CN116295781A - Vibration and micro-angle synchronous measurement device and method based on multi-longitudinal-mode self-mixing effect - Google Patents
Vibration and micro-angle synchronous measurement device and method based on multi-longitudinal-mode self-mixing effect Download PDFInfo
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Abstract
The invention provides a vibration and micro-angle synchronous measurement device and method based on a multi-longitudinal-mode self-mixing effect, which relate to the technical field of sensing measurement and comprise the following steps: the device comprises a multi-longitudinal-mode laser, a sliding platform, a vibration reflection module and a signal processing module; the multi-longitudinal mode laser is arranged on the sliding platform; the vibration reflection module is arranged on an output light path of the multi-longitudinal mode laser; the input light path and the reflecting light path of the vibration reflecting module are collinear; the multi-longitudinal mode laser is used for emitting laser when the vibration reflection module vibrates; the vibration reflection module is used for reflecting laser into a resonant cavity in the multi-longitudinal mode laser to generate a mixed signal; the signal processing module is used for determining the vibration frequency and the vibration angle variation according to the compensation distance and the compensated mixed signal; according to the invention, by arranging the multi-longitudinal mode laser, the vibration frequency and the vibration angle variation can be measured simultaneously, and the accuracy of measuring the target vibration is improved.
Description
Technical Field
The invention relates to the technical field of sensing measurement, in particular to a vibration and micro-angle synchronous measurement device and method based on a multi-longitudinal-mode self-mixing effect.
Background
Laser technology developed from the last 50 th century has become the basis of modern optical testing technology due to its excellent monochromaticity and coherence, high precision, high sensitivity, and strong interference immunity. The laser interference technology plays an important role in various fields such as industrial production, scientific research, environmental pollution detection and the like because the detected original is not required to be installed on the detected object any more and the non-contact remote measurement can be performed. However, the traditional laser interference system has the defects of complex light path, high price and extremely easy interference of surrounding environment on measurement precision.
The laser self-mixing interferometry technique of the 60 th century was originally reported by King and stepard that external cavity feedback would result in an intensity modulation of the output of the gas laser, the intensity modulation caused by the moving external mirror being similar to that produced by a conventional optical interferometer, e.g., displacement of one fringe relative to half a wavelength of light, and the depth of the intensity fluctuation being comparable to that of a conventional two-beam interferometry system. These two phenomena lay the foundation for self-mixing interference. The technology is widely applied to high-precision measurement of physical quantities such as speed, displacement, vibration, distance, multiple degrees of freedom and the like. With the continuous emergence of various novel lasers and the rapid development of related technologies in recent years, the laser self-mixing measurement technology has been greatly developed.
The double-parameter synchronous measurement is an important future development direction in the measurement technology, and a sensor capable of realizing the double-parameter real-time measurement technology is called a double-parameter synchronous measurement sensor, and can convert double-parameter real-time change into observable and analyzable signals. The most direct mapping department can detect the health condition and geological change of the large building through angle change and vibration; the satellite system can be tracked and positioned through angle and distance measurement in the aerospace industry; the connection, inclination and bending control of large-scale machines in the machine manufacturing industry can be adjusted and controlled through real-time angle and micro-displacement measurement results; various weapons in military installations, positioning, aiming, etc. require angle and distance sensors to provide accurate parameters. With the rapid development of precision machining, each part and component is manufactured and installed by precise micro-angle and micro-displacement measurement. The high-precision low-cost small-angle micro-vibration synchronous measuring device becomes a key component for guaranteeing the quality of mechanical manufacturing.
(1) General research current situation of domestic and foreign laser self-mixing interferometry technology
Research on the laser self-mixing interferometry technology is mainly focused on research on the self-mixing characteristics of various novel lasers and extension and expansion of the application field of the laser self-mixing interferometry technology at present. In 2010, italian s.donati et al applied the self-mixing interference technique for the first time to measure refractive index and thickness of transparent glass; a comprehensive review of self-mixing interferometers in terms of instrumentation and measurement was made in 2012. The working principle of the self-mixing effect, the advantages and disadvantages of the self-mixing interferometer and the application in various aspects such as displacement, speed, vibration, angle, laser parameters and the like are discussed. In 2012, k.otsuka et al in japan analyzed flow using self-mixing interferometry to compensate for parasitic vibrations; tracking of motor run out was achieved in 2012 with a self-mixing interferometer.
Although domestic scholars research in the field of self-mixing interference, the method forms a distinctive related research direction. The earliest studies of self-mixing interferometry began with the study of the research group represented by the professor strong tin-rich at the university of Harbin industry; the university of Tianjin Yao Jianquan institute studied the theory of self-mixing interferometry of multiple optical feedback and multimode lasers; the Zhang Shulian teaching of Qinghua university is mainly aimed at the optical feedback effect of a double-frequency orthogonal polarization miniature Nd: YAG laser and a double-frequency orthogonal polarization He-Ne laser to conduct deep research and explore the self-sensing measurement technology of the orthogonal polarization laser, and the fact that when an external reflector is at a specific inclination angle, an interference fringe with 40 times of the density of the traditional self-mixing interference fringe can be obtained, which is equivalent to that the measurement resolution reaches 1/80 of the wavelength. The research group represented by Wang Ming of Nanjing university also researches the phenomenon of self-mixing interference, such as micro-nano technology by using a phase modulation type laser self-mixing interferometer, self-mixing speckle interference generation mechanism in an F-P cavity semiconductor laser, and application to the aspects of fluid velocity measurement, DFB semiconductor laser self-mixing interference theory, experimental research and the like.
(2) Existing sensing technology classification based on laser self-mixing effect
(1) Measurement of external cavity related quantity: large displacement measurement over half wavelength [7-8]; small displacement measurements of less than half a wavelength.
(2) Measurement of target related quantity:
material property measurement: the refractive index of the transparent material and its thickness were measured by self-mixing interferometers in 2010 m.t. fathi and s.donati.
Three-dimensional imaging technology: in 2011 o.hugon et al successfully applied this technique to biomedical imaging.
Gray scale measurement: dean et al in 2011 successfully recorded the state of change in the target surface profile using self-mixing interference structures on confocal microscope imaging surfaces.
Velocity measurement and flow imaging: the flow rate of non-newtonian fluid in 320 micron diameter tubing was measured with external light by campagnoolo et al 2013. Wang measured the size of particles in a liquid using doppler line shape changes due to brownian motion of particles in the liquid.
(3) Related physical quantity measurement in laser cavity
Line width measurement: j.xi et al in 2005 propose to measure the linewidth and linewidth broadening factor of a laser by using self-mixing interference effect, and the accuracy of measuring the linewidth broadening factor can reach +/-6.5% without measuring high-frequency spectral lines or measuring spectrums.
Phase noise measurement: noskov and Ignatkov measured phase noise under strong feedback conditions in 2014.
(4) Problems with the laser self-mixing prior art measurement
The existing laser self-mixing measurement technology mainly uses a semiconductor laser as a light source, but the semiconductor laser generally works in multiple longitudinal modes, the monochromaticity and the coherence of laser beams are poor, the divergence angle is extremely large during long-distance working, and the application occasion and the working distance of the laser self-mixing vibration measurement technology are directly limited. In the early stage, we also found that the laser mode of the semiconductor laser actually has serious adverse effect on the self-mixing signal in the self-characteristic study of the laser self-mixing signal, even waveform separation is generated, and the measuring precision and range of the laser self-mixing sensing system are directly influenced. In addition, an optical measurement system for free space light transmission is adopted, and the stability of the system is easily influenced by environmental factors such as vibration of an optical platform, temperature change, air flow, dust in the air and the like; meanwhile, the narrow space is difficult to arrange the light path.
After further analysis of the principle of multi-longitudinal mode laser self-mixing measurement, it can be found that, although the multi-longitudinal mode laser self-mixing sensing technology has serious adverse effects on self-mixing signals and even generates waveform separation, the characteristic can be just used for improving the accuracy and range of system measurement. In a dual-parameter synchronous measurement sensing system, the length of the inner cavity of the laser device can influence the sensitivity of the system, so that the effective monitoring range is influenced.
Disclosure of Invention
The invention aims to provide a device and a method for synchronously measuring vibration and micro-angle based on a multi-longitudinal-mode self-mixing effect, and the accuracy of measuring target vibration is improved by arranging a multi-longitudinal-mode laser.
In order to achieve the above object, the present invention provides the following solutions:
a multi-longitudinal mode self-mixing effect vibration and micro-angle based synchronous measurement device, comprising: the device comprises a multi-longitudinal-mode laser, a sliding platform, a vibration reflection module and a signal processing module;
the multi-longitudinal-mode laser is arranged on the sliding platform; the vibration reflection module is arranged on an output light path of the multi-longitudinal mode laser; the input light path and the reflection light path of the vibration reflection module are collinear;
the multi-longitudinal-mode laser is used for emitting laser when the vibration reflection module vibrates;
the vibration reflection module is used for reflecting the laser into a resonant cavity in the multi-longitudinal-mode laser to generate a mixed signal;
the signal processing module is used for determining the vibration frequency and the vibration angle variation according to the compensation distance and the compensated mixed signal; the compensation distance is the moving distance of the multi-longitudinal mode laser when the sliding platform is adjusted to drive the multi-longitudinal mode laser to move along the direction of the light path until the phase delay of the mixed signal is an integral multiple of 2 pi.
Optionally, the vibration and micro-angle synchronous measurement device based on the multi-longitudinal mode self-mixing effect further comprises an attenuator;
the attenuator is arranged between the multi-longitudinal mode laser and the vibration reflection module;
the attenuator is used for adjusting the laser intensity reflected into the multi-longitudinal mode laser.
Optionally, the vibration and micro-angle synchronous measurement device based on the multi-longitudinal mode self-mixing effect further comprises a collimator;
the collimator is arranged between the attenuator and the vibration reflection module;
the collimator is used for enabling the laser to be irradiated on the vibration reflection module in parallel.
Optionally, the sliding platform comprises a sliding block and a sliding rail;
the sliding block is connected with the multi-longitudinal-mode laser;
the sliding block is slidably arranged on the sliding rail; the sliding rail is parallel to the output light path of the multi-longitudinal mode laser; the sliding block is used for driving the multi-longitudinal-mode laser to move along the direction of the light path.
Optionally, the sliding rail is provided with scales.
Optionally, the vibration reflection module comprises a signal generator and a vibration target provided with a reflection structure;
the signal generator is connected with the vibration target; the signal generator is used for controlling the vibration target to vibrate;
the vibration target is arranged on an output optical path of the multi-longitudinal mode laser; the input light path and the reflection light path of the vibration target are collinear;
the reflecting structure is used for reflecting the laser light into a resonant cavity in the multi-longitudinal mode laser to generate a mixed signal.
Optionally, the vibration and micro-angle synchronous measurement device based on the multi-longitudinal mode self-mixing effect further comprises a turntable;
the turntable is connected with the vibration target;
the turntable is used for adjusting the angle of the reflecting structure in the vibration target.
Optionally, the multi-longitudinal mode laser is an optical fiber multi-longitudinal mode laser or a semiconductor multi-longitudinal mode laser.
The multi-longitudinal-mode-based self-mixing effect vibration and micro-angle synchronous measurement method is applied to the multi-longitudinal-mode-based self-mixing effect vibration and micro-angle synchronous measurement device, and comprises the following steps of:
acquiring a compensation distance and a compensated mixed signal;
generating a mixed interference image according to the compensated mixed signal;
determining a vibration frequency according to interference fringes in the mixed interference image;
and determining the vibration angle change amount according to the phase change and the compensation distance of the compensated mixed signal.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention provides a vibration and micro-angle synchronous measurement device and method based on a multi-longitudinal-mode self-mixing effect, comprising the following steps: the device comprises a multi-longitudinal-mode laser, a sliding platform, a vibration reflection module and a signal processing module; the multi-longitudinal mode laser is arranged on the sliding platform; the vibration reflection module is arranged on an output light path of the multi-longitudinal mode laser; the input light path and the reflecting light path of the vibration reflecting module are collinear; the multi-longitudinal mode laser is used for emitting laser when the vibration reflection module vibrates; the vibration reflection module is used for reflecting laser into a resonant cavity in the multi-longitudinal mode laser to generate a mixed signal; the signal processing module is used for determining the vibration frequency and the vibration angle variation according to the compensation distance and the compensated mixed signal; the compensation distance is the moving distance of the multi-longitudinal mode laser when the sliding platform is adjusted to drive the multi-longitudinal mode laser to move along the direction of the light path until the phase delay of the mixed signal is an integral multiple of 2 pi. According to the invention, by arranging the multi-longitudinal mode laser, the vibration frequency and the vibration angle variation can be measured simultaneously, and the accuracy of measuring the target vibration is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a synchronous vibration and micro-angle measuring device based on a multi-longitudinal mode self-mixing effect in embodiment 1 of the present invention;
symbol description:
1-a multi-longitudinal mode laser; 2-vibrating the target; a 21-reflecting structure; a 3-attenuator; 32-a slider; 33-slide rails; 4-a signal processing unit; a 5-collimator; a 6-signal generator; 7-a detector; 8-a turntable.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention aims to provide a device and a method for synchronously measuring vibration and micro-angle based on a multi-longitudinal-mode self-mixing effect, and the accuracy of measuring target vibration is improved by arranging a multi-longitudinal-mode laser.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
Example 1
As shown in fig. 1, the present embodiment provides a vibration and micro-angle synchronous measurement device based on multi-longitudinal mode self-mixing effect, which includes: the multi-longitudinal mode laser comprises a multi-longitudinal mode laser 1, a sliding platform, a vibration reflection module and a signal processing module (comprising a detector 7 and a signal processing unit 4); the multi-longitudinal mode laser is an optical fiber multi-longitudinal mode laser or a semiconductor multi-longitudinal mode laser. The multi-longitudinal mode laser is arranged on the sliding platform; the vibration reflection module is arranged on an output light path of the multi-longitudinal mode laser; the input light path and the reflecting light path of the vibration reflecting module are collinear; the multi-longitudinal mode laser is used for emitting laser when the vibration reflection module vibrates; the vibration reflection module is used for reflecting laser into a resonant cavity in the multi-longitudinal mode laser to generate a mixed signal; the signal processing module is used for determining the vibration frequency and the vibration angle variation according to the compensation distance and the compensated mixed signal; the compensation distance is the moving distance of the multi-longitudinal mode laser when the sliding platform is adjusted to drive the multi-longitudinal mode laser to move along the direction of the light path until the phase delay of the mixed signal is an integral multiple of 2 pi. The detector converts the received optical signal into an electric signal, the signal processing unit is a computer, an oscilloscope or a frequency spectrograph, and the signal processing unit receives the electric signal for analysis and processing and obtains the vibration and micro-angle change value of the target.
In addition, the vibration and micro-angle synchronous measurement device based on the multi-longitudinal mode self-mixing effect further comprises an attenuator 3 and a collimator 5; the attenuator is arranged between the multi-longitudinal mode laser and the vibration reflection module; the attenuator is used for adjusting the laser light intensity reflected into the multi-longitudinal mode laser. The collimator is arranged between the attenuator and the vibration reflection module; the collimator is used for enabling the laser to be irradiated on the vibration reflection module in parallel. In particular, the attenuator acts on both the reflection and the incident light path, and the collimator acts only on the incident light path.
Specifically, the sliding platform includes a slider 32 and a slide rail 33; the sliding block is connected with the multi-longitudinal mode laser; the sliding block is slidably arranged on the sliding rail; the sliding rail is parallel to the output light path of the multi-longitudinal mode laser; the sliding block is used for driving the multi-longitudinal mode laser to move along the direction of the light path. The sliding rail is provided with scales.
Wherein the vibration reflection module comprises a signal generator 6 and a vibration target 2 provided with a reflection structure 21; the signal generator is connected with the vibration target; the vibration target is a loudspeaker or piezoelectric ceramic driven by a signal generator, and the signal generator (without optical fibers) is used for controlling the vibration target to vibrate; the vibration target is arranged on the output light path of the multi-longitudinal mode laser; the input light path and the reflection light path of the vibration target are collinear; the reflecting structure is used for reflecting laser light into a resonant cavity in the multi-longitudinal mode laser to generate a mixed signal. The vibration and micro-angle synchronous measurement device based on the multi-longitudinal mode self-mixing effect further comprises a turntable 8; the turntable is connected with the vibration target; the turntable is used for adjusting the angle of the reflecting structure in the vibrating target.
Starting a vibration target, emitting laser by a laser, moving the sliding block by observing a multi-longitudinal-mode self-mixing signal on a signal processing unit, enabling the waveforms of the signal processing unit to keep the same phase or delay the phase to be integral multiple, and recording a first compensation distance delta L of the movement of the sliding block c1 And thus vibration and micro-angle changes.
Example 2
The embodiment provides a synchronous measurement method based on multi-longitudinal mode self-mixing effect vibration and micro-angle, which is applied to the synchronous measurement device based on multi-longitudinal mode self-mixing effect vibration and micro-angle described in the embodiment 1, and comprises the following steps: acquiring a compensation distance and a compensated mixed signal; generating a mixed interference image according to the compensated mixed signal; determining a vibration frequency according to interference fringes in the mixed interference image; and determining the vibration angle change amount according to the phase change of the compensated mixed signal and the compensation distance.
Specifically, the method for simultaneously measuring vibration and micro angle using the apparatus described in example 1 was: the vibration target 2 vibrates, the laser 1 is used as a laser light source to be tested, outgoing laser passes through the attenuator 3 and is reflected by the reflecting film or the reflecting plane mirror 21 and then is fed back into the resonant cavity of the laser 1 to form a self-mixing signal, the sliding block 32 is enabled to move slightly along the sliding rail 33 to obtain a compensation distance, the compensation distance enables waveforms to keep the same phase or the phase delay to be an integral multiple of 2 pi, the distance between the vibration target and the laser is changed, a multi-longitudinal-mode self-mixing signal with the waveform being not separated is obtained, meanwhile, the intensity of feedback light is regulated by the attenuator 3, the laser self-mixing signal is collected by the detector 7, the received electric signal of the laser self-mixing signal is analyzed by the signal processing unit 4, and the different compensation distances are used for obtaining the vibration and micro-angle change values of the environment where the sensing optical fiber is located, and the method specifically comprises the following steps:
for the laser self-mixing signals of the multi-longitudinal-mode laser, different longitudinal modes of the laser only interfere with own modes, the finally formed laser self-mixing signals are the laser self-mixing signal intensity superposition formed by the respective longitudinal modes, and according to the related interference mixing theoretical model, under the condition of not considering scattered influence, the multi-longitudinal-mode laser self-mixing signal intensity I (t) is as follows:
in op tj The total optical path length of the external cavity of the jth mode of the multi-longitudinal mode laser is beta, the total number of oscillation starting modes in the multi-longitudinal mode laser is beta, j represents the jth longitudinal mode in the laser, and I 0 For initial total light intensity, ΔI j For the amplitude, omega of the change in intensity of the j-mode laser 0 The angular frequency of the laser, c is the speed of light in vacuum, n g Refractive index L of laser resonant cavity medium group 0 For the laser cavity length, c.c. represents the complex conjugate of the preceding formulaWhen calculating, the refractive index changes caused by different longitudinal modes in the same material are negligible.
When the micro angle at the target changes, there are:
op tj ＝op 0 +δop s +δop c ＝op 0 +δ(n s L s )+δ(n c L c ) (2)
in op 0 For the initial optical path of the laser external cavity, delta op s Delta op for micro-angle induced optical path variation c To compensate the optical path, n c Refractive index of air in external cavity, n s For sensing refractive index of cell, L s For the total geometrical length of the actual path of the laser light transmitted in the sensor unit, L c To compensate for length phi 0j For initial phase of one round trip of j-mode laser in external cavity, delta phi sj For phase change caused by micro-angle change, delta phi cj To compensate for phase variations, phi tj (θ) represents the phase of the j-mode laser in one round trip in the external cavity, k 0j Representing the wavenumber of the j-mode longitudinal mode in vacuum, delta phi when measuring micro-angle changes sj ＝-δφ cj 。
When the waveforms of all modes keep the same phase or the phase delay is 2 pi integer times, waveform separation does not exist in the superposition of the self-mixing signals of the lasers of different longitudinal modes, namely:
op tj ＝2mn g L 0 (4)
wherein m is the number of external cavity mode stages of the laser, is a positive integer, n g Indicating the refractive index of the laser resonant cavity medium group, so that the laser has a series of special position points, the superimposed laser self-mixing signal does not generate waveform separation, and when the micro angle at the target is changed, the optical path or phase of light during transmission is changed, resulting in op of each mode tj The m value is not an integer any more, and the waveform of the superimposed laser self-mixing signal will occurAt this time, the external feedback object position is changed to compensate the optical path or phase change by adjusting the sliding device, so that the waveform of the superimposed laser self-mixed signal is changed into a complete waveform again, and the external feedback object position is measured to obtain the compensated phase change, so as to obtain the optical path change delta op caused by micro-angle change s Thus, the compensation distance δL is measured c1 And obtaining the change value of the micro angle.
Meanwhile, by recording the variation in the number of fringes in the laser self-mixing interference image, the variation in the vibration frequency (or amplitude) can be calculated.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the system disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the methods of the present invention and the core ideas thereof; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (9)
1. Vibration and micro-angle synchronous measurement device based on multi-longitudinal mode self-mixing effect is characterized by comprising: the device comprises a multi-longitudinal-mode laser, a sliding platform, a vibration reflection module and a signal processing module;
the multi-longitudinal-mode laser is arranged on the sliding platform; the vibration reflection module is arranged on an output light path of the multi-longitudinal mode laser; the input light path and the reflection light path of the vibration reflection module are collinear;
the multi-longitudinal-mode laser is used for emitting laser when the vibration reflection module vibrates;
the vibration reflection module is used for reflecting the laser into a resonant cavity in the multi-longitudinal-mode laser to generate a mixed signal;
the signal processing module is used for determining the vibration frequency and the vibration angle variation according to the compensation distance and the compensated mixed signal; the compensation distance is the moving distance of the multi-longitudinal mode laser when the sliding platform is adjusted to drive the multi-longitudinal mode laser to move along the direction of the light path until the phase delay of the mixed signal is an integral multiple of 2 pi.
2. The synchronous measuring device based on the multi-longitudinal mode self-mixing effect vibration and the micro angle according to claim 1, wherein the synchronous measuring device based on the multi-longitudinal mode self-mixing effect vibration and the micro angle further comprises an attenuator;
the attenuator is arranged between the multi-longitudinal mode laser and the vibration reflection module;
the attenuator is used for adjusting the laser intensity reflected into the multi-longitudinal mode laser.
3. The synchronous measuring device based on the multi-longitudinal mode self-mixing effect vibration and the micro angle according to claim 2, wherein the synchronous measuring device based on the multi-longitudinal mode self-mixing effect vibration and the micro angle further comprises a collimator;
the collimator is arranged between the attenuator and the vibration reflection module;
the collimator is used for enabling the laser to be irradiated on the vibration reflection module in parallel.
4. The vibration and micro-angle synchronous measurement device based on the multi-longitudinal mode self-mixing effect according to claim 1, wherein the sliding platform comprises a sliding block and a sliding rail;
the sliding block is connected with the multi-longitudinal-mode laser;
the sliding block is slidably arranged on the sliding rail; the sliding rail is parallel to the output light path of the multi-longitudinal mode laser; the sliding block is used for driving the multi-longitudinal-mode laser to move along the direction of the light path.
5. The synchronous vibration and micro-angle measuring device based on the multi-longitudinal mode self-mixing effect according to claim 4, wherein scales are arranged on the sliding rail.
6. The vibration and micro-angle synchronous measurement device based on the multi-longitudinal mode self-mixing effect according to claim 1, wherein the vibration reflection module comprises a signal generator and a vibration target provided with a reflection structure;
the signal generator is connected with the vibration target; the signal generator is used for controlling the vibration target to vibrate;
the vibration target is arranged on an output optical path of the multi-longitudinal mode laser; the input light path and the reflection light path of the vibration target are collinear;
the reflecting structure is used for reflecting the laser light into a resonant cavity in the multi-longitudinal mode laser to generate a mixed signal.
7. The synchronous measuring device based on the multi-longitudinal mode self-mixing effect vibration and the micro angle according to claim 6, wherein the synchronous measuring device based on the multi-longitudinal mode self-mixing effect vibration and the micro angle further comprises a turntable;
the turntable is connected with the vibration target;
the turntable is used for adjusting the angle of the reflecting structure in the vibration target.
8. The vibration and micro-angle synchronous measurement device based on the multi-longitudinal mode self-mixing effect according to claim 1, wherein the multi-longitudinal mode laser is an optical fiber multi-longitudinal mode laser or a semiconductor multi-longitudinal mode laser.
9. The synchronous measurement method based on the multi-longitudinal mode self-mixing effect vibration and the micro angle is characterized in that the synchronous measurement method based on the multi-longitudinal mode self-mixing effect vibration and the micro angle is applied to the synchronous measurement device based on the multi-longitudinal mode self-mixing effect vibration and the micro angle according to any of claims 1 to 8, and the synchronous measurement method based on the multi-longitudinal mode self-mixing effect vibration and the micro angle comprises the following steps:
acquiring a compensation distance and a compensated mixed signal;
generating a mixed interference image according to the compensated mixed signal;
determining a vibration frequency according to interference fringes in the mixed interference image;
and determining the vibration angle change amount according to the phase change and the compensation distance of the compensated mixed signal.
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