CN116408282B - Cleaning device for cleaning brush non-contact magnetic levitation transmission assembly - Google Patents
Cleaning device for cleaning brush non-contact magnetic levitation transmission assembly Download PDFInfo
- Publication number
- CN116408282B CN116408282B CN202310645395.XA CN202310645395A CN116408282B CN 116408282 B CN116408282 B CN 116408282B CN 202310645395 A CN202310645395 A CN 202310645395A CN 116408282 B CN116408282 B CN 116408282B
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- fixedly connected
- wall
- seat
- auxiliary
- rotating shaft
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- 238000004140 cleaning Methods 0.000 title claims abstract description 69
- 230000005540 biological transmission Effects 0.000 title claims abstract description 16
- 238000005339 levitation Methods 0.000 title claims abstract description 15
- 238000010009 beating Methods 0.000 claims description 22
- 238000003756 stirring Methods 0.000 claims description 13
- 239000007921 spray Substances 0.000 claims description 11
- 230000003321 amplification Effects 0.000 claims description 7
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 7
- 230000002457 bidirectional effect Effects 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000010030 laminating Methods 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 2
- 238000000429 assembly Methods 0.000 claims description 2
- 239000012535 impurity Substances 0.000 abstract description 17
- 230000003749 cleanliness Effects 0.000 abstract description 11
- 235000012431 wafers Nutrition 0.000 description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 2
- 206010066054 Dysmorphism Diseases 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- B08B1/12—
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- B08B1/32—
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- B08B1/50—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/02—Devices for holding articles during cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
Abstract
The invention discloses a cleaning device for a cleaning brush non-contact magnetic levitation transmission assembly, which relates to the technical field of wafer cleaning equipment and comprises a fixed seat, wherein a first connecting seat is arranged at the top end of the fixed seat, a supporting disc is fixedly connected to the inner side of the first connecting seat, a wafer body is arranged at one end of the supporting disc, an automatic cleaner is arranged on the outer wall of the wafer body and one side of the first connecting seat, a second connecting seat is fixedly connected to the outer wall of one side of the supporting disc, a third driving motor is arranged at one end of the second connecting seat, a cleaning brush roller and an automatic cleaner are arranged, and a circulating impact auxiliary piece is arranged. According to the invention, the circulating striking auxiliary piece is arranged, the output end of the second driving motor drives the rotating shaft to drive the plurality of T-shaped striking blocks to rotate, so that the bristles on the outer wall of the cleaning brush roller are respectively struck by the plurality of T-shaped striking blocks, impurities adhered to the bristles are dropped off, and the cleanliness of the bristles of the cleaning brush roller is further improved.
Description
Technical Field
The invention relates to the technical field of wafer cleaning equipment, in particular to a cleaning device for a cleaning brush non-contact magnetic levitation transmission assembly.
Background
Wafer refers to a silicon wafer used for manufacturing silicon semiconductor circuits, the original material of which is silicon. The high-purity polycrystalline silicon is dissolved and then doped with silicon crystal seed, and then is slowly pulled out to form cylindrical monocrystalline silicon, and after grinding, polishing and slicing, a silicon wafer, namely a wafer, is formed, and the surface of the wafer is often cleaned by a special cleaning device after grinding and polishing.
The existing cleaning device for the wafer generally brushes the surface of the wafer through the mutual matching of the brush and the cleaning water, but the brush is often attached with impurities on the surface of the brush in the process of cleaning the surface of the wafer, so that the impurities on the brush are easily attached to the surface of the wafer again, the cleanliness of the cleaning of the wafer is further affected, and the cleaning device for the cleaning brush non-contact magnetic levitation transmission assembly is provided for solving the problems.
Disclosure of Invention
The invention aims at: in order to solve the problem that impurities are often attached to the surfaces of bristles of a brush in the process of cleaning the surfaces of wafers, so that impurities on the bristles are easily attached to the surfaces of the wafers again, and the cleanliness of cleaning the wafers is affected, the cleaning device for the cleaning brush non-contact magnetic levitation transmission assembly is provided.
In order to achieve the above purpose, the present invention provides the following technical solutions: the cleaning device for the brush cleaning non-contact magnetic levitation transmission assembly comprises a fixed seat, a first connecting seat is arranged at the top end of the fixed seat, a supporting disc is fixedly connected to the inner side of the first connecting seat, a wafer body is arranged at one end of the supporting disc, an automatic brush cleaner is arranged on one side of the outer wall of the wafer body and one side of the first connecting seat, a second connecting seat is fixedly connected to the outer wall of one side of the supporting disc, a third driving motor is arranged at one end of the second connecting seat, a bidirectional threaded screw rod is connected to the output end of the third driving motor, a second magnet is connected to the inner side of the second connecting seat in a sliding manner, the second magnet is sleeved on the outer wall of the bidirectional threaded screw rod, an arc-shaped clamping plate is fixedly connected to one end of the second magnet, the arc-shaped clamping plate is attached to the outer wall of the wafer body, a brush cleaning roller is arranged on the inner side of the first supporting seat, a brush cleaner is arranged on the top end of the first supporting seat, a brush cleaner is arranged on the upper side of the automatic brush cleaner, a second supporting seat is fixedly connected to the top of the second supporting seat, and the second auxiliary supporting seat is circularly connected to the outer wall of the second supporting seat;
the circulating beating auxiliary piece comprises a rotating shaft which is rotatably connected to the inner side of the second supporting seat, a second driving motor is installed on the outer wall of one side of the second supporting seat, the output end of the second driving motor is connected with the rotating shaft, a plurality of T-shaped beating blocks are arranged on the outer wall of the rotating shaft at equal intervals, circulating swinging assemblies are arranged on the outer wall of the rotating shaft and the outer wall of the T-shaped beating blocks, and a reciprocating amplification auxiliary unit is arranged on one end of the rotating shaft and the outer wall of one side of the first supporting seat.
As still further aspects of the invention: the automatic brush cleaner comprises a fourth driving motor arranged on the outer wall of one side of a first supporting seat, the output end of the fourth driving motor is connected with a connecting disc, a first magnet is arranged on the outer wall of one side of the connecting disc, rotary columns are fixedly connected to the outer walls of two sides of a cleaning brush roller and are rotationally connected with the first supporting seat, one end of each rotary column is provided with a second magnet, the first magnet and the second magnet are symmetrically arranged through the first supporting seat, the top end of a fixing seat is fixedly connected with a U-shaped stand, the top end of the U-shaped stand is provided with a first driving motor, the output end of the first driving motor is connected with a unidirectional threaded screw rod, the inner side of the U-shaped stand is slidably connected with a sliding block, the sliding block is sleeved on the outer wall of the unidirectional threaded screw rod, and the sliding block is fixedly connected with the first connecting seat.
As still further aspects of the invention: the inner side of the U-shaped vertical seat is provided with a first guide groove matched with the sliding block, and the inner side of the sliding block is provided with a thread groove matched with the unidirectional thread screw rod.
As still further aspects of the invention: the outer wall of the two-way screw thread screw rod is provided with a positive thread and a reverse thread, the second connecting seats are provided with two, the inner sides of the second connecting seats are provided with second guide grooves matched with the second magnets, and the two second magnets are respectively sleeved on the outer walls of the positive thread and the reverse thread of the two-way screw thread screw rod.
As still further aspects of the invention: the automatic scour comprises a connecting frame fixedly connected to the top end of the first supporting seat, a guide pipe is installed on the inner side of the connecting frame, a corrugated hose is fixedly connected to the water outlet of the guide pipe, and a spray head is fixedly connected to one end of the corrugated hose.
As still further aspects of the invention: the reciprocating amplification auxiliary unit comprises a fixed column fixedly connected with one end of a rotating shaft, a first bevel gear is fixedly connected with the outer wall of the fixed column, a rectangular seat is fixedly connected with the outer wall of one side of the first supporting seat, a rotating shaft is rotatably connected to the inner side of the rectangular seat, a second bevel gear is fixedly connected to the bottom end of the rotating shaft, the second bevel gear is meshed with the first bevel gear in the radial direction, the outer wall of the rotating shaft is located above the rectangular seat and fixedly connected with a half gear, the top end of the rectangular seat is slidably connected with a U-shaped rack, a special-shaped rod is fixedly connected with one side outer wall of the U-shaped rack, a second connecting rod is fixedly connected with a plurality of connecting ring sleeves at equal intervals on the inner side of the second connecting rod, the inner side of the connecting ring sleeves is fixedly connected with a intermittent beating piece on the outer wall of the rotating shaft and the inner side of the rectangular seat.
As still further aspects of the invention: two groups of clamping teeth are symmetrically arranged on the inner side of the U-shaped rack, the two groups of clamping teeth are meshed with the half gear, one group of clamping teeth is meshed with the half gear initially, the bottom end of the U-shaped rack is fixedly connected with a limiting sliding block, and a third guide groove matched with the limiting sliding block is formed on the inner side of the rectangular seat.
As still further aspects of the invention: intermittent type beats the piece including fixed connection be in fixed sleeve on rectangular seat top, litigation fixed sleeve's inboard sliding connection has the rectangle to pull the piece, the one end fixedly connected with second spring that the piece was pulled to the rectangle, the one end of second spring with fixed sleeve fixed connection, the other end fixedly connected with that the piece was pulled to the rectangle stirs the piece, two the outer wall fixedly connected with of pivot two power blocks, two the inboard of power block is all rotated and is connected with a power wheel, one of them the power wheel laminating is in stir the outer wall of piece, stir one side outer wall fixedly connected with striking piece of piece, striking piece one end is supported the one end outer wall of swivel, the outer wall of striking piece is provided with pulls auxiliary assembly.
As still further aspects of the invention: the circular swinging assembly comprises a sliding ring which is slidably connected with the outer wall of the rotating shaft, a first spring is fixedly connected with the inner side of the sliding ring, a first connecting rod is fixedly connected with the inner side of the sliding ring, one end of the first connecting rod is fixedly connected with a straight rack, a plurality of auxiliary seats are fixedly connected with the outer wall of the rotating shaft at equal intervals, one of the auxiliary seats is fixedly connected with one end of the first spring, a swinging block is rotatably connected with the inner side of the auxiliary seat, one end of the swinging block is fixedly connected with the T-shaped beating block, one side outer wall of the auxiliary seat is fixedly connected with a power shaft, one end of the power shaft penetrates through the outer part of the auxiliary seat and is rotationally connected with the auxiliary seat, a spur gear is fixedly connected with the outer wall of the power shaft, the spur gear is meshed with the straight rack, a torsion spring is mounted on one side outer wall of the spur gear, and one end of the torsion spring is mounted on the outer wall of the auxiliary seat.
As still further aspects of the invention: the auxiliary pulling assembly comprises an auxiliary pulling block fixedly connected to the top end of the impact block, one end of the straight rack is fixedly connected with a connecting ring, a groove is formed in the inner side of the connecting ring, and the auxiliary pulling block is attached to the groove.
Compared with the prior art, the invention has the beneficial effects that:
1. through setting up circulation and beating auxiliary member, the second driving motor output drives the rotating shaft and drives a plurality of T shape and beat the piece and rotate to beat the brush hair of washing brush roller outer wall respectively through a plurality of T shape and beat the piece, make the impurity that adheres to on the brush hair drop, thereby further improved the cleanliness factor of washing brush roller brush hair;
2. through setting up automatic scourer, the shower nozzle initial position aims at the brush hair of cleaning brush roller outer wall, is connected water supply pipe and honeycomb duct input, sprays on cleaning brush roller brush hair through a plurality of shower nozzles afterwards to this washes the impurity that adheres to on the cleaning brush roller brush hair, makes impurity on the brush hair can be washed down, thereby improves the cleanliness factor of cleaning brush roller brush hair, and then has improved the cleanliness factor that cleaning brush roller scrubbed wafer body surface;
3. through setting up reciprocal amplification auxiliary element, the swivel rotates and drives first bevel gear through the fixed column simultaneously to drive second bevel gear and drive the half gear through the pivot and rotate, when half gear outer wall latch and U-shaped rack inboard a set of latch contact, drive U-shaped rack carries out lateral shifting, when half gear outer wall latch and U-shaped rack a set of latch separation contact with another set of latch, drive U-shaped rack and reset, drive half gear through the pivot constantly and rotate, thereby drive U-shaped rack and drive the second connecting rod through the dysmorphism pole and carry out reciprocating motion, with this through connecting ring cover pulling shower nozzle and reciprocating swing, thereby enlarge the scope that the shower nozzle sprays;
4. through setting up intermittent beating piece, the pivot drives the power piece and rotates when rotating, thereby push through the power wheel and stir the piece and extrude the second spring through the rectangle and move, and pull striking piece and rotation axle separation, after power wheel and stirring the piece separation, the second spring promotes the rectangle and pulls the piece and reset, make striking piece strike on the rotation axle, make the rotation axle produce vibrations and act on T shape beating the piece, because vibrations just can transmit as long as the contact, and then can assist T shape beating the piece and beat the brush surface impurity vibrations of brush hair when beating the brush hair of washing brush roller, can shake down the impurity that adheres to on T shape beating the piece simultaneously, with this efficiency of cleaning up impurity on the brush hair of washing brush roller outer wall has been improved, simultaneously can improve the cleanliness factor of T shape beating the piece surface;
5. through setting up circulation swing subassembly, move through pulling auxiliary block pulling go-between when the striking piece moves to keeping away from the swivel axis direction to remove through straight rack and head rod pulling slip ring, and extrude first spring, drive the swing piece through the power shaft through straight rack drive straight gear and rotate, thereby drive the go-between and rotate, with this scope of expanding the go-between, make the go-between can carry out the multiscope to the brush hair of washing brush roller outer wall and hit.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a side view of a holder of the present invention;
FIG. 3 is an enlarged view of FIG. 2A in accordance with the present invention;
FIG. 4 is a schematic view of a rotation shaft according to the present invention;
FIG. 5 is a schematic view of the top of the rectangular base of the present invention;
FIG. 6 is a schematic view of a cycle swing assembly according to the present invention;
FIG. 7 is an enlarged view of FIG. 6B in accordance with the present invention;
FIG. 8 is a cross-sectional view of a first support base of the present invention;
FIG. 9 is a schematic view of a first connecting seat according to the present invention;
fig. 10 is a schematic structural view of a connecting ring according to the present invention.
In the figure: 1. a fixing seat; 2. a first support base; 3. cleaning a brush roller; 4. a second support base; 5. a U-shaped vertical seat; 6. a first driving motor; 7. a slide block; 8. a wafer body; 9. an arc-shaped clamping plate; 10. a first connection base; 11. a flow guiding pipe; 12. a connecting frame; 13. a second driving motor; 14. a T-shaped striking block; 15. a support plate; 16. a one-way threaded screw rod; 17. a third driving motor; 18. a two-way threaded screw rod; 19. a fourth driving motor; 20. a rotating shaft; 21. a slip ring; 22. a first connecting rod; 23. a first spring; 24. a connecting ring; 25. a spray head; 26. a connecting ring sleeve; 27. a second connecting rod; 28. a special-shaped rod; 29. a fixed sleeve; 30. fixing the column; 31. a first bevel gear; 32. a rectangular seat; 33. a rotating shaft; 34. a second bevel gear; 35. a U-shaped rack; 36. a half gear; 37. a swinging block; 38. an auxiliary seat; 39. a straight rack; 40. spur gears; 41. a rectangular pulling block; 42. a poking block; 43. an impact block; 44. a second spring; 45. pulling the auxiliary block; 46. a power block; 47. a power wheel; 48. a power shaft; 49. a torsion spring; 50. rotating the column; 51. a connecting disc; 52. a first magnet; 53. a corrugated hose; 54. a second magnet; 55. a second connecting seat; 56. a groove.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "configured" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art. Hereinafter, an embodiment of the present invention will be described in accordance with its entire structure.
Referring to fig. 1 to 10, in the embodiment of the invention, a cleaning device for a cleaning brush non-contact magnetic levitation transmission assembly comprises a fixing seat 1, wherein a first connecting seat 10 is arranged at the top end of the fixing seat 1, a supporting plate 15 is fixedly connected to the inner side of the first connecting seat 10, a wafer body 8 is arranged at one end of the supporting plate 15, an automatic cleaner is arranged on one side of the outer wall of the wafer body 8 and one side of the first connecting seat 10, a second connecting seat 55 is fixedly connected to one side outer wall of the supporting plate 15, a third driving motor 17 is arranged at one end of the second connecting seat 55, a bidirectional threaded screw 18 is connected to the output end of the third driving motor 17, a second magnet 54 is slidingly connected to the inner side of the second connecting seat 55, the second magnet 54 is sleeved on the outer wall of the bidirectional threaded screw 18, an arc-shaped clamping plate 9 is fixedly connected to one end of the second magnet 54, the arc-shaped clamping plate 9 is attached to the outer wall of the wafer body 8, one side of the wafer body 8 is fixedly connected with a first supporting seat 2 on the top end of the fixing seat 1, a cleaning brush roller 3 is arranged on the inner side of the first supporting seat 2, a second driving roller 4 is arranged on the top end of the first supporting seat 2, a top end of the first supporting seat 2 is positioned above the cleaning roller 3, a second driving roller 4 is fixedly connected to the second driving roller 4 is arranged on the top end of the second supporting seat 4;
the circulation hits auxiliary member including setting up the rotation axle 20 of rotating connection in the inboard of second supporting seat 4, second driving motor 13 is installed to one side outer wall of second supporting seat 4, the output and the rotation axle 20 of second driving motor 13 are connected, the outer wall equidistance of rotation axle 20 is provided with a plurality of T shape and hits the piece 14, the outer wall that the piece 14 was hit to rotation axle 20 and T shape all is provided with circulation swing subassembly, one end of rotation axle 20 and one side outer wall of first supporting seat 2 are provided with reciprocal amplification auxiliary unit, the outer wall of two-way screw lead screw 18 is provided with positive screw and reverse screw, second connecting seat 55 is provided with two, second guiding groove with second magnet 54 assorted is all seted up to the inboard of two second connecting seats 55, two second magnets 54 cup joint respectively at two-way screw lead screw 18 positive screw and reverse screw outer wall.
In this embodiment: when the wafer body 8 to be cleaned is placed on the inner side of one arc-shaped clamping plate 9, then the third driving motor 17 is started, the output end of the third driving motor 17 drives two second magnets 54 to drive one arc-shaped clamping plate 9 to approach the inner side of the wafer body 8 respectively, when the two arc-shaped clamping plates 9 move to the maximum position, the wafer body 8 is fixed at a specified position, the surface of the wafer body 8 is cleaned through the brush on the outer wall of the cleaning brush roller 3, the second driving motor 13 is started, the output end of the second driving motor 13 drives the rotating shaft 20 to drive the T-shaped beating blocks 14 to rotate, so that bristles on the outer wall of the cleaning brush roller 3 are respectively beaten through the T-shaped beating blocks 14, impurities adhered on the bristles are dropped, and the cleanliness of the bristles of the cleaning brush roller 3 is further improved.
Referring to fig. 1 to 9, the automatic cleaner includes a fourth driving motor 19 mounted on an outer wall of one side of a first supporting seat 2, an output end of the fourth driving motor 19 is connected with a connecting disc 51, a first magnet 52 is mounted on an outer wall of one side of the connecting disc 51, two side outer walls of a cleaning brush roller 3 are fixedly connected with rotary columns 50, the rotary columns 50 are rotatably connected with the first supporting seat 2, a second magnet 54 is mounted at one end of one rotary column 50, the first magnet 52 and the second magnet 54 are symmetrically arranged through the first supporting seat 2, a U-shaped stand 5 is fixedly connected at the top end of the fixing seat 1, a first driving motor 6 is mounted at the top end of the U-shaped stand 5, a unidirectional threaded screw 16 is connected at the output end of the first driving motor 6, a sliding block 7 is slidingly connected at the inner side of the U-shaped stand 5, the sliding block 7 is sleeved on the outer wall of the unidirectional threaded screw 16, the sliding block 7 is fixedly connected with the first connecting seat 10, a first guiding groove matched with the sliding block 7 is arranged at the inner side of the U-shaped stand 5, and a threaded groove matched with the unidirectional screw 16 is formed at the inner side of the sliding block 7.
In this embodiment: the magnetic poles on the opposite end surfaces of the first magnet 52 and the second magnet 54 are circumferentially arranged in an NS pole alternating mode, a plurality of magnets are arranged on the connecting disc 51 in an annular mode to form the first magnet 52, the magnetic poles of any two adjacent magnets are arranged in opposite directions, if eight magnets are arranged in the N-S direction, the magnetic poles of four magnets are arranged in the S-N direction, the magnetic poles of the adjacent magnets are arranged in opposite directions, the arrangement mode of the second magnet 54 on the rotary column 50 is similar to the arrangement mode, the arrangement mode of the second magnet 54 is set according to the same principle, and the arrangement mode has the advantages that the first magnet 52 and the second magnet 54 are in a state of N-S pole mutual attraction in a relatively static process, when the first magnet 52 is driven to rotate for one circle, the change of magnetic induction lines experienced by the second magnet 54 is larger, meanwhile, a magnetic field which is distributed in a sine way in space can be obtained, a strong magnetic coupling is obtained, a transmission effect is enhanced, a fourth driving motor 19 is started, an output end driving motor 51 of the fourth driving motor 19 drives the first magnet 52 to rotate, the first magnet 52 drives the second magnet 52 to rotate through the magnetic motor 54 to rotate, the second magnet 54 to rotate, the first magnet 52 rotates through the rotary motor 6 to drive the rotary brush roller 6 to rotate, the rotary roller 6 to rotate the first magnet 6 to rotate the rotary roller 6, the rotary roller 6 to rotate the rotary roller 6 to clean the outer surface of the hair brush, and the outer surface of the hair brush roller, and the hair roller can be cleaned, and the hair roller can rotate up and the hair roller, and the hair roller can rotate cleaning roller.
Referring to fig. 1, 2, 3 and 8, the automatic flusher includes a connecting frame 12 fixedly connected to the top end of the first supporting seat 2, a flow guiding tube 11 is installed on the inner side of the connecting frame 12, a corrugated hose 53 is fixedly connected to a water outlet of the flow guiding tube 11, and a spray head 25 is fixedly connected to one end of the corrugated hose 53.
In this embodiment: the initial position of the spray head 25 aligns the brush hair on the outer wall of the cleaning brush roller 3, a water supply pipeline is connected with the input end of the guide pipe 11, and then the spray heads 25 spray the brush hair on the cleaning brush roller 3, so that impurities adhered to the brush hair of the cleaning brush roller 3 are washed, the impurities on the brush hair can be washed down, the cleanliness of the brush hair of the cleaning brush roller 3 is improved, and the cleanliness of the cleaning brush roller 3 for brushing the surface of the wafer body 8 is improved.
Referring to fig. 1 to 8, the reciprocating amplification auxiliary unit includes a fixed column 30 fixedly connected to one end of a rotating shaft 20, a first bevel gear 31 fixedly connected to an outer wall of the fixed column 30, a rectangular seat 32 fixedly connected to an outer wall of one side of the first supporting seat 2, a rotating shaft 33 rotatably connected to an inner side of the rectangular seat 32, a second bevel gear 34 fixedly connected to a bottom end of the rotating shaft 33, the second bevel gear 34 being meshed with the first bevel gear 31, a half gear 36 fixedly connected to an outer wall of the rotating shaft 33 above the rectangular seat 32, a U-shaped rack 35 slidably connected to a top end of the rectangular seat 32, a special-shaped rod 28 fixedly connected to an outer wall of one side of the U-shaped rack 35, a second connecting rod 27 fixedly connected to one end of the special-shaped rod 28, a plurality of connecting rings 26 fixedly connected to an inner side of the second connecting rod 27, an intermittent driving member fixedly connected to an inner side of the connecting rings 26 and a nozzle 25, two sets of latches symmetrically arranged on an inner side of the U-shaped rack 35 and meshed with the half gear 36, wherein one set of latches is initially meshed with the half gear 36, and the bottom end of the half gear 35 is fixedly meshed with a third guide groove 32.
In this embodiment: the rotating shaft 20 rotates and drives the first bevel gear 31 to rotate through the fixed column 30, so that the second bevel gear 34 is driven to drive the half gear 36 to rotate through the rotating shaft 33, when the teeth on the outer wall of the half gear 36 are contacted with a group of teeth on the inner side of the U-shaped rack 35, the U-shaped rack 35 is driven to transversely move, when the teeth on the outer wall of the half gear 36 are separated from a group of teeth on the U-shaped rack 35 and are contacted with another group of teeth, the U-shaped rack 35 is driven to reset, the half gear 36 is continuously driven to rotate through the rotating shaft 33, and the U-shaped rack 35 is driven to drive the second connecting rod 27 to reciprocate through the special-shaped rod 28, so that the spray head 25 is pulled to reciprocate through the connecting ring sleeve 26, and the spraying range of the spray head 25 is enlarged.
Referring to fig. 5, the intermittent beating member includes a fixing sleeve 29 fixedly connected to the top end of a rectangular base 32, a rectangular pulling block 41 is slidably connected to the inner side of the litigation fixing sleeve 29, one end of the rectangular pulling block 41 is fixedly connected to a second spring 44, one end of the second spring 44 is fixedly connected to the fixing sleeve 29, the other end of the rectangular pulling block 41 is fixedly connected to a stirring block 42, two power blocks 46 are fixedly connected to the outer wall of the rotating shaft 33, one power wheel 47 is rotatably connected to the inner sides of the two power blocks 46, one power wheel 47 is attached to the outer wall of the stirring block 42, one side outer wall of the stirring block 42 is fixedly connected with a striking block 43, one end of the striking block 43 abuts against one end outer wall of the rotating shaft 20, and a pulling auxiliary assembly is arranged on the outer wall of the striking block 43.
In this embodiment: the rotating shaft 33 rotates and drives the power block 46 to rotate, so that the stirring block 42 is pushed by the power wheel 47 to extrude the second spring 44 through the rectangular pulling block 41 to move, the impact block 43 is pulled to be separated from the rotating shaft 20, when the power wheel 47 is separated from the stirring block 42, the second spring 44 pushes the rectangular pulling block 41 to reset, the impact block 43 impacts the rotating shaft 20, vibration generated by the rotating shaft 20 acts on the T-shaped beating block 14, the vibration can be transmitted only by contacting, and the T-shaped beating block 14 can be assisted to vibrate impurities on the surface of the bristles when the bristles on the outer wall of the cleaning brush roller 3 are beaten, and meanwhile, the impurities adhered to the T-shaped beating block 14 can be vibrated, so that the efficiency of cleaning the impurities on the bristles on the outer wall of the cleaning brush roller 3 is improved, and meanwhile, the cleanliness of the surface of the T-shaped beating block 14 can be improved.
Referring to fig. 2 to 10, the cyclic swing assembly includes a sliding ring 21 slidably connected to an outer wall of the rotating shaft 20, a first spring 23 fixedly connected to an inner side of the sliding ring 21, a first connecting rod 22 fixedly connected to an inner side of the sliding ring 21, a straight rack 39 fixedly connected to one end of the first connecting rod 22, a plurality of auxiliary seats 38 fixedly connected to an outer wall of the rotating shaft 20 at equal intervals, one end of one auxiliary seat 38 fixedly connected to one end of the first spring 23, a swing block 37 rotatably connected to an inner side of the auxiliary seat 38, one end of the swing block 37 fixedly connected to the T-shaped striking block 14, a power shaft 48 fixedly connected to one side outer wall of the auxiliary seat 38, one end of the power shaft 48 penetrating to an outer side of the auxiliary seat 38 and rotatably connected to the auxiliary seat 38, a spur gear 40 fixedly connected to an outer wall of the power shaft 48, the spur gear 40 meshed with the straight rack 39, a torsion spring 49 mounted to one side outer wall of the spur gear 40, one end of the torsion spring 49 mounted to an outer wall of the auxiliary seat 38, a pull auxiliary assembly including a pull auxiliary block 45 fixedly connected to a top end of the striking block 43, one end of the straight rack 39 fixedly connected to the connecting ring 24, and an auxiliary groove 56 formed in the inner side of the link 24 and attached to the pull block 56.
In this embodiment: when the impact block 43 moves away from the rotating shaft 20, the auxiliary block 45 is pulled to move the connecting ring 24, so that the straight rack 39 and the first connecting rod 22 pull the sliding ring 21 to move and squeeze the first spring 23, the straight rack 39 drives the straight gear 40 to drive the swinging block 37 to rotate through the power shaft 48, so that the connecting ring 24 is driven to rotate, the range of the connecting ring 24 is enlarged, and the connecting ring 24 can perform multi-range striking on the bristles on the outer wall of the cleaning brush roller 3.
The foregoing description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical solution of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (7)
1. The utility model provides a cleaning device for cleaning brush contactless magnetic levitation transmission assembly, includes fixing base (1), its characterized in that, the top of fixing base (1) is provided with first connecting seat (10), the inboard fixedly connected with supporting disk (15) of first connecting seat (10), the one end of supporting disk (15) is provided with wafer body (8), the outer wall of wafer body (8) with one side of first connecting seat (10) is provided with automatic cleaner, one side outer wall fixedly connected with second connecting seat (55) of supporting disk (15), third driving motor (17) are installed to the one end of second connecting seat (55), the output of third driving motor (17) is connected with two-way screw thread lead screw (18), the inboard sliding connection of second connecting seat (55) has second magnet (54), second magnet (54) cup joint the outer wall of two-way screw thread lead screw (18), the one end fixedly connected with arc grip block (9) of second magnet (54), arc grip block (9) laminating be in the one side of wafer body (8) is in the fixed roller (2) of fixing base (2) is located the first connecting seat (2), an automatic scour is arranged above the cleaning brush roller (3) at the top end of the first supporting seat (2), a second supporting seat (4) is fixedly connected to the top end of the fixed seat (1), and circulating striking auxiliary pieces are arranged on the outer walls of the two sides of the second supporting seat (4);
the circulating beating auxiliary comprises a rotating shaft (20) which is rotatably connected to the inner side of the second supporting seat (4), a second driving motor (13) is installed on the outer wall of one side of the second supporting seat (4), the output end of the second driving motor (13) is connected with the rotating shaft (20), a plurality of T-shaped beating blocks (14) are equidistantly arranged on the outer wall of the rotating shaft (20), circulating swinging assemblies are respectively arranged on the outer walls of the rotating shaft (20) and the T-shaped beating blocks (14), and a reciprocating amplification auxiliary unit is arranged on one end of the rotating shaft (20) and the outer wall of one side of the first supporting seat (2);
the automatic flusher comprises a connecting frame (12) fixedly connected to the top end of the first supporting seat (2), a flow guide pipe (11) is arranged on the inner side of the connecting frame (12), a corrugated hose (53) is fixedly connected to a water outlet of the flow guide pipe (11), and a spray head (25) is fixedly connected to one end of the corrugated hose (53);
the reciprocating amplification auxiliary unit comprises a fixed column (30) fixedly connected to one end of a rotating shaft (20), a first bevel gear (31) is fixedly connected to the outer wall of the fixed column (30), a rectangular seat (32) is fixedly connected to the outer wall of one side of a first supporting seat (2), a rotating shaft (33) is rotatably connected to the inner side of the rectangular seat (32), a second bevel gear (34) is fixedly connected to the bottom end of the rotating shaft (33), the second bevel gear (34) is meshed with the first bevel gear (31) in the radial direction, a half gear (36) is fixedly connected to the outer wall of the rotating shaft (33) above the rectangular seat (32), a U-shaped rack (35) is fixedly connected to the top end of the rectangular seat (32), a special-shaped rod (28) is fixedly connected to one side outer wall of the U-shaped rack (35), a plurality of connecting rings (26) are fixedly connected to the inner side of the second connecting rod (27), and the inner side of the connecting rings (26) are fixedly connected to the inner side of the connecting rings (25) and the inner side of the rectangular seat (33), and the inner side of the rotating shaft (33) are fixedly connected with a beat piece (32);
intermittent type beats piece including fixed connection be in fixed sleeve (29) on rectangular seat (32) top, the inboard sliding connection of fixed sleeve (29) has rectangle to pull piece (41), the one end fixedly connected with second spring (44) that the piece (41) was pulled to the rectangle, the one end of second spring (44) with fixed sleeve (29) fixed connection, the other end fixedly connected with that the piece (41) was pulled to the rectangle stirs piece (42), the outer wall fixedly connected with of pivot (33) two power pieces (46), two the inboard of power piece (46) is all rotated and is connected with one power wheel (47), one of them power wheel (47) laminating is in stir the outer wall of piece (42), stir one side outer wall fixedly connected with striking piece (43) of piece (42), striking piece (43) one end is supported in the one end outer wall of swivel (20), the outer wall of striking piece (43) is provided with pulls auxiliary assembly.
2. The cleaning device for the cleaning brush non-contact magnetic levitation transmission assembly according to claim 1, wherein the automatic cleaner comprises a fourth driving motor (19) arranged on one side outer wall of the first supporting seat (2), an output end of the fourth driving motor (19) is connected with a connecting disc (51), a first magnet (6) is arranged on one side outer wall of the connecting disc (51), rotary columns (50) are fixedly connected to two side outer walls of the cleaning brush roller (3), the rotary columns (50) are rotationally connected with the first supporting seat (2), one end of one rotary column (50) is provided with a second magnet (54), the first magnet (52) and the second magnet (54) are symmetrically arranged through the first supporting seat (2), a U-shaped vertical seat (5) is fixedly connected to the top end of the fixing seat (1), a first driving motor (6) is fixedly connected to the output end of the first driving motor (6), a unidirectional screw thread (16) is connected to the inner side outer wall of the first driving motor (6), a sliding block (7) is fixedly connected to the inner side of the first sliding block (7), and the sliding block (7) is fixedly connected to the outer wall of the first sliding block (10).
3. The cleaning device for the cleaning brush non-contact magnetic levitation transmission assembly according to claim 2, wherein a first guiding groove matched with the sliding block (7) is arranged on the inner side of the U-shaped vertical seat (5), and a thread groove matched with the unidirectional thread screw (16) is formed on the inner side of the sliding block (7).
4. The cleaning device for the cleaning brush non-contact magnetic levitation transmission assembly according to claim 1, wherein positive threads and negative threads are arranged on the outer wall of the bidirectional threaded screw rod (18), two second connecting seats (55) are arranged, second guiding grooves matched with the second magnets (54) are formed in the inner sides of the two second connecting seats (55), and the two second magnets (54) are respectively sleeved on the outer walls of the positive threads and the negative threads of the bidirectional threaded screw rod (18).
5. The cleaning device for the cleaning brush non-contact magnetic levitation transmission assembly according to claim 1, wherein two groups of clamping teeth are symmetrically arranged on the inner side of the U-shaped rack (35), the two groups of clamping teeth are meshed with the half gear (36), one group of clamping teeth is meshed with the half gear (36) initially, a limit sliding block is fixedly connected to the bottom end of the U-shaped rack (35), and a third guide groove matched with the limit sliding block is formed on the inner side of the rectangular seat (32).
6. The cleaning device for a cleaning brush contactless magnetic levitation transmission assembly according to claim 5, characterized in that the circulating swing assembly comprises a sliding ring (21) slidingly connected to the outer wall of the rotating shaft (20), a first spring (23) is fixedly connected to the inner side of the sliding ring (21), a first connecting rod (22) is fixedly connected to the inner side of the sliding ring (21), a straight rack (39) is fixedly connected to one end of the first connecting rod (22), a plurality of auxiliary seats (38) are fixedly connected to the outer wall of the rotating shaft (20) at equal distance, one of the outer walls of the auxiliary seats (38) is fixedly connected to one end of the first spring (23), a swing block (37) is rotatably connected to the inner side of the auxiliary seat (38), one end of the swing block (37) is fixedly connected to the T-shaped striking block (14), one side outer wall of the auxiliary seat (38) is fixedly connected to a shaft (48), one end of the shaft (48) penetrates through the outside of the auxiliary seat (38) and is rotatably connected to the auxiliary seat (38), a straight rack (40) is fixedly connected to the outer wall of the straight rack (40), one end of the torsion spring (49) is arranged on the outer wall of the auxiliary seat (38).
7. The cleaning device for a cleaning brush non-contact magnetic levitation transmission assembly according to claim 6, wherein the auxiliary pulling component comprises an auxiliary pulling block (45) fixedly connected to the top end of the impact block (43), one end of the straight rack (39) is fixedly connected with a connecting ring (24), a groove (56) is formed in the inner side of the connecting ring (24), and the auxiliary pulling block (45) is attached to the groove (56).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310645395.XA CN116408282B (en) | 2023-06-02 | 2023-06-02 | Cleaning device for cleaning brush non-contact magnetic levitation transmission assembly |
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| CN202310645395.XA CN116408282B (en) | 2023-06-02 | 2023-06-02 | Cleaning device for cleaning brush non-contact magnetic levitation transmission assembly |
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| CN116408282B true CN116408282B (en) | 2023-08-15 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117259324B (en) * | 2023-11-21 | 2024-01-26 | 江苏澳构矿业科技股份有限公司 | Mining machinery part belt cleaning device |
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| CN116408282A (en) | 2023-07-11 |
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