CN108594869B - Micromirror control method and system based on real-time estimation of resonance point - Google Patents

Micromirror control method and system based on real-time estimation of resonance point Download PDF

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CN108594869B
CN108594869B CN201810019390.5A CN201810019390A CN108594869B CN 108594869 B CN108594869 B CN 108594869B CN 201810019390 A CN201810019390 A CN 201810019390A CN 108594869 B CN108594869 B CN 108594869B
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micromirror
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CN108594869A (en
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王春勇
黄明成
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Nanjing University of Science and Technology
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    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device

Abstract

The invention discloses a micromirror control method and a micromirror control system based on real-time estimation of resonance points. The method comprises the steps of firstly setting initial control signals of a fast axis and a slow axis of a micro mirror, and then collecting input signals and position feedback signals of the fast axis and the slow axis of the micro mirror; then, resolving the position feedback signal, and updating the frequency, amplitude and phase of the fast axis and the slow axis of the micromirror; and finally, detecting whether the fast axis and the slow axis of the micromirror reach the expected state, and if not, continuing the optimization. The invention improves the control refresh rate, enables the fast axis to change with the resonant working frequency, and the slow axis and the laser emission pulse to change along with the fast axis frequency, and provides stable driving for the high-speed optimized vibration of the MEMS scanning micro-mirror.

Description

Micromirror control method and system based on real-time estimation of resonance point
Technical Field
The invention relates to a micromirror control technology, in particular to a micromirror control method and a micromirror control system based on real-time estimation of resonance points.
Background
Micro-electro-mechanical systems (MEMS) are three-dimensional devices fabricated using Micro-fabrication techniques that include at least one movable structure that satisfies a mechanical function. A MEMS micromirror is one of the tiny actuated mirrors that is fabricated using MEMS processing techniques. The method has wide application in various civil and national defense fields, such as laser radar, biomedicine, optical projection and the like.
The two-dimensional MEMS micro-mirror driven by the electromagnetism can realize rapid scanning, and the two-dimensional MEMS micro-mirror driven by the electromagnetism has some mature control schemes, for example, based on the PID servo control principle, the scheme enables the fast axis to work near a resonance point, and enlarges a current loop and the like to enable the micro-mirror to achieve optimal amplitude scanning. However, when the external environment changes, the resonance point shifts accordingly. If the micromirror does not work under the resonance point, the mechanical rotation angle is greatly reduced, and the control efficiency is not high.
Disclosure of Invention
The invention aims to provide a micromirror control method and a micromirror control system based on real-time estimation of a resonance point, which have simple control process and improved control efficiency and can stably work on the resonance point.
The technical solution for realizing the purpose of the invention is as follows: a micromirror control method based on real-time estimation of resonance points comprises the following steps:
step 1, setting initial control signals of a fast axis and a slow axis of a micro mirror;
step 2, collecting input signals and position feedback signals of a fast axis and a slow axis of a micro mirror;
step 3, resolving the position feedback signal, and updating the frequency, amplitude and phase of the fast axis and the slow axis of the micromirror;
and 4, detecting whether the fast axis and the slow axis of the micromirror reach the expected state, if not, returning to the step 2, otherwise, ending.
Compared with the prior art, the invention has the following remarkable advantages: the invention improves the control refresh rate, enables the fast axis to change with the resonant working frequency, and the slow axis and the laser emission pulse to change along with the fast axis frequency, and provides stable driving for the high-speed optimized vibration of the MEMS scanning micro-mirror.
Drawings
FIG. 1 is a flow chart of a control system based on real-time estimation of micromirror resonance point according to an embodiment of the present invention.
FIG. 2 is a schematic diagram of the control system based on real-time estimation of the resonance point of the micromirror according to the present invention.
FIG. 3 is a schematic circuit diagram of the control system based on real-time estimation of the resonance point of the micromirror according to the present invention.
Detailed Description
The electromagnetic MEMS torsion micromirror dynamic model specifically comprises the following steps:
JMθ″+bθ′+kθθ＝Tf(t)
let the input signal be:
Tf(t)＝Usin(ωt)
then there are:
JMθ″+bθ′+kθθ＝Usin(ωt)
solving the general solution, the characteristic root is as follows:
Figure BDA0001543054200000021
since the system is a second-order resonance system, the poles of the system are located at conjugate complex poles, namely:
order to
Figure BDA0001543054200000022
Then there is Delta < 0
Its characteristic root can also be expressed as:
Figure BDA0001543054200000023
the general solution can be known as follows:
Figure BDA0001543054200000024
the solution is solved as follows: theta*＝Acosωt+Bsinωt
There is a final solution:
Figure BDA0001543054200000025
from the final solution, if
Figure BDA0001543054200000026
The system response and the driving signal cannot be coupled to the maximum extent, the maximum amplitude of the vibration of the micromirror cannot be in a stable state, and if and only if
Figure BDA0001543054200000027
The system oscillations are maximal. Therefore, in order to keep the fast axis amplitude at the maximum, the system driving frequency F needs to be allowed to move
Figure BDA0001543054200000028
Infinite approximation to operate at resonance, i.e. system response value theta0Forced response to system theta*On the same frequency phase.
Based on the above theoretical analysis, the invention provides a micromirror control method based on real-time estimation of resonance points, which takes the deviation formed by the given output and the actual output of a controlled object as the input of parameter voltage variation delta U, micromirror frequency variation delta F and phase variation delta P, combines the deviation respectively through an amplitude link, a frequency link and a phase link to form a controller, controls three parameters according to the input and output of the controller, and controls the controlled object to effectively stabilize the working state of the system so as to generate mechanical resonance. The output of the micromirror optimization controller is used for inputting the control object of the servo controller, so that the controlled object can achieve the optimization control of the controlled object according to each quantity output corresponding to the input quantity, wherein the output of the micromirror controller is the control parameter of the controlled object. The input quantity of the servo controller is a deviation value delta e between the output quantity of the controlled object and a target quantity, wherein the target quantity is a preset target quantity of the output of the controlled object.
The deflection angle of the micromirror is controlled by controlling the output voltage value of the driving system by utilizing the electromagnetic characteristics of the micromirror, and a standard delta theta value is in one-to-one correspondence with the output voltage value every time the delta U is changed. The magnitude of the peak voltage on the micromirror drive is fed back by real-time sampling of the fed back position signal by the a/D module. Once the deflection angle of the micromirror exceeds a preset value or has an error when the deflection angle cannot reach a preset amplitude value (namely a feedback voltage value), the output module outputs a corresponding difference voltage to be used as compensation, so that the deflection angle of the mirror surface can be correctly rotated to a preset position. The optimal value of the driving voltage is preset so that the deflection angle can be kept at the same size, and the required deflection angle of the micromirror can be set according to the requirement. Meanwhile, according to the position feedback condition, the amplitude change can be known in real time, and the optimized amplitude value, namely the voltage change delta U, can be calculated by the processor and is responded to the micromirror controller to keep the micromirror angle unchanged.
UOUT＝U0+ΔUΔU＝±KθΔθ
Wherein U isOUTFor improved voltage value of system output, U0For the voltage amplitude before modification, Δ U is the amplitude delta that needs to be changed according to the change of the angle θ.
The driving system can be controlled by the amplitude-frequency characteristics of the micromirror. At the frequency omega of the output signal fed back by the position sensor0Frequency omega of system inputIThe difference e between the two states indicates that the system is in an unstable state when the e changes. If and only if e is 0, i.e. the output frequency and the input frequencyWhen the same and unchanged, the system is stable. When the system works, the error value of the control detection signal and the input signal of the high-speed processor can be used as feedback information. By feeding back the signal, the optimized frequency value can be recalculated. If the feedback signal can not satisfy the magnitude of the required signal, the amplitude U is increased, and the relation between U and delta U is reset. Since the micromirror control system can only track the input signal in real time, the test feedback value cannot be fully utilized, and a third variable, namely a phase change delta P, is introduced except for a voltage change delta U and a micromirror frequency change delta F.
And the phase modulation unit is used for finely adjusting the driving model of the micromirror and proportionally controlling the fast axis and the slow axis in the double-axis control. If the two-axis phase is not proportional, the optical surface will be irregular. And in the resonance, if the output phase is different from the input phase, namely the signals are not synchronous, the system can form an unstable system, and the micro-mirror system cannot achieve new stability.
The invention is further illustrated by the following examples in conjunction with the accompanying drawings.
The optimal control of the micromirror is realized by the schematic diagram of the first figure, and the specific steps are as follows:
step 1, setting initial control signals (including initial frequency, amplitude and phase) of a fast axis and a slow axis of a micro-mirror;
step 2, collecting input signals and position feedback signals (including phase, amplitude and frequency) of a fast axis and a slow axis of a micro mirror;
step 3, resolving the position feedback signal, and updating the frequency, amplitude and phase of the fast axis and the slow axis of the micromirror, wherein the specific method comprises the following steps:
step 3.1, feeding back the fast axis to the voltage F1And fast axis input signal F2Subtracting to obtain delta F;
step 3.2, divide Δ F by a fixed value
Figure BDA0001543054200000041
Obtaining an intermediate variable F0Wherein b represents the damping coefficient of the micromirror, JMRepresenting the moment of inertia of the micromirror;
step 3.3, for F0To carry out the reaction of threeCalculating an angle function to obtain a fast axis update frequency value fFast-acting toy；
Step 3.4, mixing fFast-acting toyDividing by K to obtain the updated frequency value f of the slow axisSlowWhere K represents the conversion magnification between fast axes;
step 3.5, extracting the amplitudes of the fast and slow axis input signals and the position feedback signal to obtain UiFast-acting toy、UiSlow、UoFast-acting toy、U0SlowWherein UiFast-acting toy、UiSlowRepresenting the amplitude, Uo, of the fast and slow axis input signalsFast-acting toy、U0SlowThe amplitudes of the fast axis position feedback signal and the slow axis position feedback signal;
step 3.6, calculating the amplitude difference value of the fast and slow axis input signals and the position feedback signal to obtain the update amplitude difference U of the fast and slow axesFast-acting toy＝UFast i-U' ao Kui USlow＝USlow of slow-U0 slow；
Step 3.7, adding the fast axis input signal and the slow axis input signal to the update amplitude difference of the fast axis and the slow axis to obtain the update amplitude value of the fast axis and the slow axis;
and 3.8, extracting the phase of the position feedback signal to obtain the updated phase of the fast axis.
And 4, detecting whether the fast axis and the slow axis of the micromirror reach the expected state, if not, returning to the step 2, otherwise, ending.
As shown in fig. 2, the micromirror control system based on real-time estimation of the resonance point comprises a signal generation module, a power amplification module, a first filtering module, a second filtering module, an a/D sampling module, and a high-speed signal processing module, wherein the signal generation module is sequentially connected to the first filtering module, the power amplification module, and the second filtering module, and is configured to generate an initial control signal of the micromirror device; the A/D sampling module is used for collecting signals fed back by the micro-mirror device, performing A/D conversion and transmitting the signals to the high-speed signal processing module; the high-speed signal processing module is used for carrying out frequency calculation on the feedback signal to obtain an optimized signal and transmitting the optimized signal to the signal generating module to update the driving signal. The signal generation module comprises an STM32 and a DDS chip. The model of the power amplification module is AD 8397. The sampling precision of the A/D sampling module is more than 14 bits.

Claims (5)

1. A micromirror control method based on real-time estimation of resonance points is characterized by comprising the following steps:
step 1, setting initial control signals of a fast axis and a slow axis of a micro mirror;
step 2, collecting input signals and position feedback signals of a fast axis and a slow axis of a micro mirror;
step 3, resolving the position feedback signal, and updating the frequency, amplitude and phase of the fast axis and the slow axis of the micromirror;
step 4, detecting whether the fast axis and the slow axis of the micromirror reach the expected state, if not, returning to the step 2, otherwise, ending;
the specific process of resolving in the step 3 is as follows:
step 3.1, feeding back the fast axis to the voltage F1And fast axis input signal F2Subtracting to obtain delta F;
step 3.2, divide Δ F by a fixed value
Figure FDA0002796098680000011
Obtaining an intermediate variable F0Wherein b represents the damping coefficient of the micromirror, JMRepresenting the moment of inertia of the micromirror;
step 3.3, for F0Performing inverse trigonometric function operation to obtain a fast axis update frequency value fFast-acting toy；
Step 3.4, mixing fFast-acting toyDividing by K to obtain the updated frequency value f of the slow axisSlowWherein K represents the conversion rate between the fast and slow axes;
step 3.5, extracting the amplitudes of the fast and slow axis input signals and the position feedback signal to obtain UiFast-acting toy、UiSlow、UoFast-acting toy、U0SlowWherein UiFast-acting toy、UiSlowRepresenting the amplitude, Uo, of the fast and slow axis input signalsFast-acting toy、U0SlowThe amplitudes of the fast axis position feedback signal and the slow axis position feedback signal;
step 3.6, calculating the amplitude difference value of the fast and slow axis input signals and the position feedback signal to obtain the update amplitude difference U of the fast and slow axesFast-acting toy＝UFast i-U' ao Kui USlow＝USlow of slow-U0 slow；
Step 3.7, adding the fast axis input signal and the slow axis input signal to the update amplitude difference of the fast axis and the slow axis to obtain the update amplitude value of the fast axis and the slow axis;
and 3.8, extracting the phase of the slow position feedback signal to obtain the updated phase of the fast axis.
2. A micromirror control system based on real-time estimation of resonance point is characterized in that micromirror control is carried out based on the micromirror control method based on real-time estimation of resonance point as claimed in claim 1, and the micromirror control system comprises a signal generation module, a power amplification module, a first filtering module, a second filtering module, an A/D sampling module and a high-speed signal processing module, wherein the signal generation module is sequentially connected with the first filtering module, the power amplification module and the second filtering module and is used for generating an initial control signal of a micromirror device; the A/D sampling module is used for collecting signals fed back by the micro-mirror device, performing A/D conversion and transmitting the signals to the high-speed signal processing module; the high-speed signal processing module is used for carrying out frequency calculation on the feedback signal to obtain an optimized signal and transmitting the optimized signal to the signal generating module to update the driving signal.
3. A micromirror control system based on real-time estimation of resonance point as in claim 2 characterized in that the signal generation module comprises STM32 and DDS chip.
4. The micromirror control system according to claim 3, wherein the power amplification module is model AD 8397.
5. A micromirror control system based on real-time estimation of resonance point as in claim 3 wherein the sampling precision of the a/D sampling module is larger than 14 Bit.
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