CN116235259A

CN116235259A - Electromagnet device, method for driving electromagnet device, and electromagnet control system

Info

Publication number: CN116235259A
Application number: CN202180055169.5A
Authority: CN
Inventors: 大桥知范
Original assignee: Ebara Corp
Current assignee: Ebara Corp
Priority date: 2020-09-08
Filing date: 2021-09-03
Publication date: 2023-06-06
Also published as: KR20230062549A; WO2022054713A1; TW202219992A

Abstract

The heat generation in the electromagnet device is reduced. The electromagnet device is provided with: a yoke; a coil wound around the yoke; a housing for housing the yoke and the coil, the housing having an adsorption surface for adsorbing an object by magnetic force; and a heat insulating layer disposed between a distal end portion of the yoke and an inner surface of the housing on the suction surface side.

Description

Electromagnet device, method for driving electromagnet device, and electromagnet control system

Technical Field

The present invention relates to an electromagnet device, a driving method of the electromagnet device, and an electromagnet control system.

Background

The electromagnet device generates a magnetic force by passing a current through the coil. Heat is generated in the coil by the current flowing through the coil. In the manufacturing apparatus of an organic electroluminescent device shown in patent document 1, for example, a structure using a permanent magnet for bonding a metal mask to a substrate is a mainstream.

Prior art literature

Patent literature

Patent document 1: japanese patent application laid-open No. 2010-062125

Patent document 2: japanese patent laid-open No. 2002-105622

Technical problem to be solved by the invention

It is desirable to reduce heat generation in the electromagnet arrangement. For example, there is a concern that the metal mask is deformed by heat generated from the electromagnet device.

In addition, it is desirable to enhance the magnetic force generated by the electromagnet arrangement. Enhancing the magnetic force of the electromagnet device is advantageous, for example, in improving the adhesion of the metal mask to the substrate in the organic electroluminescent element manufacturing apparatus.

In addition, for example, when a thin adsorbate such as a metal mask is fixed to the adsorption surface, the thin adsorbate may flex and the adhesion between the adsorbate and the adsorption surface may be reduced. For example, as described in patent document 2, in the formation of a thin film by vacuum vapor deposition, if a gap exists between a transparent substrate and a vapor deposition mask, an unnecessary region flows in through the gap, and thus the masking accuracy is lowered. Therefore, it is desirable to fix the adsorbate to the adsorption surface with high adhesion using an electromagnet device.

Disclosure of Invention

Technical means for solving the technical problems

In order to solve one of the above-described problems, an electromagnet device is disclosed, which comprises: a yoke; a coil wound around the yoke; a housing that houses the yoke and the coil and has an adsorption surface that adsorbs an object by magnetic force; and a heat insulating layer disposed between the distal end portion of the yoke and the inner surface of the housing on the suction surface side.

In order to solve one of the above-described problems, an electromagnet device is disclosed, which comprises: a yoke; and a coil wound around the yoke, the yoke having a distal end portion formed wider than a width of a portion around which the coil is wound.

In order to solve one of the above-described problems, a method of driving an electromagnet device is disclosed, in which the electromagnet device is configured by arranging a plurality of electromagnet units including a yoke and a coil wound around the yoke, the plurality of electromagnet units are divided into a plurality of areas, and the electromagnet units are sequentially turned on for each area from an area located at the center toward an area located at the peripheral edge.

Drawings

Fig. 1 is a partial cross-sectional view showing a configuration of an electromagnet device according to an embodiment.

Fig. 2A is a cross-sectional view showing a configuration of a yoke in the electromagnet device according to one embodiment.

Fig. 2B is a cross-sectional view showing a configuration of a yoke in the electromagnet device according to the embodiment.

Fig. 3 is a plan view showing the entire structure of a lower housing in the electromagnet device according to one embodiment.

Fig. 4 is a diagram showing an organic electroluminescent element manufacturing apparatus to which the electromagnet device according to one embodiment can be applied.

Fig. 5 is a block diagram of an electromagnet control system according to one embodiment.

Fig. 6 is a view showing another example of dividing a plurality of electromagnet units into a plurality of regions.

Fig. 7 is a view showing another example of dividing a plurality of electromagnet units into a plurality of areas.

Fig. 8 is a diagram showing an example of a time relationship of the current flowing through the coils of the electromagnet units in each region.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the attached drawings, the same or similar elements are denoted by the same or similar reference numerals, and the description of the embodiments may be omitted from repeated description of the same or similar elements. The features shown in the embodiments are applicable to other embodiments as long as they do not contradict each other.

Fig. 1 is a partial cross-sectional view showing a configuration of an electromagnet device 100 according to an embodiment of the present invention. The electromagnet device 100 includes a plurality of electromagnet units 110, a cooling plate 140, an upper housing 150, and a lower housing 160.

A plurality of beams 162 for reinforcing the rigidity of the lower frame 160 are provided on the inner surface of the lower frame 160. By providing the beam 162, the wall thickness t of the lower housing 160 on the suction surface 105 side of the electromagnet device 100 can be made thinner. Further, by reducing the thickness t of the lower housing 160, the magnetic field generated from the electromagnet unit 110 can be efficiently transmitted to the outside of the electromagnet apparatus 100.

The plurality of electromagnet units 110 are disposed in small spaces inside the lower frame 160 partitioned by the beams 162 of the lower frame 160. Each electromagnet unit 110 includes a yoke 112 and a coil 114 wound around the yoke 112 and molded from a resin material 116. As the resin molding material 116, a material (for example, epoxy resin) having high thermal conductivity, high heat resistance, and a small linear expansion coefficient is preferably used. By the current flowing through the coil 114, a magnetic pole MP1 (one of the N pole and the S pole) and a magnetic pole MP2 (the other of the N pole and the S pole) are formed at the tip end of the yoke 112. Each electromagnet unit 110 is disposed in a direction in which the tip of the yoke 112 faces the bottom of the lower housing 160, and the attracted objects disposed at the bottom of the lower housing 160, that is, below the attraction surface 105 of the electromagnet apparatus 100 can be attracted by the magnetic poles MP1 and MP2 of each electromagnet unit 110.

The upper portion of the electromagnet unit 110 is in thermal contact with the cooling plate 140 via a heat transfer sheet 145 having a high heat transfer rate. The cooling plate 140 has a water-cooling pipe 142 inside and has a capability of cooling the electromagnet unit 110. Accordingly, heat generated in the coil 114 during driving of the electromagnet unit 110 can be discharged to the outside of the electromagnet device 100 through the cooling plate 140 and the water-cooling pipe 142.

The electromagnet device 100 of the present embodiment further includes a heat insulating layer 120 between the top end portion (portion where MP1 and MP2 are formed) of the yoke 112 of the electromagnet unit 110 and the bottom of the lower housing 160. The heat insulating layer 120 is present, so that heat generated in the coil 114 is difficult to transfer to the attraction surface 105 of the electromagnet device 100 during driving of the electromagnet unit 110. This can avoid occurrence of a failure due to the suction object being heated via the suction surface 105. For example, when the electromagnet device 100 according to the present embodiment is used to attach a metal cover to a substrate in the process of manufacturing an organic electroluminescent element, deformation of the metal cover due to heat and poor contact with the substrate can be prevented.

The heat insulating layer 120 can be configured as an air layer or a vacuum layer, for example. Alternatively, the heat insulating layer 120 may be configured such that a gas or liquid refrigerant flows through a gap between the top end portion of the yoke 112 of the electromagnet unit 110 and the bottom of the lower casing 160.

In the structure of the heat insulating layer 120 in which the air gap between the top end portion of the yoke 112 and the bottom of the lower housing 160 is cooled, the temperature, flow rate, or flow velocity of the refrigerant may be dynamically changed during driving of the electromagnet unit 110. In one embodiment, the electromagnet device 100 further includes a ammeter (not shown) that measures the current flowing through the coil 114. The amount of heat generated by the coil 114 can be calculated or estimated from the current value measured by the current meter. The temperature, flow rate, or flow velocity of the refrigerant is adjusted according to the calculated heat generation amount of the coil 114 or directly according to the magnitude of the current flowing through the coil 114 measured by the current meter. For example, by increasing the heat generation amount of the coil 114, the temperature of the refrigerant is decreased or the flow rate or flow velocity of the refrigerant is increased, so that the heat insulating effect from the electromagnet unit 110 to the suction surface 105 of the electromagnet device 100 is further improved.

In another embodiment, the electromagnet device 110 further includes a temperature sensor (not shown) that measures the temperature of each part of the electromagnet device 100. The temperature sensor is disposed, for example, at the yoke 112, the bottom (suction surface 105) of the lower housing 160, or at a position where each temperature of the refrigerant can be measured as a heat insulating layer. Alternatively, the temperature sensor may be configured to be able to measure the temperature of the object attracted to the attraction surface 105 of the electromagnet device 100. Based on the temperature of each part of the electromagnet device 100 or the temperature of the object to be adsorbed on the suction surface 105 measured by the temperature sensor, the temperature, flow rate, or flow velocity of the refrigerant in the heat insulating layer 120 that is configured to circulate the refrigerant in the gap between the top end portion of the yoke 112 and the bottom of the lower housing 160 is adjusted. For example, when the temperature rise of the bottom (suction surface 105) of the lower housing 160 is detected, the heat insulating effect from the electromagnet unit 110 to the suction surface 105 of the electromagnet device 100 can be further improved by decreasing the temperature of the refrigerant or increasing the flow rate or flow velocity of the refrigerant.

Further, the cooling capacity of the cooling plate 140 may be dynamically changed according to the heating value of the coil 114 or the temperature of each part or the object to be attracted of the electromagnet device 100 as described above.

Fig. 2A and 2B are cross-sectional views showing the configuration of yoke 112 in electromagnet device 100 according to one embodiment of the present invention. In the electromagnet device 100 of the present embodiment, the yoke 112 of each electromagnet unit 110 has a distal end 112a formed wider than the width of the portion 112b around which the coil 114 is wound. In the distal end portion 112a of the yoke 112, the cross-sectional area of the magnetic flux penetrating the yoke 112 is larger than the cross-sectional area of the magnetic flux penetrating the yoke 112 in the coil winding portion 112b of the yoke 112. The distal end 112a of the yoke 112 is formed wider, so that the magnetic field generated by the electromagnet unit 110 can be increased.

Since the yoke has a large relative magnetic permeability and a small magnetic circuit resistance, the electromagnetic coil 110 can generate a large magnetic flux density in a wide range by increasing the cross-sectional area of the distal end portion 112a of the yoke 112, and can attract in a wide range with a large force. On the other hand, the larger the sectional area of the coil 114 wound around the yoke 112 is, the more the heat generation amount of the coil 114 can be suppressed. In order to secure a large coil space, it is preferable that the sectional area of the yoke 112 in the coil winding portion 112b is small enough to prevent saturation of the magnetic flux density.

Fig. 3 is a plan view showing the overall structure of the lower housing 160 in the electromagnet device 100 according to the embodiment of the present invention. As shown in fig. 3, the lower housing 160 has a plurality of sectors 164 separated by beams 162. The lower housing 160 illustrated in fig. 3 has sixty four sectors 164 arranged in four vertical columns and sixteen horizontal columns. The number of the vertical and horizontal arrangement of the sectors 164 is not limited to this, and may be any number. As described above, the electromagnet units 110 (not shown in fig. 3) are disposed in the respective sectors 164, respectively, to thereby construct the electromagnet device 100.

Fig. 4 shows an organic electroluminescent element manufacturing apparatus 500 to which the electromagnet apparatus 100 according to one embodiment of the present invention can be applied. The organic electroluminescent device manufacturing apparatus 500 is, for example, a vapor deposition apparatus. As shown in the drawing, a substrate 502 (for example, a glass substrate) to be processed is disposed on the suction surface 105 of the electromagnet device 100, and a metal mask 504 is disposed through the substrate 502. The metal mask 504 is attracted to the substrate 502 by the magnetic force generated from the electromagnet device 100. A vapor deposition raw material (for example, a metal or an organic material) discharged from a vapor deposition source 506 to a chamber 508 is deposited on a substrate 502 through a metal mask 504, thereby performing an organic electroluminescent element manufacturing process.

Fig. 5 is a block diagram of an electromagnet control system 200 according to an embodiment of the present invention. The electromagnet control system 200 includes: the electromagnet device 100 described above with reference to fig. 1 to 3; and a controller 250 capable of individually driving each electromagnet unit 110 (not shown) of the electromagnet apparatus 100.

The controller 250 drives the plurality of electromagnet units 110 by a plurality of regions. In the example of fig. 5, the plurality of electromagnet units 110 are divided into eight total areas, from left to right in the drawing, of a first area 201, a second area 202, a third area 203, a fourth area 204, a fifth area 205, a sixth area 206, a seventh area 207, and an eighth area 208. The number of the electromagnet units 110 included in each of the areas 201 to 208 may be arbitrary, and thus the electromagnet units 110 are not explicitly shown in fig. 5. The number of divisions of the region is not limited to eight, and may be any number.

For example, the controller 250 first turns on the electromagnet units 110 in the fourth and

fifth regions

204 and 205, then turns on the electromagnet units 110 in the third and

sixth regions

203 and 206, then turns on the electromagnet units 110 in the second and

seventh regions

202 and 207, and finally turns on the electromagnet units 110 in the first and

eighth regions

201 and 208. By sequentially turning on the electromagnet units 110 (causing current to flow in the coil 114) for each region from the region located at the center of the electromagnet device 100 toward the region located at the peripheral edge of the electromagnet device 100 in this manner, a thin object to be attracted, such as the metal mask 504 described above with respect to fig. 4, can be attracted to the attraction surface 105 of the electromagnet device 100 or the surface of the substrate 502 without being deflected. This ensures good adhesion between the thin attraction object and the electromagnet device 100 or the substrate 502.

For example, the controller 250 may turn on the electromagnet unit 110 in the order of the first region 201, the second region 202, the third region 203, the fourth region 204, the fifth region 205, the sixth region 206, the seventh region 207, and the eighth region 208. By sequentially switching on the electromagnet units 110 for each region from the region located at one end of the electromagnet device 100 toward the region located at the other end of the electromagnet device 100 in this manner, a thin object to be attracted can be attracted to the electromagnet device 100 or the substrate 502 without being deflected as described above, and good adhesion can be ensured.

The method of dividing the plurality of electromagnet units 110 into the plurality of regions is not limited to the method shown in fig. 5. As another example, as shown in fig. 6, the plurality of electromagnet units 110 may be divided into eight total areas, i.e., a first area 211, a second area 212, a third area 213, a fourth area 214, a fifth area 215, a sixth area 216, a seventh area 217, and an eighth area 218, in order from top to bottom in the drawing. In the example of fig. 6, the controller 250, for example, first turns on the electromagnet units 110 in the fourth and

fifth regions

214 and 215, then turns on the electromagnet units 110 in the third and

sixth regions

213 and 216, then turns on the electromagnet units 110 in the second and seventh regions 212 and 217, and finally turns on the electromagnet units 110 in the first and

eighth regions

211 and 218. Alternatively, the controller 250 may turn on the electromagnet unit 110 in the order of the first region 211, the second region 212, the third region 213, the fourth region 214, the fifth region 215, the sixth region 216, the seventh region 217, and the eighth region 218.

As another example, as shown in fig. 7, the plurality of electromagnet units 110 may be divided into five total areas, wherein the first area 221 is located at the center of the electromagnet device 100, the second area 222 surrounds the first area 221 so as to encapsulate the first area 221, the third area 223 further surrounds the second area 222 so as to encapsulate the second area 222, the fourth area 224 further surrounds the third area 223 so as to encapsulate the third area 223, and the fifth area 225 further surrounds the fourth area 224 so as to encapsulate the fourth area 224 and is located at the outermost periphery. In the example of fig. 7, for example, the controller 250 turns on the electromagnet units 110 in order from the region located on the inner side (center) toward the region located on the outer side (peripheral edge portion), that is, in the order of the first region 221, the second region 222, the third region 223, the fourth region 224, and the fifth region 225. As a result, as in the case of fig. 5 and 6, good adhesion between a thin object to be attracted, such as the metal mask 504, and the electromagnet device 100 or the substrate 502 can be ensured.

Fig. 8 is a diagram showing an example of a time relationship between currents flowing through the coils 114 of the electromagnet units 110 in each region. Hereinafter, the above-described arrangement of the areas in fig. 5 will be described as an example. As shown in fig. 8, at time T ₁₀ The supply of the current I to the coils 114 of the electromagnet units 110 in the fourth region 204 and the fifth region 205 is started ₁ Current I ₁ Is controlled to gradually increase from the current value 0 and at the time T ₁₁ Reaching a specified maximum value. In addition, at time T ₁₀ And time T ₁₁ Time T between ₂₀ (i.e., the current I is supplied from the coil 114 of the electromagnet unit 110 in the fourth region 204 and the fifth region 205 ₁ Take over the current I ₁ A period of time until reaching the maximum value) starts to be performed on the electromagnet units in the third region 203 and the sixth region 206110, coil 114 supplies a current I ₂ . Current I ₂ And current I ₁ Also, is controlled to gradually increase from the current value 0 and at the time T ₂₁ Reaching a specified maximum value. Also at time T ₂₀ And time T ₂₁ Time T between ₃₀ The supply of the current I to the coils 114 of the electromagnet units 110 in the second region 202 and the seventh region 207 is started ₃ Current I ₃ Is controlled to gradually increase from the current value 0 and at the time T ₃₁ Reaching a specified maximum value. In addition, at time T ₃₀ And time T ₃₁ Time T between ₄₀ The supply of the current I to the coils 114 of the electromagnet units 110 in the first region 201 and the eighth region 208 is started ₄ Current I ₄ Is controlled to gradually increase from the current value 0 and at the time T ₄₁ Reaching a specified maximum value. In this way, by starting the supply of current to the coil 114 of the electromagnet unit 110 belonging to the region (for example, the third region 203 and the sixth region 206) adjacent to the certain region (for example, the fourth region 204 and the fifth region 205) while starting the supply of current to the coil 114 of the electromagnet unit 110 belonging to the region until the current reaches the predetermined value position, the occurrence of deflection when the thin adsorbate is adsorbed can be further effectively suppressed, and the adhesiveness of the adsorbate can be further improved.

While the embodiments of the present invention have been described above with reference to several examples, the embodiments of the present invention described above are intended to facilitate understanding of the present invention, and are not intended to limit the present invention. The present invention is of course capable of modification and improvement without departing from the gist thereof, and the present invention includes equivalents thereof. Further, any combination of the components described in the scope of the claims and the specification may be realized or omitted within a range in which at least a part of the above-described problems can be solved or at least a part of the effects can be realized.

Symbol description

100. Electromagnet device

105. Suction surface

110. Electromagnet unit

112. Magnetic yoke

114. Coil

116. Resin molding material

120. Heat insulation layer

140. Cooling plate

142. Water-cooled piping

145. Heat transfer sheet

150. Upper frame

160. Lower frame

162. Beam

164. Sector area

200. Electromagnet control system

201 to 225 regions

250 controller

500 organic electroluminescent element manufacturing device

502. Substrate board

504. Metal mask

506. Vapor deposition source

508. Chamber chamber

MP1, MP2 magnetic pole

Claims

1. An electromagnet device, characterized by comprising:

a yoke;

a coil wound around the yoke;

a housing that houses the yoke and the coil and has an adsorption surface that adsorbs an object by magnetic force; and

and a heat insulating layer disposed between a distal end portion of the yoke and an inner surface of the housing on the suction surface side.

2. The electromagnet device according to claim 1, wherein,

the heat insulation layer is an air layer or a vacuum layer.

3. The electromagnet device according to claim 1, wherein,

the heat insulating layer is a layer configured to circulate a refrigerant.

4. An electromagnet arrangement according to claim 3, wherein,

and controlling the circulation of the refrigerant according to the heating value of the coil.

5. The electromagnet device according to claim 4, wherein,

the electromagnetic device is further provided with a ammeter which measures the current flowing through the coil, and the electromagnetic device is configured to calculate the heat generation amount of the coil based on the measured value of the ammeter.

6. An electromagnet arrangement according to claim 3, wherein,

the refrigerator further includes at least one temperature sensor that measures a temperature of at least one of the yoke, the frame, the object, and the refrigerant, and controls the circulation of the refrigerant based on the temperature measured by the at least one temperature sensor.

7. The electromagnet device according to any one of claims 1 to 6,

a cooling member is also provided and is configured to be in thermal contact with a portion of the yoke other than the distal end portion.

8. The electromagnet device according to claim 7, wherein,

the cooling capacity of the cooling member is controlled in accordance with the heat generation amount of the coil.

9. An electromagnet arrangement according to claim 7 or 8, wherein,

and a heat transfer member interposed between the yoke and the cooling member.

10. An electromagnet device is provided with:

a yoke; and

a coil wound around the yoke, characterized in that,

the yoke has a distal end portion formed wider than a width of a portion around which the coil is wound.

11. The electromagnet device according to claim 10, wherein,

the current flowing through the coil is adjusted so that the magnetic flux density in the portion of the yoke around which the coil is wound is smaller than the saturation magnetic flux density.

12. A method for driving an electromagnet device comprising a yoke and a plurality of electromagnet units arranged in a coil wound around the yoke, characterized in that,

the plurality of electromagnet units are divided into a plurality of regions, and the electromagnet units are sequentially turned on for each region from the region located at the center toward the region located at the peripheral edge.

13. A method for driving an electromagnet device comprising a yoke and a plurality of electromagnet units arranged in a coil wound around the yoke, characterized in that,

the plurality of electromagnet units are divided into a plurality of regions, and the electromagnet units are sequentially turned on for each region from the region at one end toward the region at the other end.

14. The method of driving an electromagnet device according to claim 12 or 13, wherein,

each electromagnet unit is turned on by supplying a current gradually increasing from zero to a prescribed value over time to the coil of the electromagnet unit in each region.

15. The method of driving an electromagnet device according to claim 14, wherein,

and starting to supply current to the coils of the electromagnet units belonging to a second area adjacent to the first area during a period from when the current starts to be supplied to the coils of the electromagnet units belonging to the first area until the current reaches the predetermined value.

16. An electromagnet control system, comprising:

an array of a plurality of electromagnet units including a yoke and a coil wound around the yoke; and

and a controller that drives the plurality of electromagnets for each of the plurality of regions, and sequentially turns on the electromagnet units from the region located at the center toward the region located at the peripheral edge.

17. An electromagnet control system, comprising:

and a controller that drives the plurality of electromagnets for each of the plurality of regions, respectively, and sequentially turns on the electromagnet units from the region located at one end toward the region located at the other end.