CN116288654A - Sheet feeder for single crystal furnace and use method thereof - Google Patents
Sheet feeder for single crystal furnace and use method thereof Download PDFInfo
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- CN116288654A CN116288654A CN202310281882.2A CN202310281882A CN116288654A CN 116288654 A CN116288654 A CN 116288654A CN 202310281882 A CN202310281882 A CN 202310281882A CN 116288654 A CN116288654 A CN 116288654A
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- bottom plate
- feeder
- single crystal
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- 239000013078 crystal Substances 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title claims description 12
- 239000010453 quartz Substances 0.000 claims abstract description 120
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 120
- 239000002994 raw material Substances 0.000 claims description 33
- 229910001220 stainless steel Inorganic materials 0.000 claims description 15
- 239000010935 stainless steel Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 239000000428 dust Substances 0.000 claims description 9
- -1 polytetrafluoroethylene Polymers 0.000 claims description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 4
- 238000002955 isolation Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 15
- 229910052710 silicon Inorganic materials 0.000 abstract description 14
- 239000010703 silicon Substances 0.000 abstract description 14
- 235000012431 wafers Nutrition 0.000 abstract description 14
- 230000000694 effects Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 230000000903 blocking effect Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a sheet feeder for a single crystal furnace, which comprises a quartz cylinder, a quartz flange, a cross beam, lifting rods, a supporting flange and a base, wherein the quartz flange is arranged on the outer wall of the quartz cylinder; the feeder enables broken silicon wafers to be smoothly added into the single crystal furnace, improves the utilization rate and is simple to use.
Description
Technical Field
The invention relates to a feeder, in particular to a sheet feeder for a single crystal furnace and a use method thereof, and belongs to the field of single crystal furnace crystal bar production.
Background
In the production process of the silicon wafers, various recyclable raw materials such as head and tail materials, crucible bed charge, broken silicon wafers and the like can be produced, and the recyclable raw materials with the quality meeting the requirements can be returned to the furnace again to draw the single crystal rod. The crushed silicon chips meeting the recovery condition are cleaned, dried and crushed and are used as raw materials for re-furnace return.
Currently, single crystal silicon production ingots utilize the RCZ multiple Czochralski technique to draw multiple ingots by multiple feeds. During charging, a quartz feeder is needed, broken silicon wafers are in a sheet shape and are stacked together after being loaded into the quartz feeder, a lifting rod is arranged in the middle of a quartz cylinder of the conventional quartz feeder, a conical discharge hole is arranged at the lower part of the quartz cylinder, the broken silicon wafers stacked together are easily stacked together, so that the broken silicon wafers are blocked, and the broken silicon wafers cannot be smoothly added into a single crystal furnace. A large amount of broken silicon wafers generated by silicon wafer production enterprises cannot be effectively utilized and can only be purified by a polycrystalline furnace or are resale as waste, so that the utilization rate of a large amount of high-quality broken silicon wafers is reduced, and the production cost is increased.
Patent CN203820919U is a built-in feeder for single crystal furnaces, comprising: a lifting device; the storage barrel is provided with an upper filling opening and a lower discharging opening and can be fixed at a preset position above a crucible in the single crystal furnace; the blocking piece is hinged with the storage barrel and can be used for blocking the lower discharge opening; the lifting rope group is used for hanging the storage vat storing silicon materials into the single crystal furnace or hanging the storage vat out, and comprises a plurality of lifting ropes, the upper end of each lifting rope is connected with a lifting device, the lower end of each lifting rope is connected with a plugging piece, feeding according to requirements can be achieved, but the lifting ropes are adopted in the feeder, the strength of the lifting ropes is not easy to damage, the control on the plugging piece below is not strong, if the plugging piece is clamped, the lifting ropes have no control effect on the lifting ropes, the storage vat structure in the feeder is inconvenient to use quartz materials, usually metal materials, the problem of raw material metal pollution exists, and the production requirement of the single crystal silicon at the present stage is not met.
Therefore, the invention relates to a sheet feeder for a single crystal furnace, which is used for feeding broken silicon wafers, can fully exert the value of the broken silicon wafers, avoid wasting resources, reduce the production cost of enterprises and improve the profit margin of products.
Disclosure of Invention
The invention aims to solve the technical problem of overcoming the defects of the prior art and providing a sheet feeder for a single crystal furnace and a use method thereof.
In order to solve the technical problems, the invention provides a sheet feeder for a single crystal furnace, which comprises a quartz cylinder, a quartz flange, a beam, a lifting rod, a supporting flange and a base, wherein the quartz flange is arranged on the outer wall of the quartz cylinder, the quartz flange comprises an upper flange and a lower flange which are sequentially arranged on the outer wall of the quartz cylinder from top to bottom, the supporting flange is arranged at the lower end of the lower flange through a supporting rod, the beam is arranged at the upper end of the quartz cylinder, the base is arranged at the lower end of the base, two semicircular symmetrical openable bottom plates are arranged at the lower end of the base, lifting rods are symmetrically arranged at two sides of the quartz cylinder, two ends of each lifting rod are respectively provided with threads, one end of each lifting rod penetrates through the upper flange, the lower flange and through holes in the supporting flange and is connected with the bottom plate on the base through a connector and a pull rod, the other end of each lifting rod penetrates through the through holes in the beam and is connected with the beam, and the beam and the lifting rod can move up and down together to drive the bottom plate on the base to be opened and closed to realize feeding.
The technical scheme of the invention is as follows:
further, in the sheet feeder for the single crystal furnace, the base is made of stainless steel and comprises a cylinder body, a cylinder body flange, a guide plate and a bottom plate, wherein the cylinder body flange is arranged at the upper edge of the cylinder body, the guide plate is arranged on the cylinder body flange, and the bottom plate is arranged at the lower end of the cylinder body;
the cylinder body is of a symmetrical half structure and is formed by splicing two arc-shaped plates, and the two arc-shaped plates are respectively connected through corresponding lug plates at two sides;
the guide plate comprises an upper guide plate and a lower guide plate, the upper side of the barrel flange is provided with the upper guide plate, the lower side of the barrel flange is provided with the lower guide plate, and the upper guide plate and the lower guide plate incline into the barrel flange respectively;
the bottom plate is of a symmetrical half structure and is formed by splicing two semicircular plates, one side of each semicircular plate is connected with the cylinder body through a hinge structure, the other side of each semicircular plate is connected with the connecting head through a pull rod, a quartz bottom plate is arranged on the bottom plate, the quartz bottom plate is of the symmetrical half structure, and the bottom plate is composed of two semicircular quartz plates.
The technical effect is that the flange of the cylinder body is used for strengthening the strength of the cylinder body, ensuring the shape of the cylinder body, and the upper guide plate and the lower guide plate play a guiding role when the material is fed and lifted into and out of the single crystal furnace.
In the sheet feeder for the single crystal furnace, the surface of the semicircular plate in the bottom plate is upwards protruded to form a fixed position, and one side, far away from the cylinder body, of the semicircular plate is upwards extended to form a limiting table;
the semicircular quartz plate in the quartz bottom plate is provided with a through hole matched with the fixed column, one side of the semicircular quartz plate connected with the cylinder is provided with an inclined plane, and the lower end of the other side is concave to form a groove at the position corresponding to the limiting table for setting the limiting table.
The technical effect is that the through holes are clamped with the fixing and matching limiting tables, so that the fixing and matching limiting tables are convenient to install and detach, other equipment is not required to be fastened, and pollution to raw materials is avoided;
one side of the quartz bottom plate is provided with an inclined plane, and when the quartz bottom plate is closed, the quartz bottom plate contacts with the inner diameter edge of the lower end of the cylinder body, plays roles in centering and supporting and fixing the quartz cylinder and the bottom plate, and the straight edge of the quartz bottom plate is aligned with the straight edge of the bottom plate and is limited by a limiting table on the bottom plate, so that the quartz bottom plate is convenient to install. In the sheet feeder for the single crystal furnace, one end of the lifting rod is connected with the connector, and the lower end of the connector is respectively connected with the semicircular plate in the bottom plate through the two connecting rods.
The technical effect is that the two lifting rods on the left side and the right side jointly control the opening and closing of the bottom plate, the bottom plate is stable in opening and closing, and the feeding speed is convenient to control.
In the sheet feeder for the single crystal furnace, the positions of the upper flange and the lower flange corresponding to the lifting rods are respectively provided with the guide sleeve, the lifting rods penetrate through the guide sleeves, the guide sleeves on the upper flange penetrate through holes of the upper flange and are fastened on the upper flange through nuts, and the guide sleeves on the lower flange penetrate through holes of the lower flange and are fastened on the lower flange through nuts.
The invention has the technical effects that the upper middle part of the quartz cylinder is provided with the quartz flange, the guide sleeve is arranged to isolate the lifting rod made of stainless steel from the flange on the quartz cylinder, the friction between the lifting rod and the quartz flange is avoided, raw material pollution can be caused by friction scraps, and meanwhile, the service life of the quartz flange is prolonged.
In the sheet feeder for the single crystal furnace, the guide sleeve and the nut are made of polytetrafluoroethylene.
The technical effect adopts polytetrafluoroethylene material, and coefficient of friction is low, can not produce metal powder pollution raw materials with the lifting rod friction.
In the sheet feeder for the single crystal furnace, the outer surface of the cross beam is also provided with a tetrafluoro sleeve, and the upper end of the cross beam is provided with a hanging ring.
The technical effect is that the cross beam is made of stainless steel, the outer surface of the cross beam is provided with the tetrafluoro sleeve, the quartz cylinder and the raw materials are prevented from being in direct contact, the quartz cylinder and the metal are prevented from being in direct contact and fragile, and the service life is prolonged; the direct contact between the raw materials and the metal is avoided, and the pollution to the raw materials is reduced; and the lifting rings are arranged and used for lifting the feeder and controlling the lifting rod to open and close the bottom plate so as to realize feeding.
In the sheet feeder for the single crystal furnace, the fastening nut is arranged on the upper side of the cross beam, the cross beam is arranged on the lifting rod through the fastening nut, and the limit nut is arranged on the lower side of the cross beam.
The technical effect is that the distance between the crossbeam and the upper edge of the quartz cylinder is adjusted through the limit nut, and the maximum opening angle of the bottom plate is controlled, so that the feeding speed of the feeder is controlled, the adjustment is convenient, and the use is convenient.
In the sheet feeder for the single crystal furnace, the supporting flange is positioned in the middle of the quartz cylinder and used for supporting the feeder during feeding, the supporting rods on the supporting flange are made of stainless steel materials, and the upper ends and the lower ends of the supporting rods are respectively provided with a tetrafluoro gasket.
The quartz tube supporting device has the advantages that the quartz tube supporting device is arranged in the middle to stably support the whole quartz tube, and the height of the supporting flange can be adjusted by changing the length of the supporting rod so as to be used for matching different furnace types for feeding; the upper end and the lower end of the supporting rod are provided with the tetrafluoro gasket, so that the upper end is prevented from being in direct contact with the quartz flange, and the lower end is prevented from being in direct contact with the stainless steel supporting flange, so that the iron-cutting pollution raw materials are generated.
The invention also designs a use method of the sheet feeder for the single crystal furnace, which comprises the following specific operations:
(1) when in loading, the feeder is vertically arranged on the transport vehicle, the bottom plate is in contact with the bottom plate of the transport vehicle, the closed state is kept, the cross beam moves upwards under the pushing of the lifting rod, leaves the top of the quartz cylinder, and the raw materials are poured into the quartz cylinder from the upper opening of the quartz cylinder;
(2) during charging, the feeder is obliquely placed through a reversing bracket on the transport vehicle, the raw materials slide downwards along the wall of the quartz cylinder, and meanwhile, the negative pressure dust removing pipe is placed at a charging port of the quartz cylinder, so that dust is prevented from overflowing;
(3) after the single crystal furnace is filled with materials, transferring the transport vehicle to a charging position of the single crystal furnace, keeping the quartz cylinder in a vertical state after the auxiliary chamber is isolated and rotated to a side position, placing the quartz cylinder under the auxiliary chamber, descending the heavy hammer connecting ring until the connecting ring is connected with a hanging ring at the upper end of the cross beam, and lifting the feeder until the bottom of the feeder completely enters the auxiliary chamber;
(4) after the auxiliary chamber is evacuated, an isolation valve is opened, the feeder is lowered until the support flange is in contact with the charging flange of the single crystal furnace, the weight is placed on the charging flange, the cross beam is driven to continuously descend, the cross beam is linked with the lifting rod to move downwards, the bottom plate is slowly opened, charging is started, and when the cross beam descends to the lower limit, the opening of the bottom plate reaches the maximum until the raw material is added;
(5) after the raw materials are added, the crossbeam is lifted, the bottom plate is gradually closed, after the bottom plate is completely closed, the quartz cylinder is supported by the bottom plate, the whole feeder is lifted into the auxiliary chamber, and after the auxiliary chamber is isolated and rotated to a side position, the feeder is slowly lowered and placed on a transport vehicle, so that one-time feeding is completed.
The beneficial effects of the invention are as follows:
the guide sleeves are arranged on the upper flange and the lower flange and sleeved outside the lifting rod, and the guide sleeves are used for isolating the lifting rod (stainless steel material) from the quartz cylinder flange so as to avoid direct contact.
The stainless steel lifting rod is adopted, so that the opening and closing of the bottom plate are convenient to control (compared with the soft rope which can only be controlled to be closed, the bottom plate and the raw materials are opened by gravity, and the risk of clamping the raw materials exists), and the raw materials are ensured to fall smoothly.
The base is hooped at the lower end of the quartz cylinder, and is connected with the ear plate through the cylinder body with the half structure, so that the quartz cylinder is convenient to install and detach.
The quartz bottom plate is arranged on the bottom plate, so that the stainless steel bottom plate is prevented from being in direct contact with the raw materials, and the raw materials are prevented from being polluted.
The cross beam is fixed through the fastening nut, and the distance between the cross beam and the guide sleeve is adjusted through the limit nut, so that the opening and closing of the bottom plate can be conveniently controlled, and the feeding speed of the feeder can be controlled.
The invention matches the existing charging technology, avoids direct contact between the raw materials and metal, and specifically comprises the following steps: the material containing device is still a quartz cylinder; the lifting rod is changed from the inside of the quartz cylinder to the outside of the quartz cylinder, so that raw materials are prevented from contacting the lifting rod and are prevented from falling off smoothly; the opened bottom plate is adopted to form a V-shaped discharge hole, the size of the opening is adjustable, and the raw materials of the discharge hole fall smoothly.
According to the invention, the lifting rod outside the quartz cylinder is used for adjusting the bottom plate on the base, so that broken silicon wafers can be normally fed, and the problem of re-throwing of the broken silicon wafers is solved; matching with the existing charging process, the method can cut into the existing production link at any time; the quality of the produced single crystal rod is qualified.
According to the application method, in the step (2), the raw materials are in a block shape and have dust, the feeder is obliquely arranged, the block-shaped raw materials slide downwards along the wall of the quartz cylinder, so that the collision to the quartz bottom plate can be reduced, the quartz bottom plate is prevented from being broken, and meanwhile, dust flying can be reduced.
According to the using method, the lifting rod in the step (4) can forcedly push the bottom plate, so that the problem that the bottom plate cannot be opened or the opening degree is insufficient due to clamping is avoided, and smooth feeding is ensured.
Drawings
FIG. 1 is a schematic view showing a structure of a sheet feeder for a single crystal furnace according to an embodiment of the present invention;
FIG. 2 is a schematic view showing the structure of the upper part of the sheet feeder for the single crystal furnace in FIG. 1;
FIG. 3 is a schematic view showing a structure of the single crystal furnace of FIG. 1 with a lower bottom plate of the sheet feeder opened;
FIG. 4 is a schematic view showing a structure of the single crystal furnace of FIG. 1 in a state that a bottom plate of a lower portion of a sheet feeder is closed;
FIG. 5 is a top view of the quartz tube of FIG. 1;
FIG. 6 is a schematic view of the assembly of the bottom plate and the quartz bottom plate of FIG. 1;
in the figure: the device comprises a 1-quartz cylinder, a 2-cross beam, a 21-hanging ring, a 22-fastening nut, a 23-limit nut, a 3-lifting rod, a 4-supporting flange, a 5-supporting rod, a 6-base, a 61-cylinder, a 62-cylinder flange, a 63-upper guide plate, a 64-lower guide plate, a 67-bottom plate, a 671-fixed column, a 672-limit table, a 68-quartz bottom plate, a 681-inclined plane, 682-through holes, a 7-upper flange, an 8-lower flange, a 9-connector, a 10-pull rod and a 13-guide sleeve.
Description of the embodiments
Examples
The embodiment provides a sheet feeder for a single crystal furnace, the structure is as shown in fig. 1-6, the sheet feeder comprises a quartz cylinder 1, a quartz flange, a beam 2, a lifting rod 3, a supporting flange 4 and a base 6, wherein the quartz flange is arranged on the outer wall of the quartz cylinder 1, the quartz flange comprises an upper flange 7 and a lower flange 8 which are sequentially arranged on the outer wall of the quartz cylinder 1 from top to bottom, the supporting flange 4 is arranged at the lower end of the lower flange 8 through a supporting rod 5, the beam 2 is arranged at the upper end of the quartz cylinder 1, the base 6 is arranged at the lower end of the quartz cylinder 1, two semicircular symmetrical openable bottom plates 67 are arranged at the lower end of the base 6, lifting rods 3 are symmetrically arranged at two sides of the quartz cylinder 1, threads are respectively arranged at two ends of the lifting rods 3, one end of each lifting rod 3 penetrates through the upper flange 7, the lower flange 8 and through holes in the supporting flange 4 are connected with a bottom plate 67 on the base 6 through connectors 9 and pull rods 10, the other end penetrates through the through holes in the beam 2 and is connected with the beam 2, the beam 2 can move up and down together with the lifting rod 3, and the bottom plate 67 on the base 6 is driven to open and close.
In this embodiment, the quartz cylinder is provided with an upper flange 7 and a lower flange 8, the outer diameter of the quartz cylinder 1 is 260mm, the diameters of the upper flange 7 and the lower flange 8 are 330mm, the upper flange 7 and the lower flange 8 are provided with evenly distributed through holes for the lifting rod 3 to pass through and through holes of the fixing flange (as shown in fig. 5, the large holes are through holes for the lifting rod to pass through, the small holes are through holes for the fixing flange), the diameter of the through holes for the lifting rod 3 to pass through is 25mm, a guide sleeve 13 is arranged in the through holes of the upper flange 7 and the lower flange 8, and is fastened by nuts, and the guide sleeve 13 is used for isolating the stainless steel lifting rod 3 from the quartz cylinder flange, so that direct contact is avoided.
In this embodiment, the base 6 is made of stainless steel, and comprises a cylinder 61, a cylinder flange 62, a guide plate and a bottom plate 67, wherein the cylinder flange 62 is arranged on the upper edge of the cylinder 61, the guide plate is arranged on the cylinder flange 62, and the bottom plate 67 is arranged at the lower end of the cylinder 61;
the cylinder 61 is of a symmetrical half structure and is formed by splicing two arc-shaped plates, the two arc-shaped plates are respectively connected through corresponding lug plates at two sides, and the two arc-shaped plates are hooped on the quartz cylinder and fixed at the bottom of the quartz cylinder 1;
the guide plates comprise an upper guide plate 63 and a lower guide plate 64, the upper side of the cylinder flange 62 is provided with the upper guide plate 63, the lower side of the cylinder flange 62 is provided with the lower guide plate 64, the upper guide plate 63 and the lower guide plate 64 incline into the cylinder flange 62 respectively, and the angle formed between the upper guide plate and the lower guide plate is smaller than 180 degrees;
the bottom plate 67 is of a symmetrical half structure and is formed by splicing two semicircular plates, one side of each semicircular plate is connected with the cylinder 61 through a hinge structure, the other side of each semicircular plate is connected with the connector 9 through the pull rod 10, the bottom plate 67 is provided with a quartz bottom plate 68, the quartz bottom plate 68 is of a symmetrical half structure, and each semicircular quartz plate is composed of two semicircular quartz plates.
In this embodiment, the surface of the semicircular plate in the bottom plate 67 protrudes upward to form a fixing post 671, and the semicircular plate extends upward away from the side connected with the cylinder 61 to form a limit table 672 with a diameter of 15mm;
the semi-circular quartz plate of the quartz bottom plate 68 is provided with a through hole 682 with the diameter of 16mm which is matched with the fixing column 671, the through hole is coaxially connected with the fixing column protruding from the middle part of the semi-circular plate, one side of the semi-circular quartz plate connected with the cylinder 61 is provided with an inclined plane 681, and the lower end of the other side is inwards concave to form a groove corresponding to the position of the limit table 672 for setting the limit table 672.
In this embodiment the lifting rod 3 is 12mm in diameter and is threaded M12 at both ends.
In this embodiment, one end of the lifting lever 3 is connected to the connector 9, and the lower end of the connector 9 is connected to one semicircular plate in the bottom plate 67 through two links 10, respectively.
In this embodiment, the positions of the upper flange 7 and the lower flange 8 corresponding to the lifting rods are respectively provided with a guide sleeve 13, the lifting rods 3 pass through the guide sleeves 13, the guide sleeves 13 on the upper flange 7 pass through the through holes of the upper flange 7, are fastened on the upper flange 7 through nuts, and the guide sleeves 13 on the lower flange 8 pass through the through holes of the lower flange 8 and are fastened on the lower flange 8 through nuts.
In this embodiment, the guide sleeve 13 and the nut are made of polytetrafluoroethylene.
In this embodiment, the crossbeam is cuboid shape, and stainless steel material, and the surface of crossbeam 2 still is equipped with the tetrafluoro cover, and the upper end of crossbeam 2 is equipped with screw hole installation rings 21, and the through-hole is opened to crossbeam both ends symmetry for the pass of lifting rod.
In this embodiment, the upside of crossbeam 2 sets up fastening nut 22, and crossbeam 2 passes through fastening nut 22 to be set up on lifting rod 3, and the downside of crossbeam 2 is equipped with stop nut 23, through the distance between stop nut adjustment crossbeam 2 and the quartz capsule 1 upper edge, the opening angle of control bottom plate 67 to the feed rate of control charging means, the regulation of being convenient for, convenient to use.
In the present embodiment, the support flange 4 is located in the middle of the quartz cylinder 1 for support during charging, and the support flange 4 includes a stainless steel flange 41 placed above and a tetrafluoro flange 42 placed below.
The supporting rod 5 on the supporting flange 4 is made of stainless steel, and the upper end and the lower end of the supporting rod 5 are respectively provided with a tetrafluoro gasket.
The application method of the sheet feeder for the single crystal furnace comprises the following specific operations:
(1) when in loading, the feeder is vertically arranged on the transport vehicle, the bottom plate 67 is in contact with the bottom plate of the transport vehicle, the closed state is kept, the cross beam 2 moves upwards under the pushing of the lifting rod 3, leaves the top of the quartz cylinder 1, and raw materials are poured into the quartz cylinder 1 from the upper opening of the quartz cylinder 1;
(2) during charging, in order to avoid overlarge dust, the feeder is obliquely placed through a reversing bracket on the transport vehicle, raw materials slide downwards along the wall of the quartz cylinder 1, and meanwhile, a negative pressure dust removing pipe is arranged at a charging port of the quartz cylinder 1, so that dust is prevented from overflowing;
(3) after the single crystal furnace is filled with materials, transferring the transport vehicle to a charging position of the single crystal furnace, keeping the quartz cylinder 1 in a vertical state after the auxiliary chamber is isolated and rotated to a side position, placing the quartz cylinder under the auxiliary chamber, lowering the heavy hammer connecting ring until the connecting ring is connected with the hanging ring 21 at the upper end of the cross beam 2, and lifting the feeder until the bottom of the feeder completely enters the auxiliary chamber;
(4) after the auxiliary chamber is evacuated, an isolation valve is opened, the feeder is lowered until the support flange 4 is in contact with a charging flange of the single crystal furnace, the feeder is placed on the charging flange (no longer descends), the heavy hammer drives the cross beam 2 to continuously descend, the cross beam 2 moves downwards in a linkage manner, the bottom plate 67 is slowly opened, charging is started, and when the cross beam 2 descends to a lower limit, the opening of the bottom plate 67 reaches the maximum until the raw materials are added;
(5) after the raw materials are added, the lifting beam 2 is started, the bottom plate 67 is gradually closed, after the bottom plate 67 is completely closed, the quartz cylinder 1 is supported by the bottom plate 67, the whole feeder is lifted into the auxiliary chamber, and after the auxiliary chamber is isolated and rotated to a side position, the feeder is slowly lowered and placed on a transport vehicle, so that one-time feeding is completed.
In addition to the embodiments described above, other embodiments of the invention are possible. All technical schemes formed by equivalent substitution or equivalent transformation fall within the protection scope of the invention.
Claims (10)
1. A piece material feeder for single crystal growing furnace, characterized in that: the device comprises a quartz cylinder (1), a quartz flange, a cross beam (2), a lifting rod (3), a supporting flange (4) and a base (6), wherein the quartz flange is arranged on the outer wall of the quartz cylinder (1), the quartz flange comprises an upper flange (7) and a lower flange (8) which are sequentially arranged on the outer wall of the quartz cylinder (1) from top to bottom, the lower end of the lower flange (8) is provided with the supporting flange (4) through a supporting rod (5), the upper end of the quartz cylinder (1) is provided with the cross beam (2), the lower end of the quartz cylinder (1) is provided with the base (6), two semicircular symmetrical openable bottom plates (67) are arranged at the lower end of the base (6), threads are respectively arranged at two ends of the lifting rod (3), one end of the lifting rod (3) penetrates through the upper flange (7), the lower flange (8) and the through hole on the supporting flange (4) is connected with the cross beam (2) through a connector (9) and a pull rod (10) and the other end of the lifting rod (6) is connected with the cross beam (2) through the upper end (2), the bottom plate (67) on the base (6) is driven to open and close to realize feeding.
2. The sheet feeder for a single crystal furnace according to claim 1, wherein: the base (6) is made of stainless steel and comprises a cylinder body (61), a cylinder body flange (62), a guide plate and a bottom plate (67), wherein the cylinder body flange (62) is arranged on the upper edge of the cylinder body (61), the guide plate is arranged on the cylinder body flange (62), and the bottom plate (67) is arranged at the lower end of the cylinder body (61);
the cylinder body (61) is of a symmetrical half structure and is formed by splicing two arc-shaped plates, and the two arc-shaped plates are connected through corresponding lug plates at two sides respectively;
the guide plate comprises an upper guide plate (63) and a lower guide plate (64), the upper guide plate (63) is arranged on the upper side of the barrel flange (62), the lower guide plate (64) is arranged on the lower side of the barrel flange (62), and the upper guide plate (63) and the lower guide plate (64) incline into the barrel flange (62) respectively;
the bottom plate (67) is of a symmetrical half structure and is formed by splicing two semicircular plates, one side of each semicircular plate is connected with the cylinder body (61) through a hinge structure, the other side of each semicircular plate is connected with the connecting head (9) through the pull rod (10), the bottom plate (67) is provided with a quartz bottom plate (68), and the quartz bottom plate (68) is of a symmetrical half structure and consists of two semicircular quartz plates.
3. The sheet feeder for a single crystal furnace according to claim 2, wherein: the surface of the semicircular plate in the bottom plate (67) is upwards protruded to form a fixing position (671), and one side, far away from the connection with the cylinder body (61), of the semicircular plate upwards extends to form a limit table (672);
the semi-circular quartz plate in the quartz base plate (68) is provided with a through hole (682) matched with the fixing column (671), one side of the semi-circular quartz plate connected with the cylinder (61) is provided with an inclined plane (681), and the lower end of the other side is inwards concave to form a groove corresponding to the position of the limit table (672) for setting the limit table (672).
4. The sheet feeder for a single crystal furnace according to claim 2, wherein: one end of the lifting rod (3) is connected with the connector (9), and the lower end of the connector (9) is respectively connected with one semicircular plate in the bottom plate (67) through two connecting rods (10).
5. The sheet feeder for a single crystal furnace according to claim 1, wherein: the position of corresponding lifting rod on upper flange (7) and lower flange (8) is equipped with uide bushing (13) respectively, lifting rod (3) are passed uide bushing (13), uide bushing (13) on upper flange (7) pass the through-hole of upper flange (7), fasten on upper flange (7) through the nut, uide bushing (13) on lower flange (8) pass the through-hole of lower flange (8) to fasten on lower flange (8) with the nut.
6. The sheet feeder for a single crystal furnace according to claim 5, wherein: and the guide sleeve (13) and the nut are made of polytetrafluoroethylene materials.
7. The sheet feeder for a single crystal furnace according to claim 1, wherein: the outer surface of the cross beam (2) is also provided with a tetrafluoro sleeve, and the upper end of the cross beam (2) is provided with a hanging ring (21).
8. The sheet feeder for a single crystal furnace according to claim 1, wherein: the upper side of the cross beam (2) is provided with a fastening nut (22), the cross beam (2) is arranged on the lifting rod (3) through the fastening nut (22), and the lower side of the cross beam (2) is provided with a limit nut (23).
9. The sheet feeder for a single crystal furnace according to claim 1, wherein: the support flange (4) is located in the middle of the quartz cylinder (1) and used for supporting the feeder during feeding, the support rods (5) on the support flange (4) are made of stainless steel, and tetrafluoro gaskets are respectively arranged at the upper end and the lower end of the support rods (5).
10. The method of using a single crystal furnace slice feeder according to any one of claims 1 to 9, characterized in that the specific operations comprise the steps of:
(1) when in loading, the feeder is vertically arranged on the transport vehicle, the bottom plate (67) is in contact with the bottom plate of the transport vehicle, the closed state is kept, the cross beam (2) moves upwards under the pushing of the lifting rod (3), leaves the top of the quartz cylinder (1), and the raw materials are poured into the quartz cylinder (1) from the upper opening of the quartz cylinder (1);
(2) during charging, the feeder is obliquely placed through a reversing bracket on the transport vehicle, raw materials slide downwards along the wall of the quartz cylinder (1), and meanwhile, a negative pressure dust removing pipe is arranged at a charging port of the quartz cylinder (1) to avoid dust overflow;
(3) after the single crystal furnace is filled with materials, transferring the transport vehicle to a charging position of the single crystal furnace, keeping the quartz cylinder (1) in a vertical state after the auxiliary chamber is isolated and rotated to a side position, placing the quartz cylinder under the auxiliary chamber, lowering the heavy hammer connecting ring until the connecting ring is connected with a lifting ring (21) at the upper end of the cross beam (2), and lifting the feeder until the bottom of the feeder completely enters the auxiliary chamber;
(4) after the auxiliary chamber is evacuated, an isolation valve is opened, the feeder is lowered until the support flange (4) is in contact with a charging flange of the single crystal furnace, the feeder is placed on the charging flange, the weight drives the cross beam (2) to continuously descend, the cross beam (2) moves down in a linkage manner, the bottom plate (67) is slowly opened, charging is started, and when the cross beam (2) descends to a lower limit, the opening of the bottom plate (67) reaches the maximum until the raw material is added;
(5) after the raw materials are added, the lifting beam (2) is started, the bottom plate (67) is gradually closed, after the bottom plate (67) is completely closed, the quartz cylinder (1) is supported by the bottom plate (67), the whole feeder is lifted into the auxiliary chamber, and after the auxiliary chamber is isolated and rotated to a side position, the feeder is slowly lowered and placed on the transport vehicle, so that one-time feeding is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310281882.2A CN116288654A (en) | 2023-03-22 | 2023-03-22 | Sheet feeder for single crystal furnace and use method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310281882.2A CN116288654A (en) | 2023-03-22 | 2023-03-22 | Sheet feeder for single crystal furnace and use method thereof |
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| CN116288654A true CN116288654A (en) | 2023-06-23 |
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| Application Number | Title | Priority Date | Filing Date |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117737829A (en) * | 2023-11-16 | 2024-03-22 | 连城凯克斯科技有限公司 | Feeding device of single crystal furnace |
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2023
- 2023-03-22 CN CN202310281882.2A patent/CN116288654A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117737829A (en) * | 2023-11-16 | 2024-03-22 | 连城凯克斯科技有限公司 | Feeding device of single crystal furnace |
| CN117737829B (en) * | 2023-11-16 | 2024-06-21 | 连城凯克斯科技有限公司 | Feeding device of single crystal furnace |
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