CN116359844A - Optical fiber Fabry-Perot sound positioning sensor of hub coupling type vibrating diaphragm - Google Patents

Optical fiber Fabry-Perot sound positioning sensor of hub coupling type vibrating diaphragm Download PDF

Info

Publication number
CN116359844A
CN116359844A CN202310311725.1A CN202310311725A CN116359844A CN 116359844 A CN116359844 A CN 116359844A CN 202310311725 A CN202310311725 A CN 202310311725A CN 116359844 A CN116359844 A CN 116359844A
Authority
CN
China
Prior art keywords
hub
perot
coupling type
optical fiber
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310311725.1A
Other languages
Chinese (zh)
Inventor
王双
李雪萍
刘铁根
江俊峰
张鹏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin University
Original Assignee
Tianjin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin University filed Critical Tianjin University
Priority to CN202310311725.1A priority Critical patent/CN116359844A/en
Publication of CN116359844A publication Critical patent/CN116359844A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S5/00Position-fixing by co-ordinating two or more direction or position line determinations; Position-fixing by co-ordinating two or more distance determinations
    • G01S5/18Position-fixing by co-ordinating two or more direction or position line determinations; Position-fixing by co-ordinating two or more distance determinations using ultrasonic, sonic, or infrasonic waves
    • G01S5/22Position of source determined by co-ordinating a plurality of position lines defined by path-difference measurements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T90/00Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation

Abstract

The invention discloses an optical fiber Fabry-Perot sound positioning sensor of a hub coupling type vibrating diaphragm, which comprises a pair of hub coupling type vibrating diaphragms or hub coupling type vibrating units formed by a plurality of groups of hub coupling type vibrating diaphragms, optical fibers, a ceramic ferrule and a supporting structure, wherein the optical fiber Fabry-Perot sound positioning sensor comprises a plurality of groups of hub coupling type vibrating diaphragms; the hub coupling diaphragm comprises spokes and a vibration area; in each hub vibration unit, a coupling bridge connected with the centers of adjacent vibration areas is formed by adjacent spokes, and a naturally-formed coupling point is arranged on the coupling bridge; the hub vibration unit couples two adjacent vibration areas through a coupling bridge where each coupling point is located to form two independent Fabry-Perot cavities, and the two independent Fabry-Perot cavities are used as sensing units of the optical fiber Fabry-Perot acoustic positioning sensor. The invention has the advantages of differential arrival time delay and differential amplification of sound pressure, and realizes high-sensitivity sound positioning in a wide frequency range of thousands of hertz.

Description

Optical fiber Fabry-Perot sound positioning sensor of hub coupling type vibrating diaphragm
Technical Field
The invention belongs to the field of optical fiber sensing, and particularly relates to a design of an optical fiber Fabry-Perot acoustic positioning sensor.
Background
The current acoustic positioning technology has wide application in the fields of unmanned driving, unmanned aerial vehicle monitoring, underwater detection and the like. Since acoustic waves are the only signal currently known to be capable of being transmitted over long distances under water, acoustic positioning sensors are important in underwater detection applications such as anti-diving. However, the performance of the electrical acoustic sensor represented by the piezoelectric microphone is severely limited under extreme environments such as high temperature and high pressure, strong electromagnetic interference, underwater and the like, and the optical fiber sensor fills the blank of the electrical sensor in important fields due to the advantages of electromagnetic interference resistance, corrosion resistance, high temperature resistance and the like. The optical fiber Fabry-Perot sensor has the advantages of high sensitivity, high precision, small volume and the like in the optical fiber sensor. The optical fiber Fabry-Perot sensor is used as an array constructed by a basic sensing unit to realize the function of acoustic positioning, but along with the improvement of positioning precision and the improvement of positioning dimension, the number of the sensors in the array is increased, the distance between the sensors in the array is increased, the calculated amount and the difficulty of a subsequent algorithm are improved, and the miniaturization of the optical fiber Fabry-Perot acoustic positioning array is not facilitated. The membrane bridge coupling structure forms a multi-degree-of-freedom mass-spring-damping model, and the model has two modes of anti-phase and in-phase vibration, can amplify the delay difference and displacement difference of response to sound waves between the diaphragms, is beneficial to improving the positioning precision and reduces the size of the sound positioning array. In the current research, researchers have applied the structure to the design of a sensor, and proposed various modes of diaphragm coupling, the coupling modes are relatively complex, the membrane-to-membrane bridge coupling structure needs to be independently designed, meanwhile, the frequency range with amplification effect is generally limited to be near the resonance frequency, the disadvantages exist in the application of uncertain specific incident sound wave frequency, and the design and manufacture of the resonance frequency of the sensor have high requirements.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides an optical fiber Fabry-Perot sound positioning sensor of a hub coupling type vibrating diaphragm, which realizes the optical fiber Fabry-Perot sound positioning sensor with a wide frequency range and a sound positioning amplifying effect through the coupled vibrating diaphragm structural design.
The invention is realized by the following technical scheme:
an optical fiber Fabry-Perot sound positioning sensor of a hub coupling type vibrating diaphragm comprises a supporting structure, a pair of hub coupling type vibrating diaphragms and a ceramic ferrule, wherein the hub coupling type vibrating diaphragms are correspondingly connected with optical fibers; wherein: the hub coupling type vibrating diaphragm comprises spokes and a vibrating area, the supporting structure is provided with a supporting groove and a bottom hole, the hub coupling type vibrating diaphragm is covered on the supporting groove, an optical fiber penetrates out of the bottom hole through the ceramic ferrule, the end face of the optical fiber is aligned with the center of the vibrating area, and two independent Fabry-Perot cavities are formed on the end face of the optical fiber and the inner surface of the hub coupling type vibrating diaphragm and serve as sensing units of the optical fiber Fabry-Perot sound positioning sensor.
An optical fiber Fabry-Perot sound positioning sensor of a multi-dimensional hub coupling type vibrating diaphragm comprises a multi-dimensional hub coupling type vibrating unit; the hub coupling type vibration unit is formed by coupling a plurality of groups of hub coupling type vibration films, and the hub coupling type vibration films are correspondingly connected with optical fibers and ceramic ferrules; wherein: the hub coupling type vibrating diaphragm comprises spokes and vibrating areas, the supporting structure is provided with supporting grooves and bottom holes, the hub coupling type vibrating diaphragm covers the supporting grooves, optical fibers penetrate out of the bottom holes through the ceramic ferrule, the end faces of the optical fibers are aligned to the centers of the vibrating areas, coupling bridges connected with the centers of the adjacent vibrating areas are formed through the adjacent spokes in the hub coupling type vibrating unit, coupling points which are formed naturally are formed on the coupling bridges, the hub coupling type vibrating unit couples the adjacent vibrating areas through the coupling bridges, the end faces of the optical fibers are aligned to the centers of the vibrating areas, and a plurality of independent Fabry-Perot cavities are formed on the end faces of the optical fibers and the inner surfaces of the hub coupling type vibrating diaphragm and serve as sensing units of the optical fiber Fabry-Perot positioning sensor.
Compared with the prior art, the invention can achieve the following beneficial technical effects:
1) The method has the advantages of realizing the amplification of the arrival time delay difference and the sound pressure difference, and can realize the high-sensitivity sound positioning in a wide frequency range of thousands of hertz;
2) When N is more than or equal to 4, the optical fiber Fabry-Perot acoustic positioning sensor of the multi-dimensional hub coupling type vibrating diaphragm can realize coordinate positioning in a three-dimensional space, and the positioning precision is improved along with the increase of N;
2) The formants and the acoustic localization frequency ranges with amplification effects can be tailored.
Drawings
FIG. 1 is a schematic diagram of an optical fiber Fabry-Perot acoustic positioning sensor structure of a hub coupling type vibrating diaphragm, wherein the optical fiber Fabry-Perot acoustic positioning sensor structure comprises a sensor (1A), a Fabry-Perot cavity structure (1B) and a Fabry-Perot cavity structure (1C);
FIG. 2 is a schematic diagram of a hub-coupled diaphragm and a multi-dimensional hub-coupled vibration unit formed by the same, (2A) a two-dimensional hub-coupled diaphragm example, (2B) a four-dimensional hub-coupled diaphragm example;
FIG. 3 is a schematic diagram of an optical fiber Fabry-Perot positioning sensor with a hub coupled diaphragm;
FIG. 4 is a schematic diagram of vibration modes of a diaphragm;
FIG. 5 is a diagram of a simulation calculation of the positioning of a diaphragm, (4A) a displacement difference versus incident angle curve, (4B) a phase difference versus incident angle curve, (4C) a phase difference gain versus incident angle curve, and (4D) a 45 DEG incident angle phase difference frequency response of the diaphragm;
FIG. 6 is a sensor interference spectrum;
FIG. 7 is a schematic diagram of an experimental system, (6A) an acoustic experimental environment, (6B) a demodulation system;
FIG. 8 is a plot of signal strength at 7.2kHz for the vibration region, (7A) left vibration region power spectrum and filtered signal, and (7B) right vibration region power spectrum and filtered signal;
FIG. 9 is a graph showing the actual measurement of the time delay differences for each frequency at different angles of incidence;
in the figure: 1. the device comprises an optical fiber, 2, a ceramic ferrule, 3, a supporting structure, 4, a hub coupling type vibrating diaphragm, 5, spokes, 6, coupling points, 7, a vibrating area, 8, a coupling bridge, 9, a rotary displacement table, 10, a reference microphone, 11, a flywheel coupling type optical fiber Fabry-Perot sensor, 12, a nano displacement table, 13, a semi-anechoic chamber, 14, a beam splitter, 15, a tunable laser, 16, a circulator, 17, a photoelectric detector, 18, a collecting card, 19, a supporting groove, 20, a bottom hole, 21, a vibrating diaphragm removing part, 22, a sound source, 23, 24, a Fabry-Perot cavity, 24 and a sleeve.
Detailed Description
The technical scheme will be described in detail below with reference to the accompanying drawings and examples.
As shown in FIG. 1, the optical fiber Fabry-Perot acoustic positioning sensor of the hub coupling type vibrating diaphragm is structurally schematic. Wherein, (1A) the sensor is composed of, (1B) the sensor structure, and (1C) the Fabry-Perot cavity structure. The sensor structure comprises an optical fiber 1, a ceramic ferrule 2, a support structure 3 and a pair of hub coupling diaphragms 4. The hub-coupled diaphragm 4 is disposed in the support groove 19. The end face of the optical fiber 1 passes through the bottom hole 20 through the ceramic ferrule 2, the end face of the optical fiber is aligned to the center of the vibration area, and two independent Fabry- Perot cavities 23 and 24 are formed on the end face of the optical fiber and the inner surface of the hub coupling type vibrating diaphragm and serve as sensing units of the optical fiber Fabry-Perot acoustic positioning sensor.
As shown in fig. 2, a schematic structural diagram of a hub-coupled diaphragm and a hub-coupled vibration unit formed by the same is shown. Wherein, (2A) is an example of a two-dimensional hub coupling diaphragm coupling unit, and (2B) is an example of a four-dimensional hub coupling diaphragm coupling unit. The hub-coupled diaphragm 4 is manufactured from thin sheets of elastomeric material of different thicknesses. The structure comprises spokes 5 and a vibration area 7. The plurality of discontinuous vibrating diaphragm removing parts 21 processed by the elastic material sheet form enclosing areas, the elastic material parts between every two vibrating diaphragm removing parts are spokes 5, and the enclosing areas are provided with vibrating areas 7. The hub-coupled diaphragm is coupled to form a hub-coupled vibrating unit. In each hub-coupled vibration unit, the coupling bridge 8 connecting the centers of the vibration areas 7 is formed together by adjacent spokes 5, and the coupling bridge 8 is provided with a naturally-formed coupling point 6, so that no additional processing design is required. The hub-coupled vibration unit couples two adjacent vibration areas 7 through the coupling bridge 8 where each adjacent coupling point 6 is located. The coupling between the vibration areas realizes the amplification of the response of the vibration film to the sound wave arrival time delay difference and the sound pressure difference, and the positioning precision is obviously improved. Through changing different values that vibrating diaphragm structural parameters include spoke width, vibrating diaphragm thickness, center vibrating diaphragm diameter, membrane bridge length etc. realization is to the customization design of sensor frequency response scope and gain, increases the quantity of vibrating diaphragm coupling, realizes the promotion of location space dimension. The hub-coupled diaphragm can realize the amplification of the arrival time delay difference and the acoustic pressure difference in a wide frequency range, and the following two embodiments prove the unique advantages of the structure in theory and practice.
Example 1:
coupling the N hub coupling type vibration units, wherein the motion differential equation of the two-dimensional coupling structure formed when N=2 is as follows:
Figure BDA0004148720460000041
wherein k is the equivalent stiffness of the two vibration regions 7, c is the equivalent damping of the two vibration regions 7, k 3 、c 3 For stiffness and damping of the membrane bridge 8, m is the concentrated mass of the two vibration areas 7 and the membrane bridge 8. Let k be given consideration of symmetry of structure and simplification of subsequent computation 1 =k 2 =k,c 1 =c 2 =c,m 1 =m 2 =m. The center rigidity k of each vibration area 7 in the hub coupling diaphragm is:
Figure BDA0004148720460000042
wherein E is Young's modulus of the material, w is spoke width, h is diaphragm thickness, D is outer diameter of the material removing area, and D is inner diameter of the material removing area.
Fig. 4 is a schematic diagram of vibration modes of the diaphragm. The coupled hub vibrating diaphragm has two modes of opposite phase and same phase, namely a swinging mode and a bending mode, and corresponding natural frequencies:
Figure BDA0004148720460000051
so the natural frequency f of the swing mode of the hub coupling diaphragm 1 The method comprises the following steps:
Figure BDA0004148720460000052
where ρ is the material density.
Steady state response p of vibration region 7 1 、p 2 The method comprises the following steps:
Figure BDA0004148720460000053
wherein A is t 、A r The amplitude of the swing mode and bending mode responses respectively,
Figure BDA0004148720460000054
is the magnitude of the swing mode and bending mode responses.
The response of the vibration region 7 at different frequencies can be represented by a linear superposition of these two modes. The displacement difference and the time delay difference of the response basically have one-to-one correspondence with the incident angle within the range of-90 to 90 degrees, and fig. 5 is a simulation calculation diagram of the diaphragm positioning, wherein the diagram is a graph of (4A) the relationship between the displacement difference and the incident angle, (4B) the relationship between the phase difference and the incident angle, (4C) the relationship between the phase difference gain and the incident angle, and (4D) the 45-degree incident angle phase difference frequency response of the diaphragm. As shown in fig. 4A and 4B, the range of-90 to 90 degrees has excellent directivity for the sound source azimuth. The existence of the swing mode component enables the displacement difference and the time delay difference of the response of the vibration area 7 to be amplified, and compared with the gain of the time delay difference of a conventional acoustic array sensor with the same size, the time delay difference near the resonance frequency peak of the swing mode is amplified by 6 times as shown in a figure (4C); the hub coupling diaphragm has the effects of response delay difference and acoustic pressure difference amplification in a wide frequency range, and as shown in a figure (4D), the frequency range of 3.4-7.4 kHz is covered.
Example 2
The coupling bridge with the vibration area in the same plane is processed on the elastic sheet material by laser, the content of the sheet part is removed by laser processing, and the reserved part forms the hub coupling type vibrating diaphragm, so that the processing difficulty is greatly reduced, the manufacturing process requirement and cost are reduced, the alignment precision of the coupling bridge is ensured, and the consistency of mass production of the diaphragms is ensured. The actually manufactured sensor has good directivity to the sound source azimuth within the range of-90 to 90 degrees; amplification of the delay difference can be achieved over a wide frequency range of thousands of hertz.
As shown in fig. 6, is a sensor interference spectrum. And an interference spectrum is acquired through a spectrometer, and the cavity length of the Fabry-Perot cavity and the orthogonal working wavelength of the sensor are reflected. In order to ensure the consistency of each sensing unit in the subsequent demodulation, at least one consistent orthogonal operating wavelength range needs to exist, and the experiment selects the operating wavelength to be 1507nm according to the interference spectrum.
When an acoustic wave acts on the vibration region 7, the fp cavity length changes with the fluctuation of the acoustic wave. According to the fp interferometer theory, the interference spectrum of the fp vibration sensor is expressed as:
Figure BDA0004148720460000061
wherein λ represents an operating wavelength, I 0 (lambda) represents the light source spectrum, gamma represents the sensor fringe contrast, l represents the static initial cavity length, deltal represents the cavity length variation, I R (lambda) represents the intensity of the reflectance spectrum; the intensity difference and the time difference of the light intensity signals reflect the displacement difference and the time difference of the Fabry-Perot cavity long vibration.
Fig. 7 is a schematic diagram of an experimental system, (6A) an acoustic experimental environment, (6B) a demodulation system. Experiments were performed using an experimental system as shown in fig. 6. The whole acoustic experiment system is placed in the semi-anechoic chamber 13, the influence of reflection of the wall on positioning is reduced, the distance between the sound source 23 and the sensor 11 and the reference microphone 10 meets far-field conditions, and the incident sound wave approximates plane wave incidence. The incidence direction of the sound wave is controlled by the rotary displacement table 9. The acoustic source 8 produces a sinusoidal acoustic wave reaching the sensor 11 and the reference microphone surface, and the fabry-perot cavity length of the sensor 11 changes to change the optical signal. The tunable laser 15 determines the orthogonal working wavelength through sweep frequency, the light is divided into two paths through the 1×2 optical splitter 14, the two paths enter respective Fabry-Perot cavities through respective circulators 16, interference signals are formed after modulation of cavity length change and reflected back to the circulators 16, finally the interference signals are incident to the photoelectric detector 17, and the data acquisition card 18 acquires and processes signals of the photoelectric detector 17 and the reference microphone 10. According to the principle of intensity demodulation, for a sensor with the wavelength at an orthogonal working point, the returned light intensity signal is consistent with the cavity length transformation, and the time delay difference of the forced vibration response of the vibrating diaphragm can be reflected according to the time delay difference of the light intensity signal.
And carrying out a positioning experiment of a wide frequency range on the manufactured sensor within the range of-90 degrees. First, whether the sensor is sensitive to sound waves or not and whether the system can restore signals or not is judged, and the sensitivity of each frequency point is calculated under the incidence angle of 0 degrees. The signals of the sensor 11 and the reference microphone 10 are acquired by the data acquisition card 18, and fig. 7 shows the signals at 7.2kHz and the power spectral density of the left and right sensing units. The sensor can completely restore the incident acoustic sine signal. The sound pressure of the free sound field at the time was obtained by converting the signal of the reference microphone 10 and the sensitivity, and the sensitivity of each frequency point was calculated as shown in table 1. The time delay difference of the received light intensity signals is processed in real time by changing the incidence angle of the sound wave through the rotary displacement table, and finally the obtained experimental data are shown in figure 8, wherein the time delay difference of the light intensity signals and the incidence angle are in one-to-one correspondence in the range of-90 degrees, and the experimental data have the amplifying effect on the tested frequency. Table 2 shows the average and maximum values of the gain of each test frequency over a wide frequency range of 4-7.2 kH compared to the incident time delay difference, with the gain being most pronounced at 7.2kHz near the swing mode.
In summary, the hub-type vibrating diaphragm has a wider frequency response range, and the coupled hub-coupled vibrating diaphragm acoustic positioning sensor has a broadband phase difference amplification effect, so that the positioning accuracy can be improved; the amplification effects of the response time delay difference and the displacement difference of the vibrating diaphragm in a wide frequency range are particularly remarkable near the resonance frequency peak; the manufacturing method of the membrane bridge is simple, and the vibration area is rapidly coupled with the self structure, so that the asymmetric influence caused by the coupling process error of the membrane bridge is reduced.
In summary, the hub coupling type optical fiber Fabry-Perot acoustic positioning sensor diaphragm is easy to process, can completely restore an incident acoustic wave signal, has excellent directivity to an incident angle of a sound source within a range of-90 degrees, has an amplifying effect on a delay difference and a displacement difference of response of a vibration area 7, and can realize the amplifying effect within a frequency range of thousands of hertz through design. As shown in table 1, the sensitivity is different frequency points. As shown in table 2, the phase difference gains are different frequency points.
TABLE 1
Figure BDA0004148720460000071
TABLE 2
Figure BDA0004148720460000072
By coupling a plurality of hub-type diaphragms, the arrival time delay difference and the amplification of the acoustic pressure difference are realized.
The foregoing is merely exemplary embodiments of the present application and is not intended to limit the scope of the present application. It will be apparent to those skilled in the art that various modifications and variations can be made therein without departing from the spirit and principles of the invention, and that such modifications, equivalents, or variations are intended to be included within the scope of the invention as defined in the following claims.

Claims (7)

1. The optical fiber Fabry-Perot sound positioning sensor of the hub coupling type vibrating diaphragm is characterized by comprising a supporting structure, a pair of hub coupling type vibrating diaphragms, and optical fibers and ceramic inserting cores which are correspondingly connected with the hub coupling type vibrating diaphragms; wherein: the hub coupling type vibrating diaphragm comprises spokes and a vibrating area, the supporting structure is provided with a supporting groove and a bottom hole, the hub coupling type vibrating diaphragm is covered on the supporting groove, an optical fiber penetrates out of the bottom hole through the ceramic ferrule, the end face of the optical fiber is aligned with the center of the vibrating area, and two independent Fabry-Perot cavities are formed on the end face of the optical fiber and the inner surface of the hub coupling type vibrating diaphragm and serve as sensing units of the optical fiber Fabry-Perot sound positioning sensor.
2. The optical fiber fabry-perot positioning sensor of hub-coupled diaphragm of claim 1, wherein when acoustic waves act on said vibration region, the fabry-perot cavity length changes with the fluctuation of the acoustic waves, and the interference spectrum of the fabry-perot vibration sensor is represented by the following formula:
Figure FDA0004148720440000011
wherein λ represents an operating wavelength, I 0 (lambda) represents the light source spectrum, gamma represents the sensor fringe contrast, l represents the static initial cavity length, deltal represents the cavity length variation, I R (lambda) represents the intensity of the reflectance spectrum;
the sound pressure signal received by the ith vibration area has the following time delay formula:
Figure FDA0004148720440000012
wherein x is i Is the center coordinate of the ith vibration area, v is the sound velocity, and θ is the plane sound wave emitted by the sound source
Figure FDA0004148720440000013
An angle of incidence to the surface of the diaphragm region.
3. The optical fiber fabry perot positioning sensor of claim 1, wherein the hub-coupled diaphragm has two modes of anti-phase vibration and in-phase vibration, corresponding to a swing mode and a bending mode, respectively.
4. The optical fiber Fabry-Perot acoustic positioning sensor of the multi-dimensional hub coupling type vibrating diaphragm is characterized by comprising a multi-dimensional hub coupling type vibrating unit; the hub coupling type vibration unit is formed by coupling a plurality of groups of hub coupling type vibration films, and the hub coupling type vibration films are correspondingly connected with optical fibers and ceramic ferrules; wherein: the hub coupling type vibrating diaphragm comprises spokes and vibrating areas, the supporting structure is provided with supporting grooves and bottom holes, the hub coupling type vibrating diaphragm covers the supporting grooves, optical fibers penetrate out of the bottom holes through the ceramic ferrule, the end faces of the optical fibers are aligned to the centers of the vibrating areas, coupling bridges connected with the centers of the adjacent vibrating areas are formed through the adjacent spokes in the hub coupling type vibrating unit, coupling points which are formed naturally are formed on the coupling bridges, the hub coupling type vibrating unit couples the adjacent vibrating areas through the coupling bridges, the end faces of the optical fibers are aligned to the centers of the vibrating areas, and a plurality of independent Fabry-Perot cavities are formed on the end faces of the optical fibers and the inner surfaces of the hub coupling type vibrating diaphragm and serve as sensing units of the optical fiber Fabry-Perot positioning sensor.
5. The optical fiber fabry perot positioning sensor of a multi-dimensional hub-coupled diaphragm of claim 4, wherein the number of diaphragm couplings is increased for the hub-coupled vibration unit to achieve an increase in positioning space dimension.
6. The optical fiber fabry perot positioning sensor of a multi-dimensional hub-coupled diaphragm of claim 4, wherein the hub-coupled diaphragm has two modes of anti-phase vibration and in-phase vibration, corresponding to a rocking mode and a bending mode, respectively.
7. The optical fiber fabry-perot acoustic positioning sensor of the multi-dimensional hub-coupled diaphragm of claim 4, wherein when the acoustic wave acts on the vibration region, the fabry-perot cavity length changes with the fluctuation of the acoustic wave, and the interference spectrum of the fabry-perot acoustic vibration sensor is represented by the following formula:
Figure FDA0004148720440000021
wherein λ represents an operating wavelength, I 0 (lambda) represents the light source spectrum, gamma represents the sensor fringe contrast, l represents the static initial cavity length, deltal represents the cavity length variation,I R (lambda) represents the intensity of the reflectance spectrum;
the sound pressure signal received by the ith vibration area has the following time delay formula:
Figure FDA0004148720440000022
wherein x is i Is the center coordinate of the ith vibration area, v is the sound velocity, and θ is the plane sound wave emitted by the sound source
Figure FDA0004148720440000023
An angle of incidence to the surface of the diaphragm region.
CN202310311725.1A 2023-03-28 2023-03-28 Optical fiber Fabry-Perot sound positioning sensor of hub coupling type vibrating diaphragm Pending CN116359844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310311725.1A CN116359844A (en) 2023-03-28 2023-03-28 Optical fiber Fabry-Perot sound positioning sensor of hub coupling type vibrating diaphragm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310311725.1A CN116359844A (en) 2023-03-28 2023-03-28 Optical fiber Fabry-Perot sound positioning sensor of hub coupling type vibrating diaphragm

Publications (1)

Publication Number Publication Date
CN116359844A true CN116359844A (en) 2023-06-30

Family

ID=86907006

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310311725.1A Pending CN116359844A (en) 2023-03-28 2023-03-28 Optical fiber Fabry-Perot sound positioning sensor of hub coupling type vibrating diaphragm

Country Status (1)

Country Link
CN (1) CN116359844A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117232639A (en) * 2023-11-15 2023-12-15 国网山西省电力公司超高压变电分公司 Wide-area voiceprint acquisition device of extra-high voltage alternating-current transformer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117232639A (en) * 2023-11-15 2023-12-15 国网山西省电力公司超高压变电分公司 Wide-area voiceprint acquisition device of extra-high voltage alternating-current transformer
CN117232639B (en) * 2023-11-15 2024-03-19 国网山西省电力公司超高压变电分公司 Wide-area voiceprint acquisition device of extra-high voltage alternating-current transformer

Similar Documents

Publication Publication Date Title
US7697797B2 (en) Aligned embossed diaphragm based fiber optic sensor
Wang et al. An infrasound sensor based on extrinsic fiber-optic Fabry–Perot interferometer structure
US7224465B2 (en) Fiber tip based sensor system for measurements of pressure gradient, air particle velocity and acoustic intensity
CN108731789B (en) Underwater sound detection device based on photoelectric oscillator
Wang et al. Extrinsic Fabry–Pérot underwater acoustic sensor based on micromachined center-embossed diaphragm
Yu et al. Acoustic measurements using a fiber optic sensor system
US7894618B2 (en) Apparatus comprising a directionality-enhanced acoustic sensor
CN101769783A (en) Static pressure balanced fiber ultrasonic sensor array
US8503693B2 (en) Biology-inspired miniature system and method for sensing and localizing acoustic signals
CN116359844A (en) Optical fiber Fabry-Perot sound positioning sensor of hub coupling type vibrating diaphragm
CN102889901A (en) Fabry-Perot optical fiber sensor and fabrication method of sensor
CN203551100U (en) Novel Fabry-Perot interference-type MEMS sound wave sensor
CN109506764A (en) A kind of optical fiber MEMS microphone array acoustic detecting plate and system
CN109945965A (en) The arm-type sensitive diaphragm of optical fiber EFPI ultrasonic sensor supporting beam
CN111044137A (en) Optical fiber acoustic vibration sensor based on gold-plated vibration film and manufacturing method thereof
CN102353441A (en) Small-sized adaptive optical-fiber ultrasonic sensor
Zhang et al. High sensitivity and high stability dual Fabry-Perot interferometric fiber-optic acoustic sensor based on sandwich-structure composite diaphragm
CN110260968A (en) Air ultrasound acoustic pressure recurrence system based on the measurement of sound particle vibration velocity
CN110220584B (en) Optical acoustic sensor and optical acoustic sensor including the same
Wu et al. Development of highly sensitive fiber-optic acoustic sensor and its preliminary application for sound source localization
CN109827653A (en) A kind of complete optical fiber vector microphone probe
CN113091882A (en) Double-cavity device for detecting membrane surface vibration and demodulation method thereof
Ren et al. Low-frequency bi-directional microphone based on a combination of bionic MEMS diaphragm and fiber acousto-optic transducer
Liu et al. Optical fiber Fabry-Perot acoustic sensors based on corrugated PET diaphragms
CN110849464B (en) Optical fiber Fabry-Perot sound sensor based on hub-shaped vibrating diaphragm

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination