CN116300343B - Light source head water-cooling assembly of photoetching machine - Google Patents
Light source head water-cooling assembly of photoetching machine Download PDFInfo
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- CN116300343B CN116300343B CN202310583606.1A CN202310583606A CN116300343B CN 116300343 B CN116300343 B CN 116300343B CN 202310583606 A CN202310583606 A CN 202310583606A CN 116300343 B CN116300343 B CN 116300343B
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- heat conduction
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
- F21V29/50—Cooling arrangements
- F21V29/502—Cooling arrangements characterised by the adaptation for cooling of specific components
- F21V29/503—Cooling arrangements characterised by the adaptation for cooling of specific components of light sources
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
- F21V29/50—Cooling arrangements
- F21V29/56—Cooling arrangements using liquid coolants
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
- F21V29/50—Cooling arrangements
- F21V29/70—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks
- F21V29/71—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks using a combination of separate elements interconnected by heat-conducting means, e.g. with heat pipes or thermally conductive bars between separate heat-sink elements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
- F21V29/50—Cooling arrangements
- F21V29/70—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks
- F21V29/74—Cooling arrangements characterised by passive heat-dissipating elements, e.g. heat-sinks with fins or blades
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
Abstract
The invention relates to the technical field of photoetching machines, in particular to a photoetching machine light source head water cooling assembly, which comprises a light source main body, a water cooling device, a water circulation device and a heat conduction device, wherein one side of the light source main body is fixedly connected with the water cooling device, the other side of the water cooling device is fixedly connected with the water circulation device, one side of the water circulation device is fixedly connected with a heat dissipation main body, the heat conduction device is uniformly distributed in the water circulation device, the water cooling device comprises a first cover plate, a first water blocking main body and a second water blocking main body, one side of the first cover plate is fixedly connected with a second cover plate, and the second cover plate is fixedly connected with the light source main body.
Description
Technical Field
The invention relates to the technical field of lithography machines, in particular to a light source head water-cooling assembly of a lithography machine.
Background
The mask alignment exposure machine, the exposure system, the lithography system and the like are core equipment for manufacturing chips, the technology similar to photo development is adopted to print the fine patterns on the mask plate on the silicon wafer through light exposure, a specific light source emitting device is usually required to irradiate the silicon wafer when the mask is used, a large amount of heat is generated when the light source emitting device continuously operates, and heat dissipation is required to be carried out through a water cooling assembly at the moment.
When the traditional photoetching machine light source head water-cooling component is used, the water-cooling component is generally directly fixed behind a light source emitting device of the photoetching machine, heat in the light source emitting device of the photoetching machine is led out through cooling liquid at the moment, heat dissipation is achieved, the water-cooling component is of a closed structure, impurities can be generated in the water-cooling component when the purity of the cooling liquid is low, cleaning and maintenance of the inside of the water-cooling component are inconvenient at the moment, and therefore the photoetching machine light source head water-cooling component is provided for the problems.
Disclosure of Invention
The invention aims to provide a light source head water cooling assembly of a photoetching machine, which aims to solve the problem that the inside of the water cooling assembly is inconvenient to clean and maintain.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the utility model provides a photoetching machine light source head water cooling subassembly, includes light source main part, water cooling plant, hydrologic cycle device and heat conduction device, light source main part one side and water cooling plant fixed connection, water cooling plant opposite side and hydrologic cycle device fixed connection, hydrologic cycle device one side fixedly connected with heat dissipation main part, heat conduction device is evenly distributed in hydrologic cycle device, water cooling plant includes first apron, first manger plate main part and second manger plate main part, first apron one side fixedly connected with second apron, second apron and light source main part fixed connection, first apron internal fixation has a heat-conducting plate, one side and hydrologic cycle device fixed connection of second apron are kept away from to the heat-conducting plate, first manger plate main part sets up in first apron, second manger plate main part and hydrologic cycle device fixed connection, first manger plate main part one side and heat-conducting plate fixed connection, first manger plate main part includes first manger plate and second manger plate frame, be provided with first sealing strip in the first manger plate frame, first one side and second manger plate frame closely laminating, first side and second manger plate frame, second manger plate main part, first side and second sealing strip, first side and second manger plate main part, first side sealing strip and second sealing strip, first side and second sealing strip, and one side of the second cover plate is provided with a water outlet hole.
Preferably, the sealing main body comprises a sealing block, the sealing block is internally tightly attached to the second water retaining rod, limiting strips are arranged on two sides of the second water retaining rod, the limiting strips are tightly attached to the sealing block, the sealing block is internally tightly attached to the first water retaining rod, limiting seats are arranged on two sides of the sealing block, the limiting seats are L-shaped, and one side of each limiting seat is fixedly connected with the first water retaining rod.
Preferably, the U-shaped plate is arranged in the sealing block, the reinforcing plates are arranged in the sealing block, the two reinforcing plates are respectively arranged at two sides of the first water retaining rod, and the two limiting strips are arranged in the U-shaped plate.
Preferably, the hydrologic cycle device includes fixed shell, lower fixed shell, fixing device, clamping device and location main part, go up fixed shell and mutual inseparable laminating of fixed shell down, go up fixed shell and be equipped with the heat pipe down in the fixed shell, heat pipe one end fixedly connected with hydrologic cycle main part, the heat pipe other end sets up in the location main part, location main part opposite side fixedly connected with connecting body, connecting body opposite side and second apron fixed connection, fixing device sets up in last fixed shell and lower fixed shell outside, fixing device includes the spacing frame, equal fixedly connected with fixed plate in spacing frame both ends, be provided with the fixing bolt main part in the fixed plate, the fixing bolt main part comprises bolt and nut, spacing frame both sides all are equipped with the stopper, four are a set of outside of fixing in last fixed shell and lower fixed shell respectively, hydrologic cycle main part both sides all are equipped with clamping device, two clamping device's number totally two clamping device respectively with last fixed shell and lower fixed shell fixed connection, clamping device includes the clamping plate, clamping device sets up in fixed plate one side and the fixed connection is equipped with two side respectively under the fixed shell, two side and two fixed connection are equipped with the installation ram main part, two side and two side fixed connection are equipped with the installation ram main part, two side and fixed connection are fixed connection in the fixed plate, two side and fixed plate, the installation ram is fixed plate is fixed by two side.
Preferably, the positioning main body comprises a fixed ring, a limiting groove is formed in the fixed ring, a sealing ring is arranged in the limiting groove formed in the fixed ring, an elastic ring is arranged in the sealing ring, the heat conduction pipe is arranged in the sealing ring, the outer side of the heat conduction pipe is fixedly connected with the limiting ring, one side of the limiting ring is tightly attached to the sealing ring, the other side of the limiting ring is fixedly connected with a positioning rod, one side of the limiting ring is provided with a push ring, the other side of the push ring is fixedly connected with a push block, a positioning hole is formed in one side of the push ring, and the positioning rod is arranged in the positioning hole formed in the push ring and is tightly attached to the push rod.
Preferably, the heat conduction device comprises a heat radiation fin and a heat conduction sleeve, one side in the heat radiation fin is fixedly connected with the heat conduction sleeve, the other side of the heat conduction sleeve is tightly attached to the heat conduction pipe, the other side of the heat radiation fin is tightly attached to a tensioning sleeve, a base is arranged on the outer side of one end of the heat radiation fin, a storage groove is formed in the base, the base is tightly attached to the tensioning sleeve through the storage groove, one side of the heat conduction sleeve is fixedly connected with a support rod, the other end of the support rod is fixedly connected with a clamping plate, the clamping plate is in an L-shaped arrangement, and the clamping plate is arranged on one side of the base.
Preferably, the heat conduction sleeve comprises a heat conduction ring, the heat conduction pipe is arc-shaped, a heat conduction rod is fixedly connected to one side of the heat conduction ring, a heat conduction silica gel plate is arranged on one side of the heat conduction ring, one side of the heat conduction silica gel plate is tightly attached to the heat conduction pipe, limiting holes which are uniformly distributed are formed in the other side of the heat conduction silica gel plate, and the heat conduction rod is arranged in the limiting holes formed in the heat conduction silica gel plate.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the invention, through the first cover plate, the second cover plate, the heat-conducting plate, the first water baffle frame, the second water baffle frame, the first sealing strip, the first water baffle rod, the second sealing strip and the water outlet, cooling liquid can be guided through the cavity formed by the first cover plate, the second cover plate, the heat dissipation effect is improved, and through the sealing block, the U-shaped plate, the limiting strip, the reinforcement and the limiting seat, the first cover plate and the second cover plate can be conveniently detached, and gaps among the first water baffle rod, the second water baffle rod, the first cover plate and the second cover plate can be effectively sealed, so that the first cover plate and the second cover plate can be conveniently maintained and cleaned;
2. according to the invention, through the arranged water circulation main body, the connecting main body, the heat conduction pipe and the positioning main body, cooling liquid in the water cooling device can be circulated, the heat dissipation effect is improved, through the arranged upper fixing shell, the lower fixing shell, the limiting frame, the fixing plate, the fixing bolt main body, the limiting block, the clamping plate, the mounting bolt main body and the buffering rubber plate, the limiting frame can be fixed under the action of the fixing bolt main body, so that the upper fixing shell and the lower fixing shell are clamped and fixed through the limiting frame, the heat conduction pipe is clamped and protected, the heat conduction device can be positioned outside the heat conduction pipe, the heat dissipation effect is improved, meanwhile, under the action of the mounting bolt main body, the clamping plate clamps the water circulation main body, the connecting main body and the heat conduction pipe through the buffering rubber plate, the connection is more stable, and when the upper fixing shell and the lower fixing shell are fixed outside the heat conduction pipe, the push block and the push ring are pushed by the push rod, the positioning hole, the push ring and the push rod are tightly attached to the heat conduction pipe under the action of the push ring;
3. according to the invention, through the arranged radiating fins, the base, the accommodating groove, the tensioning sleeve, the supporting rod, the heat conducting sleeve and the clamping plate, heat in the heat conducting pipe can be conveniently led out, the radiating area is increased, meanwhile, when the novel heat conducting silica gel plate is installed, the radiating fins can be directly inserted into the accommodating groove formed in the base, the tensioning sleeve arranged in the accommodating groove formed in the base is used for positioning, the radiating fins are convenient to maintain and replace, and after the novel heat conducting silica gel plate is used for a long time, the heat conducting silica gel plate can be directly taken out, and when the novel heat conducting silica gel plate is installed, the heat conducting silica gel plate is positioned and installed by installing the heat conducting silica gel plate outside the heat conducting rod, so that the heat conducting silica gel plate is more stable in use.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of the position structures of a first water blocking body and a second water blocking body according to the present invention;
FIG. 3 is an exploded view of the water cooling device of the present invention;
FIG. 4 is a schematic view of the mounting cross-sectional structure of the seal body of the present invention;
FIG. 5 is a schematic cross-sectional view of a water cooling apparatus according to the present invention;
FIG. 6 is a schematic view of the structure of FIG. 3A according to the present invention;
FIG. 7 is a schematic diagram of the structure of FIG. 3B according to the present invention;
FIG. 8 is a schematic view of the structure of FIG. 5 at C in accordance with the present invention;
FIG. 9 is a schematic cross-sectional view of a water circulation device of the present invention;
FIG. 10 is an exploded view of the water circulation device of the present invention;
FIG. 11 is an exploded view of the positioning body of the present invention;
FIG. 12 is a schematic view of the mounting structure of the push block of the present invention;
FIG. 13 is a schematic view of the structure of FIG. 9D according to the present invention;
FIG. 14 is a schematic view of the structure of FIG. 10 at E in accordance with the present invention;
FIG. 15 is a schematic view of the structure of FIG. 10 at F in accordance with the present invention;
FIG. 16 is an exploded view of a heat dissipating body of the present invention;
FIG. 17 is a schematic view of a heat dissipating body according to the present invention;
FIG. 18 is a schematic view of an exploded construction of a heat conducting jacket of the present invention;
FIG. 19 is a schematic view of the structure of FIG. 16 at G in accordance with the present invention;
fig. 20 is a schematic view of the H-section structure of fig. 16 according to the present invention.
In the figure: 1-light source main body, 2-water cooling device, 21-first cover plate, 22-second cover plate, 23-heat conducting plate, 24-first water blocking main body, 241-first water blocking frame, 242-second water blocking frame, 243-first sealing strip, 25-second water blocking main body, 251-first water blocking rod, 252-second water blocking rod, 253-second sealing strip, 254-sealing main body, 2541-sealing block, 2542-U-shaped plate, 2543-limit strip, 2544-reinforcing plate, 2545-limit seat, 26-water outlet hole, 3-water circulating device, 31-upper fixing shell, 32-lower fixing shell, 33-water circulating main body, 34-connecting main body, 35-fixing device, 351-limit frame, 352-fixing plate 353-fixing bolt body, 354-stopper, 36-clamping device, 361-clamping plate, 362-mounting plate, 363-mounting bolt body, 364-buffer rubber plate, 37-heat-conducting tube, 38-positioning body, 381-fixing ring, 382-stopper groove, 383-stopper ring, 384-push ring, 385-push block, 386-positioning rod, 387-positioning hole, 388-sealing ring, 389-elastic ring, 39-push rod, 310-fixing rod, 4-heat-radiating body, 5-heat-conducting device, 51-heat-radiating fin, 52-base, 53-receiving groove, 54-tension sleeve, 55-supporting rod, 56-heat-conducting sleeve, 561-heat-conducting ring, 562-heat-conducting silica gel plate, 563-heat-conducting rod, 564-limit holes, 57-clamping plates.
Detailed Description
Example 1
Referring to fig. 1-20, the present invention provides a technical solution:
a light source head water cooling assembly of a photoetching machine comprises a light source main body 1, a water cooling device 2, a water circulation device 3 and a heat conduction device 5, wherein one side of the light source main body 1 is fixedly connected with the water cooling device 2, the other side of the water cooling device 2 is fixedly connected with the water circulation device 3, one side of the water circulation device 3 is fixedly connected with a heat dissipation main body 4, the heat conduction device 5 is uniformly distributed in the water circulation device 3, the water cooling device 2 comprises a first cover plate 21, a first water blocking main body 24 and a second water blocking main body 25, one side of the first cover plate 21 is fixedly connected with a second cover plate 22, the second cover plate 22 is fixedly connected with the light source main body 1, a heat conduction plate 23 is fixedly connected in the first cover plate 21, one side of the heat conduction plate 23 far away from the second cover plate 22 is fixedly connected with the water circulation device 3, the first water blocking main body 24 is arranged in the first cover plate 21, the second water blocking main body 25 is fixedly connected with the second cover plate 22, one side of the first water blocking main body 24 is fixedly connected with the heat conduction plate 23, the first water retaining main body 24 comprises a first water retaining frame 241 and a second water retaining frame 242, a first sealing strip 243 is arranged in the first water retaining frame 241, one side of the first sealing strip 243 is tightly attached to the second water retaining frame 242, the second water retaining frame 242 is arranged in the first water retaining frame 241, one side of the first water retaining frame 241 is fixedly connected with the heat conducting plate 23, one side of the second water retaining frame 242 is fixedly connected with the second cover plate 22, the first water retaining frame 241 and the second water retaining frame 242 can be sealed through the arrangement, the combination of the first water retaining main body 24 is tighter, the coolant flow is more stable, the second water retaining main body 25 comprises a first water retaining rod 251, a second water retaining rod 252 and a sealing main body 254, a second sealing strip 253 is arranged in the first water retaining rod 251, the second water retaining rod 252 is arranged in the first water retaining rod 251, one side of the second sealing strip 253 is tightly attached to the second water retaining rod 252, one side of the first water baffle rod 251 is fixedly connected with the heat conducting plate 23, one side of the second water baffle rod 252 is fixedly connected with the second cover plate 22, one end of the second water baffle rod 252 is fixedly connected with the sealing main body 254, the first water baffle rod 251 and the second water baffle rod 252 can be sealed through the arrangement, the second water baffle main body 25 is more tightly combined, a water channel is formed with the first water baffle main body 24 under the action of the second water baffle main body 25, the flow of cooling liquid is convenient, one side of the second cover plate 22 is provided with a water outlet 26, through the arrangement, a fixed circulation groove can be formed between the first cover plate 21 and the second cover plate 22 when the water circulation device 3 drives the cooling liquid to circulate, the cooling liquid flows between the first water baffle main body 24 and the second water baffle main body 25, and then the flowing cooling liquid leads out the heat of the light source main body 1 absorbed by the heat conducting plate 23 to realize water cooling and heat dissipation, the sealing main body 254 comprises a sealing block 2541, the sealing block 2541 is tightly jointed with a second water retaining rod 252, limiting strips 2543 are arranged on two sides of the second water retaining rod 252, the limiting strips 2543 are tightly jointed with the sealing block 2541, the sealing block 2541 is tightly jointed with a first water retaining rod 251, limiting seats 2545 are arranged on two sides of the sealing block 2541, the limiting seats 2545 are in L-shaped arrangement, one side of each limiting seat 2545 is fixedly connected with the first water retaining rod 251, one end of the second water retaining main body 25 can be sealed through the arrangement, when cooling liquid passes through, the cooling liquid passing through a gap between the second water retaining main body 25 and the first cover plate 21 is reduced, the cooling liquid flows between the first water retaining main body 24 and the second water retaining main body 25 more stably, U-shaped plates 2542 are arranged in the sealing block 2541, reinforcing plates 2544 are respectively arranged on two sides of the first water retaining rod 251, the limiting strips 2543 are arranged in the U-shaped plate 2542 in a group, and can clamp the sealing block 2541 to a certain extent when the sealing block 2541 is installed through the limiting strips, so that the sealing block 2541 is tightly attached to the first water retaining rod 251 and the second water retaining rod 252, and the sealing effect of the sealing block 2541 is improved.
As shown in fig. 1, 9, 10, 11, 12, 13, 14 and 15, the water circulation device 3 comprises an upper fixing shell 31, a lower fixing shell 32, a fixing device 35, a clamping device 36 and a positioning main body 38, the upper fixing shell 31 and the lower fixing shell 32 are tightly attached to each other, a heat conducting pipe 37 is arranged in the upper fixing shell 31 and the lower fixing shell 32, one end of the heat conducting pipe 37 is fixedly connected with the water circulation main body 33, the other end of the heat conducting pipe 37 is arranged in the positioning main body 38, the other side of the positioning main body 38 is fixedly connected with a connecting main body 34, the other side of the connecting main body 34 is fixedly connected with the second cover plate 22, the fixing device 35 is arranged outside the upper fixing shell 31 and the lower fixing shell 32, through the arrangement, the cooling liquid in the water cooling device 2 can be conveniently driven to flow, the heat in the cooling liquid can be conveniently led out, the heat dissipation effect is improved, and the heat conducting pipe 37 is protected under the action of the upper fixing shell 31 and the lower fixing shell 32, the heat conducting pipe 37 is more stable in use, the fixing device 35 comprises a limiting frame 351, both ends of the limiting frame 351 are fixedly connected with a fixing plate 352, a fixing bolt main body 353 is arranged in the fixing plate 352, the fixing bolt main body 353 consists of bolts and nuts, limiting blocks 354 are respectively arranged on both sides of the limiting frame 351, the limiting blocks 354 are respectively fixed on the outer sides of the upper fixing shell 31 and the lower fixing shell 32, the upper fixing shell 31 and the lower fixing shell 32 can be fixed through the fixing bolt main body 353 under the action of the limiting frame 351 and the fixing plate 352, the upper fixing shell 31 and the lower fixing shell 32 are fixed on the surfaces of the water circulation main body 33 and the connecting main body 34, the water circulation main body 33 is further fixed on the surface of the connecting main body 34, the cooling liquid circulation is realized, the clamping devices 36 are respectively arranged on both sides of the water circulation main body 33, the number of the clamping devices 36 is two, the two clamping devices 36 are fixedly connected with the upper fixing shell 31 and the lower fixing shell 32 respectively, the clamping devices 36 comprise a clamping plate 361, one side of the clamping plate 361 is fixedly connected with a buffer rubber plate 364, one end of the other side of the clamping plate 361 is fixedly connected with a mounting plate 362, a mounting bolt main body 363 is arranged in the mounting plate 362, the mounting bolt main body 363 is composed of a bolt and a nut, the water circulation main body 33 can be clamped under the action of the clamping plate 361 and the buffer rubber plate 364 through the arrangement, the upper fixing shell 31 and the lower fixing shell 32 are further fixed, the upper fixing shell 31 and the lower fixing shell 32 are more stably installed, push rods 39 are respectively arranged at two sides of the positioning main body 38, the upper fixing shell 31 and the lower fixing shell 32 are respectively fixedly connected with a fixing rod 310, the other end of the fixing rod 310 is arranged in the connecting main body 34, through the arrangement, the upper fixing shell 31 and the lower fixing shell 32 can be positioned under the action of the fixing rod 310, so that the upper fixing shell 31 and the lower fixing shell 32 are more stable at the outer side of the connecting main body 34, meanwhile, the upper fixing shell 31 and the lower fixing shell 32 can push the push block 385 in the positioning main body 38 to move through the push rod 39 when in installation, the positioning main body 38 can position the heat conducting pipe 37 at one side of the connecting main body 34, the positioning main body 38 comprises a fixing ring 381, a limiting groove 382 is formed in the fixing ring 381, a sealing ring 388 is arranged in the limiting groove 382 formed in the fixing ring 381, an elastic ring 389 is arranged in the sealing ring 388, the heat conducting pipe 37 is arranged in the sealing ring 388, a limiting ring 383 is fixedly connected at the outer side of the heat conducting pipe 37, one side of the limiting ring 383 is tightly attached with the sealing ring 388, the other side of the limiting ring 383 is fixedly connected with the positioning rod 386, one side of the limiting ring 383 is provided with a push ring 384, the push ring 384 opposite side fixedly connected with push block 385, set up the locating hole 387 in push ring 384 one side, the locating lever 386 sets up in push ring 384 sets up locating hole 387, push block 385 one side and push rod 39 closely laminate, can insert after the solid fixed ring 381 through this setting in heat pipe 37, fix a position push ring 384 through locating lever 386 that spacing ring 383 set up, make push ring 384 set up push block 385 align with push rod 39 all the time, make push rod 39 can promote push block 385, and then make spacing ring 383 and seal ring 388 closely laminate, realize the installation and the seal to heat pipe 37.
As shown in fig. 1, 16, 17, 18, 19 and 20, the heat conduction device 5 comprises a heat dissipation fin 51 and a heat conduction sleeve 56, one side in the heat dissipation fin 51 is fixedly connected with the heat conduction sleeve 56, the other side of the heat conduction sleeve 56 is tightly attached to the heat conduction pipe 37, the other side of the heat dissipation fin 51 is tightly attached to a tensioning sleeve 54, a base 52 is arranged at the outer side of one end of the heat dissipation fin 51, a containing groove 53 is arranged in the base 52, the base 52 is tightly attached to the tensioning sleeve 54 through the containing groove 53, the heat dissipation fin 51 can be conveniently placed in the base 52 through the arrangement, at the moment, the heat dissipation fin 51 can be positioned under the action of the tensioning sleeve 54, one side of the heat conduction sleeve 56 is fixedly connected with a supporting rod 55, the other end of the supporting rod 55 is fixedly connected with a clamping plate 57, the clamping plate 57 is arranged in an L shape, the clamping plate 57 is arranged at one side of the base 52, the heat conduction sleeve 56 can be conveniently supported through the arrangement, when heat conduction sleeve 56 and heat conduction pipe 37 paste each other, bracing piece 55 and cardboard 57 can support heat radiation fins 51, prevent that heat radiation fins 51 from taking place deformation, make heat radiation fins 51 installation more stable, heat conduction sleeve 56 includes heat conduction ring 561, heat conduction pipe 37 is the arc setting, heat conduction ring 561 one side fixedly connected with heat conduction pole 563, heat conduction ring 561 one side is equipped with heat conduction silica gel plate 562, heat conduction silica gel plate 562 one side closely laminates with heat conduction pipe 37, the spacing hole 564 that is evenly distributed has been seted up to heat conduction silica gel plate 562 opposite side, heat conduction pole 563 sets up in the spacing hole 564 that heat conduction silica gel plate 562 offered, through this setting, when maintaining, can directly take off heat conduction silica gel plate 562, then aim at the heat conduction pole with the spacing hole 564 that new heat conduction silica gel plate 562 offered, can fix a position heat conduction silica gel plate 562, make things convenient for the change of heat conduction silica gel plate 562.
The working flow is as follows: when the water cooling assembly is used, firstly, a heat conducting medium is smeared on the surface of a heat conducting plate 23 of a water cooling device 2, then the water cooling device 2 is directly fixed on a light source main body 1 through screws, at the moment, the heat conducting plate 23 is tightly attached to the light source main body 1 through the heat conducting medium, then a positioning main body 38 is sleeved outside a heat conducting pipe 37, then a mounting block arranged at one end of the heat conducting pipe 37 is put into a water circulation main body 33, at the moment, the screws penetrate through the mounting block and are in spiral connection with the water circulation main body 33 to fix the heat conducting pipe 37, then the other end of the heat conducting pipe 37 is inserted into a fixing ring 381, at the moment, a limiting ring 383 enters a limiting groove 382 formed by the fixing ring 381, at the same time, the limiting ring 383 is attached to a sealing ring 388, then the water circulation main body 33 is righted, a push block 385 and a push ring 384 are pushed to one side of the connecting main body 34 until the push ring 384 enters the limiting groove 382 formed by the fixing ring 381, meanwhile, a positioning rod 386 arranged at one side of the limit ring 383 enters a positioning hole 387 arranged on the push ring 384 to position the push ring 384, then the upper fixing shell 31 and the lower fixing shell 32 are respectively clamped at the outer side of the heat conducting pipe 37, at the moment, the heat conducting silica gel plate 562 arranged on the heat conducting ring 561 is mutually attached to the heat conducting pipe 37, the fixing rods 310 arranged on the upper fixing shell 31 and the lower fixing shell 32 are inserted into the connecting main body 34, then the bolts arranged on the fixing bolt main body 353 penetrate through the fixing plate 352, the fixing plate 352 and the limit frame 351 are installed and fixed through the screw connection of the nuts arranged on the fixing bolt main body 353, at the moment, one end of the push rod 39 with an inclined plane contacts with one end of the inclined plane of the push block 385, along with the mutual approaching between the upper fixing shell 31 and the lower fixing shell 32, the push rod 39 pushes the push block 385 through the inclined plane, the push block 385 drives the push ring 384 to push the limit ring 383 to move so as to tightly attach the limit ring 383 and the seal ring 388, along with the movement of the limit ring 383, the seal ring 388 and the elastic ring 389 are stressed and compressed to realize the sealing of the heat conducting tube 37, so that the upper fixing shell 31 and the lower fixing shell 32 are fixed on the outer side of the connecting body 34, meanwhile, a buffer rubber plate 364 arranged on one side of the clamping plate 361 is mutually attached to the water circulation body 33, then a bolt of the mounting bolt body 363 penetrates through the mounting plate 362 and is in spiral connection with a nut of the mounting bolt body 363, the water circulation body 33 is further clamped, the water circulation body 33 is enabled to be more stable, then a cooling liquid is introduced through a valve body arranged on the connecting body 34, the whole is installed on the optical technology, a power supply and a photoetching machine are connected, when the light source body 1 is used, the water circulation body 33 and the heat dissipation body 4 are started, the water circulation body 33 drives the cooling liquid to flow in a gap formed between the first water blocking body 24 and the second water blocking body 25, when the light source body 1 generates heat, the heat conducting plate 23 sends the heat into the cooling liquid through a heat conducting medium, the cooling liquid drives the heat to enter the heat conducting tube 37, at the moment, and part of the heat is led out of the water circulation body 33 through the silicon plate 561, then the heat enters the cooling liquid through the silicon plate 561, the cooling liquid is introduced into the cooling liquid, the whole is then integrally installed on the cooling body, and finally, the whole is connected through the cooling body 31, and the cooling body 31 is pumped through the cooling fan and the cooling fan 31, and the cooling body 31 is arranged, and fresh and the cooling air is arranged on the upper fixing shell 31, and the upper fixing shell and the cooling shell 31 and the cooling body and is realized.
Example 2
Referring to fig. 1-20, the present invention provides a technical solution:
a light source head water cooling assembly of a photoetching machine comprises a light source main body 1, a water cooling device 2, a water circulation device 3 and a heat conduction device 5, wherein one side of the light source main body 1 is fixedly connected with the water cooling device 2, the other side of the water cooling device 2 is fixedly connected with the water circulation device 3, one side of the water circulation device 3 is fixedly connected with a heat dissipation main body 4, the heat conduction device 5 is uniformly distributed in the water circulation device 3, the water cooling device 2 comprises a first cover plate 21, a first water blocking main body 24 and a second water blocking main body 25, one side of the first cover plate 21 is fixedly connected with a second cover plate 22, the second cover plate 22 is fixedly connected with the light source main body 1, a heat conduction plate 23 is fixedly connected in the first cover plate 21, one side of the heat conduction plate 23 far away from the second cover plate 22 is fixedly connected with the water circulation device 3, the first water blocking main body 24 is arranged in the first cover plate 21, the second water blocking main body 25 is fixedly connected with the second cover plate 22, one side of the first water blocking main body 24 is fixedly connected with the heat conduction plate 23, the first water retaining main body 24 comprises a first water retaining frame 241 and a second water retaining frame 242, a first sealing strip 243 is arranged in the first water retaining frame 241, one side of the first sealing strip 243 is tightly attached to the second water retaining frame 242, the second water retaining frame 242 is arranged in the first water retaining frame 241, one side of the first water retaining frame 241 is fixedly connected with the heat conducting plate 23, one side of the second water retaining frame 242 is fixedly connected with the second cover plate 22, the first water retaining frame 241 and the second water retaining frame 242 can be sealed through the arrangement, the combination of the first water retaining main body 24 is tighter, the coolant flow is more stable, the second water retaining main body 25 comprises a first water retaining rod 251, a second water retaining rod 252 and a sealing main body 254, a second sealing strip 253 is arranged in the first water retaining rod 251, the second water retaining rod 252 is arranged in the first water retaining rod 251, one side of the second sealing strip 253 is tightly attached to the second water retaining rod 252, one side of the first water baffle rod 251 is fixedly connected with the heat conducting plate 23, one side of the second water baffle rod 252 is fixedly connected with the second cover plate 22, one end of the second water baffle rod 252 is fixedly connected with the sealing main body 254, the first water baffle rod 251 and the second water baffle rod 252 can be sealed through the arrangement, the second water baffle main body 25 is more tightly combined, a water channel is formed with the first water baffle main body 24 under the action of the second water baffle main body 25, the flow of cooling liquid is convenient, one side of the second cover plate 22 is provided with a water outlet 26, through the arrangement, a fixed circulation groove can be formed between the first cover plate 21 and the second cover plate 22 when the water circulation device 3 drives the cooling liquid to circulate, the cooling liquid flows between the first water baffle main body 24 and the second water baffle main body 25, and then the flowing cooling liquid leads out the heat of the light source main body 1 absorbed by the heat conducting plate 23 to realize water cooling and heat dissipation, the sealing main body 254 comprises a sealing block 2541, the sealing block 2541 is tightly jointed with a second water retaining rod 252, limiting strips 2543 are arranged on two sides of the second water retaining rod 252, the limiting strips 2543 are tightly jointed with the sealing block 2541, the sealing block 2541 is tightly jointed with a first water retaining rod 251, limiting seats 2545 are arranged on two sides of the sealing block 2541, the limiting seats 2545 are in L-shaped arrangement, one side of each limiting seat 2545 is fixedly connected with the first water retaining rod 251, one end of the second water retaining main body 25 can be sealed through the arrangement, when cooling liquid passes through, the cooling liquid passing through a gap between the second water retaining main body 25 and the first cover plate 21 is reduced, the cooling liquid flows between the first water retaining main body 24 and the second water retaining main body 25 more stably, U-shaped plates 2542 are arranged in the sealing block 2541, reinforcing plates 2544 are respectively arranged on two sides of the first water retaining rod 251, the limiting strips 2543 are arranged in the U-shaped plate 2542 in a group, and can clamp the sealing block 2541 to a certain extent when the sealing block 2541 is installed through the limiting strips, so that the sealing block 2541 is tightly attached to the first water retaining rod 251 and the second water retaining rod 252, and the sealing effect of the sealing block 2541 is improved.
As shown in fig. 1, 16, 17, 18, 19 and 20, the heat conduction device 5 comprises a heat dissipation fin 51 and a heat conduction sleeve 56, one side in the heat dissipation fin 51 is fixedly connected with the heat conduction sleeve 56, the other side of the heat conduction sleeve 56 is tightly attached to the heat conduction pipe 37, the other side of the heat dissipation fin 51 is tightly attached to a tensioning sleeve 54, a base 52 is arranged at the outer side of one end of the heat dissipation fin 51, a containing groove 53 is arranged in the base 52, the base 52 is tightly attached to the tensioning sleeve 54 through the containing groove 53, the heat dissipation fin 51 can be conveniently placed in the base 52 through the arrangement, at the moment, the heat dissipation fin 51 can be positioned under the action of the tensioning sleeve 54, one side of the heat conduction sleeve 56 is fixedly connected with a supporting rod 55, the other end of the supporting rod 55 is fixedly connected with a clamping plate 57, the clamping plate 57 is arranged in an L shape, the clamping plate 57 is arranged at one side of the base 52, the heat conduction sleeve 56 can be conveniently supported through the arrangement, when heat conduction sleeve 56 and heat conduction pipe 37 paste each other, bracing piece 55 and cardboard 57 can support heat radiation fins 51, prevent that heat radiation fins 51 from taking place deformation, make heat radiation fins 51 installation more stable, heat conduction sleeve 56 includes heat conduction ring 561, heat conduction pipe 37 is the arc setting, heat conduction ring 561 one side fixedly connected with heat conduction pole 563, heat conduction ring 561 one side is equipped with heat conduction silica gel plate 562, heat conduction silica gel plate 562 one side closely laminates with heat conduction pipe 37, the spacing hole 564 that is evenly distributed has been seted up to heat conduction silica gel plate 562 opposite side, heat conduction pole 563 sets up in the spacing hole 564 that heat conduction silica gel plate 562 offered, through this setting, when maintaining, can directly take off heat conduction silica gel plate 562, then aim at the heat conduction pole with the spacing hole 564 that new heat conduction silica gel plate 562 offered, can fix a position heat conduction silica gel plate 562, make things convenient for the change of heat conduction silica gel plate 562.
The working flow is as follows: when the water cooling assembly is used, firstly, a heat conducting medium is smeared on the surface of a heat conducting plate 23 of a water cooling device 2, then the water cooling device 2 is directly fixed on a light source main body 1 through screws, at the moment, the heat conducting plate 23 is tightly attached to the light source main body 1 through the heat conducting medium, then a positioning main body 38 is sleeved outside a heat conducting pipe 37, then a mounting block arranged at one end of the heat conducting pipe 37 is put into a water circulation main body 33, at the moment, the screws penetrate through the mounting block and are in spiral connection with the water circulation main body 33 to fix the heat conducting pipe 37, then the other end of the heat conducting pipe 37 is inserted into a fixing ring 381, at the moment, a limiting ring 383 enters a limiting groove 382 formed by the fixing ring 381, at the same time, the limiting ring 383 is attached to a sealing ring 388, then the water circulation main body 33 is righted, a push block 385 and a push ring 384 are pushed to one side of the connecting main body 34 until the push ring 384 enters the limiting groove 382 formed by the fixing ring 381, meanwhile, a positioning rod 386 arranged at one side of the limit ring 383 enters a positioning hole 387 arranged on the push ring 384 to position the push ring 384, then the upper fixing shell 31 and the lower fixing shell 32 are respectively clamped at the outer side of the heat conducting pipe 37, at the moment, the heat conducting silica gel plate 562 arranged on the heat conducting ring 561 is mutually attached to the heat conducting pipe 37, the fixing rods 310 arranged on the upper fixing shell 31 and the lower fixing shell 32 are inserted into the connecting main body 34, then the bolts arranged on the fixing bolt main body 353 penetrate through the fixing plate 352, the fixing plate 352 and the limit frame 351 are installed and fixed through the screw connection of the nuts arranged on the fixing bolt main body 353, at the moment, one end of the push rod 39 with an inclined plane contacts with one end of the inclined plane of the push block 385, along with the mutual approaching between the upper fixing shell 31 and the lower fixing shell 32, the push rod 39 pushes the push block 385 through the inclined plane, the push block 385 drives the push ring 384 to push the limit ring 383 to move so as to tightly attach the limit ring 383 and the seal ring 388, along with the movement of the limit ring 383, the seal ring 388 and the elastic ring 389 are stressed and compressed to realize the sealing of the heat conducting tube 37, so that the upper fixing shell 31 and the lower fixing shell 32 are fixed on the outer side of the connecting body 34, meanwhile, a buffer rubber plate 364 arranged on one side of the clamping plate 361 is mutually attached to the water circulation body 33, then a bolt of the mounting bolt body 363 penetrates through the mounting plate 362 and is in spiral connection with a nut of the mounting bolt body 363, the water circulation body 33 is further clamped, the water circulation body 33 is enabled to be more stable, then a cooling liquid is introduced through a valve body arranged on the connecting body 34, the whole is installed on the optical technology, a power supply and a photoetching machine are connected, when the light source body 1 is used, the water circulation body 33 and the heat dissipation body 4 are started, the water circulation body 33 drives the cooling liquid to flow in a gap formed between the first water blocking body 24 and the second water blocking body 25, when the light source body 1 generates heat, the heat conducting plate 23 sends the heat into the cooling liquid through a heat conducting medium, the cooling liquid drives the heat to enter the heat conducting tube 37, at the moment, and part of the heat is led out of the water circulation body 33 through the silicon plate 561, then the heat enters the cooling liquid through the silicon plate 561, the cooling liquid is introduced into the cooling liquid, the whole is then integrally installed on the cooling body, and finally, the whole is connected through the cooling body 31, and the cooling body 31 is pumped through the cooling fan and the cooling fan 31, and the cooling body 31 is arranged, and fresh and the cooling air is arranged on the upper fixing shell 31, and the upper fixing shell and the cooling shell 31 and the cooling body and is realized.
The working flow is as follows: after the water cooling assembly is used for a long time, the water cooling assembly is required to be overhauled, at the moment, the water cooling assembly main body is detached from the photoetching machine, the cooling liquid is led out through a water valve arranged on the connecting main body 34, then the fixing bolt main body 353 and the mounting bolt main body 363 are detached, the upper fixing shell 31 and the lower fixing shell 32 are separated, the heat conducting pipe 37 is detached, at the moment, the inside of the heat conducting pipe 37 is cleaned, then the heat radiating fins 51 are moved, the heat radiating fins 51 are taken out from the base 52, the heat radiating fins 51 are cleaned, then the old heat conducting silica gel plate 562 is detached, the limit holes 564 formed on the new heat conducting silica gel plate 562 are aligned with the heat conducting rods 563 formed on the heat conducting ring 561, the heat conducting rods 563 are inserted into the limit holes 564 formed on the silica gel plate, then the screws between the first cover plate 21 and the second cover plate 22 are detached, the first cover plate 21 and the second cover plate 22 are separated, cleaning the first cover plate 21, the second cover plate 22 and the heat conducting plate 23 respectively, taking down the sealing block 2541 from the second water baffle rod 252, inserting a new sealing block 2541 at one end of the second water baffle rod 252, tightly attaching the sealing block 2541 to the limit bar 2543 under the action of the U-shaped plate 2542 at this time, aligning the second water baffle frame 242 and the second water baffle rod 252 arranged on the second cover plate 22 with the first water baffle frame 241 and the first water baffle rod 251, inserting the second water baffle frame 242 and the second water baffle rod 252 into the first water baffle frame 241 and the first water baffle rod 251 respectively, inserting the sealing block 2541 into the limit seat 2545 at this time, tightly attaching two sides of the sealing block 2541 to the first water baffle frame 241 and the limit seat 2545 respectively through the limit seat 2545 and the reinforcing plate 2544, sealing the sealing is realized, fixing the first cover plate 21 and the second cover plate 22 through screws, and finally fixing the heat conducting tube 37, the upper fixing shell 31 by the method of embodiment 1, the lower fixing case 32 and the heat conduction device 5, etc. are installed.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to facilitate an understanding of the method of the present invention and its core ideas. The foregoing is merely illustrative of the preferred embodiments of this invention, and it is noted that there is objectively no limit to the specific structure disclosed herein, since numerous modifications, adaptations and variations can be made by those skilled in the art without departing from the principles of the invention, and the above-described features can be combined in any suitable manner; such modifications, variations and combinations, or the direct application of the inventive concepts and aspects to other applications without modification, are contemplated as falling within the scope of the present invention.
Claims (7)
1. The utility model provides a photoetching machine light source head water-cooling subassembly, includes light source main part (1), water cooling plant (2), water circulating device (3) and heat conduction device (5), its characterized in that: the utility model provides a water-cooling device, light source main part (1) one side and water cooling device (2) fixed connection, water cooling device (2) opposite side and water circulating device (3) fixed connection, water circulating device (3) one side fixedly connected with heat dissipation main part (4), heat conduction device (5) are evenly distributed in water circulating device (3), water cooling device (2) are including first apron (21), first manger plate main part (24) and second manger plate main part (25), second apron (22) are fixedly connected with on one side of first apron (21), second apron (22) and light source main part (1) fixed connection, first apron (21) internal fixation is connected with heat conduction board (23), one side that second apron (22) were kept away from to heat conduction board (23) is with water circulating device (3) fixed connection, first manger plate main part (24) set up in first apron (21), second manger plate main part (25) and second apron (22) fixed connection, first manger plate main part (24) one side and heat conduction board (23) fixed connection, first manger plate frame (241) are including first manger plate frame (243), first sealing strip (243) one side and second manger plate frame (242) closely laminate, second manger plate frame (242) set up in first manger plate frame (241), first manger plate frame (241) one side and heat conduction board (23) fixed connection, second manger plate frame (242) one side and second apron (22) fixed connection, second manger plate main part (25) include first manger plate pole (251), second manger plate pole (252) and sealed main part (254), be equipped with second sealing strip (253) in first manger plate pole (251), be equipped with second manger plate pole (252) in first manger plate pole (251), second sealing strip (253) one side and second manger plate pole (252) closely laminate, first manger plate pole (251) one side and heat conduction board (23) fixed connection, second manger plate pole (252) one side and second apron (22) fixed connection, second manger plate pole (252) one end and sealed main part (254) fixed connection, second apron (22) one side is equipped with apore-out hole (26).
2. The water cooling assembly of a light source head of a lithography machine as recited in claim 1, wherein: sealing body (254) are including sealing block (2541), closely laminate with second breakwater (252) in sealing block (2541), second breakwater (252) both sides all are provided with spacing (2543), spacing (2543) closely laminate with sealing block (2541), closely laminate with first breakwater (251) in sealing block (2541), sealing block (2541) both sides all are equipped with spacing seat (2545), spacing seat (2545) are L shape setting, spacing seat (2545) one side and first breakwater (251) fixed connection.
3. A lithographic apparatus light source head water cooling assembly according to claim 2, wherein: the novel water retaining device is characterized in that a U-shaped plate (2542) is arranged in the sealing block (2541), a reinforcing plate (2544) is arranged in the sealing block (2541), two reinforcing plates (2544) are respectively arranged on two sides of the first water retaining rod (251), and two limiting strips (2543) are respectively arranged in the U-shaped plate (2542).
4. The water cooling assembly of a light source head of a lithography machine as recited in claim 1, wherein: the water circulation device (3) comprises an upper fixing shell (31), a lower fixing shell (32), a fixing device (35), a clamping device (36) and a positioning main body (38), wherein the upper fixing shell (31) and the lower fixing shell (32) are tightly attached to each other, a heat conduction pipe (37) is arranged in the upper fixing shell (31) and the lower fixing shell (32), one end of the heat conduction pipe (37) is fixedly connected with a water circulation main body (33), the other end of the heat conduction pipe (37) is arranged in the positioning main body (38), the other side of the positioning main body (38) is fixedly connected with a connecting main body (34), the other side of the connecting main body (34) is fixedly connected with a second cover plate (22), the fixing device (35) is arranged outside the upper fixing shell (31) and the lower fixing shell (32), the fixing device (35) comprises a limiting frame (351), two ends of the limiting frame (351) are fixedly connected with a fixing plate (352), a fixing bolt main body (353) is arranged in the fixing plate (352), the fixing bolt main body (354) is composed of a nut and the limiting block (354) and the two sides (351) are respectively fixed on the upper fixing shell (32), the utility model discloses a hydraulic control device for a water circulation main part, including hydrologic cycle main part (33), the number of hydrologic cycle main part (33) all is equipped with clamping device (36), clamping device (36) total two clamping device (36) respectively with last fixed shell (31) and lower fixed shell (32) fixed connection, clamping device (36) are including grip block (361), grip block (361) one side fixedly connected with buffer rubber board (364), grip block (361) opposite side one end fixedly connected with mounting panel (362), be equipped with mounting bolt main part (363) in mounting panel (362), mounting bolt main part (363) comprise bolt and nut, positioning main part (38) both sides all are equipped with push rod (39), push rod (39) are two fixed in last fixed shell (31) and lower fixed shell (32) respectively, all fixedly connected with dead lever (310) in last fixed shell (31) and lower fixed shell (32), and the dead lever (310) other end sets up in connecting main part (34).
5. The water cooling assembly of a light source head of a lithography machine as recited in claim 4, wherein: the positioning main body (38) comprises a fixed ring (381), a limiting groove (382) is formed in the fixed ring (381), a sealing ring (388) is arranged in the limiting groove (382) formed in the fixed ring (381), an elastic ring (389) is arranged in the sealing ring (388), a heat conducting pipe (37) is arranged in the sealing ring (388), a limiting ring (383) is fixedly connected to the outer side of the heat conducting pipe (37), one side of the limiting ring (383) is tightly attached to the sealing ring (388), a positioning rod (386) is fixedly connected to the other side of the limiting ring (383), a push ring (384) is arranged on one side of the limiting ring (383), a push block (385) is fixedly connected to the other side of the push ring (384), a positioning hole (387) is formed in one side of the push ring (384), and one side of the push block (385) is tightly attached to the push rod (39).
6. The water cooling assembly of a light source head of a lithography machine as recited in claim 1, wherein: the heat conduction device (5) comprises a heat dissipation fin (51) and a heat conduction sleeve (56), one side in the heat dissipation fin (51) is fixedly connected with the heat conduction sleeve (56), the other side of the heat conduction sleeve (56) is tightly attached to a heat conduction pipe (37), the other side of the heat dissipation fin (51) is tightly attached to a tensioning sleeve (54), a base (52) is arranged on the outer side of one end of the heat dissipation fin (51), a containing groove (53) is formed in the base (52), the base (52) is tightly attached to the tensioning sleeve (54) through the containing groove (53), one side of the heat conduction sleeve (56) is fixedly connected with a supporting rod (55), the other end of the supporting rod (55) is fixedly connected with a clamping plate (57), and the clamping plate (57) is in an L-shaped arrangement, and the clamping plate (57) is arranged on one side of the base (52).
7. The water cooling assembly of a light source head of a lithography machine as recited in claim 6, wherein: the heat conduction sleeve (56) comprises a heat conduction ring (561), the heat conduction pipe (37) is in an arc-shaped arrangement, a heat conduction rod (563) is fixedly connected to one side of the heat conduction ring (561), a heat conduction silica gel plate (562) is arranged on one side of the heat conduction ring (561), one side of the heat conduction silica gel plate (562) is tightly attached to the heat conduction pipe (37), limiting holes (564) which are uniformly distributed are formed in the other side of the heat conduction silica gel plate (562), and the heat conduction rod (563) is arranged in the limiting holes (564) formed in the heat conduction silica gel plate (562).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310583606.1A CN116300343B (en) | 2023-05-23 | 2023-05-23 | Light source head water-cooling assembly of photoetching machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310583606.1A CN116300343B (en) | 2023-05-23 | 2023-05-23 | Light source head water-cooling assembly of photoetching machine |
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| CN116300343A CN116300343A (en) | 2023-06-23 |
| CN116300343B true CN116300343B (en) | 2023-08-29 |
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| JP2009129642A (en) * | 2007-11-21 | 2009-06-11 | Stanley Electric Co Ltd | Led illumination device |
| KR20170120284A (en) * | 2016-04-21 | 2017-10-31 | 이훈 | Apparatus of exposure for scan type using LED light source having cooling parts and optical partition wall |
| CN113126454A (en) * | 2021-04-28 | 2021-07-16 | 李美娟 | Semiconductor photoetching machine and using method thereof |
| CN113286500A (en) * | 2021-06-02 | 2021-08-20 | 广州相佳数码科技有限公司 | Electronic advertising board with good heat dissipation effect |
| CN215579518U (en) * | 2021-05-24 | 2022-01-18 | 深圳市酷凌时代科技有限公司 | Miniature high-precision laser water cooling machine |
| WO2023036568A1 (en) * | 2021-09-13 | 2023-03-16 | Carl Zeiss Smt Gmbh | Optical element with cooling channels, and optical arrangement |
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2023
- 2023-05-23 CN CN202310583606.1A patent/CN116300343B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009129642A (en) * | 2007-11-21 | 2009-06-11 | Stanley Electric Co Ltd | Led illumination device |
| KR20170120284A (en) * | 2016-04-21 | 2017-10-31 | 이훈 | Apparatus of exposure for scan type using LED light source having cooling parts and optical partition wall |
| CN113126454A (en) * | 2021-04-28 | 2021-07-16 | 李美娟 | Semiconductor photoetching machine and using method thereof |
| CN215579518U (en) * | 2021-05-24 | 2022-01-18 | 深圳市酷凌时代科技有限公司 | Miniature high-precision laser water cooling machine |
| CN113286500A (en) * | 2021-06-02 | 2021-08-20 | 广州相佳数码科技有限公司 | Electronic advertising board with good heat dissipation effect |
| WO2023036568A1 (en) * | 2021-09-13 | 2023-03-16 | Carl Zeiss Smt Gmbh | Optical element with cooling channels, and optical arrangement |
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| CN116300343A (en) | 2023-06-23 |
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