can directly adjust the capacitance value of the capacitance C1 to be C a The control module 100 adjusts the capacitance of the capacitor C2 to C b The control module 100 adjusts the capacitance value of the capacitor C3 to 0.
It can be appreciated that, when the required capacitance value of the capacitor unit is greater than the corresponding maximum capacitance value, the control module 100 adjusts the capacitance value of the capacitor unit to the corresponding maximum capacitance value. Specifically, when C b When the capacitance value of the capacitor C2 is larger than the maximum value of the capacitance value of the capacitor C2, the capacitance value of the capacitor C2 cannot be made equal to C no matter how the capacitance value of the capacitor C2 is adjusted b Therefore, the control module 100 can adjust the capacitance of the capacitor C1 to its maximum value, so as to make the capacitance of the capacitor C1 and the capacitance of C as much as possible b Proximity.
Example two
Fig. 5a is a circuit diagram of an inductance unit according to the present embodiment, and fig. 5b is a circuit diagram of a capacitance unit according to the present embodiment. As shown in fig. 5a and 5b, the difference from the first embodiment is that in this embodiment, at least part of the inductance unit and the capacitance unit may be replaced by the circuit structures shown in fig. 5a and 5 b. The price is less expensive than using a mechanically sliding adjustable inductance or adjustable vacuum motor capacitance.
Specifically, the inductance unit includes at least two series-connected inductances, each inductance is connected in parallel with a first switch unit, and the control module 100 adjusts the inductance value of the inductance unit by controlling the opening and closing of each first switch unit. As shown in FIG. 5a, the inductance unit has m (m is greater than or equal to 2) inductances, the m inductances are inductance L11 and inductance L12 … inductance L1m respectively, inductance L11 and inductance L12 … inductance L1m are connected in series, the inductance L11 is connected in parallel with a first switch unit K11, the inductance L12 is connected in parallel with a first switch unit K12 …, and the inductance L1m is connected in parallel with a first switch unit K1m. As long as the first switching unit is closed, the corresponding inductance thereof is shorted, and thus, the control module 100 may change the inductance value of the inductance unit by controlling the opening and closing of the first switching unit K11, the first switching unit K12, …, and the first switching unit K1m.
Further, the inductance value of the (i+1) th inductor is f times of the inductance value of the (i) th inductor, i is more than or equal to 1 and less than or equal to m-1, and f is more than or equal to 2. For example: the inductance value of the inductor L12 is 2 times the inductance value of the inductor L11. The inductance value of the inductance L11, the inductance L12 … and the inductance L1m is increased in an equal ratio series. In this way, the inductance value adjustment range of the inductance unit is wider.
In this embodiment, f=2, the first switch units K11, K12 and …, the first switch unit K1m is easier to control, and the inductance value is more accurate to adjust.
Specifically, the capacitance unit includes at least two capacitance adjustment paths connected in parallel, each capacitance adjustment path includes a second switch unit and a capacitance connected in series, and the control module 100 adjusts the capacitance value of the capacitance unit by controlling the opening and closing of each second switch unit. As shown in FIG. 5b, the capacitance unit has n (n.gtoreq.2) capacitance adjustment paths, the first capacitance adjustment path includes a second switch unit K21 and a capacitance C11 connected in series, the second capacitance adjustment path includes a second switch unit K22 and a capacitance C12 … connected in series, and the nth capacitance adjustment path includes a second switch unit K2n and a capacitance C1n connected in series. As long as the second switch unit is turned off, the corresponding capacitance adjustment path is opened, so the control module 100 may change the capacitance value of the capacitance unit by controlling the second switch unit K21, the second switch unit K22, and the …, and the second switch unit K2n to be turned on or off.
Further, the capacitance adjustment paths are n, the capacitance value of the capacitance in the j+1th capacitance adjustment path is g times of the capacitance value of the capacitance in the j th capacitance adjustment path, 1.ltoreq.j.ltoreq.n-1, and g.ltoreq.2. For example: the capacitance of the capacitor C12 is g times the capacitance of the capacitor C11. The capacitance values of the capacitor C11 and the capacitor C12 … capacitor C1n are increased in an equal ratio array mode. In this way, the capacitance value of the capacitor unit has a wider adjustment range.
In this embodiment, g=2, the second switch units K21, K22 and … and the second switch unit K2n are easier to control, and the capacitance value is more accurate.
Specifically, if the capacitance value of the capacitor unit needs to be adjusted to the corresponding required capacitance value, the control word may be obtained by dividing the required capacitance value of the capacitor unit by the capacitance value of the capacitor in the first capacitor adjustment path; and then converting the control word into a binary number, wherein the control module 100 outputs n level signals to control the on/off of the second switch units of the n capacitance adjustment paths respectively, and the level values of the level signals corresponding to the first to n-th capacitance adjustment paths are binary values corresponding to the low bits to the high bits of the binary number.
For example, n=4 and g=2 of a certain capacitor unit, the capacitance values of the capacitors on the first to fourth capacitor adjusting paths are respectively 10pF, 20pF, 40pF and 80pF, and the required capacitance value is 80pF. Dividing 80pF by 10pF to obtain a control word 8; then, the control word 8 is converted into a binary number 1000, the second switch unit is a high-level switch, the control module 100 outputs 4 level signals to control the second switch units on the first to fourth capacitance adjustment paths, and the level values of the 4 level signals are respectively low level, low level and high level, so that the second switch units on the first to third capacitance adjustment paths are turned off, the second switch unit on the fourth capacitance adjustment path is turned on, and the capacitance value of the capacitance unit is equal to the capacitance value of the capacitance on the fourth capacitance adjustment path, namely 80pF, so that the capacitance value of the capacitance unit is adjusted to the required capacitance value.
In summary, in the impedance matching method of the impedance matching circuit provided by the embodiment of the invention, the control module adjusts the impedance of the adjustable impedance matching module to an initial value, the impedance detection module performs impedance detection, the difference between the detection result of the impedance detection module and the initial value is used as the impedance of the load, the required impedance of the adjustable impedance matching module can be calculated according to the preset system impedance and the impedance of the load, and the control module adjusts the impedance of the adjustable impedance matching module to the required impedance, so that the impedance between the radio frequency output module and the load is matched, and even if the impedance of the load is changed, the impedance of the adjustable impedance matching module can be readjusted, the radio frequency reflected power can be effectively reduced, the radio frequency energy is kept to be maximized, and meanwhile, the service life and the safety of the circuit are ensured.
Furthermore, the imaginary part of the system impedance is 0, and only the reactance part of the impedance of the adjustable impedance matching module is required to be adjusted, so that the adjustment method is simpler and more flexible.
Further, the adjustable impedance matching module comprises a first impedance adjusting path, a second impedance adjusting path I and a second impedance adjusting path II, one end of the second impedance adjusting path I is connected between the first impedance adjusting path and the impedance detecting module, the other end of the second impedance adjusting path II is grounded, one end of the second impedance adjusting path II is connected between the first impedance adjusting path and the load, the other end of the second impedance adjusting path II is grounded, the first impedance adjusting path, the second impedance adjusting path I and the second impedance adjusting path II form a pi-shaped structure, the form is more flexible, and the situation that the real part impedance is larger than the system impedance (such as 50Ω) or smaller than the system impedance can be matched.
Further, all of the capacitive units may be adjustable vacuum motor capacitances; the control module can continuously adjust the capacitance value of the capacitor unit, and has higher adjustment precision, wider range and simpler structure.
Further, the capacitance unit may include at least two capacitance adjustment paths connected in parallel, each capacitance adjustment path includes a switch unit and a capacitance connected in series, and the control module may adjust the capacitance value of the capacitance unit by controlling the opening and closing of each second switch unit; the cost is lower than when using an adjustable vacuum motor capacitor.
Further, the capacitance of the capacitor in the (j+1) th capacitance adjustment passage is 2 times of the capacitance of the capacitor in the (j) th capacitance adjustment passage, so that the capacitance adjustment range of the capacitor unit is wider, and meanwhile, the second switch unit is easier to control, and the capacitance adjustment is more accurate.
It should be noted that, in the present description, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different manner from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the system disclosed in the embodiment, the description is relatively simple because of corresponding to the method disclosed in the embodiment, and the relevant points refer to the description of the method section.
It should be further noted that although the present invention has been disclosed in the preferred embodiments, the above embodiments are not intended to limit the present invention. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art without departing from the scope of the technology, or the technology can be modified to be equivalent. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention.
It should be further understood that the terms "first," "second," "third," and the like in this specification are used merely for distinguishing between various components, elements, steps, etc. in the specification and not for indicating a logical or sequential relationship between the various components, elements, steps, etc., unless otherwise indicated.
It should also be understood that the terminology described herein is for the purpose of describing particular embodiments only, and is not intended to limit the scope of the present invention. It must be noted that, as used herein and in the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. For example, reference to "a step" or "an apparatus" means a reference to one or more steps or apparatuses, and may include sub-steps as well as sub-apparatuses. All conjunctions used should be understood in the broadest sense. And, the word "or" should be understood as having the definition of a logical "or" rather than a logical "exclusive or" unless the context clearly indicates the contrary. Furthermore, implementation of the methods and/or apparatus in embodiments of the invention may include performing selected tasks manually, automatically, or in combination.
Claims (15)
1. The impedance matching method of the impedance matching circuit is characterized in that the impedance matching circuit is connected between a radio frequency output module and a load and comprises a control module, an impedance detection module and an adjustable impedance matching module, wherein the radio frequency output module, the impedance detection module, the adjustable impedance matching module and the load are sequentially connected, and the method comprises the following steps:
the control module adjusts the impedance of the adjustable impedance matching module to an initial value, and the impedance detection module detects the impedance;
taking the difference value between the detection result of the impedance detection module and the initial value as the impedance of the load;
calculating according to a preset system impedance and the impedance of the load to obtain the required impedance of the adjustable impedance matching module; the method comprises the steps of,
the control module adjusts the impedance of the adjustable impedance matching module to the required impedance to match the impedance between the radio frequency output module and the load.
2. The impedance matching method of an impedance matching circuit according to claim 1, wherein an imaginary part of said system impedance is 0.
3. The impedance matching method of an impedance matching circuit according to claim 2, wherein the adjustable impedance matching module includes a first impedance adjustment path, a second impedance adjustment path i, and a second impedance adjustment path ii;
Two ends of the first impedance adjustment path are respectively connected with the impedance detection module and the load;
one end of the second impedance adjustment path I is connected between the first impedance adjustment path and the impedance detection module, and the other end of the second impedance adjustment path I is grounded; the method comprises the steps of,
one end of the second impedance adjusting path II is connected between the first impedance adjusting path and the load, and the other end of the second impedance adjusting path II is grounded.
4. The method of impedance matching of an impedance matching circuit as recited in claim 3, wherein when the real part of the impedance of the load is greater than the real part of the system impedance, the step of calculating a required impedance of the adjustable impedance matching module based on the system impedance and the impedance of the load comprises:
setting the reactance of the second impedance adjustment path I to infinity; the method comprises the steps of,
and calculating the reactance of the first impedance adjustment path and the reactance of the second impedance adjustment path II according to the system impedance and the impedance of the load.
5. The impedance matching method of an impedance matching circuit according to claim 4, wherein the reactance of said first impedance adjustment path and said second impedance adjustment path ii is calculated from the impedance of said system and the impedance of said load by:
Wherein X is c Adjusting the reactance of path ii for said second impedance; x is X a Adjusting the reactance of the path for said first impedance; z is Z N -providing said system impedance; r is R Negative pole Is the real part of the impedance of the load; x is X Negative pole An imaginary part of an impedance of the load; delta 1 And delta 2 Is a reactance correction coefficient.
6. The method of impedance matching of an impedance matching circuit according to claim 5, wherein the first impedance adjustment path includes a capacitance unit and an inductance unit connected in series, the second impedance adjustment path i and the second impedance adjustment path ii each include a capacitance unit, and the capacitance values of the capacitance units in the first impedance adjustment path, the second impedance adjustment path i, and the second impedance adjustment path ii are each adjustable;
after the required impedance of the adjustable impedance matching module is obtained according to the system impedance and the impedance of the load, the required capacitance of all the capacitance units is obtained according to the required impedance of the adjustable impedance matching module and the frequency of the radio frequency output module; the method comprises the steps of,
the control module adjusts the capacitance values of all the capacitance units to the corresponding required capacitance values so as to adjust the impedance of the adjustable impedance matching module to the required impedance.
7. The method of impedance matching of an impedance matching circuit according to claim 6, wherein the required capacitance of all the capacitor units is calculated according to the required impedance of the adjustable impedance matching module and the frequency of the rf output module by:
C b ＝0；
wherein ω is the frequency of the rf output module; c (C) a Adjusting a required capacitance value of a capacitance unit in the first impedance path; c (C) b The required capacitance value of the capacitor unit in the path I is adjusted for the second impedance; c (C) c The required capacitance value of the capacitor unit in the path I is adjusted for the second impedance; l (L) a And adjusting the inductance value of the inductance unit in the path for the first impedance.
8. The method of impedance matching of an impedance matching circuit as recited in claim 3, wherein when the real part of the impedance of the load is smaller than the real part of the system impedance, the step of calculating a required impedance of the adjustable impedance matching module according to the system impedance and the impedance of the load comprises:
setting the reactance of the second impedance adjustment path II to infinity; the method comprises the steps of,
and calculating the reactance of the first impedance adjustment path and the reactance of the second impedance adjustment path I according to the system impedance and the impedance of the load.
9. The impedance matching method of an impedance matching circuit according to claim 8, wherein the reactance of said first impedance adjustment path and said second impedance adjustment path i is calculated from the impedance of said system and the impedance of said load by:
wherein X is b Adjusting the reactance of path i for said second impedance; x is X a Adjusting the reactance of the path for said first impedance; z is Z N -providing said system impedance; r is R Negative pole Is the real part of the impedance of the load; x is X Negative pole An imaginary part of an impedance of the load; delta 3 And delta 4 Is a reactance correction coefficient.
10. The impedance matching method of an impedance matching circuit according to claim 9, wherein the first impedance adjustment path includes a capacitance unit and an inductance unit connected in series, the second impedance adjustment path i and the second impedance adjustment path ii each include a capacitance unit, and the capacitance values of the capacitance units in the first impedance adjustment path, the second impedance adjustment path i, and the second impedance adjustment path ii are each adjustable;
after the required impedance of the adjustable impedance matching module is obtained according to the system impedance and the impedance of the load, the required capacitance of all the capacitance units is obtained according to the required impedance of the adjustable impedance matching module and the frequency of the radio frequency output module; the method comprises the steps of,
The control module adjusts the capacitance values of all the capacitance units to the corresponding required capacitance values so as to adjust the impedance of the adjustable impedance matching module to the required impedance.
11. The method of impedance matching of an impedance matching circuit of claim 10, wherein the required capacitance of all the capacitor units is calculated according to the required impedance of the adjustable impedance matching module and the frequency of the rf output module by:
C c ＝0；
wherein ω is the frequency of the rf output module; c (C) a Adjusting a required capacitance value of a capacitance unit in the first impedance path; c (C) b The required capacitance value of the capacitor unit in the path I is adjusted for the second impedance; c (C) c The required capacitance value of the capacitor unit in the second impedance adjusting path II is adjusted; l (L) a And adjusting the inductance value of the inductance unit in the path for the first impedance.
12. The impedance matching method of any one of claims 6, 7, 10, 11, wherein the control module adjusts the capacitance of the capacitive unit to its corresponding maximum capacitance when the required capacitance of the capacitive unit is greater than its corresponding maximum capacitance.
13. The impedance matching method of an impedance matching circuit according to any one of claims 6, 7, 10, 11, wherein said capacitance unit is an adjustable vacuum motor capacitance.
14. The impedance matching method of any one of claims 6, 7, 10, 11, wherein the capacitance unit includes at least two capacitance adjustment paths connected in parallel, each of the capacitance adjustment paths including a second switching unit and a capacitance connected in series, and the control module adjusts a capacitance value of the capacitance unit by controlling an on-off of each of the second switching units.
15. The method of impedance matching of an impedance matching circuit according to claim 14, wherein said capacitance adjustment paths have n, the capacitance value of the capacitance in the j+1th one of said capacitance adjustment paths is 2 times the capacitance value of the capacitance in the j th one of said capacitance adjustment paths, 1+.j+.n-1, said step of the control module adjusting the capacitance values of all of said capacitance units to the corresponding required capacitance values includes:
dividing the required capacitance value of the capacitor unit by the capacitance value of the capacitor in the first capacitor adjustment path to obtain a control word; the method comprises the steps of,
and converting the control word into binary numbers, wherein the control module outputs n level signals to control the opening and closing of the second switch units of the n capacitance adjustment paths respectively, and the level values of the level signals corresponding to the first to n-th capacitance adjustment paths are binary values corresponding to the low bits to the high bits of the binary numbers respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111681685.7A CN116418309B (en) | 2021-12-29 | 2021-12-29 | Impedance matching method of impedance matching circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111681685.7A CN116418309B (en) | 2021-12-29 | 2021-12-29 | Impedance matching method of impedance matching circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116418309A true CN116418309A (en) | 2023-07-11 |
| CN116418309B CN116418309B (en) | 2024-02-02 |
Family
ID=87056953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111681685.7A Active CN116418309B (en) | 2021-12-29 | 2021-12-29 | Impedance matching method of impedance matching circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116418309B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117538615A (en) * | 2024-01-09 | 2024-02-09 | 深圳市瀚强科技股份有限公司 | Impedance detection circuit, impedance detection device, and impedance detection method |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1773848A (en) * | 2004-11-09 | 2006-05-17 | 株式会社大亨 | Impedance matching device |
| CN101263652A (en) * | 2005-09-12 | 2008-09-10 | 诺基亚公司 | Method and arrangement for adjusting an output impedance of a power amplifier |
| CN101291141A (en) * | 2007-04-19 | 2008-10-22 | 株式会社普来马特 | Resistance matching method and system for performing the method |
| CN101374381A (en) * | 2007-08-20 | 2009-02-25 | 清华大学 | Method and system for matching radio frequency impedance |
| US20120229228A1 (en) * | 2011-03-10 | 2012-09-13 | Harris Corporation | Mobile wireless communications device with adjustable impedance matching network and associated methods |
| US20120249259A1 (en) * | 2011-03-31 | 2012-10-04 | National Semiconductor Corporation | RF impedance detection using two point voltage sampling |
| CN103025041A (en) * | 2011-09-28 | 2013-04-03 | 中国科学院微电子研究所 | Radio frequency impedance matcher |
| CN103326685A (en) * | 2013-06-04 | 2013-09-25 | 湖南大学 | Radio-frequency antenna impedance self-adaption matching device and method with quantum algorithm applied |
| CN107508614A (en) * | 2017-09-12 | 2017-12-22 | 深圳市共进电子股份有限公司 | Control circuit and device for WIFI impedance matchings |
| CN108012401A (en) * | 2016-10-28 | 2018-05-08 | 北京北方华创微电子装备有限公司 | RF impedance matching process, adaptation and semiconductor processing device |
| CN108718199A (en) * | 2018-07-24 | 2018-10-30 | 广东电网有限责任公司 | Antenna self-adaptive impedance matching box and matching process |
| KR101989518B1 (en) * | 2018-04-24 | 2019-06-14 | 주식회사 뉴파워 프라즈마 | Virtual impedance auto matching box |
| US20200357610A1 (en) * | 2017-07-10 | 2020-11-12 | Reno Technologies, Inc. | Impedance matching network and method |
-
2021
- 2021-12-29 CN CN202111681685.7A patent/CN116418309B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1773848A (en) * | 2004-11-09 | 2006-05-17 | 株式会社大亨 | Impedance matching device |
| CN101263652A (en) * | 2005-09-12 | 2008-09-10 | 诺基亚公司 | Method and arrangement for adjusting an output impedance of a power amplifier |
| CN101291141A (en) * | 2007-04-19 | 2008-10-22 | 株式会社普来马特 | Resistance matching method and system for performing the method |
| CN101374381A (en) * | 2007-08-20 | 2009-02-25 | 清华大学 | Method and system for matching radio frequency impedance |
| US20120229228A1 (en) * | 2011-03-10 | 2012-09-13 | Harris Corporation | Mobile wireless communications device with adjustable impedance matching network and associated methods |
| US20120249259A1 (en) * | 2011-03-31 | 2012-10-04 | National Semiconductor Corporation | RF impedance detection using two point voltage sampling |
| CN103025041A (en) * | 2011-09-28 | 2013-04-03 | 中国科学院微电子研究所 | Radio frequency impedance matcher |
| CN103326685A (en) * | 2013-06-04 | 2013-09-25 | 湖南大学 | Radio-frequency antenna impedance self-adaption matching device and method with quantum algorithm applied |
| CN108012401A (en) * | 2016-10-28 | 2018-05-08 | 北京北方华创微电子装备有限公司 | RF impedance matching process, adaptation and semiconductor processing device |
| US20200357610A1 (en) * | 2017-07-10 | 2020-11-12 | Reno Technologies, Inc. | Impedance matching network and method |
| CN107508614A (en) * | 2017-09-12 | 2017-12-22 | 深圳市共进电子股份有限公司 | Control circuit and device for WIFI impedance matchings |
| KR101989518B1 (en) * | 2018-04-24 | 2019-06-14 | 주식회사 뉴파워 프라즈마 | Virtual impedance auto matching box |
| CN108718199A (en) * | 2018-07-24 | 2018-10-30 | 广东电网有限责任公司 | Antenna self-adaptive impedance matching box and matching process |
Non-Patent Citations (1)
| Title |
|---|
| 汪洪波;陈长琦;汪金新;: "真空射频阻抗自动匹配方法分析", 真空, no. 06, pages 56 - 60 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117538615A (en) * | 2024-01-09 | 2024-02-09 | 深圳市瀚强科技股份有限公司 | Impedance detection circuit, impedance detection device, and impedance detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116418309B (en) | 2024-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102474294B (en) | Apparatus for controlling impedance in adaptive tuning antenna circuit | |
| JP6607982B2 (en) | RF impedance detection using two-point voltage sampling | |
| EP0412568B1 (en) | Matching network and method for using same | |
| US8095085B2 (en) | Automatic antenna tuning unit for software-defined and cognitive radio | |
| US8306489B2 (en) | Circuit for a loop antenna and method for tuning | |
| CN116418309B (en) | Impedance matching method of impedance matching circuit | |
| JP4995735B2 (en) | Matching load mismatch in coupler-based amplifiers | |
| US20130147512A1 (en) | Adaptive termination | |
| WO2011054403A1 (en) | Impedance circuit and method for signal transformation | |
| JP2009543499A (en) | Adaptation of load line | |
| US11705863B2 (en) | Variable gain power amplifiers | |
| CN104333149B (en) | Tuning circuit, tuning methods and mode of resonance contactless power supply device | |
| WO2009024051A1 (en) | Method of realizing the impedance matching of rf and rf impedance matching system | |
| CN102664601A (en) | Self-adapting impedance matching module | |
| CN114448387B (en) | Method for adjusting impedance matching and impedance matching circuit | |
| CN112929002A (en) | Impedance matching adjusting method and device applied to radio frequency power supply | |
| GB2539714A (en) | Impedance matching circuitry | |
| US20080211598A1 (en) | On-chip impedance matching using a variable capacitor | |
| WO2019157768A1 (en) | Wireless power transfer system | |
| CN216649641U (en) | Impedance matching circuit | |
| CN116418308A (en) | Impedance matching circuit | |
| CN216649640U (en) | Impedance detection circuit and impedance matching circuit | |
| CN114499435A (en) | Impedance matching network adjusting method | |
| Porto et al. | Multivariable automatic compensation method for inductive power transfer system | |
| CN112491161A (en) | Wireless power transmission system compensation capacitance tuning method based on series compensation circuit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |