CN116360033A - Coupling mode of single mode fiber and lead zirconate titanate waveguide based on glass substrate - Google Patents
Coupling mode of single mode fiber and lead zirconate titanate waveguide based on glass substrate Download PDFInfo
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- 229910052451 lead zirconate titanate Inorganic materials 0.000 title claims description 82
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 title claims description 16
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4292—Coupling light guides with opto-electronic elements the light guide being disconnectable from the opto-electronic element, e.g. mutually self aligning arrangements
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G02B2006/12038—Glass (SiO2 based materials)
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- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
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Abstract
The invention discloses a coupling mode of an optical fiber and a PZT waveguide based on a glass substrate. And adding a glass waveguide between the single-mode fiber and the PZT waveguide, designing an inverse conical PZT waveguide in an adiabatic coupling area overlapped with the glass waveguide and the PZT waveguide to realize low-loss power transmission, and providing mechanical contact between the two by using an optical transparent adhesive and controlling waveguide separation. The glass waveguide has low transmission loss and high withstand power, is added between the waveguide and the optical fiber as an interface, is directly coupled with a single-mode fiber at one end, and is evanescently coupled with the conical PZT waveguide at the other end, so that the coupling efficiency of the optical fiber and the PZT waveguide can be improved, and the optical power loss at the interface can be reduced.
Description
Technical Field
The invention relates to the field of coupling modes of single-mode fibers and lead zirconate titanate waveguides, in particular to a coupling mode of a single-mode fiber and a lead zirconate titanate waveguide based on a glass substrate.
Background
Piezoelectric ceramics are functional ceramics capable of mutually converting mechanical energy and electric energy, and have wide application in the aspects of resonators, sensors, ultrasonic transducers, drivers, filters, electronic igniters and the like. Among them, lead zirconate titanate (Pb (Zr 1-xTiO 3) ceramics have excellent piezoelectric and dielectric properties. The piezoelectric ceramic has the advantages of good stability, high precision, high energy conversion efficiency, high response speed, obvious mechanical quality factor, piezoelectric coefficient and electromechanical coupling constant superior to those of lead-free piezoelectric ceramics, and is widely applied to the fields of piezoelectric sensing and driving.
With the progressive maturity of silicon optical technology, PZT is also beginning to be used for fabricating photonic devices, mainly optical switches, modulators, etc., and in the future, PZT will also be used for fabricating various types of waveguides. However, PZT waveguides have limited compatibility with fiber optic assemblies because of the size mismatch between the fiber and PZT waveguide modal distributions. Optical fibers typically have a mode field size (MFD) of about 10 micrometers (μm). The large MFD mismatch between the optical propagation modes in PZT waveguides and the fiber is called a coupling mismatch, which causes significant optical power loss at the interface. In view of the above problems, a solution is proposed below.
Disclosure of Invention
The invention aims to provide a coupling mode of a single-mode fiber and a lead zirconate titanate waveguide based on a glass substrate, which has the advantages of improving the coupling efficiency of the fiber and the PZT waveguide and reducing the optical power loss at an interface.
The technical aim of the invention is realized by the following technical scheme:
the coupling mode of the single mode fiber and the lead zirconate titanate waveguide based on the glass substrate comprises the glass substrate, the glass substrate is a glass waveguide, a PZT waveguide is arranged on the glass substrate, a reverse taper structure is arranged in a coupling area of the PZT waveguide, the reverse taper structure is used for realizing low-loss power transmission between the glass waveguide and the PZT waveguide, the glass waveguide and the PZT waveguide are fixed through an optical transparent adhesive, the optical transparent adhesive is used for controlling waveguide separation, and the ion exchange waveguide is aligned with the PZT waveguide.
Preferably, the PZT waveguide fabrication includes the steps of: a PZT waveguide is fabricated using a PZT material deposition etch on a silicon dioxide material and covered with a buried oxide layer. Preferably, the glass waveguide fabrication includes the steps of:
s1: covering a mask on a glass substrate, and carrying out photoetching on the glass substrate;
s2: covering a glass substrate with first molten salt, and performing primary silver ion exchange;
s3: removing the first molten salt and the mask, covering the glass substrate with the second molten salt, performing secondary sodium ion exchange, and removing the second molten salt on the surface of the glass substrate after the completion;
s4: separating the glass substrate by laser;
through the steps, the optical waveguide with graded refractive index is manufactured on the top of the glass substrate.
Preferably, the inverse taper structure is such that the PZT portion expands in the horizontal direction and gradually decreases in width toward the glass waveguide, exhibiting an inverse taper.
Preferably, the evanescent coupling region is designed by calculating the continuous overmode overlap integral of the inverse tapered structure along the taper as a measure of the change in the mismatch loss of the MFD; the reverse taper structure taper shape is obtained by applying a constant mode mismatch loss along the taper length; the taper design takes into account the supermode overlap integration of the TE and TM modes.
Preferably, the buried oxide layer material of the PZT waveguide is silicon dioxide.
Preferably, the PZT waveguide has a rectangular cross-sectional profile.
Preferably, in the glass waveguide, the electric field is concentrated at a high refractive index of the graded-index region.
Preferably, the glass waveguide is directly coupled to the optical fiber and evanescently coupled to the PZT waveguide at a coincident edge portion thereof.
Preferably, a tightly controlled adhesive bond line thickness is required, as well as stability of the cured adhesive refractive index in terms of time and temperature variation, to maintain high coupling efficiency.
Preferably, the glass waveguide is designed to have a refractive index contrast (the difference between the maximum refractive index at the center of the waveguide and the minimum refractive index at the periphery), and a higher refractive index contrast can reduce bending loss, so that a denser waveguide arrangement can be realized with a smaller minimum bending radius.
The beneficial effects of the invention are as follows:
the application consists of glass waveguides and tapered PZT waveguides evanescently coupled.
The first part is a glass waveguide, and the glass waveguide manufacturing process comprises a plurality of process steps, mainly four steps: photoetching; primary silver ion exchange; reference protection, mask removal and secondary ion exchange; and (5) laser separation. Through the above steps, an optical waveguide with graded refractive index is fabricated on top of the glass. The optical quality of the top surface of the glass substrate carrying the ion exchange (IOX) waveguide is well suited for evanescent mode coupling with the PZT waveguide.
The second part is a PZT waveguide, where PZT material is deposited and etched on a silicon dioxide material and covered by a thin silicon dioxide layer, forming a PZT waveguide, and designing a reverse taper structure in the coupling area.
The glass waveguide and PZT waveguide are aligned using an optically clear adhesive to provide mechanical contact and control waveguide separation.
The low loss power transfer between PZT and glass waveguides is achieved by adiabatic reduction of PZT waveguide width. The continuous overmode overlap integral along the taper is calculated as a measure of the change in the mismatch loss of the MFD, thereby designing the evanescent coupling region. The taper shape is obtained by applying a constant mode mismatch loss along the taper length. The taper design takes into account the supermode overlap integration of the TE and TM modes.
The structure has the advantages that the PZT waveguide is directly coupled with the optical fiber, the loss is too high, the glass waveguide is used as an intermediate layer, the PZT waveguide can be coupled with the PZT waveguide in an evanescent way, the PZT waveguide can be directly coupled with a single-mode optical fiber, and the tolerance power is higher.
Drawings
FIG. 1 is a schematic diagram of coupling mismatch between an embodiment PZT waveguide and an optical fiber;
FIG. 2 is a perspective conceptual view of a coupling mode of a single mode fiber based on a glass substrate and a PZT waveguide according to an embodiment;
FIG. 3 is a cross-sectional view of the adiabatic coupling region of FIG. 2;
fig. 4 is a flowchart showing a specific process for manufacturing a glass waveguide according to an embodiment.
Reference numerals: 201. an optical fiber interface; 202. a glass waveguide; 204. a PZT waveguide; 203. adiabatic coupling; 301. burying an oxide layer; 302. a silicon dioxide material; 303. a PZT material; 304. an adhesive; 305. ion-exchanged glass waveguides; 306. and (3) a core.
Detailed Description
The following description is only of the preferred embodiments of the present invention, and the scope of the present invention should not be limited to the examples, but should be construed as falling within the scope of the present invention. Wherein like parts are designated by like reference numerals.
As shown in fig. 1, is a typical photonic chip design for coupling PZT waveguide 204 to an optical fiber. The design includes an inverted cone waveguide that serves as a chip edge coupler that can meet lower loss, polarization independent, broadband and lower cost requirements. The edge of the on-chip tapered waveguide (taper) is typically a few microns from the chip edge at the fiber interface 201 due to manufacturing limitations or design requirements. The design also includes cladding layers below and above the tapered waveguide, e.g., siO 2 A layer as a propagation medium along or at the end of the tapered waveguide. Along the SiO 2 The propagation of the tapered waveguide in (a) amplifies the waveguide mode, which continues at the SiO at the tapered tip 2 Propagates in the medium and then reaches the fiber. However, due to SiO 2 The lack of lateral confinement in the layer causes the output light from the tapered tip to be stray in the cladding. The high refractive index of the Si substrate results in a significant portion of the output light from the tapered tip penetrating into the substrate, which can greatly reduce the coupling efficiency of the chip to the fiber. .
Embodiments provided herein provide for improved coupling efficiency between PZT waveguide 204 and an optical fiber (or other suitable optical waveguide having an MFD comparable to an optical fiber), reducing coupling mismatch. The embodiment includes adding a glass waveguide 202 to reduce coupling losses at the interface between the PZT waveguide 204 and the optical fiber. Glass waveguide 202 is added as an interface between the waveguide and the fiber. This design increases coupling efficiency by maximizing or increasing the recovery fraction between the waveguide and the optical propagation modes supported by the fiber.
The invention is further described below with reference to the accompanying drawings.
Fig. 2 is a coupling structure diagram of a single mode fiber and PZT waveguide, which is mainly divided into three parts: a fiber interface 201, a glass waveguide 202, and a PZT waveguide 204. The overlap of the glass waveguide 202 and PZT waveguide 204 is the adiabatic coupling 203, a critical part of the present invention, and its cross-section is shown in fig. 3. Wherein the PZT waveguide 204 is reverse tapered, as shown in phantom.
Fig. 3 is a cross-sectional view of a coupling portion of a glass waveguide and a PZT waveguide. The upper half is a PZT material 303 deposited etched on the silicon dioxide material 302 and covered by a thin silicon dioxide layer to form the PZT waveguide 204 having a rectangular cross-sectional profile. The lower half is a glass waveguide 202 with a graded index at the top center (core 306) with the highest index at the center tapering toward the periphery. The upper and lower portions are joined by an adhesive 304.
The specific principle is as follows:
First, for glass waveguide 202, it is accomplished through multiple processing steps, mainly the following four steps: (1) photolithography; (2) primary silver ion exchange; (3) reference protection, mask removal and secondary ion exchange; (4) laser separation. The process flow is schematically shown in fig. 4. With these steps, an optical waveguide with graded refractive index can be manufactured. Meanwhile, the refractive index contrast (the difference between the central maximum refractive index and the peripheral minimum refractive index at the core 306) of the glass waveguide 202 needs to be designed, and a higher refractive index contrast can reduce bending loss, and a smaller minimum bending radius can realize denser waveguide arrangement.
Second, low loss power transfer between the PZT and the glass waveguide 202 is achieved by adiabatic reduction of the width of the PZT waveguide 204. As the waveguide width decreases, the confinement of the mode decreases, the effective cross section increases, and the effective refractive index decreases, allowing light to couple into the glass waveguide 202. The PZT material 303 partially expands in the horizontal direction and gradually decreases in width toward the glass waveguide 202, exhibiting an inverted taper. The continuous overmode overlap integral along the taper is calculated as a measure of the change in the mismatch loss of the MFD, thereby designing the evanescent coupling region. The taper shape is obtained by applying a constant mode mismatch loss along the taper length. The taper design takes into account the supermode overlap integration of the TE and TM modes.
Finally, an optically transparent adhesive 304 is utilized between glass waveguide 202 and PZT waveguide 204 to provide mechanical contact and control waveguide separation, with ion exchange waveguide and PZT waveguide 204 aligned. It should be noted that the coupling loss is very sensitive to the separation between waveguides, so that tight control of the adhesive 304 bond line thickness is required, in addition to the stability of the cured adhesive 304 refractive index with respect to time and temperature variations, to maintain high coupling efficiency.
The technical problems, technical solutions and advantageous effects solved by the present invention have been further described in detail in the above-described embodiments, and it should be understood that the above-described embodiments are only illustrative of the present invention and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present invention should be included in the scope of protection of the present invention.
Claims (9)
1. The coupling mode of the single mode fiber and the lead zirconate titanate waveguide based on the glass substrate is characterized by comprising the glass substrate, the glass substrate is a glass waveguide, a PZT waveguide is arranged on the glass substrate, a reverse taper structure is arranged in a coupling area of the PZT waveguide, the reverse taper structure is used for realizing low-loss power transmission between the glass waveguide and the PZT waveguide, the glass waveguide and the PZT waveguide are fixed through an optical transparent adhesive, the optical transparent adhesive is used for controlling waveguide separation, and the ion exchange waveguide is aligned with the PZT waveguide.
2. The coupling method of a single mode fiber based on a glass substrate and a lead zirconate titanate waveguide according to claim 1, wherein the PZT waveguide fabrication comprises the steps of: a PZT waveguide is fabricated using a PZT material deposition etch on a silicon dioxide material and covered with a buried oxide layer.
3. The coupling method of a single mode fiber based on a glass substrate and a lead zirconate titanate waveguide according to claim 1, wherein the glass waveguide fabrication comprises the following steps:
s1: covering a mask on a glass substrate, and carrying out photoetching on the glass substrate;
s2: covering a glass substrate with first molten salt, and performing primary silver ion exchange;
s3: removing the first molten salt and the mask, covering the glass substrate with the second molten salt, performing secondary sodium ion exchange, and removing the second molten salt on the surface of the glass substrate after the completion;
s4: separating the glass substrate by laser;
through the steps, the optical waveguide with graded refractive index is manufactured on the top of the glass substrate.
4. The coupling method of a single mode fiber based on a glass substrate and a lead zirconate titanate waveguide according to claim 1, wherein the inverse taper structure is a PZT portion which expands in a horizontal direction and gradually decreases in width toward the glass waveguide, exhibiting an inverse taper.
5. The glass substrate-based single mode fiber and lead zirconate titanate waveguide coupling method according to claim 4, wherein the evanescent coupling region is designed by calculating the continuous overmode overlap integral of the inverse taper structure along the taper as a measure of the variation of the mismatch loss of the MFD; the inverse taper structure taper shape is obtained by applying a constant mode mismatch loss along the taper length.
6. The coupling method of a single mode fiber based on a glass substrate and a lead zirconate titanate waveguide according to claim 2, wherein the buried oxide layer material of the PZT waveguide is silicon dioxide.
7. The glass substrate-based single mode fiber and lead zirconate titanate waveguide coupling of claim 1, wherein the PZT waveguide has a rectangular cross-sectional profile.
8. The coupling method of a single mode fiber based on a glass substrate and a lead zirconate titanate waveguide according to claim 1, wherein the electric field is concentrated at a high refractive index of the graded refractive index region in the glass waveguide.
9. The coupling mode of a single mode fiber based on a glass substrate and a lead zirconate titanate waveguide according to claim 1, wherein the glass waveguide can be directly coupled with the optical fiber and evanescently coupled with the PZT waveguide at a coincident edge portion with the PZT waveguide.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310248050.0A CN116360033A (en) | 2023-03-15 | 2023-03-15 | Coupling mode of single mode fiber and lead zirconate titanate waveguide based on glass substrate |
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| CN202310248050.0A CN116360033A (en) | 2023-03-15 | 2023-03-15 | Coupling mode of single mode fiber and lead zirconate titanate waveguide based on glass substrate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117872544A (en) * | 2024-03-12 | 2024-04-12 | 中国科学院半导体研究所 | Silicon-lead zirconate titanate heterogeneous photoelectric fusion monolithic integrated system |
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2023
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117872544A (en) * | 2024-03-12 | 2024-04-12 | 中国科学院半导体研究所 | Silicon-lead zirconate titanate heterogeneous photoelectric fusion monolithic integrated system |
| CN117872544B (en) * | 2024-03-12 | 2024-05-14 | 中国科学院半导体研究所 | Silicon-lead zirconate titanate heterogeneous photoelectric fusion monolithic integrated system |
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