CN116254980A - Comprehensive elevated floor - Google Patents

Abstract

The utility model provides a comprehensive elevated floor, includes sky board and rib structure, and this rib structure forms a plurality of main ribs that highly are 25 millimeter at least on this sky board to promote the structural strength of this comprehensive elevated floor, so when this comprehensive elevated floor bear the heavier board equipment in the semiconductor technology, can avoid this comprehensive elevated floor to take place cracked problem.

Description

Comprehensive elevated floor

Technical Field

The invention relates to a floor, in particular to a comprehensive elevated floor with a rib structure.

Background

In the existing semiconductor factory building, a raised floor with a plurality of micro-holes is configured to clean the air quality of the environment and ensure the specification of the clean room.

At present, raised floors are manufactured in a die casting mode. In the die casting process, a die is used to manufacture a desired product, and before the die casting operation is performed, a release layer is coated in the die to facilitate the subsequent demolding operation.

However, the structural strength of the existing raised floor is often insufficient, so that when the raised floor is used for carrying heavy equipment in the semiconductor process, the raised floor is easy to crack. On the other hand, there is also a problem that the raised floor is excessively heavy, not only wastes materials, but also increases manufacturing costs.

Therefore, how to overcome the above-mentioned problems in the prior art has become a major challenge in the industry.

Disclosure of Invention

In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a comprehensive raised floor, which can avoid the problem of chipping of the comprehensive raised floor.

The integrated raised floor of the present invention comprises: a ceiling having opposite ground and honeycomb sides; and a rib structure disposed on the honeycomb side of the antenna plate to form a plurality of recesses, wherein the rib structure is sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, and the first, third, fifth and seventh ribs are used as main ribs with a height of at least 25 mm relative to the honeycomb side, and the second, fourth and sixth ribs are used as middle ribs with a height of less than 25 mm relative to the honeycomb side.

In the above-mentioned integrated raised floor, the plurality of concave portions are arranged in an array to form a honeycomb structure on the honeycomb side.

In the above-mentioned integrated raised floor, the first rib is formed on the edge of the ceiling to form a side rib of the integrated raised floor, so as to serve as a frame of the integrated raised floor for fixedly connecting with the foot stand.

In the integrated raised floor, the height of the first rib relative to the honeycomb side is higher than the height of the second rib to the seventh rib relative to the honeycomb side, the sum of the heights of the first rib and the ceiling plate is 47 to 58 mm, and the thickness of the ceiling plate is 2.5 to 3.2 mm.

In the above-described integrated raised floor, the width of the first rib is 7 to 8 mm.

In the integrated raised floor, the third rib has a height of 25 to 38 mm relative to the honeycomb side, the fifth rib has a height of 32 to 38 mm relative to the honeycomb side, and the seventh rib has a height of 34.5 to 45 mm relative to the honeycomb side.

In the above-mentioned integrated raised floor, the width of the third rib is 2.5 to 3 mm, the width of the fifth rib is 2.5 to 3 mm, and the width of the seventh rib is 4 to 6 mm.

In the above-described integrated raised floor, the second, fourth and sixth ribs have a height of 8 to 20 mm with respect to the honeycomb side.

In the above-described integrated raised floor, the width of the second, fourth and sixth ribs is 2.5 to 3.2 mm.

In the above-mentioned integrated raised floor, the rib structure further comprises a plurality of auxiliary ribs having a height lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses, so that a plurality of the auxiliary ribs are disposed in a single recess. For example, the plurality of auxiliary ribs extend in multiple directions to be staggered with each other. Alternatively, the plurality of auxiliary ribs extend in a single direction without being staggered with each other. Further, the height of the auxiliary rib with respect to the honeycomb side is 2 to 6 mm, and the width thereof is 2.5 to 3 mm.

In the above-mentioned integrated raised floor, a plurality of through holes are formed in the ceiling plate to communicate the floor side and the honeycomb side, and the positions of the plurality of through holes correspond to the plurality of concave portions.

In the above-mentioned integrated raised floor, the rib structure forms a cross rib with two seventh ribs in the longitudinal direction and the transverse direction, so as to divide the integrated raised floor into four areas, and 25 sub-areas are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib in the four areas, each sub-area has a concave portion, the first rib to the sixth rib are symmetrically distributed based on the cross rib, another concave portion is formed at the central portion of the cross rib formed by the seventh rib, a cross rib is configured in the concave portion, and a wing plate is formed around the top plate, so that the height of the cross rib and the thickness of the wing plate are both greater than the thickness of the top plate, and the strength of the integrated raised floor at the middle position is improved. For example, 21 other sub-regions are separated from each other by the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib, and nine through holes are formed in each sub-region, but the through holes are not formed in the sub-region at the central portion of the cross rib.

As can be seen from the above, in the integrated raised floor of the present invention, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm, and the width and height of the middle rib are not too much lower than 25 mm, so as to improve the structural strength of the integrated raised floor (e.g. at least 700 kg of equipment can be carried), so that the integrated raised floor can bear heavier equipment in the semiconductor process, compared with the prior art, to avoid the problem of cracking of the integrated raised floor in use.

Drawings

Fig. 1A is a perspective view of a first embodiment of the integrated raised floor of the present invention.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B taken along line C-C in one direction.

FIG. 1D is a cross-sectional view of FIG. 1B taken along line D-D in another direction.

Fig. 1E is a schematic perspective view of the other view of fig. 1A.

Fig. 2A is a perspective view of a second embodiment of the integrated raised floor of the present invention.

FIG. 2B is a cross-sectional view of FIG. 2A taken along line X-X in one direction.

Fig. 3A is a perspective view of a third embodiment of the integrated raised floor of the present invention.

Fig. 3B is a front plan view of fig. 3A.

FIG. 3C is a cross-sectional view of FIG. 3B taken along line C-C in one direction.

Fig. 3D is a cross-sectional view of fig. 3B taken along the line D-D in another direction.

Fig. 4A is a perspective view of a fourth embodiment of the integrated raised floor of the present invention.

Fig. 4B is a front plan view of fig. 4A.

Fig. 4C is a cross-sectional view of fig. 4B taken along line C-C in one direction.

Fig. 5A is a perspective view of a fifth embodiment of the integrated raised floor of the present invention.

Fig. 5B is a cross-sectional view of fig. 5A taken along line X-X in one direction.

Fig. 6A is a perspective view of a sixth embodiment of the integrated raised floor of the present invention.

FIG. 6B is a cross-sectional view of FIG. 6A taken along line X-X in one direction.

Fig. 7A is a perspective view of a seventh embodiment of the integrated raised floor of the present invention.

Fig. 7B is a cross-sectional view of fig. 7A taken along line X-X in one direction.

Fig. 8A is a front plan view of an eighth embodiment of the integrated raised floor of the present invention. Fig. 8B and 8C are front plan views of other embodiments of fig. 8A. Fig. 8D is a schematic perspective view of the other view of fig. 8A.

The reference numerals are as follows:

1,2,3,4,5,6,7, 8-comprehensive elevated floor

1a,2a,3a,4a,5a,6a,7a: rib structure

1b,2b,3b,4b,5b,6b,7b: footstand

1c thimble position

1d,2d,3d,4d,5d,6d,7d wing plate

10,20,30,40,50,60,70: day plate

10a,20a,30a,40a,50a,60a,70a: floor side

10b,20b,30b,40b,50b,60b,70b honeycomb side

11,21,31,41,51,61,71 first rib

12,22,32,42,52,62,72 second rib

13,23,33,43,53,63,73 third rib

14,14a,24,34 a,44 a,54,64,74 fourth ribs 15,25,35 a,45,55,65,75 fifth ribs

16,16a,26,36 a,46a,56,66,76 sixth ribs 17,27,37,47,57,67,77 seventh ribs

17a,27a,37a,47a,57a,67a,77a cross-shaped rib

38,48,58,68,78 auxiliary ribs

80:punch hole

d1 to d8 width

H total height of

h0 to h8 height

Length L

R, S, recess

Height of T

t0, t1 thickness

Distance of separation w

Detailed Description

Further advantages and effects of the present invention will become apparent to those skilled in the art from the disclosure of the present invention by the following specific examples.

It should be understood that the structures, proportions, sizes, etc. shown in the drawings attached hereto are for the purpose of understanding and reading only and are not intended to limit the scope of the invention, which is defined by the appended claims, but rather by the appended claims. Also, the terms such as "upper", "lower", "left", "right" and "a" and the like are used in the present specification for convenience of description, but are not intended to limit the scope of the present invention, and the relative changes or modifications thereof are considered to be within the scope of the present invention without substantial modification of the technical content.

Fig. 1A, 1B, 1C, 1D and 1E are schematic views of a first embodiment of the integrated raised floor 1 of the present invention. The integrated raised floor 1 of the present embodiment is a standard type, which is used for carrying a heavy load, such as about 1000 kg.

The integrated raised floor 1 has a ceiling 10 and a rib structure 1a provided on the ceiling 10.

The antenna board 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with the rib structures 1a in the longitudinal direction and the transverse direction respectively to form a plurality of recesses S between the longitudinal rib structures 1a and the transverse rib structures 1a, wherein fig. 1C shows the longitudinal rib structures 1a and fig. 1D shows the transverse rib structures 1a.

In this embodiment, the top board 10 is a rectangular body, such as a square board, with a length L of 600 mm and a thickness t0 of 3.2 mm, and a wing board 1d (with a thickness t1 of 6 mm, greater than the thickness t0 of the top board 10) is formed around the top board 10, and the four corners of the top board 10 are formed with feet 1b, wherein the bottom of the feet 1b is L-shaped (or L-shaped concave) for fixing a supporting foot stand (not shown). For example, the footstand 1b is used to adjust the overall height H of the integrated raised floor 1 such that a plurality of integrated raised floors 1 are located at the same horizontal plane.

Furthermore, the ground side 10a is a flat surface, and a plurality of recesses S are arranged in an array to form a honeycomb structure having a plurality of ejector pins 1c (at about the corners of the square area formed by every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is defined with a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 from the edge of the ceiling 10 to the middle (or in the left-right direction as shown in fig. 1B and 1C), and the heights h1, h3, h5, h7 of the first, third, fifth and seventh ribs 11,13,15,17 relative to the honeycomb side 10B are at least 25 mm (mm), and the heights h2, h4, h6 of the second, fourth and sixth ribs 12,14,16 relative to the honeycomb side 10B are lower than 25 mm, so that the first, third, fifth and seventh ribs 11,13,15,17 are used as main ribs, and the second, fourth and sixth ribs 12,14,16 are used as middle ribs, wherein the first to sixth ribs 11-16 are symmetrically distributed with respect to the seventh rib 17 (in the cross shape) as a reference, or the upper and lower ribs are symmetrically distributed with respect to the heights h2, h4, h6 and h6 of the honeycomb side 10B, so that the distances between the first, third and seventh ribs 11,13,15,17 are symmetrically distributed with respect to the fourth ribs (as shown in fig. 1B and 16, and the fifth and 17 w and the distances between the fourth and 12, 13 and 15 and 17 are respectively).

In this embodiment, the first rib 11 is formed at the edge of the ceiling board 10 to form a side rib of the integrated raised floor 1, so as to serve as a frame of the integrated raised floor 1 for fixedly connecting the foot stand 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 49 mm, which is greater than the heights H2 to H7 of the second to seventh ribs 12 to 17 relative to the honeycomb side 10b, the height sum T of the first rib 11 and the ceiling 10 (i.e., the height of the first rib 11 relative to the ground side 10 a) is 52.2 mm (i.e., t=h1+t0), and the total height H of the footstand 1b, the first rib 11 and the ceiling 10 (i.e., the foot height of the integrated raised floor 1) is 55 mm.

Furthermore, the heights h2 to h7 of the second to seventh ribs 12 to 17 of the rib structure 1a may be the same or different as required, as shown in fig. 1C. For example, the height h3 of the third rib 13 relative to the honeycomb side 10b is 36 mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 36 mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 36 mm, the height h2 of the second rib 12 relative to the honeycomb side 10b is 20 mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 20 mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 20 mm, wherein the two seventh ribs 17 in the longitudinal and transverse directions form a cross rib to divide the integrated raised floor 1 into four areas, 25 sub-areas are formed between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16 adjacent to each other, each sub-area has a recess S, and a recess R of another embodiment is formed at the center of the cross rib. Further, the thickness of the ceiling board 10 in the recess R is 5.2 mm (greater than the thickness t0 of the ceiling board 10), and the cross-shaped ribs 17a are disposed in the recess R, the height h0 of the cross-shaped ribs relative to the honeycomb side 10b is 12 mm (greater than the thickness t0 of the ceiling board 10), and the thickness of the ceiling board 10 in the recess R can be greater than the thickness 2 mm of the ceiling board 10 as required to improve the compressive strength of the integrated raised floor 1 at the middle. It should be understood that the thickness of the ceiling 10 in the recess R may be the same as the thickness t0 of the ceiling 10, and the heights h2 to h6 of the second to sixth ribs 12 to 16 are regularly designed.

In addition, the widths d 1-d 7 of the ribs may be the same or different as desired, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 8 mm, the width d2 of the second rib 12 is 2.7 mm, the width d3 of the third rib 13 is 2.7 mm, the width d4 of the fourth rib 14 is 2.5 mm, the width d5 of the fifth rib 15 is 2.7 mm, the width d6 of the sixth rib 16 is 2.7 mm, and the width d7 of the seventh rib 17 is 4.8 mm.

In addition, since the rib structure 1a is designed in the other direction (up-down direction as shown in fig. 1B) and the other ribs are the same size except for the fourth rib 14a and the sixth rib 16a as shown in fig. 1D, the heights h4, h6 of the fourth and sixth ribs 14a,16a relative to the honeycomb side 10B can be adjusted to be 10 mm, and the width D4 of the fourth rib 14a is 2.7 mm.

As can be seen from the above, the thickness t0 of the ceiling 10 of the integrated raised floor 1 is smaller, and the partial heights h2, h4, h6 of the rib structures 1a are also smaller, i.e. the heights h2, h4, h6 of the middle ribs (the second, fourth and sixth ribs 12,14, 16) are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 11,13,15, 17), so as to facilitate saving materials and reducing weight.

Fig. 2A and 2B are schematic views of a second embodiment of the integrated raised floor 2 of the present invention. The integrated raised floor 2 of the present embodiment is a standard type, which is used for carrying a heavy load, such as about 1000 kg, and is different from the first embodiment in that the local height of the rib structure 2a is changed, so the same parts will not be described in detail.

In the present embodiment, the thickness T0 of the ceiling 20 is 2.5 mm, the height H1 of the first rib 21 relative to the honeycomb side 20b is 50.5 mm, the height sum T of the first rib 21 and the ceiling 20 (i.e., the height of the first rib 21 relative to the ground side 20 a) is 53 mm (i.e., t=h1+t0), the total height H of the foot rest 2b, the first rib 21 and the ceiling 20 (i.e., the foot height of the integrated raised floor 2) is 55 mm, the thickness T1 of the wing plate 2d is 6 mm, the first rib 21 is formed at the edge of the ceiling 20 to form the side rib of the integrated raised floor 2 to form the side frame of the integrated raised floor 2, and the first to sixth ribs 21 to 26 are distributed symmetrically left and right (or vertically symmetrically as shown in fig. 2A) with respect to the seventh rib 27.

In the rib structure 2a, as shown in fig. 2B, the height h3 of the third rib 23 relative to the honeycomb side 20B is 25 mm, the height h5 of the fifth rib 25 relative to the honeycomb side 20B is 32 mm, the height h7 of the seventh rib 27 relative to the honeycomb side 20B is 45 mm, the height h2 of the second rib 22 relative to the honeycomb side 20B is 8 mm, the height h4 of the fourth rib 24 relative to the honeycomb side 20B is 8 mm, and the height h6 of the sixth rib 26 relative to the honeycomb side 20B is 8 mm. On the other hand, the thickness of the ceiling board 20 at the recess R is increased to 5.5 mm (i.e., greater than the thickness t0 of the ceiling board 20 at other locations by about 3 mm), and the cross-shaped ribs 27a are disposed in the recess R, which have a height h0 of 10 mm (greater than the thickness t0 of the ceiling board 20) with respect to the honeycomb side 20b, so as to enhance the compressive strength of the integrated raised floor 2 at the middle.

In addition, the widths d 1-d 7 of the ribs may be the same or different as desired, as shown in FIG. 2B. For example, the width d1 of the first rib 21 is 7.5 mm, the width d2 of the second rib 22 is 2.5 mm, the width d3 of the third rib 23 is 2.5 mm, the width d4 of the fourth rib 24 is 2.5 mm, the width d5 of the fifth rib 25 is 2.5 mm, the width d6 of the sixth rib 26 is 2.5 mm, and the width d7 of the seventh rib 27 is 4.5 mm.

In addition, the rib structure 2A is designed in the other direction (the up-down direction as shown in fig. 2A) as shown in fig. 2B.

As can be seen from the above, the heights h2, h4, h6 of the rib structures 2a of the integrated raised floor 2 are smaller, i.e. the heights h2, h4, h6 of the middle ribs (the second, fourth and sixth ribs 22,24, 26) are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 21,23,25, 27), even the thickness t0 (e.g. 2.5 mm) of the ceiling 20 is smaller than that of the first embodiment, and the specification of the footstand 2b, the length L of the ceiling 20 is 600 mm and the thickness t1 of the wing plate 2d is 6 mm, which are the same as those of the first embodiment, so as to facilitate saving materials and reducing weight.

Fig. 3A, 3B, 3C and 3D are schematic views of a third embodiment of the integrated raised floor 3 according to the present invention. The integrated raised floor 3 of the present embodiment is light, and is used for carrying a light load, for example, about 700 kg, and the difference from the second embodiment is that the height of most of the rib structures 3a is reduced due to about 300 kg of the load, and the auxiliary ribs 38 are added to the rib structures 3a, so the details of the steps are not repeated.

As shown in fig. 3A, 3B and 3C, the rib structure 3A is additionally provided with a plurality of auxiliary ribs 38 having a volume much smaller than that of other ribs, the height h8 (e.g. 2 mm) of the auxiliary ribs relative to the honeycomb side 30B is lower than the heights h2, h4, h6 of the middle ribs relative to the honeycomb side 30B, and the width d8 is 3 mm. For example, a plurality of auxiliary ribs 38 are formed in each of the recesses S so as to extend in both directions and to intersect each other, and two intersecting auxiliary ribs 38 are arranged in a single recess S as shown in fig. 3B.

In the present embodiment, the thickness T0 of the ceiling 30 is 3 mm, the bottom of the foot rest 3B is shaped like a convex (or concave) mouth, the height H1 of the first rib 31 relative to the honeycomb side 30B is 44 mm, the height sum T of the first rib 31 and the ceiling 30 (i.e., the height of the first rib 31 relative to the ground side 30 a) is 47 mm (i.e., t=h1+t0), and the total height H of the foot rest 3B, the first rib 31 and the ceiling 30 is 55 mm, wherein the thickness T1 of the wing plate 3d is 6.25 mm, the first rib 31 is formed at the edge of the ceiling 30 to be a side rib of the integrated raised floor 3 to serve as a frame of the integrated raised floor 3, and the first to sixth ribs 31 to 36 are distributed symmetrically left and right (or vertically symmetrically as shown in fig. 3B) with respect to the seventh rib 37.

In the rib structure 3a, as shown in fig. 3C, the height h3 of the third rib 33 relative to the honeycomb side 30b is 34.5 mm, the height h5 of the fifth rib 35 relative to the honeycomb side 30b is 34.5 mm, the height h7 of the seventh rib 37 relative to the honeycomb side 30b is 34.5 mm, the height h2 of the second rib 32 relative to the honeycomb side 30b is 19 mm, the height h4 of the fourth rib 34 relative to the honeycomb side 30b is 19 mm, and the height h6 of the sixth rib 36 relative to the honeycomb side 30b is 19 mm. On the other hand, the thickness of the ceiling board 30 at the recess R is the same as the thickness t0 at other places (or may be thicker at the recess R, for example, about 3 mm greater than the thickness t0 of the ceiling board 20 at other places), and the cross-shaped ribs 37a are disposed in the recess R, which have a height h0 of 8 mm (greater than the thickness t0 of the ceiling board 30) with respect to the honeycomb side 30b, so as to improve the compressive strength of the integrated raised floor 3 at the middle.

In addition, the widths d 1-d 7 of the ribs may be the same or different as desired, as shown in FIG. 3C. For example, the width d1 of the first rib 31 is 7 mm, the width d2 of the second rib 32 is 3.2 mm, the width d3 of the third rib 33 is 3 mm, the width d4 of the fourth rib 34 is 3.2 mm, the width d5 of the fifth rib 35 is 3 mm, the width d6 of the sixth rib 36 is 3.2 mm, and the width d7 of the seventh rib 37 is 4 mm.

In addition, the heights h4 to h6 of the fourth to sixth ribs 34,35,36 of the integrated raised floor 3 are sequentially low/high/low, so that the height h4 to h6 of the fourth to sixth ribs 34a,35a,36a can be adjusted by designing the rib structure 3a in another direction as shown in fig. 3D. For example, the height h4 of the fourth rib 34a relative to the honeycomb side 30b is 6 mm, the height h5 of the fifth rib 35a relative to the honeycomb side 30b is 19 mm, and the height h6 of the sixth rib 36a relative to the honeycomb side 30b is 6 mm, so that the heights h4 to h6 of the fourth to sixth ribs 34a,35a,36a are still arranged in order of low/high/low, but the fifth rib 35a becomes a middle rib, and the width d5 of the fifth rib 35 becomes 3.2 mm.

As can be seen from the above, the partial heights h2, h4, h6 of the rib structures 3a of the integrated raised floor 3 are smaller, i.e. the heights h2, h4, h6 of the middle ribs (the second, fourth and sixth ribs 32,34, 36) are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 31,33,35, 37), and the length L of the ceiling 30 is 600 mm, which is the same as that of the first embodiment, so as to facilitate saving materials and reducing weight.

Fig. 4A, 4B and 4C are schematic views of a fourth embodiment of the integrated raised floor 4 of the present invention. The integrated raised floor 4 of the present embodiment is light, and is used for carrying a light load, such as about 700 kg, and the difference from the third embodiment is the design of the auxiliary ribs 48, so the same parts will not be described in detail below.

As shown in fig. 4A, 4B and 4C, the auxiliary ribs 48 of the rib structure 4A are correspondingly formed in each of the recesses S, and extend in a single direction without being staggered with each other, so as to arrange two parallel auxiliary ribs 48 in a single recess S.

In the present embodiment, the thickness T0 of the ceiling plate 40 is 3 mm, the bottom of the foot stand 4B is shaped like a convex (or concave) in a mouth, the height H1 of the first rib 41 relative to the honeycomb side 40B is 44 mm, the height sum T of the first rib 41 and the ceiling plate 40 (i.e., the height of the first rib 41 relative to the ground side 40 a) is 47 mm, and the total height H of the foot stand 4B, the first rib 41 and the ceiling plate 40 is 55 mm, wherein the thickness T1 of the wing plate 4d is 6 mm, the first rib 41 is formed at the edge of the ceiling plate 40 to be a side rib of the integrated raised floor 4 as a side frame of the integrated raised floor 4, and the first to sixth ribs 41 to 46 are distributed symmetrically about the seventh rib 47 (or vertically symmetrical as shown in fig. 4B).

In the rib structure 4a, as shown in fig. 4C, the height h3 of the third rib 43 relative to the honeycomb side 40b is 38 mm, the height h5 of the fifth rib 45 relative to the honeycomb side 40b is 38 mm, the height h7 of the seventh rib 47 relative to the honeycomb side 40b is 38 mm, the height h2 of the second rib 42 relative to the honeycomb side 40b is 18 mm, the height h4 of the fourth rib 44 relative to the honeycomb side 40b is 18 mm, and the height h6 of the sixth rib 46 relative to the honeycomb side 40b is 18 mm. On the other hand, the thickness of the ceiling board 40 at the recess R is 5 mm (about 3 mm greater than the thickness t0 at other places), and the cross-shaped ribs 47a are arranged in the recess R, the height h0 of which with respect to the honeycomb side 40b is 12 mm (greater than the thickness t0 of the ceiling board 40), so as to improve the compressive strength of the integrated raised floor 4 at the middle.

In addition, the widths d 1-d 7 of the ribs may be the same or different as desired, as shown in FIG. 4C. For example, the width d1 of the first rib 41 is 7.5 mm, the width d2 of the second rib 42 is 3 mm, the width d3 of the third rib 43 is 3 mm, the width d4 of the fourth rib 44 is 3 mm, the width d5 of the fifth rib 45 is 3 mm, the width d6 of the sixth rib 46 is 3 mm, and the width d7 of the seventh rib 47 is 5 mm. Further, the rib structure 4a is designed in the other direction (up-down direction as shown in fig. 4B), and the other ribs are the same size except for the fourth rib 44a and the sixth rib 46a, so that the heights h4, h6 of the fourth and sixth ribs 44a,46a relative to the honeycomb side 40B can be adjusted to be 8 mm, and the widths d4, d6 of the fourth and sixth ribs 44a,46a can be adjusted to be 3.5 mm.

In addition, the height h8 of the auxiliary rib 48 with respect to the honeycomb side 40b is 6 mm, and the width d8 thereof becomes 2.5 mm.

As can be seen from the above, the heights h2, h4, h6 of the rib structures 4a of the integrated raised floor 4 are also smaller, i.e. the heights h2, h4, h6 of the middle ribs (the second, fourth and sixth ribs 42,44, 46) are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 41,43,45,47), and the length L of the ceiling 40 is 600 mm, which is the same as that of the first embodiment, so as to facilitate saving materials and reducing weight.

Fig. 5A and 5B are schematic views of a fifth embodiment of the integrated raised floor 5 of the present invention. The integrated raised floor 5 of the present embodiment is a standard type, which is used for carrying a heavy load, for example, about 1000-1200 kg, and the difference from the first embodiment is that the local height of the rib structure 5a is changed due to about 200 kg of load increase, so the same parts will not be repeated.

In the present embodiment, the thickness T0 of the ceiling plate 50 is 2.5 mm, the height H1 of the first rib 51 relative to the honeycomb side 50b is 50.5 mm, the height sum T of the first rib 51 and the ceiling plate 50 (i.e., the height of the first rib 51 relative to the ground side 50 a) is 53 mm, and the total height H of the foot stand 5b, the first rib 51 and the ceiling plate 50 is 55 mm, wherein the thickness T1 of the wing plate 2d is 6 mm, the first rib 51 is formed at the edge of the ceiling plate 50 to form a side rib of the integrated raised floor 5 as a frame of the integrated raised floor 5, and the first to sixth ribs 51 to 56 are distributed symmetrically about the seventh rib 57 (or vertically as shown in fig. 5A).

In the rib structure 5a, as shown in fig. 5B, the height h3 of the third rib 53 relative to the honeycomb side 50B is 25 mm, the height h5 of the fifth rib 55 relative to the honeycomb side 50B is 32 mm, the height h7 of the seventh rib 57 relative to the honeycomb side 50B is 45 mm, the height h2 of the second rib 52 relative to the honeycomb side 50B is 8 mm, the height h4 of the fourth rib 54 relative to the honeycomb side 50B is 8 mm, and the height h6 of the sixth rib 56 relative to the honeycomb side 50B is 8 mm. On the other hand, the thickness of the ceiling 50 at the recess R is increased to 5.5 mm (i.e., greater than the thickness t0 of the ceiling 50 at other locations by about 3 mm), and the cross-shaped ribs 57a are disposed in the recess R, which have a height h0 of 10 mm (greater than the thickness t0 of the ceiling 50) with respect to the honeycomb side 50b, so as to increase the compressive strength of the integrated raised floor 5 at the middle.

In addition, the widths d 1-d 7 of the ribs may be the same or different as desired, as shown in FIG. 5B. For example, the width d1 of the first rib 51 is 7.5 mm, the width d2 of the second rib 52 is 2.5 mm, the width d3 of the third rib 53 is 2.5 mm, the width d4 of the fourth rib 54 is 2.5 mm, the width d5 of the fifth rib 55 is 2.5 mm, the width d6 of the sixth rib 56 is 2.5 mm, and the width d7 of the seventh rib 57 is 6 mm. Further, the rib structure 5A is designed in the other direction (up-down direction as shown in fig. 5A) as shown in fig. 5B.

The height h8 of the auxiliary rib 58 with respect to the honeycomb side 50b is 3 mm, and the width d8 thereof is 2.5 mm.

As can be seen from the above, the heights h2, h4, h6 of the rib structures 5a of the integrated raised floor 5 are smaller, i.e. the heights h2, h4, h6 of the middle ribs (the second, fourth and sixth ribs 52,54, 56) are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 51,53,55, 57), and the thickness t0 of the ceiling 50 is 2.5 mm and the length L is 600 mm, and the thickness t1 of the wing plate 5d is 6 mm, even the specification of the footstand 5b is the same as that of the first embodiment, so as to facilitate saving materials and reducing weight.

Fig. 6A and 6B are schematic views of a sixth embodiment of the integrated raised floor 6 of the present invention. The integrated raised floor 6 of the present embodiment is a standard type, which is used for carrying a heavy load, for example, about 1000-1200 kg, and the difference from the fifth embodiment is the local height change of the rib structure 6a, so the same parts will not be described in detail.

As shown in fig. 6B, the height h8 of the auxiliary rib 68 with respect to the honeycomb side 60B is 2.5 mm, and the width d8 thereof is still 2.5 mm.

In the present embodiment, the thickness T0 of the ceiling 60 is 2.5 mm, the height H1 of the first rib 61 relative to the honeycomb side 60b is 50.5 mm, the height sum T of the first rib 61 and the ceiling 60 (i.e. the height of the first rib 61 relative to the ground side 60 a) is still 53 mm, and the total height H of the foot stand 6b, the first rib 61 and the ceiling 60 is still 55 mm, wherein the thickness T1 of the wing plate 6d is 6 mm, the first rib 61 is formed at the edge of the ceiling 60 to form a side rib of the integrated raised floor 6 as a frame of the integrated raised floor 6, and the first to sixth ribs 61 to 66 are distributed symmetrically (or vertically symmetrically as shown in fig. 6A) with respect to the seventh rib 67.

Furthermore, in the rib structure 6a, the heights h1 to h7 of the first to seventh ribs 61 to 67 with respect to the honeycomb side 60b are the same as those of the fifth embodiment, and the widths d1 to d7 thereof are also the same as those of the fifth embodiment. On the other hand, the thickness of the top plate 60 at the recess R is the same as that of the fifth embodiment (i.e. greater than the thickness t0 of the top plate 60 at other positions), and the cross-shaped ribs 67a are disposed in the recess R, and the height h0 of the cross-shaped ribs relative to the honeycomb side 60b is 10 mm (greater than the thickness t0 of the top plate 60), so as to improve the compressive strength of the integrated raised floor 6 at the middle position.

As can be seen from the above, the heights h2, h4, h6 of the rib structures 6a of the integrated raised floor 6 are smaller, i.e. the heights h2, h4, h6 of the middle ribs (the second, fourth and sixth ribs 62,64, 66) are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 61,63,65,67), and the thickness t0 of the ceiling 60 is 2.5 mm and the length L is 600 mm, and the thickness t1 of the wing plate 6d is 6 mm, even the specifications of the footstand 6b are the same as those of the fifth embodiment, so as to facilitate saving materials and reducing weight.

Fig. 7A and 7B are schematic views of a seventh embodiment of the integrated raised floor 7 of the present invention. The integrated raised floor 7 of the present embodiment is a standard type, which is used for carrying a heavy load, for example, about 1000-1200 kg, and the difference from the fifth embodiment is the local height change of the rib structure 7a, so the same parts will not be described in detail.

As shown in fig. 7B, the height h8 of the auxiliary rib 78 with respect to the honeycomb side 70B is 2.5 mm, and the width d8 thereof is 3 mm.

In the present embodiment, the thickness T0 of the ceiling plate 70 is 2.5 mm, the height H1 of the first rib 71 relative to the honeycomb side 70b is 55.5 mm, the height sum T of the first rib 71 and the ceiling plate 70 (i.e., the height of the first rib 71 relative to the ground side 70 a) is 58 mm, and the total height H of the foot stand 7b, the first rib 71 and the ceiling plate 70 is 60 mm, wherein the thickness T1 of the wing plate 4d is 6 mm, the first rib 71 is formed at the edge of the ceiling plate 70 to form a side rib of the integrated raised floor 7 as a frame of the integrated raised floor 7, and the first to sixth ribs 71 to 76 are symmetrically distributed on the left and right (or vertically as shown in fig. 7A) with the seventh rib 77 as a reference.

Furthermore, in the rib structure 7a, as shown in fig. 7B, the heights h1 to h7 of the first to seventh ribs 71 to 77 relative to the honeycomb side 70B are the same as those of the fifth embodiment, and the widths d1 to d6 of the first to sixth ribs 71 to 76 are the same as those of the fifth embodiment, and the width d7 of the seventh rib 77 is 5.3 mm. On the other hand, the thickness of the top plate 70 at the recess R is the same as that of the fifth embodiment (i.e. greater than the thickness t0 of the top plate 70 at other positions), and the cross ribs 77a are disposed in the recess R, and the height h0 of the cross ribs relative to the honeycomb side 70b is 10 mm (greater than the thickness t0 of the top plate 70), so as to improve the compressive strength of the integrated raised floor 7 at the middle position.

As can be seen from the above, the heights h2, h4, h6 of the rib structures 7a of the integrated raised floor 7 are smaller, i.e. the heights h2, h4, h6 of the middle ribs (the second, fourth and sixth ribs 72,74, 76) are much smaller than the heights h1, h3, h5, h7 of the main ribs (the first, third, fifth and seventh ribs 71,73,75,77), and the thickness t0 of the ceiling 70 is 2.5 mm and the length L is 600 mm, and the thickness t1 of the wing plate 7d is 6 mm, even the specifications of the footstand 7b are the same as those of the fifth embodiment, so as to facilitate saving materials and reducing weight.

Fig. 8A, 8B, 8C and 8D are schematic views of an eighth embodiment of the integrated raised floor 8 of the present invention. The difference between the present embodiment and the above embodiment is that the perforation is newly added, so the same parts will not be repeated hereinafter.

As shown in fig. 8A and 8D, according to the first embodiment, the integrated raised floor 8 forms a plurality of through holes 80 on the ceiling 10, which are connected to the ground side 10a and the honeycomb side 10b, and the seventh rib 17 (the "cross" rib) divides the honeycomb side 10b into four areas, each of which forms 25 sub-areas (the "recess S"), and 21 sub-areas (the "recesses R, S") are spaced apart from each other by a plurality of ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16) in the "cross" rib, such that each sub-area has nine through holes 80, but the sub-areas (the "recesses R") in the central portion of the "cross" rib do not form the through holes 80.

In the present embodiment, the positions of the plurality of through holes 80 are arranged corresponding to the plurality of recesses S. For example, nine through holes 80 are formed in each recess S, and the nine through holes 80 are arranged in an array.

Therefore, the recess R of the central portion of the seventh rib 17 (the # -shaped rib) may not be provided with the through hole 80, and the height h0 of the inner cross rib 17a with respect to the honeycomb side 10b is greater than the thickness t0 of the ceiling 10, so as to enhance the strength of the integrated raised floor 8.

It should be understood that the integrated raised floors 2 to 7 of the second to seventh embodiments may also have a plurality of through holes 80 formed in the recess S thereof. For example, based on the third embodiment, the rows of perforations 80 are symmetrically arranged with respect to the cross-shaped auxiliary rib 38, as shown in fig. 8B; alternatively, based on the fourth embodiment, the rows of perforations 80 are spaced apart by the auxiliary rib 48 such that each row has three perforations 80, as shown in fig. 8C.

In summary, the heights h1, h3, h5, h7 of the main ribs of the rib structures 1 a-7 a relative to the honeycomb sides 10 b-70 b are at least 25 mm, so that the structural strength of the integrated raised floor 1-8 is improved, and the integrated raised floor 1-8 can bear heavier machine equipment in the semiconductor process, so that the problem of cracking of the integrated raised floor 1-8 in use is avoided. Further, the heights h1 to h7 and the widths d1 to d7 of the ribs are adjusted according to the load-bearing sizes of the integrated raised floors 1 to 8, that is, the heights h1 to h7 and the widths d1 to d7 of the ribs are smaller when the load-bearing sizes are small, so that the materials and the weight of the integrated raised floors 1 to 8 are saved.

Furthermore, by virtue of the design of the auxiliary ribs 38-78, the structural strength of the integrated raised floor 3-7 can be further improved.

The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications to the above would be obvious to those of ordinary skill in the art, without departing from the spirit and scope of the present invention. The scope of the invention is therefore intended to be indicated by the appended claims.

Claims (15)

1. An integrated raised floor, comprising:

a ceiling having opposite ground and honeycomb sides; and

the rib structure is arranged on the honeycomb side of the antenna board to form a plurality of concave parts, wherein the rib structure is sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna board to the middle, the heights of the first rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side are at least 25 mm to be used as main ribs, and the heights of the second rib, the fourth rib and the sixth rib relative to the honeycomb side are lower than 25 mm to be used as middle ribs.

2. The composite raised floor of claim 1, wherein the plurality of arrays of recesses are arranged to form a honeycomb structure on the honeycomb side.

3. The integrated raised floor of claim 1, wherein the first rib is formed on the edge of the ceiling to form a side rib of the integrated raised floor for use as a rim of the integrated raised floor for securing a footstand.

4. The composite raised floor of claim 1, wherein the first rib is higher than the second rib to the seventh rib, and the sum of the heights of the first rib and the ceiling is 47 to 58 mm, and the thickness of the ceiling is 2.5 to 3.2 mm.

5. The integrated raised floor of claim 1, wherein the first rib has a width of 7 to 8 millimeters.

6. The composite raised floor of claim 1, wherein the third ribs have a height of 25 to 38 millimeters relative to the honeycomb side, the fifth ribs have a height of 32 to 38 millimeters relative to the honeycomb side, and the seventh ribs have a height of 34.5 to 45 millimeters relative to the honeycomb side.

7. The integrated raised floor of claim 1, wherein the third rib has a width of 2.5 to 3 mm, the fifth rib has a width of 2.5 to 3 mm, and the seventh rib has a width of 4 to 6 mm.

8. The integrated raised floor of claim 1, wherein the second, fourth and sixth ribs have a height of 8 to 20 millimeters relative to the honeycomb side.

9. The integrated raised floor of claim 1, wherein the second, fourth and sixth ribs have a width of 2.5 to 3.2 millimeters.

10. The integrated raised floor as claimed in claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than that of the middle rib, and a plurality of the auxiliary ribs are formed in each of the recesses, such that a plurality of the auxiliary ribs are disposed in a single recess.

11. The integrated raised floor of claim 10, wherein the plurality of auxiliary ribs extend in multiple directions to interleave with each other.

12. The composite raised floor of claim 10, wherein the auxiliary ribs have a height of 2 to 6 mm relative to the honeycomb side and a width of 2.5 to 3 mm.

13. The integrated raised floor as claimed in claim 1, wherein the ceiling is formed with a plurality of through holes communicating the floor side and the honeycomb side, and the positions of the plurality of through holes correspond to the plurality of recesses.

14. The composite raised floor as claimed in claim 1, wherein the rib structure is formed with two seventh ribs in longitudinal and transverse directions to form a cross rib, so as to divide the composite raised floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a recess, the first to sixth ribs are symmetrically distributed with respect to the cross rib, and another recess is formed at a central portion of the cross rib formed by the seventh rib, wherein a cross rib is configured in the recess, and a wing plate is formed around the top plate, so that the height of the cross rib and the thickness of the wing plate are both greater than the thickness of the top plate, so as to improve the strength of the composite raised floor at the middle.

15. The integrated raised floor according to claim 14, wherein 21 other sub-areas are separated by the second, third, fourth, fifth and sixth ribs in the cross rib, and each of the sub-areas has nine through holes, but the through holes are not formed in the central portion of the cross rib.

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