CN116343688A - MEMS micromirror, driving method, device and storage medium thereof - Google Patents
MEMS micromirror, driving method, device and storage medium thereof Download PDFInfo
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- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
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Abstract
The application is applicable to the technical field of two-dimensional MEMS (micro-electromechanical systems) micromirrors, and provides a driving method and device based on the two-dimensional MEMS micromirrors, the two-dimensional MEMS micromirrors and a computer-readable storage medium. The method comprises the following steps: acquiring preset parameters of the two-dimensional MEMS micro-mirror; respectively generating a driving function and a superposition function according to the preset parameters; generating a slow axis driving signal according to the driving function and the superposition function; and driving the slow axis of the two-dimensional MEMS micro mirror to rotate by a slow axis driving signal. The method and the device can omit a receiving and processing circuit part of a two-dimensional MEMS micro mirror feedback signal in the prior art in a circuit form, do not need to acquire the feedback signal for adjustment, have no hysteresis in principle in an adjusting mode, only need to adjust a driving function according to a proper superposition function to generate the driving signal, can realize better robustness, are simpler in realization form, and do not need to calibrate preset parameters.
Description
Technical Field
The application belongs to the technical field of two-dimensional MEMS (micro-electromechanical systems) micromirrors, and particularly relates to a driving method and device based on a two-dimensional MEMS micromirror, the two-dimensional MEMS micromirror and a computer readable storage medium.
Background
Microelectromechanical system (Micro-Electro-Mechanical System, MEMS) Micro-mirrors refer to optical MEMS devices fabricated using optical MEMS technology that integrate Micro-mirrors with MEMS drivers. The motion mode of the MEMS micro-mirror comprises translational motion and torsional motion. For the torsion MEMS micro-mirror, when the optical deflection angle is larger (more than 10 degrees), the main function is to realize the pointing deflection, the graphic scanning and the image scanning of laser, and the torsion MEMS micro-mirror can be called as a MEMS scanning mirror so as to be distinguished from the torsion MEMS micro-mirror with smaller deflection angle.
MEMS scanning mirrors are critical laser components essential for laser applications, and the application fields have penetrated consumer electronics, medical, military defense, communications, and the like. The main application fields have three aspects: laser scanning, optical communication and digital display. The scanning mirror can be mainly used for laser radar, a 3D camera, bar code scanning, a laser printer and medical imaging; the optical communication mainly refers to an optical add/drop multiplexer, an optical attenuator, an optical switch and a grating; the digital display refers to applications in high-definition televisions, laser micro-projection, digital cinema, head-up display (HUD) of automobiles, laser keyboards, augmented Reality (AR) and the like.
Two paths of superimposed signals are needed to be accessed to realize two-dimensional scanning by using an electromagnetically driven micro mirror: the slow axis is connected with a signal of 0-190 Hz, and the working frequency and the waveform of the signal can be changed according to the requirement; the fast axis needs to be switched in with a sinusoidal signal of 2.2 KHz. The two paths of signals of the slow axis and the fast axis are overlapped to realize the two-dimensional scanning of the micromirror.
If the slow axis drive is saw-tooth wave drive, the slow axis motion will generate a certain distortion, at this time, if the drive signal is not processed, the motion track of the two-dimensional MEMS micro mirror (observed by the feedback signal) will oscillate as shown in fig. 1, thereby causing the angle distortion, at this time, the slow axis drive signal needs to be processed to a certain extent to meet the requirement of scanning precision of the two-dimensional MEMS micro mirror.
The conventional two-dimensional MEMS micromirror driving signal is usually optimized in a closed-loop adjustment manner, i.e., time-frequency domain analysis is performed according to the feedback signal, so as to make a modification decision of the driving signal. The mode has hysteresis in adjustment, a receiving and processing circuit of a two-dimensional MEMS micromirror feedback signal is required to be added, the circuit form is complex, moreover, the robustness of micromirrors with different driving parameters is poor, and a plurality of preset adjustment parameters are required to be set and calibrated according to experimental results.
Disclosure of Invention
The embodiment of the application provides a driving method and device based on a two-dimensional MEMS (micro-electromechanical system) micromirror, the two-dimensional MEMS micromirror and a computer readable storage medium, and can improve the scanning precision of the two-dimensional MEMS micromirror.
In a first aspect, an embodiment of the present application provides a driving method based on a two-dimensional MEMS micro mirror, including:
acquiring preset parameters of the two-dimensional MEMS micro-mirror;
respectively generating a driving function and a superposition function according to the preset parameters;
generating a slow axis driving signal according to the driving function and the superposition function;
and driving the slow axis of the two-dimensional MEMS micro mirror to rotate according to the slow axis driving signal.
In one embodiment, the preset parameters include a slow axis frequency fm and a slow axis quality factor q of the two-dimensional MEMS micro-mirror;
generating a superposition function according to the preset parameters, including:
generating a superposition function f1 (t) with feedforward characteristics according to the slow axis frequency fm and the slow axis quality factor q;
where t is the time variable of the superposition function.
In one embodiment, the preset parameters include a fast axis resonant frequency fk, a fast and slow axis frequency ratio n, a slow axis driving amplitude Av and a slow axis driving duty ratio P of the two-dimensional MEMS micro mirror;
generating a driving function according to the preset parameters, including:
for the current time t, the driving function f2 (t) is as follows:
wherein the driving function is a triangular wave function, and the fast-slow axis frequency ratio n=fast-axis resonance frequency fk/slow-axis frequency fm.
In one embodiment, generating the superposition function f1 (t) with feedforward characteristics from the slow axis frequency fm and the slow axis quality factor q includes:
calculating a slow axis damping parameter ζ from the slow axis figure of merit q, wherein
Calculating damping molecular coefficient m according to the slow axis damping parameter xi,
generating a damping denominator coefficient M according to the damping numerator coefficient M, wherein M=1+3m+3m 2 +m 3 ；
Calculating a time parameter T according to the slow axis frequency fm and the slow axis damping parameter xi,
and calculating a superposition function f1 (T) according to the time parameter T, the damping numerator coefficient M, the damping denominator coefficient M and the Dirac function delta (T).
In one embodiment, generating a slow axis drive signal from the drive function and the superposition function includes:
and performing convolution operation based on the driving function f2 (t) and the superposition function f1 (t) to generate a slow axis driving signal f (t).
In one embodiment, generating a slow axis drive signal from the drive function and the superposition function includes:
based on the driving function f2 (t) and the superposition function f1 (t), a slow axis driving signal f (t) is generated by weighted superposition.
In a second aspect, embodiments of the present application provide a driving device based on a two-dimensional MEMS micro-mirror, including:
the parameter acquisition module is used for acquiring preset parameters of the two-dimensional MEMS micro mirror;
the function generation module is used for respectively generating a driving function and a superposition function according to the preset parameters;
the driving signal generation module is used for generating a slow-axis driving signal according to the driving function and the superposition function;
and the driving module is used for driving the slow axis of the two-dimensional MEMS micro mirror to rotate according to the slow axis driving signal.
In one embodiment, the preset parameters include a slow axis frequency fm, a slow axis quality factor q, a fast axis resonant frequency fk, a fast and slow axis frequency ratio n, a slow axis drive amplitude Av, and a slow axis drive duty ratio P of the two-dimensional MEMS micro-mirror;
the function generation module is specifically configured to: generating a superposition function f1 (t) with feedforward characteristics according to the slow axis frequency fm and the slow axis quality factor q;
the driving function f2 (t) is generated according to the fast axis resonance frequency fk, the fast and slow axis frequency ratio n, the slow axis driving amplitude Av and the slow axis driving duty ratio P;
wherein the driving function is a triangular wave function, and the fast-slow axis frequency ratio n=fast-axis resonance frequency fk/slow-axis frequency fm.
In a third aspect, embodiments of the present application provide a two-dimensional MEMS micro-mirror comprising a memory, a processor and a computer program stored in the memory and executable on the processor, the processor implementing the method according to any of the first aspects when executing the computer program.
In a fourth aspect, embodiments of the present application provide a computer-readable storage medium storing a computer program which, when executed by a processor, implements a method according to any one of the first aspects.
In a fifth aspect, embodiments of the present application provide a computer program product which, when run on a two-dimensional MEMS micro-mirror, causes the two-dimensional MEMS micro-mirror to perform the method of any one of the first aspects above.
It will be appreciated that the advantages of the second to fifth aspects may be found in the relevant description of the first aspect, and are not described here again.
Compared with the prior art, the embodiment of the application has the beneficial effects that: according to the method, the driving function and the superposition function are respectively generated according to preset parameters of the two-dimensional MEMS micro-mirror, the slow axis driving signal is generated according to the driving function and the superposition function, and then the slow axis of the two-dimensional MEMS micro-mirror is driven to rotate according to the slow axis driving signal. The method and the device can optimize the receiving and processing circuit part of the two-dimensional MEMS micro mirror feedback signal in the prior art in a circuit form, do not need to acquire the feedback signal for adjustment, have no hysteresis in principle in an adjusting mode, only need to adjust a driving function according to a proper superposition function to generate the driving signal, can realize better robustness, are simpler in realization form, and do not need to calibrate preset parameters.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following description will briefly introduce the drawings that are needed in the embodiments or the description of the prior art, it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a prior art feedback signal before drive signal optimization for a two-dimensional MEMS micromirror;
FIG. 2 is a flow chart of a driving method based on a two-dimensional MEMS micro-mirror according to an embodiment of the present application;
FIG. 3 is a schematic diagram of a feedback signal after optimization of a driving signal of a two-dimensional MEMS micromirror according to an embodiment of the present application;
FIG. 4 is a schematic structural diagram of a driving device based on a two-dimensional MEMS micro-mirror according to an embodiment of the present application;
fig. 5 is a schematic structural diagram of a two-dimensional MEMS micro-mirror according to an embodiment of the present application.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular system configurations, techniques, etc. in order to provide a thorough understanding of the embodiments of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present application with unnecessary detail.
Reference in the specification to "one embodiment" or "some embodiments" or the like means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the application. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," and the like in the specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments" unless expressly specified otherwise. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless expressly specified otherwise.
The driving method provided by the embodiment of the application can be applied to the two-dimensional MEMS micro-mirror, and is used for optimizing the driving signal of the micro-mirror so as to reduce the distortion of the slow axis motion and improve the scanning precision of the two-dimensional MEMS micro-mirror.
The MEMS laser radar adopts an MEMS micro-mirror as a laser beam scanning element, has the advantages of small volume, simple macroscopic structure, high reliability, low power consumption and the like, and is the most suitable technical path for realizing the floor application of the current laser radar.
Fig. 2 is a flow chart of a driving method based on a two-dimensional MEMS micro-mirror according to the present embodiment. As shown in fig. 2, the driving method includes the steps of:
s11, obtaining preset parameters of the two-dimensional MEMS micro-mirror.
The preset parameters may include a slow axis frequency fm and a slow axis quality factor q of the two-dimensional MEMS micro-mirror, and may further include a fast axis resonance frequency fk, a fast and slow axis frequency ratio n, a slow axis drive amplitude Av, and a slow axis drive duty ratio P of the two-dimensional MEMS micro-mirror. The values of the preset parameters are determined by the device parameters of the two-dimensional MEMS micro-mirror and/or the parameter requirements of the laser radar.
FoM (figure of merit) is a comprehensive index describing the performance of a laser radar formed by fusing the intrinsic parameters of MEMS micromirrors. The intrinsic parameters include an effective optical scan angle of the laser radar field of view direction, an effective size of the MEMS micro-mirror, and an effective resonant frequency of the MEMS micro-mirror.
The fast-slow axis frequency ratio n=fast-axis resonant frequency fk/slow-axis frequency fm.
S12, respectively generating a driving function and a superposition function according to preset parameters.
For a two-dimensional MEMS micro-mirror with a slow axis working in a quasi-static mode, the driving signal is a triangular wave signal with fixed duty ratio and frequency, and the signal is used for driving the slow axis of the two-dimensional MEMS micro-mirror to perform periodic uniform scanning in a preset angle interval (namely, a field of view).
The driving function is a function for representing the waveform of the driving signal, and the driving function is generated according to preset parameters, and includes: the driving function f2 (t) is generated based on the fast axis resonance frequency fk, the fast and slow axis frequency ratio n, the slow axis driving amplitude Av, and the slow axis driving duty P.
The driving function is a triangular wave function, the frequency of the triangular wave is the frame rate parameter of the laser radar based on the two-dimensional MEMS micro-mirror, and the duty ratio of the triangular wave can influence the light emitting interval of the laser radar of the two-dimensional MEMS micro-mirror: when the interval is the rising edge of the triangular wave, scanning the two-dimensional MEMS micro mirror from bottom to top; when the interval is the falling edge of the triangular wave, the two-dimensional MEMS micro mirror scans from top to bottom.
However, since the slow axis of the MEMS micro-mirror can be regarded as a damped harmonic oscillator with an impulse response, there is a probability that motion oscillation due to excitation of the resonant mode will occur when a step signal is input; thus, the present embodiment designs a superposition function model whose principle is a driving waveform shaping filter with feedforward characteristics.
Generating a superposition function according to preset parameters, including: a superposition function f1 (t) with feed-forward characteristics is generated from the slow axis frequency fm and the slow axis quality factor q.
The superposition function predicts at a certain moment a portion of the drive signal that is likely to cause damped oscillations due to the excitation of the resonant mode at a future moment, and adjusts the drive signal based on this prediction, which can be used to eliminate angular deviations caused by motion oscillations. The superposition function is thus a function with feed-forward characteristics. This feed-forward feature is critical to account for damped oscillation due to the excitation of resonant modes in the slow axis motion of the two-dimensional MEMS micro-mirror.
S13, generating a slow-axis driving signal according to the driving function and the superposition function.
The original driving function f2 (t) is adjusted through the superposition function f1 (t), and a slow axis driving signal with damping oscillation eliminated is obtained.
For example, the slow axis driving signal is specifically obtained by performing convolution processing on the original driving function f2 (t) by using a superposition function f1 (t), and the function is expressed as f (t) =f1 (t) ×f2 (t).
The convolution processing mode can be a graph transformation method or an integration method, can be combined with a Dirac function to complete time extraction so as to realize the prediction of the MEMS slow axis motion track, and has the advantages of real-time performance and easy realization.
Or, the slow axis driving signal is specifically obtained by performing weighted superposition processing on the original driving function f2 (t) through the superposition function f1 (t).
And S14, driving the slow axis of the two-dimensional MEMS micro mirror to rotate according to the slow axis driving signal.
According to the embodiment, the Dirac function is utilized for predicting the damped oscillation, the superposition function is calculated based on the preset parameters of the device of the two-dimensional MEMS micro-mirror, the damped oscillation caused by excitation of the resonance mode in the slow axis motion can be reduced only by superposing the proper superposition function on the driving function, the feedback signal is not required to be acquired for adjusting the driving signal, the receiving and processing circuit part of the feedback signal of the two-dimensional MEMS micro-mirror in the prior art is omitted in a circuit form, hysteresis does not exist in an adjusting mode, and the method has good robustness.
On the basis of the above embodiments, this embodiment exemplifies possible implementations of generating the driving function and the superimposing function according to preset parameters, respectively.
Generating a driving function according to preset parameters, including: the driving function f2 (t) is generated based on the fast axis resonance frequency fk, the fast and slow axis frequency ratio n, the slow axis driving amplitude Av, and the slow axis driving duty P.
The method comprises the following steps: for the current time t, f2 (t) corresponds to the following formula:
when the two-dimensional MEMS micro-mirror is applied to a lidar, the slow-axis drive amplitude Av and the slow-axis drive duty cycle P are determined by parameters of the lidar. Since the operating frequency of the slow axis is not equal to the triangular wave frequency fm of the slow axis, it is necessary to calculate the operating frequency of the slow axis from the fast axis resonant frequency fk and the wire harness required for the radar, and obtain the driving function f2 (t) of the slow axis.
Generating a superposition function according to preset parameters, including: a superposition function f1 (t) with feed-forward characteristics is generated from the slow axis frequency fm and the slow axis quality factor q.
The method comprises the following steps:
s21, calculating a slow axis damping parameter xi according to the slow axis quality factor q.
The slow axis damping parameter xi is determined by the slow axis quality factor q, is a system response period of damping harmonic oscillator damping ratio, and can be used for calculating a time parameter T, and is expressed as follows by a formula:
s22, calculating a damping molecular coefficient m according to the slow axis damping parameter xi,
s23, generating a damping denominator coefficient M according to the damping numerator coefficient M, m=1+3m+3m 2 +m 3 。
S24, calculating a time parameter T according to the slow axis frequency fm and the slow axis damping parameter xi,
s25, calculating a superposition function f1 (T) according to the time parameter T, the damping numerator coefficient M, the damping denominator coefficient M and the Dirac function delta (T).
Where t is the time variable of the superposition function. When the superposition function is represented by a curve, t is the abscissa of the graph of the superposition function. the minimum step (resolution) of t depends on the sampling rate of the DAC used by the two-dimensional MEMS micro-mirror and the time accuracy of the control device.
From the above equation, the superposition function f1 (t) is in the form of a polynomial. When the two-dimensional MEMS micro-mirror is regarded as a damped harmonic oscillator with impulse response, the damping numerator coefficient M and the damping denominator coefficient M are 2 parameters calculated according to inherent preset parameters of the two-dimensional MEMS micro-mirror, and the two parameters are combined to be mainly used for calculating a superposition function of a certain moment t and serve as superposition weights of feedforward quantities to be considered.
The dirac function delta is a generalized function that is commonly used in physics to represent the density distribution of an ideal model of particles, point charges, etc., and has a value equal to zero at points other than zero, and its integral over the entire domain is equal to 1. In this embodiment, the meaning of dirac function δ (t) is: based on the current time T, the portion of damped oscillations due to the excitation of the resonant mode that is likely to be brought about in the drive signals at the future times T/2, T, 3T/2 is predicted.
It is based on this prediction that the superposition function is an adjustment of the drive signal, and thus the superposition function is a function with feed-forward characteristics. This feed-forward feature is critical to account for damped oscillation due to the excitation of resonant modes in the slow axis motion of the two-dimensional MEMS micro-mirror.
Fig. 3 is a schematic diagram of a feedback signal after the driving signal of the two-dimensional MEMS micro-mirror is optimized according to the present embodiment. As can be seen by comparing fig. 3 with fig. 1, after the adjustment of the superposition function, the oscillation of the motion track of the slow axis is obviously reduced, and the angle distortion is greatly improved.
It should be understood that the sequence number of each step in the foregoing embodiment does not mean that the execution sequence of each process should be determined by the function and the internal logic of each process, and should not limit the implementation process of the embodiment of the present application in any way.
Corresponding to the driving method of the above embodiment, fig. 4 is a schematic structural diagram of a driving device based on a two-dimensional MEMS micro-mirror according to an embodiment of the present application, where the device is composed of software and/or hardware and may be integrated into the two-dimensional MEMS micro-mirror. For convenience of explanation, only portions relevant to the embodiments of the present application are shown.
Referring to fig. 4, the apparatus includes:
the parameter obtaining module 31 is configured to obtain preset parameters of the two-dimensional MEMS micro-mirror;
the function generating module 32 is configured to generate a driving function and a superposition function according to preset parameters, respectively;
a driving signal generating module 33, configured to generate a slow axis driving signal according to the driving function and the superposition function;
and the driving module 34 is used for driving the slow axis of the two-dimensional MEMS micro mirror to rotate according to the axis driving signal.
Further, the preset parameters include a slow axis frequency fm, a slow axis quality factor q, a fast axis resonance frequency fk, a fast and slow axis frequency ratio n, a slow axis driving amplitude Av, a slow axis driving duty ratio P and the like of the two-dimensional MEMS micro mirror; the values of the preset parameters are determined by the device parameters of the two-dimensional MEMS micro-mirror and the parameter requirements of the laser radar.
The function generation module 32 is specifically configured to: generating a superposition function f1 (t) with feedforward characteristics according to the slow axis frequency fm and the slow axis quality factor q;
the driving function f2 (t) is generated according to the fast axis resonance frequency fk, the fast and slow axis frequency ratio n, the slow axis driving amplitude Av and the slow axis driving duty ratio P;
wherein the driving function is a triangular wave function, and the fast-slow axis frequency ratio n=fast-axis resonance frequency fk/slow-axis frequency fm.
It should be noted that, because the content of information interaction and execution process between the above devices/modules is based on the same concept as the method embodiment of the present application, specific functions and technical effects thereof may be referred to in the method embodiment section, and will not be described herein again.
Fig. 5 is a schematic structural diagram of a two-dimensional MEMS micro-mirror according to an embodiment of the present application. As shown in fig. 5, the two-dimensional MEMS micro mirror of this embodiment includes: at least one processor 40 (only one is shown in fig. 5), a memory 41 and a computer program 42 stored in the memory 41 and executable on the at least one processor 40, the processor 40 implementing the steps in any of the various method embodiments described above when executing the computer program 42.
It will be appreciated by those skilled in the art that FIG. 5 is merely an example of a two-dimensional MEMS micromirror structure and is not meant to be limiting and may include more or fewer components than shown, or may be combined with certain components, or different components.
The processor 40 may be a central processing unit (Central Processing Unit, CPU), the processor 40 may also be other general purpose processors, digital signal processors (Digital Signal Processor, DSP), application specific integrated circuits (Application Specific Integrated Circuit, ASIC), off-the-shelf programmable gate arrays (Field-Programmable Gate Array, FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, or the like. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like.
The memory 41 may be an internal storage unit of the millimeter wave radar, such as a hard disk or a memory, or an external storage device, such as a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) Card, a Flash Card (Flash Card), etc. in some embodiments. Further, the memory 41 may also include both an internal storage unit and an external storage device. The memory 41 is used for storing an operating system, application programs, boot loader (BootLoader), data, other programs, etc., such as program codes of the computer program. The memory 41 may also be used for temporarily storing data that has been output or is to be output.
It will be apparent to those skilled in the art that, for convenience and brevity of description, only the above-described division of the functional units and modules is illustrated, and in practical application, the above-described functional distribution may be performed by different functional units and modules according to needs, i.e. the internal structure of the apparatus is divided into different functional units or modules to perform all or part of the above-described functions. The functional units and modules in the embodiment may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit, where the integrated units may be implemented in a form of hardware or a form of a software functional unit. In addition, specific names of the functional units and modules are only for convenience of distinguishing from each other, and are not used for limiting the protection scope of the present application. The specific working process of the units and modules in the above system may refer to the corresponding process in the foregoing method embodiment, which is not described herein again.
Embodiments of the present application also provide a computer readable storage medium storing a computer program which, when executed by a processor, implements steps that may implement the various method embodiments described above.
Embodiments of the present application provide a computer program product enabling the implementation of the steps of the various method embodiments described above when the computer program product is run on a two-dimensional MEMS micro-mirror.
The integrated units, if implemented in the form of software functional units and sold or used as stand-alone products, may be stored in a computer readable storage medium. Based on such understanding, the present application implements all or part of the flow of the method of the above embodiments, and may be implemented by a computer program to instruct related hardware, where the computer program may be stored in a computer readable storage medium, where the computer program, when executed by a processor, may implement the steps of each of the method embodiments described above. Wherein the computer program comprises computer program code which may be in source code form, object code form, executable file or some intermediate form etc. The computer readable medium may include at least: any entity or device capable of carrying computer program code to a terminal device, a recording medium, a computer Memory, a Read-Only Memory (ROM), a random access Memory (RAM, random Access Memory), an electrical carrier signal, a telecommunication signal, and a software distribution medium. Such as a U-disk, removable hard disk, magnetic or optical disk, etc. In some jurisdictions, computer readable media may not be electrical carrier signals and telecommunications signals in accordance with legislation and patent practice.
In the foregoing embodiments, the descriptions of the embodiments are emphasized, and in part, not described or illustrated in any particular embodiment, reference is made to the related descriptions of other embodiments.
Those of ordinary skill in the art will appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware, or combinations of computer software and electronic hardware. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the solution. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present application.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus/device and method may be implemented in other manners. For example, the apparatus/device embodiments described above are merely illustrative, e.g., the division of the modules or units is merely a logical functional division, and there may be additional divisions when actually implemented, e.g., multiple units or components may be combined or integrated into another system, or some features may be omitted or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed may be an indirect coupling or communication connection via interfaces, devices or units, which may be in electrical, mechanical or other forms.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
The above embodiments are only for illustrating the technical solution of the present application, and are not limiting; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application, and are intended to be included in the scope of the present application.
Claims (10)
1. A driving method based on a two-dimensional MEMS micro-mirror, comprising:
acquiring preset parameters of the two-dimensional MEMS micro-mirror;
respectively generating a driving function and a superposition function according to the preset parameters;
generating a slow axis driving signal according to the driving function and the superposition function;
and driving the slow axis of the two-dimensional MEMS micro mirror to rotate according to the slow axis driving signal.
2. The driving method according to claim 1, wherein the preset parameters include a slow axis frequency fm and a slow axis quality factor q of the two-dimensional MEMS micro-mirror;
generating a superposition function according to the preset parameters, including:
generating a superposition function f1 (t) with feedforward characteristics according to the slow axis frequency fm and the slow axis quality factor q;
where t is the time variable of the superposition function.
3. The driving method according to claim 2, wherein the generating the superposition function f1 (t) having the feedforward characteristic from the slow axis frequency fm and the slow axis quality factor q includes:
calculating a slow axis damping parameter ζ from the slow axis figure of merit q, wherein
Calculating damping molecular coefficient m according to the slow axis damping parameter xi,
generating a damping denominator coefficient M according to the damping numerator coefficient M, wherein M=1+3m+3m 2 +m 3 ；
Calculating a time parameter T according to the slow axis frequency fm and the slow axis damping parameter xi,
and calculating a superposition function f1 (T) according to the time parameter T, the damping numerator coefficient M, the damping denominator coefficient M and the Dirac function delta (T).
4. The driving method according to claim 1, wherein the preset parameters include a fast axis resonance frequency fk, a fast and slow axis frequency ratio n, a slow axis driving amplitude Av, and a slow axis driving duty ratio P of the two-dimensional MEMS micro-mirror;
generating a driving function according to the preset parameters, including:
for the current time t, the driving function f2 (t) is as follows:
wherein the driving function is a triangular wave function, and the fast-slow axis frequency ratio n=fast-axis resonance frequency fk/slow-axis frequency fm.
5. The driving method of claim 1, wherein generating a slow axis drive signal from the drive function and the superposition function comprises:
and performing convolution operation based on the driving function f2 (t) and the superposition function f1 (t) to generate a slow axis driving signal f (t).
6. The driving method of claim 1, wherein generating a slow axis drive signal from the drive function and the superposition function comprises:
based on the driving function f2 (t) and the superposition function f1 (t), a slow axis driving signal f (t) is generated by weighted superposition.
7. A two-dimensional MEMS micro-mirror based driving apparatus, comprising:
the parameter acquisition module is used for acquiring preset parameters of the two-dimensional MEMS micro mirror;
the function generation module is used for respectively generating a driving function and a superposition function according to the preset parameters;
the driving signal generation module is used for generating a slow-axis driving signal according to the driving function and the superposition function;
and the driving module is used for driving the slow axis of the two-dimensional MEMS micro mirror to rotate according to the slow axis driving signal.
8. The driving apparatus as recited in claim 7 wherein said preset parameters include a slow axis frequency fm, a slow axis quality factor q, a fast axis resonant frequency fk, a fast and slow axis frequency ratio n, a slow axis drive amplitude Av, and a slow axis drive duty cycle P of the two-dimensional MEMS micro-mirror;
the function generation module is specifically configured to: generating a superposition function f1 (t) with feedforward characteristics according to the slow axis frequency fm and the slow axis quality factor q;
the driving function f2 (t) is generated according to the fast axis resonance frequency fk, the fast and slow axis frequency ratio n, the slow axis driving amplitude Av and the slow axis driving duty ratio P;
wherein the driving function is a triangular wave function, and the fast-slow axis frequency ratio n=fast-axis resonance frequency fk/slow-axis frequency fm.
9. A two-dimensional MEMS micro-mirror comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized by:
the processor, when executing the computer program, implements the method of any one of claims 1 to 6.
10. A computer readable storage medium storing a computer program, characterized in that the computer program when executed by a processor implements the method according to any one of claims 1 to 6.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111605809.3A CN116343688A (en) | 2021-12-25 | 2021-12-25 | MEMS micromirror, driving method, device and storage medium thereof |
| PCT/CN2022/141598 WO2023116913A1 (en) | 2021-12-25 | 2022-12-23 | Mems micro-mirror and driving method and apparatus based thereon, and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111605809.3A CN116343688A (en) | 2021-12-25 | 2021-12-25 | MEMS micromirror, driving method, device and storage medium thereof |
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| CN116343688A true CN116343688A (en) | 2023-06-27 |
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| CN202111605809.3A Pending CN116343688A (en) | 2021-12-25 | 2021-12-25 | MEMS micromirror, driving method, device and storage medium thereof |
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| WO (1) | WO2023116913A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7952783B2 (en) * | 2008-09-22 | 2011-05-31 | Microvision, Inc. | Scanning mirror control |
| US7948668B2 (en) * | 2008-09-26 | 2011-05-24 | Microvision, Inc. | Scanning mirror control having least mean square tone adder |
| DE102009058762A1 (en) * | 2009-12-14 | 2011-06-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | A deflection apparatus for a projection apparatus, a projection apparatus for projecting an image and a method for controlling a deflection apparatus for a projection apparatus |
| US10365476B2 (en) * | 2017-07-06 | 2019-07-30 | Stmicroelectronics Ltd | Method for operating a laser projector to have a uniform scan pattern |
| CN108594869B (en) * | 2018-01-09 | 2021-04-16 | 南京理工大学 | Micromirror control method and system based on real-time estimation of resonance point |
| CN111352089B (en) * | 2018-12-21 | 2022-08-09 | 余姚舜宇智能光学技术有限公司 | Two-dimensional galvanometer driving circuit system and driving method of solid-state laser radar |
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2021
- 2021-12-25 CN CN202111605809.3A patent/CN116343688A/en active Pending
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- 2022-12-23 WO PCT/CN2022/141598 patent/WO2023116913A1/en unknown
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| WO2023116913A1 (en) | 2023-06-29 |
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