CN116256375A - Rapid LBIC scanning device and method based on non-uniform sampling - Google Patents

Rapid LBIC scanning device and method based on non-uniform sampling Download PDF

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Publication number
CN116256375A
CN116256375A CN202310231408.9A CN202310231408A CN116256375A CN 116256375 A CN116256375 A CN 116256375A CN 202310231408 A CN202310231408 A CN 202310231408A CN 116256375 A CN116256375 A CN 116256375A
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China
Prior art keywords
sample
scanning
lbic
data
fast
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CN202310231408.9A
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Chinese (zh)
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张宏超
蔡谦
陆健
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Nanjing University of Science and Technology
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Nanjing University of Science and Technology
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Priority to CN202310231408.9A priority Critical patent/CN116256375A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Abstract

The invention discloses a fast LBIC scanning device and a method based on non-uniform sampling, wherein the device comprises a continuous laser, an optical fiber collimator, a beam expander, an attenuation sheet, a galvanometer, a field lens, a sample, an electric lifting translation table, a source meter and a PC; the continuous laser is connected with the optical fiber collimator through the optical fiber, and then the optical fiber collimator, the beam expanding lens, the attenuation sheet and the vibrating mirror are sequentially arranged on the first optical axis, the optical path vertically incident on the sample after passing through the vibrating mirror is a second optical axis, and the vibrating mirror, the field lens, the sample and the electric lifting translation table are sequentially arranged on the second optical axis. The device is based on a method for non-uniformly sampling the sample data, densely samples the pixel points of the defect part of the solar cell sample, sparsely samples the pixel points of other parts of the sample, can obtain the current data and the high-resolution distribution diagram of the defect part of the solar cell sample more rapidly and accurately, and is more beneficial to analyzing the defect condition of the sample.

Description

Rapid LBIC scanning device and method based on non-uniform sampling
Technical Field
The invention relates to the field of defect detection of solar cells, in particular to a rapid LBIC scanning device and method based on non-uniform sampling.
Background
The light beam induced current imaging (Light beam induced current mapping, LBIC mapping) technology is a technology for detecting internal defects of a solar cell by imaging. The LBIC technique scans over the sample surface by focusing the measuring beam into a tiny spot. On one hand, the advantage of high resolution of the image can more clearly reflect the damage condition of the sample; on the other hand, the photoelectric property of the sample can be obtained by analyzing a series of electrical parameters such as current, voltage and the like on the image. Therefore, the method is widely applied to the defect detection field of the solar cell.
The LBIC scanning device, when detecting a sample, performs data analysis if a defective portion of the sample is to be analyzed. When the scanning step length of the device is set, if the scanning step length is larger, the resolution of the obtained photocurrent distribution diagram is lower, the accuracy of the acquired current data is not high, and the time required by the scanning of the device is shorter at the moment; the smaller the scanning step. The higher the resolution of the resulting photocurrent profile, the higher the accuracy of the acquired current data, but the longer the time required for the device to scan.
While the presently disclosed LBIC scanning apparatus scans the sample in the same scanning step for the defective area and other areas of the sample, the data for the non-area portion is negligible, and the apparatus has to scan the area portion to obtain the data for the defective portion, which takes a lot of time.
Disclosure of Invention
The invention aims to provide a rapid LBIC scanning device and method based on non-uniform sampling, which are used for detecting and analyzing the defect condition of a solar cell sample, can rapidly lock the defect area of the sample and obtain refined data and a photocurrent distribution diagram with high resolution, and has the advantages of simple operation process, high efficiency, high experimental data precision and high accuracy.
The technical scheme for realizing the purpose of the invention is as follows: a fast LBIC scanning device based on non-uniform sampling comprises a continuous laser, an optical fiber collimator, a beam expander, an attenuation sheet, a galvanometer, a field lens, a sample, an electric lifting translation table, a source meter and a PC; the continuous laser is connected with the optical fiber collimator through optical fibers, and then the optical fiber collimator, the beam expanding lens, the attenuation sheet and the vibrating mirror are sequentially arranged on a first optical axis, a light path vertically incident on the sample after passing through the vibrating mirror is a second optical axis, and the vibrating mirror, the field lens, the sample and the electric lifting translation table are sequentially arranged on a second optical axis, wherein the vibrating mirror is arranged on the first optical axis and the second optical axis; placing the sample on an electric lifting translation table; the source meter and the PC are positioned on one side of the second optical axis, the PC is respectively connected with the vibrating mirror and the source meter, one end of the source meter is connected with the PC, and the other end of the source meter is connected with the sample.
The invention also provides a fast LBIC scanning method based on non-uniform sampling, which comprises the following steps:
step 1, placing a sample on an electric lifting translation table, adjusting the electric lifting translation table to enable the vertical distance between the sample and a field lens to be equal to the focal length of the field lens, and turning to step 2;
step 2, debugging a specific light path to ensure that the laser emitted by the continuous laser obtains a circular light spot with the diameter smaller than 100 mu m on a sample after passing through an optical fiber collimator, a beam expander, an attenuation sheet, a galvanometer and a field lens, and turning to step 3;
step 3, calibrating the sample to ensure that the scanning step length can be set in the PC, and switching to step 4;
step 4, setting a scanning step length with an initial value of 150 mu m in a PC according to the size of the sample area, performing coarse scanning on the sample, obtaining current sampling data of the sample and a low-resolution photocurrent distribution diagram after the scanning is completed, and turning to step 5;
step 5, locking a region with the largest gradient difference of the current sampling data in the sample, setting a scanning step length of 75 mu m in the region, and carrying out finer scanning on the region, namely carrying out intensive sampling on the current data of the region; the scanning step length of other areas of the sample is still 150 mu m; after the completion, refined current sampling data and a high-resolution photocurrent distribution diagram of the regional sample are obtained, and the step 6 is carried out;
step 6, locking the area with the largest gradient difference of the refined current sampling data in the sample again, setting a scanning step length of 30 mu m in the area, and carrying out finer scanning on the area, namely obtaining the finer current sampling data of the sample in the area and a photocurrent distribution diagram with higher resolution after finishing the data scanning of the area, and the like; the minimum scanning step size is set to 1 μm.
Compared with the prior art, the invention has the remarkable advantages that: (1) The defect area of the sample can be rapidly locked by utilizing the gradient difference of the data, fine scanning is carried out on the defect area, rough scanning is carried out on other areas, and the accuracy is high; (2) The operation process is simple, and the collected data can be obtained only by setting a specific scanning step length; (3) The high-precision collected data can be obtained, and the analysis of sample defects is facilitated.
Drawings
FIG. 1 is a schematic diagram of a LBIC fast scanning apparatus based on non-uniform sampling according to the present invention.
Detailed Description
The technical scheme of the present invention will be clearly and completely described below with reference to the accompanying drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by one of ordinary skill in the art without creative efforts, are within the scope of the present invention based on the embodiments of the present invention.
Referring to fig. 1, the method and the device for fast scanning LBIC based on non-uniform sampling according to the present invention include a continuous laser 1, an optical fiber collimator 2, a beam expander 3, an attenuation sheet 4, a galvanometer 5, a field lens 6, a sample 7, an electric lifting translation stage 8, a source meter 9, and a PC 10. The continuous laser 1 is connected with the optical fiber collimator 2 through optical fibers at first, and then the optical fiber collimator 2, the beam expander 3, the attenuation sheet 4 and the vibrating mirror 5 are sequentially arranged on a first optical axis, an optical path vertically incident on the sample 8 after passing through the vibrating mirror 5 is a second optical axis, and the vibrating mirror 5, the field mirror 6, the sample 7 and the electric lifting translation table 8 are sequentially arranged on the second optical axis, wherein the vibrating mirror 5 is arranged on the first optical axis and the second optical axis; the sample 7 is placed on an electric lifting translation stage 8. Also located on the second optical axis side are a source meter 9 and a PC 10, and a vibrating mirror 5 and a source meter 9 are connected with the PC 10, wherein one end of the source meter 9 is connected with the PC 10, and the other end is connected with the sample 7.
The laser emitted by the continuous laser 1 is invisible light with the wavelength of 980nm, and a display card is needed to adjust the light path in the experiment; the laser is changed into parallel light through the optical fiber collimator 2, then the laser facula is enlarged through the beam expander 3, and then the laser facula is focused on the surface of the sample 8 after sequentially passing through the attenuation sheet 4, the vibrating mirror 5 and the field lens 6; the diameter of the light spot focused on the surface of the sample 7 by the field lens 6 is smaller than 100 mu m; the vertical distance between the field lens 6 and the sample 7 is the focal length of the field lens 6, and the diameter of a light spot focused on the surface of the sample 7 through the field lens 6 is smaller than 100 mu m; the PC 10 controls the scanning step length of the galvanometer 5, and the resolution of the image can be adjusted by changing the scanning step length of the galvanometer 5. The data acquisition of the source table 9 also starts when the scan starts. The data for each point collected by the source table 9 is the data for each point scanned by the galvanometer 5 over the sample. After the sample 7 is scanned, current collection data and a photocurrent distribution diagram of the sample 7 can be obtained on the PC 10.
The method for detecting and analyzing the defect condition of the solar cell based on the non-uniform sampling rapid LBIC scanning method and the device thereof comprises the following operation steps:
step 1: and placing the sample on the electric lifting translation table, and adjusting the electric lifting translation table to enable the vertical distance between the sample and the field lens to be equal to the focal length of the field lens.
Step 2: and (3) debugging a specific light path to ensure that the laser emitted by the continuous laser obtains a circular light spot with the diameter smaller than 100 mu m on the sample after passing through the optical fiber collimator, the beam expander, the attenuation sheet, the vibrating mirror and the field lens.
Step 3: the sample is calibrated, so that a proper scanning step length can be set in the PC.
Step 4: according to the size of the sample area, firstly setting a scanning step length of 150 mu m in a PC, carrying out rough scanning on the sample, and obtaining current sampling data and a low-resolution photocurrent distribution diagram of the sample after the scanning is completed.
Step 5: locking a region (namely a defect region) with the largest gradient difference of current sampling data in a sample, setting a 75 mu m scanning step length in the region, and carrying out finer scanning on the region, namely carrying out intensive sampling on the current data of the region. While the scanning step of the other areas of the sample is still 150 μm. And obtaining refined current sampling data of the area sample and a high-resolution photocurrent distribution diagram after the current sampling data are finished.
Step 6: locking the region with the largest gradient difference of the refined current sampling data in the sample again, setting a scanning step length of 30 mu m in the region, and carrying out finer scanning on the region, namely obtaining the finer current sampling data of the sample in the region and a photocurrent distribution diagram with higher resolution after finishing the data scanning of the region, and the like; the scanning step size can be set to 1 μm at a minimum.

Claims (10)

1. The fast LBIC scanning device based on non-uniform sampling is characterized by comprising a continuous laser (1), an optical fiber collimator (2), a beam expander (3), an attenuation sheet (4), a galvanometer (5), a field lens (6), a sample (7), an electric lifting translation table (8), a source meter (9) and a PC (10); the continuous laser (1) is connected with the optical fiber collimator (2) through optical fibers, and then the optical fiber collimator (2), the beam expanding lens (3), the attenuation sheet (4) and the vibrating mirror (5) are sequentially arranged on a first optical axis, a light path which vertically enters the sample (8) after passing through the vibrating mirror (5) is a second optical axis, and the vibrating mirror (5), the field mirror (6), the sample (7) and the electric lifting translation table (8) are sequentially arranged on a second optical axis, wherein the vibrating mirror (5) is arranged on the first optical axis and the second optical axis; the sample (7) is placed on the electric lifting translation table (8); the source meter (9) and the PC (10) are positioned on one side of the second optical axis, the PC (10) is respectively connected with the vibrating mirror (5) and the source meter (9), one end of the source meter (9) is connected with the PC (10), and the other end of the source meter is connected with the sample (7).
2. The fast LBIC scanning device based on non-uniform sampling according to claim 1, wherein the laser light emitted by the continuous laser (1) is invisible light with a wavelength of 980 nm.
3. The fast LBIC scanning device based on non-uniform sampling according to claim 2, wherein the laser emitted by the continuous laser (1) is turned into parallel light by the optical fiber collimator (2), and then the laser spot is enlarged by the beam expander (3), and then the laser spot is focused on the surface of the sample (8) after sequentially passing through the attenuation sheet (4), the galvanometer (5) and the field lens (6).
4. A fast LBIC scanning device based on non-uniform sampling according to claim 3, characterized in that the spot diameter focused on the surface of the sample (7) by the field lens (6) is smaller than 100 μm.
5. The fast LBIC scanning device based on non-uniform sampling according to claim 4, characterized in that the vertical distance of the field lens (6) from the sample (7) is the focal length of the field lens (6).
6. The fast LBIC scanning device based on non-uniform sampling according to claim 5, wherein the PC (10) controls the scanning step of the galvanometer (5) to adjust the resolution of the image by changing the scanning step of the galvanometer (5).
7. A fast LBIC scanning device based on non-uniform sampling according to claim 6, characterised in that different scanning steps are adjusted for different areas of the sample (7).
8. The fast LBIC scanning device based on non-uniform sampling according to claim 7, wherein when scanning starts, the source table (9) starts data acquisition synchronously, and the data of each point acquired by the source table (9) is the data of each point scanned by the galvanometer (5) on the sample.
9. The fast LBIC scanning device based on non-uniform sampling according to claim 8, wherein the current acquisition data and photocurrent profile of the sample (7) are obtained on a PC (10) after the sample (7) is scanned.
10. Scanning method based on a fast LBIC scanning device based on non-uniform sampling according to any of claims 1-9, characterized in that it comprises the steps of:
step 1, placing a sample (7) on an electric lifting translation table (8), adjusting the electric lifting translation table (8) to enable the vertical distance between the sample (7) and a field lens (6) to be equal to the focal length of the field lens (6), and turning to step 2;
step 2, a specific light path is adjusted, so that a circular light spot with the diameter smaller than 100 mu m is obtained on a sample (7) after laser emitted by a continuous laser (1) passes through an optical fiber collimator (2), a beam expander (3), an attenuation sheet (4), a galvanometer (5) and a field lens (6), and the step 3 is carried out;
step 3, calibrating the sample (7), ensuring that the scanning step length can be set in the PC (10), and switching to step 4;
step 4, setting a scanning step length with an initial value of 150 mu m in a PC (10) according to the area of the sample (7), performing coarse scanning on the sample (7), obtaining current sampling data of the sample (7) and a low-resolution photocurrent distribution diagram after the scanning is completed, and turning to step 5;
step 5, locking a region with the largest gradient difference of the current sampling data in the sample (7), setting a scanning step length of 75 mu m in the region, and carrying out finer scanning on the region, namely carrying out intensive sampling on the current data of the region; the scanning step length of other areas of the sample is still 150 mu m; after the completion, refined current sampling data and a high-resolution photocurrent distribution diagram of the regional sample (7) are obtained, and the step 6 is carried out;
step 6, locking the area with the largest gradient difference of the refined current sampling data in the sample (7), setting a scanning step length of 30 mu m in the area, and carrying out finer scanning on the area, namely obtaining the finer current sampling data of the sample (7) in the area and a photocurrent distribution diagram with higher resolution after finishing the data scanning of the area, and the like; the minimum scanning step size is set to 1 μm.
CN202310231408.9A 2023-03-07 2023-03-07 Rapid LBIC scanning device and method based on non-uniform sampling Pending CN116256375A (en)

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CN202310231408.9A CN116256375A (en) 2023-03-07 2023-03-07 Rapid LBIC scanning device and method based on non-uniform sampling

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Application Number Priority Date Filing Date Title
CN202310231408.9A CN116256375A (en) 2023-03-07 2023-03-07 Rapid LBIC scanning device and method based on non-uniform sampling

Publications (1)

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CN116256375A true CN116256375A (en) 2023-06-13

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