CN116317685B - Piezoelectric micro-motor and preparation method thereof - Google Patents
Piezoelectric micro-motor and preparation method thereof Download PDFInfo
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- CN116317685B CN116317685B CN202310591434.2A CN202310591434A CN116317685B CN 116317685 B CN116317685 B CN 116317685B CN 202310591434 A CN202310591434 A CN 202310591434A CN 116317685 B CN116317685 B CN 116317685B
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/12—Constructional details
- H02N2/123—Mechanical transmission means, e.g. for gearing
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/14—Drive circuits; Control arrangements or methods
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/16—Mechanical energy storage, e.g. flywheels or pressurised fluids
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Abstract
The application relates to a piezoelectric micro-motor and a preparation method thereof. The piezoelectric micro motor comprises a stator and a rotor, wherein the stator comprises a controlled deformation part, a passive deformation part and a transmission connecting rod group. The controlled deformation part and the passive deformation part are provided with rotor through holes, and the rotor is arranged in at least one rotor through hole. The controlled deformation part is also provided with a reverse piezoelectric part which is used for generating deformation. The transmission connecting rod group is positioned between the controlled deformation part and the passive deformation part. The transmission connecting rod group comprises at least two transmission connecting rods, and two ends of each transmission connecting rod are respectively connected to the controlled deformation part and the passive deformation part. The controlled deformation part, the passive deformation part and the transmission connecting rod group are integrally formed. According to the embodiment of the present application, the processing requirements of the piezoelectric micro-motor 10 of millimeter level or even micrometer level can be satisfied.
Description
Technical Field
The application relates to the field of piezoelectric motors, in particular to a piezoelectric micro motor and a preparation method thereof.
Background
In the related art, the piezoelectric motor is a new principle motor, which is different from the traditional electromagnetic motor, and utilizes the inverse piezoelectric effect of piezoelectric ceramics to make the stator generate micro-amplitude vibration, and then converts the micro-amplitude vibration of the stator into the macroscopic motion of the rotor through the friction action of the contact interface of the stator and the rotor. Therefore, the piezoelectric motor has the characteristics of compact structure, no electromagnetic interference, easy miniaturization, high energy density and the like, and the characteristics enable the piezoelectric motor to be successfully applied to a plurality of fields such as digital cameras, biomedical therapies, aerospace equipment, precision systems and the like.
However, the piezoelectric micro-motor processed by the mechanical processing method has a limit on the size, and once the size is lower than a certain size, the performance of the motor is drastically reduced.
Disclosure of Invention
The application provides a piezoelectric micro-motor and a preparation method thereof.
According to a first aspect of embodiments of the present application, there is provided a piezoelectric micro-motor, including a stator and a rotor, the stator including a controlled deformation portion, a passive deformation portion, and a transmission linkage;
the controlled deformation part and the passive deformation part are provided with at least one rotor through hole, and the rotor is arranged in the rotor through hole;
the controlled deformation part is also provided with a reverse piezoelectric part for generating deformation;
the transmission connecting rod group is positioned between the controlled deformation part and the passive deformation part; the transmission connecting rod group comprises at least two transmission connecting rods, and two ends of each transmission connecting rod are respectively connected to the controlled deformation part and the passive deformation part;
the controlled deformation part, the passive deformation part and the transmission connecting rod group are integrally formed.
In some embodiments, the controlled deformation comprises a first controlled deformation and a second controlled deformation; the transmission connecting rod group comprises a first connecting rod group and a second connecting rod group; the first connecting rod group is positioned between the first controlled deformation part and the passive deformation part, and the second connecting rod group is positioned between the second controlled deformation part and the passive deformation part; the first controlled deformation part and the second controlled deformation part are symmetrically arranged on two sides of the passive deformation part.
In some embodiments, the first controlled deformation and the second controlled deformation are rectangular; the inverse piezoelectric portion is located on four sides of the first controlled deformation portion and the second controlled deformation portion, and four corners of the first controlled deformation portion and the second controlled deformation portion are arc-shaped.
In some embodiments, the inverse piezoelectric portion is configured to deform upon receipt of an excitation signal; the two opposite inverse piezoelectric parts on each controlled deformation part are a group, and the two inverse piezoelectric parts on each controlled deformation part are respectively used for receiving cosine excitation signals and sine excitation signals;
the frequency of the excitation signal is larger than or equal to 393.368kHz and smaller than or equal to 393.871kHz, and at the moment, two resonance modes of the stator are excited, and the rotor is driven through resonance vibration of the stator.
In some embodiments, the direction of the controlled deformation portion pointing to the passive deformation portion is transverse, and the direction perpendicular to the transverse direction is longitudinal, at this time, the frequency of the excitation signal may not be near the resonance frequency of the working mode, and the stator forms an elliptical motion track at the driving point through non-resonance;
the inverse piezoelectric portion located at the first controlled deformation portion includes a first group located on a lateral side of the first controlled deformation portion and a second group located on a longitudinal side of the first controlled deformation portion; the inverse piezoelectric portion located at the second controlled deformation portion includes a third group located on a lateral side of the second controlled deformation portion and a fourth group located on a longitudinal side of the second controlled deformation portion;
the first group and the fourth group are used for receiving sine excitation signals, and the second group and the third group are used for receiving cosine excitation signals; alternatively, the first set and the fourth set are used for receiving cosine excitation signals, and the second set and the third set are used for receiving sine excitation signals.
In some embodiments, the piezoelectric micro-motor further comprises micro-teeth;
the micro teeth are arranged in the rotor through holes and are positioned between the stator and the rotor; the micro teeth are arranged on at least one of the stator and the rotor; the stator is in contact with the rotor through the micro-teeth.
In some embodiments, the microteeth is equally spaced apart and the spacing between adjacent microteeth is an integer multiple of a wavelength; the wavelength corresponds to the formula: λ=v×t; where λ is the wavelength, v is the speed of sound in the stator or rotor, and T is the period of application of the sinusoidal excitation signal.
In some embodiments, the piezoelectric micro-motor further comprises a micro-drive structure;
the micro-driving structure comprises a conductive column and a micro-driving circuit; the micro-driving circuit is arranged on the flexible carrier plate; one end of the conductive column is electrically connected with the micro-driving circuit, and the other end of the conductive column is electrically connected with the inverse piezoelectric part.
According to a second aspect of embodiments of the present application, there is provided a method for manufacturing a piezoelectric micro-motor, including: providing a substrate;
forming a stator matrix by cutting the matrix through laser, and forming a reverse piezoelectric part with the thickness of 0.01-0.1 mm on the stator matrix through plating by a magnetron sputtering technology;
polarizing the inverse piezoelectric portion through a polarizing process after the inverse piezoelectric portion is formed, to form a stator;
providing a flexible carrier plate after polarizing the inverse piezoelectric portion; forming a micro-driving circuit on the flexible carrier plate to form a micro-driving structure; and electrically connecting a bonding pad of the micro-drive circuit with the inverse piezoelectric portion.
In some embodiments, plating the inverse piezoelectric portion on the stator substrate by a magnetron sputtering technique and polarizing the inverse piezoelectric portion by a polarizing process includes:
a high polymer mask plate is arranged on the stator matrix, and the reverse piezoelectric part is formed on the stator matrix by plating through a magnetron sputtering technology; and after the reverse piezoelectric part is formed, removing the macromolecule mask plate, and polarizing the reverse piezoelectric part through a corona polarization process.
In some embodiments, after polarizing the inverse piezoelectric portion by a polarizing process, further comprising:
a high molecular mask plate is arranged on the stator, and a rotor is formed by plating in a rotor through hole through a magnetron sputtering technology; and removing the macromolecule mask plate after the rotor is formed.
In some embodiments, after forming the rotor, further comprising:
installing a pre-compression structure on the stator; forming a micro-driving circuit on a flexible carrier plate in an ink-jet printing mode;
a solid sleeve is arranged on a bonding pad of the micro-driving circuit, and the hollow part of the solid sleeve is aligned with the bonding pad of the micro-driving circuit; pouring conductive adhesive into the solid sleeve; removing the solid sleeve after the conductive adhesive is solidified, and polishing the solidified conductive adhesive to form a conductive column; and the other end of the conductive post is electrically connected with the inverse piezoelectric part.
According to the embodiment of the application, when the size of the piezoelectric micro-motor is even smaller in millimeter level, if the parts of the stator are respectively formed and recombined, the parts have errors in processing, and after the combination, larger processing deviation is caused. The inventor finds that for the piezoelectric micro-motor, the processing deviation of the substrate with the level of 0.1 millimeter can cause the piezoelectric micro-motor not to stably operate. The controlled deformation part, the passive deformation part and the transmission connecting rod group are integrally formed, so that the integral machining deviation of the stator can be effectively reduced, and the machining requirement of the millimeter-level or even micrometer-level piezoelectric micro motor can be met.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description, serve to explain the principles of the application.
Fig. 1 is a schematic structural view of a piezoelectric micro-motor according to an embodiment of the present application.
Fig. 2 is a schematic structural view of a stator according to an embodiment of the present application.
Fig. 3 is a schematic structural view of a controlled deformation portion according to an embodiment of the present application.
Fig. 4 is a schematic diagram illustrating a simulation of the amount of deformation of a stator according to an embodiment of the present application.
Fig. 5 is a simulated schematic diagram of the amount of deformation throughout another stator shown in accordance with an embodiment of the present application.
Fig. 6 is an enlarged view of a portion of a piezoelectric micro-motor in a controlled deformation portion, according to an embodiment of the present application.
Fig. 7 is a schematic structural diagram of a micro-driving structure according to an embodiment of the present application.
Fig. 8 is a schematic diagram of a micro driving circuit according to an embodiment of the present application.
Fig. 9 is a flowchart illustrating a method of fabricating a piezoelectric micro-motor according to an embodiment of the present application.
Detailed Description
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The implementations described in the following exemplary examples are not representative of all implementations consistent with the present application. Rather, they are merely examples of apparatus and methods consistent with some aspects of the present application as detailed in the accompanying claims.
The embodiment of the present application provides a piezoelectric micro-motor 10, and fig. 1 shows a schematic structural diagram of the piezoelectric micro-motor 10. As shown in fig. 1, the piezoelectric micro-motor 10 includes: a stator 11 and a rotor 12.
The stator 11 comprises a controlled deformation portion 13, a passive deformation portion 14 and a transmission linkage 15.
The controlled deformation part 13 and the passive deformation part 14 are provided with at least one rotor through hole 16, and the rotor 12 is arranged in the rotor through hole 16.
Specifically, the controlled deformation portion 13 and the passive deformation portion 14 are provided with at least one rotor through hole 16, that is, one or more rotor through holes 16 may be provided only in the controlled deformation portion 13, or one or more rotor through holes 16 may be provided only in the passive deformation portion 14, or one or more rotor through holes 16 may be provided in both the controlled deformation portion 13 and the passive deformation portion 14. The number of loads connected to the piezoelectric micro motor 10 can be flexibly adjusted through different rotor through holes 16 and rotor 12 setting modes, and loads with different connection parameters of the piezoelectric micro motor 10 can be flexibly adjusted, so that the use scene and the use range of the piezoelectric micro motor 10 can be expanded.
The controlled deformation part 13 is also provided with a reverse piezoelectric part 17 for generating deformation.
The drive linkage 15 is located between the controlled deformation 13 and the passive deformation 14. The transmission link group 15 includes at least two transmission links 151, and both ends of the transmission links 151 are connected to the controlled deformation portion 13 and the passive deformation portion 14, respectively.
Specifically, the inverse piezoelectric portion 17 is made of a piezoelectric material, which may be, but is not limited to, a piezoelectric ceramic. Therefore, when the inverse piezoelectric portion 17 receives the excitation signal, deformation that continuously changes occurs due to the excitation signal. The deformed inverse piezoelectric portion 17 drives the controlled deformation portion 13 to generate continuously variable deformation, and the controlled deformation portion 13 deforms to drive the rotor through hole 16 to generate continuously variable deformation. Thus, the rotor 12 can be rotated by the rotor through-holes 16 generating the deformation which varies continuously, so as to drive the load connected to the piezoelectric micro-motor 10.
Moreover, the deformation of the controlled deformation portion 13 can be transmitted to the passive deformation portion 14 through the transmission connecting rod set 15 so as to drive the passive deformation portion 14 to move, so that the deformation of the controlled deformation portion 13 and the deformation of the passive deformation portion 14 can simultaneously drive the plurality of rotor through holes 16 to generate deformation which continuously changes, and further, the rotor through holes 16 which generate deformation which continuously changes can drive the plurality of rotors 12 to rotate so as to drive a plurality of loads connected with the piezoelectric micro motor 10.
Meanwhile, fig. 2 shows a schematic structure of a stator 11. As shown in fig. 1, referring to fig. 2, the controlled deformation portion 13 of the stator 11 may be rectangular or cross-shaped, but is not limited thereto, and the shape of the controlled deformation portion 13 may be other shapes that are easily deformed by the inverse piezoelectric portion 17.
The controlled deformation portion 13, the passive deformation portion 14 and the transmission link group 15 are integrally formed.
Specifically, the controlled deformation portion 13, the passive deformation portion 14 and the transmission link group 15 are integrally formed by processing the same material, and an assembling process is not required after the controlled deformation portion 13, the passive deformation portion 14 and the transmission link group 15 are formed.
When the size of the piezoelectric micro-motor 10 is even smaller in the millimeter order, if the respective portions of the stator 11 are recombined by being formed separately, there is an error in processing each portion, and a larger processing deviation is caused after the combination. The inventors have found through repeated experiments that, for the piezoelectric micro motor 10 having a size in the range of 1 mm to 5 mm, the substrate is a machining deviation of the order of 0.1 mm, which also results in an unstable operation of the piezoelectric micro motor 10. And the controlled deformation part 13, the passive deformation part 14 and the transmission connecting rod group 15 are integrally formed, so that the integral machining deviation of the stator 11 can be effectively reduced, and the machining requirement of the millimeter-level or even micrometer-level piezoelectric micro motor 10 can be met.
In some embodiments, as shown in fig. 1, the controlled deformation 13 is located on the same central axis X as the passive deformation 14. The center of each rotor through-hole 16 may be located on the central axis X.
Specifically, the rotor through hole 16 is circular when the controlled deformation portion 13 and the passive deformation portion 14 are not deformed, and the center of the rotor through hole 16 is the center of the circle. The rotor through hole 16 is elliptical when the controlled deformation portion 13 and the passive deformation portion 14 are deformed, and the center of the rotor through hole 16 is the intersection point of the major axis and the minor axis of the ellipse.
It should be noted that the center of each rotor through hole 16 is located on the central axis X only as one possible embodiment in the present application, but in other embodiments of the present application, the center of each rotor through hole 16 may be partially located on the central axis X, partially not located on the central axis X, or may not be located on the central axis X entirely.
In some embodiments, as shown in fig. 1, the piezoelectric micro-motor 10 further includes a pre-compression structure 19. The pre-compression structure 19 serves to keep the stator 11 relatively fixed. The stator 11 is kept relatively fixed by the pre-pressure structure 19, so that the whole of other structures connected with the stator 11 can be kept relatively fixed, the normal operation of the piezoelectric micro motor 10 can be kept, and the deformation amplitude of the stator 11 caused by interference of the other structures with the stator 11 can be avoided.
The pre-compression structure 19 comprises: frame 191, fastening nut 192, and disc spring 193.
The fastening nut 192 is screw-mounted to the frame 191. The pre-compression structure 19 is used to keep the stator 11 relatively fixed, i.e. by adjusting the distance between the stator and the passive deformation 14 by tightening the nut 192, to a degree that the disc spring 193 can generate an elastic force without being excessively compressed. Further, since the disc spring 193 maintains a certain space for elastic deformation, it does not excessively interfere with deformation of the passive deformation portion 14.
Meanwhile, the deformation amplitude generated by the passive deformation part 14 is smaller than that of the controlled deformation part 13, so that the pressing position of the pre-pressure structure 19 is positioned on the passive deformation part 14, and the influence of the pre-pressure structure 19 on the deformation amplitude of the stator 11 can be reduced to the greatest extent.
In some embodiments, as shown in fig. 1, the drive link 151 is at an angle α to the central axis X. The deformation generated by the controlled deformation part 13 can be amplified by the triangle amplification principle and then transmitted to the passive deformation part through the transmission connecting rod group 15, so that the controlled deformation part 13 and the passive deformation part 14 can be used for driving loads with different requirements.
In the present embodiment, the deformation generated by the controlled deformation portion 13 is amplified by the transmission link set 15 and then transferred to the passive deformation portion by the triangle amplification principle, but the present invention is not limited thereto, and in other embodiments, the deformation generated by the controlled deformation portion 13 may be reduced by the transmission link set 15 and then transferred to the passive deformation portion, so that the controlled deformation portion 13 and the passive deformation portion 14 are used for driving loads with different requirements.
In some embodiments, as shown in fig. 1, the controlled deformation portion 13 includes a first controlled deformation portion 131 and a second controlled deformation portion 132. The drive linkage 15 includes a first linkage 152 and a second linkage 153. The first linkage 152 is located between the first controlled deformation 131 and the passive deformation 14, and the second linkage 153 is located between the second controlled deformation 132 and the passive deformation 14. The first controlled deformation portion 131 and the second controlled deformation portion 132 are symmetrically disposed on two sides of the passive deformation portion 14.
The first controlled deformation part 131 and the second controlled deformation part 132 are symmetrically arranged on two sides of the passive deformation part 14, so that the stress of the passive deformation part 14 is more uniform, deformation of the passive deformation part 14 caused by uneven stress is reduced, and the stability of the passive deformation part 14 and the overall running stability of the piezoelectric micro motor 10 are improved.
In some embodiments, fig. 3 shows a schematic structural view of the controlled deformation portion 13. As shown in fig. 1 and 3, the first controlled deformation portion 131 and the second controlled deformation portion 132 are rectangular. The inverse piezoelectric portion 17 is located on four sides of the first controlled deformation portion 131 and the second controlled deformation portion 132, and four corners of the first controlled deformation portion 131 and the second controlled deformation portion 132 are circular arcs.
Specifically, in the present embodiment, the inverse piezoelectric portions 17 are symmetrically disposed on four sides of the first controlled deformation portion 131 and the second controlled deformation portion 132. Fig. 1 shows a central axis X, and a first axis Y1 of the first controlled deformation portion 131 and a second axis Y2 of the second controlled deformation portion 132, the inverse piezoelectric portion 17 disposed at the first controlled deformation portion 131 is symmetrical along the central axis X and the first axis Y1, and the inverse piezoelectric portion 17 disposed at the second controlled deformation portion 132 is symmetrical along the central axis X and the second axis Y2.
Fig. 4 and 5 are schematic diagrams of simulation of deformation amounts of the stator 11 after the inventors have performed simulation experiments to obtain the deformation of the first controlled deformation portion 131 and the second controlled deformation portion 132. Referring to fig. 4 and 5, the inverse piezoelectric portion 17 is located on four sides of the first controlled deformation portion 131 and the second controlled deformation portion 132. After the inverse piezoelectric portion 17 receives the excitation signal to deform, different deformation states are generated, and the controlled deformation portion 13 is driven to deform. As can be seen from fig. 4 and 5, the inverse piezoelectric portion 17 is the portion of the stator 11 where the deformation is the greatest.
After the deformation of the controlled deformation portion 13, the rotor through hole 16 is changed into an elliptical shape due to the deformation of the controlled deformation portion 13. By controlling the inverse piezoelectric portions 17 on the four sides of the first controlled deformation portion 131 or the second controlled deformation portion 132, the deformation state of the first controlled deformation portion 131 or the second controlled deformation portion 132 can be adjusted, so that the oval formed by deformation of the rotor through hole 16 rotates around the center thereof, and the effect of driving the rotor 12 to rotate is achieved.
It can also be observed from fig. 4 and 5 that there are distinct less deformed portions at the four corners of the controlled deformation portion 13, i.e. the dark portions shown at the areas Q1, Q2, Q3, Q4 and Q5 in fig. 4 and 5. By setting the four corners of the first controlled deformation portion 131 and the second controlled deformation portion 132 to be arc-shaped, the portions of the first controlled deformation portion 131 and the second controlled deformation portion 132 having smaller deformation can be reduced, and thus, the deformation amount generated by the controlled deformation portion 13 under the same deformation amount generated by the inverse piezoelectric portion 17 can be improved, and further, the operation efficiency of the stator 11 and the operation efficiency of the piezoelectric micro motor 10 as a whole can be improved.
It should be noted that, due to the problem of the viewing angle, fig. 4 and 5 do not show the deformation amounts of all the corners of the first controlled deformation portion 131 and the second controlled deformation portion 132, but the corners, which are not shown, can still refer to the deformation amounts of the corners, which are already shown.
In some embodiments, the inverse piezoelectric portion 17 is configured to deform upon receipt of an excitation signal. The two opposite inverse piezoelectric portions 17 on each controlled deformation portion 13 are a group, and the two inverse piezoelectric portions 17 on each controlled deformation portion 13 are respectively used for receiving cosine excitation signals and sine excitation signals.
The frequency of the excitation signal is larger than or equal to 393.368kHz and smaller than or equal to 393.871kHz.
Specifically, as shown in fig. 1, two opposite inverse piezoelectric portions 17 on the controlled deformation portion 13 are grouped together, that is, on the first controlled deformation portion 131, the inverse piezoelectric portions 17 located on both sides of the first axis Y1 are grouped together, and the inverse piezoelectric portions 17 located on both sides of the central axis X are grouped together. Similarly, on the second controlled deformation portion 132, the inverse piezoelectric portions 17 located on both sides of the second axis Y2 are in one group, and the inverse piezoelectric portions 17 located on both sides of the central axis X are in the other group.
The frequency of the excitation signal is larger than or equal to 393.368kHz and smaller than or equal to 393.871kHz. When the excitation signal is in the range, the excitation signal is just in the resonance excitation range of the two controlled deformation parts 13, so that the deformation of the controlled deformation parts 13 after receiving the excitation signal can be improved by utilizing the resonance excitation of the controlled deformation parts, and further, the parameters such as the integral rotating speed and the output torque of the piezoelectric micro-motor 10 can be improved.
In some embodiments, as shown in fig. 1, the direction in which the controlled deformation portion 13 points toward the passive deformation portion 14 is a lateral direction Z1, and a longitudinal direction Z2 perpendicular to the lateral direction Z1.
The inverse piezoelectric portion 17 located at the first controlled deformation 131 includes a first group 171 and a second group 172, the first group 171 being located on the lateral Z1 side of the first controlled deformation 131, and the second group 172 being located on the longitudinal Z2 side of the first controlled deformation 131. The inverse piezoelectric portion 17 located at the second controlled deformation portion 132 includes a third group 173 and a fourth group 174, the third group 173 being located on the lateral Z1 side of the second controlled deformation portion 132, the fourth group 174 being located on the longitudinal Z2 side of the second controlled deformation portion 132.
The first set 171 and the fourth set 174 are used for receiving sine excitation signals, the second set 172 and the third set 173 are used for receiving cosine excitation signals, or the first set 171 and the fourth set 174 are used for receiving cosine excitation signals, and the second set 172 and the third set 173 are used for receiving sine excitation signals.
By setting in this way, when the frequency of the excitation signal is within the range of 393.368 kHz~393.871 kHz, the excitation signal is input to the opposite piezoelectric portion 17 in the above manner, so that two resonance modes of the controlled deformation portion 13 can be excited simultaneously, and accordingly, the deformation of the controlled deformation portion 13 after receiving the excitation signal can be further improved by using resonance excitation of the controlled deformation portion 13, and further, parameters such as the whole rotation speed and the output torque of the piezoelectric micro motor 10 can be further improved.
In addition, the frequency of the excitation signal may be other than 393.368 kHz~393.871 kHz, and in this case, when the excitation signal is still applied in the above-described mode, the first group 171 and the fourth group 174 inverse piezoelectric portions vibrate in the vertical direction under the excitation of the electric signal, the second group 172 and the third group 173 inverse piezoelectric portions vibrate in the horizontal direction under the excitation of the electric signal, and the superposition of the vibrations in the two directions can also form an elliptical motion capable of driving the rotor to rotate. At this time, however, the piezoelectric micromachine operates in a non-resonant state.
Although the deformation amount of the passive deforming portion 14 shown in fig. 4 is smaller than the deformation amount of the passive deforming portion 14 shown in fig. 5, in reality, this is a simulation diagram obtained by the inventors under different data conditions. Thus, the difference in deformation amount between fig. 4 and 5 does not conflict with the effect in the present embodiment.
In some embodiments, the drive linkage 15 comprises at least one of a flexible hinge, a horn, and a rigid link. By means of the arrangement, the displacement amplification effect of the transmission connecting rod group 15 can be better achieved, namely, the deformation amount transmitted to the passive deformation portion 14 by the transmission connecting rod group 15 can be closer to a preset numerical value, so that the deformation amount generated by the controlled deformation portion 13 under the condition that the same deformation amount is generated by the inverse piezoelectric portion 17 can be further improved, and further, the running efficiency of the stator 11 and the whole running efficiency of the piezoelectric micro motor 10 can be further improved.
In some embodiments, as shown in fig. 1, the piezoelectric micro-motor 10 further includes micro-teeth 18.
The micro teeth 18 are disposed in the rotor through hole 16 and between the stator 11 and the rotor 12. The micro teeth 18 are provided on at least one of the stator 11 and the rotor 12. The stator 11 is in contact with the rotor 12 through the micro teeth 18.
Specifically, the micro teeth 18 may be disposed only on the stator 11, i.e., the scheme shown in fig. 1, or the micro teeth 18 may be disposed only on the rotor 12, or the micro teeth 18 may be disposed on both the stator 11 and the rotor 12.
Also, the contact of the stator 11 with the rotor 12 through the micro teeth 18 can increase the area of the stator 11 acting on the rotor 12. Specifically, fig. 6 is a partial enlarged view of a portion of the piezoelectric micro-motor 10 located at the controlled deformation portion 13, and referring to fig. 6, taking a case where the micro-teeth 18 are located on the stator 11 as an example, when the shape of the rotor through-hole 16 is changed to an elliptical shape, the minor axis of the elliptical shape is shortened compared with the diameter of the circular rotor through-hole 16 before the deformation, and the micro-teeth 18 are pressed against the rotor 12, which plays a role of increasing the action area of the rotor through-hole 16 on the rotor 12.
In order to intuitively show the micro-teeth 18, the gap between the stator 11 and the rotor 12 shown in the drawings is large, but in practice, the micro-teeth 18 themselves are small, the shape of the rotor through-hole 16 is changed into an elliptical shape, and after the characteristics of flexibility of materials of the stator 11 and the rotor 12 are superimposed, the stator 11 may be in contact with the rotor 12.
The stator 11 contacts with the rotor 12 through the micro teeth 18 to increase the acting area of the stator 11 on the rotor 12, so that the efficiency of power transmitted from the stator 11 to the rotor 12 can be improved, and further, the performance of the piezoelectric micro motor 10 can be improved.
In some embodiments, the microteeth 18 are equally spaced apart and the spacing between adjacent microteeth 18 is an integer multiple of the wavelength. The wavelength corresponds to the formula: λ=v×t. Where λ is the wavelength, v is the sound velocity in the stator 11 or the rotor 12, and T is the period of applying a sinusoidal excitation signal.
Specifically, when the microteeth 18 is provided only on the stator 11, v is the sound velocity in the stator 11. When the microteeth 18 is provided only on the rotor 12, v is the speed of sound within the rotor 12.
By making the micro teeth 18 simultaneously accord with the distribution rule, the stator 11 can better contact with the rotor 12 through the micro teeth 18, so as to increase the acting area of the stator 11 on the rotor 12, thereby further improving the efficiency of the power transmitted from the stator 11 to the rotor 12, and further improving the performance of the piezoelectric micro motor 10.
In some embodiments, fig. 7 shows a schematic structural diagram of the micro driving structure 20, and the flexible carrier plate 21 is a hollow rectangular plate structure. As shown in fig. 7, the piezoelectric micro-motor 10 further includes a micro-drive structure 20.
Referring to the schematic structure of the micro-driving circuit 23 shown in fig. 8, the micro-driving structure 20 includes a conductive pillar 22 and the micro-driving circuit 23. The micro-driving circuit 23 is disposed on the flexible carrier 21. One end of the conductive post 22 is electrically connected to the micro driving circuit 23, and the other end is electrically connected to the inverse piezoelectric portion 17.
Specifically, the region Q6 shown in fig. 7 is used to refer to the stator 11, the rotor 12, the controlled deformation portion 13, the passive deformation portion 14, the rotor through hole 16 of the transmission link group 15, the inverse piezoelectric portion 17, the micro teeth 18, the pre-compression structure 19, and the like of the piezoelectric micro motor 10.
Also, as shown in fig. 7, the frame of the flexible carrier plate 21 is a hollow rectangular plate-like structure, and the flexible carrier plate 21 surrounds the stator 11. The micro-driving circuit 23 is a flexible composite circuit board, and not only comprises a driving control chip special for a low-voltage driving piezoelectric micro-motor, a chip resistor, a capacitor, an inductor and other rigid devices, but also comprises a bonding pad, a wire and the like, and all the above devices are integrated on the flexible carrier plate 21. The flexible carrier plate 21 is made of a flexible base material, for example, polyimide, polyethylene, or polyethylene terephthalate, but is not limited thereto. By integrating the micro-driving structure 20 on the piezoelectric micro-motor 10, integration of the motor part and the driving part of the piezoelectric micro-motor 10 can be realized, and the integration degree of the piezoelectric micro-motor 10 can be improved.
Each device of the micro-driving circuit 23, such as a wire and a pad, is formed on the flexible carrier plate 21 by means of an electro-fluid ink-jet printing method, so that a finer micro-driving circuit 23 structure can be formed.
It should be noted that the hollow rectangular plate-like flexible carrier 21 according to the embodiment of the present application is only one possible embodiment, but is not limited thereto in other embodiments. For example, the flexible carrier 21 may be a monolithic rectangular flexible carrier, and the micro-driving structure 20 may be laminated on the piezoelectric micro-motor 10, where, referring to the schematic structural diagram of the micro-driving circuit 23 shown in fig. 8, the first pad 40, the second pad 41, the third pad 42, and the fourth pad 43 to be connected to the piezoelectric ceramics on the piezoelectric micro-motor on the micro-driving circuit 23 are disposed at positions parallel to the inverse piezoelectric portion 17 in the first controlled deformation portion 131 or the second controlled deformation portion 132. The first pad 40, the second pad 41, the third pad 42 and the fourth pad 43 may be arranged in a rectangular shape, and the conductive posts 22 electrically connect the corresponding pads and the inverse piezoelectric portion 17, so that the conduction of a circuit and the supporting of the micro driving structure 20 may be simultaneously achieved through the conductive posts 22.
According to a second aspect of the present application, a method for manufacturing the piezoelectric micro-motor 10 is provided, and fig. 9 is a flowchart illustrating a method for manufacturing the piezoelectric micro-motor 10. As shown in fig. 9, the method for manufacturing the piezoelectric micro-motor 10 includes: step S110 to step S140.
In step S110, a substrate is provided.
In step S120, a stator base is formed by laser cutting the base, and a reverse piezoelectric portion having a thickness of 0.01 mm to 0.1 mm is formed on the stator base by plating by magnetron sputtering technique.
Specifically, the stator base includes a first controlled deformation portion 131, a second controlled deformation portion 132, a passive deformation portion 14, and a transmission link set 15.
In step S130, after the inverse piezoelectric portion 17 is formed, the inverse piezoelectric portion 17 is polarized by a polarization process to form the stator 11.
In step S140, after polarizing the inverse piezoelectric portion 17, the flexible carrier plate 21 is provided. A micro-drive circuit 23 is formed on the flexible carrier plate 21 to form the micro-drive structure 20. The pad of the micro driving circuit 23 is electrically connected to the inverse piezoelectric portion 17.
The stator 11 can be formed in an integrated forming manner, namely the controlled deformation part 13, the passive deformation part 14 and the transmission connecting rod group 15 are integrally formed, so that the processing requirements of the millimeter-level or even micrometer-level piezoelectric micro motor 10 can be met, and further, the processing errors of all parts can be reduced, so that the piezoelectric micro motor 10 cannot stably run.
In some embodiments, plating the inverse piezoelectric portion 17 on the stator base by a magnetron sputtering technique and polarizing the inverse piezoelectric portion 17 by a polarizing process includes:
a polymer mask plate is arranged on the stator matrix, and the inverse piezoelectric portion 17 is formed on the stator matrix by plating through a magnetron sputtering technology. After the reverse piezoelectric portion 17 is formed, the polymer mask is removed, and the reverse piezoelectric portion 17 is polarized by a process of corona polarization.
Since the stator base is smaller in size, the counter piezoelectric portion 17 is correspondingly smaller in size, and higher precision is required. By arranging a polymer mask plate and performing magnetron sputtering, the inverse piezoelectric portion 17 can be directly deposited on the stator matrix, so that the inverse piezoelectric portion 17 can be formed with smaller error, and the error requirement of the piezoelectric micro-motor 10 on the inverse piezoelectric portion 17 can be met. Also, since the reverse piezoelectric portion 17 is directly deposited to form the reverse piezoelectric portion 17, the step of assembling is omitted, and errors can be further reduced, as compared with separately preparing the reverse piezoelectric portion 17 and assembling.
In some embodiments, after polarizing the inverse piezoelectric portion 17 by the polarizing process, it further includes:
a polymer mask plate is arranged on the stator 11, and the rotor 12 is formed in the rotor through hole 16 by plating through a magnetron sputtering technology. After the rotor 12 is formed, the polymer mask is removed.
Specifically, when the rotor 12 is formed by plating in the rotor through-hole 16, a gap exists between the rotor 12 and the rotor through-hole 16. Thus, the plated rotor 12 can remain independent of the rotor through-holes 16. And, the material partially falling into the gap between the rotor 12 and the rotor through hole 16 can be removed by the subsequent process without affecting the processing precision of the stator 11 and the rotor 12.
Because of the smaller size of the stator 11, and correspondingly, the rotor 12, a higher degree of precision is required. By arranging a polymer mask plate and performing magnetron sputtering, the rotor 12 can be directly deposited on the stator 11, so that the inverse piezoelectric portion 17 can be formed with smaller error, and the error requirement of the piezoelectric micro-motor 10 on the inverse piezoelectric portion 17 can be met. Also, since the direct deposition forming of the rotor 12 eliminates the step of assembling, errors can be further reduced, as compared to separately preparing the rotor 12 and assembling.
In some embodiments, after forming rotor 12, further comprises:
a pre-compression structure 19 is formed on the stator 11. The micro driving circuit 23 is formed on the flexible carrier plate 21 by means of inkjet printing.
A solid sleeve is provided on the pad of the micro driving circuit 23, and a hollow portion of the solid sleeve is aligned with the pad of the micro driving circuit 23. And filling conductive adhesive into the solid sleeve. After the conductive paste is solidified, the solid sleeve is removed and the solidified conductive paste is polished to form the conductive posts 22. The other end of the conductive post 22 is electrically connected to the inverse piezoelectric portion 17.
Specifically, the micro driving circuit 23 includes a first pad 40, a second pad 41, a third pad 42, and a fourth pad 43. The set solid sleeve may be a hollow rectangular sleeve having a height of 1.5 mm, but is not limited thereto. The conductive adhesive may be epoxy conductive adhesive, and may be E-solvent 3022, but is not limited thereto.
By such a method, the micro-driving structure 20 can be prepared. By integrating the micro-driving circuit 23 into the flexible carrier plate 21, the micro-driving structure 20 can be integrated on the piezoelectric micro-motor 10, thereby integrating the motor part and the driving part of the piezoelectric micro-motor 10 and improving the integration degree of the piezoelectric micro-motor 10.
The above embodiments of the present application may be complementary to each other without conflict.
It is noted that in the drawings, the size of layers and regions may be exaggerated for clarity of illustration. Moreover, it will be understood that when an element or layer is referred to as being "on" another element or layer, it can be directly on the other element or intervening layers may be present. In addition, it will be understood that when an element or layer is referred to as being "under" another element or layer, it can be directly under the other element or intervening layers or elements may be present. In addition, it will be understood that when a layer or element is referred to as being "between" two layers or elements, it can be the only layer between the two layers or elements, or more than one intervening layer or element may also be present. Like reference numerals refer to like elements throughout.
The term "plurality" refers to two or more, unless explicitly defined otherwise.
Other embodiments of the present application will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the application following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the application pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.
It is to be understood that the present application is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the application is limited only by the appended claims.
Claims (12)
1. The piezoelectric micro motor comprises a stator and a rotor, and is characterized in that the stator comprises a controlled deformation part, a passive deformation part and a transmission connecting rod group;
the controlled deformation part and the passive deformation part are provided with at least one rotor through hole, and the rotor is arranged in the rotor through hole;
the controlled deformation part is also provided with a reverse piezoelectric part for generating deformation;
the transmission connecting rod group is positioned between the controlled deformation part and the passive deformation part; the transmission connecting rod group comprises at least two transmission connecting rods, and two ends of each transmission connecting rod are respectively connected to the controlled deformation part and the passive deformation part;
the controlled deformation part, the passive deformation part and the transmission connecting rod group are integrally formed.
2. The piezoelectric micro-machine of claim 1, wherein the controlled deformations include a first controlled deformation and a second controlled deformation; the transmission connecting rod group comprises a first connecting rod group and a second connecting rod group; the first connecting rod group is positioned between the first controlled deformation part and the passive deformation part, and the second connecting rod group is positioned between the second controlled deformation part and the passive deformation part; the first controlled deformation part and the second controlled deformation part are symmetrically arranged on two sides of the passive deformation part.
3. The piezoelectric micro-machine of claim 2, wherein the first controlled deformation and the second controlled deformation are rectangular; the inverse piezoelectric portion is located on four sides of the first controlled deformation portion and the second controlled deformation portion, and four corners of the first controlled deformation portion and the second controlled deformation portion are arc-shaped.
4. A piezoelectric micro-machine according to claim 3, wherein the inverse piezoelectric portion is adapted to deform upon receipt of an excitation signal; the two opposite inverse piezoelectric parts on each controlled deformation part are a group, and the two inverse piezoelectric parts on each controlled deformation part are respectively used for receiving cosine excitation signals and sine excitation signals;
the frequency of the excitation signal is larger than or equal to 393.368kHz and smaller than or equal to 393.871kHz.
5. The piezoelectric micromachine according to claim 4, wherein a direction in which the controlled deformation portion points to the passive deformation portion is a lateral direction, and a longitudinal direction perpendicular to the lateral direction;
the inverse piezoelectric portion located at the first controlled deformation portion includes a first group located on a lateral side of the first controlled deformation portion and a second group located on a longitudinal side of the first controlled deformation portion; the inverse piezoelectric portion located at the second controlled deformation portion includes a third group located on a lateral side of the second controlled deformation portion and a fourth group located on a longitudinal side of the second controlled deformation portion;
the first group and the fourth group are used for receiving sine excitation signals, and the second group and the third group are used for receiving cosine excitation signals; alternatively, the first set and the fourth set are used for receiving cosine excitation signals, and the second set and the third set are used for receiving sine excitation signals.
6. The piezoelectric micro-machine of claim 1, wherein the piezoelectric micro-machine further comprises micro-teeth;
the micro teeth are arranged in the rotor through holes and are positioned between the stator and the rotor; the micro teeth are arranged on at least one of the stator and the rotor; the stator is in contact with the rotor through the micro-teeth.
7. The piezoelectric micro-machine of claim 6, wherein the micro-teeth are equally spaced apart, and the spacing between adjacent micro-teeth is an integer multiple of a wavelength; the wavelength corresponds to the formula: λ=v×t; where λ is the wavelength, v is the speed of sound in the stator or rotor, and T is the period of application of the sinusoidal excitation signal.
8. The piezoelectric micro-machine of claim 1, wherein the piezoelectric micro-machine further comprises a micro-drive structure;
the micro-driving structure comprises a conductive column and a micro-driving circuit; the micro-driving circuit is arranged on the flexible carrier plate; one end of the conductive column is electrically connected with the micro-driving circuit, and the other end of the conductive column is electrically connected with the inverse piezoelectric part.
9. A method of manufacturing a piezoelectric micromotor, comprising:
providing a substrate;
forming a stator matrix by cutting the matrix through laser, and forming a reverse piezoelectric part with the thickness of 0.01-0.1 mm on the stator matrix through plating by a magnetron sputtering technology;
polarizing the inverse piezoelectric portion through a polarizing process after the inverse piezoelectric portion is formed, to form a stator;
providing a flexible carrier plate after polarizing the inverse piezoelectric portion; forming a micro-driving circuit on the flexible carrier plate to form a micro-driving structure; and electrically connecting a bonding pad of the micro-drive circuit with the inverse piezoelectric portion.
10. The method of manufacturing a piezoelectric micro-motor according to claim 9, wherein the reverse piezoelectric portion is formed on the stator base by plating by a magnetron sputtering technique, and the reverse piezoelectric portion is polarized by a polarization process, comprising:
a high polymer mask plate is arranged on the stator matrix, and the reverse piezoelectric part is formed on the stator matrix by plating through a magnetron sputtering technology; and after the reverse piezoelectric part is formed, removing the macromolecule mask plate, and polarizing the reverse piezoelectric part through a corona polarization process.
11. The method of manufacturing a piezoelectric micro-motor according to claim 9, further comprising, after polarizing the inverse piezoelectric portion by a polarizing process:
a high molecular mask plate is arranged on the stator, and a rotor is formed by plating in a rotor through hole through a magnetron sputtering technology; and removing the macromolecule mask plate after the rotor is formed.
12. The method of manufacturing a piezoelectric micro-machine according to claim 11, further comprising, after forming the rotor:
installing a pre-compression structure on the stator; forming a micro-driving circuit on a flexible carrier plate in an ink-jet printing mode;
a solid sleeve is arranged on a bonding pad of the micro-driving circuit, and the hollow part of the solid sleeve is aligned with the bonding pad of the micro-driving circuit; pouring conductive adhesive into the solid sleeve; removing the solid sleeve after the conductive adhesive is solidified, and polishing the solidified conductive adhesive to form a conductive column; and the other end of the conductive post is electrically connected with the inverse piezoelectric part.
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| CN1833351A (en) * | 2003-06-13 | 2006-09-13 | 高压马达乌普萨拉有限公司 | Piezoelectric electromechanical drive unit |
| CN101681982A (en) * | 2007-05-07 | 2010-03-24 | 罗伯特.博世有限公司 | Piezoelectric drive system, and method for the operation thereof |
| JP2012100483A (en) * | 2010-11-04 | 2012-05-24 | Canon Inc | Vibration type drive device |
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