CN116295212A - Contour detection device and method for assisting in-situ integrated processing - Google Patents
Contour detection device and method for assisting in-situ integrated processing Download PDFInfo
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Abstract
The invention relates to the technical field of equipment detection and manufacturing, in particular to a contour detection device and a contour detection method for assisting in-situ integrated processing, which solve the problem that in-situ high-precision detection means matching is lacking in the processing process of an optical element in the prior art; the preset detection position is provided with a high-precision air-floating rotary table capable of rotating on the workbench surface, and the high-precision air-floating rotary table is provided with a displacement guide rail group; the measuring head assembly comprises a plurality of measuring heads, and each measuring head tool can be arranged on the displacement guide rail group and can move and lock on the displacement guide rail group; the displacement guide rail can move from the outer edge of the high-precision air-float turntable to the axle center of the turntable; the measuring head is provided with a non-contact type detection end, and the angle on the measuring head tool can be adjusted; and detecting the surface shape in the workpiece processing link by designing the detection position, providing surface shape input to guide iterative processing, and improving the manufacturing efficiency of the optical element.
Description
Technical Field
The invention relates to the technical field of equipment detection and manufacturing, in particular to an outline detection device and method for assisting in-situ integrated processing.
Background
Under the current trend, the use requirement of the optical element is greatly increased along with the technical fields of civil aerospace detection and the like in recent years, and the requirement of high-efficiency manufacturing and high productivity of the optical element is urgent;
at present, the common optical element manufacturing modes can be generally divided into two modes, wherein one mode is that a workpiece is fixed, and a grinding head moves on the surface of the workpiece to carry out surface shape residual processing and removal; the other is that the grinding head is fixed, and the surface shape of the workpiece is removed through the relative motion of the workpiece; the grinding head fixed type machining has the advantages that: the processing grinding heads of different types and different parameters can be integrated in situ at the same time, and the combined processing of different processing means can be realized only by moving a workpiece, so that the process of replacing the grinding heads is omitted;
in the prior patent literature, for example, chinese patent application, named as a magneto-rheological polishing processing system, the patent publication number is CN109759905A, and the technical scheme is as follows: the magnetorheological grinding head is fixedly arranged on the mechanical arm, and the mechanical arm is used for controlling the workpiece to move relative to the magnetorheological polishing wheel so as to realize efficient surface shape machining; in the system for processing the relative displacement of the workpiece, the processing technology can realize extremely high optimal configuration, but the matched detection means are lacked to guide the processing.
In practice, the optical element manufacturing process is: continuously processing and converging the surface shape residual error; the optical element is required to achieve the accuracy of the surface shape residual error of the nanometer level, and the surface shape residual error is gradually removed and converged from the hundred-micrometer level to the nanometer level through grinding and polishing in a plurality of sections of different procedures; every time one round of surface shape processing is finished, surface shape detection is needed, the surface shape residual value is confirmed, and then the next round of processing is performed.
In the prior art, the processing and detection of the small-and-medium-caliber reflecting mirror are integrated, and the rapid detection means are absent while different processing means are switched.
Disclosure of Invention
The invention aims to solve the problem that in the prior art, an optical element lacks detection means matching in the in-situ processing process, in particular to the technical problems that the processing and detection of a small-and-medium-caliber reflecting mirror are integrated, and a rapid detection means is lacking when different processing means are switched.
In order to solve the technical problems, the technical scheme of the invention is as follows:
an outline detection device for assisting in-situ integrated processing, comprising:
the mechanical arm is connected with a workpiece tool, and a workpiece to be detected is preset on the workpiece tool;
the action of the mechanical arm can drive the workpiece to be detected to reach a preset detection position;
the high-precision air-floating turntable capable of rotating on the workbench surface is arranged at the preset detection position, and a displacement guide rail group is arranged on the high-precision air-floating turntable;
the measuring head assembly comprises a plurality of measuring heads, and each measuring head can be preset on a measuring head tool;
the measuring head tools can be arranged on the displacement guide rail group, and each measuring head tool can be locked on the displacement guide rail group;
the measuring head tool can move from the outer edge of the high-precision air-float turntable to the axle center of the high-precision air-float turntable;
the angle of the measuring head on the measuring head tool can be adjusted.
Specifically, the high-precision air floatation turntable can control the measuring head assembly to rotate around the Z2 axis so as to realize contour line scanning sampling on the surface of the workpiece to be measured.
Specifically, the back side of the workpiece to be detected is connected with the mechanical arm through the workpiece tool;
and the mechanical arm controls the pose movement of the workpiece to be detected so as to realize contour line scanning at different surface-shaped positions of the workpiece to be detected.
Specifically, the gauge head assembly includes 4 groups, respectively: the first measuring head, the second measuring head, the third measuring head and the fourth measuring head;
the gauge head frock includes 4 groups, does respectively: the first gauge head tool, the second gauge head tool, the third gauge head tool and the fourth gauge head tool.
Specifically, the first gauge head tool and the third gauge head tool are installed in the Y2 axis direction of the displacement guide rail group, and the first gauge head tool and the third gauge head tool are respectively arranged on two sides of the Z2 axis.
Specifically, the second gauge head tool and the fourth gauge head tool are installed in the X2 axis direction of the displacement guide rail group, and are respectively arranged on two sides of the Z2 axis.
In addition, the technical scheme provides a method for assisting in-situ integrated processing contour detection, and the contour detection device for assisting in-situ integrated processing is applied and further comprises the following steps:
step S1, firstly aiming at the spherical radius of the workpiece to be detected
And the diameter D is used for calculating the inclination angle theta and the displacement L of the measuring head assembly, and the specific formula is as follows:
step S2, the first measuring head and the third measuring head are respectively inclined by theta and-theta around the X2 axis and respectively face the sphere center O of the surface to be measured 1 Relatively moving to form a first distance so that the detection directions of the first measuring head and the third measuring head point to the sphere center O of the surface to be measured 1 ；
Tilting the second measuring head and the fourth measuring head by theta and-theta around the Y2 axis respectively, and respectively towards the sphere center O of the surface to be measured 1 Forming a second distance so that the detection directions of the second and fourth measuring heads are directed to the sphere center O of the surface to be measured 1 ；
The first distance and the second distance have the same value and are both equal to the value of the displacement L;
respectively fixing the first measuring head tool, the second measuring head tool, the third measuring head tool and the fourth measuring head tool;
step S3, controlling the mechanical arm to carry and move the workpiece to be tested to a first preset position;
step S4, operating the high-precision air-floating rotary table to rotate for one circle, and starting automatic recording equipment at the same time, wherein the automatic recording equipment records sampling readings of four measuring heads and the actual rotation angle of the high-precision air-floating rotary table;
and S5, controlling the mechanical arm to move the workpiece to be detected to a preset position in sequence, and executing the step S4.
In the step S5, the number of sequences of moving the workpiece to be measured to the preset positions in sequence by the mechanical arm is at least two times;
and (4) stopping the step after the number of times is finished.
The invention has the following beneficial effects:
in the first aspect, the problem that the optical element lacks detection means matching in-situ processing is solved; the detection station is designed to detect the surface shape in the workpiece processing link, so that accurate processing of surface shape input guidance is provided, and the manufacturing efficiency of the optical element is improved.
In the second aspect, the universal detection of different optical elements is realized by designing the adjustable freedom degree of the pose of the measuring head, so that the detection cost is greatly reduced; and a measuring head pose initial calibration scheme and a workpiece pose automatic positioning strategy are formulated, so that the rapid automatic detection of different optical elements is realized, and the time cost and the labor cost required by detection are greatly reduced.
In a third aspect, the integration of the universal automatic detection station compensates for the detection requirement of full-flow automatic processing of the optical element.
In the fourth aspect, four measuring heads are simultaneously adopted to simultaneously measure, monitor and remove the pose change value of the lens body in the sampling process on line, so that high-precision surface shape detection is realized.
In a fifth aspect, the present invention is directed to a rapid manipulator processing apparatus, and develops a high-precision in-place detection device integrated with a manipulator by clamping a workpiece for movement, so as to greatly improve the manufacturing efficiency of an element and realize rapid manufacturing of an optical element.
Drawings
FIG. 1 is a schematic diagram of a contour detection apparatus for assisting in-situ integrated processing according to the present invention;
FIG. 2 is a front view of the position relationship of the contour detecting device according to the present invention;
FIG. 3 is a schematic diagram showing a relationship between a workpiece and a measurement track at a first preset position by the contour detecting device of the present invention;
FIG. 4 is a schematic diagram showing the relative position relationship between a workpiece and a measurement track at a first, second, third, … N/2, … N preset position of the contour detection device of the present invention;
FIG. 5 is a top view of all positions of a workpiece relative to a measurement track during the surface shape detection process of the contour detection device of the present invention;
FIG. 6 is a schematic diagram of the N/2 th sampling position of the contour detecting device according to the present invention;
FIG. 7 is a schematic diagram of the N/2 th sample position relationship trace of the contour detecting device according to the present invention.
Reference numerals in the drawings denote:
1. a workpiece fixture; 2. a workpiece to be measured; 7. a displacement guide rail group;
8. a high-precision air-floatation rotary table; 9, a working table surface; 10. a mechanical arm;
11. sampling a top view track by a single contour line;
3 (5) -1, a central measuring head; 3 (5) -2, a central measuring head tool;
O 1 the sphere center of the surface to be measured; o (O) 2 The center of the air-floating turntable;
3-1, a first measuring head; 3-2, a first measuring head tool;
4-1, a second measuring head; 4-2, a second measuring head tool;
5-1, a third measuring head; 5-2, a third measuring head tool;
6-1, a fourth measuring head; 6-2, a fourth measuring head tool.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, based on the embodiments of the invention, which a person of ordinary skill in the art would obtain without inventive faculty, are within the scope of the invention;
determination of initial position: for workpieces to be measured with different curvature radiuses and calibers, the pitch angle of the measuring head tool and the position of the displacement guide rail group are adjusted, so that the sampling track of the measuring head rotating along with the high-precision air floatation turntable 8 for one circle is positioned on the nearest spherical surface of the workpiece 2 to be measured, and the track is taken as the spherical center O of the surface to be measured 1 。
A plurality of measuring heads are adopted to realize single arc contour line scanning of the surface-shaped contour in a mode of rotating around the high-precision air-float rotary table 8, after the measurement of the single contour line is completed, the workpiece 2 to be measured moves to a preset position, and the next contour line measurement is carried out;
in the specific measurement process, four measuring heads are arranged on the high-precision air floatation turntable 8, the pose change of the workpiece 2 to be measured in the single contour line scanning process is monitored, and the pose monitoring data are combined with the contour detection data to realize the high-precision reconstruction of the surface shape.
In addition, the measuring head can realize the change detection of different pitch angles and turning radiuses on the high-precision air-floating rotary table 8 through the change of the rotation angle and the displacement, so as to realize the measurement of the workpiece 2 to be measured with different parameters.
The main components of the invention relate to a workpiece 2 to be measured, a measuring head, a high-precision air floatation turntable 8, a measuring head tool and a displacement guide rail group 7;
the measuring head is arranged on the measuring head tool, and the measuring head can realize one-dimensional pitch angle automatic adjustment;
the measuring head tool is arranged on a displacement guide rail set 7, and for workpieces 2 to be measured with different curvature radiuses and calibers, the pitch angle of the measuring head tool and the position of the displacement guide rail set 7 are adjusted so that the measuring head rotates along with the high-precision air-float turntable 8The sampling track of one circle is positioned at the sphere center O of the surface to be measured of the workpiece 2 to be measured 1 Corresponding to the center of the nearest sphere.
Referring to fig. 1-4, the contour detection apparatus for assisting in-situ integrated processing includes:
the mechanical arm 10 is connected with the workpiece tool 1, and a workpiece 2 to be tested is preset on the workpiece tool 1;
the action of the mechanical arm 10 can drive the workpiece 2 to be detected to reach a preset detection position;
the preset detection position is provided with a high-precision air-floating rotary table 8 capable of rotating on a workbench surface 9, and the high-precision air-floating rotary table 8 is provided with a displacement guide rail group 7;
the measuring head assembly comprises a plurality of measuring heads, and each measuring head can be preset on a measuring head tool;
the gauge head tools can be arranged on the displacement guide rail group 7, and each gauge head tool can be locked on the displacement guide rail group 7;
the measuring head tool can move from the outer edge of the high-precision air-float rotary table 8 to the axle center of the high-precision air-float rotary table 8;
the angle of the measuring head on the measuring head tool can be adjusted.
Specifically, the high-precision air-floating turntable 8 can control the probe assembly to rotate around the Z2 axis, so as to realize the scanning sampling of the contour line on the surface of the workpiece 2 to be measured.
Specifically, the back side of the workpiece 2 to be measured is connected with the mechanical arm 10 through the workpiece fixture 1;
the mechanical arm 10 controls the pose movement of the workpiece 2 to be measured so as to realize the contour line scanning at different surface positions of the workpiece 2 to be measured.
Specifically, the gauge head assembly includes 4 groups, respectively: a first gauge head 3-1, a second gauge head 4-1, a third gauge head 5-1 and a fourth gauge head 6-1;
the gauge head frock includes 4 groups, does respectively: the first gauge head tooling 3-2, the second gauge head tooling 4-2, the third gauge head tooling 5-2 and the fourth gauge head tooling 6-2.
In the specific embodiment, the displacement guide rail groups 7 are configured to be distributed along the directions of the X2 axis and the Y2 axis and are used for the relative movement of the measuring head assembly to the axis direction of the high-precision air floatation turntable 8;
the first gauge head tooling 3-2 and the third gauge head tooling 5-2 are mounted in the Y2 axis direction of the displacement guide rail group 7, and are respectively arranged on two sides of the Z2 axis.
The second gauge head tooling 4-2 and the fourth gauge head tooling 6-2 are mounted in the X2 axis direction of the displacement guide rail group 7, and are respectively arranged on two sides of the Z2 axis.
In practice, the first gauge head tooling 3-2 and the third gauge head tooling 5-2 are mounted in the Y2 axis direction of the displacement guide group 7 and have a degree of rotational freedom about the axis X2 axis; the device can be understood as being capable of realizing inclination adjustment around an X2 axis and movement of a displacement guide rail group 7 along a Y2 axis direction, and realizing locking at a corresponding position under the cooperation of a corresponding measuring head tool;
in practice, the second gauge head tooling 4-2 and the fourth gauge head tooling 6-2 are mounted in the X2 axis direction of the displacement guide group 7 and have a degree of rotational freedom about the axis Y2 axis; it can be understood that the inclination adjustment around the Y2 axis and the movement of the displacement guide rail group 7 along the X2 axis can be actually realized, and the locking at the corresponding position can be realized under the cooperation of the corresponding measuring head tool.
In addition, a center measuring head 3 (5) -1 and a center measuring head tool 3 (5) -2 are also arranged as a sphere center O of the surface to be measured in the process 1 Used in conjunction with auxiliary measurements.
Referring to fig. 1-4, a method for assisting in contour detection in-situ integrated processing is provided, which adopts the above technical scheme and specifically includes the steps of:
step S1, firstly, aiming at the spherical radius of the workpiece 2 to be tested
And the diameter D is used for calculating the inclination angle theta and the displacement L of the measuring head assembly, and the specific formula is as follows:
step S2, the first measuring head 3-1 and the third measuring head 5-1 are respectively inclined by theta and theta around the X2 axis and respectively face the sphere center O of the surface to be measured 1 Forming a first distance such that the detection direction of the first and third measuring heads 3-1 and 5-1 is directed to the sphere center O of the surface to be measured 1 ；
Tilting the second measuring head 4-1 and the fourth measuring head 6-1 around the Y2 axis by theta and theta respectively, and respectively towards the sphere center O of the surface to be measured 1 Forming a second distance such that the probing directions of the second probe 4-1 and the fourth probe 6-1 are directed to the center of sphere O of the surface to be measured 1 ；
The first distance and the second distance have the same value and are both equal to the value of the displacement L;
fixing the first measuring head tool 3-2, the second measuring head tool 4-2, the third measuring head tool 5-2 and the fourth measuring head tool 6-2 respectively;
step S3, controlling the mechanical arm 10 to carry and move the workpiece 2 to be tested to a first preset position;
step S4, operating the high-precision air-float rotary table 8 to rotate for one circle, and simultaneously starting automatic recording equipment, wherein the automatic recording equipment records sampling readings of four measuring heads and the actual rotation angle of the high-precision air-float rotary table 8;
step S5, controlling the mechanical arm to move the workpiece to be detected to a preset position in sequence, and executing step S4;
in the step S5, the number of sequences of moving the workpiece to be measured to the preset positions in sequence by the mechanical arm is at least two times;
in step S4, the first detection position is shown in fig. 2 and 3; the relative positional relationship of the workpiece 2 to be measured at the N/2 th detection position is shown in fig. 6 and 7.
In step S5, the control arm 10 carries and moves the second preset position and the subsequent preset positions of the workpiece 2 to be measured, which is equivalent to the following repeated detection processSequentially to other detection positions, specifically explained as: referring to FIG. 4, N detection positions (N is an even number) are preset, and the first, second, third, … N/2 and … N detection positions correspond to 2-1,2-2,2-3 …, 2-N/2 … and 2-N in the diagram, and the centers of the positions correspond to O 1 ，O 2 ，O 3 …，O N/2 ，…O N Etc.
The single contour line samples the top view track 11, which can be understood as the center displacement track of all preset positions and is circular;
and (4) stopping the step after the sequential preset positions are completed.
Fig. 5 is a top view of all positions of the workpiece relative to the measurement track in the surface shape detection process of the contour detection device, namely, the position distribution of a single contour line sampling top view track 11;
in addition, as shown in fig. 4 and 5, for the sake of understanding, fig. 6 shows the relative position of the nth/2 th detection position of the workpiece 2 to be measured with respect to the probe assembly, and fig. 7 is a schematic diagram of the N/2 th sampling position relationship track of the contour detection device, that is, the plan view of the relative position relationship of the nth/2 th detection position of the workpiece 2 to be measured with respect to the single contour line sampling plan view track 11 of the probe.
The device and the method of the technical scheme aim to solve the problem that the optical element lacks detection means matching in the in-place processing, detect the surface shape in the processing link of the workpiece 2 to be detected by designing a preset detection position, provide surface shape input guidance and accurately process, and improve the manufacturing efficiency of the optical element.
The universal detection of different optical elements is realized by designing the adjustable degree of freedom of the pose of the measuring head, so that the detection cost is greatly reduced; and a measuring head pose initial calibration scheme and a workpiece pose automatic positioning strategy are formulated, so that the rapid automatic detection of different optical elements is realized, and the time cost and the labor cost required by the detection are greatly shortened.
The integration of the universal automatic detection station makes up for the detection requirement of the full-flow automatic processing of the optical element. Meanwhile, four measuring heads are adopted for simultaneously measuring, monitoring and eliminating the change value of the pose of the lens body in the sampling process, so that high-precision surface shape detection is realized.
In summary, the workpiece to be measured movement mechanism of the present invention includes, but is not limited to, a mechanical arm, where the mechanical arm clamps the workpiece to perform in-situ surface detection, and may be replaced by another movement mechanism to implement the relative movement of the workpiece relative to the measuring end or the processing end.
The turntable for detecting the measuring head, which is provided by the invention, comprises but is not limited to an air floatation turntable, and the degree of freedom of movement of the measuring head for rotating around the shaft can be provided.
The displacement slide rail is not limited to a one-dimensional slide rail, and can be provided at different positions in the radial direction.
The measuring head tool comprises a rotary motion mechanism, wherein the rotary mechanism can be a manual tilting rotary table or an automatic rotating precise tilting adjustment table.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (8)
1. An outline detection device for assisting in-situ integrated processing, which is characterized by comprising:
the mechanical arm is connected with a workpiece tool, and a workpiece to be detected is preset on the workpiece tool;
the action of the mechanical arm can drive the workpiece to be detected to reach a preset detection position;
the high-precision air-floating turntable capable of rotating on the workbench surface is arranged at the preset detection position, and a displacement guide rail group is arranged on the high-precision air-floating turntable;
the measuring head assembly comprises a plurality of measuring heads, and each measuring head can be preset on a measuring head tool;
the measuring head tools can be arranged on the displacement guide rail group, and each measuring head tool can be locked on the displacement guide rail group;
the measuring head tool can move from the outer edge of the high-precision air-float turntable to the axle center of the high-precision air-float turntable;
the angle of the measuring head on the measuring head tool can be adjusted.
2. A contour detection apparatus as defined in claim 1, wherein said high precision air bearing turntable is capable of controlling rotation of said probe assembly about Z2 axis to perform contour line scanning sampling on said surface of said workpiece to be measured.
3. The contour detection device for assisting in-situ integrated processing according to claim 2, wherein the back side of the workpiece to be detected is connected with the mechanical arm through the workpiece fixture;
and the mechanical arm controls the pose movement of the workpiece to be detected so as to realize contour line scanning at different surface-shaped positions of the workpiece to be detected.
4. A contour detection apparatus as defined in claim 3, wherein said gauge head assembly comprises 4 sets of: the first measuring head, the second measuring head, the third measuring head and the fourth measuring head;
the gauge head frock includes 4 groups, does respectively: the first gauge head tool, the second gauge head tool, the third gauge head tool and the fourth gauge head tool.
5. The contour detecting device for assisting in-situ integrated machining according to claim 4, wherein the first gauge head tooling and the third gauge head tooling are installed in the Y2 axis direction of the displacement guide rail group and are respectively arranged at both sides of the Z2 axis.
6. A contour detecting device for assisting in-situ integrated machining according to claim 5, wherein the second gauge head tooling and the fourth gauge head tooling are mounted in the X2 axis direction of the displacement guide rail group and are respectively arranged on both sides of the Z2 axis.
7. A method of facilitating in-place integrated machining profile detection using the in-place integrated machining profile detection apparatus of claim 6, further comprising the steps of:
step S1, firstly aiming at the spherical radius of the workpiece to be detected
And the diameter D is used for calculating the inclination angle theta and the displacement L of the measuring head assembly, and the specific formula is as follows:
step S2, the first measuring head and the third measuring head are respectively inclined by theta and-theta around the X2 axis and respectively face the sphere center O of the surface to be measured 1 Forming a first distance so that the detection directions of the first and third measuring heads point to the sphere center O of the surface to be measured 1 ；
Tilting the second measuring head and the fourth measuring head by theta and-theta around the Y2 axis respectively, and respectively towards the sphere center O of the surface to be measured 1 Forming a second distance so that the detection directions of the second and fourth measuring heads are directed to the sphere center O of the surface to be measured 1 ；
The first distance and the second distance have the same value and are both equal to the value of the displacement L;
respectively fixing the first measuring head tool, the second measuring head tool, the third measuring head tool and the fourth measuring head tool;
step S3, controlling the mechanical arm to carry and move the workpiece to be tested to a first preset position;
step S4, operating the high-precision air-floating rotary table to rotate for one circle, and starting automatic recording equipment at the same time, wherein the automatic recording equipment records sampling readings of four measuring heads and the actual rotation angle of the high-precision air-floating rotary table;
and S5, controlling the mechanical arm to move the workpiece to be detected to a preset position in sequence, and executing the step S4.
8. A method of facilitating contour detection in an in-place integrated process as defined in claim 7, further comprising:
in the step S5, the number of sequences of moving the workpiece to be measured to the preset positions in sequence by the mechanical arm is at least two times;
and (4) stopping the step after the number of times is finished.
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