CN110899960A - Error compensation method for spiral scanning laser processing head flat glass - Google Patents
Error compensation method for spiral scanning laser processing head flat glass Download PDFInfo
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- CN110899960A CN110899960A CN201911150519.7A CN201911150519A CN110899960A CN 110899960 A CN110899960 A CN 110899960A CN 201911150519 A CN201911150519 A CN 201911150519A CN 110899960 A CN110899960 A CN 110899960A
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- flat glass
- laser processing
- processing head
- scanning laser
- spiral scanning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention belongs to the field of laser precision manufacturing, and particularly relates to an error compensation method for spiral scanning laser processing head flat glass, which gets rid of the dependence of a laser processing head on high-precision flat glass manufacturing. The error compensation of the flat glass can be realized by adjusting the rotary optical wedge group, and the method is suitable for the error compensation of the flat glass in all spiral scanning laser processing head systems and has universality.
Description
Technical Field
The invention belongs to the field of laser precision manufacturing, and relates to an error compensation method for spiral scanning laser processing head flat glass.
Background
At present, a spiral scanning track of laser on a workpiece surface is obtained through high-speed rotation of a plurality of groups of optical elements, and then a micropore with high quality, high precision and controllable taper is the most common processing mode in the field of laser micromachining. The spiral scanning laser processing head is a typical device of the technology in engineering application, the interior of the spiral scanning laser processing head comprises a plurality of optical components, namely flat glass, a rotary optical wedge group and a focusing lens, and the combined motion of the optical components realizes the spiral scanning tracks with different diameters and controllable spatial inclination angles of light beams in space, so that the micro-hole processing with different tapers and different apertures is realized.
In the whole optical system of the spiral scanning laser processing head, light beams can generate certain translation after passing through the upper surface and the lower surface of flat glass, and then change the inclination angle of the light beams relative to the surface normal of a workpiece under the convergence action of a focusing lens, so that micropore patterns with different tapers are realized. In the process, if the upper surface and the lower surface of the flat glass are not parallel, the incident light beam is not parallel to the emergent light beam, and the taper of the micropore is further influenced, so that the parallelism difference of the flat glass is a key factor influencing the taper of the micropore. Therefore, in order to obtain a high-precision micropore pattern, it is necessary to strictly control the parallelism difference of the surface of the plate glass. At present, the high-precision plate glass generally needs to be ground by hands of a high-grade optical technician, the parallelism error of the manufactured plate glass is about 10 ″, the ideal plate glass state without error can not be achieved basically, and the high-precision plate glass has long manufacturing period, low yield, poor stability and high price.
Disclosure of Invention
The invention aims to provide an error compensation method for spiral scanning laser processing head flat glass, which can solve the problem that the parallel difference of the flat glass has influence on the taper of a micropore without manufacturing the high-precision flat glass. The method can realize the error compensation of the spiral scanning laser processing head flat glass, provides guarantee for the high-precision micropore type manufacturing, and thoroughly gets rid of the dependence of the laser processing head on the high-precision flat glass manufacturing.
The technical scheme of the invention is to provide an error compensation method for spiral scanning laser processing head flat glass, which comprises the following steps:
the method comprises the following steps that firstly, before the installation of the flat glass, the rotary optical wedge group and the focusing lens, a plane reflecting mirror is arranged in the light path of the spiral scanning laser processing head, so that the plane reflecting mirror is perpendicular to the optical axis direction of the spiral scanning laser processing head;
aligning an auto-collimation telescope with the plane reflector along the direction of the optical axis of the spiral scanning laser processing head to enable an auto-collimation image to be superposed with the cross hairs on the reticle;
step three, mounting the flat glass and the rotary optical wedge group into a light path of the spiral scanning laser processing head as a whole, and placing the flat glass and the rotary optical wedge group between the auto-collimation telescope and the plane reflector;
observing the distance between an auto-collimation image formed by a light beam after passing through the flat glass and the rotary optical wedge group and the cross wire on the reticle in the second step through an auto-collimation telescope so as to judge the parallel difference of the upper surface and the lower surface of the flat glass to be compensated;
adjusting the relative included angle of the rotary light wedge group, observing through an auto-collimation telescope until an auto-collimation image obtained after adjusting the relative included angle of the rotary light wedge group is superposed with the cross hairs on the reticle in the second step;
and step six, fixing the flat glass and adjusting the rotating optical wedge group after the wedge angle, and completing the compensation of the parallel difference of the flat glass of the spiral scanning laser processing head.
Further, the wedge angle of the rotary optical wedge set is adjusted through manual adjustment.
The invention has the beneficial effects that:
1. the error compensation method for the spiral scanning laser processing head flat glass can solve the problem of low micropore type precision caused by poor parallelism of the flat glass of the existing spiral scanning laser processing head, and gets rid of the dependence of the laser processing head on the manufacture of the high-precision flat glass;
2. the method can realize the error compensation of the flat glass skillfully by adjusting the rotary optical wedge group, has simple operation method, is easy to realize, is suitable for the error compensation of the flat glass in all spiral scanning laser processing head systems, and has universality;
3. the final processing precision of the invention does not depend on the state of the plate glass, the error compensation of the plate glass can be realized by adjusting the rotary optical wedge group, the processing precision is high, and the stability is high;
4. the method only needs to introduce the auto-collimation telescope and the plane reflector, thereby reducing the processing cost of the micropore.
Drawings
FIG. 1 is a view of various optical components of a spiral scanning laser machining head;
FIG. 2 is a diagram of a hardware structure implemented by the compensation method in the embodiment of the present invention;
FIG. 3 is a graph showing the distance separating the auto-collimated image formed after passing through a flat glass plate and the reticle cross in the example of the present invention;
the reference numbers in the figures are: 1-plate glass, 2-rotating optical wedge group, 3-focusing lens, 4-plane reflector, 5-optical axis, 6-autocollimation telescope;
Detailed Description
The present invention will be described in detail below with reference to embodiments shown in the drawings. These embodiments are not intended to limit the present invention, and structural, methodological, or functional changes made by those skilled in the art according to these embodiments are included in the scope of the present invention.
Fig. 1 shows the components of a module of a helical scanning laser processing head in the prior art, which comprises a flat glass 1, a rotary optical wedge group 2 and a focusing lens 3 in sequence along the propagation direction of a light beam. Because the flat glass has manufacturing errors, particularly the parallelism error index of the flat glass is a key factor influencing the taper of the micropores, the method compensates the flat glass around the spiral scanning laser processing head, thereby improving the precision of the hole pattern for manufacturing the micropores and getting rid of the dependence of the laser processing head on the manufacture of the high-precision flat glass.
As shown in fig. 2, the spiral scanning laser processing head of the present invention includes a rotary optical wedge set 2 and a flat glass 1 sequentially arranged along a light path, and error compensation of the flat glass can be achieved by adjusting a relative included angle of the rotary optical wedge set 2.
The specific compensation method comprises the following steps:
1. before the spiral scanning laser processing head is provided with the flat glass 1 and the rotary optical wedge group 2, the plane reflecting mirror 4 is arranged in an optical system of the spiral scanning laser processing head, so that the plane reflecting mirror is perpendicular to an optical axis 5.
2. The autocollimator telescope 6 is aligned with the plane mirror 4 in the direction of the optical axis of the helical scanning laser machining head (from left to right in the drawing).
3. The flat glass 1 and the rotating wedge group 2 are installed as a whole in the optical path system of the helical scanning laser processing head and are placed between the plane mirror 4 and the autocollimation telescope 6, as shown in fig. 2.
4. The distance separating the autocollimation images formed after the light beams pass through the plate glass 1 is observed through the autocollimation telescope 6, as shown in figure 3, so as to judge the parallel difference of the upper surface and the lower surface of the plate glass 1 to be compensated. In this embodiment, the rotating optical wedge set 2 is a rotating optical wedge set with an adjustable wedge angle, the initial wedge angle is 0.2 °, and the rotating optical wedge set 2 is manually adjusted until the auto-collimation images coincide.
5. And fixing the flat glass 3 and rotating the optical wedge group 2 to complete the compensation of the parallelism difference of the flat glass 3 of the spiral scanning laser processing head.
Claims (2)
1. An error compensation method for flat glass of a spiral scanning laser processing head is characterized by comprising the following steps:
the method comprises the following steps that firstly, before the installation of the flat glass, the rotary optical wedge group and the focusing lens, a plane reflecting mirror is arranged in the light path of the spiral scanning laser processing head, so that the plane reflecting mirror is perpendicular to the optical axis direction of the spiral scanning laser processing head;
aligning an auto-collimation telescope with the plane reflector along the direction of the optical axis of the spiral scanning laser processing head to enable an auto-collimation image to be superposed with the cross hairs on the reticle;
step three, mounting the flat glass and the rotary optical wedge group into a light path of the spiral scanning laser processing head as a whole, and placing the flat glass and the rotary optical wedge group between the auto-collimation telescope and the plane reflector;
observing the distance between an auto-collimation image formed by the light beam after passing through the flat glass and the rotary optical wedge group and the cross wire of the reticle in the second step through an auto-collimation telescope so as to judge the parallel difference of the upper surface and the lower surface of the flat glass to be compensated;
adjusting the relative included angle of the rotary light wedge group, observing through an auto-collimation telescope until an auto-collimation image obtained after adjusting the relative included angle of the rotary light wedge group is superposed with the cross hairs of the reticle in the second step;
and step six, fixing the flat glass and adjusting the rotating optical wedge group after the wedge angle, and completing the compensation of the parallel difference of the flat glass of the spiral scanning laser processing head.
2. The error compensation method of a spiral scanning laser processing head plate glass as claimed in claim 1, wherein: the wedge angle of the rotary optical wedge set is adjusted through manual adjustment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911150519.7A CN110899960A (en) | 2019-11-21 | 2019-11-21 | Error compensation method for spiral scanning laser processing head flat glass |
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| CN201911150519.7A CN110899960A (en) | 2019-11-21 | 2019-11-21 | Error compensation method for spiral scanning laser processing head flat glass |
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| CN110899960A true CN110899960A (en) | 2020-03-24 |
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| CN201911150519.7A Pending CN110899960A (en) | 2019-11-21 | 2019-11-21 | Error compensation method for spiral scanning laser processing head flat glass |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114227028A (en) * | 2021-12-29 | 2022-03-25 | 中国科学院西安光学精密机械研究所 | Spiral scanning laser punching head and punching method |
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| US20130175243A1 (en) * | 2012-01-11 | 2013-07-11 | The Ex One Company, Llc | Laser Drilling and Trepanning Device |
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| CN106681098A (en) * | 2017-02-10 | 2017-05-17 | 中国科学院西安光学精密机械研究所 | Image-face abutting device and method of high-precision visible light imaging system |
| CN108152013A (en) * | 2017-12-28 | 2018-06-12 | 西安应用光学研究所 | Electro-optical system pointing accuracy measuring device light path adjusting process |
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2019
- 2019-11-21 CN CN201911150519.7A patent/CN110899960A/en active Pending
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| CN101762248A (en) * | 2010-03-02 | 2010-06-30 | 西安昂科光电有限公司 | Multi-target photoelectric autocollimator |
| CN103261838A (en) * | 2010-12-02 | 2013-08-21 | 莱卡地球系统公开股份有限公司 | Robotic surveying instrument and method for the automated autocollimation of a telescope of a surveying instrument comprising an autocollimation target |
| US20130175243A1 (en) * | 2012-01-11 | 2013-07-11 | The Ex One Company, Llc | Laser Drilling and Trepanning Device |
| CN106681098A (en) * | 2017-02-10 | 2017-05-17 | 中国科学院西安光学精密机械研究所 | Image-face abutting device and method of high-precision visible light imaging system |
| CN108152013A (en) * | 2017-12-28 | 2018-06-12 | 西安应用光学研究所 | Electro-optical system pointing accuracy measuring device light path adjusting process |
| CN109164553A (en) * | 2018-10-18 | 2019-01-08 | 西安脉科莱斯光电科技有限公司 | Laser revolves the error compensation system and method for sweeping optical device isosceles trapezoid prism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114227028A (en) * | 2021-12-29 | 2022-03-25 | 中国科学院西安光学精密机械研究所 | Spiral scanning laser punching head and punching method |
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