CN116276337B - Processing method and processing device for high-flatness planar glass - Google Patents

Processing method and processing device for high-flatness planar glass Download PDF

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Publication number
CN116276337B
CN116276337B CN202310442262.2A CN202310442262A CN116276337B CN 116276337 B CN116276337 B CN 116276337B CN 202310442262 A CN202310442262 A CN 202310442262A CN 116276337 B CN116276337 B CN 116276337B
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processing
backing plate
flatness
planar glass
planar
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CN116276337A (en
Inventor
宋庭东
范一
马如银
徐步娟
孙建国
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MLOPTIC CORP
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MLOPTIC CORP
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a processing method and a processing device for high-flatness planar glass, which belong to the technical field of planar glass processing, and the processing method and the processing device are used for selecting a minimum pad diameter larger than the required processing diameter according to the maximum diameter of a planar glass blank and the processing flatness requirement, so that the flatness of the processed finished planar glass meets the requirement, and the matching degree of the size of a processing pad and the corresponding flatness processing requirement is high, so that processing pad equipment with larger diameter can be used for processing the flatness of the planar glass with higher requirement, the utilization rate is improved, and simple accurate grinding and polishing equipment is used for processing the planar glass with high flatness by matching with the processing pad, and the cost of equipment requirement is reduced.

Description

Processing method and processing device for high-flatness planar glass
Technical Field
The invention relates to the technical field of planar glass processing, in particular to a processing method and a processing device for planar glass with high flatness.
Background
The present processing method of high-flatness planar glass is mainly that a double-sided grinder is used for fine grinding and polishing, because the double-sided grinder is used for processing two sides of a whole planar glass disk simultaneously, the flatness of the processed planar glass depends on the horizontal precision of an upper die disk and a lower die disk of a machine, the flatness of the planar glass cannot be corrected at any time by changing machine parameters, and meanwhile, the two sides of the planar glass are subjected to upper and lower fine grinding, the pressure and the rotating speed of the polishing disk are different and the surface shape of the die disk is subjected to constant influence of horizontal errors, so that the flatness of single planar glass in each area of the disk is different, and generally, the planar glass with high flatness cannot be processed, so that the flatness quality of the planar glass is reduced.
Disclosure of Invention
The technical purpose is that: aiming at the defects in the processing of the planar glass in the prior art, the invention discloses a processing method and a processing device of the planar glass with high flatness, which can overcome the problems.
The technical scheme is as follows: in order to achieve the technical purpose, the invention adopts the following technical scheme:
the processing method of the high-flatness planar glass is characterized by comprising the following steps of:
s01, obtaining machining allowance and flatness requirement values of the upper surface and the lower surface of a plane glass blank, and calculating the diameter of a minimum backing plate required by machining according to the diameter of the plane glass blank and flatness machining capacity of using equipment;
s02, selecting processing equipment with the diameter of a processing backing plate larger than the diameter of a minimum backing plate, uniformly arranging the planar glass blanks on the processing backing plate, and dispensing and fixing the planar glass blanks with the processing backing plate;
s03, carrying out fine grinding and polishing on the surface of the planar glass blank according to the machining allowance of the surface of the planar glass blank;
s04, cleaning a lower disc of the planar glass blank, fixing the unprocessed surface upwards on a processing backing plate through optical cement, and carrying out fine grinding and polishing processing on the other surface of the planar glass blank;
and S05, finally, carrying out lower plate cleaning to obtain the finished product of the planar glass.
Preferably, in step S01, the process of calculating the minimum pad diameter includes: confirming flatness processing capability DeltaL and minimum processing backing plate diameter according to the history of flatness processing by using equipmentWherein D1 represents the diameter of a flat glass blank, ΔL1 tableShowing the minimum value of the flatness required range for a flat glass blank.
Preferably, for non-circular planar glass blanks, D1 is the distance between the furthest edges of the planar glass blank.
Preferably, in step S05, the finish grinding and polishing process for the surface of the flat glass blank according to the present invention comprises the steps of:
s051, rough grinding is carried out on the surface of the blank, machining allowance of 1/4-1/3 thickness is processed, cutting machining is uniformly carried out on the surface of the blank, and the whole disc blank on the machining backing plate is kept to be machined;
s052, measuring the height of a processing surface of the rough and fine-ground planar glass blank, and confirming the position of a high point;
s053, fixing the position of a processing backing plate, limiting the rotation of the processing backing plate, and carrying out cutting correction on a high point by using fine grinding processing equipment;
s054, stopping cutting processing of the high point when the difference value between the high point and the low point is in a set range of error and meets the flatness thickness requirement of the whole disc of the processing backing plate, releasing the fixation of the processing backing plate, determining the residual processing allowance, finely grinding the whole planar glass blank by using fine grinding processing equipment, leaving a polishing allowance, and finally polishing.
Preferably, in step S052, the high-point position confirmation process of the present invention includes: and uniformly selecting four groups of measuring points along the circumferential direction of the edge of the processing backing plate by taking the back surface of the processing backing plate as a reference surface, and measuring the distance from the corresponding measuring point at the reference surface to the upper surface of the planar glass blank so as to confirm the high point position.
Preferably, in step S03 and step S04, the operation parameters of the fine grinding and polishing processing performed by the fine grinding processing equipment are consistent, the revolution is 20-50 rpm, and the pressure is 1-5kg.
The invention also provides a high-flatness planar glass processing device for realizing the planar glass processing method, which comprises a planar polishing die and a processing backing plate, wherein the planar polishing die is connected with a main shaft of fine grinding equipment through a connecting handle on the back, and the diameter of the processing backing plate is larger than the diameter of a minimum backing plate required by planar glass blank flatness processing.
Preferably, the processing backing plate is made of glass, the flatness of two sides of the processing backing plate is smaller than 0.005mm, a metal handle is arranged in the center of the back of the processing backing plate, high-strength glue is used for bonding the metal handle and the processing backing plate, and a V-shaped groove hole for positioning and fixing is formed in one end, deviating from the processing backing plate, of the metal handle.
The beneficial effects are that: the processing method and the processing device for the high-flatness planar glass have the following beneficial effects:
1. the invention uses simple accurate grinding and polishing equipment to process the planar glass with high flatness by matching with the processing backing plate, thereby reducing the cost of equipment requirements.
2. According to the invention, one surface of the planar glass blank is subjected to fine grinding and polishing, and then the surface is used as a reference to be fixed with a processing backing plate through optical cement, so that the flatness of the two surfaces of the planar glass is ensured.
3. According to the maximum diameter of the planar glass blank and the processing flatness requirement, the diameter of the base plate is larger than the minimum base plate diameter required by processing, so that the flatness of the processed finished planar glass meets the requirement, the matching degree of the size of the processed base plate and the corresponding flatness processing requirement is high, the processing base plate equipment with larger diameter can be used for processing the flatness of the planar glass with higher requirement, the utilization rate is improved, and the equipment input cost is reduced.
4. The invention uses the distance between the two edges of the planar glass which are furthest apart as the reference for calculating the diameter of the minimum backing plate, can meet the processing of various special-shaped planar structures, improves the processing quality, and avoids the situations of scrapping and the like.
5. According to the invention, the high-flatness glass material processing backing plate is used, so that the positioning accuracy is ensured, meanwhile, the back surface of the processing backing plate is used as a reference surface for high-point measurement, the measurement difficulty is reduced, and the measurement precision is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.
FIG. 1 is a schematic view of a planar glass blank according to the present invention;
FIG. 2 is a schematic diagram of a calculated minimum pad diameter model in accordance with the present invention;
FIG. 3 is a schematic diagram of a high-point detection state performed by the present invention;
wherein, 1-plane polishing mould, 2-processing backing plate, 3-connection handle, 4-plane glass blank, 5-metal handle, 6-V type recess hole.
Detailed Description
The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown, but in which the invention is not so limited.
The invention provides a processing method of high-flatness planar glass, which comprises the following steps:
s01, obtaining machining allowance and flatness requirement values of the upper surface and the lower surface of a plane glass blank, and calculating the diameter of a minimum backing plate required by machining according to the diameter of the plane glass blank and flatness machining capacity of using equipment;
the process of calculating the minimum shim plate diameter includes: confirming flatness processing capability DeltaL and minimum processing backing plate diameter according to the history of flatness processing by using equipmentWherein D1 represents the diameter of the flat glass blank, Δl1 represents the minimum value of the flatness required range of the flat glass blank, as shown in fig. 2, Δl=l1-l3, Δl1=l1-L2; for non-circular planar glass blanks, D1 is the distance between the furthest edges of the planar glass blank. By calculating the diameter of the minimum backing plate, the size of the planar glass blank and the size of the processing backing plate can be accurately matched, the production equipment resources can be accurately and efficiently distributed, and the efficiency is improved.
S02, selecting processing equipment with the diameter of a processing backing plate larger than the diameter of a minimum backing plate, uniformly arranging the planar glass blanks on the processing backing plate, and dispensing and fixing the planar glass blanks with the processing backing plate; since the calculated minimum shim plate diameter is not necessarily a standard shim plate size, it is desirable to seek in existing equipment to meet the machining requirements for a machined shim plate,
s03, carrying out fine grinding and polishing on the surface of the planar glass blank according to the machining allowance of the surface of the planar glass blank;
in the first surface processing process of the planar glass blank, only the requirement of processing allowance is needed to be considered, the fine grinding and polishing equipment is controlled to conduct fine grinding and polishing according to set parameters, and the uniformly processed and cut surface is utilized, so that the consistency of the bottom surface of the planar glass is guaranteed when the second surface of the planar glass blank is processed, and the other surface is convenient to conduct high-point measurement and processing.
S04, cleaning a lower disc of the planar glass blank, fixing the unprocessed surface upwards on a processing backing plate through optical cement, and carrying out fine grinding and polishing processing on the other surface of the planar glass blank; in step S03 and step S04, the operation parameters of the fine grinding and polishing processing by the fine grinding processing equipment are consistent, the revolution is 20-50 rpm, and the pressure is 1-5kg. Through the consistent processing parameter setting, the cutting amount of the equipment for product processing is consistent in unit time, the cutting amount is convenient to control in the subsequent batch processing process, the measuring frequency can be reduced, and the processing efficiency is improved.
And S05, finally, carrying out lower plate cleaning to obtain the finished product of the planar glass.
In step S05, the finish grinding and polishing process for the surface of the planar glass blank comprises the following steps:
s051, rough grinding is carried out on the surface of the blank, machining allowance of 1/4-1/3 thickness is processed, cutting machining is uniformly carried out on the surface of the blank, and the whole disc blank on the machining backing plate is kept to be machined;
s052, measuring the height of a processing surface of the rough and fine-ground planar glass blank, and confirming the position of a high point; the high point location validation process includes: uniformly selecting four groups of measuring points along the circumferential direction of the edge of the processing backing plate by taking the back surface of the processing backing plate as a reference surface, and measuring the distance from the corresponding measuring point at the reference surface to the upper surface of the planar glass blank so as to confirm a high point position;
s053, fixing the position of a processing backing plate, limiting the rotation of the processing backing plate, and carrying out cutting correction on a high point by using fine grinding processing equipment;
s054, stopping cutting processing of the high point when the difference value between the high point and the low point is in a set range of error and meets the flatness thickness requirement of the whole disc of the processing backing plate, releasing the fixation of the processing backing plate, determining the residual processing allowance, finely grinding the whole planar glass blank by using fine grinding processing equipment, leaving a polishing allowance, and finally polishing.
As shown in fig. 1-3, the invention further provides a high-flatness flat glass processing device for implementing the flat glass processing method, which comprises a flat polishing die 1 and a processing backing plate 2, wherein the flat polishing die 1 is connected with a main shaft of fine grinding equipment through a connecting handle 3 on the back, and the diameter of the processing backing plate 2 is larger than the minimum backing plate diameter required by flatness processing of a flat glass blank 4.
The processing backing plate 2 adopts the glass material, and processing backing plate 2 two sides roughness is less than 0.005mm, is equipped with metal handle 5 at the back center of processing backing plate 2, uses high strength to glue between metal handle 5 and the processing backing plate 2 and bonds, and metal handle 5 deviates from the one end of processing backing plate 2 and is equipped with the V type recess hole 6 that is used for fixing in the location.
When the processing device is used for processing the flatness of the plane glass blank, the number of the plane glass blanks required by the single-time use processing backing plate is obtained on the premise of fully filling the whole processing backing plate according to the size of the selected processing backing plate 2 and the specification of the plane glass blank, the plane glass blanks are uniformly fixed on the working surface of the processing backing plate by dispensing, the directions of the maximum diameters of the plane glass blanks are consistent, and when the flatness of the maximum diameter direction meets the requirement, the other directions meet the requirement.
And then, carrying out fine grinding and polishing on the surface of the planar glass blank, wherein the fine grinding is generally divided into a coarse and fine grinding die and a fine grinding die, the machine revolution is 20-50 r/min, the pressure is 1-5KG, the cutting quantity of the coarse and fine grinding die is generally 0.25mm, and the cutting quantity of the fine grinding die is 0.03mm, so that the appearance, the aperture and the surface shape which meet the polishing requirements are obtained. Polishing is generally divided into rough polishing, fine polishing, 20-50 revolutions per minute (rpm) of a machine, 1-5KG of pressure, and 0.02mm of rough polishing cutting amount and 0.01mm of fine polishing cutting amount, so that the appearance, aperture, surface shape and thickness meeting the requirements of a finished product of the planar glass are obtained.
Then, soaking the lower plate of the planar glass until the planar glass falls off, wiping cleanly, fixing the lower plate on a processing backing plate through an optical cement, processing the second surface of the planar glass blank, firstly, roughly and finely grinding and cutting a machining allowance of 1/4-1/3 thickness, then symmetrically setting four measuring points on the back surface of the processing backing plate to measure the distance between the lower plate and the second surface of the planar glass, wherein the thickness of each part of the processing backing plate is consistent, therefore, the height difference measured by the four points is the thickness difference of the planar glass blank at the corresponding position, the high point is determined according to the measuring result, and after the processing backing plate is fixed, the high point grinding is independently carried out to realize the correction of the high point of the second surface of the planar glass, in the high point correction process, small amount of abrasion is also carried out on the other areas of the planar glass in the high point correction cutting process, after the correction is finished, the measurement is needed again, so that whether the flatness meets the requirement is confirmed, and meanwhile, the remaining machining allowance of the planar glass is confirmed, so that the distribution of fine grinding and polishing quantity is carried out. Finally, the processed glass is put on a plate, immersed until the planar glass falls off, wiped clean, and the finished planar glass is obtained after the processing.
The foregoing is only a preferred embodiment of the invention, it being noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.

Claims (6)

1. The processing method of the high-flatness planar glass is characterized by comprising the following steps of:
s01, obtaining machining allowance and flatness requirement values of the upper surface and the lower surface of a plane glass blank, and calculating the diameter of a minimum backing plate required by machining according to the diameter of the plane glass blank and flatness machining capacity of using equipment;
calculate the mostThe process of the diameter of the small backing plate comprises the following steps: confirming flatness processing ability based on history of flatness processing using equipmentMinimum working plate diameter->Wherein D1 represents the diameter of the flat glass blank, < >>Minimum value representing the flatness requirement range of a flat glass blank, +.>,/>
S02, selecting processing equipment with the diameter of a processing backing plate larger than the diameter of a minimum backing plate, uniformly arranging the planar glass blanks on the processing backing plate, and dispensing and fixing the planar glass blanks with the processing backing plate;
s03, carrying out fine grinding and polishing on the surface of the planar glass blank according to the machining allowance of the surface of the planar glass blank;
s04, cleaning a lower disc of the planar glass blank, fixing the unprocessed surface upwards on a processing backing plate through optical cement, and carrying out fine grinding and polishing processing on the other surface of the planar glass blank;
and S05, finally, carrying out lower plate cleaning to obtain the finished product of the planar glass.
2. A method of processing high flatness flat glass according to claim 1, wherein the fine grinding and polishing process for the surface of the flat glass blank comprises the steps of:
rough grinding is carried out on the surface of the blank, machining allowance with the thickness of 1/4-1/3 is processed, cutting machining is uniformly carried out on the surface of the blank, and the whole disc blank on the machining backing plate is kept to be machined;
measuring the height of the processing surface of the rough and fine-ground planar glass blank, and confirming the position of a high point;
fixing the position of a processing backing plate, limiting the rotation of the processing backing plate, and carrying out cutting correction on a high point by using fine grinding processing equipment;
and stopping cutting the high point when the difference value between the high point and the low point is in a set range of error to meet the flatness thickness requirement of the whole disc of the processing backing plate, removing the fixation of the processing backing plate, determining the residual processing allowance, finely grinding the whole planar glass blank by using fine grinding processing equipment, leaving the polishing allowance, and finally polishing.
3. The method for processing high-flatness flat glass according to claim 2, wherein the high-point position confirmation process includes: and uniformly selecting four groups of measuring points along the circumferential direction of the edge of the processing backing plate by taking the back surface of the processing backing plate as a reference surface, and measuring the distance from the corresponding measuring point at the reference surface to the upper surface of the planar glass blank so as to confirm the high point position.
4. The method according to claim 1, wherein the operation parameters of the fine grinding and polishing processes performed by the fine grinding process apparatus are identical in step S03 and step S04, and the revolution is 20 to 50 rpm and the pressure is 1 to 5kg.
5. A high-flatness planar glass processing device for realizing the planar glass processing method according to any one of claims 1 to 4, which is characterized by comprising a planar polishing die (1) and a processing backing plate (2), wherein the planar polishing die (1) is connected with a main shaft of fine grinding equipment through a connecting handle (3) on the back, and the diameter of the processing backing plate (2) is larger than the minimum backing plate diameter required by flatness processing of a planar glass blank (4).
6. The high-flatness planar glass processing device according to claim 5, wherein the processing backing plate (2) is made of glass, flatness of two sides of the processing backing plate (2) is smaller than 0.005mm, a metal handle (5) is arranged in the center of the back of the processing backing plate (2), high-strength glue is used for bonding between the metal handle (5) and the processing backing plate (2), and a V-shaped groove hole (6) for positioning and fixing is formed in one end, deviating from the processing backing plate (2), of the metal handle (5).
CN202310442262.2A 2023-04-23 2023-04-23 Processing method and processing device for high-flatness planar glass Active CN116276337B (en)

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CN215394442U (en) * 2021-03-16 2022-01-04 苏州赛万玉山智能科技有限公司 Grinding and polishing integrated planarization processing device

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Publication number Priority date Publication date Assignee Title
JP2003117818A (en) * 2001-10-10 2003-04-23 Okamoto Machine Tool Works Ltd Method and device for grinding substrate
TW200626291A (en) * 2004-10-06 2006-08-01 Rajeev Bajaj Method and apparatus for improved chemical mechanical planarization
JP2009274903A (en) * 2008-05-14 2009-11-26 Sumco Corp Methods for producing silicon single crystal and silicon wafer and silicon wafer produced by the method
CN101934497A (en) * 2010-08-11 2011-01-05 中国电子科技集团公司第四十五研究所 Single-sided chemically mechanical polishing method and device of silicon chip
JP2017092316A (en) * 2015-11-12 2017-05-25 信越半導体株式会社 Polishing agent and polishing method
CN105538108A (en) * 2015-12-14 2016-05-04 宁波韵升磁体元件技术有限公司 Machining method for small NdFeB magnetic ring with high verticality requirement
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