CN116184761A

CN116184761A - Nanometer stamping equipment for improving stamping uniformity

Info

Publication number: CN116184761A
Application number: CN202211727820.1A
Authority: CN
Inventors: 冀然; 彭华
Original assignee: Germanlitho Co ltd
Current assignee: Germanlitho Co ltd
Priority date: 2023-03-02
Filing date: 2023-03-02
Publication date: 2023-05-30

Abstract

The invention relates to the technical field of nanoimprinting, in particular to nanoimprinting equipment for improving imprinting uniformity. The nano-imprinting device comprises a soft film substrate adsorption unit and an imprinting substrate fixing unit, wherein a dispensing unit is arranged between the soft film substrate adsorption unit and the imprinting substrate fixing unit, and the nano-imprinting device also comprises a static removing unit and an exposure unit for curing nano-imprinting materials; the soft film substrate adsorption unit comprises an adsorption plate and a soft film substrate, and the imprinting substrate fixing unit comprises an imprinting substrate adsorption disc and an imprinting substrate, which are arranged right below the soft film substrate adsorption unit; the dispensing unit comprises an upper dispensing nozzle and a lower dispensing nozzle, which are respectively dispensed on the soft film and the stamping substrate; the static electricity removing unit comprises a deionizing fan, and the exposure unit comprises a UV lamp. According to the invention, by accurately controlling the thickness of the nano imprinting adhesive layer and controlling the uniformity of the adhesive layer, the equipment for copying the soft film and imprinting the product is realized, the service life of the template is prolonged, the production cost is reduced, and the mass production is realized rapidly.

Description

Nanometer stamping equipment for improving stamping uniformity

Technical Field

The invention relates to the technical field of nanoimprinting, in particular to nanoimprinting equipment for improving imprinting uniformity.

Background

The nanoimprint technology is a photoetching technology invented by scientist Zhou Yu in 1995, which has low cost and high resolution. Nano application technology is known as one of the ten emerging technologies for changing the world, and the technology is widely focused by scientific researchers. The nano imprinting technology is a novel micro-nano processing technology, and the micro-nano structure on the template is transferred to the substrate to be processed through nano imprinting glue. The desired structure is usually processed on a silicon or other substrate by means of electron beam etching or the like as a nanoimprint template, and nanoimprint is performed with this template. The template manufacturing period is longer and the cost of manufacture is expensive, therefore, in order to prevent the early damage of template in the use, in the actual production process, first the structure on silicon chip or other hard templates needs to be copied to the work template, and the work template is used for carrying out nano-imprinting production, so as to improve the service life of the template, reduce the production cost and rapidly realize mass production.

Some of the wafer surfaces have nanostructures with depths exceeding 10 microns, such as micro-lens diagnostics, light homogenizing sheets, and the like. Because the colloid for spin coating is required to satisfy good fluidity, ensure complete structure filling, and generally the solvent is added to cause that the colloid cannot fill deeper nano structures, a uniform micron-level adhesive layer cannot be obtained in a spin-coating adhesive-homogenizing mode, and the situation needs to be solved in a dispensing and stamping mode.

In dispensing impression, two parameters determine the quality of the final impression: 1. the final thickness of the glue layer is embossed. 2. The uniformity of the thickness of the whole adhesive layer can not be obtained by adjusting the embossing pressure.

Disclosure of Invention

The following presents a simplified summary in order to provide a basic understanding of some aspects of the disclosed embodiments. This summary is not an extensive overview, and is intended to neither identify key/critical elements nor delineate the scope of such embodiments, but is intended as a prelude to the more detailed description that follows.

Aiming at the defects in the prior art, the invention provides the nano imprinting equipment for improving the imprinting uniformity, which is used for realizing the process of copying a soft film and an imprinting product by accurately controlling the thickness of a nano imprinting adhesive layer and controlling the uniformity of the adhesive layer, prolonging the service life of a template, reducing the production cost and rapidly realizing mass production.

The technical scheme of the invention is as follows:

the nano imprinting equipment for improving the imprinting uniformity comprises a soft film substrate adsorption unit and an imprinting substrate fixing unit, wherein a dispensing unit is arranged between the soft film substrate adsorption unit and the imprinting substrate fixing unit, and the nano imprinting equipment further comprises an electrostatic removing unit and an exposure unit for curing nano imprinting materials; the soft film substrate adsorption unit comprises an adsorption plate and a soft film substrate, wherein the soft film substrate is fixed on the lower surface of the adsorption plate through vacuum adsorption, a vacuum connecting hole I connected with a vacuum pump is formed in the lower surface of the adsorption plate, a vacuum gas circuit I used for vacuum fixing of the soft film substrate is further formed in the lower surface of the adsorption plate, and the soft film substrate adsorption unit further comprises a transparent quartz plate arranged right above the imprinting substrate fixing unit; at least three corners of the four corners of the adsorption plate are provided with laser ranging sensing transmitters I; the embossing substrate fixing unit comprises an embossing substrate adsorption disc and an embossing substrate, which are arranged right below the soft film substrate adsorption unit, and the embossing substrate adsorption disc is used for vacuum adsorption and fixing of the embossing substrate; the substrate fixing unit is provided with at least three supporting rods I, one ends of the supporting rods I, which are far away from the stamping substrate adsorption disc, are provided with laser ranging sensing receivers, and the laser ranging sensing transmitters I emit laser and are received by the laser ranging sensing receivers; the dispensing unit comprises an upper dispensing nozzle and a lower dispensing nozzle, and the nano imprinting material is respectively dispensed on the soft film base material and the imprinting substrate; the dispensing unit further comprises a diversion filter device for diverting the nano-imprinting material to the upper dispensing nozzle and the lower dispensing nozzle; the static eliminating unit comprises a deionizing fan arranged between the soft film substrate adsorption unit and the imprinting substrate fixing unit, the deionizing fan is inclined at a certain angle to blow deionizing wind to the soft film substrate and the imprinting substrate, and static electricity of the soft film substrate and the imprinting substrate is eliminated; the exposure unit includes a UV lamp.

Preferably, the soft film substrate adsorption unit further comprises a lifting mechanism I driving the adsorption plate to move up and down, wherein the lifting mechanism I comprises a connecting block I and a lifting rod I, the lifting mechanism I provides power through a lifting motor I, and the adsorption plate is connected with the lifting rod I through the connecting block I.

Preferably, the upper surface of the imprinting substrate adsorption disc is provided with a vacuum connecting hole II connected with a vacuum pump, the upper surface of the imprinting substrate adsorption disc is also provided with at least two groups of concentric annular vacuum gas paths II, and the vacuum pump is connected with the vacuum connecting hole II through a gas pipe I so that the vacuum pump forms negative pressure in the annular vacuum gas paths II; and an overflow groove is arranged on the outer side of the annular vacuum gas circuit II. After the soft film substrate is positioned, the vacuum pump starts to operate, and after the gas in the vacuum gas circuit II is pumped away, a pressure difference is formed inside and outside the soft film substrate for fixing the soft film substrate. And an overflow groove is arranged on the outer side of the annular vacuum gas circuit II, so that overflowing nanoimprint material during imprinting is temporarily stored, and pollution to nanoimprint equipment is avoided.

Preferably, the stamping substrate fixing unit further comprises a heating block arranged at the bottom of the stamping substrate adsorption disc, a heat insulation plate is arranged below the heating block, the heat insulation plate is connected with a lifting mechanism II, the lifting mechanism II comprises a connecting block II and a lifting rod II, the lifting mechanism II provides power through a lifting motor II, the heat insulation plate is fixedly connected with the lifting rod II through the connecting block II, and the lifting motor II drives the stamping substrate adsorption disc to move up and down.

Preferably, the lifting motor II is externally fixed with a supporting rod II, one end of the supporting rod II is provided with a laser ranging sensing emitter II, and the laser ranging sensing emitter II emits laser and is received by a laser ranging sensing receiver to monitor the distance of the imprinting substrate adsorption disc in real time. The substrate fixing unit is ensured to be in a relatively horizontal state when being positioned at the initial position and the stamping position. The soft film substrate adsorption unit and the imprinting substrate fixing unit can move towards the internal direction of the equipment, and compared with the condition that only one unit moves, the thin nano imprinting adhesive layer can be realized.

Preferably, the dispensing unit further comprises a supporting rod III, a rotating block and rubber pipes for connecting the upper dispensing nozzle with the rubber barrel and connecting the lower dispensing nozzle with the rubber barrel. And the glue pump is used for extruding the nano-imprinting material and the glue barrel is used for storing the nano-imprinting material. The dispensing device can simultaneously perform upper dispensing and lower dispensing, so that bubbles are prevented from being generated when the soft film and the stamped product are copied, and the yield of the product is improved.

Preferably, the deionization fans are provided with two groups, the static electricity removing unit also comprises a horizontal rod and a vertical supporting rod IV, and the supporting rod IV is connected with the base; the deionization fan is connected with the air compressor through an air pipe II. The static removing unit can remove static of the soft film and the imprinting substrate, and improves the cleanliness of the imprinting material, so that the yield of products is improved.

Preferably, the exposure unit further comprises a lifting mechanism III, wherein the lifting mechanism III comprises a connecting block III, a lifting rod III and a motor III for moving the UV lamp up and down, the UV lamp is connected with the lifting rod III through the connecting block III, and the lifting mechanism III provides power through the motor III. The UV lamp may emit ultraviolet light to cure the nanoimprint material. The ultraviolet light emitted by the exposure unit can penetrate through the transparent quartz plate to cure the nano imprinting material, and the ultraviolet curing type nano imprinting material is cured.

Preferably, the nano imprinting device further comprises a fan filter unit arranged at the top of the device. The fan filter unit is used for purifying air in the environment layer by layer and then blowing the air into the equipment, and blowing the air out of the bottom of the equipment, so that the air circulation from top to bottom is formed in the equipment.

Preferably, the nano imprinting equipment further comprises an equipment shell, universal wheels and ground feet are arranged at the bottom of the equipment shell, an alarm signal lamp is arranged at the top of the equipment shell, and a door body is arranged on the front face of the equipment shell. The universal wheels and the feet are used for moving equipment and positioning and adjusting the level of the equipment, and the door body is convenient for observing the imprinting process and loading and unloading.

If the nano imprinting material is of a heat curing type, after imprinting is finished, heat emitted by the heating block is transferred to the upper surface of the imprinting substrate adsorption disc through heat conduction, and then transferred to the nano imprinting material on the imprinting substrate.

The foregoing general description and the following description are exemplary and explanatory only and are not restrictive of the application.

The beneficial effects of the invention are that

(1) The invention adopts three or four laser ranging sensors to control in real time, when the ranging values in the groups are equal, the soft film and the stamping substrate are relatively parallel, thus realizing the uniformity of the thickness of the whole adhesive layer and simultaneously accurately controlling the thickness of the adhesive layer. The laser ranging sensing transmitter I transmits laser and is received by the laser ranging sensing receiver, and the distance between the adsorption plate and the imprinting substrate adsorption disc is calculated in real time. Meanwhile, the relative parallelism of the adsorption plate and the adsorption disc of the stamping substrate is ensured, and the on-chip uniformity of the stamping product is ensured.

(2) The dispensing device can simultaneously perform upper dispensing and lower dispensing, so that bubbles are prevented from being generated when the soft film and the stamped product are copied, and the yield of the product is improved.

(3) One device can realize the functions of copying the soft film and imprinting the product at the same time.

(4) The curing and imprinting of the thermally and uv curable material can be achieved simultaneously.

(5) The static removing unit can remove static of the soft film and the imprinting substrate, and improves the cleanliness of the imprinting material, so that the yield of products is improved.

Drawings

One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which like reference numerals refer to similar elements, and in which:

FIG. 1 is a schematic view of the internal structure of the apparatus of the present invention.

Fig. 2 is a schematic overall appearance of the present invention.

Fig. 3 is a top view of the internal part of the apparatus of the present invention.

Fig. 4 is a front view of the imprinting substrate fixing unit of the present invention.

Fig. 5 is a plan view of the soft film substrate adsorption unit 1 of the present invention.

Fig. 6 is a bottom view of the flexible film substrate adsorbing unit 1 of the present invention.

The device comprises a 1-soft film substrate adsorption unit, a 11-adsorption plate, a 111-vacuum connection hole I, a 112-vacuum gas circuit I, a 113-transparent quartz plate, a 114-laser ranging sensing emitter I, a 12-connection block I, a 13-lifting rod I and a 14-lifting motor I;

the device comprises a 2-imprinting substrate fixing unit, a 21-imprinting substrate adsorption disc, 211-vacuum connecting holes II, 212-annular vacuum gas paths II, 213-overflow grooves, 214-support rods I, 215-laser ranging sensing receivers, 22-heating blocks, 23-heat insulation plates, 24-connecting blocks II, 25-lifting rods II, 26-lifting motors II, 27-vacuum pumps, 28-support rods II and 29-laser ranging sensing transmitters II;

3-dispensing unit: 31-upper dispensing nozzles, 32-lower dispensing nozzles, 33-split-flow filtering devices, 34-support rods III, 35-rotating blocks, 36-rubber tubes, 37-rubber pumps and 38-rubber barrels;

4-static electricity removing unit: 41-deionization fans, 42-horizontal rods, 43-support rods IV, 44-bases and 45-air pipes II;

5-exposure unit: 51-UV lamp, 52-connecting block III, 53-lifting rod III, 54-motor III;

6-a fan filter unit;

71-shell, 72-universal wheels and feet, 73-alarm signal lamps, 74-door bodies and 75-universal wheels;

8-imprinting the substrate;

9-a flexible film substrate.

Detailed Description

So that the manner in which the features and techniques of the disclosed embodiments can be understood in more detail, a more particular description of the embodiments of the disclosure, briefly summarized below, may be had by reference to the appended drawings, which are not intended to be limiting of the embodiments of the disclosure. In the following description of the technology, for purposes of explanation, numerous details are set forth in order to provide a thorough understanding of the disclosed embodiments. However, one or more embodiments may still be practiced without these details. In other instances, well-known structures and devices may be shown simplified in order to simplify the drawing.

The terms first, second and the like in the description and in the claims of the embodiments of the disclosure and in the above-described figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate in order to describe embodiments of the present disclosure. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion.

In the embodiments of the present disclosure, the terms "upper", "lower", "inner", "middle", "outer", "front", "rear", and the like indicate an azimuth or a positional relationship based on that shown in the drawings. These terms are used primarily to better describe embodiments of the present disclosure and embodiments thereof and are not intended to limit the indicated device, element, or component to a particular orientation or to be constructed and operated in a particular orientation. Also, some of the terms described above may be used to indicate other meanings in addition to orientation or positional relationships, for example, the term "upper" may also be used to indicate some sort of attachment or connection in some cases. The specific meaning of these terms in the embodiments of the present disclosure will be understood by those of ordinary skill in the art in view of the specific circumstances.

In addition, the terms "disposed," "connected," "secured" and "affixed" are to be construed broadly. For example, "connected" may be in a fixed connection, a removable connection, or a unitary construction; may be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements, or components. The specific meaning of the above terms in the embodiments of the present disclosure may be understood by those of ordinary skill in the art according to specific circumstances.

The term "plurality" means two or more, unless otherwise indicated.

In the embodiment of the present disclosure, the character "/" indicates that the front and rear objects are an or relationship. For example, A/B represents: a or B.

The term "and/or" is an associative relationship that describes an object, meaning that there may be three relationships. For example, a and/or B, represent: a or B, or, A and B.

It should be noted that, without conflict, the embodiments of the present disclosure and features of the embodiments may be combined with each other.

Nanoimprint material, also called nanoimprint resist. The method is widely applied to hot nanoimprint, ultraviolet light curing nanoimprint and soft lithography processes, and can be mainly divided into thermoplastic nanoimprint adhesive and ultraviolet light curing nanoimprint adhesive according to imprint types.

Example 1

The nano imprinting equipment for improving imprinting uniformity comprises a soft film substrate adsorption unit 1 and an imprinting substrate fixing unit 2, a dispensing unit 3 is arranged between the soft film substrate adsorption unit 1 and the imprinting substrate fixing unit 2, the nano imprinting equipment further comprises an electrostatic removing unit 4 and an exposure unit 5 for curing nano imprinting materials, and the nano imprinting equipment further comprises a fan filter unit 6 arranged at the top of the equipment.

The soft film substrate adsorption unit 1 comprises an adsorption plate 11 and a soft film substrate 9, wherein the soft film substrate 9 is fixed on the lower surface of the adsorption plate 11 through vacuum adsorption, a vacuum connecting hole I111 connected with a vacuum pump 27 is formed in the lower surface of the adsorption plate 11, a vacuum gas circuit I112 for vacuum fixing the soft film substrate is further formed in the lower surface of the adsorption plate 11, and the soft film substrate adsorption unit 1 further comprises a transparent quartz plate 113 arranged right above the imprinting substrate fixing unit 2; three corners of the four corners of the adsorption plate 11 are provided with laser ranging sensing transmitters I114; the soft film substrate adsorption unit 1 further comprises a lifting mechanism I which drives the adsorption plate 11 to move up and down, wherein the lifting mechanism I comprises a connecting block I12 and a lifting rod I13, the lifting mechanism I provides power through a lifting motor I14, and the adsorption plate 11 is connected with the lifting rod I13 through the connecting block I12.

The imprinting substrate fixing unit 2 comprises an imprinting substrate adsorption disc 21 and an imprinting substrate 8 which are arranged right below the soft film substrate adsorption unit 1, and the imprinting substrate adsorption disc 21 is used for vacuum adsorption fixing of the imprinting substrate 8; the substrate fixing unit 2 is provided with three support rods I214, one end of each support rod I214 far away from the stamping substrate adsorption disc 21 is provided with a laser ranging sensing receiver 215, and the laser ranging sensing transmitter I114 transmits laser and is received by the laser ranging sensing receiver 215; the upper surface of the stamping substrate adsorption disc 21 is provided with a vacuum connecting hole II 211 connected with a vacuum pump 27, the upper surface of the stamping substrate adsorption disc 21 is also provided with two groups of concentric annular vacuum gas paths II 212, and the vacuum pump 27 is connected with the vacuum connecting hole II 211 through a gas pipe I, so that the vacuum pump 27 forms negative pressure in the annular vacuum gas paths II 212; an overflow groove 213 is arranged on the outer side of the annular vacuum gas path II 212. The stamping substrate fixing unit 2 further comprises a heating block 22 arranged at the bottom of the stamping substrate adsorption disc 21, a heat insulation plate 23 is arranged below the heating block 22, the heat insulation plate 23 is connected with a lifting mechanism II, the lifting mechanism II comprises a connecting block II 24 and a lifting rod II 25, the lifting mechanism II provides power through a lifting motor II 26, and the heat insulation plate 23 is fixedly connected with the lifting rod II 25 through the connecting block II 24. The lifting motor II 26 is externally fixed with a supporting rod II 28, one end of the supporting rod II 28 is provided with a laser ranging sensing emitter II 29, and the laser ranging sensing emitter II 29 emits laser and is received by a laser ranging sensing receiver 215.

The dispensing unit 3 comprises an upper dispensing nozzle 31 and a lower dispensing nozzle 32, which respectively dispense nano-imprinting materials on the soft film base material 9 and the imprinting substrate 8; the dispensing unit 3 further comprises a diversion filter device 33 for diverting the nano-imprinting material to the upper dispensing nozzle 31 and the lower dispensing nozzle 32; the dispensing unit 3 further comprises a supporting rod III 34, a rotating block 35, a rubber tube 36 for connecting the upper dispensing nozzle 31 with a rubber barrel 38 and the lower dispensing nozzle 32 with the rubber barrel 38, a rubber pump 37 for extruding nano-imprinting materials, and a rubber barrel 38 for storing nano-imprinting materials.

The static eliminating unit 4 comprises a deionizing fan 41 arranged between the soft film substrate adsorption unit 1 and the imprinting substrate fixing unit 2, and the deionizing fan 41 is inclined at a certain angle to blow deionizing wind to the soft film substrate 9 and the imprinting substrate, so that static electricity of the soft film substrate 9 and the imprinting substrate is eliminated; the deionization fan 41 is provided with two groups, the static electricity removing unit 4 also comprises a horizontal rod 42 and a vertical supporting rod IV 43, and the supporting rod IV 43 is connected with a pedestal 44; the deionization fan 41 is connected with the air compressor through an air pipe II 45.

The exposure unit 5 includes a UV lamp 51. The exposure unit 5 further comprises a lifting mechanism iii comprising a connecting block iii 52, a lifting rod iii 53 and a motor iii 54 for moving the UV lamp 51 up and down, the UV lamp 51 being connected to the lifting rod iii 53 via the connecting block iii 52, the lifting mechanism iii being powered by the motor iii 54.

The nano imprinting equipment further comprises an equipment shell 71, universal wheels 75 and anchor feet 72 are arranged at the bottom of the equipment shell 71, alarm signal lamps 73 are arranged at the top of the equipment shell 71, and a door 74 is arranged on the front face of the equipment shell 71.

The following description of the operation of the device is made with reference to fig. 1 to 6:

s1, resetting the equipment:

the device comprises a soft film substrate adsorption unit 1, an imprinting substrate fixing unit 2, a dispensing unit 3, a static removing unit 4 and an exposure unit 5.

The laser ranging sensing transmitter I114 and the laser ranging sensing transmitter II 29 transmit laser, the laser ranging sensing receiver 215 records the current position after receiving the signal, and the imprinting substrate fixing unit 2 is adjusted by the lifting motor II 26, so that the imprinting substrate fixing unit 2 is parallel to the soft film substrate adsorption unit 1.

S2 feeding:

and (3) feeding a soft film base material: the soft film substrate is placed on the adsorption plate 11, the vacuum pump pumps out the gas in the vacuum connecting hole I111 and the vacuum gas path I112, a pressure difference is formed on two sides of the soft film substrate, and the soft film substrate is fixed on the adsorption plate 11.

Feeding an embossing substrate: the imprinting substrate is placed on the imprinting substrate adsorption plate 21 of the imprinting substrate fixing unit 2, the vacuum pump 27 starts to operate to pump the gas of the vacuum connecting hole II 211 and the annular vacuum gas path II 212, and a pressure difference is formed on two sides of the imprinting substrate to fix the imprinting substrate on the imprinting substrate adsorption plate 21.

S3, dispensing:

the lifting motor I14 drives the lifting rod I13 to stretch, the adsorption plate 11 drives the flexible film substrate to move downwards, and the laser ranging sensor transmitter I114 transmits laser to the laser ranging sensor receiver 215 to monitor the distance from the adsorption plate to the imprinting substrate adsorption disc 21 in real time and reach the glue dispensing position.

The lifting motor II 26 drives the lifting rod II 25 to extend, so that the imprinting substrate adsorption plate 21 moves upwards, the laser ranging sensor emitter II 29 emits laser to the laser ranging sensor receiver 215, the position of the imprinting substrate adsorption plate 21 is recorded, and the imprinting substrate adsorption plate 21 is always kept unchanged in the horizontal direction in the upward moving process.

The rotating block 35 drives the upper dispensing nozzle 31 and the lower dispensing nozzle 32 to move right above the imprinting substrate fixing unit 2, so that the lower dispensing nozzle 32 is positioned at the center of the imprinting substrate adsorption disc 21.

The glue pump 37 pumps the nano-imprinting material in the glue barrel 38 into the diversion filter device 33 along the glue pipe 36, the nano-imprinting material after filtration flows into the upper glue dispensing nozzle 31 and the lower glue dispensing nozzle 32, and the upper glue dispensing nozzle 31 drops a small amount of nano-imprinting material on the soft film base material; the lower dispensing nozzle 32 drops the nanoimprint material for replication onto the imprint substrate upper surface.

After dispensing is completed, the dispensing unit 3 returns to the original position.

S4, stamping and adjusting the thickness and uniformity of the adhesive layer:

after dispensing is completed, the lifting motor I14 drives the lifting rod I13 to extend continuously, and the adsorption plate 11 drives the flexible film base material to move downwards. The lifting motor II 26 drives the lifting rod 25 to extend continuously, so that the imprinting substrate adsorption tray 21 moves upwards.

The soft film substrate fixed on the soft film substrate adsorption unit 1 and the imprinting substrate fixed on the imprinting substrate fixing unit 2 are slowly close, the upper and lower dispensing is firstly contacted, the nano imprinting material is slowly extruded and spread, and the nano imprinting material is filled into the nano structure of the imprinting substrate.

During imprinting, laser ranging sensor transmitter i 114 transmits laser light to laser ranging sensor receiver 215 to monitor the distance of the chuck plate to the imprinted substrate chuck 21 in real time and to maintain parallelism. The laser ranging sensor emitter ii 29 emits laser to the laser ranging sensor receiver 215, records the position of the imprint substrate adsorption disk 21, and always ensures that the imprint substrate adsorption disk 21 remains unchanged in the horizontal direction during the upward movement during the entire imprinting process.

Therefore, in the whole imprinting process, the imprinting substrate fixing unit 2 always keeps the horizontal direction unchanged in the process of moving up and down, the soft film substrate adsorption unit 1 always keeps the horizontal with the imprinting substrate fixing unit 2, so that the imprinting uniformity is ensured, and meanwhile, the distance between the units is measured by laser ranging, so that the thickness of the imprinting material is ensured.

S5, curing of nano-imprinting materials:

curing of the ultraviolet curing material: the motor III 54 drives the lifting rod III 53 to extend, so that the UV lamp 51 positioned above the soft film substrate adsorption unit 1 moves downwards to above the transparent quartz plate 113, ultraviolet light is emitted, and the nanoimprint material is ultraviolet cured through the transparent quartz plate 113 and the soft film substrate.

Curing of the thermally curable material: after imprinting is completed, the heating block 22 at the bottom of the imprinting substrate adsorption plate 21 starts to heat, and heat emitted by the heating block 22 is transferred to the upper surface of the imprinting substrate adsorption plate 21 through heat conduction, and then transferred to the nano imprinting material on the imprinting substrate.

S6, demolding:

after the nano-imprinting material is solidified, the lifting motor I14 drives the lifting rod I13 to shorten, the adsorption plate 11 drives the flexible film substrate to move upwards, and the laser ranging sensor transmitter I114 transmits laser to the laser ranging sensor receiver 215 to monitor the distance from the adsorption plate to the imprinting substrate adsorption disc 21 in real time. The lifting motor II 26 drives the lifting rod II 25 to shorten, so that the imprinting substrate adsorption plate 21 moves downwards, the laser ranging sensor emitter II 29 emits laser to the laser ranging sensor receiver 215, the position of the imprinting substrate adsorption plate 21 is recorded, and the imprinting substrate adsorption plate 21 is always kept unchanged in the horizontal direction in the upward moving process. The distance between the suction plate 11 and the imprint substrate suction plate 21 becomes large, and the soft film base material is gradually released from the imprint substrate.

Example 2

The nano imprinting equipment for improving imprinting uniformity comprises a soft film substrate adsorption unit 1 and an imprinting substrate fixing unit 2, a dispensing unit 3 is arranged between the soft film substrate adsorption unit 1 and the imprinting substrate fixing unit 2, the nano imprinting equipment further comprises an electrostatic removing unit 4 and an exposure unit 5 for curing nano imprinting materials, and the nano imprinting equipment further comprises a fan filter unit 6 arranged at the top of the equipment. The soft film substrate adsorption unit 1 comprises an adsorption plate 11 and a soft film substrate 9, wherein the soft film substrate 9 is fixed on the lower surface of the adsorption plate 11 through vacuum adsorption, a vacuum connecting hole I111 connected with a vacuum pump 27 is formed in the lower surface of the adsorption plate 11, a vacuum gas circuit I112 for vacuum fixing the soft film substrate is further formed in the lower surface of the adsorption plate 11, and the soft film substrate adsorption unit 1 further comprises a transparent quartz plate 113 arranged right above the imprinting substrate fixing unit 2; four corners of the adsorption plate 11 are provided with laser ranging sensing transmitters I114; the soft film substrate adsorption unit 1 further comprises a lifting mechanism I which drives the adsorption plate 11 to move up and down, wherein the lifting mechanism I comprises a connecting block I12 and a lifting rod I13, the lifting mechanism I provides power through a lifting motor I14, and the adsorption plate 11 is connected with the lifting rod I13 through the connecting block I12. The imprinting substrate fixing unit 2 comprises an imprinting substrate adsorption disc 21 and an imprinting substrate 8 which are arranged right below the soft film substrate adsorption unit 1, and the imprinting substrate adsorption disc 21 is used for vacuum adsorption fixing of the imprinting substrate 8; the substrate fixing unit 2 is provided with four support rods I214, one end of each support rod I214 far away from the stamping substrate adsorption disc 21 is provided with a laser ranging sensing receiver 215, and the laser ranging sensing transmitter I114 transmits laser and is received by the laser ranging sensing receiver 215; the upper surface of the stamping substrate adsorption disc 21 is provided with a vacuum connecting hole II 211 connected with a vacuum pump 27, the upper surface of the stamping substrate adsorption disc 21 is also provided with three groups of concentric annular vacuum gas paths II 212, and the vacuum pump 27 is connected with the vacuum connecting hole II 211 through a gas pipe I, so that the vacuum pump 27 forms negative pressure in the annular vacuum gas paths II 212; an overflow groove 213 is arranged on the outer side of the annular vacuum gas path II 212. The stamping substrate fixing unit 2 further comprises a heating block 22 arranged at the bottom of the stamping substrate adsorption disc 21, a heat insulation plate 23 is arranged below the heating block 22, the heat insulation plate 23 is connected with a lifting mechanism II, the lifting mechanism II comprises a connecting block II 24 and a lifting rod II 25, the lifting mechanism II provides power through a lifting motor II 26, and the heat insulation plate 23 is fixedly connected with the lifting rod II 25 through the connecting block II 24. The lifting motor II 26 is externally fixed with a supporting rod II 28, one end of the supporting rod II 28 is provided with a laser ranging sensing emitter II 29, and the laser ranging sensing emitter II 29 emits laser and is received by a laser ranging sensing receiver 215. The dispensing unit 3 comprises an upper dispensing nozzle 31 and a lower dispensing nozzle 32, which respectively dispense nano-imprinting materials on the soft film base material 9 and the imprinting substrate 8; the dispensing unit 3 further comprises a diversion filter device 33 for diverting the nano-imprinting material to the upper dispensing nozzle 31 and the lower dispensing nozzle 32; the dispensing unit 3 further comprises a supporting rod III 34, a rotating block 35, a rubber tube 36 for connecting the upper dispensing nozzle 31 with a rubber barrel 38 and the lower dispensing nozzle 32 with the rubber barrel 38, a rubber pump 37 for extruding nano-imprinting materials, and a rubber barrel 38 for storing nano-imprinting materials. The static eliminating unit 4 comprises a deionizing fan 41 arranged between the soft film substrate adsorption unit 1 and the imprinting substrate fixing unit 2, and the deionizing fan 41 is inclined at a certain angle to blow deionizing wind to the soft film substrate 9 and the imprinting substrate, so that static electricity of the soft film substrate 9 and the imprinting substrate is eliminated; the deionization fan 41 is provided with two groups, the static electricity removing unit 4 also comprises a horizontal rod 42 and a vertical supporting rod IV 43, and the supporting rod IV 43 is connected with a pedestal 44; the deionization fan 41 is connected with the air compressor through an air pipe II 45. The exposure unit 5 includes a UV lamp 51. The exposure unit 5 further comprises a lifting mechanism iii comprising a connecting block iii 52, a lifting rod iii 53 and a motor iii 54 for moving the UV lamp 51 up and down, the UV lamp 51 being connected to the lifting rod iii 53 via the connecting block iii 52, the lifting mechanism iii being powered by the motor iii 54. The nano imprinting equipment further comprises an equipment shell 71, universal wheels 75 and anchor feet 72 are arranged at the bottom of the equipment shell 71, alarm signal lamps 73 are arranged at the top of the equipment shell 71, and a door 74 is arranged on the front face of the equipment shell 71.

Claims

1. A nanoimprint apparatus for improving imprint uniformity, characterized in that: the nano-imprinting equipment comprises a soft film substrate adsorption unit (1) and an imprinting substrate fixing unit (2), wherein a dispensing unit (3) is arranged between the soft film substrate adsorption unit (1) and the imprinting substrate fixing unit (2), and the nano-imprinting equipment further comprises an electrostatic removing unit (4) and an exposure unit (5) for curing nano-imprinting materials;

the soft film substrate adsorption unit (1) comprises an adsorption plate (11) and a soft film substrate (9), the soft film substrate (9) is fixed on the lower surface of the adsorption plate (11) through vacuum adsorption, a vacuum connection hole I (111) connected with a vacuum pump (27) is formed in the lower surface of the adsorption plate (11), a vacuum gas circuit I (112) used for fixing the soft film substrate in vacuum is further formed in the lower surface of the adsorption plate (11), and the soft film substrate adsorption unit (1) further comprises a transparent quartz plate (113) arranged right above the imprinting substrate fixing unit (2); at least three corners of the four corners of the adsorption plate (11) are provided with laser ranging sensing transmitters I (114);

the imprinting substrate fixing unit (2) comprises an imprinting substrate adsorption disc (21) and an imprinting substrate (8) which are arranged right below the soft film substrate adsorption unit (1), and the imprinting substrate adsorption disc (21) is used for carrying out vacuum adsorption and fixing on the imprinting substrate (8); the substrate fixing unit (2) is provided with at least three supporting rods I (214), one end of each supporting rod I (214) far away from the imprinting substrate adsorption disc (21) is provided with a laser ranging sensing receiver (215), and the laser ranging sensing transmitter I (114) transmits laser and is received by the laser ranging sensing receiver (215);

the dispensing unit (3) comprises an upper dispensing nozzle (31) and a lower dispensing nozzle (32) which respectively dispense nano-imprinting materials on the soft film base material (9) and the imprinting substrate (8); the dispensing unit (3) further comprises a diversion filter device (33) for diverting the nano-imprinting material to the upper dispensing nozzle (31) and the lower dispensing nozzle (32);

the static eliminating unit (4) comprises a deionizing fan (41) arranged between the soft film substrate adsorption unit (1) and the imprinting substrate fixing unit (2), the deionizing fan (41) is inclined at a certain angle to blow deionizing wind to the soft film substrate (9) and the imprinting substrate (8), and static electricity of the soft film substrate (9) and the imprinting substrate (8) is eliminated;

the exposure unit (5) comprises a UV lamp (51). The UV lamp (51) may emit ultraviolet light to cure the nanoimprint material.

2. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the soft film substrate adsorption unit (1) further comprises a lifting mechanism I driving the adsorption plate (11) to move up and down, the lifting mechanism I comprises a connecting block I (12) and a lifting rod I (13), the lifting mechanism I provides power through a lifting motor I (14), and the adsorption plate (11) is connected with the lifting rod I (13) through the connecting block I (12).

3. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the upper surface of the imprinting substrate adsorption disc (21) is provided with a vacuum connecting hole II (211) connected with a vacuum pump (27), the upper surface of the imprinting substrate adsorption disc (21) is also provided with at least two groups of concentric annular vacuum gas paths II (212), and the vacuum pump (27) is connected with the vacuum connecting hole II (211) through a gas pipe I, so that the vacuum pump (27) forms negative pressure in the annular vacuum gas paths II (212); and an overflow groove (213) is arranged on the outer side of the annular vacuum gas circuit II (212).

4. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the stamping substrate fixing unit (2) further comprises a heating block (22) arranged at the bottom of the stamping substrate adsorption disc (21), a heat insulation plate (23) is arranged below the heating block (22), the heat insulation plate (23) is connected with a lifting mechanism II, the lifting mechanism II comprises a connecting block II (24) and a lifting rod II (25), the lifting mechanism II provides power through a lifting motor II (26), and the heat insulation plate (23) is fixedly connected with the lifting rod II (25) through the connecting block II (24).

5. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the lifting motor II (26) is externally fixed with a supporting rod II (28), one end of the supporting rod II (28) is provided with a laser ranging sensing transmitter II (29), and the laser ranging sensing transmitter II (29) transmits laser and is received by a laser ranging sensing receiver (215).

6. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the dispensing unit (3) further comprises a supporting rod III (34), a rotating block (35), a rubber tube (36) for connecting the upper dispensing nozzle (31) with a rubber barrel (38) and the lower dispensing nozzle (32) with the rubber barrel (38), a rubber pump (37) for extruding the nano imprinting material, and the rubber barrel (38) for storing the nano imprinting material.

7. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the deionization fan (41) is provided with two groups, the static electricity removal unit (4) further comprises a horizontal rod (42) and a vertical supporting rod IV (43), and the supporting rod IV (43) is connected with the base (44); the deionization fan (41) is connected with the air compressor through an air pipe II (45).

8. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the exposure unit (5) further comprises a lifting mechanism III, the lifting mechanism III comprises a connecting block III (52), a lifting rod III (53) and a motor III (54) used for enabling the UV lamp (51) to move up and down, the UV lamp (51) is connected with the lifting rod III (53) through the connecting block III (52), and the lifting mechanism III provides power through the motor III (54).

9. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the nano-imprinting equipment further comprises a fan filter unit (6) arranged at the top of the nano-imprinting equipment.

10. A nanoimprint apparatus for improving imprint uniformity as claimed in claim 1, wherein: the nano imprinting equipment further comprises an equipment shell (71), universal wheels (75) and ground feet (72) are arranged at the bottom of the equipment shell (71), an alarm signal lamp (73) is arranged at the top of the equipment shell (71), and a door body (74) is arranged on the front face of the equipment shell (71).