CN112929002A - Impedance matching adjusting method and device applied to radio frequency power supply - Google Patents
Impedance matching adjusting method and device applied to radio frequency power supply Download PDFInfo
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- CN112929002A CN112929002A CN202110162778.2A CN202110162778A CN112929002A CN 112929002 A CN112929002 A CN 112929002A CN 202110162778 A CN202110162778 A CN 202110162778A CN 112929002 A CN112929002 A CN 112929002A
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
Abstract
The application discloses an impedance matching adjusting method and device applied to a radio frequency power supply, wherein incoming and reflected waves between an impedance matching network and a load are collected, whether impedance is matched or not is judged according to the amplitudes and phase angles of the incoming waves and the reflected waves, if not, amplitude difference voltage and phase angle difference voltage are obtained, control signals are obtained according to the amplitude difference voltage and the phase angle difference voltage and are input to a controlled current source to obtain control current; the magnetic induction intensity of the magnetic core is increased by controlling the current, further the saturation degree of the magnetic core is increased, the effective magnetic conductivity of the magnetic core is influenced, the inductance value of the inductor wound on the magnetic core in the impedance matching network is changed, further the impedance of the impedance matching network is changed, and the technical problems that in the prior art, the impedance matching is realized by adopting a servo stepping motor or controlling the number of parallel capacitors to change the capacitance value in a matching box, the cost is high, the adjustable range is small, the adjusting process is not smooth enough, and the design requirement on the capacitance value is high are solved.
Description
Technical Field
The present disclosure relates to the field of impedance matching and adjusting technologies, and in particular, to an impedance matching and adjusting method and apparatus for a radio frequency power supply.
Background
The radio frequency power supply system comprises a radio frequency power supply, wherein the radio frequency power supply is a matched power supply of the plasma chamber and is applied to the fields of radio frequency sputtering, PECVD chemical vapor deposition, reactive ion etching and the like. Generally, the impedance of a nonlinear load in a plasma chamber is not equal to the constant output impedance of a radio frequency power supply, so that a severe impedance mismatch exists between the radio frequency power supply and the plasma chamber, a large reflected power exists on a transmission line, the power generated by the radio frequency power supply cannot be completely transmitted to the plasma chamber, and the power loss is large. In order to solve the problem, the impedance matching network in the rf power supply system needs to be adjusted so that the sum of the impedance matching network and the impedance of the nonlinear load in the plasma chamber is equal to the impedance of the rf power supply, thereby achieving impedance matching and achieving the maximum output power.
In the prior art, impedance matching is usually realized by changing a capacitance value in a matching box, and a servo stepping motor is commonly used for changing the distance between two polar plates of a capacitor so as to change the value of the capacitor, and the value of the capacitor is also changed by controlling the number of capacitors connected in parallel. The above adjusting mode has extremely high precision requirement on the servo stepping motor, and has high cost and small adjustable range; the adjustment process is not smooth enough by adopting the adjustment method of the parallel capacitor, and the design requirement on the capacitance value is higher.
Disclosure of Invention
The application provides an impedance matching adjusting method and device applied to a radio frequency power supply, and aims to solve the technical problems that in the prior art, a servo stepping motor or a control device for controlling the number of parallel capacitors is adopted to change a capacitance value in a matching box to realize impedance matching, the cost is high, the adjustable range is small, the adjusting process is not smooth enough, and the design requirement on the capacitance value is high.
In view of the above, a first aspect of the present application provides an impedance matching adjusting method applied to a radio frequency power supply, including:
s1, collecting incident waves and reflected waves between an impedance matching network and a load in the radio frequency power supply system;
s2, judging whether the impedance is matched according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, acquiring amplitude difference voltage and phase angle difference voltage, and if so, returning to the step S1;
s3, acquiring a control signal according to the amplitude difference voltage and the phase angle difference voltage, and inputting the control signal to a controlled current source to obtain a control current;
s4, increasing the magnetic induction intensity of the magnetic core in the control winding of the output end of the controlled current source through the control current, further increasing the saturation degree of the magnetic core, and influencing the effective magnetic conductivity of the magnetic core, so that the inductance value of the inductor wound on the magnetic core in the impedance matching network is changed, further changing the impedance of the impedance matching network, and returning to the step S1.
Optionally, the acquiring incident waves and reflected waves between the impedance matching network and the load in the radio frequency power supply system includes:
the method comprises the steps of collecting incident waves and reflected waves between an impedance matching network and a load in a radio frequency power supply system through two directional couplers, wherein the structure of each directional coupler is a three-winding transformer structure.
Optionally, whether impedance is matched is determined according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, an amplitude difference voltage and a phase angle difference voltage are obtained, and if yes, the step S1 is returned to, including:
and judging whether the impedance is matched or not through the amplitude and the phase angle of the incident wave and the reflected wave by the amplitude-phase measurement chip, if not, acquiring amplitude difference voltage and phase angle difference voltage through the amplitude-phase measurement chip, and if so, returning to the step S1.
Optionally, the controlled current source is composed of an operational amplifier, a resistor and a transistor.
The second aspect of the present application provides an impedance matching adjusting apparatus applied to a radio frequency power supply, including:
the acquisition unit is used for acquiring incident waves and reflected waves between an impedance matching network and a load in the radio frequency power supply system;
the judging unit is used for judging whether the impedance is matched or not according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, the amplitude difference voltage and the phase angle difference voltage are obtained, and if yes, the collecting unit is triggered;
the acquisition unit is used for acquiring a control signal according to the amplitude difference voltage and the phase angle difference voltage and inputting the control signal to a controlled current source to obtain a control current;
and the adjusting unit is used for increasing the magnetic induction intensity of the magnetic core in the control winding of the output end of the controlled current source through the control current so as to increase the saturation degree of the magnetic core and influence the effective magnetic conductivity of the magnetic core, so that the inductance value of the inductor wound on the magnetic core in the impedance matching network is changed, the impedance of the impedance matching network is further changed, and the acquisition unit is triggered.
Optionally, the collecting unit is specifically configured to:
the method comprises the steps of collecting incident waves and reflected waves between an impedance matching network and a load in a radio frequency power supply system through two directional couplers, wherein the structure of each directional coupler is a three-winding transformer structure.
Optionally, the determining unit is specifically configured to:
and judging whether the impedance is matched or not through an amplitude-phase measurement chip according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, acquiring amplitude difference voltage and phase angle difference voltage through the amplitude-phase measurement chip, and if so, triggering the acquisition unit.
Optionally, the controlled current source is composed of an operational amplifier, a resistor and a transistor.
According to the technical scheme, the method has the following advantages:
the application provides an impedance matching adjusting method applied to a radio frequency power supply, which comprises the following steps: s1, collecting incident waves and reflected waves between an impedance matching network and a load in the radio frequency power supply system; s2, judging whether the impedance is matched according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, acquiring amplitude difference voltage and phase angle difference voltage, and if so, returning to the step S1; s3, acquiring a control signal according to the amplitude difference voltage and the phase angle difference voltage, and inputting the control signal to a controlled current source to obtain a control current; s4, increasing the magnetic induction intensity of the magnetic core in the control winding of the output end of the controlled current source through controlling the current, further increasing the saturation degree of the magnetic core, and influencing the effective magnetic conductivity of the magnetic core, so that the inductance value of the inductor wound on the magnetic core in the impedance matching network is changed, further changing the impedance of the impedance matching network, and returning to the step S1.
According to the method, after incident waves and reflected waves are collected, whether impedance is matched or not is judged according to the amplitude values and phase angles of the incident waves and the reflected waves, if impedance is not matched, the obtained amplitude difference voltage and phase angle difference voltage are obtained, control signals of a controlled current source are obtained according to the amplitude difference voltage and the phase angle difference voltage, corresponding control currents are obtained, the magnetic saturation degree of a magnetic core is changed through the control currents, the inductance value of an inductor is changed, the impedance is changed through a method of changing the inductor, the total impedance of a load and an impedance matching network is consistent with input impedance, the purpose of impedance matching is achieved, the adjustable range is large, impedance adjustment is not needed to be carried out through a servo stepping motor and additional inductance and capacitance elements, cost is reduced, and accuracy of impedance adjustment is improved; this application is after changing impedance matching network's impedance, continue to gather incident wave and back wave signal, again according to the incident wave after the regulation and the amplitude of back wave, whether the impedance matches is judged to the phase angle, if still not match, then continue to adjust, form closed-loop control, the accommodation process is smooth, the quantity of having solved prior art adoption servo step motor or control parallel capacitor realizes impedance matching with the capacitance value that changes in the matching box, there is with high costs, adjustable range is little, and the accommodation process is smooth inadequately, the higher technical problem of design requirement to the capacitance value.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.
Fig. 1 is a schematic flowchart of an impedance matching adjustment method applied to a radio frequency power supply according to an embodiment of the present disclosure;
fig. 2 is a schematic circuit structure diagram of an impedance matching adjustment method applied to a radio frequency power supply according to an embodiment of the present disclosure;
fig. 3 is a schematic circuit diagram of a controlled current source according to an embodiment of the present disclosure;
FIG. 4 is a schematic diagram illustrating an example of the present application for varying inductance by varying magnetic saturation of a magnetic core;
FIG. 5 is a graph of the magnetization of a magnetic core according to an embodiment of the present application;
FIG. 6 shows an amplitude difference voltage V according to an embodiment of the present applicationMAGAnd phase angle difference voltage VPHSA trend graph of the change;
FIG. 7 is a graph illustrating the variation of the inductance with the variation of the control current according to an embodiment of the present disclosure;
fig. 8 is a schematic structural diagram of an impedance matching adjusting apparatus applied to a radio frequency power supply according to an embodiment of the present disclosure.
Detailed Description
The application provides an impedance matching adjusting method and device applied to a radio frequency power supply, and aims to solve the technical problems that in the prior art, a servo stepping motor or a control device for controlling the number of parallel capacitors is adopted to change a capacitance value in a matching box to realize impedance matching, the cost is high, the adjustable range is small, the adjusting process is not smooth enough, and the design requirement on the capacitance value is high.
In order to make the technical solutions of the present application better understood, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
For easy understanding, referring to fig. 1, an embodiment of an impedance matching adjusting method applied to a radio frequency power supply provided by the present application includes:
Since the transmission of radio frequency power is a wave process, when the impedances at the two ends of the line are not equal, the radio frequency wave will be reflected, thereby reducing the transmission efficiency. The embodiment of the application changes the impedance of various impedance matching networks (such as T-type, L-type and pi-type) in the radio frequency power supply system in a manner of changing the inductance, so that the total impedance of the load and the impedance matching network is consistent with the input impedance, and the purpose of impedance matching is further achieved. Specifically, in the embodiment of the present application, incident waves and reflected waves between an impedance matching network and a load in a radio frequency power supply system are collected through two directional couplers. The structure of the directional coupler is a three-winding transformer structure, and reference may be made to fig. 2.
And 102, judging whether the impedance is matched or not according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, acquiring amplitude difference voltage and phase angle difference voltage, and if so, returning to the step 101.
When the impedance is completely matched, no reflected wave exists on the line, the incident wave and the reflected wave collected by the directional coupler are the same (only the incident wave), and the amplitude-phase measurement chip calculates the amplitude difference voltage V according to the amplitudes and phase angles of the incident wave and the reflected waveMAGPhase angle difference voltage VPHSAre all 0, i.e. when the amplitude difference voltage VMAGPhase angle difference voltage VPHSIf the values are all 0, indicating impedance matching, the process returns to step 101 to continue to collect incident waves and reflected waves. When the amplitude difference voltage VMAGPhase angle difference voltage VPHSWhen the amplitudes are not 0, indicating that the impedances are not matched, acquiring the amplitude difference voltage and the phase angle difference voltage of the incident wave and the reflected wave, specifically converting the amplitude difference and the phase angle difference of the incident wave and the reflected wave into electric signals through an amplitude-phase measurement chip respectively to obtain the amplitude difference voltage VMAGPhase angle difference voltage VPHS. The specific calculation formula is as follows:
VMAG＝VSLPlog(VINA/VINB)；
VPHS＝VΦ[Φ(VINA)-Φ(VINB)]；
in the formula, VSLP、VΦFor the slope, V can be obtained from FIG. 6INA、VINBFor the amplitudes of incident wave and reflected wave, they are converted into dBm unit, phi (V)INA)、Φ(VINB) The phase angles of the incident wave and the reflected wave are respectively.
The amplitude and phase measuring chip has various options, and the AD8302 is preferably adopted in the embodiment of the application. Since the amplitude and phase measurement chip has a certain range limit on the intensity of the input signal, an attenuation network is connected between the directional coupler and the amplitude and phase measurement chip, referring to fig. 2, the attenuation network is used for reducing the signal intensity, for example, the amplitude and phase measurement chip AD8302 requires that the range of the input signal is-60-0 dBm, the input signal intensity is controlled in the range through the attenuation network, and the attenuation network has forms of T-type, pi-type and the like.
And 103, acquiring a control signal according to the amplitude difference voltage and the phase angle difference voltage, and inputting the control signal to the controlled current source to obtain a control current.
According to the embodiment of the application, the control voltage is calculated by the single chip microcomputer according to the amplitude difference voltage and the phase angle difference voltage to obtain the control signal Vctrl. The selectable models of the single-chip microcomputer include but are not limited to a 51 single-chip microcomputer, an STM32, an MSP430, a TMS single-chip microcomputer and the like.
The calculated control signal VctrlAs input of the controlled current source, so that the controlled current source generates a corresponding control current IctrlThe controlled current source is composed of an operational amplifier, a resistor and a transistor, and the specific structure can refer to fig. 3.
Wherein the current I is controlledctrlThe calculation formula of (2) is as follows:
Ictr1＝Vctr1/R。
since the total impedance of the load and the impedance matching network is not consistent with the input impedance, so that the line impedance is not matched, to realize the impedance matching, the total impedance of the load and the impedance matching network needs to be consistent with the input impedance, that is, the total impedance of the load and the impedance matching network needs to be consistent with the input impedanceWhen the impedance is to be adjusted, the change condition of the impedance is corresponding to the amplitude difference voltage and the phase angle difference voltage, the change range of the inductance can be determined according to the change condition of the impedance, the adjustment range of the control current can be further determined, and the control signal V can be determined through the control current calculation formulactrlThe adjustment range of (2).
In summary, in the process of adjusting the impedance to realize the impedance, the impedance changes by an amount that is reflected in the amplitude difference voltage and the phase angle difference voltage, and the amplitude difference voltage and the phase angle difference voltage have a corresponding relationship with the impedance change condition, so that the control signal V can be determined according to the amplitude difference voltage and the phase angle difference voltagectrlThe value of (a).
Assuming that the impedance variation range determined according to the amplitude difference voltage and the phase angle difference voltage further determines that the inductance variation range is Lmin～LmaxThe inductance variation range L can be obtained according to the subsequent calculation formula of the inductance value Lmin～LmaxAnd control current Ictr1Referring to FIG. 7, when the inductance is LmaxAt a corresponding control current Ictr1When the inductance value is L ═ 0minCorresponding to the maximum control current Ictr1＝Imax。
Assume that there is only one inductance in the impedance matching network and the load varies from Z50 Ω to Z50 + jwL1The inductance variation range needs to be maximized from LmaxChange to LminComplete matching can be achieved according to Ictr1The calculation formula can calculate the control voltage Vctrl。
It should be noted that the actual impedance matching network has various forms, such as L, T, and pi type, and the load variation situation is complicated, and the calculation process of the control voltage is only illustrated in the extreme case.
And 104, increasing the magnetic induction intensity of the magnetic core in the control winding at the output end of the controlled current source by controlling the current, further increasing the saturation degree of the magnetic core, and influencing the effective magnetic conductivity of the magnetic core, so that the inductance value of the inductor wound on the magnetic core in the impedance matching network is changed, further changing the impedance of the impedance matching network, and returning to the step 101.
In the embodiment of the application, the inductor in the impedance matching network is variable inductor, the inductor in the impedance matching network and the control winding of the controlled source output end are wound on the same magnetic core, and the control current Ictr1Entering the control winding increases the magnetic induction in the core, which enters the saturation state from the critical saturation state due to the magnetic induction change of the core, as can be seen in fig. 4. The magnetic saturation state of the magnetic core is changed, so that the operation interval of the magnetic core on the magnetization curve is moved from a linear region close to a critical point to a saturation region, the magnetic conductivity of the magnetic core is changed, and the purpose of changing the inductance value L is achieved.
Referring to FIG. 5, permeability is the slope of the magnetization curve when operating normally in the interval [ a, b ]]Magnetic permeability u1Larger, when the control current is added, the magnetic flux generated by the control current makes the motor run to the interval [ c, d ]]Magnetic permeability u at this time2And the inductance value is also changed because the inductance in the impedance matching network is also wound on the same core. When the inductance value L in the impedance matching network changes, the impedance Z in the impedance matching network also changes accordingly, which changes the impedance and affects the incident wave and the reflected wave. Wherein the inductance value L follows the control current Ictr1The variation process of (2) can be referred to the following formula:
wherein u is the magnetic core permeability, NctrlAnd NLThe number of turns of the control winding and the inductance winding, respectively, S and l the cross-sectional area of the magnetic core and the length of the magnetic circuit excluding the inductance winding, respectively, RmIs magnetic resistance.
After the impedance of the impedance matching network is changed, returning to the step 101 to collect the adjusted incident wave and reflected wave signals, judging whether the adjusted incident wave and reflected wave have a difference, if so, continuing to adjust to form closed-loop control, and the impedance matching adjustment process is smooth; the impedance matching adjustment is realized by changing the inductance value of the variable inductor, the accuracy and the reliability of the impedance adjustment are improved, the calculated amount is small, and the matching speed is high.
According to the embodiment of the application, after incident waves and reflected waves are collected, whether impedance is matched or not is judged according to the amplitude values and the phase angles of the incident waves and the reflected waves, if impedance is not matched, the obtained amplitude difference voltage and the obtained phase angle difference voltage are obtained, control signals of a controlled current source are obtained according to the amplitude difference voltage and the phase angle difference voltage, corresponding control currents are obtained, the magnetic saturation degree of a magnetic core is changed through the control currents, the inductance value of an inductor is changed, the impedance is changed through a method of changing the inductor, the total impedance of a load and an impedance matching network is consistent with the input impedance, the purpose of impedance matching is achieved, the adjustable range is large, a servo stepping motor and an additional inductance-capacitance element are not needed to be adopted for impedance adjustment, the cost is reduced, and the accuracy of impedance; this application is after changing impedance matching network's impedance, continue to gather incident wave and back wave signal, again according to the incident wave after the regulation and the amplitude of back wave, whether the impedance matches is judged to the phase angle, if still not match, then continue to adjust, form closed-loop control, the accommodation process is smooth, the quantity of having solved prior art adoption servo step motor or control parallel capacitor realizes impedance matching with the capacitance value that changes in the matching box, there is with high costs, adjustable range is little, and the accommodation process is smooth inadequately, the higher technical problem of design requirement to the capacitance value.
The above is an embodiment of an impedance matching adjusting method applied to a radio frequency power supply, and the following is an embodiment of an impedance matching adjusting apparatus applied to a radio frequency power supply.
Referring to fig. 8, an impedance matching adjusting apparatus applied to a radio frequency power supply according to an embodiment of the present application includes:
the acquisition unit is used for acquiring incident waves and reflected waves between an impedance matching network and a load in the radio frequency power supply system;
the judging unit is used for judging whether the impedance is matched or not according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, the amplitude difference voltage and the phase angle difference voltage are obtained, and if yes, the acquisition unit is triggered;
the acquisition unit is used for acquiring a control signal according to the amplitude difference voltage and the phase angle difference voltage and inputting the control signal to the controlled current source to obtain a control current;
and the adjusting unit is used for increasing the magnetic induction intensity of the magnetic core in the control winding of the controlled current source output end through controlling the current, further increasing the saturation degree of the magnetic core, and influencing the effective magnetic conductivity of the magnetic core, so that the inductance value of the inductor wound on the magnetic core in the impedance matching network is changed, further the impedance of the impedance matching network is changed, and the acquisition unit is triggered.
As a further improvement, the acquisition unit is specifically configured to:
incident waves and reflected waves between an impedance matching network and a load in a radio frequency power supply system are collected through two directional couplers, wherein the structure of each directional coupler is a three-winding transformer structure.
As a further improvement, the determining unit is specifically configured to:
and judging whether the impedance is matched or not through the amplitude and the phase angle of the incident wave and the reflected wave by the amplitude-phase measurement chip, if not, acquiring amplitude difference voltage and phase angle difference voltage through the amplitude-phase measurement chip, and if so, triggering the acquisition unit.
As a further improvement, the controlled current source is composed of an operational amplifier, a resistor and a transistor.
According to the embodiment of the application, after incident waves and reflected waves are collected, whether impedance is matched or not is judged according to the amplitude values and the phase angles of the incident waves and the reflected waves, if impedance is not matched, the obtained amplitude difference voltage and the obtained phase angle difference voltage are obtained, control signals of a controlled current source are obtained according to the amplitude difference voltage and the phase angle difference voltage, corresponding control currents are obtained, the magnetic saturation degree of a magnetic core is changed through the control currents, the inductance value of an inductor is changed, the impedance is changed through a method of changing the inductor, the total impedance of a load and an impedance matching network is consistent with the input impedance, the purpose of impedance matching is achieved, the adjustable range is large, a servo stepping motor and an additional inductance-capacitance element are not needed to be adopted for impedance adjustment, the cost is reduced, and the accuracy of impedance; this application is after changing impedance matching network's impedance, continue to gather incident wave and back wave signal, again according to the incident wave after the regulation and the amplitude of back wave, whether the impedance matches is judged to the phase angle, if still not match, then continue to adjust, form closed-loop control, the accommodation process is smooth, the quantity of having solved prior art adoption servo step motor or control parallel capacitor realizes impedance matching with the capacitance value that changes in the matching box, there is with high costs, adjustable range is little, and the accommodation process is smooth inadequately, the higher technical problem of design requirement to the capacitance value.
It is clear to those skilled in the art that, for convenience and brevity of description, the specific working processes of the above-described apparatuses and units may refer to the corresponding processes in the foregoing method embodiments, and are not described herein again.
In the several embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the units is only one logical division, and other divisions may be realized in practice, for example, a plurality of units or components may be combined or integrated into another system, or some features may be omitted, or not executed. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or units, and may be in an electrical, mechanical or other form.
The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.
In addition, functional units in the embodiments of the present application may be integrated into one processing unit, or each unit may exist alone physically, or two or more units are integrated into one unit. The integrated unit can be realized in a form of hardware, and can also be realized in a form of a software functional unit.
The above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions in the embodiments of the present application.
Claims (8)
1. An impedance matching adjustment method applied to a radio frequency power supply is characterized by comprising the following steps:
s1, collecting incident waves and reflected waves between an impedance matching network and a load in the radio frequency power supply system;
s2, judging whether the impedance is matched according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, acquiring amplitude difference voltage and phase angle difference voltage, and if so, returning to the step S1;
s3, acquiring a control signal according to the amplitude difference voltage and the phase angle difference voltage, and inputting the control signal to a controlled current source to obtain a control current;
s4, increasing the magnetic induction intensity of the magnetic core in the control winding of the output end of the controlled current source through the control current, further increasing the saturation degree of the magnetic core, and influencing the effective magnetic conductivity of the magnetic core, so that the inductance value of the inductor wound on the magnetic core in the impedance matching network is changed, further changing the impedance of the impedance matching network, and returning to the step S1.
2. The impedance matching adjusting method applied to a radio frequency power supply according to claim 1, wherein the collecting incident waves and reflected waves between an impedance matching network and a load in a radio frequency power supply system comprises:
the method comprises the steps of collecting incident waves and reflected waves between an impedance matching network and a load in a radio frequency power supply system through two directional couplers, wherein the structure of each directional coupler is a three-winding transformer structure.
3. The impedance matching method of claim 1, wherein the method determines whether the impedances are matched according to the amplitudes and the phase angles of the incident wave and the reflected wave, if not, obtains an amplitude difference voltage and a phase angle difference voltage, and if yes, returns to step S1, and includes:
and judging whether the impedance is matched or not through the amplitude and the phase angle of the incident wave and the reflected wave by the amplitude-phase measurement chip, if not, acquiring amplitude difference voltage and phase angle difference voltage through the amplitude-phase measurement chip, and if so, returning to the step S1.
4. The impedance matching adjustment method for a radio frequency power supply according to claim 1, wherein the controlled current source is composed of an operational amplifier, a resistor and a transistor.
5. An impedance matching adjusting device applied to a radio frequency power supply, comprising:
the acquisition unit is used for acquiring incident waves and reflected waves between an impedance matching network and a load in the radio frequency power supply system;
the judging unit is used for judging whether the impedance is matched or not according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, the amplitude difference voltage and the phase angle difference voltage are obtained, and if yes, the collecting unit is triggered;
the acquisition unit is used for acquiring a control signal according to the amplitude difference voltage and the phase angle difference voltage and inputting the control signal to a controlled current source to obtain a control current;
and the adjusting unit is used for increasing the magnetic induction intensity of the magnetic core in the control winding of the output end of the controlled current source through the control current so as to increase the saturation degree of the magnetic core and influence the effective magnetic conductivity of the magnetic core, so that the inductance value of the inductor wound on the magnetic core in the impedance matching network is changed, the impedance of the impedance matching network is further changed, and the acquisition unit is triggered.
6. The impedance matching adjustment device applied to the radio frequency power supply of claim 5, wherein the acquisition unit is specifically configured to:
the method comprises the steps of collecting incident waves and reflected waves between an impedance matching network and a load in a radio frequency power supply system through two directional couplers, wherein the structure of each directional coupler is a three-winding transformer structure.
7. The impedance matching adjustment device applied to the radio frequency power supply of claim 5, wherein the determination unit is specifically configured to:
and judging whether the impedance is matched or not through an amplitude-phase measurement chip according to the amplitude and the phase angle of the incident wave and the reflected wave, if not, acquiring amplitude difference voltage and phase angle difference voltage through the amplitude-phase measurement chip, and if so, triggering the acquisition unit.
8. The impedance matching adjusting apparatus for a radio frequency power supply according to claim 5, wherein the controlled current source is composed of an operational amplifier, a resistor and a transistor.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114448387A (en) * | 2021-12-28 | 2022-05-06 | 深圳市恒运昌真空技术有限公司 | Method for adjusting impedance matching and impedance matching circuit |
| CN114448376A (en) * | 2021-12-27 | 2022-05-06 | 深圳市恒运昌真空技术有限公司 | Impedance matching adjusting method and device, radio frequency power supply system and storage medium |
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