CN116373138B - Dicing saw - Google Patents
Dicing saw Download PDFInfo
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- CN116373138B CN116373138B CN202310644730.4A CN202310644730A CN116373138B CN 116373138 B CN116373138 B CN 116373138B CN 202310644730 A CN202310644730 A CN 202310644730A CN 116373138 B CN116373138 B CN 116373138B
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- China
- Prior art keywords
- support platen
- dicing saw
- corner system
- guide
- waterproof cover
- Prior art date
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 43
- 238000005520 cutting process Methods 0.000 abstract description 32
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- 238000007789 sealing Methods 0.000 description 18
- 238000010586 diagram Methods 0.000 description 13
- 239000004519 grease Substances 0.000 description 11
- 230000001050 lubricating effect Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 238000003825 pressing Methods 0.000 description 8
- 230000000903 blocking effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 4
- 230000036961 partial effect Effects 0.000 description 4
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- 230000000670 limiting effect Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
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- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010073 coating (rubber) Methods 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The application provides a dicing saw, and relates to the technical field of dicing saw. According to the dicing saw provided by the application, the waterproof cover is connected with the first connecting part of the supporting platen, which extends along the circumferential direction for one circle, through the second connecting part, which extends along the circumferential direction for one circle, and each position of the second connecting part in the circumferential direction is connected with the corresponding position of the first connecting part in the circumferential direction, so that the first connecting part and the second connecting part are formed into a whole, and a gap which can be used for water to flow to the lower part of the second part of the supporting platen through the water flow does not exist between the supporting platen and the waterproof cover in the circumferential direction of the corner system, and therefore adverse effects on equipment such as a corner motor and a shaft transmission mechanism below due to the water flow flowing down from the corner system can not occur when long-time cutting work is faced.
Description
Technical Field
The application relates to the technical field of dicing saw, in particular to a dicing saw.
Background
The dicing saw has high requirement on dicing precision, and the workpiece and the guide wheel are required to be cooled in the process. In the cutting process of a large-size wafer workpiece, the accuracy of cutting is reduced along with the extension of the cutting time.
Disclosure of Invention
In view of the above, the present application provides a dicing saw, which aims to solve the above technical problems.
The application provides a dicing saw, comprising a corner system, wherein the corner system comprises:
a support platen comprising a first portion and a second portion connected in an axial direction of the corner system, the first portion of the support platen having a dimension in a direction perpendicular to the axial direction that is less than a dimension in a direction perpendicular to the axial direction of the second portion of the support platen;
an upper gland cover arranged outside the first part of the support platen;
a waterproof cover provided outside the second portion of the support platen, the waterproof cover including a shielding portion interposed between a side portion of the upper gland facing the second portion of the support platen and the second portion of the support platen;
a seal between the shield and a side of the upper gland facing the second portion of the support platen;
wherein the support platen includes a first connecting portion extending one circumference along a circumference of the corner system, the waterproof cover includes a second connecting portion extending one circumference along the circumference, and each position of the second connecting portion in the circumference is connected with a corresponding position of the first connecting portion in the circumference so that the first connecting portion and the second connecting portion are formed as one body.
Preferably, the second connection portion includes an inner edge surrounding an outer side of the first connection portion, the first connection portion including a portion of the outer side of the first portion of the support platen.
Preferably, the waterproof cover is integrally formed with the first portion of the support platen.
Preferably, the second connection comprises an annular end face opposite the second portion of the support platen in the axial direction of the corner system, and the first connection comprises a portion of the end face of the second portion of the support platen facing the upper gland.
Preferably, the waterproof cover is integrally formed with the second portion of the support platen.
Preferably, the first portion of the support platen and the second portion of the support platen abut each other in an axial direction of the corner system.
Preferably, the method further comprises:
the upper gland cover is arranged on the central disc, and part of the central disc is exposed to the outside of the upper gland;
the transmission assembly is connected with one side of the central disc in the axial direction of the corner system, and the supporting platen is sleeved on the outer side of a part of the transmission assembly;
a reference member connected with a side of the transmission assembly facing away from the center plate, the reference member including a fixing portion at a side facing away from the transmission assembly for connection with an external connection surface;
the first adjusting part and the second adjusting part are arranged on one side of the reference member, which is opposite to the transmission assembly, and the first adjusting part and the second adjusting part are used for applying force to the reference member so as to adjust the inclination degree of the reference member relative to the axial direction of the corner system.
Preferably, the method further comprises:
the first guide part and the second guide part are respectively arranged corresponding to the first adjusting part and the second adjusting part, the parts of the first guide part and the second guide part are positioned on one side of the reference component, which is opposite to the transmission assembly, and the first adjusting part and the second adjusting part are respectively sleeved on the outer sides of the first guide part and the second guide part.
Preferably, the first adjustment portion and the first guide portion are engaged with each other so that the first adjustment portion can move along the first guide portion, and the second adjustment portion and the second guide portion are engaged with each other so that the second adjustment portion can move along the second guide portion.
Preferably, the first adjustment portion is configured to be adjustable in thickness in an axial direction of the rotation angle system, and the second adjustment portion is configured to be adjustable in thickness in the axial direction of the rotation angle system.
According to the dicing saw provided by the application, the waterproof cover is connected with the first connecting part of the supporting platen, which extends along the circumferential direction for one circle, through the second connecting part, which extends along the circumferential direction for one circle, and each position of the second connecting part in the circumferential direction is connected with the corresponding position of the first connecting part in the circumferential direction, so that the first connecting part and the second connecting part are formed into a whole, and a gap which can be used for water to flow to the lower part of the second part of the supporting platen through the water flow does not exist between the supporting platen and the waterproof cover in the circumferential direction of the corner system, and therefore adverse effects on equipment such as a corner motor and a shaft transmission mechanism below due to the water flow flowing down from the corner system can not occur when long-time cutting work is faced.
In order to make the above objects, features and advantages of the present application more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 shows a schematic diagram of an isometric view of a dicing saw;
FIG. 2 shows a schematic diagram of an isometric view of a corner system of the dicing saw;
FIG. 3 shows a schematic view of a prior art dicing saw corner system taken along a vertical plane in cross-section;
FIG. 4 shows a schematic diagram of a partial enlarged view at D of FIG. 3;
FIG. 5 illustrates a schematic diagram of a cross-sectional view taken along a vertical plane of a corner system of a dicing saw according to an embodiment of the application;
FIG. 6 shows a schematic diagram of a partial enlarged view at E of FIG. 5;
FIG. 7 illustrates a schematic diagram of a partial view of a corner system of a dicing saw according to an embodiment of the application;
fig. 8 shows a schematic diagram of a top view of a waterproof cover and a support platen of a corner system of a dicing saw according to an embodiment of the application;
fig. 9 is a schematic diagram showing a line graph of cutting accuracy and the number of cutting knives of the dicing saw according to the embodiment of the application;
fig. 10 shows a schematic view of a line drawing as a first comparative example of the cutting accuracy of the dicing saw provided according to the embodiment of the application;
fig. 11 shows a schematic diagram of a line drawing as a second comparative example of the cutting accuracy of the dicing saw provided according to the embodiment of the application.
Reference numerals:
10' -support plate; 20' -gland; 30' -waterproof part; a 40' -sealing part; a 50' -disc member; 60' -insulating base; a 70' -motor mechanism; 91-rubber leather; a' -an existing corner system;
10-supporting a bedplate; 11-a first part; 12-a second part; 20-capping; 30-a waterproof cover; 40-sealing member; 50-a central disc; 60-an insulating base; 70-rotating angle motor; 80-a reference member; 81-a fixing part; 82-a first adjustment section; 83-a second adjustment section; 84-a first guide; 85-a second guide; a-a corner system; b-reference radius; c-central angle.
Detailed Description
The following description of the embodiments of the present application will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the application are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
In the description of the present application, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present application.
A dicing saw according to an embodiment of the present application is provided, and the structure and operation of the dicing saw will be described in detail below with reference to fig. 1 to 8.
Before the present application is proposed, when a dicing saw performs a dicing operation for a long time, particularly when a dicing operation is performed for a long time for a large-sized workpiece, there is a case where dicing accuracy is lowered. In the prior art, operators often empirically attribute such precision degradation to equipment thermal distortion, positional errors, and equipment wear. Because these factors are factors that gradually significantly affect the accuracy of the process over time when such equipment as dicing saw is processed for a long period of time. This inertial thinking has led to the operator being unaware of other factors that may be present when the dicing saw is performing the dicing operation for a long period of time with reduced accuracy. However, it has been unexpectedly found in actual production that the reduced accuracy of dicing saw cutting over a long period of time is associated with the corner system a of the dicing saw.
Specifically, in the prior art, the conventional corner system a' structure of the dicing saw as shown in fig. 3 is often adopted. For ease of reference, structures related to the prior art are denoted by reference numerals that differ from the embodiments of the present application. In the prior art, the waterproof part 30' is opened with a through hole through which the support plate 10' is penetrated, and the pressing cover 20' is pressed against the disc member 50', thereby being covered on the outer side of the upper portion of the support plate 10 '. On this basis, in the prior art, the sealing part 40 'is arranged between the gland 20' and the waterproof part 30', the position of the sealing part 40' is coated with lubricating grease, and the rubber skin 91 is also arranged between the waterproof part 30 'and the step surface of the support plate 10', so as to isolate water flow.
Because a large amount of cutting scraps can be generated in the working process of the scribing machine, the cutting scraps and water flow can contact the lubricating grease when the cutting scraps and water flow are choked by the lubricating grease along with the water flow, and the environment temperature is higher, the lubricating grease can be aggravated to be oxidized after the scribing machine works for a long time, so that the lubricating grease becomes sticky and dry, the water blocking and lubricating effects of the lubricating grease are poor, and even the water blocking and lubricating effects are lost.
In this case, further referring to fig. 4, the water flow may occur in the case shown in fig. 4, that is, the water flow flows into the gap between the waterproof part 30' and the pressing cover 20', the water flow, which should be blocked by the grease together with the sealing part 40', passes through the gap between the waterproof part 30' and the supporting plate 10' due to the deterioration of the water blocking and lubrication effects of the grease, enters the gap between the waterproof part 30' and the upper end surface of the lower portion of the supporting plate 10', and finally flows downward. The downward water flow may adversely affect the motor mechanism 70' of the existing corner system a ', and the X-axis transmission mechanism, i.e., the guide rail and the screw, of the dicing saw located below the existing corner system a ', that is, the electrical working condition of the motor mechanism 70', and the water vapor generated by the water flow may cause the rust precision of the X-axis transmission mechanism to be reduced, and at the same time, there is a potential short-circuit threat to the motor mechanism 70 '.
Therefore, based on the above thought of the present application, the dicing saw provided according to the embodiment of the present application is presented below to solve the above technical problems.
The dicing saw according to the embodiment of the application comprises a corner system a comprising a support platen 10, an upper gland 20, a waterproof cover 30 and a sealing member 40. The support platen 10 comprises a first portion 11 and a second portion 12 connected in the axial direction of the corner system a, the first portion 11 of the support platen 10 having a smaller dimension in the direction perpendicular to the axial direction than the second portion 12 of the support platen 10. The upper gland 20 is covered on the outer side of the first portion 11 of the support platen 10, the waterproof cover 30 is covered on the outer side of the second portion 12 of the support platen 10, and the waterproof cover 30 includes a shielding portion interposed between the side of the upper gland 20 facing the second portion 12 of the support platen 10 and the second portion 12 of the support platen 10. The seal 40 is interposed between the portion of the waterproof cover 30 and the side of the upper gland 20 facing the second portion 12 of the support platen 10.
Wherein the support platen 10 includes a first connecting portion extending one circumference along the circumferential direction of the corner system a, and the waterproof cover 30 includes a second connecting portion extending one circumference along the circumferential direction, each position of the second connecting portion in the circumferential direction being connected with a position of the first connecting portion corresponding in the circumferential direction, such that the first connecting portion and the second connecting portion are formed as one body.
According to the dicing saw provided by the embodiment of the application, the waterproof cover 30 is connected with the first connecting part of the supporting platen 10 extending along the circumferential direction by the second connecting part extending along the circumferential direction, and each position of the second connecting part in the circumferential direction is connected with the corresponding position of the first connecting part in the circumferential direction, so that the first connecting part and the second connecting part are formed into a whole, and a gap for water to flow to the lower part of the second part 12 of the supporting platen 10 through which water can flow is not formed between the supporting platen 10 and the waterproof cover 30 in the circumferential direction of the corner system A, so that adverse effects on the corner motor 70, the X-axis transmission mechanism below and other devices caused by the water flowing from the corner system A can not occur when long-time cutting work is faced.
As shown in fig. 8, fig. 8 shows the support platen 10 and the waterproof cover 30 in a plan view, and in the embodiment, "each position of the second connecting portion in the circumferential direction is connected with a position of the first connecting portion corresponding in the circumferential direction" includes the following meanings: for each position of the second connection in the circumferential direction, this position together with a reference radius B of the circumference defines a central angle C, and the position of the first connection, likewise with reference to this reference radius B and defined by this central angle C, is the position of the first connection corresponding to this position of the second connection, i.e. both positions lie on the same radius.
In an embodiment, the formation herein integrally includes the following meanings: the two parts are formed into a whole by connecting means, and the two parts formed into the whole have force interaction when stressed, and the motion states are synchronous when in motion (including but not limited to being driven and being carried). In the embodiment, the first connection portion and the second connection portion may be integrally formed or bonded, etc., as will be described later.
In an embodiment, the second connection portion may include an inner edge surrounding an outer side of the first connection portion, and the first connection portion may include a portion of an outer side of the first portion 11 of the support platen 10, and the inner edge may be connected with the portion of the outer side of the first portion 11 of the support platen 10 to be formed as one body. In an embodiment, as shown in fig. 8, the inner ring of the waterproof cover 30 may be the aforementioned inner edge, which surrounds the outer side of the first portion 11 of the support platen 10, and in fig. 8, the distance between the aforementioned inner edge and the outer side of the first portion 11 of the support platen 10 is exaggeratedly shown for convenience of showing them in the drawing, and in fact the aforementioned inner edge and the outer side of the first portion 11 of the support platen 10 are connected to each other. Thus, the dicing saw according to the embodiment of the application is equivalent to the waterproof cover 30 connected to the outer side of the first portion 11 of the supporting platen 10, so as to be beneficial to blocking the water flow to the maximum extent.
As an example, in an embodiment, the waterproof cover 30 may be integrally formed with the first portion 11 of the support platen 10, that is, the waterproof cover 30 extends radially outwardly of the corner system a from the outside of the first portion 11 of the support platen 10. The adoption of the integrally formed waterproof cover 30 and the supporting platen 10 can avoid the existence of the joint position when the waterproof cover 30 and the supporting platen 10 are connected in a split mode, so that the risk that water flows through the joint position of the waterproof cover 30 and the supporting platen 10 can be eliminated, and particularly in the condition that cutting scraps are carried in the water flows, the mixed water flows have larger kinetic energy, and the integrally formed waterproof cover is beneficial to ensuring that the water flows are effectively blocked. As an example, the waterproof cover 30 and the first portion 11 of the support platen 10 may be both formed of plastic.
In an embodiment, the second connection may comprise an annular end surface opposite to the second portion 12 of the support platen 10 in the axial direction of the corner system a, the first connection may comprise a portion of the end surface of the second portion 12 of the support platen 10 facing the gland 20, and the annular end surface may be connected with the portion of the end surface of the second portion 12 of the support platen 10 facing the gland 20 to form a single body.
Alternatively, unlike the above arrangement, the upper end surface of the support platen 10 may be connected with the waterproof cover 30, in which connection the connection area between the waterproof cover 30 and the support platen 10 is larger, which is more advantageous in ensuring the strength of the connection. Further, the waterproof cover 30 may be integrally formed with the second portion 12 of the support platen 10, and the advantages of the integral forming are the same as those of the integral forming mentioned in the above description, which will not be repeated herein, and the waterproof cover 30 and the second portion 12 of the support platen 10 may be formed of plastic.
In the embodiment, the drawings of the embodiment of the present application show an example in which the waterproof cover 30 is integrally formed with the upper portion of the support platen 10, in which the first portion 11 of the support platen 10 and the second portion 12 of the support platen 10 may abut against each other in the axial direction of the corner system a, that is, unlike the prior art, the first portion 11 and the second portion 12 of the support platen 10 may be separately disposed and abutted together, which is advantageous for the processing of integrally forming the first portion 11 of the support platen 10 with the waterproof cover 30 on the one hand, and for the maintenance and replacement of the waterproof cover 30 on the other hand, only the integral structure of the first portion 11 of the support platen 10 and the waterproof cover 30 needs to be replaced, which is advantageous for the reduction of the maintenance cost of the waterproof cover 30.
In addition, backtracking to the prior art, it relies on V type sealing strip and rubber to carry out the choked flow of water on mechanical structure alone, if there is the error in the assembly, then there is the risk of leaking greatly, this risk is in the unexpected discovery of the in-process of taking into account the sealing performance of buckler 30: with the long-time cutting, although the cooling water spraying treatment is adopted, the temperature in the cutting chamber inevitably rises, and if the pressing amount of the seal member 40 by the upper pressing cover 20 is not uniform, the situation that water vapor permeates upward occurs in the partial corner system a due to the influence of the thermal expansion non-uniformity, that is, the situation shown in fig. 6, thereby giving the influence of looseness to the vacuum adsorption fixing of the substrate and the like, which also causes the reduction of the cutting accuracy. For this reason, the embodiment of the present application solves this problem in the following manner.
In an embodiment, the dicing saw provided according to an embodiment of the application further includes a center plate 50, a transmission assembly, a reference member 80, a first adjusting portion 82, and a second adjusting portion 83. Wherein the upper gland 20 may be covered on the central disk 50, and a portion of the central disk 50 may be exposed to the outside of the upper gland 20. The transmission assembly may be connected to one side of the central disk 50 in the axial direction of the corner system a, and the support platen 10 may be sleeved outside a portion of the transmission assembly. The reference member 80 may be connected with a side of the transmission assembly facing away from the central disc 50, and the reference member 80 may include a fixing portion 81 at a side facing away from the transmission assembly for connection with an external connection surface.
Further, the first adjusting portion 82 and the second adjusting portion 83 may be provided on a side of the reference member 80 facing away from the transmission assembly, and the first adjusting portion 82 and the second adjusting portion 83 may be used to apply force to the reference member 80 to adjust the degree of inclination of the reference member 80 with respect to the axial direction of the rotation angle system a.
According to the dicing saw provided by the embodiment of the application, the reference member 80 is mounted on the external connection surface by the fixing portion 81, and then the reference member 80 is leveled by adjusting the inclination degree of the reference member 80 relative to the axial direction of the corner system a by the first adjusting portion 82 and the second adjusting portion 83 (forming a triangle with the fixing portion 81) on the same side as the fixing portion 81, so that the transmission assembly above the reference member 80, the center plate 50 and the upper gland 20 are leveled, and in this case, the pressing amount of the upper gland 20 to the seal 40 is kept consistent, thereby avoiding the situation that the pressing amount is inconsistent due to the assembly height error and water vapor permeates upwards.
In an embodiment, the transmission assembly herein may include an insulated base 60 and a corner motor 70 arranged in a vertical direction (i.e., the axial direction of the corner system a). As an example, the reference member 80 may be a reference plate and the seal 40 may be a sealing strip, such as a V-shaped sealing strip.
In an embodiment, the dicing machine according to the embodiment of the application may further include a first guide portion 84 and a second guide portion 85, the first guide portion 84 and the second guide portion 85 may be disposed corresponding to the first adjustment portion 82 and the second adjustment portion 83, respectively, a portion of the first guide portion 84 and a portion of the second guide portion 85 may be located at a side of the reference member 80 opposite to the driving assembly, and the first adjustment portion 82 and the second adjustment portion 83 may be sleeved outside the first guide portion 84 and the second guide portion 85, respectively. The dicing saw provided by the embodiment of the application. The first guide portion 84 and the second guide portion 85 can guide the first adjustment portion 82 and the second adjustment portion 83 to perform adjustment operations along the first guide portion 84 and the second guide portion 85, respectively, so that stability of the adjustment of the inclination degree of the reference member 80 with respect to the axial direction of the rotation angle system a by the first adjustment portion 82 and the second adjustment portion 83 is improved, and time consumed for adjustment is reduced.
In the embodiment, as an example, the first adjusting portion 82 may be engaged with the first guide portion 84 to enable the first adjusting portion 82 to move along the first guide portion 84, and the second adjusting portion 83 may be engaged with the second guide portion 85 to enable the second adjusting portion 83 to move along the second guide portion 85. In an embodiment, as an example, the first guide portion 84 and the second guide portion 85 may have external threads, for example, the first guide portion 84 and the second guide portion 85 may be screws, and the first adjustment portion 82 and the second adjustment portion 83 may each be nuts, and the leveling is achieved by using the threaded engagement of the corresponding adjustment portions and the guide portions, so that the leveling process is more convenient. In an embodiment, the end surface of the reference plate of the dicing saw facing away from the transmission assembly may have a recess accommodating the first adjusting portion 82 and a recess accommodating the second adjusting portion 83, thereby making the structure of the dicing saw more compact.
In another example, the first adjusting portion 82 is configured to be adjustable in thickness in the axial direction of the corner system a, and the second adjusting portion 83 is configured to be adjustable in thickness in the axial direction of the corner system a. As an example, in an embodiment, the first and second adjustment portions 82 and 83 may each be a stacked plurality of pad structures, each of which may have a cutout, and the thickness of each adjustment portion may be changed by inserting and extracting the pad structure from the adjustment portion, thereby applying a leveling force to the reference member 80, thereby enabling leveling to be more accurate.
Furthermore, in the embodiment, in the case where the waterproof cover 30 is connected to the first portion 11 of the support platen 10 to be formed as one body, the side portion of the waterproof cover 30 facing away from the upper gland 20 (i.e., the lower side portion in the drawing) may be directly attached to the end face of the second portion 12 of the support platen 10 facing the upper gland, that is, in the present embodiment, the rubber sheet 91 is not provided as in the prior art, which is advantageous in reducing the complexity of the assembly dimension chain of the corner system a, thereby further reducing the assembly error of the corner system a, and avoiding the occurrence of the above-described upward vapor permeation.
According to the dicing saw provided by the embodiment of the application, the waterproof cover is of an integrated structure (namely, the waterproof cover and the first part of the supporting platen), the waterproof cover base (namely, the second part of the supporting platen) is used for installation, the V-shaped sealing strip (namely, the sealing piece) is adopted, the sealing performance is improved, the application of lubricating grease and rubber coating is canceled, and the risk of water leakage caused by the deterioration of the lubricating grease or the assembly error is avoided. In an embodiment, the integrated waterproof cover and VL ring (i.e., seal) seals against water flow, preventing water flow from penetrating downward. According to the embodiment of the application, the front end of the reference plate is changed into a fixed surface mounting mode, the rear end adopts two adjusting screws to level corners, and the height of the two adjusting nuts at the rear end is regulated by the fixed surface because the front end of the reference plate is regulated by the fixed surface, so that the height of the corners can be ensured to be uniform, the pressing-in amount of the upper gland pressing V-shaped sealing strip (namely the sealing piece) in fig. 5 is kept consistent, and water leakage caused by less pressing-in amount due to assembly height errors is avoided.
In general, the dicing saw provided by the embodiment of the application can block the downward penetrating path of water flow, can meet the requirement that the dicing saw has no water leakage risk in long-time use, and avoids the risks of short circuit of a corner motor, rust of a guide rail screw, influence on precision and the like. The integrated waterproof cover structure is adopted, so that downward water permeation is blocked from the mechanical structure, the process of coating lubricating grease and pasting rubber is omitted, and the sealing performance and the water blocking stability are greatly improved. The front end of the reference plate is changed into a fixed surface (namely a fixed part) installation form, the rear end adopts two adjusting screws to level corners, the structure can ensure that the heights of the corners are uniform, the pressed-in amount of the V-shaped sealing strip is kept consistent, and water leakage caused by less pressed-in amount due to assembly height errors is avoided.
Referring to fig. 9 to 11, fig. 9 to 11 show three line diagrams of cutting accuracy and the number of cutting knives. Fig. 9 is a line diagram of cutting accuracy and the number of cutting knives of the dicing saw according to the embodiment of the application, and fig. 10 and 11 are comparative examples. As shown in FIG. 9, the abscissa represents the number of cutting knives and the ordinate represents the cutting accuracy, and the cutting accuracy is stabilized within a 3 μm pass range for cutting 100 knives.
With respect to fig. 10, fig. 10 shows a line diagram of cutting accuracy in the case where the split type waterproof part structure in the prior art causes water leakage, and the abscissa is the same as fig. 9, and the cutting accuracy fluctuates extremely and irregularly due to corrosion and rust of the screw guide rail below the existing corner system caused by water leakage, and in the case shown in fig. 10, it has been substantially difficult for the dicing saw to perform normal cutting work.
With respect to fig. 11, fig. 11 shows a cutting accuracy line diagram of water leakage caused by insufficient pressing amount of the sealing member, and the abscissa is the same as fig. 9, and water leakage causes corrosion and rust of the screw guide rail below the conventional corner system, so that the cutting accuracy also fluctuates extremely and irregularly, and in the case shown in fig. 11, it is substantially difficult for the dicing saw to perform normal cutting operation.
The foregoing description of the preferred embodiments of the present application should not be construed as limiting the scope of the application, but rather should be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the application as defined by the following description and drawings or any application directly or indirectly to other relevant art(s).
Claims (5)
1. A dicing saw comprising a corner system, the corner system comprising:
a support platen including a first portion and a second portion that abut in an axial direction of the corner system, the first portion of the support platen having a smaller dimension in a direction perpendicular to the axial direction than the second portion of the support platen;
an upper gland cover arranged outside the first part of the support platen;
a waterproof cover provided outside the second portion of the support platen, the waterproof cover including a shielding portion interposed between a side portion of the upper gland facing the second portion of the support platen and the second portion of the support platen;
a seal between the shield and a side of the upper gland facing the second portion of the support platen;
wherein the support platen includes a first connecting portion extending along a circumference of the corner system, the waterproof cover includes a second connecting portion extending along the circumference, the second connecting portion being connected to a position of the first connecting portion corresponding to the position in the circumference at each position in the circumference so that the first connecting portion and the second connecting portion are formed as one body;
the second connection portion includes an inner edge surrounding an outer side of the first connection portion, the first connection portion including a portion of the outer side of the first portion of the support platen;
the waterproof cover is integrally formed with the first portion of the support platen.
2. The dicing saw of claim 1, further comprising:
the upper gland cover is arranged on the central disc, and part of the central disc is exposed to the outside of the upper gland;
the transmission assembly is connected with one side of the central disc in the axial direction of the corner system, and the supporting platen is sleeved on the outer side of a part of the transmission assembly;
a reference member connected with a side of the transmission assembly facing away from the center plate, the reference member including a fixing portion at a side facing away from the transmission assembly for connection with an external connection surface;
the first adjusting part and the second adjusting part are arranged on one side of the reference member, which is opposite to the transmission assembly, and the first adjusting part and the second adjusting part are used for applying force to the reference member so as to adjust the inclination degree of the reference member relative to the axial direction of the corner system.
3. The dicing saw of claim 2, further comprising:
the first guide part and the second guide part are respectively arranged corresponding to the first adjusting part and the second adjusting part, the parts of the first guide part and the second guide part are positioned on one side of the reference component, which is opposite to the transmission assembly, and the first adjusting part and the second adjusting part are respectively sleeved on the outer sides of the first guide part and the second guide part.
4. A dicing saw according to claim 3, wherein the first adjustment portion and the first guide portion cooperate with each other to enable movement of the first adjustment portion along the first guide portion, and the second adjustment portion and the second guide portion cooperate with each other to enable movement of the second adjustment portion along the second guide portion.
5. A dicing saw according to claim 3, wherein the first adjusting portion is configured to be adjustable in thickness in the axial direction of the corner system, and the second adjusting portion is configured to be adjustable in thickness in the axial direction of the corner system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310644730.4A CN116373138B (en) | 2023-06-02 | 2023-06-02 | Dicing saw |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310644730.4A CN116373138B (en) | 2023-06-02 | 2023-06-02 | Dicing saw |
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| CN116373138A CN116373138A (en) | 2023-07-04 |
| CN116373138B true CN116373138B (en) | 2023-08-25 |
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| TW549560U (en) * | 2002-11-18 | 2003-08-21 | Ind Tech Res Inst | Rotational positioning mechanism for separating brittle material |
| GB0403235D0 (en) * | 2004-02-13 | 2004-03-17 | Aesseal Plc | A mechanical seal with a self-aligning mechanism and barrier media circulation system |
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|---|---|---|---|---|
| CN102554632A (en) * | 2010-12-17 | 2012-07-11 | 北京中电科电子装备有限公司 | Leveling device and scribing machine |
| CN104244651A (en) * | 2014-09-30 | 2014-12-24 | 成都汉康信息产业有限公司 | Waterproofing device of water conservancy telemetering terminal |
| CN210819007U (en) * | 2019-09-27 | 2020-06-23 | 大族激光科技产业集团股份有限公司 | Wafer cutting machine with adjustable workstation |
| CN111002217A (en) * | 2019-11-25 | 2020-04-14 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Leveling mounting frame and sheet bearing device |
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| CN116373138A (en) | 2023-07-04 |
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