CN116184684A - Multi-dimensional fine-tuning optical system and assembling and tuning method for composite detection - Google Patents

Abstract

The invention provides a multi-dimensional fine-tuning optical system and an assembling and tuning method for composite detection. The optical system includes: the method comprises the steps of sequentially completing assembly and adjustment of each module lens group by utilizing an auto-collimation principle, namely a horizontal type center-offset auto-collimator, a vertical type center-offset auto-collimator and other instruments, then completing primary assembly by primary image surface connection and secondary image surface connection, then performing secondary adjustment on eccentricity, inclination, axial distance and the like of each lens group by taking imaging/signal amplitude of a tertiary image surface (focal surface) as adjustment, finally performing complementary fine adjustment on certain lenses inside each lens group according to tolerance distribution characteristics according to image data and design files, and until the characteristic of diffuse spots/image quality/signal to noise ratio can meet or be close to the index requirements of three channels. The method can rapidly, effectively and accurately realize the adjustment of the optical system facing the compound detection.

Description

Multi-dimensional fine-tuning optical system and assembling and tuning method for composite detection

Technical Field

The invention relates to the technical field of optics, in particular to an optical system for laser and infrared composite detection and an assembling and adjusting method.

Background

It has been found through searching that a miniaturized roll-pitch type long wave refrigerating optical system in patent document CN201810967571.0 is an optical system applied to long wave infrared refrigeration and is a single infrared optical system.

The existing imaging optical system mainly adopts a single infrared optical system or a single active/passive laser optical system, and the two optical systems exist independently, so that the problems of the existing photoelectric product that the anti-interference capability and the detection capability for stealth and weak targets are insufficient are difficult to meet.

Disclosure of Invention

In order to solve the technical problems, the invention provides a multi-dimensional fine tuning optical system and an assembling and tuning method for composite detection. The optical system comprises a Karsch fold-back, a roll-up type frame platform and an infrared laser beam splitting optical system, and comprises 5 module components such as a primary lens group, a secondary lens group, a roll-up lens group, a bias lens group, a laser lens group and an infrared lens group.

The technical scheme of the invention is as follows:

a multi-dimensional fine tuning optical system for composite detection, comprising: a primary and secondary lens group, a rolling lens group, a bias lens group, a laser lens group and an infrared lens group;

the light path forms a primary image surface connection after passing through the primary and secondary lens groups, and enters the rolling lens group.

The light path is reflected by the rolling mirror group for four times and then enters the offset mirror group through the connection of the secondary image surface.

The offset lens group is used for turning back the laser in the light path and then entering the laser lens group, and simultaneously, the infrared light in the light path is incident to the infrared lens group.

Optionally, the primary and secondary lens groups are karst fold back lens groups.

Optionally, the light path in the rolling mirror group is subjected to four right-angle refraction and reflection on the intersecting plane of the pitching axis and the rolling frame rotating shaft.

Optionally, the roll mirror group includes: the first turning reflector, the third laser infrared shared correction lens, the second turning reflector, the third turning reflector, the fourth turning reflector and the fourth laser infrared shared correction lens;

the center of the optical axis of the first right angle refraction and the rotating shaft of the pitching frame coincide, and the second right angle refraction and reflection reflect the optical path to the direction parallel to the rotating shaft of the rolling frame; returning the light path to the overlapping direction of the rolling shaft through the third and fourth right-angle folding back; the roll-up shaft coincides with the initial incidence head cover optical axis; the included angle between the reflecting mirror corresponding to each right angle refraction and the incident light is 45 degrees.

Optionally, the offset lens group includes: a fifth turning mirror and a sixth turning mirror;

the fifth turning reflector is a laser infrared spectroscope, and can transmit infrared light and reflect laser;

the sixth turning reflector is a laser reflector and reflects the laser light path to the light path parallel to the infrared light path.

An optical system adjusting method for adjusting the multi-dimensional fine-tuning optical system facing the composite detection comprises the following steps:

1) Setting up a center deviation autocollimator and a center deviation autocollimator by utilizing an autocollimation principle, and respectively completing the assembly and adjustment of a primary lens group, a secondary lens group, a rolling lens group, a bias lens group, a laser lens group and an infrared lens group in sequence;

2) Primary assembly is completed through primary image surface connection and secondary image surface connection;

3) Taking the imaging amplitude and the signal amplitude of the three-time image plane as adjustment, and carrying out secondary adjustment on the eccentricity, the inclination, the axial distance and the like of the primary lens group, the secondary lens group, the rolling lens group, the offset lens group, the laser lens group and the infrared lens group;

4) And finally, according to the image data and the tolerance distribution characteristics, carrying out complementary fine adjustment on the interiors of the primary lens group, the secondary lens group, the rolling lens group, the offset lens group, the laser lens group and the infrared lens group until the characteristic of diffuse spots, the image quality and the signal to noise ratio can meet the index requirements of three channels.

The method for erecting the center deviation self-aligning instrument and the center deviation self-aligning instrument in the step 1) comprises the following specific steps:

by utilizing the auto-collimation principle, an initial reference axis is set firstly: an X1 axis and a Y1 axis; a center misalignment self-aligning instrument A1 is arranged on a horizontal plane, and the center of an optical axis of the center misalignment self-aligning instrument A1 is taken as an X1 axis;

two coaxial center deviation aligners A2 and a center deviation aligners A3 are arranged at the orthogonal position of the X1 axis on the horizontal plane by the auto-collimation principle, and the center of the optical axis of the two center deviation aligners is taken as the Y1 axis;

on the same plane, a certain distance y1 and y2 is arranged in the direction parallel to the X1 axis; y1 is the distance between the infrared passing optical axis and the optical axis of the laser channel required in the optical design, and y2 is the distance between the optical path and the optical axis of the infrared channel required in the optical design after the optical path is folded back to the direction parallel to the rotating shaft of the rolling frame through the second right angle of the rolling mirror group;

the distance y1 is controlled through a high-precision horizontal displacement table, a center deviation self-aligning instrument A11 is arranged, and the center of an optical axis of the center deviation self-aligning instrument A11 is taken as an X2 axis; the distance y2 is controlled through a high-precision horizontal displacement table, a center deviation self-aligning instrument A6 is arranged, and the center of an optical axis of the center deviation self-aligning instrument A6 is taken as an X3 axis;

the distance between the center deviation self-aligning instrument A11 and the center deviation self-aligning instrument A6 is x1 by the direction parallel to the Y1 axis on the same plane, wherein x1 is the distance between the optical path centers of the first turning mirror and the second turning mirror of the rolling mirror group of the optical system and the optical path centers of the third turning mirror and the fourth turning mirror;

initially arranging a center-off-center aligner A4 and a center-off-center aligner A5; the interval distance between the center deviation self-aligning instrument A4 and the center deviation self-aligning instrument A5 is x2, wherein x2 is the distance between the optical path centers of the first turning mirror and the second turning mirror of the rolling mirror group of the optical system and the optical path center of the offset mirror group 3;

initially arranging a center-off-center aligner A7 and a center-off-center aligner A8; the interval distance between the center deviation self-aligning instrument A7 and the center deviation self-aligning instrument A8 is x3, and x3 is the distance between the optical path centers of the first turning mirror and the second turning mirror of the rolling mirror group of the optical system and the optical path center of the laser mirror group which is turned back by the seventh turning mirror.

Further, the assembly and adjustment mode of the rolling mirror group is as follows:

a center deviation autocollimator A2 and a center deviation autocollimator A3 which are orthogonal with the X1 axis are arranged on the position which is away from the X1 axis X1 on the adjustment reference plane by utilizing the autocollimator principle, and the center axis of the center deviation autocollimator A3 is the Y2 axis;

a fourth laser infrared shared correction lens is installed by using a center deviation self-aligning instrument A1 on the X1 axis, so that the central axis of the fourth laser infrared shared correction lens is coaxial with the X1 axis;

a third laser infrared shared correction lens is installed by using a center deviation self-aligning instrument A2 or a center deviation self-aligning instrument A3 on the Y1 axis, so that the central axis of the third laser infrared shared correction lens is coaxial with the Y1 axis;

the center deviation self-alignment instrument on the X1 axis, the X3 axis and the Y2 axis is used as a reference to install the first turning mirror, the second turning mirror, the third turning mirror and the fourth turning mirror;

the first turning reflecting mirrors are 45 degrees with the X1 axis and the Y1 axis,

the reflecting surface of the first turning reflecting mirror passes through the intersection point of the X1 axis and the Y1 axis; making the second turning mirror form 45 degrees with the X3 axis and the Y1 axis, and making the reflecting surface of the second turning mirror pass through the intersection point of the X3 axis and the Y1 axis;

the third turning reflector forms 45 degrees with the X3 axis and the Y2 axis, and the reflecting surface of the third turning reflector passes through the intersection point of the X3 axis and the Y2 axis; the fourth turning mirror forms 45 degrees with the X1 axis and the Y2 axis, and the reflecting surface of the fourth turning mirror passes through the intersection point of the X1 axis and the Y2 axis.

Further, the offset lens group is assembled and adjusted in the following way:

a center deviation autocollimator A10 orthogonal to the X2 axis is arranged on the adjustment reference plane at a distance from the Y1 axis X2 by utilizing the autocollimation principle, and the central axis of the center deviation autocollimator A10 is taken as the Y3 axis; mounting the fifth turning mirror and the sixth turning mirror by using the center misalignment meter on the X1 axis, the X2 axis and the Y3 axis as a reference, so that the fifth turning mirror and the sixth turning mirror form 45 degrees with the X axis and the Y axis, and the reflecting surface of the fifth turning mirror passes through the intersection point of the X1 axis and the Y3 axis; the sixth turning mirror reflection surface passes through the intersection point of the X2 axis and the Y3 axis.

Further, the laser lens group is assembled and adjusted in the following way:

after the front optical wedge lens and the rear optical wedge lens are processed, coated and detected, the components such as a motor, a driver, a bearing, a code disc and the like are packaged to form a double-optical-wedge scanning module;

a first laser lens, a second laser lens, a third laser lens and a fourth laser lens are sequentially arranged by taking a center deviation self-aligning instrument A10 on an X2 axis as a reference, so that the lens centers of the first laser lens, the second laser lens, the third laser lens and the fourth laser lens are coaxial on the X2 axis;

a center deviation self-alignment A8 and a center deviation self-alignment A9 which are orthogonal to the X2 axis are arranged on the position, which is away from the X3 axis, of the Y1 axis on the adjustment reference plane by utilizing the self-alignment principle, and the central axes of the center deviation self-alignment A8 and the center deviation self-alignment A9 are taken as Y4 axes; the center of the lens of the laser focusing mirror and the lens of the laser detector are coaxial on the Y4 axis by using the center deviation self-aligning instrument A8 on the Y4 axis and the center deviation self-aligning instrument A9 as a reference to be arranged on the photosensitive surfaces of the laser focusing mirror and the laser detector;

assembling a seventh turning reflector by utilizing an auto-collimation principle, so that the seventh turning reflector forms 45 degrees with an X2 axis and a Y4 axis, and the reflecting surface of the seventh turning reflector passes through the intersection point of the X2 axis and the Y4 axis;

and the double-optical-wedge scanning module is arranged between the third laser lens and the seventh turning reflecting mirror.

Compared with the prior art, the invention has the beneficial effects that:

the invention provides a multi-dimensional fine-tuning optical system and an adjustment method for composite detection.

Drawings

FIG. 1 is a schematic diagram of an assembly and adjustment of a multi-dimensional fine adjustment optical system for composite detection according to an embodiment of the present invention;

FIG. 2 is a schematic diagram illustrating the adjustment of the primary and secondary lens assemblies according to an embodiment of the present invention;

FIG. 3 is a schematic diagram illustrating an assembly of a roll-over lens assembly according to an embodiment of the present invention;

FIG. 4 is a schematic diagram illustrating an adjustment of a bias lens assembly according to an embodiment of the present invention;

FIG. 5 is a schematic diagram illustrating an infrared lens assembly according to an embodiment of the present invention;

fig. 6 is a schematic diagram of an assembly of a laser lens set according to an embodiment of the present invention.

Reference numerals illustrate:

1-primary and secondary lens groups, 2-rolling lens groups, 3-bias lens groups, 4-laser lens groups and 5-infrared lens groups;

a first centering and aligning instrument on an A1-X1 axis, a first centering and aligning instrument on an A2-Y1 axis, a second centering and aligning instrument on an A3-Y1 axis, a first centering and aligning instrument on an A4-Y2 axis, a second centering and aligning instrument on an A5-Y2 axis, a third centering and aligning instrument on an A6-X3 axis, a fourth centering and aligning instrument on an A7-Y3 axis, a third centering and aligning instrument on an A8-Y3 axis, a fourth centering and aligning instrument on an A9-Y4 axis, a third centering and aligning instrument on an A10-Y4 axis, and a fourth centering and aligning instrument on an A11-X2 axis;

the laser-infrared light source comprises a 101-laser-infrared shared optical head cover, a 102-laser-infrared shared secondary mirror, a 103-first laser-infrared shared correction lens, a 104-second laser-infrared shared correction lens and a 105-laser-infrared shared main reflector;

201-a first turning mirror, 202-a third laser infrared shared correction lens, 203-a second turning mirror, 204-a third turning mirror, 205-a fourth turning mirror, 206-a fourth laser infrared shared correction lens;

301-fifth turning mirror, 302-sixth turning mirror;

401-a first infrared lens, 402-a second infrared lens and an infrared detector photosurface;

501-a first laser lens, 502-a second laser lens, 503-a third laser lens, 504-a front wedge lens, 505-a rear wedge lens, 506-a seventh turning mirror, 507-a fourth laser lens, 508-an active laser emission port, 509-a laser focusing mirror, 510-a laser detector photosurface.

Detailed Description

What is not described in detail in the present specification is a well known technology to those skilled in the art.

The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the present invention. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the invention, are within the scope of the embodiments of the invention.

A multi-dimensional fine tuning optical system for composite detection is an optical system comprising a Karsch fold, a roll-back type frame platform and infrared laser beam splitting, and comprises: a primary and secondary lens group, a rolling lens group, a bias lens group, a laser lens group and an infrared lens group. The light beam is turned back through the primary and secondary lens groups after passing through the hood, and the light path forms a primary image surface connection after passing through the primary and secondary lens groups and enters the rolling lens group. The light path is reflected by the rolling mirror group for four times and then enters the offset mirror group through the connection of the secondary image surface. The offset lens group is used for turning back the laser in the light path and then entering the laser lens group, and simultaneously, the infrared light in the light path is incident to the infrared lens group. The primary and secondary lens groups are Karsch fold lens groups.

The optical path in the rolling mirror group is folded and reversed at four right angles on the crossing plane of the pitching axis and the rolling frame rotating shaft, and the requirement on the position adjustment precision of the four-side reflecting mirror is high, so that the high imaging quality of the rolling optical system can be ensured.

The roll mirror group includes: the first turning reflector, the third laser infrared shared correction lens, the second turning reflector, the third turning reflector, the fourth turning reflector and the fourth laser infrared shared correction lens;

the optical path passes through the pitching axis of the pitching frame of the rolling platform, and is firstly subjected to twice right-angle folding and reversing on the pitching axis, so that the optical path is led to the direction parallel to the rotating shaft of the rolling frame, and the optical imaging is not influenced by the rotation of the pitching frame. The center of the optical axis of the first right angle refraction and the rotating shaft of the pitching frame coincide, and the second right angle refraction and reflection reflect the optical path to the direction parallel to the rotating shaft of the rolling frame; returning the light path to the overlapping direction of the rolling shaft through the third and fourth right-angle folding back; the roll-up shaft coincides with the initial incidence head cover optical axis; the included angle between the reflecting mirror corresponding to each right angle refraction and the incident light is 45 degrees.

The offset lens group comprises: a fifth turning mirror and a sixth turning mirror; the fifth turning reflector is a laser infrared spectroscope, and can transmit infrared light, reflect laser and split infrared laser in a laser infrared composite light path; the sixth turning reflector is a laser reflector and reflects the laser light path to the light path parallel to the infrared light path.

And after the laser infrared composite light is split by the fifth turning reflecting mirror, infrared light enters the infrared mirror group. The infrared lens group comprises a first infrared lens, a second infrared lens and an infrared detector photosensitive surface; after the laser infrared composite light is split by the fifth turning reflector, the laser light path is reflected to the sixth turning reflector and is turned back again to enter the laser lens group; the laser lens group comprises a first laser lens, a second laser lens, a third laser lens, a front optical wedge lens, a rear optical wedge lens, a seventh turning reflecting mirror, a fourth laser lens, an active laser emission port, a laser focusing mirror and a laser detector photosensitive surface.

The lens system comprises a main lens group, a secondary lens group, a rolling lens group, a bias lens group, an infrared lens group, a laser lens group and other 5 module lens groups, wherein the module lens groups are connected through a connecting structure.

An optical system adjusting method for adjusting the multi-dimensional fine-tuning optical system facing the composite detection comprises the following steps:

1) Setting up a center deviation autocollimator and a center deviation autocollimator by utilizing an autocollimation principle, and respectively completing the assembly and adjustment of a primary lens group, a secondary lens group, a rolling lens group, a bias lens group, a laser lens group and an infrared lens group in sequence;

2) Primary assembly is completed through primary image surface connection and secondary image surface connection;

3) Taking the imaging amplitude and the signal amplitude of the three-time image plane as adjustment, and carrying out secondary adjustment on the eccentricity, the inclination, the axial distance and the like of the primary lens group, the secondary lens group, the rolling lens group, the offset lens group, the laser lens group and the infrared lens group;

4) And finally, according to the image data and the tolerance distribution characteristics, carrying out complementary fine adjustment on the interiors of the primary lens group, the secondary lens group, the rolling lens group, the offset lens group, the laser lens group and the infrared lens group until the characteristic of diffuse spots, the image quality and the signal to noise ratio can meet the index requirements of three channels.

Referring to fig. 1 to 6 in combination, the present invention provides a multi-dimensional fine tuning optical system for composite detection.

The optical system for composite detection is an optical system comprising a Karsch fold-back, a roll-back type frame platform and infrared laser beam splitting, and comprises 5 module components, such as a primary lens group 1, a secondary lens group 2, a bias lens group 3, a laser lens group 4, an infrared lens group 5 and the like.

As shown in fig. 2, the light beam is folded back through the main and secondary lens groups after passing through the hood, and the main and secondary lens group 1 is a karst folding lens group, and includes a laser infrared shared optical hood 101, a laser infrared shared secondary lens 102, a first laser infrared shared correction lens 103, a second laser infrared shared correction lens 104 and a laser infrared shared main reflector 105; the light path forms a primary image surface connection after passing through the primary and secondary lens groups 1, and enters the rolling lens group 2.

As shown in fig. 3, the rolling mirror group 2 includes a first turning mirror 201, a third laser infrared common correction lens 202, a second turning mirror 203, a third turning mirror 204, a fourth turning mirror 205, and a fourth laser infrared common correction lens 206; the optical path passes through the pitching axis of the pitching frame of the rolling platform, and is firstly subjected to twice right-angle folding and reversing on the pitching axis, so that the optical path is led to the direction parallel to the rotating shaft of the rolling frame, and the optical imaging is not influenced by the rotation of the pitching frame. The center of the optical axis of the first right-angle refraction needs to coincide with the rotating shaft of the pitching frame, the second right-angle refraction is to turn the optical path to the direction parallel to the rotating shaft of the rolling frame, then the third right-angle refraction and the fourth right-angle refraction are carried out, and the optical path is returned to the overlapping direction of the rolling shaft through the third right-angle refraction and the fourth right-angle refraction. The roll-back shaft coincides with the optical axis of the laser infrared common optical head cover 101 which is initially incident; the four right-angle refraction and reflection are all that the included angle between the reflecting mirror and the incident light is 45 degrees, the light path is subjected to four-time refraction and reflection on the intersecting plane of the pitching axis and the rotating shaft of the rolling frame, and the requirement on the position adjustment precision of the four-side reflecting mirror is high, so that the high imaging quality of the rolling optical system can be ensured.

The light path is reflected by the rolling mirror group 2 for four times, and then enters the offset mirror group 3 through the connection of the secondary image surface. As shown in fig. 4, the offset mirror group 3 includes a fifth turning mirror 301 and a sixth turning mirror 302; the fifth turning mirror 301 is a laser infrared spectroscope, and can transmit infrared light, reflect laser light, and split infrared laser light in a laser infrared composite light path; the sixth turning mirror 302 is a laser mirror, and turns the laser light path back to the laser light path parallel to the infrared light path;

after the laser infrared composite light is split by the fifth turning reflecting mirror 301, the infrared light enters the infrared mirror group 4. As shown in fig. 5, the infrared lens set 4 includes a first infrared lens 401, a second infrared lens 402, and an infrared detector photosensitive surface 403;

after the laser infrared composite light is split by the fifth turning mirror 301, the laser light path is reflected to the sixth turning mirror 302, and then is turned back again to enter the laser lens group 5; as shown in fig. 6, the laser lens group 5 includes a first laser lens 501, a second laser lens 502, a third laser lens 503, a front wedge lens 504, a rear wedge lens 505, a seventh turning mirror 506, a fourth laser lens 507, an active laser emission port 508, a laser focusing mirror 509 and a laser detector photosurface 510;

the lens system comprises a main lens group and a secondary lens group, wherein the main lens group and the secondary lens group are respectively provided with 5 module lens groups, such as a rolling lens group 1, a biasing lens group 3, an infrared lens group 4, a laser lens group 5 and the like, and the module lens groups are connected through a connecting structure.

The invention provides an assembling and adjusting method of a multi-dimensional fine-tuning optical system for composite detection. The specific process is as follows: by using a plurality of center-offset autocollimators, an initial reference axis is set based on an autocollimation principle: an X1 axis and a Y1 axis. A center misalignment self-aligning instrument A1 is arranged on a horizontal plane, and the center of an optical axis of the center misalignment self-aligning instrument A1 is taken as an X1 axis; two coaxial center deviation self-aligning instruments (A2 and A3) are arranged at the position orthogonal to X on a horizontal plane by an auto-alignment principle, and the center of the optical axis of the two center deviation self-aligning instruments is taken as a Y1 axis; on the same plane, a certain distance y1 and y2 is arranged in the direction parallel to the X1 axis; y1 is the distance between the infrared passing optical axis and the optical axis of the laser channel required in the optical design, and y2 is the distance between the optical path and the optical axis of the infrared channel required in the optical design after the optical path is folded back to the direction parallel to the rotating shaft of the rolling frame through the second right angle of the rolling mirror group 2; the distance y1 is controlled through a high-precision horizontal displacement table, a center deviation self-aligning instrument A11 is arranged, and the center of an optical axis of the center deviation self-aligning instrument A11 is taken as an X2 axis; the distance y2 is controlled through a high-precision horizontal displacement table, a center deviation self-aligning instrument A6 is arranged, and the center of an optical axis of the center deviation self-aligning instrument A6 is taken as an X3 axis; the distance x1 is controlled by a high-precision horizontal displacement table in the direction parallel to the Y1 axis on the same plane, wherein the distance x1 is the distance between the optical path centers of the first turning mirror 201 and the second turning mirror 203 of the rolling mirror group 2 of the optical system and the optical path centers of the third turning mirror 204 and the fourth turning mirror 205; initially arranging three center misalignment aligners (A4 and A5); the distance x2 is controlled by a high-precision horizontal displacement table, wherein the distance x2 is the distance between the optical path centers of the first turning mirror 201 and the second turning mirror 203 of the rolling mirror group 2 of the optical system and the optical path center of the offset mirror group 3; initially arranging three center misalignment aligners (A7 and A8); the distance x3 is controlled by a high-precision horizontal displacement table, wherein the distance x3 is the distance between the optical path centers of the first turning mirror 201 and the second turning mirror 203 of the rolling mirror group 2 of the optical system and the optical path center of the laser mirror group 5 which is turned back by the seventh turning mirror 506; initially arranging three center misalignment aligners (A9 and A10);

the primary and secondary lens groups 1 are assembled and adjusted in the following manner: the center deviation self-aligning instrument on the X1 axis is used as a reference, the laser infrared shared main reflecting mirror 105, the second laser infrared shared correcting lens 104, the first laser infrared shared correcting lens 103, the laser infrared shared secondary mirror 102 and the laser infrared shared optical head cover 101 are sequentially assembled and adjusted, the centers of all lenses in the lens group are coaxial, and the axial coarse assembling and adjusting of the lenses in the main lens group and the secondary lens group 1 are ensured by the machining precision of the mounting structure of each lens. Thereby assembling the primary and secondary mirror group 1.

The rolling mirror group 2 is installed and adjusted in the following manner: on the basis of the auto-collimation principle, center-offset auto-aligners A2 and A3 which are orthogonal to the X1 axis are arranged on the adjustment reference plane at a distance from the X1 axis X1, and the center of the center-offset auto-aligners A2 and A3 is taken as the Y2 axis; a fourth laser infrared shared correction lens 206 is installed by using a center deviation self-aligning instrument A1 on the X1 axis, so that the central axis of the fourth laser infrared shared correction lens 206 is coaxial with the X1 axis, and the position of the fourth laser infrared shared correction lens on the X1 axis is ensured by an installation structure; a third laser infrared shared correction lens 202 is installed by using a center deviation autocollimator A2 or A3 on the Y1 axis, so that the central axis of the third laser infrared shared correction lens 202 is coaxial with the Y1 axis, and the position of the third laser infrared shared correction lens on the Y1 axis is ensured by an installation structure; the first turning mirror 201, the second turning mirror 202, the third turning mirror 204 and the fourth turning mirror 205 are installed using the center misalignment meter on the X1 axis, the X3 axis and the Y2 axis as a reference. Making the first turning mirror 201 and the X1 axis and the Y1 axis form 45 degrees, and making the reflecting surface of the first turning mirror 201 pass through the intersection point of the X1 axis and the Y1 axis; making the second turning mirror 202 form 45 degrees with the X3 axis and the Y1 axis, and making the reflecting surface of the second turning mirror 202 pass through the intersection point of the X3 axis and the Y1 axis; making the third turning mirror 204 form 45 degrees with the X3 axis and the Y2 axis, and making the reflecting surface of the third turning mirror 204 pass through the intersection point of the X3 axis and the Y2 axis; making the fourth turning mirror 205 form 45 degrees with the X1 axis and the Y2 axis, and making the fourth turning mirror reflecting surface 205 pass through the intersection point of the X1 axis and the Y2 axis;

the offset lens group 3 is installed and adjusted in the following way: a center-offset autocollimator A10 which is orthogonal to the X2 axis is arranged on the adjustment reference plane at a distance from the X2 axis of the Y1 axis by utilizing the autocollimation principle, and the center of the autocollimator A10 is taken as the Y3 axis; mounting the fifth turning mirror 301 and the sixth turning mirror 302 by using the center misalignment meter on the X1 axis, the X2 axis and the Y3 axis as a reference, so that the fifth turning mirror 301 and the sixth turning mirror 302 form 45 degrees with the X axis and the Y axis, and the reflecting surface 301 of the fifth turning mirror 301 passes through the intersection point of the X1 axis and the Y3 axis; the reflecting surface of the sixth turning mirror 302 passes through the intersection point of the X2 axis and the Y3 axis;

the infrared lens group 4 is installed and adjusted in the following manner: the first infrared lens 401, the second infrared lens 402 and the photosensitive surface 403 of the infrared detector are sequentially arranged by taking the center deviation self-aligning instrument on the X1 axis as a reference, so that the center optical axis of each lens and the X1 axis are coaxially arranged in the installation structure of the infrared lens group 4, and the lens installation and adjustment of the infrared lens group 4 are completed;

the laser lens group 5 is installed and adjusted in the following way:

after the processing, coating and detection of the two double-optical-wedge lenses (the front optical wedge lens 504 and the rear optical wedge lens 505) are finished, packaging the components such as a motor, a driver, a bearing, a code disc and the like, and then carrying out the assembly and packaging of the double optical wedges and the rotating mechanism to form a double-optical-wedge scanning module;

the center of the lens is coaxial on the X2 axis by using the center deviation self-aligning instrument A10 on the X2 axis as a reference, and sequentially arranging a first laser lens 501, a second laser lens 502, a third laser lens 503 and a fourth laser lens 507, wherein the positions of the lens on the X2 axis are ensured by a mounting structure;

on the adjustment reference plane, center misalignment A8 and A9 orthogonal to the X2 axis are arranged on a distance from the Y1 axis X3 by utilizing the auto-collimation principle, and the center of the center misalignment A8 and A9 is taken as the Y4 axis; the center of each lens is coaxial on the Y4 axis by using the center misalignment automatic alignment instruments A8 and A9 on the Y4 axis as the reference, and the laser focusing lens 509 and the laser detector photosensitive surface 510 are installed, and the positions of the lens centers on the Y4 axis are ensured by the installation structure;

assembling a seventh turning reflector 506 by utilizing an auto-collimation principle, so that the seventh turning reflector 506 forms 45 degrees with an X2 axis and a Y4 axis, and the reflecting surface passes through the intersection point of the X2 axis and the Y4 axis;

the double-optical-wedge scanning module is arranged between the third laser lens 503 and the seventh turning reflecting mirror 507, and the installation reference surface is parallel to the surface which is always parallel to each other through the front optical wedge lens and the rear optical wedge lens;

through the steps, the adjustment of the laser lens group 5 is completed;

the method comprises the steps of sequentially completing assembly and adjustment of each module lens group by utilizing an auto-collimation principle, sequentially completing primary assembly by primary image surface connection and secondary image surface connection, performing secondary adjustment on eccentricity, inclination, axial distance and the like of each lens group by taking imaging/signal amplitude of a tertiary image surface (focal surface) as adjustment, and finally performing complementary fine adjustment on a certain lens inside each lens group according to tolerance distribution characteristics by combining image data and design files until the characteristic of diffuse spots/image quality/signal to noise ratio can meet or be close to the index requirements of three channels.

The method can rapidly, effectively and accurately realize the adjustment of the optical system facing the compound detection.

Principle of auto-collimation: the two center-offset autocollimators on the same plane can be orthogonal and perpendicular to the center optical axis through the autocollimators and standard crystals, and the reflecting mirror plates which form 45 degrees with the center optical axes of the two orthogonal center-offset autocollimators can be quickly adjusted through the autocollimator principle, and the reflecting surfaces of the reflecting mirrors pass through the intersection point of the center optical axes of the two orthogonal center-offset autocollimators. The specific method comprises the following steps: firstly, taking the central optical axis of a first central deviation aligning instrument as an X axis, placing a 45-degree standard angle reflecting mirror right in front of the first central deviation aligning instrument, placing a light beam on the X axis, and arranging a second central deviation aligning instrument on a light path reflected by the 45-degree standard angle reflecting mirror; the position of the second center deviation self-aligning instrument is adjusted, so that the image from the first center deviation self-aligning instrument to the second center deviation self-aligning instrument through the reflecting mirror coincides with the center of the second center deviation self-aligning instrument, and the center optical axes of the two center deviation self-aligning instruments are orthogonal and perpendicular; after the first and second centers are offset from the center of the collimator by orthogonal directions, a 45 DEG refractive mirror is required to be adjusted. Firstly, roughly installing a refraction mirror at the intersection position point of the central optical axis of the first central deviation self-aligning instrument and the central optical axis of the second central deviation self-aligning instrument, marking out a cross target beam through the first central deviation self-aligning instrument, generating a cross target image in the first central deviation self-aligning instrument after reflection by the refraction mirror needing to be adjusted, and adjusting the position and the angle of the refraction mirror to enable the cross target image to be at the center of the second central deviation self-aligning instrument, so that 45-degree adjustment of the refraction mirror and the optical axes of the two central deviation self-aligning instruments is completed, and the reflection surface of the refraction mirror passes through the optical axis intersection point of the two central deviation self-aligning instruments.

Although the present invention has been described in terms of the preferred embodiments, it is not intended to be limited to the embodiments, and any person skilled in the art can make any possible variations and modifications to the technical solution of the present invention by using the methods and technical matters disclosed above without departing from the spirit and scope of the present invention, so any simple modifications, equivalent variations and modifications to the embodiments described above according to the technical matters of the present invention are within the scope of the technical matters of the present invention.

What is not described in detail in the present specification is a known technology to those skilled in the art.

Claims (10)

1. A multi-dimensional fine tuning optical system for composite detection, comprising: the device comprises a primary mirror group (1), a secondary mirror group (2), a rolling mirror group (3), a biasing mirror group (3), a laser mirror group (3) and an infrared mirror group (5);

the light path forms a primary image surface connection after passing through the primary and secondary lens groups (1) and enters the rolling lens group (2);

the light path is reflected by the rolling mirror group (2) for four times and then enters the offset mirror group (3) through the connection of the secondary image surface;

the offset lens group (3) is used for turning back the laser in the light path and then entering the laser lens group (3), and meanwhile, the infrared light in the light path is incident to the infrared lens group (5).

2. The multi-dimensional fine tuning optical system for composite detection according to claim 1, wherein the primary and secondary lens groups (1) are casserole fold back lens groups.

3. The multi-dimensional fine tuning optical system for composite detection according to claim 1, wherein the optical path in the roll-off mirror group (2) is folded at four right angles in the plane of intersection of the pitch axis and the roll-off frame axis of rotation.

4. A multi-dimensional fine tuning optical system for composite detection according to claim 3, wherein the roll-over mirror group (2) comprises: a first turning mirror (201), a third laser infrared shared correction lens (202), a second turning mirror (203), a third turning mirror (204), a fourth turning mirror (205) and a fourth laser infrared shared correction lens (206);

the center of the optical axis of the first right angle refraction and the rotating shaft of the pitching frame coincide, and the second right angle refraction and reflection reflect the optical path to the direction parallel to the rotating shaft of the rolling frame; returning the light path to the turning shaft overlapping direction through third and fourth right-angle turning; the roll-up shaft coincides with the initial incidence head cover optical axis; the included angle between the reflecting mirror corresponding to each right angle refraction and the incident light is 45 degrees.

5. A multi-dimensional fine tuning optical system for composite detection according to any one of claims 2 to 4, wherein the offset mirror group (3) comprises: a fifth turning mirror (301) and a sixth turning mirror (302);

the fifth turning reflector (301) is a laser infrared spectroscope, and can transmit infrared light and reflect laser;

the sixth turning mirror (302) is a laser mirror, which turns the laser light path back to the light path parallel to the infrared light path.

6. An optical system tuning method for tuning a multi-dimensional fine tuning optical system for composite inspection according to claim 5, comprising the steps of:

1) erecting a center deviation autocollimator and a center deviation autocollimator by utilizing an autocollimation principle, and sequentially and respectively completing the adjustment of a primary lens group (1), a secondary lens group (2), a bias lens group (3), a laser lens group (3) and an infrared lens group (5);

2) Primary assembly is completed through primary image surface connection and secondary image surface connection;

3) Taking imaging amplitude and signal amplitude of a three-time image plane as adjustment, and carrying out secondary adjustment on eccentricity, inclination, axial distance and the like of a main lens group (1), a rolling lens group (2), a biasing lens group (3), a laser lens group (3) and an infrared lens group (5);

4) And finally, according to the image data and the tolerance distribution characteristics, carrying out complementary fine adjustment on the insides of the primary and secondary lens groups (1), the rolling lens group (2), the offset lens group (3), the laser lens group (3) and the infrared lens group (5) until the characteristic of diffuse spots, the image quality and the signal to noise ratio can meet the index requirements of three channels.

7. The method for adjusting an optical system according to claim 6, wherein in step 1), the method for installing a center-shift aligner and a center-shift aligner comprises:

by utilizing the auto-collimation principle, an initial reference axis is set firstly: an X1 axis and a Y1 axis; a center misalignment self-aligning instrument A1 is arranged on a horizontal plane, and the center of an optical axis of the center misalignment self-aligning instrument A1 is taken as an X1 axis;

two coaxial center deviation aligners A2 and a center deviation aligners A3 are arranged at the orthogonal position of the X1 axis on the horizontal plane by the auto-collimation principle, and the center of the optical axis of the two center deviation aligners is taken as the Y1 axis;

on the same plane, a certain distance y1 and y2 is arranged in the direction parallel to the X1 axis; y1 is the distance between the infrared passing optical axis and the optical axis of the laser channel required in the optical design, and y2 is the distance between the optical path and the optical axis of the infrared channel required in the optical design after the second right-angle refraction and reflection of the optical path to the direction parallel to the rotating shaft of the rolling frame through the rolling mirror group (2);

the distance y1 is controlled through a high-precision horizontal displacement table, a center deviation self-aligning instrument A11 is arranged, and the center of an optical axis of the center deviation self-aligning instrument A11 is taken as an X2 axis; the distance y2 is controlled through a high-precision horizontal displacement table, a center deviation self-aligning instrument A6 is arranged, and the center of an optical axis of the center deviation self-aligning instrument A6 is taken as an X3 axis;

the distance between the center deviation self-aligning instrument A11 and the center deviation self-aligning instrument A6 is x1 by the distance between the center of the optical path of the first turning mirror (201) (201) and the second turning mirror (203) (203) of the rolling mirror group (2) of the optical system and the distance between the center of the optical path of the third turning mirror (204) (204) and the center of the optical path of the fourth turning mirror (205) (205) on the same plane in the direction parallel to the Y1 axis;

initially arranging a center-off-center aligner A4 and a center-off-center aligner A5; the interval distance between the center deviation self-aligning instrument A4 and the center deviation self-aligning instrument A5 is x2, wherein x2 is the distance between the optical path centers of the first turning mirror (201) (201) and the second turning mirror (203) (203) of the rolling mirror group (2) of the optical system and the optical path center of the offset mirror group (3);

initially arranging a center-off-center aligner A7 and a center-off-center aligner A8; the interval distance between the center deviation self-aligning instrument A7 and the center deviation self-aligning instrument A8 is x3, and x3 is the distance between the optical path centers of the first turning mirror (201) (201) and the second turning mirror (203) (203) of the rolling mirror group (2) of the optical system and the optical path center of the laser mirror group (3) turned back by the seventh turning mirror (506).

8. A method for adjusting an optical system according to claim 7, wherein the rolling mirror group (2) is adjusted in the following manner:

a center deviation autocollimator A2 and a center deviation autocollimator A3 which are orthogonal with the X1 axis are arranged on the position which is away from the X1 axis X1 on the adjustment reference plane by utilizing the autocollimator principle, and the center axis of the center deviation autocollimator A3 is the Y2 axis;

a fourth laser infrared shared correction lens (206) is installed by using a center deviation self-aligning instrument A1 on the X1 axis, so that the central axis of the fourth laser infrared shared correction lens (206) is coaxial with the X1 axis;

a third laser infrared shared correction lens (202) is installed by using a center deviation self-aligning instrument A2 or a center deviation self-aligning instrument A3 on the Y1 axis, so that the central axis of the third laser infrared shared correction lens (202) is coaxial with the Y1 axis;

the center deviation self-alignment instrument on the X1 axis, the X3 axis and the Y2 axis is used as a reference to install the first turning mirror (201) (201), the second turning mirror (203) (202), the third turning mirror (204) (204) and the fourth turning mirror (205) (205);

the first turning mirror (201) (201) is arranged at 45 degrees with respect to the X1 axis and the Y1 axis,

passing the reflecting surface of the first turning reflecting mirror (201) (201) through the intersection point of the X1 axis and the Y1 axis; making the second turning reflectors (203) form 45 degrees with the X3 axis and the Y1 axis, and making the reflecting surfaces of the second turning reflectors (203) (202) pass through the intersection point of the X3 axis and the Y1 axis;

making the third turning reflectors (204 ) form 45 degrees with the X3 axis and the Y2 axis, and making the reflecting surfaces of the third turning reflectors (204 ) pass through the intersection point of the X3 axis and the Y2 axis; the fourth turning mirror (205) (205) is made to be 45 degrees with respect to the X1 axis and the Y2 axis, and the reflecting surface (205) of the fourth turning mirror (205) passes through the intersection point of the X1 axis and the Y2 axis.

9. A method of adjusting an optical system according to claim 7, wherein the offset mirror group (3) is adjusted in the following manner:

a center deviation autocollimator A10 orthogonal to the X2 axis is arranged on the adjustment reference plane at a distance from the Y1 axis X2 by utilizing the autocollimation principle, and the central axis of the center deviation autocollimator A10 is taken as the Y3 axis; mounting the fifth turning mirror (301) (301) and the sixth turning mirror (302) (302) by using the center misalignment meter on the X1 axis, the X2 axis and the Y3 axis as a reference, enabling the fifth turning mirror (301) (301) and the sixth turning mirror (302) (302) to form 45 degrees with the X axis and the Y axis, and enabling the reflecting (301) surface of the fifth turning mirror (301) (301) to pass through the intersection point of the X1 axis and the Y3 axis; the reflecting surface of the sixth turning mirror (302) (302) passes through the intersection point of the X2 axis and the Y3 axis.

10. The tuning optical system tuning method as claimed in claim 7, wherein the tuning method of the laser lens group (3) is as follows:

after the front optical wedge lens (504) and the rear optical wedge lens (505) are processed, coated and detected, a motor, a driver, a bearing and a code disc are packaged to form a double-optical-wedge scanning module;

a first laser lens (501), a second laser lens (502), a third laser lens (503) and a fourth laser lens (507) are sequentially arranged by taking a center deviation self-aligning instrument A10 on an X2 axis as a reference, so that the lens centers of the first laser lens (501), the second laser lens (502), the third laser lens (503) and the fourth laser lens (507) are coaxial on the X2 axis;

a center deviation self-alignment A8 and a center deviation self-alignment A9 which are orthogonal to the X2 axis are arranged on the position, which is away from the X3 axis, of the Y1 axis on the adjustment reference plane by utilizing the self-alignment principle, and the central axes of the center deviation self-alignment A8 and the center deviation self-alignment A9 are taken as Y4 axes; the center of the laser focusing mirror (509) and the lens center of the laser detector photosensitive surface (510) are coaxial on the Y4 axis by using the center deviation autocollimator A8 on the Y4 axis and the center deviation autocollimator A9 as a reference, and installing the laser focusing mirror (509) and the laser detector photosensitive surface (510);

assembling a seventh turning reflector (506) by utilizing an auto-collimation principle, so that the seventh turning reflector (506) forms 45 degrees with an X2 axis and a Y4 axis, and the reflecting surface of the seventh turning reflector (506) passes through the intersection point of the X2 axis and the Y4 axis;

a dual wedge scanning module is incorporated between the third laser lens (503) and the seventh turning mirror (507).

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